JPH086997B2 - Liquid cooling device temperature controller - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a temperature control device for a liquid cooling device that uses a refrigeration circuit and mainly controls the temperature of a cooling liquid that cools equipment to be cooled such as a machine tool.

(Prior Art) Conventionally, as a liquid cooling device used for a machine tool or the like,
The one disclosed in Japanese Patent Laid-Open No. 2-104994 and shown in FIG. 7 has been proposed. This conventional device uses a compressor (2
1), condenser (22), pressure reducing mechanism (23), and evaporator (24)
Using a refrigeration circuit (2) including a liquid circulation circuit (3) between the evaporator (24) of the refrigeration circuit (2) and the equipment to be cooled (1) such as the machine tool, By the circulation pump (4) interposed in the circulation circuit (3), the cooling liquid cooled in the evaporator (24) is circulated to the equipment to be cooled (1) side so that the equipment to be cooled (1) is cooled. It is designed to be cooled. Further, the liquid cooling device is provided with a temperature control device for controlling the temperature of the cooling liquid, that is, a liquid temperature detector (which detects the temperature of the cooling liquid circulated in the circulation circuit (3) ( 7), an air temperature detector (8) for detecting the air temperature, and an operating state detecting means (90) such as a temperature sensor for detecting the operating state of the equipment to be cooled (1).
And an inverter (1 that controls the capacity of the compressor (21).
0) and a controller (5), in which the cooling liquid temperature is set to a set value based on the detection results of the liquid temperature detector (7) and the air temperature detector (8). Feedback control means for controlling the output of the inverter (10) so that the frequency of the inverter (10) is changed by an external command signal from the operating state detection means (90). It is provided.

Therefore, the cooling liquid circulated in the liquid circulation circuit (3) reaches a set value by the output from the feedback control means based on the detection results of the liquid temperature detector (7) and the air temperature detector (8). The capacity of the compressor (21) can be controlled by controlling the frequency of the inverter (10) so that the equipment to be cooled can be controlled by the feedback control means as described above. When the operating state of (1) changes and the amount of change exceeds a certain value, the inverter (10) is driven by the output from the frequency changing unit based on the output from the operating state detecting unit (90). ), The capacity of the compressor (21) can be promptly controlled without causing a control delay due to feedback control and without causing hunting. You can, and as a result,
The temperature of the cooling liquid can be accurately controlled.

(Problems to be Solved by the Invention) However, when the temperature control device as described above is used to control the temperature of the cooling liquid, the temperature control can be performed accurately. It has been found that even if the temperature of the liquid is accurately controlled, a large mechanical displacement is generated in the working portion such as the main shaft of the device to be cooled (1). That is, in the case of performing work on the cooled device (1) side, even if the temperature of the cooling liquid circulated in the liquid circulation circuit (3) is accurately and stably controlled, the cooled device It has been found that there is a problem in that a large mechanical thermal displacement occurs in the working part of (1), and the processing accuracy is reduced.

Then, as a result of investigating a phenomenon in which a large thermal displacement occurs in the operating portion even though the temperature of the cooling liquid is stably controlled, it was found that it correlates with the rotational speed of the operating portion.

That is, the rotation speed of the operating unit is set to a low speed rotation (for example, 1000 rpm).
m), the thermal displacement between the Z-axis direction (axial direction) of the main shaft and the Y-axis direction orthogonal to the moving direction of the work, and the Z-axis direction and the Y-axis direction when high-speed rotation (for example, 6000 rpm) is performed. As a result of examining the thermal displacement of, the thermal displacement increases from the low speed rotation to the high speed rotation, as shown in Fig. 3 (e) and (g). We found that a similar thermal displacement occurred.

As described above, the present invention is based on the new knowledge that the thermal displacement of the operating portion changes in correlation with the number of rotations thereof, and makes it possible to reduce the thermal displacement. The purpose is to cool the equipment to be cooled. Of a liquid cooling device that can perform more accurately according to the operating state of the cooling device, reduce mechanical displacement occurring in the operating part of the device to be cooled, and improve processing accuracy. It is to provide a temperature control device.

