JP2003222992A - Mask case - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To eliminate dust stuck to a photomask caused by static electricity developed by the displacement of the photomask in housing the photomask in a mask case and to prevent damage to the photomask and to eliminate the displacement of the photomask housed in the mask case. <P>SOLUTION: A locking section in the opening portion direction of the main body of the mask case for housing the photomask is disposed in such a way that the locking section may gradually be lowered toward a center portion. A locking section in the depth direction is disposed in such a way that the locking section may gradually be lowered toward the opening portion direction of the case. On the other hand, a locking section in the opening portion direction of a cover is disposed in such a way that the locking section may gradually be lowered toward the depth direction of the case. A locking section in the depth direction of the cover is disposed in such a way that the locking section may gradually be lowered toward the center portion of the case. When the cover is closed, the locking section of the main body and the locking section in the opening portion direction of the cover press the ridge line portion of the mask at respective inclined surfaces from all the right and left directions as well as from the up and down directions. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a locking device which can be precisely positioned and placed in a case when storing or transporting a photomask substrate used for manufacturing a semiconductor device, a liquid crystal display device or the like, The present invention relates to a mask case having a locking tool that can prevent the generation of static electricity due to damage or displacement of the photomask without touching the surface of the photomask substrate.

[0002]

2. Description of the Related Art A mask substrate conventionally used in a manufacturing process of a semiconductor integrated circuit or the like, for example, a photomask substrate used in a photolithography process for manufacturing a semiconductor element, a liquid crystal display element or the like is stored or stored. A mask case is used for storing the photomask during transportation, which prevents dust from adhering to the photomask substrate. In other words, the photomask substrate is a fine photolithographic product, and it is necessary to prevent dust from adhering as much as possible because it dislikes all the contaminants that contaminate the original plate of the photograph because it causes serious damage due to the dust adhering to it. . Further, since the photomask substrate is a glass substrate, dust is generated due to the generation of static electricity due to the friction caused by the displacement between the photomask substrate and the mask support which is the locking tool due to the impact during transportation in the mask case. There is a risk that it will adhere to the substrate, and dust will adhere to the photolithographic surface, causing serious damage. Therefore, as a mask support that is a locking tool for mounting the photomask substrate in the case, there is, for example, the structure shown in FIGS. 7 and 8 of Japanese Patent Laid-Open No. 2001-301877. The mask support, which is this locking tool, has a required number of holding branches protruding from the inner surfaces of the main body and the lid, and the photomask substrate is placed at this portion. A holding branch having a base plate portion having an inclined plane or a holding branch having a hat portion on the trunk is clearly specified.

[0003]

As described above, when the photomask is placed in the mask case, the photomask itself is extremely disliked when handling the photomask substrate. Therefore, regarding the upper and lower surfaces of the photomask, It is necessary to avoid contact pollution as much as possible. Therefore, first of all, the above-mentioned JP-A-20
Regarding the holding branch part which has a hat part on the trunk shown in 01-301877, this contact surface is limited to only the hat part, and the contact surface is made as small as possible. Contact with, and contamination of this part is unavoidable. Also, since it is supported at the point of the hat part, when the photomask is carried in the mask case and transported, the photomask inside is shaken and it is displaced from the holding branch part, and dirt accompanying the displacement is attached. Not only will it be damaged, but it may be damaged.Furthermore, if the contact surface between the cap and the photomask is displaced, it will be rubbed and static electricity will be generated, and the dust in the case will adhere to the surface of the photomask. is there.

Therefore, there is a possibility that the photomask may be seriously damaged. Next, regarding the holding branch portion having the base plate portion having the inclined flat surface on the trunk portion shown in Japanese Patent Laid-Open No. 2001-301877, the corners or ridges of the photomask are supported by this inclined flat surface, and the upper and lower surfaces of the photomask are touched. There will be no. Although it is extremely useful in this respect, if the photomask is supported only by this plane and the photomask is supported only by this plane, the displacement of the photomask in the upper direction of the slope can be prevented, but it is easy in the lower direction of the slope. The photomask is misaligned, and the photomask is misaligned in the horizontal plane direction of the inclined plane, that is, in the direction perpendicular to the trunk. For example, in the arrangement state of the holding branch portion shown in FIG. 5 of Japanese Patent Laid-Open No. 2001-301877, it is displaced in the vertical direction on the drawing. In the case shown in FIG. As a result, it is easily displaced in the direction of rotation. When the photomask is carried in the mask case, the photomask inside is shaken and is displaced from the holding branch portion as described above, and there is a risk of damage. When the contact surface with is displaced, the ridge line portion of the photomask is rubbed and static electricity is generated on the photomask to attach dust to the surface, which may cause serious damage to the photomask. .

Further, in order to support the photomask at these holding branch portions without causing displacement, it is necessary to apply extremely high pressure to the holding branch portions and press the photomask with the main body and the lid. However, this may damage the photomask. In addition, there is a risk that a space will be created between the main body and the lid by sandwiching the photomask, which may promote the entry of dust into the case. As described above, it is extremely difficult to accurately and safely place the photomask in the case without shifting it. In view of this point of view, the present invention solves the above-mentioned problems and allows the photomask to be placed accurately and safely without touching the upper and lower surfaces thereof, and prevents the photomask from being displaced even by an impact during transportation or the like. An object of the present invention is to provide a mask case having a lockable portion.

