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EP1422423B2 - Apparatus with evacuatable chamber - Google Patents
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EP1422423B2 - Apparatus with evacuatable chamber - Google Patents

Apparatus with evacuatable chamber Download PDF

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Publication number
EP1422423B2
EP1422423B2 EP03029746.9A EP03029746A EP1422423B2 EP 1422423 B2 EP1422423 B2 EP 1422423B2 EP 03029746 A EP03029746 A EP 03029746A EP 1422423 B2 EP1422423 B2 EP 1422423B2
Authority
EP
European Patent Office
Prior art keywords
pump
vacuum
housing
stator
friction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP03029746.9A
Other languages
German (de)
French (fr)
Other versions
EP1422423A1 (en
EP1422423B1 (en
Inventor
Ralf Adamietz
Christian Dr. Beyer
Günter Schütz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7868823&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1422423(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Priority claimed from EP99917896.5A external-priority patent/EP1090231B2/en
Publication of EP1422423A1 publication Critical patent/EP1422423A1/en
Publication of EP1422423B1 publication Critical patent/EP1422423B1/en
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Publication of EP1422423B2 publication Critical patent/EP1422423B2/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F04D29/602—Mounting in cavities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Definitions

  • the invention relates to a device with a friction vacuum pump and with a housing in which there is at least one evacuable chamber, and with the further features of the preamble of claim 1.
  • the associated friction vacuum pump is equipped with several connection openings. These each have a different pressure level.
  • Frictional vacuum pumps of this type are preferably used to evacuate particle beam devices (eg mass spectrometers) with chambers separated from each other by diaphragms, in which different pressures are to be generated and maintained during operation of the particle beam device.
  • Such devices with the associated, to be evacuated chambers are located in an independent housing. With this housing, the connection openings of the friction vacuum pump are connected via a separate connection housing with relatively long connection lines (15, 16, 17) with the disadvantage of relatively high conductance losses.
  • Reibungsvakuumpumpen (turbomolecular pumps, pumps with turbomolecular pump stages and other friction pump stages) of a type known as z.
  • a chassis which is equipped with the drive motor and on which the rotor is supported.
  • the housing of the pump is supported on the chassis. It surrounds the rotor and the stator and also more or less the chassis.
  • the housing ensures the assignment of said components to each other.
  • it has the task of exactly centering the Stator Halbring disks and spacers existing stator so that the necessary in friction vacuum pumps small gap can be met.
  • the housing seals the vacuum pump to the outside.
  • the connection flange on the front side, with which the friction vacuum pumps are connected to devices with chambers to be evacuated.
  • DE 2442614 which forms the closest prior art, discloses a turbomolecular vacuum pump having an inlet and an outlet.
  • the housing is provided with a further connection, which is located between inlet and outlet.
  • the inlets are connected to different subspaces in an electron microscope and produce different pressures.
  • the present invention has for its object to provide a device of the type concerned here with a much improved connection geometry between the / to be evacuated chambers and the friction vacuum pump.
  • a particular advantage of the invention is that a friction pump can be used, in which the functions of the previously described, one-piece housing described above are distributed over two components.
  • An inner component ensures the assignment of chassis, stator and rotor to each other. This creates a friction vacuum pump in the form of a slot that already has many functional tests, eg. B. that of balancing, can be subjected.
  • the outer housing has the task of adapting the functional without the outer housing friction vacuum pump to the application of the customer. It is no longer necessary to produce or maintain a variety of friction pump types but only one or a few universal, compact and functional pumping units (bays, cartridges). It is sufficient to inform the customer about the external dimensions of the slide-in friction vacuum pump.
  • a particularly simple solution for him is that he can use only a slide-in friction vacuum pump in the housing or housing part of its provided with the bore device (system, device or the like with one or more chambers to be evacuated).
  • the housing or housing part of the device of the customer then forms the second outer housing of the friction vacuum pump according to the invention.
  • FIG. 1 a friction vacuum pump 1 with stator 3, rotor 4 and chassis 5 is shown.
  • the chassis 5 is the motor drive 6, 7, the armature 7 is supported on the bearings 8 in the chassis 5.
  • shaft 9 With the armature 7 which led out of the chassis 5 shaft 9 is connected, which carries the rotor 4.
  • the axis of rotation of the rotor system is denoted by 11.
  • the friction vacuum pump 1 has after FIG. 1 three pumping stages 12, 13, 14, two of which (12, 13) are designed as turbomolecular vacuum pumping stages and one (14) as molecular (Holweck) pumping stage. At the molecular pumping stage 14, the outlet of the pump 17 connects.
  • the pump 1 is equipped with two housings 18, 19.
  • the inner housing 18 is is substantially cylindrical and surrounds the stator 3. On its high vacuum-side end face it is equipped with an inwardly directed edge 20 which rests on the stator 3 and in this case simultaneously forms the upper stator ring.
  • the housing 18 is fixed to the chassis 5, with the aid of the flange 21.
  • Flange 21 and chassis 5 are connected to each other vacuum-tight. For this purpose, between the flange 21 and the chassis 5 of the sealing ring 21 'is arranged.
  • the outer housing 19 has an inner bore 22 with an inwardly directed gradation 23, whose height corresponds to the width of the rim 20 on the first housing 18.
  • a seal 24 which is expediently embedded in the end face of the housing 18.
  • the housing 19 has a device, e.g. the flange 25, with which it is attached to the chassis 5 or on the housing 18. After releasing this attachment, the unit formed by the inner housing 18 and the components therein can be removed as a whole from the bore 22. It forms an independent from the second housing 19 slot 27th
  • the first, high vacuum side pump stage 12 consists of four pairs of rotor blade rows and Statorschaufelschschitzschn. Its inlet, the effective gas passage area, is designated 26.
