KR20160143281A - 3-axis device fabricating surface continuously based on laser scanner and control method for the device - Google Patents

Abstract

The present invention relates to a three-axis surface continuous machining apparatus and a control method thereof, and more particularly, to a three-axis surface continuous machining apparatus and a control method therefor, including a stage having moving means for moving a workpiece along a scan path; A scanner for processing the surface of the workpiece; And a control board for controlling the stage and the scanner based on the scan path, and a control method therefor.

Description

TECHNICAL FIELD [0001] The present invention relates to a three-axis surface continuous machining apparatus based on a laser scanner and a control method therefor, and a control method therefor. BACKGROUND OF THE INVENTION 1. Field of the Invention [0001]

More specifically, the present invention relates to a three-axis surface continuous machining apparatus and a control method thereof, and more particularly, to a three-axis surface continuous machining apparatus and a control method thereof, in which a laser scanner corrects a slow reaction of a stage when a movement path of a stage is changed, And a control method thereof.

As a large area processing using a laser, a step & scanning method is used. This is a method in which the stage is stopped and the stage is moved to the next step and then processed by a scanner. In this case, there is a drawback that the machining speed is slow and a seam due to discontinuous machining occurs at the scan boundary.

Korean Patent Publication No. 10-2013-0134863 (published on December 10, 2013)

The present invention has been proposed in order to solve the problem according to the conventional method in which a seam due to discontinuous machining is generated at the scan boundary surface and is a machining apparatus for continuously performing precision machining on the surface of a workpiece by forming a scan path, And to provide the above objects. More specifically, it is intended to provide a device capable of performing continuous precision machining on the surface of a workpiece by three-axis correction of a slow reaction of the stage at a laser scanner changing the movement path of the stage, and a control method thereof.

In order to achieve the above object, the present invention provides, as a first feature, a stage having a moving means for moving a workpiece along a scan path; A scanner for processing the surface of the workpiece; And a control board for controlling the stage and the scanner based on the scan path.

At this time, the moving means includes an X-axis driving portion, a Y-axis driving portion and a Z-axis driving portion for moving the workpiece in the X-axis, Y-axis and Z-

The control board can control the X-axis driving unit, the Y-axis driving unit, and the Z-axis driving unit by generating an X-axis driving, a Y-axis driving and a Z-axis driving command based on the scan path.

At this time, the control board may generate a correction command for correcting an error between the respective driving commands and actual movements of the stage.

In this case, the correction command may include an inertia error correction value for correcting an error caused by the inertia of the stage.

At this time, the control board transmits the correction command to the scanner,

The scanner can correct the scan range according to the correction value of the correction command.

In order to achieve the above object, according to a second aspect of the present invention, there is provided a substrate processing apparatus including: a stage having moving means for moving a workpiece along a scan path; A scanner for processing the surface of the workpiece; And a control board for controlling the stage and the scanner, the control method comprising the steps of: (a) generating a scan path such that the scan range of the scanner passes over the entire surface of the workpiece ; (b) generating a drive command to drive the moving means past the scan path; (c) generating a correction command for correcting an error between the driving command and the actual movement of the stage; And (d) machining the surface of the workpiece based on the correction command.

In this case, the correction command may include an inertia error correction value for correcting an error caused by the inertia of the stage.

According to the three-axis surface continuous machining apparatus and the control method therefor according to the present invention, it is possible to continuously perform precision machining on the surface of the workpiece, since the laser scanner corrects the slow reaction of the stage when the movement path of the stage is changed.

The effects of the present invention are not limited to those mentioned above, and other effects not mentioned can be clearly understood from the following description.

1 is a schematic diagram of a three-axis surface continuous machining apparatus according to the present invention.
2 is a schematic view of the inside of the scanner according to the present invention.
3 is a schematic diagram showing the difference between the movement control command and the actual motion of the stage due to the inertia of the stage.
4 is a flowchart for controlling a three-axis surface continuous machining apparatus according to the present invention.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. The embodiments of the present invention can be modified into various other forms, and the scope of the present invention is not limited to the embodiments described below. The shape and the size of the elements in the drawings may be exaggerated for clarity and the same elements are denoted by the same reference numerals in the drawings.

And throughout the specification, when a part is referred to as being "connected" to another part, it includes not only "directly connected" but also "electrically connected" with another part in between. Also, when a component is referred to as being "comprising" or "comprising", it is to be understood that this does not exclude other components, unless the context otherwise requires, do.

