JPH0831646B2 - Optical frequency modulator - Google Patents
Optical frequency modulatorInfo
- Publication number
- JPH0831646B2 JPH0831646B2 JP8808789A JP8808789A JPH0831646B2 JP H0831646 B2 JPH0831646 B2 JP H0831646B2 JP 8808789 A JP8808789 A JP 8808789A JP 8808789 A JP8808789 A JP 8808789A JP H0831646 B2 JPH0831646 B2 JP H0831646B2
- Authority
- JP
- Japan
- Prior art keywords
- current
- injection
- modulation
- layer region
- modulated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
- H01S5/0625—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes in multi-section lasers
- H01S5/06255—Controlling the frequency of the radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
- H01S5/0625—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes in multi-section lasers
- H01S5/06255—Controlling the frequency of the radiation
- H01S5/06256—Controlling the frequency of the radiation with DBR-structure
Landscapes
- Semiconductor Lasers (AREA)
Description
【発明の詳細な説明】 (産業上の利用分野) 本発明は、光ファイバ通信や光計測等に利用される周
波数変調された光を発生する光周波数変調装置に関する
ものである。Description: TECHNICAL FIELD The present invention relates to an optical frequency modulator for generating frequency-modulated light used for optical fiber communication, optical measurement, and the like.
(従来の技術) 光周波数変調(光FSK)通信方式や、周波数変調され
た光を利用する光センサ、誤差信号に応じて光周波数を
制御する発振周波数制御装置等においては、単一モード
で発振しているレーザの光周波数を、与えられた信号、
いわゆる変調信号に応じて変化させることが必要であ
る。(Prior art) Optical frequency modulation (optical FSK) communication method, optical sensors that use frequency-modulated light, oscillation frequency control devices that control the optical frequency according to error signals, etc. The optical frequency of the laser
It is necessary to change it according to the so-called modulated signal.
ここで、変調信号が周波数f(変調周波数)の正弦波
振動である場合には、得られる光(被変調光)の周波数
も周波数fで正弦波状に変化することになる。この時、
被変調光の周波数変化の振幅(周波数偏移量;以下、FM
振幅という)と、変調信号の位相と被変調光の周波数が
正弦波状に変化する際の位相の関係(以下、FM位相とい
う)を、変調周波数fの関数として捉えることができ
る。以下、これらを周波数変調特性と総称し、それぞれ
FM振幅特性及びFM位相特性と称することにする。Here, when the modulation signal is sinusoidal vibration of frequency f (modulation frequency), the frequency of the obtained light (modulated light) also changes sinusoidally at frequency f. This time,
Amplitude of frequency change of modulated light (frequency shift amount; hereinafter FM
The relationship between the phase of the modulation signal and the phase when the frequency of the modulated light changes sinusoidally (hereinafter referred to as the FM phase) can be grasped as a function of the modulation frequency f. Hereinafter, these are collectively referred to as frequency modulation characteristics.
These are referred to as FM amplitude characteristic and FM phase characteristic.
半導体レーザは、その注入電流に変調電流を重畳する
ことによって、発振周波数を変調することができるとい
う利点を有する。特に、回折格子を内蔵した分布反射型
半導体レーザ(以下、DBR−LDという)や分布帰還型半
導体レーザ(以下、DFB−LDという)では、注入電流に
よる周波数変調時にも、安定な単一モードでの発振が可
能である(動的単一モードレーザ)。The semiconductor laser has an advantage that the oscillation frequency can be modulated by superimposing a modulation current on the injection current. In particular, distributed reflection semiconductor lasers (hereinafter referred to as DBR-LDs) and distributed feedback semiconductor lasers (hereinafter referred to as DFB-LDs) with a built-in diffraction grating provide stable single-mode operation even during frequency modulation by injection current. Can be oscillated (dynamic single-mode laser).
第2図は、DBR−LDを用いた従来の光周波数変調装置
を示す構成図である(例えば、IEEE Journal of Quanta
m Electronics,Vol.QE−23,No.6,pp.835−838,1987 S.M
urata et.al.,“Spectral Characteristics for a 1.5
μm DBR Laser with Frequency−Turning Region."参
照)。FIG. 2 is a block diagram showing a conventional optical frequency modulator using a DBR-LD (for example, IEEE Journal of Quanta
m Electronics, Vol.QE-23, No.6, pp.835-838,1987 SM
urata et.al., “Spectral Characteristics for a 1.5
μm DBR Laser with Frequency-Turning Region. ").
第2図において、10はDBR−LDで、誘導放出によって
光を生じる活性層領域11と、回折格子が形成され、回折
格子によって波長選択的に反射光を生じる非活性層領域
12と、活性層領域11への電流注入用電極13と、非活性層
領域12への制御電流注入用電極14とを有している。15は
注入電流供給装置で、電極13に注入電流Iaを供給し、か
つ、変調信号入力端子16に入力した変調信号に基づい
て、注入電流Iaに変調電流を重畳し、注入電流Iaの値を
変化させる。17は制御電流供給装置で、電極14に制御電
流Igを供給し、かつ、変調信号入力端子18に入力した変
調信号に基づいて、制御電流Igに変調電流を重畳し、制
御電流Igの値を変化させる。In FIG. 2, reference numeral 10 denotes a DBR-LD, which is an active layer region 11 which produces light by stimulated emission and an inactive layer region which forms a diffraction grating and which selectively reflects light by the diffraction grating.
12, an electrode 13 for injecting a current into the active layer region 11, and an electrode 14 for injecting a control current into the inactive layer region 12. 15 is an injection current supply device, which supplies the injection current Ia to the electrode 13 and, based on the modulation signal input to the modulation signal input terminal 16, superimposes the modulation current on the injection current Ia to obtain the value of the injection current Ia. Change. Reference numeral 17 is a control current supply device, which supplies the control current Ig to the electrode 14 and, based on the modulation signal input to the modulation signal input terminal 18, superimposes the modulation current on the control current Ig to change the value of the control current Ig. Change.
