JPH083431B2 - Fluid flow meter - Google Patents
Fluid flow meterInfo
- Publication number
- JPH083431B2 JPH083431B2 JP2436687A JP2436687A JPH083431B2 JP H083431 B2 JPH083431 B2 JP H083431B2 JP 2436687 A JP2436687 A JP 2436687A JP 2436687 A JP2436687 A JP 2436687A JP H083431 B2 JPH083431 B2 JP H083431B2
- Authority
- JP
- Japan
- Prior art keywords
- flow
- pipe
- flow rate
- nozzle
- partition walls
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 title description 14
- 238000005192 partition Methods 0.000 claims description 25
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 230000008859 change Effects 0.000 claims description 5
- 238000005259 measurement Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000000087 stabilizing effect Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000002737 fuel gas Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
- G01F1/32—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow using swirl flowmeters
- G01F1/3227—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow using swirl flowmeters using fluidic oscillators
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、管路縮小部、噴出ノズル及び管路拡大部を
その順に流動方向に連ねて形成し、前記噴出ノズルと管
路拡大部の境界部に、一対の制御ノズルを、前記噴出ノ
ズルの噴出方向に対してほぼ直角方向に向かって、か
つ、相対向して形成し、前記両制御ノズル夫々と前記管
路拡大部の下流側を接続する一対の帰還流路を形成し、
前記管路拡大部における流動方向切換安定化のためのタ
ーゲットを設け、管路縮小部に連なる噴出ノズルからの
噴流が管路拡大部の一方の傾斜面に沿う状態で安定する
現象、及び、制御ノズルから交互に流体を吹出すことに
より噴出ノズルからの噴流が管路拡大部の両傾斜面を交
互に沿って流れる現象を利用して、流量を測定するよう
に、噴出ノズルからの噴流の流動方向変化に起因する圧
力又は流量変化を検出する流量測定用センサーを設けた
フルイデイック流量計に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of use] The present invention forms a pipe contracting portion, a jet nozzle, and a pipe expanding portion in that order in the flow direction to form the jet nozzle and the pipe expanding portion. A pair of control nozzles are formed in the boundary portion in a direction substantially perpendicular to the ejection direction of the ejection nozzle, and face each other, and the control nozzles and the downstream side of the conduit enlargement portion are formed. Forming a pair of return channels to connect,
A phenomenon in which a target for stabilizing the flow direction switching in the pipe expanding portion is provided, and the jet flow from the jet nozzle connected to the pipe contracting portion is stabilized in a state along one inclined surface of the pipe expanding portion, and control The flow of the jet from the jet nozzle is used to measure the flow rate by utilizing the phenomenon that the jet from the jet nozzle alternately flows along both inclined surfaces of the enlarged pipe section by alternately jetting the fluid from the nozzle. The present invention relates to a fluidic flow meter provided with a flow rate measuring sensor that detects a pressure or a flow rate change due to a direction change.
従来、第３図に示すように、管路拡大部（５）と制御
ノズル（6a），（6b）と帰還流路（7a），（7b）を区画
形成する一対の隔壁（17a），（17b）を翼形に形成し、
管路拡大部（５）内で下流側にターゲット（12）を配置
していた。Conventionally, as shown in FIG. 3, a pair of partition walls (17a), (7a), (7b), control nozzles (6a), (6b), and return flow paths (7a), (7b) are partitioned and formed. 17b) is formed into an airfoil,
The target (12) was arranged on the downstream side in the expanded pipe section (5).
しかし、測定流量範囲を大きくすると、微小流量の測
定における誤差が大きく、一層の改良の余地があった。However, if the measurement flow rate range is increased, there is a large error in the measurement of the minute flow rate, and there is room for further improvement.
本発明の目的は、簡単な隔壁形状の改良とターゲット
の配置の改良でもって、測定流量範囲を十分に大きくし
ながら、流量いかんにかかわらず正確に流量測定できる
ようにする点にある。An object of the present invention is to make it possible to accurately measure the flow rate regardless of the flow rate while sufficiently increasing the measurement flow rate range by simply improving the partition shape and improving the arrangement of the targets.
本発明の特徴構成は、管路拡大部と制御ノズルと帰還
流路を区画形成する一対の隔壁に、円柱状又はほぼ円柱
状の外周面を備えさせ、前記両隔壁の外周面中心どうし
を結ぶ直線と、前記両隔壁の前記制御ノズル側の先端ど
うしを結ぶ直線との間に、前記管路拡大部における流動
方向切換安定化のためのターゲットの前記噴出ノズル側
に向かう面を配置したことにあり、その作用効果は次の
通りである。A characteristic configuration of the present invention is that a pair of partition walls partitioning and forming a conduit expanding portion, a control nozzle, and a return flow path are provided with a cylindrical or substantially cylindrical outer peripheral surface, and the outer peripheral surface centers of both partition walls are connected to each other. Between the straight line and the straight line connecting the tips of the both partition walls on the control nozzle side, a surface facing the ejection nozzle of the target for stabilizing the flow direction switching in the enlarged pipe section is arranged. Yes, its effects are as follows.