1 is a schematic view of a three-axis surface continuous machining apparatus according to an embodiment of the present invention.

Referring to FIG. 1, a three-axis surface continuous machining apparatus 100 according to the present invention includes a stage 110, a scanner 120, and a control board 130.

In the present invention, the workpiece 200 is a workpiece requiring processing with a laser according to a design such as a semiconductor device, a mold, or a tool.

The scanner 120 is a device that performs laser machining on the surface of the work 200 according to design. The scanner 120 performs various operations such as drilling, marking, cutting, and the like. There are many types of laser scanners that perform such processing. Among them, since a galvano scanner is widely used, , It is assumed that the scanner 120 is a galvano scanner.

In general, the widely used scanner 120 has an area (scan field) that can be scanned and processed at a time of several tens of m 2 mm 2. On the other hand, since the surface of the workpiece 200 is mostly wider than the surface of the workpiece 200, the scanner 120 must move along the surface of the workpiece 200 in order to process the entire surface of the workpiece 200.

A path through which the scanner 120 moves relative to the workpiece 200 so that the scan field of the scanner 120 covers the entire surface of the workpiece 200 is referred to as a scan path. The scan path running of the scanner 120 can be performed by a method in which the scanner 120 moves with respect to the fixed workpiece 200 or the workpiece 200 is moved with respect to the fixed scanner 120. [ However, since the scanner 120 is a precision apparatus including a laser and an optical component, the scanner 120 can be fixed and a method of moving the workpiece 200 along the scan path can be selected. The scan path is shown as a two-dimensional path, but the scan path includes moving to the surface topography (curved surface) of the workpiece 200 as shown. That is, the scan path includes Z-axis movement.

The stage 110 moves the workpiece 200 along the scan path.

The stage 110 includes an X-axis driving unit, a Y-axis driving unit, and a Z-axis driving unit (each driving unit is not shown for the sake of brevity). And moves the workpiece 200 along a scan path generated by computer-aided manufacturing (CAM) software.

The control board 130 includes a stage control unit (not shown) for controlling the stage 110, a scanner control unit (not shown) for controlling the scanner 120, and an error correction unit (not shown).

The stage control unit generates an X-axis driving unit, a Y-axis driving unit and a Z-axis driving unit command from the cam data, and drives the axis driving unit, the Y-axis driving unit, and the Z-axis driving unit via the X-, Y-, and Z- .

The scanner control unit controls the scanner 120 to perform laser processing on the surface of the work 200 by design.

2, the scanner 120 includes a beam output unit 121, a focal point varying unit 122, an x-axis mirror 123, an x-axis motor 125 (see FIG. 2) a y-axis mirror 124, and a y-axis motor 126 (other components such as beam splitter and beam scanner are not shown).

The scanner control unit (not shown) pays surface machining data of the workpiece 200 from the cam data and outputs a command to drive the beam output unit 121, a focal point varying unit 122, an x-axis motor 125, And transmits the generated driving command to the scanner 120.

That is, the stage controller (not shown) moves the workpiece 200 along the scan path, and the scanner controller controls the scanner 120 to perform continuous machining on the moving workpiece 200 surface.

At this time, the stage 110 has inertia in proportion to the mass of the fixed workpiece 200 and the mass of each driving portion. When sudden movement of the stage 110 is required, such as when the scan path changes, An immediate response is not performed.

3 is a schematic diagram showing the difference between the movement control command and the actual motion of the stage due to the inertia of the stage.

For example, if the stage 110 must have a moved position of 'a' at t1, the stage controller must generate a driving command to move by 'a' in advance at t0 due to the inertia of the stage 110. [ Nevertheless, a control error in the portion indicated by the dashed line occurs between t0 and t1. Reducing the speed of the stage 110 moving the scan path reduces the control error but increases the processing time of the workpiece 200. [

In order to overcome this disadvantage, the present invention corrects the control error generated in the stage 110 by the scanner 120.

Since the instruction for driving the stage 110 is executed in units of milliseconds (msec) and the instruction for driving the scanner 120 is executed in units of microseconds (μsec), error correction instructions are generated And reflects it on the scanner 120 control command.

For example, if t0 and t1 are the interval during which the stage 110 driving instruction is executed, its value is 1 mmsec, and the execution interval of the driving instruction of the scanner 120 is 10 microseconds, 99 error correction commands are generated between t0 and t1, (120) control command.