このような構成においては、活性層領域11に電極13を
介して注入電流Iaを注入することにより、DBR−LD10は
発振して出力光Poutを生じる。一方、非活性層領域12に
電極14を介して制御電流Igを注入すると、キャリアのプ
ラズマ効果によって非活性層領域12の屈折率が変化し、
発振周波数を変化させることができる。In such a configuration, by injecting the injection current Ia into the active layer region 11 via the electrode 13, the DBR-LD 10 oscillates to generate the output light Pout. On the other hand, when the control current Ig is injected into the inactive layer region 12 through the electrode 14, the refractive index of the inactive layer region 12 changes due to the plasma effect of carriers,
The oscillation frequency can be changed.
ここで、変調信号入力端子16もしくは18に変調信号を
入力することにより、注入電流Iaもしくは制御電流Igに
変調電流が重畳され、これにより、周波数変調された光
Poutを取り出すことができる。Here, by inputting the modulation signal to the modulation signal input terminal 16 or 18, the modulation current is superposed on the injection current Ia or the control current Ig, whereby the frequency-modulated optical signal is generated.
You can take out Pout.
第3図及び第4図は、第2図の光周波数変調装置の光
周波数変調特性の測定例を示す図であって、第3図は変
調信号入力端子16に変調信号を入力した場合(注入電流
Iaに変調電流を重畳)、第4図は変調信号入力端子18に
変調信号を入力した場合(制御電流Igに変調電流を重
畳)の特性を示している。また、第3図及び第4図の
(a)がFM振幅特性を、両図の(b)がFM位相特性を示
しており、変調周波数に対応する横軸は、300KHzから3G
Hzまでを対数目盛で示している。FIGS. 3 and 4 are diagrams showing an example of measuring the optical frequency modulation characteristic of the optical frequency modulator of FIG. 2, and FIG. 3 shows the case where a modulation signal is input to the modulation signal input terminal 16 (injection). Electric current
FIG. 4 shows the characteristics when the modulation signal is input to the modulation signal input terminal 18 (the modulation current is superimposed on the control current Ig). Further, (a) of FIGS. 3 and 4 shows the FM amplitude characteristic, and (b) of both figures shows the FM phase characteristic. The horizontal axis corresponding to the modulation frequency is from 300 KHz to 3G.
Up to Hz is shown on a logarithmic scale.
第2図の装置において、注入電流Iaを変調した場合
(第3図)、低い変調周波数では、熱の効果によって注
入電流Iaが増加するときには、発振周波数が低い方へ変
化する向きに周波数変調がかかる(このFM位相をπと定
義し、以後これをレッドシフトの周波数変調と称す)。
ところが、熱の効果は時定数が大きいため、変調周波数
の増加とともに、この原理に基づくFM振幅は減少する。In the device of FIG. 2, when the injection current Ia is modulated (FIG. 3), at a low modulation frequency, when the injection current Ia increases due to the effect of heat, frequency modulation is performed in the direction in which the oscillation frequency changes to the lower side. This is done (this FM phase is defined as π, and this is hereinafter referred to as redshift frequency modulation).
However, since the effect of heat has a large time constant, the FM amplitude based on this principle decreases as the modulation frequency increases.
これに対して、注入電流Iaが増加することにより、キ
ャリア数が増加して活性層領域11の屈折率が減少し、発
振周波数が高い方へ変化するという原理に基づく周波数
変調も存在する。このキャリアの効果による周波数変調
は、上記した熱の効果による発振周波数の変化と逆の向
き(FM位相零)であり、ブルーシフトの周波数変調と称
される。On the other hand, there is also frequency modulation based on the principle that the injection current Ia increases, the number of carriers increases, the refractive index of the active layer region 11 decreases, and the oscillation frequency changes to the higher side. The frequency modulation due to the effect of the carrier is in the opposite direction (FM phase zero) to the change of the oscillation frequency due to the effect of heat described above, and is referred to as frequency modulation of blue shift.
このため、第3図の(b)に示すように、変調周波数
の増加とともにFM位相特性は反転してしまう。また、一
般に、DBR−LD10は、活性層領域11に回折格子を内蔵し
ていないため、第3図の(a)に示すように、キャリア
の効果によるFM振幅は小さくFM振幅特性は平坦にはなら
ない。Therefore, as shown in FIG. 3 (b), the FM phase characteristic is inverted as the modulation frequency is increased. Further, in general, since the DBR-LD 10 does not have a built-in diffraction grating in the active layer region 11, the FM amplitude due to the effect of carriers is small and the FM amplitude characteristic is flat as shown in FIG. 3 (a). I won't.
一方、制御電流Igを変調した場合(第4図)、変調さ
れた電流が注入される領域が非活性層領域12であるた
め、熱の効果に比べてキャリアの効果によるFM振幅が大
きく、第4図の(a)に示すように、平坦なFM振幅特性
と、同図の(b)に示すように、位相回転のない、ブル
ーシフトのFM位相特性を得ることができる。On the other hand, when the control current Ig is modulated (FIG. 4), the region where the modulated current is injected is the inactive layer region 12, so that the FM amplitude due to the effect of carriers is larger than that due to the effect of heat. It is possible to obtain a flat FM amplitude characteristic as shown in FIG. 4A and a blue shift FM phase characteristic without phase rotation as shown in FIG. 4B.
この場合、非活性層領域12に変調をかけているため、
自然放出に基づくキャリアの寿命(1〜3ns)によって
変調帯域が制限され、6dB帯域幅は2〜300MHzに留まっ
ている。In this case, since the non-active layer region 12 is modulated,
The modulation band is limited by the carrier lifetime (1 to 3 ns) based on spontaneous emission, and the 6 dB bandwidth remains at 2 to 300 MHz.