  • the edge 20 of the housing 18 surrounds the gas passage surface 26 and forms a passage opening 28 for entering the pump 1 gases.
  • the first pumping stage 12 is followed by the second pumping stage 13, which consists of three pairs of one stator blade row and one rotor blade row. Your inlet is designated 29.
  • the second pumping stage 13 is spaced from the first pumping stage 12.
  • the selected distance (height) a ensures the free accessibility of the gas molecules to be conveyed to the gas inlet 29.
  • the distance a is greater than a quarter, preferably greater than one third, of the diameter of the rotor system 4.
  • the adjoining Holweck pump comprises a rotating cylinder section 30, the outside and inside in a known manner, each with a thread groove 31, 32 equipped stator elements 33, 34 facing each other.
  • Another, formed by the inner housing 18 gas passage opening is arranged laterally and designated 35. It serves for the passage of gases, which are fed directly to the inlet 29 of the second pumping stage 13.
  • the outer housing 19 has the task of connecting the pump 1 or two pump stages (12, 13) of this pump with the device of the customer.
  • the housing 19 is after FIG. 1 formed such that the levels of all connection openings 36, 37 are located laterally.
  • the distance of the opening 37 to the associated gas inlet 29 is very small, so that the suction capacity of the pumping stage 13 impairing conductance losses are negligible.
  • the diameter of the connection opening 37 exceeds the height a by about twice. This measure also serves to reduce the conductance losses between inlet 29 and connection opening 37.
  • the lateral connection openings can each be equipped with a flange. To FIG. 1 a common flange 39 is provided.
  • the illustrated pump 1 or its pump-effective elements are expediently designed such that in the region of the connection opening 36 a pressure of 10 -4 to 10 -7 , preferably 10 -5 to 10 -6 , and im Area of the connection opening 37, a pressure of about 10 -2 to 10 -4 mbar is generated.
  • a high pumping speed is to be generated (eg 200 l / s).
  • the subsequent, two-stage Holweck pumping stage (29, 30, 29, 31) ensures a high prevacuum resistance, so that usually the pumping speed of the second pumping stage is independent of the fore-vacuum pressure.
  • this goal can be achieved by appropriate design of the blades of the first pumping stage 12.
  • Another possibility is to arrange a diaphragm 38 in front of the inlet 26 of the first pumping stage, the inner diameter of which determines the desired pumping speed.
  • FIG. 2 shows a device 51 according to the invention with evacuated chambers 52, 53, 54 and a push-in unit 27, as to FIG. 1 has been described.
  • the housing of the device - for example, a corpuscular beam device - is substantially integrally formed and designated 55.
  • the housing In the immediate vicinity of the chambers to be evacuated 53, 54, the housing is equipped with the bore 22 in which the insert 27 is located.
  • the chambers 53, 54 communicate with the respective inlets 26, 29 via the gas passage openings 28, 35 in the housing 18 of the insert 27 and the connection openings 36, 37.
  • the integration of the insert 27 in the housing of the device 51 accounts for separate connection means.
  • the distances between the chambers 53, 54 to be evacuated and the inlets 26, 29 are optimally small.
  • the essence of the present idea is that a largely functional unit (insert, cartridge) of a friction vacuum pump in a housing adapted to the application is releasably supported.
  • the inner housing 18 described so far has the task of functional elements the friction vacuum pump to the desired unit.
  • other components - such as tie rods, brackets or the like - be present, which fulfill this task.
  • two components 18 and 19, 55 are provided for the fulfillment of the functions of the usual housing in the subject matter of the invention.
  • the two components are formed by two concentric housings, of which the inner of the centering, assignment and support of chassis 5, stator 3 and rotor 4 is used, which thereby form the already operable, independent of the outer housing slot.
  • the outer housing 19, 55 seals the vacuum pump to the outside and serves for connection to the chambers to be evacuated, either via connecting flanges or in that it is already part of the device with the chambers to be evacuated.
  • FIGS. 3 and 4 show embodiments ( FIG. 3 : Longitudinal section through a slot 27; FIG. 4 Cross section through a slot 27 at the level of the gas passage opening 35) for an inner slot 27 with a Switzerlandankersystem 61.
  • This includes three to six (or more) tie rods 62 and holes and threads in the components (chassis 5, stator 3), the Tie rod system 61 are to be joined together to form a structural unit.
  • FIGS. 3 and 4 can be seen that the gas passage opening 35 extends over the entire circumference of the insert 27 and is interrupted only by the tie rods 62.
  • the access of the gas molecules to the inlet 29 of the pumping stage 13 (in FIG. 4 shown in plan view) is thereby free almost unhindered.
  • the attachment of the outer housing - be it the second housing 18, which fulfills further functions of a pump housing, or a housing 55 which is part of a device with chambers to be evacuated - takes place on the flange 21 of the chassis 5.
  • FIG. 3 allows the construction of particularly advantageous designed tie rod 62 recognize. They are designed in two parts.
  • the vorvakuum solutionen Anlagenankerabête 63 with their heads 64 pass through the stator of the pumping stage 13 and the outer stator 33 of the pumping stage 14. Their threaded ends are screwed into the flange 21 of the chassis 5.
  • the length of the heads 64 determines the axial extent of the gas passage opening 35.
  • the heads 64 are each provided with an internal thread into which respective high vacuum-side tie rod sections 65 can be screwed.
  • Their heads 66 are the top stator of the pumping stage 13. In addition, they enforce the stator of the pumping stage 12 and thereby cause in the screwed state, not only a compound of the high vacuum stage 12 with the other stages 13 and 14 but also a centering of the stator rings.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Description

Die Erfindung bezieht sich auf ein Gerät mit einer Reibungsvakuumpumpe und mit einem Gehäuse, in dem sich mindestens eine evakuierbare Kammer befindet, sowie mit den weiteren Merkmalen des Oberbegriffs des Patentanspruchs 1.The invention relates to a device with a friction vacuum pump and with a housing in which there is at least one evacuable chamber, and with the further features of the preamble of claim 1.

