CN211734470U - Graphite clamp capable of turning product for horizontal hot-wall CVD coating film plating machine - Google Patents

Abstract

The utility model provides a horizontal hot wall CVD coating film plating machine graphite jig of reversible product, include: the device comprises a first circular ring (1), a second circular ring (2), a turning rod (3), a rotating rod (6), a fixing screw (7), a first rotating motor (8), a stepping motor (9), a second rotating motor (10) and a lifting motor (11); sample (12) is the disc, fix on graphite jig, the second ring is arranged in first ring inside and mutually perpendicular, first ring and second ring part fixed connection together, the round through-hole adaptation connection on upset pole and the first ring and the second ring, rotary rod and first ring adaptation connection, first rotating electrical machines all is connected with the upset pole with step motor, second rotating electrical machines and elevator motor and rotary rod connection, elevator motor control rotary rod is flexible from top to bottom, realize being connected with and breaking off of rotary rod and anchor clamps, second rotating electrical machines drives the rotary rod rotation.

Description

Graphite fixture for horizontal hot wall CVD coating coater with reversible product

technical field

The utility model relates to the technical field of chemical vapor deposition (CVD) in the semiconductor industry, in particular to a graphite clamp for a horizontal hot-wall CVD coating coating machine with a reversible product.

Background technique

Chemical Vapor Deposition (CVD) refers to a technology in which a chemical reaction of raw material gas occurs on the surface of a product to deposit a coating. Chemical Vapor Deposition (CVD) is a widely used material growth technology in the semiconductor industry. Various functional thin layer materials. Chemical vapor deposition includes hot-wall CVD and cold-wall CVD, of which hot-wall CVD refers to the technology that the furnace chamber in which the chemical reaction is carried out adopts the technology of heat radiation heating of the heater, and the temperature of the furnace and the product are heated at the same time, and the corresponding cold-wall CVD refers to It is the direct induction heating of the product through the coil, and the furnace is cold without being heated. Among them, hot wall CVD technology is often used to deposit protective coatings on the surface of larger products such as graphite. The coating materials include SiC, TiC and TiCN, BN, etc. Graphite is a porous material. High-purity graphite has high temperature stability and extremely low impurity content, so it is widely used in the growth of semiconductor chips. By depositing a dense ceramic coating material at high temperature, the pores on the graphite surface can be closed, which can prevent the graphite from releasing impurity gases during use, thereby avoiding contamination of the chip.

Fixtures are used in chemical vapor deposition, that is, shelves used to place products in the furnace of CVD equipment, which can be reused and are usually made of graphite. The coating formed by the thin layer of material plated on the surface of the product plays the role of protecting and increasing the electrical function. Because the thickness of the epitaxial and electrode films used in the semiconductor field is much larger, reaching tens to hundreds of microns, it is called the coating as a coating. distinguish.

The furnace body used in the hot-wall CVD technology has two types: horizontal and vertical. Among them, the horizontal CVD coating machine is to place the cylindrical furnace body for CVD horizontally, and the reaction gas passes through the furnace body in the horizontal direction. The structure is simple and the installation is simple. It is convenient and widely used in scientific research and enterprises and institutions. When the bedroom CVD coating machine is working, the reaction raw material gas passes through the furnace body in the horizontal direction, the gas concentration decreases along the traveling direction, and the coating deposition rate decreases simultaneously along the gas traveling direction. evenly.

There are two problems that need to be solved urgently in the technology of hot-wall chemical vapor deposition (hereinafter referred to as hot-wall CVD) deposition coating technology:

1. The reaction gas passes through the parallel furnace body from a single direction, the gas concentration decreases along the traveling direction, and the coating deposition rate decreases simultaneously along the gas traveling direction. As a result, the thickness of the coating on the larger size products is not uniform. The uniformity of the coating on the coated graphite disc is required to be high, and the problem of uneven thickness before and after the coating on the product needs to be solved. The existing method places the product at an incline, and continuously adjusts the product inclination angle and process parameters to achieve uniform coating. Due to the mutual influence of the inclination angle and process parameters, this method is difficult to achieve and cannot form a unified standard. After using different machines It needs to be readjusted, which is time-consuming and labor-intensive.

