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KR930019080A - 배선판과 그 제조방법 - Google Patents
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KR930019080A - 배선판과 그 제조방법 - Google Patents

배선판과 그 제조방법 Download PDF

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KR930019080A
KR930019080A KR1019930002157A KR930002157A KR930019080A KR 930019080 A KR930019080 A KR 930019080A KR 1019930002157 A KR1019930002157 A KR 1019930002157A KR 930002157 A KR930002157 A KR 930002157A KR 930019080 A KR930019080 A KR 930019080A
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wiring board
metal
layer
wiring pattern
insulating layer
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KR970004030B1 (ko
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아츠코 이이다
히로시 오다이라
요시즈미 사토
유이치 야마모토
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사토 후미오
가부시키가이샤 도시바
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/05—Insulated conductive substrates, e.g. insulated metal substrate
    • H05K1/056—Insulated conductive substrates, e.g. insulated metal substrate the metal substrate being covered by an organic insulating layer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01—Manufacture or treatment
    • H10W70/05—Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/027—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed by irradiation, e.g. by photons, alpha or beta particles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/24—Reinforcing of the conductive pattern
    • H05K3/241—Reinforcing of the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus
    • H05K3/242—Reinforcing of the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus characterised by using temporary conductors on the printed circuit for electrically connecting areas which are to be electroplated
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/388—Improvement of the adhesion between the insulating substrate and the metal by the use of a metallic or inorganic thin film adhesion layer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/611—Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/66—Conductive materials thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/688—Flexible insulating substrates
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0393—Flexible materials
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0104—Properties and characteristics in general
    • H05K2201/0112—Absorbing light, e.g. dielectric layer with carbon filler for laser processing
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/032—Materials
    • H05K2201/0326—Inorganic, non-metallic conductor, e.g. indium-tin oxide [ITO]
    • H—ELECTRICITY
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    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0335—Layered conductors or foils
    • H05K2201/0347—Overplating, e.g. for reinforcing conductors or bumps; Plating over filled vias
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/095—Conductive through-holes or vias
    • H05K2201/09554—Via connected to metal substrate
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    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/095—Conductive through-holes or vias
    • H05K2201/09563—Metal filled via
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/10—Using electric, magnetic and electromagnetic fields; Using laser light
    • H05K2203/107—Using laser light
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/20—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
    • H05K3/205—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern using a pattern electroplated or electroformed on a metallic carrier
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42—Plated through-holes or plated via connections
    • H05K3/423—Plated through-holes or plated via connections characterised by electroplating method
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
    • H05K3/4614—Manufacturing multilayer circuits by laminating two or more circuit boards the electrical connections between the circuit boards being made during lamination
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
    • H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
    • H05K3/4635—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating flexible circuit boards using additional insulating adhesive materials between the boards
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S205/00—Electrolysis: processes, compositions used therein, and methods of preparing the compositions
    • Y10S205/917—Treatment of workpiece between coating steps

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Insulated Metal Substrates For Printed Circuits (AREA)

Abstract

본 발명은, 다수의 배선판이 적층된 다층형 배선판에 관한 것으로, 이 배선판은 관통구멍과 유연한 절연층상에 형성된 배선패턴을 갗춘 유연한 절연층으로 이루어지고, 배선패턴은 적어도 2개의 도전성층으로 이루어진다. 또, 절연층상에 형성된 제1도전성층은 비금속 도전체로 이루어지고, 제1배선패턴은 레이저빔에 의해 형성된다. 상기 제2도전성층은 제1배선패턴에 형성된 전기도금된 층이고, 상기 제1및 제2도전성층은 빔에 대해 다른 반사율을 갖는다. 상기 배선판은, 틀형태로 감겨진 플라스틱 도전성 지지기체와 롤형태로 유사하게 감겨진 절연층을 일체적으로 적충시키고, 절연층의 소정 위치에서 관통구멍을 형성하며, 관통구멍이 제공된 적충체상에 제1도전 성층을 형성하고, 레이저빔에 의해 상기 제1배선패턴을 형성하며, 제1배선패턴상에 전기도금된 층을 형성하는 것에 의해 제조된다.

Description

배선판과 그 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명에 따른 배선판 제조방법의 실시예를 도시적으로 나타낸 측면도.
제3도는 본 발명에 따른 절연층상에 제1도전성층을 적충 및 형성시키기 위한 공정의 실시예를 도식적으로 나타낸 도면.
제5도는 본 발명에 따른 배선판 제조방법의 연속적인 공정의 실시예를 도시적으로 나타낸 것이다.
제5(a)는 소정의 관통구멍이 형성된 절연층이 도전성 지지기체상에 적충된 상태를 나타낸 단면도.
제5(b)는 제1도전성층이 적충되어 형성된 상태를 나타낸 단면도.
제5(c)는 제1도전성층이 배선패턴화된 상태를 나타낸 단면도.
제5(d)는 제2금속층이 전기도금법에 의해 제1도전성층의 배선패턴층 표면상에 형성된 상태를 나타낸 단면도.

