JPH0832546B2 - Ozonizer discharge body - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozonizer discharge body, and more particularly to a trench type ozonizer discharge body for generating ozone gas by a silent discharge due to high frequency and high voltage.

[0002]

2. Description of the Related Art Conventionally, an ozonizer discharge body has been widely used, for example, by being incorporated in a wastewater treatment facility to purify wastewater by ozone aeration. It is well known that such an ozonizer discharge body introduces a raw material gas between a high-voltage electrode and a ground electrode and produces ozone by utilizing a silent discharge by a high-frequency high-AC voltage. Then, when ozone is generated, in order to efficiently increase the ozone yield, a plurality of trenches are formed in the high-voltage electrode to substantially enlarge the electrode surface, and a cooling water channel is formed in the ground electrode. Trench-shaped ozonizer discharges have been fabricated that are configured to reduce heat generation due to silent discharge. A conventional trench type ozonizer discharge body will be described with reference to FIGS. 7 and 8. The trench type ozonizer discharge body includes a high voltage electrode 1 having a trench 2 formed therein and a water-cooled ground electrode 3 having a cooling water passage 4. And are opposed to each other at a predetermined interval, and a raw material gas introduced from the outside is passed through a gas flow path 6 provided at a predetermined interval between the electrodes 1 and 3, and silently discharged to generate ozone. There is. In addition,
FIG. 7 shows an external front view of the ozonizer discharge body, and FIG. 8 shows a sectional view taken along line AA in FIG.

In the above structure, the water-cooled earth electrode 3 is made of a material having electrical conductivity and thermal conductivity and having excellent corrosion resistance to ozone gas, such as aluminum or titanium. 4 is formed by, for example, digging a groove for a water channel on the surface of a flat plate 3a made of aluminum, and then sticking a flat plate 3b serving as a lid to the flat plate 3a by welding.

[0004]

However, when the water-cooled earth electrode is manufactured as described above, a welding step and a post-processing after the welding are newly added in addition to the machining, and the number of steps is increased. . In addition, the manufacturing process became more complicated due to repairs due to poor welding. Further, in order to confirm the quality of the welded portion, a pressure resistance test and an airtightness test were required after the production, and when leakage due to defective welding was found, the work such as welding and additional work was required again. On the other hand, the cooling water passage had to be constructed so as to improve the water circulation in the water passage and to increase the flow velocity to enhance the heat transfer effect by cooling, but it becomes the top and the lid of the partition wall forming the water passage. Since welding with the flat plate is structurally difficult at the inner part of the electrode, a gap was created at this part. As a result, especially when the cooling water pressure is high, a short path of the cooling water occurs and the heat transfer effect is reduced.
From another point of view, in the ozonizer discharge body having the conventional structure, the electric power that can be applied per unit area of the electrode that contributes to ozone generation depends on the withstand voltage of the dielectric provided on the surface of the water-cooled ground electrode facing the high-voltage electrode. Due to restrictions and the fact that the ozone generation efficiency does not change with respect to the amount of input electric power, the only way to increase the ozone yield or obtain a high concentration is to expand the discharge area. Turned into

The present invention has been made in order to solve the above-mentioned problems, and the manufacturing process can be simplified by omitting the welding process and the heat transfer efficiency can be improved by preventing the generation of short paths due to cooling water. It is an object of the present invention to provide a trench-type ozonizer discharge body that can be improved and can increase ozone yield and obtain high-concentration ozone without increasing the size of the device itself.

[0006]

That is, the above object of the present invention is to provide a high-voltage electrode having a plurality of grooves in a discharge part, a water-cooled ground electrode facing the high-voltage electrode with a predetermined space therebetween,
A gas channel formed by the predetermined interval, a dielectric plate fixed to a water-cooled ground electrode surface facing the high-voltage electrode surface, an inlet nozzle for introducing a raw material gas into the gas channel, and an outlet for radiating ozone gas from the gas channel. In a trench-type ozonizer having a nozzle and performing silent discharge between the high-voltage electrode and the water-cooled ground electrode, the water-cooled ground electrode is formed by machining in a thick plate-shaped conductor and is a compound that communicates with each other.
Has one continuous <br/> cooling channel formed by sealing at appropriate places the number of Article holes, placing two of said high voltage electrode which relatively to each other on both sides of the water cooling the earth electrode With
This is achieved by an ozonizer discharge body, in which two gas flow paths formed between the high-voltage electrode and the water-cooled ground electrode are connected in series.

[0007]

The water-cooled earth electrode has a plurality of opening surfaces and is formed by machining so as to form a continuous cooling water channel by arbitrarily closing appropriate places of holes to be drilled beforehand in the thick plate conductor. The welding process in the conventional type can be omitted. Further, since two high voltage electrodes facing each other are arranged on both sides of the water-cooled ground electrode, and the gas flow paths formed respectively between the two electrodes are connected in series with each other, the electrode discharge surface is substantially formed. At the same time, the flow rate of the cooling water flowing through the water-cooled ground electrode can be doubled and cooled.

