JPH084951B2 - Laser processing machine with vacuum device - Google Patents

Description

TECHNICAL FIELD The present invention relates to a laser processing machine with a vacuum container used for processing such as welding or quenching.

Conventional technology When performing welding or quenching processing with thermal energy such as laser, it is impossible to obtain a high-quality processed surface under the conditions of natural outside air, and processing is performed in an atmosphere filled with a specific gas. The method is generally done.

Conventionally, a method that has been used to create this ambient atmosphere is to inject a shield gas from a nozzle and process while spraying a specific gas inside it, but this method completely removes the influence of outside air. It has the drawback that it cannot. Therefore, the XY table 101 as shown in FIG. 3 together with the drive motor 104 is a box (called a vacuum container).
Enclosed by 102, the air in the vacuum container is sucked by a vacuum device, and a specific gas is sent to fill the container with the specific gas, and a laser beam transmission window 103 provided on the upper plate of the vacuum container is provided. There is a method of irradiating a laser beam from above the laser beam to focus the laser beam on the processing surface of the workpiece W mounted on the XY table to perform laser processing. There is also a method in which a vacuum container is installed on an XY table as shown in FIG. 4 and a workpiece mounted in the vacuum container is irradiated with a laser beam.

The former method described in the prior art for installing an XY table in a vacuum container requires a large vacuum container, and the lubricating oil required to drive the table is a vacuum container. There is a problem that the atmosphere is adversely affected and the clean atmosphere cannot be maintained. Also, the latter method of installing a vacuum container on the XY table requires a wide laser beam transmission window, and the special glass with good laser beam transmission used for this window is very expensive, resulting in high cost. There is a problem.

The present invention has been made in view of the above problems of the prior art, and an object of the present invention is to provide a laser processing machine with a vacuum device that is small in size, inexpensive, and free from atmospheric pollution due to lubricating oil. It is what

Means for Solving the Problems To achieve the above object, the laser processing machine with a vacuum device of the present invention is fixed to the main body and provided with a gap on the XY table, and at least the bottom plate is made of a non-magnetic material. A vacuum container having a laser beam intake formed and the like, a work mount mounted on the bottom plate in the vacuum container so as to be horizontally movable and formed of a non-magnetic material, and the bottom plate on the XY table. It comprises at least one first magnet fixedly attached with a slight gap, and a second magnet or a magnetic body fixedly attached to the lower portion of the work mount corresponding to the first magnet. is there.

The work mount placed on the bottom plate of the fixed vacuum container is attracted by the second magnet or magnetic body provided in the lower part to the first magnet fixed on the XY table with a slight gap. The workpiece fixed on this work mount is XY
It is moved and positioned following the movement of the table.

EXAMPLE An example will be described with reference to FIGS. 1 and 2.

In a known laser beam machine, an intermediate stand (not shown) is movably positioned on a guide in the X-axis direction provided on the front side of the bed 1, and is mounted on a guide in the Y-axis direction provided on the intermediate stand. , XY table 3 is mounted so that it can be moved and positioned. Further, a column 4 is provided upright on the rear side of the bed 1, and a laser oscillator 5 is fixed on the column 4 with the output port of the laser oscillator 5 on the front side. An L-shaped laser guiding cylinder 6 is fixed to the front side of the laser oscillator 5, and a bending mirror 7 is attached inside the tip of the laser guiding cylinder 6. On the other hand, a laser head 8 is movably provided along a vertical (Z-axis) direction guide provided on the front side of the column 4, and the upper portion of the laser head 8 is a cylindrical portion 6a facing the lower side of the laser guide tube 6. Is slidably fitted in the hole. A condenser lens 9 is removably attached inside the laser head 8, and a nord 11 is removably provided at the tip of the laser head 8.