[0006]

In order to achieve the above object, the invention according to claim 1 is a mask case for accommodating a photomask having a main body and a lid for closing an opening of the main body. It has a locking part with an inclined surface for placing the photomask inside the main body opening direction and the back direction, and when the lid is closed, the photo is placed inside the lid corresponding to these locking parts. A mask case having a locking portion with an inclined surface for pressing the mask, wherein the locking portion in the opening direction of the main body is arranged such that the inclined surface is gradually lowered toward the center of the case, The locking part in the back direction of the main body is arranged such that its inclined surface is gradually lowered toward the case opening direction, and the locking part in the opening direction of the lid body has its inclined surface facing the case back direction. So that it gradually lowers to lock the lid in the depth direction. Is arranged so that its inclined surface is gradually lowered toward the center of the case, and when the lid is closed, the locking part of the main body and the locking part in the opening direction of the lid are respectively inclined surfaces. Is a mask case capable of pressing the ridgeline portion of the photomask from the vertical direction and from the front, rear, left, and right directions.

Further, there is provided a locking portion having an inclined surface for mounting the photomask in a direction from the respective corners inside the main body of the mask case of the substantially quadrangular shape according to the second aspect of the present invention to the center part. A mask case having four lock portions having four inclined surfaces for pressing the photomask inside the lid body corresponding to the four lock portions, and the two lock portions in the opening direction of the main body are The slanted surface is arranged so that it gradually lowers toward the center of the case, and the two locking parts in the inner direction of the main body face each other, and the slanted surfaces gradually lower toward the case opening. The two locking parts in the opening direction of the lid body are arranged so that their inclined surfaces are gradually lowered toward the back direction of the case, and the two locking parts in the back direction of the lid body are Facing each other, their slopes in the case When the lid is closed, the locking part of the main body and the locking part in the opening direction of the lid are raised and lowered with respect to the ridge line part of the photomask. This can also be achieved by a mask case that can be pressed from the front and back and right and left as well as from the direction. Alternatively, in the mask case of the invention according to claim 3, the locking part of the lid has locking part bases in both end directions thereof, and the center part is a substantially bridge-shaped locking part having an inclined surface. Good.

Further, the locking portion base of the locking portion of the invention according to claim 4 has holes of different sizes,
On the other hand, two protrusions of different sizes corresponding to the holes are provided at the disposing place of the engaging portion of the lid, and the disposing place of the engaging portion by fitting the protruding portion into the hole of the engaging portion base. It may be a mask case capable of positioning. In addition, P having elasticity in the locking portion of the lid body according to the invention of claim 5
The same applies to a mask case using a P block copolymer or urethane resin. Further, in the invention according to claim 6, the engaging portion base portion of the engaging portion of the main body has two holes of different sizes, and the engaging portion of the other main body has two holes corresponding to the holes. A mask case may be provided in which three protruding portions having different sizes are provided and the protruding portions are fitted into the holes of the locking portion base portion so that the positions where the locking portions are disposed can be positioned. Further, as in the invention according to claim 7, in the inner surface of the main body, in the vicinity of the locking portion in the rear direction on the side of the connecting portion insertion port, the height of the inclined portion of the locking portion is gradually increased toward the back of the case. It may be a mask case having an auxiliary pedestal rib having a slanted side that allows the ridge line portion of the photomask to be guided along the slanted side to the slanted surface of the locking portion when the photomask is pushed in.

In addition, as in the invention according to claim 8, an auxiliary positioning rib extending from the opening side of the inner surface of the main body to the inclined surface of the locking portion in the opening direction of the main body, which is slightly higher than the height of the inclined surface. The same applies to a mask case that has a photomask mounted on the inclined surface of the locking portion and that can be prevented from being displaced toward the opening side by an auxiliary positioning rib. . Alternatively, as in the invention according to claim 9, there is provided a rib extending from the inner side of the inner surface of the lid body to the inclined surface of the locking portion in the inner direction of the lid body, and the height of the inclined surface is increased. It may be a mask case having a rib protrusion that is slightly higher than the rib protrusion, and the rib protrusion can prevent the photomask placed on the inclined surface of the locking portion from being displaced in the depth direction. In addition, as in the invention according to claim 10, there is a rib extending from the opening side of the inner surface of the lid to the inclined surface of the locking portion in the opening direction of the lid, and the height of the inclined surface is increased. It may be a mask case having a rib protrusion that is slightly higher than the height, and the rib protrusion can prevent the photomask placed on the inclined surface of the locking portion from being displaced toward the opening. Further, as in the invention according to claim 11, on both side surfaces of the inner surface of the main body and / or the lid, there are ribs extending from the side surface portion to the side portion of the photomask when the photomask is stored, It may be a mask case in which the placement position of the photomask can be regulated and the lateral displacement of the placed photomask can be prevented by the ribs.

