radiation substrate heatingとは 意味・読み方・使い方

The method is a method to effect heat treatment of a sheet-form substrate in a radiation heating type heat treatment furnace provided at an upper part in the furnace with a heating means.例文帳に追加

炉内上部に加熱手段を備えた輻射加熱式の熱処理炉にて薄板状基板を熱処理する方法である。 - 特許庁

In a chamber body 31, a substrate holder 90 holds a disklike substrate 9 so as to abute on the periphery of the substrate 9, and the substrate 9 is heated by radiation rays from an annular radiation heating source 33 arranged coaxially with the substrate 9.例文帳に追加

チャンバー本体３１内で、基板保持具９０が円盤状の基板９の周縁に当接して基板９を保持し、基板９と同軸に配置された円環状の輻射加熱源３３からの輻射線により基板９が加熱される。 - 特許庁

The heat radiation received by the substrate 9 becomes smaller, and the thin film formed on the surface of the substrate 9 becomes uniform, and also the angle of viewing the heating element 4 of the substrate 9 becomes smaller.例文帳に追加

基板９は、発熱体４を見込む角が小さくなり受ける熱輻射が少なくなるとともに、この表面に作成される薄膜が均一になる。 - 特許庁

The method includes heating the substrate to a critical temperature where long-wavelength annealing radiation is substantially absorbed, and then irradiating the substrate with the annealing radiation to generate a temperature capable of annealing the substrate.例文帳に追加

この方法は、長波長アニール放射線が実質的に吸収される臨界温度に基板を加熱した後、基板にアニール放射線を照射して基板をアニールすることができる温度を生成することを含む。 - 特許庁

To provide an apparatus for heating a glass substrate which has a good matching between an absorbing wavelength band in a heated body of low alkali glass and a wavelength zone in the absorption and radiation of a heating body and which conducts the heating under a clean heating environment.例文帳に追加

低アルカリガラスの被加熱体の吸収波長帯と加熱体の吸収、放射の波長帯域のマッチングがよく、清浄な加熱環境下で加熱が行えるガラス基板加熱装置を提供すること。 - 特許庁

To provide a method of uniformly heating the entire surface of a substrate during annealing by electromagnetic radiation to the substrate including a plurality of devices.例文帳に追加

複数のデバイスを含む基板に対し、電磁放射線によるアニール中に基板の表面全体に一様な加熱を実施する方法を提供する。 - 特許庁

To provide a process for heating a braze alloy by microwave radiation so that heating of the alloy is selective and sufficient to cause complete melting of the alloy and permit metallurgical bonding to a substrate on which the alloy is melted, but without excessively heating the substrate so as not to degrade the properties of the substrate.例文帳に追加

マイクロ波放射線によってロウ付け合金を加熱する方法で、合金の完全溶融を引き起こし、その上で基体への金属結合を可能にするのに十分であるが、基体を過度に加熱して特性を低下させることがないように選択する。 - 特許庁

This is the far infrared radiation heater substrate 4 comprised that a pattern layer 2 composed of a metal heating resistor is baked on a crystallized glass 1.例文帳に追加

結晶化ガラス１に，金属抵抗発熱体からなるパターン層２を焼き付けてなる遠赤外線ヒーター基板４である。 - 特許庁