つまり、両隔壁をいかなる形状にし、かつ、ターゲッ
トをどこに配置すれば、流路測定誤差を小さくできるか
を実験で調べた結果、次の事実が判明した。In other words, the following facts were found as a result of an experiment to find out what shape both partitions have and where the target is placed to reduce the flow path measurement error.
第１図に示すように、両隔壁（8a），（8b）に円柱状
又はほぼ円柱状の外周面を備えさせると共に、外周面中
心どうしを結ぶ直線（Ｘ）と両隔壁（8a），（8b）の先
端どうしを結ぶ直線（Ｙ）の間〔両直線（Ｘ），（Ｙ）
を含む〕に、ターゲット（12）の噴出ノズル（３）側の
面（12a）を配置することによって、第２図に示すよう
に、最大流量（3000/h）からその1/20の微小流量（15
0/h）の広範囲を、誤差が±２％以下になる状態で正
確に測定できることが判った。As shown in FIG. 1, both partition walls (8a), (8b) are provided with a cylindrical or substantially cylindrical outer peripheral surface, and a straight line (X) connecting the centers of the outer peripheral surfaces and both partition walls (8a), (8a), 8b) Between the straight lines (Y) connecting the tips [both straight lines (X), (Y)
2), the surface (12a) on the ejection nozzle (3) side of the target (12) is arranged so that a minute flow rate from the maximum flow rate (3000 / h) to 1/20 that of the maximum flow rate (3000 / h) as shown in FIG. (15
It was found that a wide range of 0 / h) can be accurately measured with an error of ± 2% or less.
他方、第３図に示した従来技術において、同様の流量
範囲（3000〜150/h）における誤差は、第４図に示す
ように微小流量域（150〜300/h）で最大10％以上のも
の大きなものになり、第２図と第４図の比較によって明
らかなように、本発明によれば、流量測定範囲を大きく
しながら、微小流量であっても測定を正確に行えるので
ある。On the other hand, in the prior art shown in FIG. 3, the error in the same flow rate range (3000 to 150 / h) is 10% or more at the maximum in the minute flow rate range (150 to 300 / h) as shown in FIG. According to the present invention, the flow rate measurement range can be increased and the measurement can be accurately performed even at a minute flow rate, as is clear from the comparison between FIGS. 2 and 4.
その結果、単に両隔壁の形状とターゲットの位置を変
更するだけの極めて簡単な改造でもって、微小流量の測
定を正確に行えるようになり、フルイデイック流量計の
用途拡大を図れるようになった。As a result, the minute flow rate can be accurately measured by an extremely simple modification by simply changing the shapes of both partition walls and the position of the target, and the application of the fluidic flow meter can be expanded.
次に第１図により実施例を示す。 Next, an embodiment is shown in FIG.
管（１）内に管路縮小部（２）及び噴出ノズル（３）
を形成する一対の第１流量形成部材（4a），（4b）を、
管中心軸芯（Ｐ）に対して対称的に配置し、管路縮小部
（２）の作用で噴出ノズル（３）に流体を円滑に導くと
共に、噴出ノズル（３）から管中心軸芯（Ｐ）とほぼ平
行に流体を噴出するように構成し、管路拡大部（５）、
一対の制御ノズル（6a），（6b）、及び、管路拡大部
（５）の下流側と制御ノズル（6a），（6b）を各別に連
通する一対の帰還流路（7a），（7b）を区画形成する一
対の隔壁（8a），（8b）を管中心軸芯（Ｐ）に対して対
称的に配置し、一対の制御ノズル（6a），（6b）を、噴
出ノズル（３）の噴出方向に対してほぼ直角方向に向か
わせると共に相対向させてある。一対の隔壁（9a），
（9b）との協働で一対の排出路（10a），（10b）を形成
する隔壁（11）を、管路拡大部（５）の下流側を遮断す
る状態で設け、両排出路（10a），（10b）の入口を両帰
還流路（7a），（7b）の入口側に各別に連通させてあ
る。In the pipe (1), the pipe passage reducing portion (2) and the jet nozzle (3)
A pair of first flow rate forming members (4a), (4b) forming
The pipe central axis (P) is arranged symmetrically, the fluid is smoothly guided to the jet nozzle (3) by the action of the pipe channel contracting portion (2), and the pipe central axis (from the jet nozzle (3) ( P), so that the fluid is ejected almost in parallel with the pipe expanding portion (5),
The pair of control nozzles (6a) and (6b), and the pair of return flow passages (7a) and (7b) which respectively communicate the control nozzles (6a) and (6b) with the downstream side of the conduit expanding portion (5). A pair of partition walls (8a) and (8b) are formed symmetrically with respect to the pipe center axis (P), and the pair of control nozzles (6a) and (6b) are connected to the ejection nozzle (3). Are directed almost at right angles to the jetting direction of and are opposed to each other. A pair of partition walls (9a),
A partition wall (11) forming a pair of discharge passages (10a) and (10b) in cooperation with (9b) is provided in a state of blocking the downstream side of the expanded pipe portion (5), and both discharge passages (10a) are provided. ) And (10b) are communicated with the inlets of both return flow paths (7a) and (7b) separately.