[0008]

Embodiments of the ozonizer discharge body according to the present invention will be described below in detail with reference to the drawings. 1 to 3 show an embodiment of the present invention, FIG. 1 is an external front view of an ozonizer discharge body with a part cut away, FIG. 2 is a sectional view taken along the line AA of FIG.
FIG. 3 is a sectional view taken along the line BB of FIG. In FIG. 1, this ozonizer discharge body is configured such that a main body case 10 made of a substantially rectangular parallelepiped has a cooling fan 10a partially protruding outward, as in the conventional type. A plug cord 13 is housed in the cooling fan 10a so that it can be pulled out. Further, the main body case 1
No. 0, an outlet nozzle 14 for discharging the ozone gas and the raw material gas generated in the main body is arranged in front of the case, which is separated from the cooling fan 10a. Further, the main body case 10 is configured by arranging a set of bamboo shoot nipples 16 connected to a cooling water passage 15 described in detail later on the side surface of the case.

The high-voltage electrode 11 and the water-cooled ground electrode 12 will be described with reference to FIGS. 2 and 3. The high-voltage electrode 11 and the water-cooled ground electrode 12 that are subjected to silent discharge when a high-frequency high voltage is applied are separated by a predetermined distance. Body case 10
Is built into. The high-voltage electrode 11 is formed of two flat plate-shaped electrodes, and is arranged so as to sandwich one water-cooled ground electrode 12 having a thick plate shape from both sides. In other words, the water-cooled earth electrode 12 arranged at a predetermined distance from the discharge parts of the two high-voltage electrodes 11 separated from each other has a structure in which the two electrode parts are integrated so as to face each other. There is. An inlet nozzle 17 for introducing the raw material gas into the main body is arranged on the rear side of the main body facing the outlet nozzle 14 so as to project from the case surface.

Next, referring to FIGS. 4 and 5, the water-cooled ground electrode 12 will be further described.
Is linearly extended from the side wall of the thick conductor into the conductor , and
Is formed by forming a plurality of holes 15b communicating with each other.
ing. That is, at least one end of each hole 15b is a conductor
An opening 15a is formed in the side wall, and each hole 15b is
A plurality of elements appropriately arranged in the opening 15a or the hole 15b.
One continuous cooling, closed by the closing plug 18 of
A waterway 15 is formed . The two openings 15a serving as both end portions of the cooling water channel 15, the 15a, the bamboo shoots nipple 16 (see FIG. 1) is fixed, the opening 15a, 15
a functions as a cooling water inlet and a cooling water outlet of the cooling water that flows through the water passage 15. Further, as is apparent from FIG. 5, the water-cooled ground electrode 12 has a dielectric plate 19 fixedly provided on each surface facing the discharge part of each high-voltage electrode. In the present embodiment, the water-cooled ground electrode 12 configured as described above has a drill hole from the side surface of the thick aluminum plate.
Opened by machining, further openings 15a formed by processing a screw and is then formed by sealing plugs in place.

Referring back to FIGS. 2 and 3, the high-voltage electrode 11 has a plurality of trenches 11a formed in its discharge portion and having a substantially triangular vertical cross section. The case extends along the horizontal direction (the direction perpendicular to the paper surface in FIG. 3). The predetermined interval formed by the water-cooled earth electrode 12 and the high-voltage electrode 11 functions as a raw material gas introduced into the main body and a gas flow path 20 for ozone gas generated when the raw material gas passes. The trench 11a is set along the flow direction of the source gas and the ozone gas. The gas flow paths 20 formed between the two electrodes are connected to the inlet nozzle 17 and the outlet nozzle 14, respectively, near one common end. Further, the gas passage 20 is connected to a bypass passage 24 formed by a bypass pipe 21, a plurality of elbows 22 and nipples 23 near the other end opposite to the inlet nozzle 17 and the outlet nozzle 14. The two gas flow paths 20 formed between the two electrodes are connected to each other in series.

The ozonizer discharge device constructed as described above is
A high-frequency AC high voltage is applied between the high-voltage electrode 11 and the water-cooled ground electrode 12 to perform silent discharge, and operation is performed under a condition in which cooling water is circulated in the cooling water passage 15.
Oxygen O ₂ which is a raw material gas is introduced from the inlet nozzle 17. Oxygen O ₂ filled in the gas channel 20 and passing through the channel 20 is combined with ozone O ₃ by a silent discharge applied between the electrodes. At that time, the gas flow path 20
The heat generated in the dielectric plate 19 is removed by the water cooling effect of the cooling water circulating in the cooling water passage 15. Ozone yield is improved by the temperature decrease due to the water cooling. Ozone O ₃ and oxygen O ₂ generated when passing through one gas flow passage 20 are supplied to the other gas flow passage through the bypass passage 24 and are silently discharged again. As a result, ozone passes through the flow path while increasing its concentration. The ozone O ₃ generated while passing through the gas flow path 20 is
With the oxygen O ₂ that could not be combined, the outlet nozzle 14
Emitted from.