(Means for Solving the Problems) The present invention relates to a liquid circulation circuit (3) for circulating a cooling liquid in a device to be cooled (1), a compressor (21), a condenser (22), and a decompressor capable of controlling a capacity. In a temperature control device of a liquid cooling device comprising a mechanism (23) and a refrigeration circuit (2) having an evaporator (24) for cooling the cooling liquid of the liquid circulation circuit (3), the temperature of the cooling liquid , A liquid temperature detector (7) for detecting the temperature of the cooling liquid, a capacity control means for controlling the capacity of the compressor (21), and the liquid temperature detector ( Based on the detection result of 7), feedback control means for controlling the output of the capacity control means so that the coolant temperature converges to a set value, and operation state output for outputting the operation state of the equipment to be cooled (1). Means, and based on the output from the operating state output means, And it is characterized in that it comprises a set value changing means for changing the value.

It is desirable that the operating state output means includes a rotation speed detection sensor that detects and outputs the rotation speed of the main shaft of the device to be cooled (1).

The operating state output means may include a temperature detection sensor that detects and outputs the temperature of the operating portion of the device to be cooled (1).

Furthermore, the operating state output means may include a displacement detection sensor that detects and outputs a mechanical displacement of an operating portion of the device to be cooled (1).

(Operation) During operation of the device to be cooled (1), the cooling liquid cooled by the evaporator (24) of the refrigeration circuit (2) is passed through the liquid circulation circuit (3) to the device to be cooled (1). ) Side, the cooling liquid whose temperature has been raised by cooling the device to be cooled (1) is returned to the evaporator (24) again to be cooled, and the device to be cooled () is cooled by circulating the cooling liquid. 1) is cooled.
Further, the equipment to be cooled (1) using the cooling liquid as described above
At the time of cooling, the temperature of the cooling liquid is detected by the liquid temperature detector (7), and the detected value and the temperature setting device (6)
Is compared with the set value by the output of the feedback control means based on the comparison result, the capacity control means is controlled so that the coolant temperature converges to the set value, the compressor (21) When the operating state of the device to be cooled (1) changes during the control by the feedback control means, the set value is based on the output from the operating state output means. The changing means changes the set value set by the setting device (6), the capacity control means is controlled based on the changed set value, and the capacity of the compressor (21) is controlled to perform the cooling liquid. The temperature of is controlled to a new set value. As described above, the set value by the setter (6) is changed, the capacity of the compressor (21) is controlled based on the changed set value, and the temperature of the cooling liquid in the circulation circuit (3) is controlled. As a result, the device to be cooled (1) is cooled accurately and promptly in accordance with its operating state, the mechanical displacement occurring in the operating part of the device to be cooled (1) can be reduced, and its processing accuracy is improved. It can be done.

As the operating state output means, the device to be cooled (1)
When a rotation speed detection sensor for detecting and outputting the rotation speed of the main shaft is provided, it becomes possible to change the set value in synchronization with the change of the rotation speed, and therefore, not only the configuration of the set value changing means becomes simple, The operation of the capacity control means can be controlled without a response delay, and the mechanical displacement in the operating portion can be further reduced.

When a temperature detection sensor that detects and outputs the temperature of the operating portion of the device to be cooled (1) is provided as the operating state output means, the set value can be changed in synchronization with the temperature change of the operating portion. Therefore, the controllability of the capacity control means can be improved.

Furthermore, when a displacement detection sensor that detects and outputs the mechanical displacement of the operating portion of the device to be cooled (1) is provided as the operating state output means, the set value is matched with the mechanical displacement of the operating portion. Therefore, the controllability of the capacity control means can be improved.

(Example) Hereinafter, a temperature control device for a liquid cooling device according to the present invention,
A description will be given based on FIGS. 1 and 2. In each figure, the same components as those in FIG. 7 described above are designated by the same reference numerals.

In FIGS. 1 and 2, (1) is a machine tool shown as an example of a device to be cooled, including a spindle (1a) on which a drill or a milling blade is attached at the tip, and a heat load generated on the spindle (1a). And a reservoir (1c) for receiving the cooling liquid and a cooling liquid pipe (1b) for circulating the cooling liquid to keep the temperature constant. Incidentally, (1d) is a control panel for controlling the operation of the machine tool (1).

(2) is a refrigeration circuit for cooling the main shaft (1a) of the machine tool (1), and has a capacity controllable compressor (21), condenser (22), decompression mechanism (23) and evaporation. Bowl (24)
And an evaporator (24) provided with an accumulator (25)
A liquid circulation circuit (3) between the liquid pipe (1b) of the machine tool (1) and the liquid pipe (1b) of the machine tool (1), and the evaporator (24) The cooling liquid cooled in () is circulated to the machine tool (1) side to cool the machine tool (1). The compressor (2
As 1), there is used one that controls the capacity by an inverter described later, or one that has a bypass path between the intake side and the discharge side and controls the capacity by controlling the opening / closing of the bypass path. can do.