また、第5図は3電極DFB−LDを用いた従来の光周波
数変調装置を示す構成図である(例えば、IEEE/OSA Jou
rnal of Lightwave Technology,Vol.LT−5,No.4,pp.516
−522,1987,Y.Yoshikuni et.al.,“Multielectrode Dis
tributed Feedback Laser for Pure Frequency Modulat
ion and Chirping Suppressed Amplitunde Modulatio
n,"参照。) 第5図において、20はDFB−LDで、回折格子が形成さ
れた活性層領域21と、活性層領域21への電流注入用電極
22,23,24を有している。25は注入電流供給装置で、電極
23に注入電流Ia1を供給し、かつ、変調信号入力端子26
に入力した変調信号に基づいて、注入電流Ia1に変調電
流を重畳し、注入電流Ia1の値を変化させる。同様に、2
7は注入電流供給装置で、電極22及び24に注入電流Ia2を
供給し、かつ、変調信号入力端子28に入力した変調信号
に基づいて、注入電流Ia2に変調電流を重畳し、注入電
流Ia2の値を変化させる。FIG. 5 is a block diagram showing a conventional optical frequency modulator using a 3-electrode DFB-LD (for example, IEEE / OSA Jou.
rnal of Lightwave Technology, Vol.LT-5, No.4, pp.516
−522,1987, Y. Yoshikuni et.al., “Multielectrode Dis
tributed Feedback Laser for Pure Frequency Modulat
ion and Chirping Suppressed Amplitunde Modulatio
In FIG. 5, reference numeral 20 denotes a DFB-LD, which is an active layer region 21 in which a diffraction grating is formed and an electrode for current injection into the active layer region 21.
It has 22,23,24. 25 is an injection current supply device, which is an electrode
The injection current Ia1 is supplied to 23 and the modulation signal input terminal 26
The modulation current is superimposed on the injection current Ia1 on the basis of the modulation signal input to, and the value of the injection current Ia1 is changed. Similarly, 2
7 is an injection current supply device, which supplies the injection current Ia2 to the electrodes 22 and 24, and based on the modulation signal input to the modulation signal input terminal 28, superimposes the modulation current on the injection current Ia2, Change the value.
このような構成においては、回折格子を内蔵する活性
層領域21に3分割された電極22,23,24を介して注入電流
Ia1及びIa2を注入することによって、DFB−LD20は発振
して出力光Poutを生じる。In such a configuration, the injection current is injected through the electrodes 22, 23, 24 divided into three into the active layer region 21 containing the diffraction grating.
By injecting Ia1 and Ia2, the DFB-LD 20 oscillates to generate the output light Pout.
ここで、注入電流Ia1及びIa2の比率及び大きさを適当
に選定し、変調信号入力端子26もしくは28に変調信号を
入力することにより、注入電流Ia1もしくは注入電流Ia2
に変調電流が重畳され、これにより、周波数変調された
光Poutを取り出すことができる。Here, by appropriately selecting the ratio and magnitude of the injection currents Ia1 and Ia2 and inputting the modulation signal to the modulation signal input terminal 26 or 28, the injection current Ia1 or the injection current Ia2 is obtained.
A modulation current is superposed on, and thereby the frequency-modulated light Pout can be taken out.
第6図は、第5図の光周波数変調装置の光周波数変調
特性を示す図であって、第6図の(a)がFM振幅特性
を、第6図の(b)がFM位相特性を示しており、変調周
波数に対応する横軸は100Hzから1GHzまでを対数目盛で
示している。FIG. 6 is a diagram showing the optical frequency modulation characteristic of the optical frequency modulator of FIG. 5, where (a) of FIG. 6 shows the FM amplitude characteristic and (b) of FIG. 6 shows the FM phase characteristic. The horizontal axis corresponding to the modulation frequency indicates from 100 Hz to 1 GHz on a logarithmic scale.
第5図の装置において、分割された電極22,23,24への
注入電流Ia1及びIa2の比率及び大きさを最適に選択でき
れば,変調信号入力端子26または28に変調信号を入力す
ることにより、第6図に示すような、平坦なFM振幅特性
と位相回転のないブルーシフトもしくはレッドシフトの
FM位相特性を得ることができる。In the device of FIG. 5, if the ratio and magnitude of the injection currents Ia1 and Ia2 to the divided electrodes 22, 23, 24 can be optimally selected, by inputting the modulation signal to the modulation signal input terminal 26 or 28, As shown in Fig. 6, there is a flat FM amplitude characteristic and a blue shift or red shift without phase rotation.
FM phase characteristics can be obtained.
(発明が解決しようとする課題) 光FSK通信方式においては、光周波数変調装置が平坦
なFM振幅特性及びFM位相特性を有し、さらに、高い変調
周波数までそれらの特性を持続すること、即ち、広い変
調帯域を有することが重要である。前者が満たされない
と伝送特性が劣化し、また、後者が満たされなければ情
報伝送速度が制御される。加えて、光FSK通信方式を光
周波数分割多重(光FDM)方式に応用する場合等には、
同時に発振周波数の定常値を広範囲に亘って変化させ
(光周波数チューニング)得ることが望ましい。(Problems to be solved by the invention) In the optical FSK communication system, the optical frequency modulator has a flat FM amplitude characteristic and an FM phase characteristic, and further, those characteristics are maintained until a high modulation frequency, that is, It is important to have a wide modulation band. If the former is not satisfied, the transmission characteristics deteriorate, and if the latter is not satisfied, the information transmission rate is controlled. In addition, when applying the optical FSK communication method to the optical frequency division multiplexing (optical FDM) method,
At the same time, it is desirable to be able to change the steady value of the oscillation frequency over a wide range (optical frequency tuning).
しかしながら、上記したDBR−LD10を用いた装置で
は、非活性層領域12に制御電流Igを注入することによ
り、光周波数のチューニングを容易に行なうことができ
るが、平坦で、かつ広帯域な光周波数変調特性を得るこ
とができない。However, in the device using the DBR-LD10 described above, by injecting the control current Ig into the inactive layer region 12, the optical frequency can be easily tuned, but the optical frequency modulation is flat and wideband. You cannot get the characteristics.