As a result of the operation according to the above process, in this embodiment, one high-voltage electrode 11 and one dielectric plate 19 of the water-cooled earth electrode 12 were used to generate ozone of 10 g / h and maximum concentration of 100 mg on the high-voltage electrode 11. A discharge area of / Nl is formed. Further, in the present invention, the combination of the high-voltage electrode 11 and the dielectric plate 19 serves as a reference discharge structure, and the reference discharge structure is provided opposite to each other with the water-cooling earth electrode 12 as a boundary and functions as a discharge flow passage space. By connecting the gas flow passages 20 that are connected in series, the ozone yield is improved and the ozone production amount is 20 g / h and the maximum concentration is 150 g.
mg / Nl is obtained. That is, the ozone generation amount could be doubled and the concentration could be 1.5 times the reference discharge structure. In other words, this fact requires a device that is approximately twice as large as the conventional device when it is attempted to obtain twice the ozone production amount.

[0014]

As described above, according to the ozonizer discharge body of the present invention, the water-cooled earth electrode is constructed so as to form the cooling water channel by closing the holes formed in the thick plate at arbitrary places. The manufacturing process can be simplified by omitting the welding process and the post-processing in the conventional structure, and the pressure resistance test and the airtight test after the product is completed. In addition, since the defective welding caused by the omission of the welding process is eliminated, the manufacturing yield is improved. Furthermore, the cooling water passage has a hole structure formed in the thick plate to avoid a short path of the cooling water, so that the heat transfer efficiency is improved. On the other hand, regarding the increase in ozone production and the increase in ozone concentration, the reference structure consisting of one high-voltage electrode and one water-cooled ground electrode is provided in the opposing double structure, and the water-cooled ground electrode has twice the standard structure. By flowing the cooling water at a flow rate, the cooling can be substantially doubled as compared with the case of the standard structure, and the temperature can be lowered, so that the ozone yield can be remarkably improved.
Further, since the water-cooled earth electrode is shared, the downsizing of the device can be achieved. The discharge phenomenon is affected by the gap size between the high-voltage electrode and the dielectric plate. It is difficult to maintain the gap size even when the size of the device is increased. The dimensional uniformity could be maintained and a stable discharge could be obtained. Therefore, it was possible to prevent variations in the ozone production amount. Further, in order to meet the demand for a large amount of ozone generation, in the conventional method, one large ozonizer having a large discharge area had to be manufactured, whereas in the ozonizer discharge body of the present invention, a plurality of such ozonizer discharge bodies were used. This can be done by connecting them in parallel. In particular, since the stacking method in which the electrode pairs are substantially overlapped with each other, by controlling the number of operating ozonizer discharge bodies, it is possible to control the ozone production amount in a wide range from a small capacity to a large capacity, which is difficult with one large ozonizer. When the ozonizer discharge device of the present invention is used in combination with an oxygen enriching device, the compressor capacity of the oxygen enriching device is constant, and as shown in FIG. When the two gas flow paths formed between and are used in series connection, ozone with a much higher concentration can be generated than when used in parallel connection.

[Brief description of drawings]

FIG. 1 is an external front view of an ozone isher discharge body according to an embodiment of the present invention.

FIG. 2 is a sectional view taken along the line AA of FIG.

FIG. 3 is a sectional view taken along line BB of FIG.

FIG. 4 is a plan view of a water-cooled ground electrode applied to the ozonizer discharge body of the present invention.

5 is a side view showing a partial cross section of FIG. 4. FIG.

FIG. 6 is a diagram showing gas amount-ozone concentration characteristics when the ozonizer discharge body of the present invention and an oxygen enrichment device are used in combination.

FIG. 7 is an external front view of a conventional device.

FIG. 8 is a side view showing a part of the apparatus shown in FIG. 7 omitted.

[Explanation of symbols]

 10 Main Body Case 11 High Voltage Electrode 11a Trench 12 Water Cooling Earth Electrode 14 Outlet Nozzle 15 Cooling Water Channel 15a Opening 15b Hole 17 Inlet Nozzle 18 Closing Plug 19 Dielectric Plate 20 Gas Channel 24 Bypass Channel

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Minoru Harada 11-1 Haneda Asahi-cho, Ota-ku, Tokyo Inside the EBARA CORPORATION (56) Reference JP-A-55-162410 (JP, A) JP-A-2 -217904 (JP, A) JP-A-48-96479 (JP, A)

Claims (1)

[Claims] 1. A high voltage electrode having a plurality of grooves in a discharge part,
A water-cooled ground electrode that is arranged to face the high-voltage electrode at a predetermined interval, a gas channel formed by the predetermined interval, a dielectric plate fixed to the surface of the water-cooled ground electrode that faces the high-voltage electrode surface, and a source gas in the gas channel. Having an inlet nozzle for introducing and an outlet nozzle for radiating ozone gas from the gas flow path,
In a trench type ozonizer that performs silent discharge between the high-voltage electrode and the water-cooled ground electrode, the water-cooled ground electrode is machined in a thick plate-shaped conductor and communicates with each other.
Has a single communicating <br/> continue the cooling water passage of the sealed and formed at appropriate positions of the plural rows of holes, two of the high voltage electrode that relative to each other on both sides of the water cooling the earth electrode An ozonizer discharge body, which is arranged and has two gas flow paths formed in series between the high-voltage electrode and the water-cooled ground electrode and connected in series.