Ein Gerät dieser Art ist aus der EP-A-0 603 694 (= DE 43 31 589 ) bekannt. Die zugehörige Reibungsvakuumpumpe ist mit mehreren Anschlussöffnungen ausgerüstet. Diese haben jeweils ein unterschiedliches Druckniveau. Reibungsvakuumpumpen dieser Art dienen vorzugsweise der Evakuierung von Korpuskularstrahlgeräten (z. B. Massenspektrometern) mit durch Blenden voneinander getrennten Kammern, in denen während des Betriebs des Korpuskularstrahlgerätes unterschiedliche Drücke erzeugt und aufrecht erhalten werden soll. Solche Geräte mit den zugehörigen, zu evakuierbaren Kammern befinden sich in einem unabhängigen Gehäuse. Mit diesem Gehäuse sind die Anschlussöffnungen der Reibungsvakuumpumpe über ein separates Anschlussgehäuse mit relativ langen Anschlussleitungen (15, 16, 17) verbunden mit dem Nachteil relativ hoher Leitwertverluste.A device of this kind is from the EP-A-0 603 694 (= DE 43 31 589 ) known. The associated friction vacuum pump is equipped with several connection openings. These each have a different pressure level. Frictional vacuum pumps of this type are preferably used to evacuate particle beam devices (eg mass spectrometers) with chambers separated from each other by diaphragms, in which different pressures are to be generated and maintained during operation of the particle beam device. Such devices with the associated, to be evacuated chambers are located in an independent housing. With this housing, the connection openings of the friction vacuum pump are connected via a separate connection housing with relatively long connection lines (15, 16, 17) with the disadvantage of relatively high conductance losses.

Aus den Dokumenten DE-A-34 02 549 und DE-A-43 14 419 sind weitere Reibungsvakuumpumpen (Turbomolekularpumpen, Pumpen mit Turbomolekularpumpenstufen und anderen Reibungspumpenstufen) mit einer Bauart bekannt, wie sie z. Zt. üblich ist und auf dem Markt angeboten wird. Sie besitzen ein Chassis, das mit dem Antriebsmotor ausgerüstet ist und auf dem sich der Rotor abstützt. Außerdem stützt sich das Gehäuse der Pumpe auf dem Chassis ab. Es umgibt den Rotor und den Stator und auch mehr oder weniger das Chassis. Das Gehäuse sichert die Zuordnung der genannten Bauteile zueinander. Weiterhin hat es die Aufgabe, den aus Statorhalbring-Scheiben und Distanzringen bestehenden Stator exakt zu zentrieren, damit die bei Reibungsvakuumpumpen notwendigen kleinen Spalte eingehalten werden können. Das Gehäuse dichtet die Vakuumpumpe nach außen hin ab. Schließlich ist es mit dem stirnseitig angeordneten Anschlussflansch ausgerüstet, mit dem die Reibungsvakuumpumpen an Einrichtungen mit zu evakuierenden Kammern angeschlossen werden.From the documents DE-A-34 02 549 and DE-A-43 14 419 are further Reibungsvakuumpumpen (turbomolecular pumps, pumps with turbomolecular pump stages and other friction pump stages) of a type known as z. Is currently common and offered on the market. They have a chassis, which is equipped with the drive motor and on which the rotor is supported. In addition, the housing of the pump is supported on the chassis. It surrounds the rotor and the stator and also more or less the chassis. The housing ensures the assignment of said components to each other. Furthermore, it has the task of exactly centering the Statorhalbring disks and spacers existing stator so that the necessary in friction vacuum pumps small gap can be met. The housing seals the vacuum pump to the outside. Finally, it is equipped with the connection flange on the front side, with which the friction vacuum pumps are connected to devices with chambers to be evacuated.

DE 2442614 , die den nächstliegenden Stand der Technik bildet, offenbart eine Turbomolekularvakuumpumpe mit einem Einlass und einem Auslass. Das Gehäuse ist mit einem weiteren Anschluss versehen, der sich zwischen Einlass und Auslass befindet. Die Einlasse sind mit unterschiedlichen Teilräumen in einem Elektronenmikroskop verbunden und erzeugen unterschiedliche Drücke. DE 2442614 , which forms the closest prior art, discloses a turbomolecular vacuum pump having an inlet and an outlet. The housing is provided with a further connection, which is located between inlet and outlet. The inlets are connected to different subspaces in an electron microscope and produce different pressures.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, ein Gerät der hier betroffenen Art mit einer wesentlich verbesserten Anschluss-Geometrie zwischen der/den zu evakuierenden Kammern und der Reibungsvakuumpumpe zu schaffen.The present invention has for its object to provide a device of the type concerned here with a much improved connection geometry between the / to be evacuated chambers and the friction vacuum pump.

Erfindungsgemäß wird diese Aufgabe durch die Merkmale des Patent-Anspruchs 1 gelöst.According to the invention, this object is solved by the features of patent claim 1.

Durch diese Maßnahmen wird es möglich, auf ein separates, aufwendiges Anschlussgehäuse verzichten zu können. Außerdem werden Leitwertverluste durch die kammernahe Anbindung der Reibungsvakuumpumpe klein gehalten und damit die prozessabhängigen niedrigen Kammerdrücke technisch günstig realisiert. Eine optimale Leitwert-Situation wird erreicht.These measures make it possible to dispense with a separate, expensive connection housing. In addition, conductance losses are kept small due to the close-coupled connection of the friction vacuum pump and thus the process-dependent low chamber pressures realized technically favorable. An optimal conductance situation is achieved.

