faciliteteとは 意味・読み方・使い方

To provide a heater with a wafer holder attached which can be suitably used for heat treatment of a wafer, etc., in a semiconductor manufacturing process and which can suppress scattering of dust, etc., and which can facilitete mounting and taking-out of a wafer and which has a good soaking property and can be manufactured easily.例文帳に追加

半導体製造プロセスにおけるウエハ等の熱処理用に好適に使用されるダスト発散等が抑制され、均熱性、ウエハの搭載、取出しが容易に行え、製作が容易なウエハホルダー付ヒータを提供する。 - 特許庁