The above liquid cooling device is provided with a temperature control device for controlling the temperature of the cooling liquid circulated in the liquid circulation circuit (3). That is, this temperature control device includes a controller (5), and a setting device (6) for setting the temperature of the cooling liquid circulated in the liquid circulation circuit (3) on the input side of the controller (5). A liquid temperature detector (7) for detecting the outlet temperature of the cooling liquid in the circulation circuit (3) to the machine tool (1), an air temperature detector (8) for detecting the air temperature, and the machine tool A capacity control mainly composed of an inverter, which is connected to an operation status output means (9) for outputting the operation status of (1) and controls the capacity of the compressor (21) on the output side of the controller (5). Means (hereinafter referred to as an inverter) (10) is connected, the capacity of the compressor (21) is controlled by changing the output from the inverter (10), and the evaporation capacity of the evaporator (24), that is, the circulation circuit. (3) Cooling While controlling the liquid temperature, the controller (5) circulates through the circulation circuit (3) based on the detection results of the liquid temperature detector (7) and the air temperature detector (8). Feedback control means (11) for controlling the output of the inverter (10) so that the temperature of the cooling liquid to be converged to the set value set by the setting device (6), and the operating state output means (9) And a set value changing means (12) for changing the set value by the setter (6).

The inverter (1 used as the capacity control means
0), as shown in Table 1 below, frequency control of the compressor (21) is performed at 0 to 120 frequency (Hz) in steps of 0 to 10.

Further, the controller (5) is provided with an interface circuit that uses 4-bit signals arranged at addresses "1" to "4" shown in Table 2 below for control, and the inverter ( The compressor (21) is variously controlled via 10).

In Table 2, "-" means that the function is performed regardless of whether the value of the external command signal is (0) or (1), that is, for example, the spindle (1a). ) Is overcooled, etc., from address "2""4" (1)
When the output signal of (1) is output, regardless of the external command signal input to the addresses "1" and "3",
The compressor (21) is stopped.

When the machine tool (1) is in operation, the liquid temperature detector (7) and the air detector (8) allow the temperature (T) at the outlet side of the circulation circuit (3) to the machine tool (1).
O) and the air temperature (TA) are detected, the deviation ΔT = TO-TA of these respective temperatures is compared with the set value (TS) set by the temperature setter (5), and the feedback based on the comparison result. As shown in Tables 1 and 2 by the output from the control means (11), multi-step control of the compressor (21) by the inverter (10) is performed to circulate in the circulation circuit (3). Feedback control is performed so that the temperature of the cooling liquid to be converged to the set value (TS).

Further, as shown in the following Table 3, the above feedback control is performed in 10 steps at 0.5 ° C intervals according to the comparison value between the deviation ΔT = TO-TA and the set value (TS) set by the temperature setter (5). A temperature zone extending over the temperature range is set, and the frequency (f) of the inverter (10) is controlled corresponding to this temperature zone.

As is clear from Table 3 above, the deviation ΔT = TO−TA
And the set value (TS) set by the temperature setter (5) is in the temperature zones 0-U and 0-L, that is, TS
When it is in the range of ± 0.5 ° C, it is judged that it is in the stable region and the frequency control of the inverter (10) is not performed.
When is less than 0.5 ° C, the frequency control is performed by adding 10Hz, and when TS is less than 0.5 ° C, the frequency control is performed by subtracting 10Hz.

Further, when the operation state of the machine tool (1) changes during the control by the feedback control means (11), based on the output from the operation state output means (9),
A set value change signal is output from the set value changing means (12), and the set value (TS) by the setter (6) is changed. In other words, the standard setting value (TS) in Table 3 above is changed,
The inverter (10) is controlled based on the changed set value to control the capacity of the compressor (21).
As described above, the set value by the setting device (6) is changed, and the capacity of the compressor (21) is controlled based on the changed set value to control the temperature of the cooling liquid in the circulation circuit (3). Thereby, the spindle (1a) of the machine tool (1) is cooled accurately and quickly, the mechanical thermal displacement generated on the spindle (1a) is reduced, and the machining accuracy is improved.