[0010]

1 is a view showing an embodiment of a mask case of a photomask according to the present invention, in which a main body 1 of a mask case based on a substantially rectangular shape and an opening portion of the main body are shown. It consists of a mask case cover 2 for covering. By covering the main body 1 with the lid body 2, the mask case can be closed. When the main body 1 is closed by the lid body 2, the opening peripheral edge 11 of the main body 1 and the opening peripheral edge 21 of the lid body 2 corresponding to the joint have projecting walls 110 and 210, respectively, which are fitted to each other. It is a combination of inro and improves the degree of sealing when closed. Next, the main body 1 and the lid body 2 are connected to each other, and both are connected to each other by a connecting portion 3 as a hinge portion that can be bent openably and closably. The connecting portion 3 has tongue pieces 32 to be inserted into the connecting portion insertion openings 12 and 22 of the main body 1 and the lid body 2 at both ends of a substantially U-shaped connecting portion main body 31, and has a U-shaped connecting portion. The main body (31) has a hinge shape having contact pieces (35) on the tongue pieces (32) on the opening side. This contact piece
When the respective tongue pieces 32 are in a horizontal state, the contact side surfaces 351 which are one side of the contact pieces 35 are in contact with each other while keeping the opening of the U-shaped connecting portion body 31.

Therefore, the tongue pieces 32 of the connecting portion 3 can be inserted into the connecting portion insertion openings 12 and 22 of the main body 1 and the lid body 2 with the contact piece 35 facing the inside of the case. , When the main body 1 and the lid 2 are closed, the tongue piece 32 becomes horizontal as described above, the contact side surfaces 351 of the contact pieces 35 come into contact with each other, and the sealing degree of this portion is Can be increased. Next, when the lid 2 is opened from such a state, the U-shaped connecting portion main body 31 is bent to enable the opening. The open portions of the main body 1 and the lid body 2 facing the position where such a connecting portion 3 is arranged have the concave portions 13 and 23 of the main body 1 and the lid body 2. It has a closing slider 4. The closing slider 4 restricts the moving direction by the horizontal portion 130 of the main body 1, the protruding conduction piece 131, etc., and the closing slider 4 sandwiches the closing block 231 etc. of the lid body 2 to engage the main body 1 and the lid body 2. The lid 2 can be stopped and locked, and on the other hand, by moving the closing slider 4, the pinch can be released and the lid 2 can be opened. Such a closing slider 4 has a body 1
And the lid 2 are arranged in the recesses 13 and 23 provided inwardly of the lid 2, respectively, and from the outer surfaces of the main body 1 and the lid 2 with the closing slider 4 arranged. 4 is arranged so as not to project outside.

As described above, the connecting portion 3 and the closing slider
4 can be located on substantially the same plane as the outer peripheral surface of the mask case, and the main body of the mask case 1
The joint between the lid and the lid 2 can be aligned and then collinear. Therefore, for example, when an adhesive tape is wrapped around this portion, the seam between the main body 1 and the lid body 2 of the mask case can be on the same line, and all can be wrapped as a flat surface, and the sealing performance can be kept extremely high. Dust can be prevented from entering the case with a very high probability.
Incidentally, if necessary, packing or the like may be provided at a portion where the main body 1 and the lid body 2 are joined together. Then the body 1
Ribs 14 are provided on the inner peripheral side surface of the lid.
Similarly, 2 also has ribs 24 on the side surface of its inner peripheral surface.
This prevents the case from being deformed, and prevents the seam from being displaced due to the deformation of the main body 1 and the lid body 2, thus preventing the generation of a gap between them and the strength of the main body 1 and the lid body 2. It is possible to increase. In addition, this rib
Ribs on both sides of the mask case among 14 and 24 1
Numerals 4 and 24 extend to the vicinity of both sides of the photomask to prevent lateral displacement of the photomask when the photomask is stored.

As shown in the drawing, in particular, inside the case of the lid body 2, there is a rib projecting from the bottom to the opening on the inner peripheral surface of the lid body 2 and provided on the outer peripheral edge 21 of the lid body 2. Protruding wall 210
Positioning ribs 25 are provided upright with a gap therebetween. This is the inner peripheral edge 11 of the body 1 when the lid 2 is covered.
This is to prevent the misalignment of the seals due to the protruding wall 110 provided on the outer peripheral edge 21 of the lid 2 and the protruding wall 110 provided on the outer peripheral edge 21 of the lid 2. It is prevented from slipping down to prevent misalignment of the inro cage. Next, inside the main body 1, there are four places in the direction of the center from the corners of the substantially square case.
Locking part 16 for mounting and locking the photomask respectively
There is a photomask on this part and position it,
It can be stored in the case. The locking portion 16 has a slanted surface 162 on the upper surface portion that contacts the locking portion base 161 and the photomask.
With the inclined surface 162, positioning is performed by abutting a ridge line portion which is a corner of a side surface on the lower surface side of the photomask. In this case, the main body 1
The two locking portions 16 located on the concave portion 13 side of the
The low-sloped end portion 162a of 62 is inward of the main body 1, and the high-end portion 162b thereof is in the outward direction of the main body 1. It is arranged such that the end portion in the outer direction is raised and the end portion in the outer direction is gradually lowered toward the inner side.

