JPH0827297B2 - Cleaning solution for probe for probe card and cleaning apparatus using the same - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a probe card professional.
Used when cleaning foreign matter such as abrasive grains attached to the tip of the probe
Cleaning solution for probe card and the cleaning
Related to a probe card probe cleaning device that uses a liquid.
I do.

[0002]

2. Description of the Related Art Various foreign substances adhere to a probe for a probe card during the manufacturing process of the probe card. The foreign matters include plastic scraps for accurately holding the probe for probe card, abrasive grains and metal scraps polished from the probe for probe card, oil of the hand of the operator, dust and the like. The probe for a probe card to which these foreign matters adhere may come into contact with each other and short-circuit. The short circuit of the probe for the probe card hinders accurate electrical characteristics of the semiconductor integrated circuit which is the measurement object. Therefore,
Conventionally, foreign matter attached to a probe for a probe card is cleaned by ultrasonic cleaning in which the probe for a probe card is immersed in a solvent such as water or chlorofluorocarbon.

[0003]

However, the above-mentioned conventional ultrasonic cleaning method has the following problems. That is, some of the foreign substances attached to the tip of the probe for the probe card cannot be cleaned without performing strong ultrasonic cleaning. If strong ultrasonic cleaning is performed in order to clean such foreign matter, the tip of the probe for probe card may be plastically deformed and displaced from a predetermined position.

The present invention was devised in view of the above circumstances.
To plastically deform the tip of the probe for the probe card.
Probe card that can clean foreign objects without
PROBLEM TO BE SOLVED: To provide a cleaning solution for a probe and a cleaning device using the cleaning solution.
The purpose is to

The probe card probe according to the present invention
The cleaning liquid adhered to the tip of the probe for the probe card.
A cleaning solution for the probe for probe cards that cleans foreign matter.
Consists of methanol, pure water and hydrogen peroxide.
ing.

A probe card probe according to the present invention
The cleaning device is attached to the tip of the probe for the probe card.
Cleaning device for probe card for cleaning foreign matter
And consists of methanol, pure water, and hydrogen peroxide.
A cleaning liquid, an electrode immersed in the cleaning liquid, and the cleaning liquid
Probe card probe with at least the tip immersed in
And a DC power supply connected between the electrode and the electrode.
The probe for the probe card is the cathode of the DC power supply.
However, the anodes of the DC power supply are connected to the electrodes, respectively.
I have.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG . 1 is a probe card probe according to the present invention.
It is a block diagram which shows the schematic structure of the cleaning apparatus of a bud.

Of the probe for the probe card according to the present invention
The cleaning device is the tip 5 of the probe 500 for the probe card.
Probe card prober for cleaning foreign substances adhering to 10
It is a cleaning device for methanol, pure water and hydrogen peroxide.
A cleaning liquid 100 consisting of water and immersed in this cleaning liquid 100
The electrode 200 and the cleaning liquid 100 at least
Probe 500 for probe card with end 510 immersed
And a DC power supply 300 connected between the electrode 200 and
And the probe 500 for a probe card is
The cathode 320 of the DC power supply 300 is directly connected to the electrode 200.
The anodes 310 of the current source 300 are connected to each other.

The cleaning liquid 100 is prepared by adding 900 ml of pure water and 1 ml of 3% hydrogen peroxide solution to 100 ml of methanol and is stored in the water tank 400.

The electrode 200 is plated with platinum, for example.
Bottom of the water tank 400, which is made of nickel or titanium
It is provided in the section. This electrode 200 is connected to the DC power source 30.
0 anode 310.

On the other hand, the cathode 320 of the DC power supply 300 is washed.
Contact the probe card probe 500, which is the object of purification.
Has been continued. Probe 500 for such probe card
Has its tip 510 immersed in the cleaning liquid 100.

In this state, a voltage of about 80 V is applied between the electrode 200 and the probe 500 for the probe card. Then, the tip 5 of the probe 500 for the probe card
From 10, hydrogen is generated as bubbles. By applying this voltage, the probe 50 for the probe card is extremely mild.
This means that the probe card probe 500 was added to the electrolytic polishing at a level where the weight loss of 0 cannot be measured.

By such electropolishing, no physical external force that deforms the probe card probe 500 is applied, and therefore the tip 510 of the probe card probe 500 is not deformed. Although a slight physical external force is applied by the generation of hydrogen bubbles, the tip 510 of the probe 500 for a probe card is not deformed.

When the cleaning is completed, the methanol at the tip 510 of the probe for probe card 500 is evaporated by heating.

Thus, methanol, pure water, and peroxide water
A cleaning liquid 100 composed of pure water is used, and a DC power source 30
0 anode 310 as electrode 200 and anode 320 as probe
A probe card probe connected to the card probe 100.
A probe for a probe card that is a cleaning device for a lobe
After cleaning (electropolishing) the tip 510 of the 500,
Clean the probe card probe 500 with pure water etc.
There is no need to remove the
The oven 500 can be dried.

[0016]

EFFECT OF THE INVENTION Probe for probe card according to the present invention
The cleaning device for the probe card probe
Cleaning foreign matter by electropolishing the tip of the knob
Therefore, the probe card
Does not plastically deform the lobe tip. Also,
The probe cleaning solution for the probe card
The anode of the DC power supply is connected to the probe for
Probe for probe card to connect each source cathode
When used in a cleaning device, the tip of the probe for the probe card
After cleaning (electropolishing) the edges, use a probe card
It is not necessary to wash the tube with pure water to remove alkali.
And immediately dry the probe for the probe card.
Is possible.

[Brief description of drawings]

FIG. 1 Cleaning of a probe for a probe card according to the present invention
It is a block diagram which shows the schematic structure of an apparatus.

[Explanation of symbols]

100 cleaning liquid 200 electrode 300 DC power supply 500 probe card probe 510 tip (of probe card probe)

Claims (2)

[Claims] 1. Attached to the tip of a probe for a probe card
Cleaning solution for probe card for cleaning foreign matter
In, consists of methanol, pure water and hydrogen peroxide
A cleaning solution for a probe for a probe card, which is characterized in that 2. Attached to the tip of a probe for a probe card
A cleaning device for the probe for the probe card to clean the foreign matter
In the storage, make sure that the
Cleaning liquid, electrodes immersed in this cleaning liquid, and the cleaning
A probe card professional with at least its tip immersed in liquid
And a DC power source connected between the electrode and the electrode.
The probe for the probe card is a
And the positive electrode of the DC power source is connected to the electrodes.
The cleaning of the probe for the probe card is characterized by
Purifier.