JPH0834143B2 - Thick film resistor paste composition and method for producing thick film resistor - Google Patents

Description

Detailed Description of the Invention

[Industrial applications]

The present invention relates to a thick film resistor composition used for electronic parts such as highly integrated circuits, chips, volumes, and high voltage resistors,
More specifically, it relates to a thick film resistor composition having improved resistance temperature dependency and current noise.

[Prior art]

The thick film resistor composition used for electronic parts is a paste in which conductive fine powder such as RuO ₂ and non-conductive glass powder are kneaded with an organic vehicle, and is applied to a ceramic substrate by screen printing, etc. By firing with, the resistor coating can be formed on the ceramic substrate. The important characteristics of the thick film resistor manufactured in this way are temperature coefficient of resistance (TCR) and current noise (noise).
Is mentioned. Normally, TCR is based on the resistance value at 25 ℃, and the rate of change of resistance value at low temperature (−55 ℃) and high temperature (125 ℃) is calculated as the value per 1 ℃ (ppm / ℃). ), Which are called cold or low temperature coefficient (CTCR) and hot or high temperature coefficient (HTCR), respectively. TCR should be 0ppm / ℃. However, R _-55 : Resistance value at -55 ℃ (Ω / □) R ₂₅ : Resistance value at 25 ℃ (Ω / □) R ₁₂₅ : Resistance value at 125 ℃ (Ω / □) On the other hand, noise is a thick film resistor This is the current noise that is generated internally, and it is measured with a Quan Tech noise meter, but it is desirable that it be as small as possible. In order to bring the TCR close to 0, various attempts have conventionally been made to improve the thick film resistor by adding various inorganic compounds. For example, JP-A-48-82391 and JP-B-55-39883.
JP-B No. 54-1917, JP-B No. 47-8579, JP-B No. 57-26401, Nb ₂ O ₅ , TiO ₂ , MnO ₂ ,
Negative TCR modifiers such as Sb ₂ O ₃ and positive TCR modifiers of CuO are used as additives. Further, in order to obtain a paste composition for forming a thick film resistor having a high sheet resistance value (Ω / □), it is necessary to reduce the proportion of conductive fine powder, but conversely to increase noise. Become. Therefore, JP-A-48-82391 and JP-A-4-82391
7-8579 Patent Nb ₂ O ₅ as in JP, Sb ₂ O ₃ and a method of increasing the area resistance value while maintaining a high percentage of conductive fine powder was added had been taken, but the TCR There was a big problem in the action of making it negative.

[Problems to be Solved by the Invention]

In order to solve the above problems, it is an object of the present invention to provide a paste composition for forming a thick film resistor having a TCR close to 0 and low noise.

[Means for Solving the Problems]

In order to achieve the above-mentioned object, the present invention essentially comprises an organic vehicle, a conductive material, a non-conductive glass, and 5 wt% or less of Ta _{2 with} respect to the total weight of the conductive material and the non-conductive glass. A thick film resistor composition comprising O ₅ is provided. In other words, the present invention provides Ta film in a thick film resistor paste containing an organic vehicle and a conductive material and a non-conductive glass.
It is characterized in that it contains ₂ O ₅ and its amount is 5% by weight or less based on the total weight of the conductive material and the non-conductive glass.

[Action]

The amount of Ta ₂ O ₅ used in the present invention must be 5% by weight or less based on the total weight of the conductive material and the nonconductive glass. If the amount of Ta ₂ O ₅ is more than 5% by weight, Ta ₂
Not only is it not possible to expect an increase in the sheet resistance of the thick film resistor composition due to the increase in the amount of O ₅ , but it is also not preferable because it increases noise. Ta ₂ O ₅ in the present invention preferably has a particle size of 1 μm or less. As the conductive material, Pb ₂ Ru ₂ O _{6 to 7} , Bi ₂ Ru ₂ O _{6 to 7} , Ru
O _{2 and the} like can be mentioned, and those having a particle size of 0.2 μm or less are desirable. As electrically non-conducting _{glass, PbO-SiO 2 -B 2 O} 3 -Al 2 O 3 system is preferably a particle diameter of 10μm or less, preferably following can be 5 [mu] m. In addition, MnO which is an ordinary additive (TCR adjuster)
₂ , Nb ₂ O ₅ , Sb ₂ O ₃ , CuO, etc. may be used in combination without any problem. To obtain the thick film resistor composition of the present invention, the conventional method used for conventional thick film resistor compositions may be used.

【Example】

Examples 1 to 5 Organic vehicle composed of ethyl cellulose and terpineol, Pb ₂ Ru ₂ O ₆ to ₇ which is a pyrochlore type oxide having a particle size of 500 to 1000Å, and PbO having an average particle size of 2 to 3 μm (53% by weight). ) -SiO ₂ (32 _{wt%) - B 2 O 3 (} 10 wt%) - Al ₂ O
₃ (5% by weight) glass, Ta ₂ O ₅ with a particle size of 1 μm or less, and
Nb ₂ O ₅ , Sb ₂ O ₃ , MnO ₂ and CuO were added and sufficiently kneaded in a three-roll mill to manufacture five types of resistance pastes according to the present invention shown in Table 1. These resistance pastes were screen-printed on a 96% alumina substrate, dried at 150 ° C, and then peaked at 850 ° C x 10 in a belt furnace.
Min, baking under conditions of a total baking time of 30 minutes, size 1 mm × 1 mm,
A thick film resistor having a film thickness of 10 to 14 μm was prepared. The evaluation results of the characteristics of these resistors are shown in Table 1. The resistance paste was adjusted so that the sheet resistance of the resistor was about 100 kΩ. [Comparative Examples 1 to 5] For Comparative Examples, five types of resistance pastes shown in Table 1 were manufactured in the same manner as in Examples to prepare thick film resistors. Table 1 also shows the evaluation results of the composition and characteristics of these resistors. As is clear from Table 1, the thick film resistor composition of the present invention has a TCR close to 0 at both high temperature and low temperature and very little noise.

EFFECTS OF THE INVENTION The thick film resistor composition of the present invention has a TCR, which is an index of temperature dependency of resistance value, close to 0 and has very little current noise, and therefore has an extremely large effect as a resistor. Is.

Claims (2)

[Claims] 1. Essentially an organic vehicle and RuO ₂ , Pb ₂ R
one or more conductive particles selected from the group consisting of u ₂ O _6-7 and Bi ₂ Ru ₂ O _7, non-conductive glass particles containing PbO and SiO ₂ as main components, and the conductive particles and A paste composition for a thick film resistor, comprising 5 wt% or less of Ta ₂ O ₅ particles based on the total weight of non-conductive glass particles. 2. Essentially an organic vehicle and RuO ₂ , Pb ₂ R
one or more conductive particles selected from the group consisting of u ₂ O _6-7 and Bi ₂ Ru ₂ O _7, non-conductive glass particles containing PbO and SiO ₂ as main components, and the conductive particles and A method for producing a thick film resistor, in which a paste composed of 5 wt% or less of Ta ₂ O ₅ particles based on the total weight of non-conductive glass particles is prepared and the paste is fired to form a thick film resistor.