In the two locking portions 16 of the locking portions 16 which are located on the side of the connecting portion insertion port 12 of the main body 1, the slant end 162a of the inclined surface 162 of the two locking portions 16 is directed toward the inner side of the main body 1. The high end 162b is in the outward direction of the main body 1, and the inclination of the inclined surface 162 raises the outer end in parallel to both sides of the main body 1 where the recess 13 and the connecting portion insertion port 12 are not provided. And gradually decreases toward the inner side. The locking portion base 161 that supports the inclined surface 162 of these locking portions 16 is
It has a certain height for maintaining the height at which the photomask should be placed. Therefore, when the photomask is placed in the main body 1 and the photomask is inserted through the opening portion of the main body 1 on the concave portion 13 side, the two locking portions 16 located on the coupling portion insertion port 12 side of the main body 1 are inserted. The slope of the inclined surface 162 is
Since the back side of 1 is high and the opening side is low,
The ridge line part, which is the corner of the bottom side of the insertion side of the photomask, is pressed in place by this inclined surface 162, and the photomask is pressed in the mounting position to the back side of the main body 1. It is possible to prevent the photomask from being pushed in more than a certain amount and prevent the photomask from being displaced in the inserting direction.

In this state, the front side of the photomask, that is, the main body
When the photomask is placed on the locking portion 16 by lowering the end portion located on the opening side of 1, the two inclined portions 162 of the locking portions 16 located on the concave portion 13 side of the main body 1 are The inclination is high on both sides of the main body 1 and low on the inner side of the main body 1.Therefore, the ridges, which are the corners of the lower side of both sides of the photomask, are placed on this inclined surface 162. Will be
You can press down from the side of the photomask,
It is possible to prevent lateral displacement with respect to the inserting direction of the photomask. The inclined surfaces 162 of the locking portions 16 do not contact the upper and lower surfaces of the photomask but contact the so-called ridge portion, and the surface of the photomask is not contaminated by the contact. Further, the inclination directions of the inclined surfaces 162 of the two locking portions 16 in the back direction of the main body 1 and the inclination directions of the inclined surfaces 162 of the two locking portions 16 in the opening direction of the main body 1 are so-called opposite to each other. Both of them are oriented in the direction of the intersection and the two are oriented in the intersecting direction, so that the photomask can be placed in a fixed position and can be prevented from being displaced, and the photomask can be easily stored even when it is slightly displaced from the fixed position. It becomes possible to fix and place in a fixed position.

The inclined surface 162 of the engaging portion 16 is preferably made of olefins which are often used in semiconductors. Further, these locking portions 16 have, for example, a protruding portion from the main body, in addition to the one provided integrally with the main body 1,
On the other hand, the locking portion base 161 has a hole to be fitted into this protruding portion, and the protruding portion should be fitted into the hole of the locking portion base 161 of the locking portion 16 having the inclined surface 162. It may be fitted to the main body 1 by means of. For example, the locking base 161 has two holes, and two protrusions that fit in the holes are provided in the main body 1
If it is provided, it is possible to easily regulate the direction of the inclined surface 162 at the time of arrangement. Further, an auxiliary pedestal rib 151 is provided between the two locking portions 16 located on the side of the connecting portion insertion port 12 of the main body 1 and slightly toward the central portion of the main body 1. This is the body
The opening direction of 1 is low, and it is the auxiliary pedestal rib 151 that is inclined and becomes higher toward the back.

Therefore, when the photomask is placed in the main body 1 from the opening direction toward the locking portion 16 on the side of the connecting portion insertion opening 12 side of the main body 1, the ridge portion of the lower surface in the depth direction of the photomask is placed. However, along with this auxiliary pedestal rib 151
Allows direction control when pushing in the back of 1. Particularly, it has an inclination to support the photomask as an auxiliary pedestal rib 15
When it is pushed in along, it gradually reaches near the height of the inclined surface 162 of the locking portion 16 and can directly contact the inclined surface 162 of the locking portion 16. Therefore, it is convenient when the photomask is placed, and the photomask can be properly placed in a fixed position. Since the auxiliary pedestal rib 151 is low on the opening side, when the photomask is placed on the four locking portions 26, it no longer comes into contact with the photomask. Further, an auxiliary positioning rib 152 is provided in the opening direction of the main body 1 for guiding the photomask to a fixed position when mounting the photomask on the locking portion 16.