Claims (14)

  1. 유연한 절연층의 소정 위치에 형성되면서 전기적으로 도전성을 갖는 적어도 하나의 관통구멍을 갖춘 유연한 절연층과, 이 유연한 절연층의 표면상에 형성된 제 1비금속 도전성층으로 이루어지면서 적어도 관통구멍상에 형성된 제1배선패턴 및 , 이 제1배선패턴의 표면에 형성된 제2전기도금 금속층으로 이루어진 제2배선패턴을 구비하여 이루어진 각각의 유연한 배선판이 다수 적충되어 구성된 것을 특징으로 하는 다층형 배선판.
  2. 제1항에 있어서, 상기 절연층이 유기체 중합체로 이루어진 것을 특징으로 하는 다층형 배선판.
  3. 제1항에 있어서, 상기 제1비금속도전성층이 식 MeOx로 표현되는 금속산화물로 이루어지고, 여기서 Me는 Ni,Cu,Ti,Cr,Zn,Fe,Co,V,Nb,Mo,Pd,Ag,In,Sb,Ta,W,ir,Pb,Sn로 이루어진 그룹으로부터 선택된 적어도 하나의 금속이면서 상기 금속산화물에서의 산소원자의 몰 비율(x)이 0.1x0.8을 만족하는 것을 특징으로 하는 다층형 배선판.
  4. 제3항에 있어서, 상기 금속산화물이 구리산화물 및 니켈산화물로 이루어진 그룹으로부터 선택된 적어도 하나인 것을 특징으로 하는 다층형 배선판.
  5. 제1항에 있어서, 제1비금속 도전성층의 흡수율 a%와 반사율 r%가 파장 830nm의 파장을 갖춘 빔에 대해 각각 20a60,25r,60을 만족하는 것을 특징으로 하는 다층형 배선판.
  6. 제5항에 있어서,상기 제2전기도금 금속층이 적어도 60%의 반사율과 최대20%의 흡수율을 갖는 것을 특징으로 하는 다층형 배선판.
  7. 제1항에 있어서, 상기 제1배선패턴이 에너지빔의 조사에 의해 형성되는 것을 특징으로 하는 다층형 배선판.
  8. 도전성 지지기체의 표면상의 소정 위치에 형성되면서 전기적 접속이 가능한 적어도 하나의 관통구멍을 갖춘 절연층을 일체적으로 적층하는 단계와, 관통구멍을 매개로 지지기체에 전기적으로 접속되면서 상기 관통구멍과 함께 제공된 상기 절연층상에 제1비금속 도전성층을 형성하는 단계, 상기 제1도전성층의 표면상에 제1배선패턴을 형성하가 위해 에너지빔을 조사하는 단계 및, 제2금속 도전성층을 적층시켜 제2배선패턴을 형성하기 위해 지지기체가 하나의 전극으로서 기능을 하는 동안 상기 제1배선패턴층의 표면을 전기도금하는 단계로 이루어진 것을 특징으로 하는 배선판의 제조방법.
  9. 제8항에 있어서, 상기 절연층이 유기체 중합체로 이루어진 것을 특징으로 하는 배선판의 제조방법.
  10. 제8항에 있어서, 상기 제1비금속 도전성층이 식MeOx로 표현되는 금속산화물로 이루어지고, 여기서Me는 Ni,Cu,Ti,Cr,Zn,Fe,Co,V,Nb,Mo,Pd,Ag,In,Sb,Ta,W,ir,Pb,Sn로 이루어진 그룹으로부터선택된 적어도 하나의 금속이면서 상기 금속산화물에서의 산소원자의 몰비율(x)이 0.1x0.8을 만족하는 것을 특징으로 하는 배선판의 제조방법.
  11. 제10항에 있어서, 상기 금속산화물이 구리산화물과 니켈산화물로 이루어진 그룹으로부터 선택된 적어도 하나인 것을 특징으로 하는 배선판의 제조방법.
  12. 제8항에 있어서, 상기 제1비금속 도전성층의 흡수율 a%및 반사율 r%가 830nm의 파장을 갖는 빔에 대해 각각 20a60 및 25r60을 만족하는 것을 특징으로 하는 배선판의 제조방법.
  13. 제12항에 있어서, 상기 제2도전성 금속층이 적어도 60%의 반사율과 최대20%의 흡수율을 갖는 것을 특징으로 하는 배선판의 제조방법.
  14. 제8항에 있어서, 상기 페이저빔이 반도체 레이저빔인 것을 특징으로 하는 배선판의 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019930002157A 1992-02-17 1993-02-17 배선판과 그 제조방법 Expired - Fee Related KR970004030B1 (ko)

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JP4029129A JPH05226833A (ja) 1992-02-17 1992-02-17 配線板の製造方法
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KR970004030B1 (ko) 1997-03-24
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US5310966A (en) 1994-05-10
TW231370B (ko) 1994-10-01

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