2. The graphite parts used in the furnace cavity and the fixture are reused in the CVD equipment, and the coating thickness on the surface reaches the order of millimeters. The slag falling off the coating will fall on the product and stick to the product during the continuous CVD process. above, contaminated products. The traditional solution is to replace the fixture and furnace parts frequently. Although the pollution of the slag to the product can be reduced, the replacement cost is high and it is difficult to control the cost.

Therefore, it is necessary to design a new fixture scheme, and then use the hot-wall CVD technology to deposit a coating on the graphite surface to make a coated graphite product for the semiconductor industry to solve the above two problems.

SUMMARY OF THE INVENTION

In order to overcome the above-mentioned problems existing in the prior art, the utility model provides a graphite clamp for a horizontal hot-wall CVD coating coating machine with a reversible product, which solves the problem of uneven thickness of the coating on both sides and the center of the product. Graphite fixture for horizontal hot-wall CVD coating machine with reversible product, the furnace slag will not stick to the sample, which solves the high cost problem caused by slag contamination of the sample and frequent replacement of fixtures.

The specific functions are detailed as follows:

In order to achieve the above-mentioned purpose, the present utility model is realized through the following technical solutions: a graphite clamp for a horizontal hot-wall CVD coating coating machine of a reversible product, comprising: a first ring (1), a second ring (1). 2), turning lever (3), rotating lever (6), fixing screw (7), first rotating motor (8), stepping motor (9), second rotating motor (10), lifting motor (11); The sample (12) is in the shape of a disk and is fixed on the graphite fixture, the second ring (2) is placed inside the first ring (1) and is perpendicular to each other, the first ring (1) ) and the second ring (2) are fixedly connected together, and the turning rod (3) is connected to the circular through holes on the first ring (1) and the second ring (2). Adapter connection, the rotating rod (6) is adaptively connected with the first ring (1), the first rotating motor (8) and the stepping motor (9) are both connected with the turning rod ( 3) Connection, the second rotating motor (10) and the lifting motor (11) are connected with the rotating rod (6), and the lifting motor (11) controls the vertical expansion and contraction of the rotating rod (6), The connection and disconnection of the rotating rod (6) and the clamp can be realized, and the second rotating motor (10) drives the rotating rod (6) to rotate.

Preferably, the diameter of the first circular ring (1) is larger than the diameter of the second circular ring (2).

Preferably, the left sides of the first circular ring (1) and the second circular ring (2) are fixed by a screw outer wire (4) and a nut (5), and the first circular ring (1) and the The right sides of the second ring (2) are in contact with each other to form a contact portion.

Preferably, the first ring (1) and the second ring (2) each have a square through hole of the same size at the position of the contact portion.

Preferably, the head of the turning rod (3) is square.

Preferably, the upper and lower parts of the first ring (1) are each provided with a bayonet, and the head of the rotating rod (6) is adapted and connected to the bayonet, and extends from the bayonet into the bayonet. The entire fixture is supported within the fixture.

Preferably, the stepper motor (9) controls the connection and disconnection of the square head of the flip lever (3) and the through holes on the first ring (1) and the second ring (2). open, the first rotating motor (8) drives the turning rod (3) to rotate.

Preferably, four bayonet openings are evenly distributed inside the second ring (2), and the disc-shaped product or sample (12) is fixed on the second ring (2) by fixing screws.

The beneficial effects of the utility model: compared with the prior art, two sets of independent motors are used to make the disc-shaped product alternately realize the functions of rotation and tumbling. The slag drop will not stick to the sample, which solves the high cost problem caused by slag contamination of the sample and frequent fixture replacement.

The above and other objects, advantages and features of the present invention will be more apparent to those skilled in the art from the following detailed description of the specific embodiments of the present invention in conjunction with the accompanying drawings.