Ein besonderer Vorteil der Erfindung besteht darin, dass eine Reibungspumpe eingesetzt werden kann, bei der die eingangs beschriebenen Funktionen des bisher üblichen, einteiligen Gehäuses auf zwei Bauteile verteilt sind. Ein inneres Bauteil sichert die Zuordnung von Chassis, Stator und Rotor zueinander. Dadurch entsteht eine Reibungsvakuumpumpe in Form eines Einschubs, die bereits vielen Funktionsprüfungen, z. B. der des Auswuchtens, unterworfen werden kann. Das äußere Gehäuse hat die Aufgabe, die auch ohne äußeres Gehäuse funktionstüchtige Reibungsvakuumpumpe an die Applikation des Kunden anzupassen. Es ist nicht mehr erforderlich, eine Vielfalt von Reibungspumpentypen herzustellen oder bereitzuhalten, sondern lediglich eine oder wenige universelle, kompakte und funktionsfähige Pumpeinheiten (Einschübe, Kartuschen). Es reicht aus, den Kunden über die äußeren Abmessungen der einschubförmigen Reibungsvakuumpumpe zu informieren. Eine besonders einfache Lösung für ihn besteht darin, dass er in dem Gehäuse oder Gehäuseteil seiner mit der Bohrung versehenden Einrichtung (Anlage, Gerät oder dergleichen mit einer oder mehreren zu evakuierenden Kammern) lediglich eine einschubförmige Reibungsvakuumpumpe einsetzen kann. Im betriebsfertigen Zustand bildet dann das Gehäuse oder Gehäuseteil der Einrichtung des Kunden das zweite äußere Gehäuse der erfindungsgemäßen Reibungsvakuumpumpe.A particular advantage of the invention is that a friction pump can be used, in which the functions of the previously described, one-piece housing described above are distributed over two components. An inner component ensures the assignment of chassis, stator and rotor to each other. This creates a friction vacuum pump in the form of a slot that already has many functional tests, eg. B. that of balancing, can be subjected. The outer housing has the task of adapting the functional without the outer housing friction vacuum pump to the application of the customer. It is no longer necessary to produce or maintain a variety of friction pump types but only one or a few universal, compact and functional pumping units (bays, cartridges). It is sufficient to inform the customer about the external dimensions of the slide-in friction vacuum pump. A particularly simple solution for him is that he can use only a slide-in friction vacuum pump in the housing or housing part of its provided with the bore device (system, device or the like with one or more chambers to be evacuated). In the ready state, the housing or housing part of the device of the customer then forms the second outer housing of the friction vacuum pump according to the invention.

Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von den Figuren 2 bis 4 dargestellten Ausführungsbeispielen erläutert werden. Es zeigen

  • Figur 1 eine mit drei Pumpstufen ausgerüstete Reibungsvakuumpumpe
  • Figur 2 ein mit einer Reibungsvakuumpumpe nach der Erfindung ausgerüstetes Gerät und
  • Figuren 3 und 4 Schnitte durch eine Ausführung des Einschubs mit Zugankern.
Further advantages and details of the invention are to be understood from the FIGS. 2 to 4 illustrated embodiments will be explained. Show it
  • FIG. 1 a three-pump equipped friction vacuum pump
  • FIG. 2 a equipped with a friction vacuum pump according to the invention device and
  • FIGS. 3 and 4 Cuts through a version of the insert with tie rods.

In Figur 1 ist eine Reibungsvakuumpumpe 1 mit Stator 3, Rotor 4 und Chassis 5 dargestellt. Im Chassis 5 befindet sich der Motorantrieb 6, 7, dessen Anker 7 sich über die Lager 8 im Chassis 5 abstützt. Mit dem Anker 7 ist die aus dem Chassis 5 herausgeführte Welle 9 verbunden, die den Rotor 4 trägt. Die Drehachse des Rotorsystems ist mit 11 bezeichnet.In FIG. 1 a friction vacuum pump 1 with stator 3, rotor 4 and chassis 5 is shown. In the chassis 5 is the motor drive 6, 7, the armature 7 is supported on the bearings 8 in the chassis 5. With the armature 7 which led out of the chassis 5 shaft 9 is connected, which carries the rotor 4. The axis of rotation of the rotor system is denoted by 11.

Insgesamt besitzt die Reibungsvakuumpumpe 1 nach Figur 1 drei Pumpstufen 12, 13, 14, von denen zwei (12, 13) als Turbomolekularvakuumpumpstufen und eine (14) als Molekular(Holweck)-Pumpstufe ausgebildet sind. An die Molekularpumpstufe 14 schließt sich der Auslass der Pumpe 17 an.Overall, the friction vacuum pump 1 has after FIG. 1 three pumping stages 12, 13, 14, two of which (12, 13) are designed as turbomolecular vacuum pumping stages and one (14) as molecular (Holweck) pumping stage. At the molecular pumping stage 14, the outlet of the pump 17 connects.

Die Pumpe 1 ist mit zwei Gehäusen 18, 19 ausgerüstet. Das innere Gehäuse 18 ist im wesentlichen zylindrisch und umgibt den Stator 3. Auf seiner hochvakuumseitigen Stirnseite ist es mit einem nach innen gerichteten Rand 20 ausgerüstet, der dem Stator 3 aufliegt und in diesem Falle gleichzeitig den oberen Statorring bildet. Vorvakuumseitig ist das Gehäuse 18 am Chassis 5 befestigt, und zwar mit Hilfe des Flansches 21. Flansch 21 und Chassis 5 sind vakuumdicht miteinander verbunden. Dazu ist zwischen dem Flansch 21 und dem Chassis 5 der Dichtring 21' angeordnet.The pump 1 is equipped with two housings 18, 19. The inner housing 18 is is substantially cylindrical and surrounds the stator 3. On its high vacuum-side end face it is equipped with an inwardly directed edge 20 which rests on the stator 3 and in this case simultaneously forms the upper stator ring. Fore-vacuum side, the housing 18 is fixed to the chassis 5, with the aid of the flange 21. Flange 21 and chassis 5 are connected to each other vacuum-tight. For this purpose, between the flange 21 and the chassis 5 of the sealing ring 21 'is arranged.

