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Xu, 2013 - Google Patents
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Xu, 2013 - Google Patents

Design and fabrication of a novel compliant rotary nanopositioning stage

Xu, 2013

Document ID
8991099017570002922
Author
Xu Q
Publication year
Publication venue
2013 IEEE International Conference on Robotics and Automation

External Links

Snippet

This paper presents the design, fabrication, and testing of a compliant rotary nanopositioning stage for precision engineering applications. The major advantage of the rotary stage lies in that it possesses a large rotational range and a compact size …
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