SUPERCLEANとは 意味・読み方・使い方

To remove and clean exhaust gas containing molecular pollutant discharged from a superclean space in a resist treatment process like semiconductor manufacturing without stopping the operation of a manufacturing facility line, and to continuously and stably circulate and feed to the superclean space over a long period by precisely controlling temperature and humidity.例文帳に追加

半導体製造等のレジスト処理工程における超清浄空間から排出される分子状汚染物質を含有する排気を、製造設備ラインの操業を停止させることなく除去清浄化し、精密に調温・調湿して、超清浄空間に長期間に亘って連続安定に循環供給する。 - 特許庁

In this result, while restraining the generation of the alumina-based inclusion, etc., the removal of the microperspective inclusion in the molten steel can effectively be performed and the superclean steel can be obtained.例文帳に追加

アルミナ系介在物などの生成を抑制しつつ効果的に溶鋼中の微視的な介在物の除去を行うことができ、清浄度の高い鋼を得ることができる。 - 特許庁

To provide a method for producing superclean steel by which the steel having high cleanliness can be effectively obtained by promoting coagulation flotation removal of inclusion in molten steel thereby shortening a refining time and improving the cleanliness of the steel.例文帳に追加

溶鋼中介在物の凝集・浮上除去を促進させて精錬時間の短縮および鋼の清浄度を向上させ、清浄度の高い鋼を効率的に得ることが可能な高清浄鋼の製造方法を提供する。 - 特許庁

To provide superclean steel which is intended to be used for valve springs, suspension springs, fine steel wire or the like and exhibits performance exceeding that of the conventional material in cold workability and fatigue properties by controlling oxide inclusions in the steel.例文帳に追加

弁ばねや懸架ばね、極細鋼線などを対象とし、鋼中の酸化物系介在物を制御することにより、冷間加工性や疲労特性において従来材を凌駕する性能を発揮する高清浄度鋼を提供すること。 - 特許庁

Superclean steel is refined by feeding oxygen gas to molten steel in a vacuum tank during the vacuum decarburization to be performed by using a vacuum degassing device having a dip nozzle after modifying ladle slag, and reducing the concentration of oxides in slag by stirring the slag during the vacuum decarburization to be subsequently performed after stopping the feed of oxygen gas.例文帳に追加

取鍋スラグを改質した後に、浸漬管を有する真空脱ガス装置を用いて行う真空脱炭処理中に真空槽内溶鋼に酸素ガスを供給し、酸素ガスの供給を停止した後に引き続き実施する真空脱炭処理中にスラグを撹拌してスラグの酸化物濃度を低下させることにより、高清浄度鋼を溶製する。 - 特許庁