つまり、噴出ノズル（３）からの流体噴出が開始される
と、コアンダ効果によって噴出流体は一方の隔壁（8a）
に沿って流れ、そのためにその隔壁（8a）側に位置する
制御ノズル（6a）に帰還流路（7a）から大きな流体エネ
ルギーが付与されて、噴出流体が反対側の隔壁（8b）に
沿って流れるようになり、今度は反対側の制御ノズル
（6b）からの流体エネルギーによって噴出流体が初めに
沿った隔壁（8a）に再び沿って流れるようになり、この
ようにして、噴出ノズル（３）からの流体が隔壁（8
a），（8b）に対して交互に沿うように構成し、もっ
て、噴出流体量が増大する程短周期で、かつ、定量的相
関のある状態で噴出流体の流動方向が変化するように構
成してある。That is, when the ejection of the fluid from the ejection nozzle (3) is started, the ejected fluid is discharged to one of the partition walls (8a) by the Coanda effect.
A large amount of fluid energy is applied from the return flow path (7a) to the control nozzle (6a) located on the side of the partition wall (8a) so that the jetted fluid flows along the partition wall (8b) on the opposite side. Flow, and the fluid energy from the control nozzle (6b) on the opposite side in turn causes the jetted fluid to flow again along the partition wall (8a) along which the jet nozzle (6b) was initially arranged, thus, the jet nozzle (3). Fluid from the bulkhead (8
A) and (8b) are arranged alternately so that the flow direction of the ejected fluid changes in a shorter period and in a quantitatively correlated state as the ejected fluid amount increases. I am doing it.
両隔壁（8a），（8b）を円柱状又はほぼ円柱状に形成
すると共に、管路拡大部（５）における流動方向切換安
定化のためのターゲット（12）を、両隔壁（8a），（8
b）の外周面中心どうしを結ぶ直線（Ｘ）と、両隔壁（8
a），（8b）の制御ノズル（6a），（6b）側の先端どう
しを結ぶ直線（Ｙ）との間に、噴出ノズル（３）側に向
かう面（12a）が位置する状態で設け、第２図に示すよ
うに、測定流量範囲を例えば都市ガスの家庭用ガスメー
タとして必要な150〜3000/hというように大にしなが
ら、流量測定における誤差を例えば都市ガスの家庭用ガ
スメータの検定公差内にできるように構成してある。Both partition walls (8a), (8b) are formed in a columnar shape or a substantially columnar shape, and a target (12) for stabilizing the flow direction switching in the expanded pipe section (5) is provided with both partition walls (8a), (8b). 8
A straight line (X) connecting the centers of the outer peripheral surfaces of b) and both partition walls (8)
a), (8b) control nozzles (6a), (6b) between the straight line (Y) connecting the tips, provided with the surface (12a) facing the ejection nozzle (3) side, As shown in FIG. 2, the measurement flow range is made large, for example, 150 to 3000 / h, which is required as a household gas meter for city gas, and the error in the flow rate measurement is within the verification tolerance of the household gas meter for city gas. It is configured to be able to.
