KR940005919Y1 - Metal strength test device by electric stress - Google Patents
Metal strength test device by electric stress Download PDFInfo
- Publication number
- KR940005919Y1 KR940005919Y1 KR2019900009538U KR900009538U KR940005919Y1 KR 940005919 Y1 KR940005919 Y1 KR 940005919Y1 KR 2019900009538 U KR2019900009538 U KR 2019900009538U KR 900009538 U KR900009538 U KR 900009538U KR 940005919 Y1 KR940005919 Y1 KR 940005919Y1
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- 238000012360 testing method Methods 0.000 title claims description 23
- 229910052751 metal Inorganic materials 0.000 title claims description 16
- 239000002184 metal Substances 0.000 title claims description 16
- 239000000523 sample Substances 0.000 claims description 12
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 5
- 229910013496 M-Mn Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/60—Investigating resistance of materials, e.g. refractory materials, to rapid heat changes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/003—Generation of the force
- G01N2203/005—Electromagnetic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/003—Generation of the force
- G01N2203/0057—Generation of the force using stresses due to heating, e.g. conductive heating, radiative heating
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
내용 없음.No content.
Description
제1도와 제2도는 종래 일렉트로미그레이션 간략 구성도.1 and 2 are simplified diagrams of conventional electromigration.
제3도는 본 고안에 따른 테스트 장치 구성도.3 is a configuration of a test apparatus according to the present invention.
제4도는 제3도에서 시간의 변화에 따른 저항 특성도.4 is a characteristic diagram of resistance with time in FIG. 3.
제5도는 제3도에서 시간의 변화에 따른 전류 특성도.5 is a characteristic diagram of current with time in FIG.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
30 : 테스트패턴 31 : 프로브 스테이션30: test pattern 31: probe station
32 : 온도 콘트롤러 33 : PC32: temperature controller 33: PC
34 : 전압검출원 35 : 프린터34: voltage detection source 35: printer
본 고안은 메탈(Metal)(Ag,Pd,Pt,Al,Au,Cu)들로 만들어진 배선에서 임의의 온도 조건에서 일렉트리컬 스트레스(Electrical Stress)를 가하였을 경우, 전자의 운동량으로 인한 배선의 단선시간(MTF)을 구하기 위한 것으로, 특히 일렉트로미그레이션 테스트(Electromigration Test)에 적합하며 기타 재질의 성능 테스트등에 활용 할 수 있도록한 일렉트리컬 스트레스에 의한 메탈의 강도 테스트 장치에 관한 것이다.In the present invention, when electrical stress is applied under arbitrary temperature conditions in a wire made of metal (Ag, Pd, Pt, Al, Au, Cu), In order to calculate the disconnection time (MTF), the present invention relates to an apparatus for testing the strength of metals by electrical stress, which is suitable for the electromigration test and can be used for performance tests of other materials.
종래의 기술구성은 제1도에 도시된 바와 같이 챔버(Chamber)(11,12,13)가 3개로 구성이 되어지고 샘플(Sample) 팩캐이지(Package)를 챔버에 넣어서 실험하게 된다.In the prior art configuration, as shown in FIG. 1, the chambers 11, 12, and 13 are constituted by three, and the sample pack cage is put into the chamber to be tested.
이때의 온도 및 시간등을 오퍼레이션 시스템(Operation System)에 의하여 콘트롤 하게 된다.At this time, the temperature and time are controlled by the operation system.
즉 PC(15)에 의하여 콘트롤 하게된다.That is, it is controlled by the PC (15).
여기서 미 설명부호 14는 전압원(Voltage Source) 및 전류계(A- meter)이다.Reference numeral 14 is a voltage source (Voltage Source) and an ammeter (A-meter).
또한 제2도에 도시된 바와 같이 일측 패드(23a)에 연결된 전류계(21)에 전압원(20)과 타이머(22)의 직렬연결을 통해 타측 패드(23b)연결되도록한후 상기 패드(23a,23b)사이에 메탈라인(Metal-Line)을 연결한 구성으로서 이는 일랙트리컬 스트레스를 가하였을때 시간에 따라 저항이 커지므로 전류는 감소한다.In addition, as shown in FIG. 2, the pads 23a and 23b are connected to an ammeter 21 connected to one pad 23a through the series connection of the voltage source 20 and the timer 22 to the other pad 23b. Metal-Line is connected between the lines, which increases the resistance with time when the electric stress is applied, so the current decreases.
이때의 시간과 전류의 변화를 체크해야 하므로 항시 감시해야 한다.At this time, it is necessary to check the change of time and current.
이와 같이 종래의 기술구성에서는 제1도에서와 같이 챔버를 사용할 경우 장비가 고가이며 챔버를 사용하므로 웨이퍼 레벨에서의 테스트가 불가능한 문제점이 있고, 제2도에서와 같이 타이머를 이용하는 경우는 자동 테스트가 불리하므로 사람이 항시 감시해야 하는 문제점이 발생하게 된다.As described above, in the related art, when the chamber is used as in FIG. 1, the equipment is expensive and the chamber is used, so the test at the wafer level is impossible. In the case of using the timer as in FIG. Disadvantages cause problems that must be monitored at all times.
따라서 본 고안은 이와 같은 문재점을 제거하기 위한 것으로서 고가의 장비를 사용하지 않고 메탈의 재질성능을 자동으로 테스트할 수 있도록 한 것이다.Therefore, the present invention is to remove such a problem point is to be able to automatically test the material performance of the metal without using expensive equipment.
즉, 제3도에 도시된 바와 같이, 본 고안에 테스트 장치는 두개의 패드(Pad)(30a,30b)사이에 복수개의 메탈라인(M1-Mn)이 병렬 연결되고 두 패드(30a,30b)에 전원전압이 인가된 테스트 패턴(30)과, 테스트 패턴(30)이 놓여지는 시료(31a)와 시료(31a) 타측에 위치되고 외부로부터 공급되는 에너지에 의해 시료(31a)내의 매탈라인들(M1-Mn)을 가열하여 그것들의 저항값(R1-Rn)을 변화시키는 가열 스테이지(31b)로 이루어진 프로브 스테이션(Probe statron)(31)과, 상기 가열 스테이지(31)에 전류를 공급하여 테스트패턴(30)에 연결된 메탈라인들(M1-Mn)에 열을 가함으로써 그것들의 저항값들(R1-Rn)을 변화시키는 온도콘트롤러(Temperature Controller)에로서, 전류원(32)와, 두개의 프로브(34a,34b)를 이용하여 테스트패턴(30)의 양패드(30a,30b)사이의 전원변화를 검출하는 전압검출원(34)와, 사용자의 선택에 의해 온도콘트롤러(32)의 전류공급을제어하고 전압검출원(34)으로 부터의 전압변화를 인식하여 그에 상응하는 전류와 저항값을 시간의 경과에 따라 디스플레이하는 PC(Perspnal Computer)(33), 그리고 PC(33)의 제어에 의해 시간의 경과에 따른 전류과 저항값을 프린트하는 프린터(35)로 구성된다.That is, as shown in FIG. 3, the test apparatus according to the present invention includes a plurality of metal lines M 1 -Mn connected in parallel between two pads 30a and 30b and two pads 30a and 30b. ), The buried lines in the sample 31a by the test pattern 30 to which the power supply voltage is applied, the sample 31a on which the test pattern 30 is placed, and the energy placed on the other side of the sample 31a and supplied from the outside. Probe statron 31 consisting of a heating stage 31b for heating M 1 -Mn to change their resistance values R 1 -Rn, and supplying current to the heating stage 31. To a temperature controller (Temperature Controller) to change their resistance values (R 1 -Rn) by applying heat to the metal lines (M 1 -Mn) connected to the test pattern 30, the current source 32 and A voltage detector 34 for detecting a power change between the two pads 30a and 30b of the test pattern 30 using two probes 34a and 34b; PC (Perspnal Computer) which controls the current supply of the temperature controller 32 by the selection of the ruler, recognizes the voltage change from the voltage detection source 34 and displays the corresponding current and resistance value over time ( 33) and a printer 35 for printing current and resistance values over time under the control of the PC 33.
여기서, PC(33)는 그것의 내부에 전류계와 전압계과 직렬로 연결되어 구성된 GPIB 보드를 포함하고 있다.Here, the PC 33 includes a GPIB board configured to be connected in series with an ammeter and a voltmeter therein.
이 GPLB 보드는 전압검출원(34)의 출력신호를 체크하여 전류 및 전압을 PC(33)에 공급함으로써 PC(33)가 전압변화를 인식하여 그에 상응하는 전류 및 저항값을 디스플레이하고 또는 그 데이터를 프린터(35)에 출력할 수 있도록 한다.The GPLB board checks the output signal of the voltage detection source 34 and supplies current and voltage to the PC 33 so that the PC 33 recognizes the voltage change and displays the corresponding current and resistance values or the data thereof. To be output to the printer 35.
이하에서, 본 고안에 따른 테이스트 장치의 동작을 설명하기로 한다.Hereinafter, the operation of the taste device according to the present invention will be described.
PC(33)의 제어에 의해 온도 콘트롤러(32)로 부터 공급된 전류에 의해 테스트 패턴(30)의 양 패드 (30a,30b)사이에 연결된 n개 메탈라인들(M1-Mn)에 열이 공급되면 임의의 시간(△t)에서 메탈라인들(M1-Mn)이 단선되기 시작한다.Heat is applied to the n metal lines M 1 -Mn connected between the pads 30a and 30b of the test pattern 30 by the current supplied from the temperature controller 32 by the control of the PC 33. When supplied, the metal lines M 1 -Mn start to break at an arbitrary time Δt.
예로서, 하나의 메탈라인이 단선되었다고 가정하면, 합성저항값(△R)는 단선이 안되었을 경우 함성자항(△R)보다 제4도에 나타낸 바와 같이 증가하게 된다.For example, assuming that one metal line is disconnected, the composite resistance value DELTA R increases as shown in FIG. 4 than the intermolecular term DELTA R when not disconnected.
이때 전류(△)는 저항(△R)과 반비례하므로, 제5도에 나타낸 바와 같이 감소하게 된다.At this time, since the current Δ is inversely proportional to the resistance ΔR, it decreases as shown in FIG. 5.
이때 GPIB 보드는 이 값들을 PC(33)에 제공하게되고 PC(33)는 자신의 프로그램에 의해 메탈라인들(M1-Mn)단선으로 인한 저항의 증가에 따른 전류의 감소를 시간 A,B,C,D 마다 추출하여 디스플레이함과 동시에 프린터(33)를 통해 그 테이타들을 출력한다.At this time, the GPIB board provides these values to the PC 33, and the PC 33 can reduce the current according to the increase of the resistance due to the disconnection of the metal lines M 1 -Mn by its program. It extracts and displays every C, D and outputs the data through the printer 33 at the same time.
또한 챔버대용의 핫척(Hot Chuck)에 온도 콘트롤러(32)를 통해 시험조건에 따라 전류값, 즉, 가열온도를 변화시켜 메탈라인들(M1-Mn)에 가하고 상기와 같은 테스트 데이터를 인식하게 된다.In addition, through the temperature controller 32 to the hot chuck for the chamber, the current value, that is, the heating temperature is changed according to the test conditions and applied to the metal lines M 1 -Mn to recognize the test data as described above. do.
즉 PC(33)는 프로브 스테이션(31)의 가열 스테이지(31b)에 공급되는 가열온도를 변화시키면서 테스트를 하며 시간과 저항 및 전류의 변화를 검출하여 그 데이타를 프린터(35)를 통해 프린트하게 된다.That is, the PC 33 performs a test while changing the heating temperature supplied to the heating stage 31b of the probe station 31, detects a change in time, resistance and current, and prints the data through the printer 35. .
아래(도표 1)은 시간(sec)에 따라 프린트된 저항(R)과 전류(I) 및 전압(V)의 일예 표이다.Below (Figure 1) is an example table of printed resistor R, current I and voltage V over time (sec).
[표 1]TABLE 1
따라서 본 고안에 따른 일렉트리컬 스트레스에 의한 메탈의 강도 테스트 장치는 고가의 장비를 사용하지 않고서도 팩케이지(Package) 및 웨이퍼 레벨(Wafer Level)에서의 일렉트로미그레이션 및 재질의 신뢰성(Reliability)에 대한 테스트로서 여러개의 샘플에 동시에 적용시킬 수 있으며 그 테스트된 데이타를 기록할 수 있는 효과가 있다.Therefore, the strength test apparatus for metals due to the electrical stress according to the present invention is suitable for the electromigration and material reliability at the package and wafer level without using expensive equipment. This test can be applied to several samples at the same time, and the effect of recording the tested data.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019900009538U KR940005919Y1 (en) | 1990-06-30 | 1990-06-30 | Metal strength test device by electric stress |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019900009538U KR940005919Y1 (en) | 1990-06-30 | 1990-06-30 | Metal strength test device by electric stress |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR920001166U KR920001166U (en) | 1992-01-28 |
| KR940005919Y1 true KR940005919Y1 (en) | 1994-08-29 |
Family
ID=19300536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019900009538U Expired - Lifetime KR940005919Y1 (en) | 1990-06-30 | 1990-06-30 | Metal strength test device by electric stress |
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| Country | Link |
|---|---|
| KR (1) | KR940005919Y1 (en) |
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1990
- 1990-06-30 KR KR2019900009538U patent/KR940005919Y1/en not_active Expired - Lifetime
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| Publication number | Publication date |
|---|---|
| KR920001166U (en) | 1992-01-28 |
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