Das äußere Gehäuse 19 besitzt eine innere Bohrung 22 mit einer einwärts gerichteten Stufung 23, deren Höhe der Breite des Randes 20 am ersten Gehäuse 18 entspricht. Zwecks Abdichtung des Spaltes zwischen den beiden Gehäusen 18, 19 zur Hochvakuumseite der Pumpe 1 hin befindet sich zwischen deren Rand 20 und der Stufung 23 eine Dichtung 24, die zweckmäßig in die Stirnseite des Gehäuses 18 eingelassen ist. Auch eine radiale Abdichtung ist möglich. Vorvakuumseitig besitzt auch das Gehäuse 19 eine Vorrichtung, z.B. den Flansch 25, mit dem es am Chassis 5 oder auch am Gehäuse 18 befestigt ist. Nach dem Lösen dieser Befestigung kann die vom inneren Gehäuse 18 und den darin befindlichen Bauteilen gebildete Einheit als Ganzes aus der Bohrung 22 herausgenommen werden. Sie bildet einen vom zweiten Gehäuse 19 unabhängigen Einschub 27.The outer housing 19 has an inner bore 22 with an inwardly directed gradation 23, whose height corresponds to the width of the rim 20 on the first housing 18. For the purpose of sealing the gap between the two housings 18, 19 to the high-vacuum side of the pump 1 is located between the edge 20 and the gradation 23, a seal 24 which is expediently embedded in the end face of the housing 18. A radial seal is possible. Also on the fore vacuum side, the housing 19 has a device, e.g. the flange 25, with which it is attached to the chassis 5 or on the housing 18. After releasing this attachment, the unit formed by the inner housing 18 and the components therein can be removed as a whole from the bore 22. It forms an independent from the second housing 19 slot 27th

Die erste, hochvakuumseitig gelegene Pumpstufe 12 besteht aus vier Paaren von Rotorschaufelreihen und Statorschaufelreihen. Ihr Einlass, die wirksame Gasdurchtrittsfläche, ist mit 26 bezeichnet. Der Rand 20 des Gehäuses 18 umgibt die Gasdurchtrittsfläche 26 und bildet eine Durchtrittsöffnung 28 für in die Pumpe 1 eintretenden Gase. An die erste Pumpstufe 12 schließt sich die zweite Pumpstufe 13 an, die aus drei Paaren von je einer Statorschaufelreihe und einer Rotorschaufelreihe besteht. Ihr Einlass ist mit 29 bezeichnet.The first, high vacuum side pump stage 12 consists of four pairs of rotor blade rows and Statorschaufelreihen. Its inlet, the effective gas passage area, is designated 26. The edge 20 of the housing 18 surrounds the gas passage surface 26 and forms a passage opening 28 for entering the pump 1 gases. The first pumping stage 12 is followed by the second pumping stage 13, which consists of three pairs of one stator blade row and one rotor blade row. Your inlet is designated 29.

Die zweite Pumpstufe 13 ist von der ersten Pumpstufe 12 beabstandet. Der gewählte Abstand (Höhe) a sichert die freie Zugänglichkeit der zu fördernden Gasmoleküle zum Gaseinlass 29. Zweckmäßig ist der Abstand a größer als ein Viertel, vorzugsweise größer als ein Drittel des Durchmessers des Rotorsystems 4.The second pumping stage 13 is spaced from the first pumping stage 12. The selected distance (height) a ensures the free accessibility of the gas molecules to be conveyed to the gas inlet 29. Expediently, the distance a is greater than a quarter, preferably greater than one third, of the diameter of the rotor system 4.

Die sich daran anschließende Holweck-Pumpe umfasst einen rotierenden Zylinderabschnitt 30, dem außen und innen in bekannter Weise mit jeweils einer Gewindenut 31, 32 ausgerüstete Statorelemente 33, 34 gegenüberstehen.The adjoining Holweck pump comprises a rotating cylinder section 30, the outside and inside in a known manner, each with a thread groove 31, 32 equipped stator elements 33, 34 facing each other.

Eine weitere, vom inneren Gehäuse 18 gebildete Gasdurchtrittsöffnung ist seitlich angeordnet und mit 35 bezeichnet. Sie dient dem Durchtritt von Gasen, die unmittelbar dem Einlass 29 der zweiten Pumpstufe 13 zugeführt werden.Another, formed by the inner housing 18 gas passage opening is arranged laterally and designated 35. It serves for the passage of gases, which are fed directly to the inlet 29 of the second pumping stage 13.

Das äußere Gehäuse 19 hat die Aufgabe, die Pumpe 1 bzw. zwei Pumpenstufen (12, 13) dieser Pumpe mit der Einrichtung des Kunden zu verbinden. Das Gehäuse 19 ist nach Figur 1 derart ausgebildet, dass sich die Ebenen sämtlicher Anschlussöffnungen 36, 37 seitlich befinden. Dadurch ist insbesondere der Abstand der Öffnung 37 zum zugehörigen Gaseinlass 29 sehr klein, so dass das Saugvermögen der Pumpstufe 13 beeinträchtigende Leitwertverluste vernachlässigbar sind. Dieses würde auch für jede weitere Anschlussöffnung gelten, die stromabwärts von der Anschlussöffnung 37 gelegen wäre. Im übrigen überschreitet der Durchmesser der Anschlussöffnung 37 die Höhe a um etwa das Doppelte. Auch diese Maßnahme dient der Verringerung der Leitwertverluste zwischen Einlass 29 und Anschlussöffnung 37. Die seitlichen Anschlussöffnungen können mit je einem Flansch ausgerüstet sein. Nach Figur 1 ist ein gemeinsamer Flansch 39 vorgesehen.The outer housing 19 has the task of connecting the pump 1 or two pump stages (12, 13) of this pump with the device of the customer. The housing 19 is after FIG. 1 formed such that the levels of all connection openings 36, 37 are located laterally. As a result, in particular, the distance of the opening 37 to the associated gas inlet 29 is very small, so that the suction capacity of the pumping stage 13 impairing conductance losses are negligible. This would also apply to any further connection opening which would be located downstream of the connection opening 37. Moreover, the diameter of the connection opening 37 exceeds the height a by about twice. This measure also serves to reduce the conductance losses between inlet 29 and connection opening 37. The lateral connection openings can each be equipped with a flange. To FIG. 1 a common flange 39 is provided.