A vacuum container 12 is provided above the table 3 with a gap, and the vacuum container 12 is fixed to the lower side of the front surface of the column 4 via a support plate 13. The vacuum container 12 is formed of a non-magnetic member such as a nickel chrome alloy or an aluminum alloy,
A glass window 14 made of special glass having a high laser transmittance is provided at the axial center position of the laser head 8 of the upper plate 12a, that is, at the laser beam passage. Further, a gas discharge pipe 15 communicating with a vacuum device (not shown) is connected to a mounting hole 12b provided on the side surface of the vacuum container 12, and a special gas supply device (not shown) is connected to a mounting hole 12c provided on the upper surface. Gas supply pipes 16 are installed respectively.

Two electromagnets or permanent magnets 18 are fixed on the table 3 via a stand 17, and the upper surface of the magnet 18 and the vacuum container 12 are fixed.
The vertical positional relationship between the bottom plate 12d and the lower surface of the bottom plate 12d is adjusted so that a slight gap δ is formed.

A work mount 19 is mounted in the vacuum container 12 so as to be movable along the upper surface of the bottom plate 12d. This work mount 19
Is formed of a non-magnetic material, and a non-magnetic material and a Teflon sheet having a low friction coefficient are vapor-deposited or adhered on the bottom surface.
Further, a blind hole is formed in the bottom surface at a position corresponding to the magnet 18 on the table, and a permanent magnet or a ferromagnetic material 21 is fixed in the blind hole by an adhesive or the like. This magnet 21
Are attached to magnets 18 on the table in such a manner that different polarities having mutually attractive forces face each other, and a workpiece W is attached by a clamper 22 on a work attachment table.

 Next, the operation of this embodiment will be described.

The laser beam emitted from the output port of the laser oscillator 5 hits the bending mirror 7 in the laser guide cylinder 6 and is bent 90 °, passes through the condenser lens 9 in the laser head 8, passes through the glass window 14, and is special. It enters a vacuum container 12 filled with gas and is focused on the work surface of the workpiece. Then, the table 3 is moved in the X-axis direction and / or the Y-axis direction by the NC command, and the work attachment table 19 slides on the bottom plate 12d of the vacuum container 12 by the action of the attraction force of the magnet 18 and the magnet or the ferromagnetic material 21. Then, it moves following the table 3 and laser processing is performed.

The sliding surface for moving the work mount 19 follows
The guide is not limited to the Teflon sheet, and a guide formed of a non-magnetic material such as a ceramic ball guide may be used.

EFFECTS OF THE INVENTION Since the present invention is configured as described above, it has the following effects.

A vacuum container made of non-magnetic material and fixed to the main body is provided above the table, and a magnet or magnetic material is fixed to the lower part of the work mounting base made of non-magnetic material movably mounted in the vacuum container. By a magnet fixed on the table, the magnet or magnetic material on the work mount side is attracted by a magnetic force with a gap,
Since it is possible to move and position the work mount according to the movement of the XY table, it is not necessary to provide an XY table inside the vacuum container, and downsizing of the vacuum container is achieved. It becomes possible to maintain a clean state where there is no contamination and is always filled with only a special gas, and a good processed surface for welding and quenching can be obtained. In addition, it is effective for processing where a clean ambient atmosphere is an absolutely necessary condition such as a work for forming a specific film on an electronic substrate.

[Brief description of drawings]

FIG. 1 is a side view of a laser processing machine with a vacuum device according to this embodiment,
FIG. 2 is an enlarged view of a main part of FIG. 1, FIG. 3 is an explanatory view of a conventional example in which an XY table is provided in a vacuum container, and FIG. 4 is an explanatory view of a conventional example in which a vacuum container is provided on the XY table. Is. 3 ... XY table, 12 ... vacuum container 18 ... electromagnet or permanent magnet 19 ... work mount 21 ... permanent magnet or ferromagnetic material

Claims (1)

[Claims] 1. A vacuum container which is fixed to a main body and is provided on an XY table with a gap, at least a bottom plate of which is made of a non-magnetic material and which has a laser beam introduction and the like, and on the bottom plate in the vacuum container. A workpiece mounting base horizontally movably mounted on the XY table and at least one first magnet fixed to the XY table with a slight gap, and A laser processing machine with a vacuum device, comprising a second magnet or a magnetic body fixed to the lower part of the work mount corresponding to one magnet, and moving the work mount following by a magnetic force.