両帰還流路（7a），（7b）の入口の反転流動部（Ａ）
に各別に連通させたパイプ（13a），（13b）を、合流排
出路（10）内に配置した密閉ケース（16）に接続し、密
閉ケース（16）内に圧力センサー（14）を両パイプ（13
a），（13b）からの流体圧が互いに逆向きに作用するよ
うに取付け、噴出ノズル（３）からの噴流の流動方向変
化に起因する反転流動部（Ａ）での圧力変化を圧力セン
サー（14）で検出して、圧力センサー（14）から流量測
定器（15）に正弦波状の波形信号を送り、流量測定器
（15）において、波形信号の周波数から流量を算出して
表示するように構成し、もって、帰還型フルイデイック
流量計を形成してある。Inversion flow section (A) at the inlet of both return flow paths (7a), (7b)
Connect the pipes (13a) and (13b) that communicate with each other to the sealed case (16) arranged in the merge and discharge path (10), and install the pressure sensor (14) inside the sealed case (16) on both pipes. (13
The pressure sensors (a) and (13b) are installed so that the fluid pressures act in opposite directions, and pressure changes in the reversing flow section (A) due to changes in the flow direction of the jet from the jet nozzle (3) are detected by the pressure sensor ( 14), send a sinusoidal waveform signal from the pressure sensor (14) to the flow rate measuring device (15), and calculate and display the flow rate from the frequency of the waveform signal in the flow rate measuring device (15). As a result, a feedback type fluidic flow meter is formed.
次に別実施例を説明する。 Next, another embodiment will be described.
隔壁（8a），（8b）は円筒形又はほぼ円筒形であっても
よい。The partitions (8a), (8b) may be cylindrical or substantially cylindrical.
ターゲット（12）の噴出ノズル（３）側の面（12a）
は直線（Ｘ），（Ｙ）上に配置してもよい。Surface (12a) of target (12) on ejection nozzle (3) side
May be arranged on the straight lines (X) and (Y).
両帰還流路（7a），（7b）の入口の反転流動部（Ａ）
に各別に連通させたパイプ（13a），（13b）を外部配置
した密閉ケース（16）に接続してもよい。また、圧力セ
ンサー（14）を一方の帰還流路（7a）又は（7b）の入口
の反転流動部（Ａ）における圧力変化を検出するように
設けてもよく、その場合、反転流動部（Ａ）に圧力セン
サー（14）を配置してもよい。さらに、圧力センサーに
替えて流量センサーを設けてもよく、それらセンサー
（14）を帰還流路（7a），（7b）のいずれに配置しても
よい。Inversion flow section (A) at the inlet of both return flow paths (7a), (7b)
The pipes (13a) and (13b) communicated with each other may be connected to a sealed case (16) arranged externally. Further, the pressure sensor (14) may be provided so as to detect a pressure change in the reversing flow section (A) at the inlet of the one return flow path (7a) or (7b). In that case, the reversing flow section (A) ) May be provided with a pressure sensor (14). Further, a flow rate sensor may be provided instead of the pressure sensor, and the sensors (14) may be arranged in any of the return flow paths (7a) and (7b).
流量計は、主として燃料ガスや水道等において工業用
や家庭用に利用するが、その用途に特定されない。The flow meter is mainly used for fuel gas, water supply, etc. for industrial and household purposes, but is not specified for its use.
尚、特許請求の範囲の項に図面との対照を便利にする
為に符号を記すが、該記入により本発明は添付図面の構
造に限定されるものではない。It should be noted that reference numerals are added to the claims for convenience of comparison with the drawings, but the present invention is not limited to the structures of the accompanying drawings by the entry.
第１図は本発明の実施例を示す断面図、第２図は本発明
の実験結果を示すグラフである。第３図は従来例を示す
断面図、第４図は従来例の実験結果を示すグラフであ
る。 （２）……管路縮小部、（３）……噴出ノズル、（５）
……管路拡大部、（6a），（6b）……制御ノズル、（7
a），（7b）……帰還流路、（8a），（8b）……隔壁、
（12）……ターゲット、（12a）……ターゲットの噴出
ノズル側の面、（14）……センサー、（Ｘ），（Ｙ）…
…直線。FIG. 1 is a sectional view showing an embodiment of the present invention, and FIG. 2 is a graph showing an experimental result of the present invention. FIG. 3 is a sectional view showing a conventional example, and FIG. 4 is a graph showing experimental results of the conventional example. (2) …… Conduit reduction part, (3) …… Spout nozzle, (5)
…… Pipe expansion part, (6a), (6b) …… Control nozzle, (7
a), (7b) ... Return flow path, (8a), (8b) ... Partition wall,
(12) …… Target, (12a) …… Target jet nozzle surface, (14) …… Sensor, (X), (Y)…
… Straight line.