Die dargestellte Pumpe 1 bzw. ihre pumpwirksamen Elemente (Stator-, Rotorschaufeln, Gewindestufen) sind zweckmäßig derart ausgebildet, dass im Bereich der Anschlussöffnung 36 ein Druck von 10-4 bis 10-7, vorzugsweise 10-5 bis 10-6, und im Bereich der Anschlussöffnung 37 ein Druck von etwa 10-2 bis 10-4 mbar erzeugt wird. Dadurch ergibt sich für die erste Pumpstufe 12 die Notwendigkeit, für ein Kompressionsverhältnis von 102 bis 104, vorzugsweise größer 100, zu sorgen. Mit der zweiten Pumpstufe soll ein hohes Saugvermögen erzeugt werden (z.B. 200 l/s). Die sich anschließende, zweistufige Holweck-Pumpstufe (29, 30; 29, 31) sichert eine hohe Vorvakuumbeständigkeit, so dass üblicherweise das Saugvermögen der zweiten Pumpstufe vom Vorvakuumdruck unabhängig ist.The illustrated pump 1 or its pump-effective elements (stator, rotor blades, screw threads) are expediently designed such that in the region of the connection opening 36 a pressure of 10 -4 to 10 -7 , preferably 10 -5 to 10 -6 , and im Area of the connection opening 37, a pressure of about 10 -2 to 10 -4 mbar is generated. This results for the first pumping stage 12, the need to provide for a compression ratio of 10 2 to 10 4 , preferably greater than 100. With the second pumping stage, a high pumping speed is to be generated (eg 200 l / s). The subsequent, two-stage Holweck pumping stage (29, 30, 29, 31) ensures a high prevacuum resistance, so that usually the pumping speed of the second pumping stage is independent of the fore-vacuum pressure.

Für den Fall, dass im Bereich der Anschlussöffnung 36 ein besonders hohes Saugvermögen nicht gefordert wird, kann dieses Ziel durch entsprechende Gestaltung der Schaufeln der ersten Pumpstufe 12 erreicht werden. Eine andere Möglichkeit besteht darin, vor dem Einlass 26 der ersten Pumpstufe eine Blende 38 anzuordnen, deren Innendurchmesser das gewünschte Saugvermögen bestimmt.In the event that a particularly high pumping speed is not required in the region of the connecting opening 36, this goal can be achieved by appropriate design of the blades of the first pumping stage 12. Another possibility is to arrange a diaphragm 38 in front of the inlet 26 of the first pumping stage, the inner diameter of which determines the desired pumping speed.

Figur 2 zeigt eine Einrichtung 51 nach der Erfindung mit zu evakuierenden Kammern 52, 53, 54 und einer einschubförmigen Einheit 27, wie sie zu Figur 1 beschrieben wurde. Das Gehäuse der Einrichtung - z.B. ein Korpuskularstrahlgerät - ist im wesentlichen einstückig ausgebildet und mit 55 bezeichnet. In unmittelbarer Nähe der zu evakuierenden Kammern 53, 54 ist das Gehäuse mit der Bohrung 22 ausgerüstet, in der sich der Einschub 27 befindet. Über die Gasdurchtrittsöffnungen 28, 35 im Gehäuse 18 des Einschubs 27 und die Anschlussöffnungen 36, 37 stehen die Kammern 53, 54 mit den jeweiligen Einlässen 26, 29 in Verbindung. Durch die Integration des Einschubs 27 im Gehäuse der Einrichtung 51 entfallen gesonderte Anschlussmittel. Die Abstände zwischen den zu evakuierenden Kammern 53, 54 und den Einlässen 26, 29 sind optimal klein. FIG. 2 shows a device 51 according to the invention with evacuated chambers 52, 53, 54 and a push-in unit 27, as to FIG. 1 has been described. The housing of the device - for example, a corpuscular beam device - is substantially integrally formed and designated 55. In the immediate vicinity of the chambers to be evacuated 53, 54, the housing is equipped with the bore 22 in which the insert 27 is located. The chambers 53, 54 communicate with the respective inlets 26, 29 via the gas passage openings 28, 35 in the housing 18 of the insert 27 and the connection openings 36, 37. The integration of the insert 27 in the housing of the device 51 accounts for separate connection means. The distances between the chambers 53, 54 to be evacuated and the inlets 26, 29 are optimally small.

Der Kern der vorliegenden Idee liegt darin, dass eine weitgehend funktionsfähige Einheit (Einschub, Kartusche) einer Reibungsvakuumpumpe in einem der Applikation angepassten Gehäuse lösbar gehaltert ist. Das bisher beschriebene innere Gehäuse 18 hat die Aufgabe, die Funktionselemente der Reibungsvakuumpumpe zu der gewünschten Einheit zusammenzufassen. Anstelle des Gehäuses können auch andere Bauteile - z.B. Zuganker, Klammern oder dgl. - vorhanden sein, die diese Aufgabe erfüllen. Wesentlich ist, dass für die Erfüllung der Funktionen des sonst üblichen Gehäuses beim Gegenstand der Erfindung zwei Bauelemente 18 bzw. 19, 55 vorgesehen sind. Bei den Ausführungen nach den Figuren 2 und 3 werden die beiden Bauelemente von zwei konzentrischen Gehäusen gebildet, von denen das innere der Zentrierung, Zuordnung und Halterung von Chassis 5, Stator 3 und Rotor 4 dient, welche dadurch den bereits betriebsfähigen, vom äußeren Gehäuse unabhängigen Einschub bilden. Das äußere Gehäuse 19, 55 dichtet die Vakuumpumpe nach außen ab und dient der Verbindung mit den zu evakuierenden Kammern, sei es über Anschlussflansche oder dadurch, dass es bereits Bestandteil der Einrichtung mit den zu evakuierenden Kammern ist.The essence of the present idea is that a largely functional unit (insert, cartridge) of a friction vacuum pump in a housing adapted to the application is releasably supported. The inner housing 18 described so far has the task of functional elements the friction vacuum pump to the desired unit. Instead of the housing, other components - such as tie rods, brackets or the like - be present, which fulfill this task. It is essential that two components 18 and 19, 55 are provided for the fulfillment of the functions of the usual housing in the subject matter of the invention. In the versions after the Figures 2 and 3 The two components are formed by two concentric housings, of which the inner of the centering, assignment and support of chassis 5, stator 3 and rotor 4 is used, which thereby form the already operable, independent of the outer housing slot. The outer housing 19, 55 seals the vacuum pump to the outside and serves for connection to the chambers to be evacuated, either via connecting flanges or in that it is already part of the device with the chambers to be evacuated.

