Gupta et al., 2012 - Google Patents
A monolithic 48-stage Si-micromachined Knudsen pump for high compression ratiosGupta et al., 2012
View PDF- Document ID
- 6127754568590899658
- Author
- Gupta N
- An S
- Gianchandani Y
- Publication year
- Publication venue
- 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)
External Links
Snippet
This paper describes a microchip of 10.35× 11.45 mm 2 footprint that can self-evacuate on- chip cavities from 760 Torr to<; 50 Torr or from 250 Torr to≈ 5 Torr. The power consumed is≈ 1,350 mW. These compression ratios of 15 and 50 offer>; 10× improvement above …
- 238000007906 compression 0 title abstract description 12
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
- F04—POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micro pumps
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