一方、3電極DFB−LD20を用いた装置では、分割され
た電極22,23,24へのバイアス条件を最適に設定すること
ができれば、平坦で、かつ広帯域の良好な光周波数変調
特性を得ることができる。しかし、このような最適なバ
イアス条件は、変調電流が重畳された電流が注入される
活性層領域21に、回折格子が内蔵されていることに由来
する多くの要因が複雑に作用し、個々のレーザについて
系統的に設定することは困難である。On the other hand, in the device using the three-electrode DFB-LD20, if the bias conditions for the divided electrodes 22, 23, 24 can be optimally set, it is possible to obtain a good optical frequency modulation characteristic in a flat and wide band. You can However, such an optimum bias condition is complicated by many factors derived from the fact that the diffraction grating is incorporated in the active layer region 21 into which the current in which the modulation current is superimposed is injected. It is difficult to set the laser systematically.
また、発振周波数をチューニングするために、バイア
ス条件を変化させると、光周波数変調特性が劣化してし
まう事態が生じうる。In addition, if the bias condition is changed to tune the oscillation frequency, the optical frequency modulation characteristic may deteriorate.
本発明は、かかる事情に鑑みてなされたものであり、
その目的は、FM振幅特性が平坦で、かつ、FM位相特性に
位相回転のないという良好な光周波数変調特性を広い周
波数帯域に亘って有し、しかも発振周波数のチューニン
グを容易に行なうことのできる光周波数変調装置を提供
することにある。The present invention has been made in view of such circumstances,
The purpose is to have a good FM frequency characteristic that the FM amplitude characteristic is flat and that the FM phase characteristic has no phase rotation over a wide frequency band, and that the oscillation frequency can be easily tuned. An object is to provide an optical frequency modulator.
(課題を解決するための手段) 上記目的を達成するため、本発明では、活性層領域
と、回折格子を内蔵した分布反射層領域を含む非活性層
領域とを有する分布反射型半導体レーザを備えた光周波
数変調装置において、注入電流の一部を供給する注入電
流供給装置と、残りの注入電流に光周波数変調用の変調
電流を重畳して変調させた被変調注入電流を供給する被
変調注入電流供給装置と、前記活性層領域の一部に前記
注入電流を注入するための少なくとも一つの電流注入用
電極と、前記注入電流の注入領域とは異なる前記活性層
領域の残りの部分に注入電流密度が前記電流注入用電極
による注入電流密度より低くなるように前記被変調注入
電流を注入するための少なくとも一つの被変調電流注入
用電極とを備えた。(Means for Solving the Problem) In order to achieve the above object, the present invention includes a distributed reflection type semiconductor laser having an active layer region and a non-active layer region including a distributed reflection layer region having a built-in diffraction grating. In the optical frequency modulator, an injection current supply device that supplies a part of the injection current and a modulated injection current that supplies a modulated injection current that is modulated by superimposing a modulation current for optical frequency modulation on the remaining injection current A current supply device, at least one current injection electrode for injecting the injection current into a part of the active layer region, and an injection current into the remaining part of the active layer region different from the injection region of the injection current. At least one modulated current injection electrode for injecting the modulated injection current so that the density thereof is lower than the injection current density of the current injection electrode.
(作用) 本発明によれば、活性層領域に注入する電流密度が不
均一となるよう分割した電流注入用及び被変調電流注入
用の各電極に、注入電流供給装置及び被変調注入電流供
給装置により注入電流を供給すると、活性層領域に不均
一なキャリア分布が生じる。この時、被変調注入電流供
給装置により、変調電流を重畳して変調した被変調注入
電流を被変調電流注入用電極に供給すると、その部分で
生じるキャリアの効果によって、ブルーシフトの向きに
発振周波数が変化しようとする(この場合のFM振幅は、
第3図の(a)に示したように一般に小さい)。(Operation) According to the present invention, the injection current supply device and the modulation injection current supply device are provided to the respective electrodes for current injection and modulated current injection which are divided so that the current density injected into the active layer region becomes non-uniform. When an injection current is supplied by, the non-uniform carrier distribution occurs in the active layer region. At this time, when the modulated injection current supply device supplies the modulated injection current that is modulated by superimposing the modulation current to the modulated current injection electrode, due to the effect of the carrier generated at that portion, the oscillation frequency in the blue shift direction is generated. Tends to change (FM amplitude in this case is
(It is generally small as shown in FIG. 3 (a)).
一方、変調電流の重畳された被変調注入電流を活性層
領域に注入することによって、強度変調も誘起されて、
活性層領域での光子数密度が変化する。これに伴い、変
調電流の重畳されていない電流が注入された活性層領域
のキャリア密度も変化する。変調電流が増加して光強度
が増す場合、変調電流の重畳されていない電流が注入さ
れた領域のキャリア密度は減少するため、レッドシフト
の向きに発振周波数が変化しようとする。On the other hand, by injecting the modulated injection current on which the modulation current is superimposed into the active layer region, intensity modulation is also induced,
The photon number density in the active layer region changes. Along with this, the carrier density of the active layer region into which the current without the modulation current injected is also changed. When the modulation current increases and the light intensity increases, the carrier density of the region into which the current without the modulation current injected is decreased, and the oscillation frequency tends to change in the direction of red shift.
この効果によるFM振幅は、上記したように変調電流が
重畳された被変調注入電流を被変調電流注入用電極に供
給することにより、大きくすることができる。従って、
キャリアの効果によるFM位相特性を、熱の効果と同相の
レッドシフトにすることが可能となり、平坦なFM振幅特
性が実現される。この効果に関与するのは、活性層領域
のキャリアであり、その寿命は、強い誘導放出によって
等価的に短く、高い周波数まで変調をかけることができ
る。The FM amplitude due to this effect can be increased by supplying the modulated injection current on which the modulation current is superimposed to the modulated current injection electrode as described above. Therefore,
The FM phase characteristic due to the carrier effect can be red-shifted in phase with the thermal effect, and a flat FM amplitude characteristic is realized. It is the carriers in the active layer region that are responsible for this effect, whose lifetime is equivalently short due to the strong stimulated emission and can be modulated up to high frequencies.
さらに、分布反射層領域を含むので、このように、電
流を不均一に注入し、かつ、周波数変調をかけた状態で
も安定な単一モードでの発振が保持される。また、非活
性層領域に制御電流が注入されて、光周波数変調特性に
影響を与えることなく、発振周波数のチューニングが行
なわれる。Further, since the distributed reflection layer region is included, stable single-mode oscillation is maintained even when the current is nonuniformly injected and frequency modulation is applied. Further, a control current is injected into the non-active layer region, and the oscillation frequency is tuned without affecting the optical frequency modulation characteristic.
(実施例) 第1図は、本発明に係る光周波数変調装置の第1の実
施例を示す構成図である。第1図において、30はDBR−L
D(分布反射型半導体レーザ)で、誘導放出によって光
を生じる長さ300μmの活性層領域31と、回折格子が形
成され、回折格子によって波長選択的に反射光を生じる
非活性層領域(分布反射層領域)32と、活性層領域31に
後記する注入電流Ia1を注入するための長さが200μmに
設定された電流注入用電極33aと、活性層領域31に後記
する被変調注入電流IAを注入するための長さが100μm
に設定された被変調電流注入用電極33bと、非活性層領
域32に後記する制御電流Igを注入するための制御電流注
入用電極34とを有している。(Embodiment) FIG. 1 is a configuration diagram showing a first embodiment of an optical frequency modulator according to the present invention. In FIG. 1, 30 is DBR-L
In D (distributed reflection type semiconductor laser), an active layer region 31 having a length of 300 μm for generating light by stimulated emission and a diffraction grating are formed, and a non-active layer region (distributed reflection) for selectively reflecting light by the diffraction grating Layer region) 32, a current injection electrode 33a having a length set to 200 μm for injecting an injection current Ia1 described later into the active layer region 31, and a modulated injection current IA described below is injected into the active layer region 31. The length for doing is 100 μm
The modulated current injecting electrode 33b set to 1 and the control current injecting electrode 34 for injecting a control current Ig, which will be described later, into the inactive layer region 32.
35は注入電流供給装置で、電極33aに100mAの注入電流
Ia1を供給する。36は被変調注入電流供給装置で、電極3
3bに20mAの注入電流Ia2を供給するとともに、変調信号
入力端子37に入力した変調信号に基づいて、注入電流Ia
2に変調電流を重畳して変調させた被変調注入電流IAを
電流33bに供給する。38は制御電流供給装置で、電極34
に制御電流Igを供給するとともに、チューニング信号入
力端子39に入力したチューニング信号に基づいて、制御
電流Igに変調電流を重畳して制御電流Igの値を変化させ
る。Reference numeral 35 is an injection current supply device, which supplies an injection current of 100 mA to the electrode 33a.
Supply Ia1. 36 is a modulated injection current supply device, which is used for the electrode 3
The injection current Ia2 of 20 mA is supplied to 3b, and the injection current Ia2 is supplied based on the modulation signal input to the modulation signal input terminal 37.
The modulated injection current IA which is modulated by superimposing the modulation current on 2 is supplied to the current 33b. 38 is a control current supply device, which is an electrode 34
The control current Ig is supplied to the control current Ig and the modulation current is superimposed on the control current Ig based on the tuning signal input to the tuning signal input terminal 39 to change the value of the control current Ig.
なお、上記DBR−LD30としては、例えばMOVPE方で作製
されたバットジョイント型DBR−LD(Electronics Lette
rs,Vol.24,No.24,pp.1481−1483,1988,Y.Tohmori et a
l.,“NARROW LINEWIDTH AND LOW CHIRPING CHARACTERIS
TICS IN HIGH POWER OPERATING BUTT−JOINTED DBR LAS
ERS GROWN BY MOVPE."参照)により構成される。The DBR-LD30 is, for example, a butt joint type DBR-LD (Electronics Lette) manufactured by MOVPE method.
rs, Vol.24, No.24, pp.1481-1483, 1988, Y. Tohmori et a
l., “NARROW LINEWIDTH AND LOW CHIRPING CHARACTERIS
TICS IN HIGH POWER OPERATING BUTT-JOINTED DBR LAS
ERS GROWN BY MOVPE. ")).
次に、上記構成による動作を説明する。 Next, the operation of the above configuration will be described.
活性層領域31に、注入電流供給装置35により100mAの
注入電流Ia1が電極33aを介して注入されるとともに、被
変調注入電流供給装置36により変調信号入力端子37に入
力した変調信号に基づいて、20mAの注入電流Ia2に変調
電流が重畳され変調された被変調注入電流IAが注入さ
れる。これにより、活性層領域31に不均一なキャリア分
布が生じ、被変調注入電流IAが注入された流域では、
キャリアの効果によってブルーシフトの向きに発振周波
数が変化しようとする。In the active layer region 31, an injection current Ia1 of 100 mA is injected by the injection current supply device 35 through the electrode 33a, and based on the modulation signal input to the modulation signal input terminal 37 by the modulated injection current supply device 36, The modulated injection current IA, which is modulated by superimposing the modulation current on the injection current Ia2 of 20 mA, is injected. This causes a non-uniform carrier distribution in the active layer region 31, and in the basin where the modulated injection current IA is injected,
The oscillation frequency tends to change toward the blue shift due to the effect of the carrier.
また、被変調注入電流IAが注入された活性層領域31
では、強度変調も誘起されて光子密度が変化し、これに
伴い、注入電流Ia1が注入された活性層領域31のキャリ
ア密度も変化する。ここで、変調電流を増加して光強度
を増すと、注入電流Ia1が注入された活性層領域31のキ
ャリア密度が減少し、レッドシフトの向きに発振周波数
が変化しようとする。In addition, the active layer region 31 into which the modulated injection current IA is injected
Then, intensity modulation is also induced to change the photon density, and the carrier density of the active layer region 31 into which the injection current Ia1 is injected also changes accordingly. Here, when the modulation current is increased to increase the light intensity, the carrier density of the active layer region 31 into which the injection current Ia1 is injected decreases, and the oscillation frequency tends to change in the direction of red shift.
このように、2分割した電極33a,33bのうち、注入電
流Ia1を電極33aに、被変調注入電流IAを33bに供給し、
活性層領域31への電流注入密度の不釣り合いを大きくす
ることで、FM振幅を大きくすることができる。従って、
キャリアの効果によるFM位相特性を熱の効果と同相のレ
ッドシフトにすることが可能となり、平坦なFM位相特性
が実現される。Thus, of the two divided electrodes 33a and 33b, the injection current Ia1 is supplied to the electrode 33a and the modulated injection current IA is supplied to 33b,
The FM amplitude can be increased by increasing the imbalance in the current injection density into the active layer region 31. Therefore,
The FM phase characteristic due to the carrier effect can be red-shifted in the same phase as the thermal effect, and the flat FM phase characteristic is realized.
また、以上の変調には、活性層領域31のキャリアが関
与し、その寿命は強い誘導放出の効果によって等価的に
短い。従って、高い周波数領域まで変調をかけることが
できる。In addition, carriers in the active layer region 31 are involved in the above modulation, and the lifetime thereof is equivalently short due to the effect of strong stimulated emission. Therefore, modulation can be applied up to a high frequency region.
さらに、チューニング信号入力端子39に入力したチュ
ーニング信号に基づいて、変調電流が重畳された制御電
流Igを電極34に供給し、非活性層領域32に注入すること
により、光周波数特性に影響を与えることなく、発振周
波数のチューニングを行なうことができる。Further, based on the tuning signal input to the tuning signal input terminal 39, the control current Ig on which the modulation current is superimposed is supplied to the electrode 34 and injected into the inactive layer region 32, thereby affecting the optical frequency characteristic. It is possible to tune the oscillation frequency without the need.
第7図は、第1図の装置の変調信号によって副次的に
生じる光強度変調の影響をキャンセルする光周波数測定
法(岩下,“光周波数変調特性の測定装置",特願昭63−
092783号参照)を用いて測定した光周波数変調特性を示
す図である。第7図の(a)がFM振幅特性を、第7図の
(b)がFM位相特性を示しており、変調周波数に対応す
る横軸は、300KHzから3GHzまでの対数目盛で示してい
る。FIG. 7 shows an optical frequency measuring method for canceling the influence of optical intensity modulation secondary to the modulating signal of the apparatus shown in FIG. 1 (Iwashita, “Optical Frequency Modulation Characteristic Measuring Device”, Japanese Patent Application No. 63-
FIG. 10 is a diagram showing optical frequency modulation characteristics measured using No. 092783). 7 (a) shows the FM amplitude characteristic, and FIG. 7 (b) shows the FM phase characteristic, and the horizontal axis corresponding to the modulation frequency is shown on a logarithmic scale from 300 KHz to 3 GHz.
第7図から明らかなように、第3図及び第4図に基づ
いて説明した、活性層領域への電流注入用電極を分割し
ていないDBR−LDを用いた従来の装置の光周波数変調特
性と比較して、第1図の装置においては、位相回転のな
い平坦なFM位相特性(レッドシフト)と、比較的平坦な
FM振幅特性が得られ、かつ、非活性層領域32に変調をか
けた場合(第4図、6dB帯域幅2〜300MHz)と比較して
広い変調帯域(6dB帯域幅約1GHz)が得られている。As is apparent from FIG. 7, the optical frequency modulation characteristics of the conventional device using the DBR-LD in which the electrode for injecting current into the active layer region, which is described with reference to FIGS. 3 and 4, is not divided. Compared with, in the device of FIG. 1, a flat FM phase characteristic without phase rotation (red shift) and a relatively flat
FM amplitude characteristics are obtained, and a wider modulation band (6 dB bandwidth about 1 GHz) is obtained compared to the case where the inactive layer region 32 is modulated (Fig. 4, 6 dB bandwidth 2 to 300 MHz). There is.
なお、この変調帯域は、実際に試作した装置の電極の
容量(キャパシタンス)及び給電線のインダクタンスに
よって注入電流に重畳される高い周波数の変調電流が減
衰させられてしまう効果によって制限されており、電極
・給電部分の改良により、さらに変調帯域を広げること
が可能である。It should be noted that this modulation band is limited by the effect that the high-frequency modulation current superimposed on the injection current is attenuated by the capacitance of the electrodes and the inductance of the power supply line of the actually manufactured device. -It is possible to further widen the modulation band by improving the power supply section.
さらに、この時上記したようにチューニング信号入力
端子39に信号を入力して制御電流Igを変化させることに
より、第7図に示された光周波数変調特性に影響を与え
ることなく独立に発振周波数をチューニングすることが
できるが、試作した装置でも約30GHzの連続チューニン
グが可能であった。Further, at this time, as described above, by inputting a signal to the tuning signal input terminal 39 to change the control current Ig, the oscillation frequency can be independently adjusted without affecting the optical frequency modulation characteristic shown in FIG. It was possible to tune, but even the prototype device was able to tune continuously at approximately 30 GHz.
なお、電極33aと33bの役割を入れ換えても、やはり同
様な利点を持つ装置を構成することができる。また、活
性層領域31への電流注入用電極を3つ以上に分割して
も、注入電流の少ない1ないし複数の電極に変調電流を
重畳することによって同様な装置を構成することができ
る。Even if the roles of the electrodes 33a and 33b are exchanged, a device having the same advantages can be constructed. Further, even if the current injection electrode into the active layer region 31 is divided into three or more, a similar device can be constructed by superimposing the modulation current on one or a plurality of electrodes having a small injection current.
第8図は、本発明に係る光周波数変調装置の第2の実
施例を示す構成図である。本第2の実施例と前記第1の
実施例の異なる点は、非活性層領域41が、回折格子を内
蔵する分布反射層領域41aと、回折格子を内蔵しない位
相整合領域41bに分割されたDBR−LD40を用い、かつ、制
御電流注入用電極42,43を介して制御電流供給装置38か
ら供給され、抵抗R1,R2によって適当な比率で分割され
た制御電流Ig1,Ig2が分布反射層領域41a及び位相整合領
域41bにそれぞれ注入されるように構成したことにあ
る。FIG. 8 is a block diagram showing a second embodiment of the optical frequency modulator according to the present invention. The difference between the second embodiment and the first embodiment is that the inactive layer region 41 is divided into a distributed reflection layer region 41a containing a diffraction grating and a phase matching region 41b not containing a diffraction grating. Using the DBR-LD40, and supplied from the control current supply device 38 via the control current injection electrodes 42, 43, the control current Ig1, Ig2 divided by resistors R1, R2 at an appropriate ratio are distributed reflection layer regions. 41a and the phase matching region 41b, respectively.