Claims (1)
管路拡大部（５）をその順に流動方向に連ねて形成し、
前記噴出ノズル（３）と管路拡大部（５）の境界部に、
一対の制御ノズル（6a），（6b）を、前記噴出ノズル
（３）の噴出方向に対してほぼ直角方向に向かって、か
つ、相対向して形成し、前記両制御ノズル（6a），（6
b）夫々と前記管路拡大部（５）の下流側を接続する一
対の帰還流路（7a），（7b）を形成し、前記管路拡大部
（５）における流動方向切換安定化のためのターゲット
（12）を設け、前記噴出ノズル（３）からの噴流の流動
方向変化に起因する圧力又は流量変化を検出する流量測
定用センサー（14）を設けたフルイデイック流量計であ
って、前記管路拡大部（５）と制御ノズル（6a），（6
b）と帰還流路（7a），（7b）を区画形成する一対の隔
壁（8a），（8b）に、円柱状又はほぼ円柱状の外周面を
備えさせ、前記両隔壁（8a），（8b）の外周面中心どう
しを結ぶ直線（Ｘ）と、前記両隔壁（8a），（8b）の前
記制御ノズル（6a），（6b）側の先端どうしを結ぶ直線
（Ｙ）との間に、前記ターゲット（12）の前記噴出ノズ
ル（３）側に向かう面（12a）を配置してあるフルイデ
イック流量計。1. A pipe contracting portion (2), a jet nozzle (3) and a pipe expanding portion (5) are formed in that order in the flow direction,
At the boundary between the jet nozzle (3) and the enlarged pipe section (5),
A pair of control nozzles (6a), (6b) are formed in a direction substantially perpendicular to the ejection direction of the ejection nozzle (3) and face each other. 6
b) To form a pair of return flow paths (7a), (7b) that connect the downstream side of the expanded pipe section (5) to each other to stabilize the flow direction switching in the expanded section (5). A fluidic flow meter provided with a target (12) and a flow rate measuring sensor (14) for detecting pressure or flow rate change caused by change in flow direction of the jet flow from the jet nozzle (3), Pipe expansion part (5) and control nozzles (6a), (6
b) and a pair of partition walls (8a), (8b) that partition and form the return flow paths (7a), (7b) are provided with a cylindrical or substantially cylindrical outer peripheral surface, and both partition walls (8a), (8a), Between a straight line (X) connecting the centers of the outer peripheral surfaces of 8b) and a straight line (Y) connecting the tips of the control nozzles (6a) and (6b) of the partition walls (8a) and (8b). A fluidic flow meter in which a surface (12a) of the target (12) facing the ejection nozzle (3) side is arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2436687A JPH083431B2 (en) | 1987-02-04 | 1987-02-04 | Fluid flow meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2436687A JPH083431B2 (en) | 1987-02-04 | 1987-02-04 | Fluid flow meter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63191920A JPS63191920A (en) | 1988-08-09 |
| JPH083431B2 true JPH083431B2 (en) | 1996-01-17 |
Family
ID=12136193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2436687A Expired - Lifetime JPH083431B2 (en) | 1987-02-04 | 1987-02-04 | Fluid flow meter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH083431B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2785972B2 (en) * | 1989-09-07 | 1998-08-13 | 東京瓦斯株式会社 | Compensation device for flow meter |
-
1987
- 1987-02-04 JP JP2436687A patent/JPH083431B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63191920A (en) | 1988-08-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0295623A1 (en) | Fluidic flowmeter | |
| CZ290593A3 (en) | Flow meter with fluid oscillator | |
| JPH083431B2 (en) | Fluid flow meter | |
| CA1325734C (en) | Trapped-vortex pair flowmeter | |
| JPH0619051Y2 (en) | Fluidic flow meter | |
| JPH083432B2 (en) | Fluidic flow meter | |
| JP2566605B2 (en) | Fluidic flow meter | |
| JPH0545931Y2 (en) | ||
| JPH0547378Y2 (en) | ||
| JPH0718720B2 (en) | Fluid flow meter | |
| JPH0547379Y2 (en) | ||
| JPH0718719B2 (en) | Fluid flow meter | |
| JPH0530099Y2 (en) | ||
| JPS63139213A (en) | Fluidic flowmeter | |
| JPS62108115A (en) | Fluid type flowmeter | |
| JPS62276411A (en) | Fluidic flowmeter | |
| JP2708282B2 (en) | Fluidic flow meter with micro flow sensor | |
| JP2925058B2 (en) | Fluidic flow meter | |
| JPH01124711A (en) | Full-index flowmeter | |
| JPH0464413B2 (en) | ||
| JPS59184822A (en) | Fluidic flow meter | |
| JPS6177717A (en) | Feedback type fluidic flowmeter | |
| JP2512518B2 (en) | Fluidic flow meter | |
| JPH0799340B2 (en) | Fluid flow meter | |
| JP2931198B2 (en) | Fluidic flow meter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |