Tjepkema, 2012 - Google Patents
Active hard mount vibration isolation for precision equipmentTjepkema, 2012
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- 12603201079808268303
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- Tjepkema D
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Floor vibrations and acoustic excitation may limit the performance of precision equipment, that is used for example to produce computer chips or to make images of very tiny structures. Therefore, it is common to mount a vibration isolator in the suspension of such equipment to …
- 238000002955 isolation 0 title abstract description 17
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