That is, when the photomask is to be placed on the locking portion 16 without reaching the fixed position on the back side, the auxiliary positioning rib 152 in the opening direction interferes with the opening portion. The photomask does not ride on the locking portion 16 in the direction, and when the photomask is guided to a fixed position, the auxiliary positioning rib 152 no longer interferes with the locking portion 16 in the mouth direction. Can be placed. Therefore, the auxiliary positioning rib 152 may be arranged in the direction of the opening rather than the fixed position of the photomask. Next, the inside of the lid 2 also has locking portions 26 for locking the placed photomasks at four locations from the respective corners of the substantially rectangular case toward the center. There is. These locking portions 26 are respectively arranged at the portions corresponding to the locking portions 16 of the main body 1, and when the photomask is placed on the locking portions 16 of the main body 1 and the lid 2 is closed. Is the respective locking part 16
It is pressed by the locking portion 26 of the lid 2 at a position corresponding to. The locking portion 26 includes a locking portion base 261 and an inclined surface 262 for contacting with the photomask.
When is closed, the ridge line portion which is the corner of the upper side of the photomask is brought into contact with the inclined surface 262 of the lid locking portion 26 and is pressed downward from above.

In this case, among the engaging portions 26, the concave portions 23 of the lid 2
The two locking portions 26 located on the side have the low-inclined end portion 262a of the inclined surface 262 inward of the lid body 2 and the high end portion 26.
2b is on the outer side of the cover 2, and the slope of the inclined surface 262 is the cover.
The two concave portions 23 and the connecting portion insertion opening 22 are provided in parallel on both sides. In addition, among the locking portions 26, the two locking portions 26 located on the side of the connecting portion insertion port 22 of the lid 2 have inclined surfaces 262.
The low-inclined end 262a of the lid 2 is inward of the lid 2 and the high-end 262b thereof is outward of the lid 2, and the inclination of the inclined surface 262 is on the side of the connecting portion insertion port 22 of the lid 2. It is arranged along the side. The locking portion base 261 that supports the inclined surface 262 of the locking portion 26 has a certain height in order to maintain the height for pressing the photomask at a fixed position. Therefore, the photomask is placed inside the main body 1 and the lid 2
When closed, the two locking portions 26 located on the inner side of the case, that is, on the side of the connecting portion insertion opening 22 have their inclined surfaces lowered toward the inner side in the lateral direction of the case, so that the photomask can be inserted. The ridge lines, which are the corners of both sides on the upper surface side of the two side faces in the direction, are brought into contact with each other by this inclined surface 262 so that the photomask can be pressed from both sides in the inserting direction. Also,
The side of the top side of the case opening side that is the front side of inserting the photomask

The ridges, which are the corners, are brought into contact with the slopes of the slopes 262 of the two locking portions 26 located on the side of the recess 23 of the lid 2. The locking portion 26 is gradually lowered toward the central portion of the lid body 2, the case opening side is high and the case central direction is low, and the inclined surface 2 is parallel to both sides of the case.
62 is directed, and its inclined surface is lowered in the vertical direction of the case, that is, in the back direction, and the ridge line portions that are the corners of the upper side of both sides in the insertion direction of the photomask are inclined. The surface 262 is brought into contact with the surface 262 to prevent the displacement toward the opening. The inclined surface 262 of the locking portion 26 is made of PP block copolymer or urethane resin in order to hold it elastically, in addition to olefins that are often used in semiconductor-related products. Good. The locking portion 26 has a structure in which the locking portion base 261 has an inclined surface 262, and, for example, a bridge-shaped locking portion 26 in which both end portions are the locking portion base portions 261 and an intermediate portion thereof is the inclined surface 262. It may be. The photomask can be elastically pressed when the lid 2 is closed by providing the elastic member or / and the elastic member in the form of a bridge with the elastic member,
Not only can the photomask be prevented from being scratched, but also misalignment can be prevented.

Further, these locking portions 26 are provided integrally with the lid body 2 and also have, for example, a protruding portion from the main body, whereas the locking portion base 261 has a protruding portion. It may have a hole to be fitted, and may be fitted to the lid body 2 by fitting the protruding portion into the hole of the locking portion base 261 of the locking portion 26 having the inclined surface 262. . For example, if the lid 2 has locking bases 261 at both ends and holes in each of them, and the lid 2 has two protrusions that match the holes, it is possible to regulate the direction of the inclined surface 262 at the time of installation. Easily possible. In particular, by changing the shapes, lengths and sizes of the two protrusions and the shapes, depths and sizes of the two holes, the predetermined inclination can be fitted in a desired direction. Also, the lid 2
Between the two locking portions 26 located on the side of the connecting portion insertion opening 22 of the lid 2, there is a rib 24 at the connecting portion insertion opening 22 of the lid 2 and it is located on the side of the recess 23 of the lid 2. The ribs 24 are provided between the two locking portions 26 and on the side of the recessed portion 23 of the lid 2 slightly, and these ribs also have rib protrusions 241. These ribs 24 and rib protrusions 241 do not normally come into contact with the photomask, but when the handling case receives a large impact and exceeds the elastic pressing scroak of the locking portion 26, the photomask is removed. It is a retainer to prevent slippage.