As the operating state output means (9), for example, a rotation speed detection sensor that detects the rotation speed of the spindle (1a) in the machine tool (1) based on the current value of the spindle motor (m) is used. The set value changing means (12) is configured to output to the side, and when the detection sensor (9) is used, the set value (TS) can be changed in synchronization with the change of the rotation speed, Not only the configuration of the set value changing means (12) for changing the set value (TS) is simple, but also the response is good and the inverter (10) can be quickly controlled.

That is, the present invention has found that the mechanical thermal displacement of the spindle (1a) is correlated with the rotational speed of the spindle (1a),
Based on this new recognition, the operating state of the spindle (1a) that correlates with thermal displacement is detected, the set value of the temperature for cooling the cooling liquid is changed, and the changed set value (TS) is set. Based on the feedback control of the inverter (10), the thermal displacement of the main shaft (1a) can be minimized.

 This point will be described in more detail with reference to FIG.

FIG. 3 shows changes in the amount of thermal displacement of the spindle (1a) when the rotational speed of the spindle (1a) in the machine tool (1) is changed while the temperature of the coolant is being controlled. In FIG. 3, (a) shows an operation pattern in which the spindle (1a) is changed to 1000 rpm (rpm) and 6000 rpm every one hour, and (b) is the detection sensor ( 9) shows a changed state of the set value changed by the set value changing means (12) based on the output from 9), and (c) shows the outlet side temperature of the liquid circulation circuit (3) accompanying the change of the set value. Shows changes. Further, the solid line (d) is the thermal displacement (μm) in the Z-axis direction on the spindle (1a) according to the present invention.
The dotted line (e) shows the thermal displacement in the Z-axis direction on the spindle (1a) according to the conventional example, and the solid line (f) shows the thermal displacement in the Y-axis direction on the spindle (1a) according to the present invention ( μm), and the dotted line (g) is the main spindle (1a) according to the conventional example.
7 shows the thermal displacement in the Y-axis direction.

As is apparent from FIG. 3, when the rotation speed of the spindle (1a) in the machine tool (1) is detected by the detection sensor (9) and the rotation speed is changed from 1000 rotations to 6000 rotations, Based on this detected value, the set value changing means (12)
By changing the set value (TS) by the setter (6) to a low value, the outlet side temperature of the liquid circulation circuit (3) is reduced as the set value is lowered, as shown in (c) above. As a result, the thermal displacement of the main shaft (1a) in the Z-axis direction and the Y-axis direction is controlled by the dotted line (e) according to the conventional example.
With respect to the change of (g), the amount of thermal displacement is reduced to about half as shown by the solid lines (d) and (f).

When the rotation speed detection sensor (9) is used as the operating state output means (9), the rotation speed of the spindle (1a) may be directly detected, but as described above, the rotation motor provided on the spindle (1a). It is preferable to detect the current value of. Further, when the number of revolutions in a predetermined machining time is preset corresponding to the type of workpiece and the machining state, the spindle (1a) is preset to a set value corresponding to the number of revolutions changed according to the operation pattern. You may make it set.

Further, as the operating state output means (9), a temperature detection sensor for detecting a temperature change of an operating portion such as a spindle (1a) in the machine tool (1) may be used, or a mechanical sensor of the operating portion may be used. It is also possible to use a displacement detection sensor such as a strain gauge that detects displacement.

The change in the thermal displacement of the working part represented by the main shaft (1a) occurs due to the change in the rotation speed of the main shaft (1a), but the temperature change in the main shaft (1a) is caused by the change in the rotation speed. Occurs, the thermal displacement increases due to this temperature change, so this temperature change is detected and the set value (T
It is possible to suppress the increase in the thermal displacement also by changing S), and it is also possible to suppress the increase in the thermal displacement by detecting the thermal displacement and changing the set value (TS). To detect the temperature change or thermal displacement and set value (T
When S) is changed, the thermal displacement can be suppressed more accurately.

Next, the contents of control by the temperature control device as described above are
A description will be given based on the flowcharts shown in FIGS.