Description of drawings

Hereinafter, some specific embodiments of the present invention will be described in detail by way of example and not limitation with reference to the accompanying drawings. The same reference numbers in the figures designate the same or similar parts or parts. It will be understood by those skilled in the art that the drawings are not necessarily to scale. Objects and features of the present invention will become more apparent in view of the following description taken in conjunction with the accompanying drawings, in which:

1 is a schematic diagram showing the main structure of a graphite fixture for a horizontal hot-wall CVD coating coating machine of a reversible product according to an embodiment of the present invention.

Accompanying drawing 2 is the main schematic diagram of the structure of the rotating rod and the rotating rod of the graphite clamp for the horizontal hot-wall CVD coating coating machine of the reversible product according to the embodiment of the present utility model;

3 is a top view of a graphite fixture structure for a horizontal hot-wall CVD coating coating machine of a reversible product according to an embodiment of the present utility model;

4 is a schematic perspective view of the structure of a graphite clamp for a horizontal hot-wall CVD coating coating machine of a reversible product according to an embodiment of the present invention.

Detailed ways

The specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings, which are not intended to limit the protection scope of the present invention.

Referring to Figure 1-4, a reversible product horizontal hot-wall CVD coating machine graphite fixture, including: a first ring 1, a second ring 2, a turning rod 3, a rotating rod 6, and fixing screws 7 , the first rotary motor 8, the stepper motor 9, the second rotary motor 10, the lifting motor 11; the sample 12 is disc-shaped, fixed on the graphite clamp, the second ring 2 is placed inside the first ring 1 and mutually Vertically, the first ring 1 and the second ring 2 are partially fixedly connected together, the turning rod 3 is adapted and connected with the circular through holes on the first ring 1 and the second ring 2, and the rotating rod 6 is connected with the first ring 1 and the second ring 2 The ring 1 is adapted to be connected, the first rotating motor 8 and the stepping motor 9 are connected to the turning rod 3, the second rotating motor 10 and the lifting motor 11 are connected to the rotating rod 6, and the lifting motor 11 controls the up and down expansion and contraction of the rotating rod 6, The connection and disconnection between the rotating rod 6 and the clamp can be realized, and the second rotating motor 10 drives the rotating rod 6 to rotate. The diameter of the first ring 1 is larger than the diameter of the second ring 2 . The left side of the first ring 1 and the second ring 2 are fixed by the outer screw 4 and the nut 5, and the right sides of the first ring 1 and the second ring 2 are in contact with each other to form a contact portion, and the position of the contact portion is at The first ring 1 and the second ring 2 each have a square through hole of the same size. In this embodiment, the head of the flip lever 3 is square. The upper and lower parts of the first ring 1 each have a bayonet, and the head of the rotating rod 6 is adapted and connected to the bayonet, and extends into the fixture from the bayonet to support the entire fixture. The stepping motor 9 controls the connection and disconnection of the square head of the turning rod 3 with the through holes on the first ring 1 and the second ring 2 , and the first rotating motor 8 drives the turning rod 3 to rotate. The inside of the second ring 2 is evenly distributed with four bayonet openings, and the disc-shaped product or sample 12 is fixed on the second ring 2 by fixing screws.

Except for the first rotating motor 8 , the stepping motor 9 , the second rotating motor 10 , and the lifting motor 11 , the fixture of this embodiment is made of graphite material.

Working mode: Fix the product inside the second ring 2 by fixing screws. The rotating rod 6 extends upward and is supported to the clamp, and the turning rod 3 is disconnected from the first ring 1 and the second ring 2 . The second rotating motor 10 drives the rotating rod 6 to rotate, thereby driving the entire fixture to rotate horizontally. After rotating for a certain time, turn the through holes on the two rings 1 and 2 to the right, the turning rod 3 is driven by the stepping motor 9, the square head is connected with the through holes, and the rotating rod 6 is driven by the lifting motor 11. Disconnect from the fixture. The fixture is fixed by the flipping rod 3, and the flipping rod 3 rotates under the drive of the rotating motor 1, which in turn drives the fixture to flip up and down. During the whole process, the product is rotated horizontally and turned up and down sequentially, and the duration of rotation and turning is 10-30 minutes. The horizontal rotation ensures that the surface film thickness is uniform, and the up and down rotation ensures that the slag falling on the surface of the product will fall off during the inversion process.