As described above, the locking portion 16 of the main body 1 and the lid 2
The locking portions 26 of the photomasks are arranged corresponding to each other, and by sandwiching the photomasks from above and below, the ridge lines, which are the corners of the upper and lower surfaces of the photomask, are pressed and positioned when the photomask is stored. And the deviation is prevented. in this case,
The engaging portions 16 and 26 of the main body 1 and the lid body 2 facing each other have their inclined surfaces directed in the intersecting direction, and can be pressed in from four directions by the ridge lines on the upper and lower surfaces of the photomask. Become. In addition, auxiliary positioning ribs 152 and rib protrusions
Even if a strong shock is applied by 241, the so-called two-stage misalignment prevention measures can be taken to minimize the misalignment of the photomask. As described above, when the photomask is positioned and placed in the main body 1 and the lid 2 is closed, the ridge line portion of the corner of the upper side of the photomask is
The photomask can be placed stationary while being brought into contact with the inclined surface 262 of the lid engaging portion 26 and being pressed downward from above. Further, the engaging portion 16 and the engaging portion 26 of the main body 1 and the lid body 2 which face each other are oriented in such a manner that their inclined surfaces are directed in the intersecting direction and are pressed in from four directions by the respective ridge lines on the upper and lower surfaces of the photomask. The photo mask can be stored in the mask case without shifting.

Further, since the locking portion 26 elastically presses the photomask, the displacement of the photomask can be further suppressed and the damage of the photomask can be prevented. Further, only the ridge line portion which is the corner portion of the photomask comes into contact with the locking portions 16 and 26 and can be placed without touching the photomask itself. As a result, static electricity caused by the displacement of the photomask in the case can be prevented, unnecessary dust can be prevented from adhering to the photomask, and the photomask surface can be prevented from being contaminated due to the contact of each locking portion. At the same time, it is possible to sufficiently prevent the photomask from being damaged due to the displacement of the photomask when handling the mask case. In addition, even when using a material coated with a conductive resin for antistatic to prevent static electricity from being generated on the mask case itself, or when using an acrylic resin mixed with a conductive rubber having a high antistatic effect, It may be used. This can prevent static electricity generated in the case itself and prevent unnecessary adhesion of dust to the case. FIG. 2 is a view showing an example of a conventional example, in which the main body 7 and the lid 8 are connected by the respective wing portions 901 of the hinge 90, and the tip of the plate formed to project from the opening peripheral edge of the main body 7. The main body side locking block 71 provided on the main body side locking block 71 and the lid side locking block 81 which is joined to the main body side locking block 71 when the lid is closed are engaged by a locking slider 95.

Therefore, the locking slider 95 is located in the upper direction of the lid body 8 and is formed to project outside the case. If an adhesive tape is wound around this portion, the portion of the locking slider 95 rises and a gap is created. Further, when this portion is shifted and only the portion below the locking slider 95 is wound with an adhesive tape, the periphery of the projecting main body side locking block 71 and the lid side locking block 81 are The adhesive tape will not be wound between them, leaving a gap,
Dust will enter the inside of the case from this part. Further, the main body 7 has a locking portion 75, and each has an inclined surface 751. However, all of these are inclined from the both side directions of the case toward the inside center of the case. Therefore, the movement in the horizontal direction can be controlled to some extent, but the displacement in the vertical direction is almost powerless. Further, the lid 8 has a substantially rod-shaped locking portion 85, and a cap portion is provided at the tip of the locking portion 85. Therefore, when the lid is closed, the cap portion comes into contact with the upper surface of the photomask and presses the photomask. This is because it comes into contact with the surface of the photomask and is pressed at one point of the tip portion of the hat portion, and it is extremely weak in suppressing the displacement of the photomask.

Further, if too much force is applied to this portion, the photomask may be damaged. FIG. 3 is a view showing a state in which the lid body 2 of the present mask case is opened. As shown in this figure, two locking parts located on the side of the recess 13 of the main body 1
16 are arranged in parallel with the side of the recess 13 side, and the two locking portions 16 located on the side of the connecting portion insertion opening 12 of the main body 1 are on both sides without the recess 23 and the connecting portion insertion opening 22, that is, the opening of the case. They are arranged in parallel from the part direction to the back direction. Further, the two locking portions 26 located on the concave portion 23 side of the lid body 2 are arranged in parallel to the concave portion 23 of the lid body 2 and both sides of the lid portion 2 where there is no connection portion insertion port 22. Also,
The two locking portions 26 located on the side of the connecting portion insertion opening 22 of the lid 2 are arranged parallel to the side of the lid 2 on the connecting portion insertion opening 22 side. Therefore, when the lid body 2 is closed, the locking portion 16 of the main body 1 and the corresponding locking portion 26 of the lid body 2 are oriented in the directions intersecting each other, and the photomask is not limited to the upper and lower surfaces, It can be pressed from all sides. Figure 4 shows the main body 1
FIG. 3 is a diagram showing an example of the locking portion 16 of FIG. 1, which is a locking portion base 161 and an inclined surface 1 configured by connecting two cylindrical legs at a connecting portion.
It consists of 62. The ridge line portion of the photomask is in contact with the inclined surface 162. Note that the two cylindrical legs of the locking base 161 have holes of different widths.