このような構成にすることにより、制御電流Ig2のみ
を変化させる場合(第1図の構成に相当)に生じるモー
ドジャンプを、制御電流Ig1を位相整合領域41bに注入す
ることにより発振の位相条件が調整される効果によって
抑圧し、モードジャンプなく広い範囲に亘って発振周波
数を変化させることができる(例えば、日経エレクトロ
ニクス,1987.6.15,(no,423),pp.149−161,小林他,
“半導体レーザの波長を連続的に変える”)。With such a configuration, a mode jump that occurs when only the control current Ig2 is changed (corresponding to the configuration of FIG. 1) is injected into the phase matching region 41b with the control current Ig1 so that the oscillation phase condition is changed. It can be suppressed by the adjusted effect and the oscillation frequency can be changed over a wide range without mode jump (eg, Nikkei Electronics, 1987.6.15, (no, 423), pp.149-161, Kobayashi et al.,
"Continuously change the wavelength of the semiconductor laser").
一方、活性層領域31への電流注入用電極を分割するこ
とによる効果は、第1の実施例と同様の効果を得ること
ができ、第2の実施例においても良好な光周波数変調特
性が得られる。即ち、広い範囲に亘って発振周波数のチ
ューニングを行なうことができ、かつ、良好な光周波数
変調特性を有する光周波数変調装置を実現している。On the other hand, the effect of dividing the current injection electrode into the active layer region 31 is similar to that of the first embodiment, and good optical frequency modulation characteristics are obtained also in the second embodiment. To be That is, an optical frequency modulator that can tune the oscillation frequency over a wide range and that has good optical frequency modulation characteristics is realized.
なお、第8図では位相整合領域41bが活性層領域31と
分布反射層領域41aの間に配置されているが、これを活
性層領域31の左側に設けても同様な効果を有する光周波
数変調装置を構成することが可能である。In FIG. 8, the phase matching region 41b is arranged between the active layer region 31 and the distributed Bragg reflector region 41a. However, even if it is provided on the left side of the active layer region 31, the optical frequency modulation having the same effect is obtained. The device can be configured.
第9図は、本発明に係る光周波数変調装置の第3の実
施例を示す構成図である。本第3の実施例と前記第1の
実施例の異なる点は、第1の実施例では、第1図に示す
ように、図面に向かって左端が壁開による半透過鏡構成
であるDBR−LD30を用いているのに対して、第3の実施
例では、左端にも右端と同様の非活性層領域(分布反射
層領域)51を有するDBR−LD50を用い、制御電流供給装
置38からの制御電流Igを制御電流注入用電極34及び52を
介して、非活性層領域32及び51に注入するように構成し
たことにある。FIG. 9 is a block diagram showing a third embodiment of the optical frequency modulation device according to the present invention. The difference between the third embodiment and the first embodiment is that in the first embodiment, as shown in FIG. 1, the DBR- which has a semi-transparent mirror structure in which the left end in the drawing is a wall opening is shown. While the LD30 is used, in the third embodiment, the DBR-LD50 having the same inactive layer region (distributed reflection layer region) 51 as the right end is used at the left end, and the DBR-LD50 from the control current supply device 38 is used. The control current Ig is configured to be injected into the inactive layer regions 32 and 51 via the control current injection electrodes 34 and 52.
このような構成においても、チューニング信号入力端
子39にチューニング信号を入力することによって、第1
の実施例と同様に発振周波数をチューニングすることが
できる。さらに、左端に設けた非活性層領域51によって
等価的なキャビティ長が長くなるため、位相雑音の小さ
い、即ち、狭いスペクトル線幅の出力光Poutを得ること
ができる。Even in such a configuration, by inputting the tuning signal to the tuning signal input terminal 39, the first
The oscillation frequency can be tuned in the same manner as in the above embodiment. Further, since the equivalent cavity length is lengthened by the inactive layer region 51 provided at the left end, it is possible to obtain the output light Pout having a small phase noise, that is, a narrow spectral line width.
一方、活性層領域31への電流注入用電極を分割するこ
とによる効果は第1の実施例と同様の効果を得ることが
でき、第3の実施例においても、良好な光周波数変調特
性が得られる。即ち、狭いスペクトル線幅を有し、か
つ、良好な光周波数変調特性を有する光周波数変調装置
を実現している。On the other hand, the effect of dividing the current injecting electrode into the active layer region 31 can be similar to that of the first embodiment, and good optical frequency modulation characteristics can be obtained also in the third embodiment. To be That is, an optical frequency modulator having a narrow spectral line width and good optical frequency modulation characteristics is realized.
なお、第9図の非活性層領域51の部分以外を前記第2
の実施例と同様な構成にしたり、さらにまた、左端部の
非活性層領域51と活性層領域31間に位相整合領域を配置
した構成も実現可能である。In addition, except the portion of the non-active layer region 51 of FIG.
It is also possible to realize the same configuration as that of the above-described embodiment, or further, to arrange the phase matching region between the non-active layer region 51 and the active layer region 31 at the left end.
(発明の効果) 以上説明したように、本発明によれば、広い変調周波
数帯域を有する平坦でかつ位相回転のない良好な光周波
数変調特性と、広い周波数チューニング帯域とを併せ持
つ光周波数変調装置を容易に得ることができる。このた
め、光FSK通信システムにおいて、送信機側の発振周波
数を容易に調整できることになり、レーザ製造時の発振
周波数の値へのスペックが軽減されたり、光周波数多重
通信方式を利用するようなシステムを構成する際の設計
の自由度が増すという利点がある。(Effects of the Invention) As described above, according to the present invention, there is provided an optical frequency modulator having both a flat optical frequency modulation characteristic having a wide modulation frequency band and no phase rotation and a wide frequency tuning band. Can be easily obtained. Therefore, in the optical FSK communication system, the oscillation frequency on the transmitter side can be easily adjusted, the specifications for the oscillation frequency value at the time of laser manufacturing are reduced, and a system using the optical frequency multiplex communication system is used. This has the advantage of increasing the degree of freedom in design when configuring the.