Besonders zweckmäßig ist es, beim inneren Einschub das innere Gehäuse durch ein Zugankersystem zu ersetzen. Dieses ermöglicht eine kompaktere Gestaltung des inneren Einschubs. Außerdem können vom Zugankersystem zusammengehaltene Bauteile einfacher hergestellt werden. Beispielsweise übernehmen die Zuganker die Zentrierung von Statorringen, so dass diese selbst nicht mehr mit Zentriermitteln ausgerüstet sein müssen.It is particularly useful to replace the inner housing by a Zugankersystem the inner slot. This allows a more compact design of the inner drawer. In addition, components held together by the tie rod system can be made simpler. For example, the tie rods take over the centering of stator rings, so that they themselves no longer need to be equipped with centering.

Die Figuren 3 und 4 zeigen Ausführungsbeispiele (Figur 3: Längsschnitt durch einen Einschub 27; Figur 4: Querschnitt durch einen Einschub 27 in Höhe der Gasdurchtrittsöffnung 35) für einen inneren Einschub 27 mit einem Zugankersystem 61. Dieses umfasst drei bis sechs (oder mehr) Zuganker 62 sowie Bohrungen und Gewinde in den Bauteilen (Chassis 5, Stator 3), die vom Zugankersystem 61 zu einer Baueinheit zusammengefügt werden sollen.The FIGS. 3 and 4 show embodiments ( FIG. 3 : Longitudinal section through a slot 27; FIG. 4 Cross section through a slot 27 at the level of the gas passage opening 35) for an inner slot 27 with a Zugankersystem 61. This includes three to six (or more) tie rods 62 and holes and threads in the components (chassis 5, stator 3), the Tie rod system 61 are to be joined together to form a structural unit.

Die Figuren 3 und 4 lassen erkennen, dass sich die Gasdurchtrittsöffnung 35 über den gesamten Umfang des Einschubs 27 erstreckt und nur durch die Zuganker 62 unterbrochen ist. Der Zugang der Gasmoleküle zum Einlass 29 der Pumpstufe 13 (in Figur 4 in Draufsicht dargestellt) ist dadurch nahezu ungehindert frei. Die Befestigung des äußeren Gehäuses - sei es das zweite Gehäuse 18, das weitere Funktionen eines Pumpgehäuses erfüllt, oder ein Gehäuse 55, das Bestandteil eines Gerätes mit zu evakuierenden Kammern ist - erfolgt am Flansch 21 des Chassis 5.The FIGS. 3 and 4 can be seen that the gas passage opening 35 extends over the entire circumference of the insert 27 and is interrupted only by the tie rods 62. The access of the gas molecules to the inlet 29 of the pumping stage 13 (in FIG. 4 shown in plan view) is thereby free almost unhindered. The attachment of the outer housing - be it the second housing 18, which fulfills further functions of a pump housing, or a housing 55 which is part of a device with chambers to be evacuated - takes place on the flange 21 of the chassis 5.

Figur 3 lässt den Aufbau besonders vorteilhaft gestalteter Zuganker 62 erkennen. Sie sind zweiteilig ausgebildet. Die vorvakuumseitigen Zugankerabschnitte 63 mit ihren Köpfen 64 durchsetzen die Statorringe der Pumpstufe 13 und das äußere Statorelement 33 der Pumpstufe 14. Ihre mit einem Gewinde versehenen Enden sind in den Flansch 21 des Chassis 5 eingeschraubt. Die Länge der Köpfe 64 bestimmt die axiale Ausdehnung der Gasdurchtrittsöffnung 35. FIG. 3 allows the construction of particularly advantageous designed tie rod 62 recognize. They are designed in two parts. The vorvakuumseitigen Zugankerabschnitte 63 with their heads 64 pass through the stator of the pumping stage 13 and the outer stator 33 of the pumping stage 14. Their threaded ends are screwed into the flange 21 of the chassis 5. The length of the heads 64 determines the axial extent of the gas passage opening 35.

Im Bereich ihrer hochvakuumseitigen Stirnseite sind die Köpfe 64 jeweils mit einem Innengewinde versehen, in die jeweils hochvakuumseitige Zugankerabschnitte 65 einschraubbar sind. Ihre Köpfe 66 liegen dem obersten Statorring der Pumpstufe 13 auf. In übrigen durchsetzen sie die Statorringe der Pumpstufe 12 und bewirken dadurch im eingeschraubten Zustand nicht nur eine Verbindung der Hochvakuumstufe 12 mit den übrigen Stufen 13 und 14 sondern auch eine Zentrierung der Statorringe.In the region of their high-vacuum-side end face, the heads 64 are each provided with an internal thread into which respective high vacuum-side tie rod sections 65 can be screwed. Their heads 66 are the top stator of the pumping stage 13. In addition, they enforce the stator of the pumping stage 12 and thereby cause in the screwed state, not only a compound of the high vacuum stage 12 with the other stages 13 and 14 but also a centering of the stator rings.