By providing the main body 1 with two projecting portions having different thicknesses and fitting the projecting portions into the holes,
The main locking portion 16 can be arranged on the main body 1. For example, by providing two protrusions having different thicknesses in this way, the main locking device 16
It can be easily done without making a mistake in the mounting direction. Figure 5
FIG. 4 is a view showing an example of a locking portion 26 of the lid body 2, showing a substantially bridge-shaped locking portion 26 having locking portion base portions 261 at both end portions and an inclined surface 262 at an intermediate portion thereof. Both end portions are connected by a connecting member so that the locking portion base 261 is not opened. Therefore, the ridge portion of the photomask is in contact with this inclined surface 262. In particular, since the inclined surface 262 is provided between the locking portion base portions 261, the inclined surface 262 has elasticity, and the photomask can be pressed. The two locking portion bases 261 have holes of different widths. The lid 2 is provided with two projecting portions having different thicknesses, and the projecting portions are fitted into the holes, whereby the main locking member 26 can be arranged on the lid 2. By doing so, similarly to the above, the mounting direction of the main locking member 26 can be easily performed without making a mistake.

[0027]

As described above, in the mask case according to the present invention, the engaging portion having the inclined surface of the main body is changed in the direction of inclination in the direction of the case opening and the depth direction, and the inclined surface is also provided in the engaging portion of the lid. When the lid is closed, the two inclined surfaces of the locking portions intersect each other, and the inclined surface of the locking portion in the opening direction is inclined in the left-right direction with respect to the main body. The slanted surface of the stopper is gradually slanted in the front-rear direction, that is, from the back toward the opening, and the slanted surface of the locking portion in the opening is slanted toward the back from the opening. By sloping the inclined surface of the locking part in the back direction to the left and right, the sandwiched photomask can be pressed not only in the vertical direction but also in the front, rear, left and right directions, so that the photomask does not shift during storage and locks. Friction due to misalignment between tool and photomask Prevents Luo resulting static, having a first effect of preventing adhesion of dust to the photomask.

Further, since there is no deviation, it is useful for preventing damage to the photomask. 2. The photomask comes into contact with the inclined part of the locking part of the main body and the lid, and contacts only at the ridge line part of the photomask. Therefore, the locking part does not contact the upper and lower surfaces of the photomask. The second effect is that the surface of the photomask is not polluted. 3. By forming the locking portion on the lid side into a so-called bridge shape, it is possible to elastically press the photomask, effectively prevent the displacement of the photomask, and prevent damage to the photomask. Have the effect of. 4. The auxiliary pedestal rib has the fourth effect that the positioning at the time of mounting the photomask can be accurately and easily performed. 5. With respect to the photomask housed by the auxiliary positioning ribs, rib protrusions, and ribs, there is a fifth effect of preventing the photomask from being displaced even when a large impact is applied to the mask case. It is also useful for positioning the photomask when it is stored.

[Brief description of drawings]

FIG. 1 is a view showing an embodiment of a mask case of a photomask according to the present invention.

FIG. 2 is a diagram showing a conventional example.

FIG. 3 is a view showing an embodiment in which the lid of the mask case of the photomask according to the present invention is opened.

FIG. 4 is a diagram showing an example of a locking portion of the main body.

FIG. 5 is a diagram showing an example of a locking portion of a lid body.

[Explanation of symbols]

1 body 11 Opening edge 110 protruding wall 12 Connection part insertion port 121 Contact piece fitting recess 13 recess 130 Horizontal part 131 protruding conductive piece 14 ribs 151 Auxiliary pedestal rib 152 Auxiliary positioning rib 16 Locking part 162 slope 2 lid 21 Opening edge 210 protruding wall 22 Connection part insertion port 221 Contact piece fitting recess 23 recess 231 closed block 24 ribs 241 rib protrusion 25 Positioning rib 26 Locking part 262 inclined surface 3 connection 31 Connection part body 312 back 32 tongue 321 tongue part hole 35 contact piece 351 contact side 352 Contact piece protrusion 4 closing slider 40 Closing slider body 41 Projection path fitting piece 42 Projection Position Control Piece 43 Notch

   ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 2H095 BB29 BE12                 3E061 AA30 AB09 AD09 DB17                 3E096 AA01 BA15 BA20 BB05 CA02                       CB03 CC02 DA03 DA23 DB06                       DC04 EA02Y FA09 GA03                       GA11                 5F031 CA07 DA12 EA10 EA12 EA19                       FA04 FA07

Claims (11)