Referring again to FIG. 3, the error correction unit generates error correction commands from a1 to a99 and reflects them in the scanner control command.

Since the movement value 'a' of the stage 110 in FIG. 3 is an example to explain the error that is generated, in the actual implementation of the stage 110, a correction value for movement of each of the X axis, Y axis, and Z axis is required Do. Therefore, the error corrector generates a correction command for each axis.

The X-axis and Y-axis correction commands are reflected in the control commands for the x-axis motor 125 and the y-axis motor 126, respectively, and the Z-axis correction command is reflected in the command for controlling the focus- That is, the three-axis correction is performed by the x-axis motor 125, the y-axis motor 126 and the focal point varying section 122.

4 is a flowchart for controlling a three-axis surface continuous machining apparatus according to the present invention. FIG. 4 is a time-series implementation of the three-axis surface continuous machining apparatus shown in FIG. 1, and the parts described with respect to the stage 110, the scanner 120, and the control board 130 are applied to this embodiment as it is.

The three-axis surface continuous machining apparatus control method according to the present invention includes a scan path generating step S410, a movement command generating step S420, a correction command generating step S430, and a machining step S440.

In step S410, the three-axis surface continuous machining apparatus generates a scan path such that the scan range of the scanner passes over the entire surface of the workpiece. Scan path generation is generated by paging the generated cam data by computer-aided manufacturing (CAM) software. The three-axis surface continuous machining apparatus may take scan path data generated by a separate apparatus.

1, the scan path is assumed to be a two-dimensional path, but the scan path includes a movement according to the surface topography (curved surface) of the workpiece 200, so that the scan path is understood as a three- .

In step S420, the three-axis surface continuous machining apparatus generates a drive command for driving the moving means so that the scanner passes the scan path.

In step S430, the control board generates a correction command for correcting an error between the driving command and the actual movement of the stage. The correction command is a command for correcting the difference between the movement control command and the actual motion of the stage due to the inertia of the stage.

The control board applies the correction command to the scanner control command to correct the scanning range of the scanner. That is, a command tilted by the correction command value in each axis direction is generated to control the scanner.

The stage control unit, the scanner control unit, and the error correction unit have been described in detail in the foregoing, and a detailed description thereof will be omitted.

In step S440, the scanner processes the surface of the workpiece in accordance with the control command to which the correction command is applied.

The present invention has been described with reference to the preferred embodiments. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. Therefore, the disclosed embodiments should be considered in an illustrative rather than a restrictive sense. The scope of the present invention is defined by the appended claims rather than by the foregoing description, and all differences within the scope of equivalents thereof should be construed as being included in the present invention.

100: 3-axis surface continuous machining apparatus 110: stage
120: scanner 121: beam output unit
122: focus changing portion 123: x-axis mirror
124: y-axis mirror 125: x-axis motor
126: y-axis motor 130: control board
200: Workpiece

Claims (6)

A stage having moving means for moving a workpiece along a scan path;
A scanner for processing the surface of the workpiece; And
And a control board for controlling the stage and the scanner based on the scan path.
The method according to claim 1,
The moving means includes an X-axis driving portion, a Y-axis driving portion and a Z-axis driving portion for moving the workpiece in the X-axis, Y-axis and Z-
Wherein the control board generates X-axis driving, Y-axis driving, and Z-axis driving commands based on the scan path to control the X-axis driving unit, the Y-axis driving unit, and the Z- Processing equipment.
The method of claim 2,
Wherein the control board generates a correction command for correcting an error between the respective driving commands and actual movement of the stage and transmits the correction command to the scanner,
Wherein the scanner corrects the scan range according to the correction value of the correction command.
The method of claim 3,
Wherein the correction command includes an inertia error correction value for correcting an error caused by the inertia of the stage.
A stage having moving means for moving a workpiece along a scan path; A scanner for processing the surface of the workpiece; And a control board for controlling the stage and the scanner, the control method comprising:
(a) generating a scan path such that the scan range of the scanner passes over the entire surface of the workpiece;
(b) generating a drive command to drive the moving means past the scan path;
(c) generating a correction command for correcting an error between the driving command and the actual movement of the stage; And
(d) machining the surface of the workpiece based on the correction command.
The method of claim 5,
Wherein the correction command includes an inertia error correction value for correcting an error caused by the inertia of the stage.

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