First, when the operation is started (step 1), it is judged whether or not the power is turned on (step 2). If the power is turned on, the power lamp is turned on in step 3, and then the operation is started in step 4. It is determined whether the switch is turned on, and if it is turned on, the operation lamp is turned on. Next, in step 5, it is determined whether or not the protective device (not shown) is normal. If the result is NO, that is, if the protective device is abnormal, an abnormal output display is performed in step 7, and in step 8, the operation is started. It is determined whether or not the operation is stopped, and whether or not the reset is completed in step 9. If both of the steps 8 and 9 are YES, the abnormal output display is turned off in step 10, The routine from step 2 is repeated. When it is determined in step 6 that the protection device is normal, the monitor is displayed in step 11 and then the circulation pump (4) provided in the liquid circulation circuit (3) is operated in step 12. That is, cooling is performed by the cooling liquid on the side of the machine tool (1).
In 13, detection of the air temperature (TA) detected by the air temperature detector (8) and the outlet side temperature (TO) of the circulation circuit (3) detected by the liquid temperature detector (7) A capacity map is calculated, and a temperature deviation ΔT = TO−TA between the outlet side temperature (TO) and the air temperature (TA) is calculated. Then, in steps 15 to 17, the deviation TO-TA and the set value TS set by the setter (5) are compared, that is, the temperature zone shown in Table 3 is determined, and based on the result, step In 18 to 20, the frequency (n) increase / decrease control in the inverter (10) is performed, and the step
In case of No in 17, that is, the temperature deviation TO-TA
And the temperature difference between the set value TS and the set value TS is smaller than TS−2.0 ° C., in step 21, the inverter (10) is controlled to the minimum frequency, that is, f = f−50 Hz.
Feedback control of the inverter (10) is performed.

Next, after passing through the step 21, the routine proceeds to the routine of FIG. 5, and in step 22 of the figure, the temperature deviation ΔT is in the stable region, that is, the temperature of 0-U, -L shown in Table 3 above. Whether or not it is in the zone is determined. If the result is YES, the inverter control is performed in that state without changing the frequency in step 23, and step 24 is reached. If the result of step 22 is NO, the number of times (n) that reached the step is counted, and the count number is 3
It is determined in step 26 whether or not the number of times is less than or equal to the number of times. If yes, it is determined that sufficient time to change the operating conditions has not elapsed, and in step 27 the frequency is not changed and the state is left unchanged. The inverter control is performed in step 26. If the result in step 26 is NO, it is determined in step 28 whether or not the frequency region is on the lower side. If it is on the lower side, the frequency f = f + 10 Hz is set in step 29. If it is on the increasing side, in step 30, the frequency f = f-10Hz
The frequency is changed to step 24. Then, in step 24, it is judged whether or not a signal is output from the operating state output means (9), and in the case of NO, that is, during the feedback control, the operating state of the machine tool (1) In the case where the rotation speed changes or the temperature change amount of the spindle (1a) exceeds a certain value and the output signal is output from the operating state output means (9), the input signal After the information processing, in step 32, the set value (TS) by the setter (6) is changed by the set value changing means (12).

In addition, in the case of yes in step 24 and after the resetting of the set value in step 32 is completed,
The routine proceeds to the routine shown in the figure, and in step 32 of the figure, it is judged whether or not the frequency f ≦ 120 Hz, and in the case of no, that is, when the frequency exceeds the maximum frequency 120 Hz, f = Forced to 120Hz,
Further, in step 34, it is judged whether or not the frequency f <30 Hz, and in the case of No, that is, the frequency is the minimum frequency.
When the frequency is 30 Hz or more, the frequency is reset to the current frequency f in step 35. If the result of the determination in steps 32 and 34 is yes, in step 36, the number of times (m) that reached this step is counted, that is, the state in the extreme frequency region as described above is counted. , Whether or not this count is 3 or more
In case of No, that is, the extreme frequency range is 3
If it is repeated more than once, the compressor (21) is forcibly stopped in step 38, and in the case of Yes in step 37, that is, the extreme frequency region is repeated three times or more. If not, the frequency is fixed at f = 30 in step 39. Also, in step 40,
The frequency f of the inverter (10) set by the above control is output to the compressor (21), the sampling time of 60 seconds is counted in step 41, and then the process is returned.

In the embodiment described above, the liquid temperature detector (7) for detecting the temperature of the cooling liquid and the air temperature detector (8) are used to detect the temperature of the liquid temperature (TO) and the temperature of the air (TA). Deviation Δ
T (TO-TA) is calculated so that this temperature deviation ΔT converges to a predetermined set value TS, but the liquid temperature (T
It is also possible to control so that the liquid temperature (TO) converges to the temperature of the set value (TS) by comparing only O) as a control parameter with the set value (TS).