[Claims] 1. A main body 1 and a lid 2 for closing an opening of the main body.
In a mask case for accommodating a photomask having, a locking portion 16 having an inclined surface 162 for mounting the photomask in a main body opening direction and a depth direction inside the main body 1,
Lids that correspond to these locking parts 16 when lid 2 is closed
2 is a mask case having a locking portion 26 having an inclined surface 262 for holding the photomask inside, and the locking portion 16 in the opening direction of the main body 1 has its inclined surface 162 facing the center of the case. It is arranged so that it gradually lowers, and the locking portion 16 in the back direction of the main body 1 is arranged so that its inclined surface 162 gradually lowers toward the case opening direction, and The locking portion 26 of the lid 2 is arranged so that its inclined surface 262 is gradually lowered toward the back side of the case, and the locking portion 26 of the lid 2 in the back direction moves the inclined surface 262 toward the center of the case. When the lid 2 is closed so that it is gradually lowered, the locking portion 16 of the main body 1 and the locking portion 26 of the lid 2 in the opening direction are provided with photomasks by the inclined surfaces 162 and 262, respectively. The mask case is characterized in that it is possible to press the ridge line part of the Su. 2. The four locking portions 16 having inclined surfaces 162 for mounting the photomask respectively from the respective corners inside the main body 1 of the substantially quadrangular mask case toward the center part are provided. Corresponding to this, the mask case has four locking parts 26 with inclined surfaces 262 for pressing the photomask inside the lid body 2, and the two locking parts 16 in the opening direction of the main body 1 are Its slope 162
Are arranged so as to be gradually lowered toward the center of the case, the two locking portions 16 in the innermost direction of the main body 1 face each other, and their inclined surfaces 162 are gradually lowered toward the case opening. The two locking portions 26 in the opening direction of the lid body 2 are
Are arranged so that they become gradually lower toward the back of the case, the two locking portions 26 of the lid 2 toward the back face each other, and their inclined surfaces 262 gradually lower toward the center of the case. When the lid 2 is closed, the locking portion 16 of the main body 1 and the locking portion 26 of the lid 2 in the opening direction are formed by the inclined surfaces 162 and 262 of the ridge portion of the photomask. 2. The mask case according to claim 1, wherein the mask case can be pressed from above and below and from the front, back, left and right directions. 3. The locking part 26 of the lid 2 has locking part bases 261 in both end directions thereof, and the center part is a substantially bridge-shaped locking part 26 having an inclined surface 262. Claim 1
3. The mask case according to any one of 1 to 2. 4. The locking portion base 261 of the locking portion 26 of the lid 2 has holes of different sizes, and the locking portion of the other lid 2
Two protrusions of different sizes corresponding to the holes are provided at 26 locations, and the protrusions can be fitted into the holes of the locking base 261 to position the locking locations of the locking sections 26. The mask case according to claim 3, wherein: 5. The PP having elasticity in the locking portion 26 of the lid body 2.
The mask case according to any one of claims 1 to 4, wherein a block copolymer or a urethane resin is used. 6. The locking part base 161 of the locking part 16 of the main body 1 has two holes of different sizes, and the locking part 16 of the other main body 1 corresponds to the hole at the location where the locking part 16 is provided. 2. The projections of two different sizes are provided, and the projections are fitted into the holes of the locking base 161 so that the location of the locking 16 can be positioned. 5. The mask case according to any one of 5. 7. The height of the inclined surface 162 of the locking portion 16 gradually increases toward the back of the case on the inner surface of the main body 1 on the side of the connecting portion insertion port 12 and near the locking portion 16 in the rear direction. It has an auxiliary pedestal rib 151 having an inclined side that makes it possible to guide the ridge of the photomask along the inclined side up to the inclined surface 162 of the locking portion 16 when the photomask is pushed in. The mask case according to any one of claims 1 to 6, which is characterized in that. 8. The inclined surface extending from the opening side of the inner surface of the main body 1 to the inclined surface 162 of the locking portion 16 in the opening direction of the main body 1.
It has an auxiliary positioning rib 152 that is slightly higher than the height of 162, which allows the place where the photomask is placed to be regulated and the locking portion.
8. The mask case according to claim 1, wherein the auxiliary positioning ribs 152 can prevent the photomask placed on the 16 inclined surfaces 162 from being displaced toward the opening side. 9. From the side of the connecting portion insertion opening 22 on the inner surface of the lid 2,
Ribs extending up to the inclined surface 262 of the locking portion 26 in the inner direction of the lid 2
The rib protrusion 241 has a rib protrusion 241 having a height slightly higher than the height of the inclined face 262, and the rib protrusion 241 prevents the photomask placed on the inclined face 262 of the locking portion 26 from being displaced in the depth direction. The mask case according to any one of claims 1 to 8, wherein the mask case can be blocked. 10. The lid 2 from the opening side of the inner surface of the lid 2.
Rib 24 extending to the inclined surface 262 of the locking portion 26 in the opening direction of the
The rib protrusion 241 has a rib protrusion 241 which is slightly higher than the height of the inclined face 262, and prevents the photomask placed on the inclined face 262 of the locking portion 26 from being displaced toward the opening. The mask case according to any one of claims 1 to 9, wherein the mask case can be blocked. 11. Ribs 14, 24 extending from the side surface portion to side portions of the photomask when the photomask is stored are provided on both side surfaces of the inner surface of the main body 1 and / or the lid body 2, 11. The mask according to claim 1, wherein the placement position of the photomask can be regulated and the lateral displacement of the placed photomask can be prevented by the ribs 14 and 24. Case.