Claims (18)

  1. Device (51) having a friction vacuum pump and having a housing (55), in which are situated at least two successively disposed evacuable chambers (52, 53, 54), in which during operation different pressures are generated and maintained, and which has a bore (22) for receiving the friction vacuum pump (1) and which is equipped with a connection opening (36, 37), by which an inlet of the friction vacuum pump is connected to one of the chambers to be evacuated, wherein the friction vacuum pump is of an at least two-stage design and there being accordingly at least two connection openings (36, 37), the connection openings (36, 37) are situated laterally alongside the friction vacuum pump (1), the bore (22) is disposed laterally alongside the chambers (52, 53, 54) in such a way that the distances between the chambers to be evacuated and the respective inlets (26, 29) of the friction pump stages (12, 13, 14) are optimally small and that the chambers (52, 53, 54) are connected by the connection openings (36, 37) in the common housing (55) to the respective inlets (26, 29) of friction pump stages (12, 13, 14), the friction vacuum pump comprises a housing, a chassis (5), a stator (3) and a rotor (4), wherein for performing the functions of the housing of the friction vacuum pump two elements (18, 61; 55) are provided, of which the first, inner element (18, 61) is used to associate, centre and mount chassis (5), stator (3) and rotor (4) and Is assembled with said components as a unit, and of which the second element (55) is used to seal off the friction vacuum pump from the outside as well as for connection to the chamber to be evacuated and Is formed by the common housing (55) of the device (51).
  2. Device according to claim 1, characterized In
    - that the friction vacuum pump (1) is designed at least in sections as a turbomolecularvacuum pump having rotor blade rows and stator blade rows,
    - that the stator comprises a plurality of stator rings and
    - that the first, inner element (18, 61), In addition to the association and mounting of chassis (5), stator (3) and rotor (4), is used also to centre the stator rings and forms a unit with said components.
  3. Device according to claim 1 or 2, characterized in that the first inner element of the pump (1) is an inner housing (18).
  4. Device according to claim 3, characterized in that in the region of the high-vacuum side of the pump (1) a seal (24) is situated between inner housing (18) and outer housing (19, 55).
  5. Device according to claim 3 or 4, characterized in that inner and outer housing (18; 19, 55) in the region of the fore-vacuum side of the pump (1) are equipped with flanges, which are fastened detach ably to the chassis (5).
  6. Device according to one of claims 3 to 5, characterized in that the inner housing (18) of the pump (1) at the high-vacuum side is equipped with an inwardly directed edge (20).
  7. Device according to claim 6, characterized in that the inwardly directed edge (20) of the pump (1) forms a first, high-vacuum-side stator ring.
  8. Device according to one of the preceding claims 3 to 7, characterized in that associated with the high-vacuum-side end face of the inner housing (18) of the pump (1) is a stepped reduction (23) of the bore (22) of the outer housing (19, 55).
  9. Device according to claims 4 and 8, characterized in that an 0-ring (24) is situated between the end face of the inner housing (18) and the step (23), formed by the diameter reduction, of the outer housing (19, 55) of the pump (1).
  10. Device according to one of the preceding claims 3 to 9, characterized in that the high-vacuum-side end of the inner housing (18) forms a gas through-opening (28) for the gases that enter the pump (1).
  11. Device according to claim 10, characterized in that the friction vacuum pump has three pump stages (12, 13, 14) and that the Inner housing (18) of the pump (1) is equipped with at least one further, downstream through-opening for gases that enter the third pump stage (14).
  12. Device according to claim 11, characterized in that the third pump stage (14) is designed as a molecular pump stage.
  13. Device according to claim 1 or 2, characterized In that the first inner element of the pump (1) is formed by a tie-rod system (61).
  14. Device according to claim 13, characterized in that the tie-rod system (61) comprises a plurality of tie-rods (62), which connect the stator (3) to the chassis (5).
  15. Device according to claim 14, characterized in that the tie-rods (62) penetrate the stator rings.
  16. Device according to one of claims 13 to 15, characterized in that the tie-rods (62) are of a two-part construction and comprise in each case a fore-vacuum-side tie-rod portion (63) with head (64) and a high-vacuum-side tie-rod portion (65) with head (66).
  17. Device according to claim 16, characterized in that the length of the head (64) of the fore-vacuum-side tie-rod portion (63) determines the axial extent of a through-opening (35) between high-vacuum stage (12) and fore-vacuum stage (13 and/or 13, 14).
  18. Device according to one of claims 17 or 18, characterized in that the heads (64) of the fore-vacuum-side tie-rod portions (63) are equipped in each case at the front end with a thread, into which the high-vacuum-side tie-rod portions (65) are screwable.
EP03029746.9A 1998-05-26 1999-03-27 Apparatus with evacuatable chamber Expired - Lifetime EP1422423B2 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE19823270 1998-05-26
DE19823270 1998-05-26
DE19901340 1999-01-15
DE19901340.3A DE19901340B4 (en) 1998-05-26 1999-01-15 Friction vacuum pump with chassis, rotor and housing and device equipped with a friction vacuum pump of this type
EP99917896.5A EP1090231B2 (en) 1998-05-26 1999-03-27 Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump

Related Parent Applications (3)

Application Number Title Priority Date Filing Date
EP99917896.5 Division 1999-03-27
EP99917896.5A Division EP1090231B2 (en) 1998-05-26 1999-03-27 Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump
EP99917896.5A Division-Into EP1090231B2 (en) 1998-05-26 1999-03-27 Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump

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EP1422423A1 EP1422423A1 (en) 2004-05-26
EP1422423B1 EP1422423B1 (en) 2005-10-05
EP1422423B2 true EP1422423B2 (en) 2016-01-20

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JP3777498B2 (en) * 2000-06-23 2006-05-24 株式会社荏原製作所 Turbo molecular pump
GB0414316D0 (en) 2004-06-25 2004-07-28 Boc Group Plc Vacuum pump
DE102007010068B4 (en) * 2007-02-28 2024-06-13 Thermo Fisher Scientific (Bremen) Gmbh Vacuum pump or vacuum apparatus with vacuum pump
DE102007044945A1 (en) * 2007-09-20 2009-04-09 Pfeiffer Vacuum Gmbh vacuum pump
DE102014105582A1 (en) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh vacuum pump
EP3564538B1 (en) 2019-02-20 2021-04-07 Pfeiffer Vacuum Gmbh Vacuum system and method for manufacturing the same
KR102669882B1 (en) * 2022-02-08 2024-05-28 (주)엘오티베큠 Turbo molecular pump

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Publication number Publication date
EP1422423A1 (en) 2004-05-26
KR100613957B1 (en) 2006-08-18
DE19901340B4 (en) 2016-03-24
JP2009121491A (en) 2009-06-04
DE19901340A1 (en) 1999-12-09
EP1422423B1 (en) 2005-10-05
JP5069264B2 (en) 2012-11-07
KR20010043815A (en) 2001-05-25

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