In addition, based on the operating parameters of the spindle (1a), when changing the set value (TS) corresponding to the rotation speed,
The operation command from the control panel (1d) of the machine tool (1)
The control panel (1d) constitutes an operating state output means, since it is inputted to the interface circuit of the controller (5).

(Effects of the Invention) As described above, in the temperature control device of the liquid cooling device according to the present invention, the liquid interposed between the evaporator (24) of the refrigeration circuit (2) and the device to be cooled (1). Temperature setting device (6) for setting the temperature of the cooling liquid circulated in the circulation circuit (3)
And a liquid temperature detector (7) for detecting the temperature of the cooling liquid
And the capacity control means for controlling the capacity of the compressor (21) provided in the refrigeration circuit (2) and the detection result of the liquid temperature detector (7), whereby the coolant temperature converges to a set value. Feedback control means for controlling the output of the capacity control means, operating state output means for outputting the operating state of the equipment to be cooled (1), and the set value based on the output from the operating state output means. Since the setting value changing means for changing is provided, the temperature of the cooling liquid for cooling the operating part can be changed according to the operating state of the operating part in the equipment to be cooled (1). The thermal displacement that changes in correlation with the number can be reduced.

Therefore, when the cooled device (1) processes a workpiece like a machine tool, the processing accuracy can be improved.

As the operating state output means, the device to be cooled (1)
By using a rotation speed detection sensor that detects and outputs the rotation speed of the main shaft, the set value can be changed in synchronization with the rotation speed, and not only the configuration of the set value changing means becomes simpler, but also the capacity control means. The operation can be controlled without a response delay, and the mechanical displacement in the operating portion can be further reduced.

Further, by using a temperature detection sensor that detects and outputs the temperature of the operating portion of the device to be cooled (1) as the operating state output means, the set value can be changed in synchronization with the temperature change of the operating portion. Therefore, the controllability of the capacity control means can be improved.

Furthermore, by using a displacement detection sensor that detects and outputs the mechanical displacement of the operating portion of the device to be cooled (1) as the operating state output means, a set value that matches the mechanical displacement of the operating portion is set. Therefore, the controllability of the capacity control means can be improved.

[Brief description of drawings]

FIG. 1 is a block diagram of a temperature control device according to the present invention, FIG. 2 is a piping diagram showing the overall structure of a liquid cooling device, and FIG. 3 is a temperature control of a cooling liquid while changing the rotation speed of a spindle in a machine tool. And FIG. 6 are flow charts showing the control mode of the temperature control device, and FIG. 7 is a block diagram showing a conventional example. (1) …… Cooled equipment (1a) …… Spindle (2) …… Refrigeration circuit (21) …… Compressor (22) …… Condenser (23) …… Decompression mechanism (24) …… Evaporator ( 3) Liquid circulation circuit (6) Temperature setter (7) Liquid temperature detector (9) Operating status output means (10) Capacity control means (11) Feedback control means ( 12) …… Setting value changing means

Claims (4)

[Claims] 1. A liquid circulation circuit (3) for circulating a cooling liquid through a device to be cooled (1), a compressor (21), a condenser (22), a decompression mechanism (23) and the liquid circulation which can control the capacity. A temperature controller for a liquid cooling device, comprising a refrigeration circuit (2) having an evaporator (24) for cooling the cooling liquid of a circuit (3), the temperature setting device setting the temperature of the cooling liquid. (6)
And a liquid temperature detector (7) for detecting the temperature of the cooling liquid
And a capacity control means for controlling the capacity of the compressor (21), and a detection result of the liquid temperature detector (7),
Feedback control means for controlling the output of the capacity control means so that the coolant temperature converges to a set value, operation state output means for outputting the operation state of the equipment to be cooled (1), and operation state output means And a set value changing means for changing the set value based on the output of the temperature control device of the liquid cooling device. 2. The temperature control device for a liquid cooling device according to claim 1, wherein the operating state output means includes a rotation speed detection sensor for detecting and outputting the rotation speed of the main shaft of the equipment to be cooled (1). 3. The temperature control device for a liquid cooling device according to claim 1, wherein the operating state output means includes a temperature detection sensor for detecting and outputting the temperature of the operating portion of the equipment to be cooled (1). 4. The temperature control device for a liquid cooling device according to claim 1, wherein the operating state output means includes a displacement detection sensor that detects and outputs a mechanical displacement of an operating portion of the equipment to be cooled (1).