さらに、干渉計によって検出される誤差信号や他の光
とのビート信号を利用して負帰環制御をかけ、その発振
周波数やスペクトル線幅を制御する場合にも、FM位相特
性の反転による不安定が生じず、帰還系電気回路の設計
が容易になるという利点もある。Furthermore, when negative feedback control is performed by using the error signal detected by the interferometer or the beat signal with other light to control the oscillation frequency or the spectral line width, the error due to the inversion of the FM phase characteristic is caused. There is also the advantage that stability does not occur and the design of the feedback electric circuit becomes easy.
第1図は本発明に係る光周波数変調装置の第1の実施例
を示す構成図、第2図は分布反射型(DBR)半導体レー
ザを用いた従来の光周波数変調装置の構成図、第3図及
び第4図は第2図に示した従来装置の光周波数変調特性
の測定結果を示す図、第5図は分布帰還型(DFB)半導
体レーザ用いた従来の光周波数変調装置の構成図、第6
図は第5図に示した従来装置の光周波数変調特性を示す
図、第7図は第1図に示した本発明の第1の実施例に基
づく装置の光周波数変調特性の測定結果を示す図、第8
図は本発明に係る光周波数変調装置の第2の実施例を示
す構成図、第9図は本発明に係る光周波数変調装置の第
3の実施例を示す構成図である。 図中、30,40,50……分布反射型半導体レーザ(DBR−L
D)、31……活性層領域、32,41,51……非活性層領域、3
3a……電流注入用電極、33b……被変調電流注入用電
極、34,42,43,52……制御電流注入用電極、35……注入
電流供給装置、36……被変調注入電流供給装置、38……
制御電流供給装置。FIG. 1 is a block diagram showing a first embodiment of an optical frequency modulator according to the present invention, FIG. 2 is a block diagram of a conventional optical frequency modulator using a distributed Bragg reflector (DBR) semiconductor laser, and FIG. FIGS. 4 and 5 are diagrams showing the measurement results of the optical frequency modulation characteristics of the conventional device shown in FIG. 2, and FIG. 5 is a configuration diagram of a conventional optical frequency modulation device using a distributed feedback (DFB) semiconductor laser, Sixth
FIG. 7 is a diagram showing the optical frequency modulation characteristic of the conventional device shown in FIG. 5, and FIG. 7 is a measurement result of the optical frequency modulation characteristic of the device according to the first embodiment of the present invention shown in FIG. Figure, 8th
FIG. 9 is a configuration diagram showing a second embodiment of the optical frequency modulation device according to the present invention, and FIG. 9 is a configuration diagram showing a third embodiment of the optical frequency modulation device according to the present invention. In the figure, 30, 40, 50 ... Distributed reflection type semiconductor laser (DBR-L
D), 31 ... Active layer region, 32,41,51 ... Inactive layer region, 3
3a ... Current injection electrode, 33b ... Modulated current injection electrode, 34,42,43,52 ... Control current injection electrode, 35 ... Injection current supply device, 36 ... Modulated injection current supply device , 38 ……
Control current supply device.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 尾江 邦重 東京都千代田区内幸町1丁目1番6号 日 本電信電話株式会社内 (56)参考文献 特開 平2−238686(JP,A) 特開 平1−223791(JP,A) 特開 平1−175277(JP,A) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kunishige Oe 1-1-6 Uchisaiwaicho, Chiyoda-ku, Tokyo Nihon Telegraph and Telephone Corporation (56) Reference JP-A-2-238686 (JP, A) Kaihei 1-223791 (JP, A) JP-A-1-175277 (JP, A)
Claims (1)
射層領域を含む非活性層領域とを有する分布反射型半導
体レーザを備えた光周波数変調装置において、 注入電流の一部を供給する注入電流供給装置と、 残りの注入電流に光周波数変調用の変調電流を重畳して
変調させた被変調注入電流を供給する被変調注入電流供
給装置と、 前記活性層領域の一部に前記注入電流を注入するための
少なくとも一つの電流注入用電極と、 前記注入電流の注入領域とは異なる前記活性層領域の残
りの部分に注入電流密度が前記電流注入用電極による注
入電流密度より低くなるよいに前記被変調注入電流を注
入するための少なくとも一つの被変調電流注入用電極と
を備えた ことを特徴とする光周波数変調装置。1. An optical frequency modulator provided with a distributed Bragg reflector semiconductor laser having an active layer region and a non-active layer region including a distributed Bragg reflector layer region having a built-in diffraction grating, and supplying a part of an injection current. An injection current supply device, a modulated injection current supply device that supplies a modulated injection current that is modulated by superimposing a modulation current for optical frequency modulation on the remaining injection current, and the injection into a part of the active layer region. At least one current injection electrode for injecting a current, and the injection current density in the remaining part of the active layer region different from the injection current injection region may be lower than the injection current density by the current injection electrode. An optical frequency modulator according to claim 1, further comprising at least one modulated current injection electrode for injecting the modulated injection current.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8808789A JPH0831646B2 (en) | 1989-04-10 | 1989-04-10 | Optical frequency modulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8808789A JPH0831646B2 (en) | 1989-04-10 | 1989-04-10 | Optical frequency modulator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02268478A JPH02268478A (en) | 1990-11-02 |
| JPH0831646B2 true JPH0831646B2 (en) | 1996-03-27 |
Family
ID=13933083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8808789A Expired - Fee Related JPH0831646B2 (en) | 1989-04-10 | 1989-04-10 | Optical frequency modulator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0831646B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5530229B2 (en) * | 2010-03-16 | 2014-06-25 | アンリツ株式会社 | Semiconductor light emitting device and optical pulse tester using the same |
| JP6730868B2 (en) * | 2016-07-15 | 2020-07-29 | 日本電信電話株式会社 | Tunable semiconductor laser |
-
1989
- 1989-04-10 JP JP8808789A patent/JPH0831646B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02268478A (en) | 1990-11-02 |
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