In this embodiment, two sets of independent motors are used to make the disc-shaped product alternately realize the functions of rotation and tumbling. The rotation function makes the thickness of the front and rear coatings of the circular product the same. High cost issues due to slag contamination of samples and frequent fixture changes.

The technical solutions provided by the embodiments of the present invention have been introduced in detail above. The principles and implementations of the embodiments of the present invention are described in this paper by using specific examples. The descriptions of the above embodiments are only applicable to help understand the implementation of the present invention. At the same time, those of ordinary skill in the art, according to the embodiments of the present utility model, will have changes in the specific implementation and application scope. To sum up, the contents of this specification should not be construed as limitations of the present invention.

Claims (8)

1. A graphite clamp for a horizontal hot-wall CVD coating coating machine of a reversible product, characterized in that it comprises: the first annular ring (1), the second annular ring (2), a turning rod (3), a rotating rod (6), the fixing screw (7), the first rotating motor (8), the stepping motor (9), the second rotating motor (10), the lifting motor (11); the sample (12) is disc-shaped and is fixed on the On the graphite fixture, the second ring (2) is placed inside the first ring (1) and is perpendicular to each other, the first ring (1) and the second ring (2) Parts are fixedly connected together, the turning rod (3) is adapted to connect with the circular through holes on the first ring (1) and the second ring (2), and the rotating rod (6) It is adapted to connect with the first ring (1), the first rotary motor (8) and the stepping motor (9) are both connected to the turning rod (3), and the second rotary motor ( 10) and the lifting motor (11) is connected with the rotating rod (6), the lifting motor (11) controls the vertical expansion and contraction of the rotating rod (6), and the rotating rod (6) and the clamp can be realized the connection and disconnection, the second rotating motor (10) drives the rotating rod (6) to rotate. 2. The graphite fixture for a horizontal hot-wall CVD coating coating machine of a reversible product according to claim 1, wherein the diameter of the first ring (1) is larger than that of the second ring (2) diameter. 3. The graphite clamp for a horizontal hot-wall CVD coating coating machine of a reversible product according to claim 1, characterized in that: the first ring (1) and the second ring (2) The left side of the ) is fixed by a screw outer wire (4) and a nut (5), and the right sides of the first circular ring (1) and the second circular ring (2) are in contact with each other to form a contact portion. 4. The graphite clamp for a horizontal hot-wall CVD coating coating machine of a reversible product according to claim 3, wherein the contact portion is located at the first ring (1) and the Each of the second rings (2) has a square through hole of the same size. 5 . The graphite clamp for a horizontal hot-wall CVD coating coating machine of a reversible product according to claim 1 , wherein the head of the reversing rod ( 3 ) is square. 6 . 6. The graphite clamp for a horizontal hot-wall CVD coating coating machine of a reversible product according to claim 1, wherein the upper and lower parts of the first ring (1) each have a bayonet , the head of the rotating rod (6) is adapted to connect with the bayonet, and extends into the clamp from the bayonet to support the whole clamp. 7. The graphite fixture for a horizontal hot-wall CVD coating coating machine of a reversible product according to claim 4, wherein the stepper motor (9) controls the square shape of the reversing rod (3). The head is connected and disconnected from the through holes on the first ring (1) and the second ring (2), and the first rotating motor (8) drives the turning rod (3) to rotate. 8. The graphite clamp for a horizontal hot-wall CVD coating coating machine of a reversible product according to claim 4, characterized in that: the second ring (2) is evenly distributed with 4 bayonets inside, The disc-shaped product or sample (12) is fixed on the second ring (2) with a set screw.

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