JP7638363B2 - Probe card storage case - Google Patents

Description

The present invention relates to a case for storing a probe card for semiconductor wafer inspection.

(1. Conventional explanation)

In the final inspection of semiconductor chip (wafer) manufacturing, a probe card is used to measure the quality of the semiconductor chip. Extremely high-precision quality is required for these semiconductor chips, and the probes (probes) of the probe card are also highly accurate.

When moving this probe card, a probe card storage case is required to protect it from dust and other contaminants.

Figures 22 to 29 show a conventional probe card 1 and a conventional probe card storage case 2 for storing the probe card 1.

(1.1. Description of probe card 1)

As shown in Figures 23 and 24, the probe card 1 is made of a disk-shaped ceramic probe card substrate 3, a number of probes (probe needles) 4 provided in the center of the lower surface of the probe card substrate 3, and a stiffener (reinforcing material) 5 for reinforcing the probe card substrate 3, which is fixed to the upper surface of the ceramic probe card substrate 3. The stiffener 5 is formed, for example, in a ring shape and is formed larger than the probe card substrate 3.

In addition, a plurality of plate-shaped brim portions (protruding plate portions) 6 protruding radially outward are formed at desired positions on the outer peripheral edge of the stiffener 5 at desired distances. The brim portions 6 are provided with, for example, screw holes 21 into which male threads of a probe card removal tool (not shown) for engaging with and removing a probe card stored in the probe card storage case 2 are screwed, and one of the positioning portions 7, such as a recess for positioning the probe card in the probe card storage case 2, is formed on the outer peripheral edge 6a of the brim portions 6.

The probe card removal tool has at least three male threads spaced apart from each other to stably lift the stored probe card, and the probe card is provided with a brim portion 6 having a screw hole 21 that screws into the male threads, corresponding to the positions and number of the male threads.

In addition, the brim portion 6 may not have a screw hole 21 or one of the positioning portions 7, and may instead have an identification mark such as a barcode.

(1.2. Description of conventional probe card storage case 2)

The conventional probe card storage case 2, as shown in Figures 25 and 26, is made up of a box-shaped lower case part 8 having an upper opening for inserting a probe card, and an upper case part 9 that can be opened and closed to cover the upper opening of the lower case part 8. The lower case part 8 and the upper case part 9 are each made of aluminum or made by bonding together synthetic resin plates (plastic plates) in order to improve the shape accuracy.

The lower case portion 8 is composed of, for example, a rectangular bottom plate 8a and a rectangular side wall portion 8b erected from the outer periphery of the bottom plate 8a. At desired positions on the upper surface of the bottom plate 8a, for example, three mounting tables 10 for positioning the probe card are provided at desired positions spaced apart by a desired distance and fixed to the bottom plate 8a by screws, adhesive, or the like.

The positioning platform 10 also comprises a mounting portion 10a having a flat mounting surface 11 on which the probe card 1 is mounted at a desired height from the bottom plate 8a, and a protruding portion 10b formed on the outer portion of the mounting surface 11 and protruding upward, the protruding portion 10b having, on its inner surface, the other positioning portion 12, such as a convex portion, which engages with the one positioning portion 7.

The inner surface of the protrusion 10b is formed to match the outer peripheral edge 6a of the brim portion 6.

The upper case part 9 is composed of, for example, a rectangular ceiling plate 9a and a rectangular side wall part 9b that hangs down from the outer periphery of the ceiling plate 9a. The upper end of the side wall part 8b of the lower case part 8 comes into contact with the lower end of the side wall part 9b of the upper case part 9, so that the upper opening of the lower case part 8 is blocked by the upper case part 9.

The reference numeral 13 denotes a rod-shaped pressing member that protrudes downward and is provided on the underside of the ceiling plate 9a of the upper case part 9. When the lower case part 8 storing the probe card 1 is covered with the upper case part 9, the brim part 6 of the probe card 1 is clamped between the mounting surface 11 of the mounting stand 10 and the lower end of the pressing member 13, thereby fixing the probe card 1 to the storage case 2.

In addition, 13a is an elastic member provided at the lower end of the pressing member 13, and 10c is an elastic member formed at the upper end of the mounting table 10. In this case, the upper surface of the elastic member 10c forms the mounting surface 11.

2a is a hinge portion that connects one side of the lower case portion 8 and one side of the upper case portion 9 in a manner that allows the hinge portion to tilt freely.

For example, a conventional probe card storage case is disclosed in Patent Document 1.

Utility Model Registration No. 3171687

(2. Explanation of the shortcomings of conventional probe card storage cases)

The above-mentioned conventional probe card storage case 2 is made of aluminum or made by bonding together synthetic resin plates (plastic plates) in order to improve the shape precision, and is heavy.

As a result, it has been proposed to form a probe card storage case out of synthetic resin using a one-piece injection molding process.

In addition, since the above-mentioned probe card 1 is also heavy, a probe card 14 that does not use a stiffener 5 has been proposed.

Note that Figures 27 to 29 show a probe card 14 without the stiffener 5. The probe card 14 is formed by fixing, by screws, adhesive, etc., a number of plate-shaped brim portions 15 formed separately and protruding radially outward to desired positions on the outer periphery of a ceramic probe card substrate 3.

However, for example, when a probe card storage case made of synthetic resin measuring 430 mm x 430 mm x 68 mm and having a plate thickness of 5 mm was created by injection molding, a shape error of 0.2 mm occurred, and because the shape error was so large, the probe card could not be positioned accurately, making the case unsuitable for use.

The probe card removal tool is first positioned in the lower case, and then the male thread of the probe card removal tool is screwed into the screw hole of the stored probe card to secure it in place. However, if there is a large error in the shape of the lower case, the position of the male thread does not match the position of the screw hole, making it impossible to screw it in.

In addition, if a probe card 14 without a stiffener is stored in the probe card storage case 2 formed as described above, it will not be positioned accurately, causing rattling during movement, which may cause the probe card substrate 3 to vibrate, resulting in the probe card substrate 3 cracking or the brim portion 15 coming off the probe card substrate.

The present invention aims to provide a probe card storage case with little shape error. It also aims to provide a probe card storage case made of synthetic resin and molded by injection molding, which can store even probe cards that do not have stiffeners.

The object is also to make it possible to easily remove the stored probe card using a probe card removal tool, even in a probe card storage case made of synthetic resin formed by injection molding.

(3. Description of the components of the present invention)

The probe card storage case of the present invention is characterized in that it comprises one case part made of synthetic resin for storing a probe card and the other case part for closing the one case part, the one case part being made of a bottom plate, a side wall part erected from the outer peripheral edge part of the bottom plate, and a plurality of ribs connecting the bottom plate and the side wall part, and the one case part being molded by injection molding.

The probe card storage case of the present invention is characterized in that it comprises one case part for storing a probe card and another case part made of synthetic resin that closes the one case part, the other case part comprising a ceiling plate, a side wall part hanging down from the outer periphery of the ceiling plate, and a plurality of ribs connecting the ceiling plate and the side wall part, and the other case part is molded by injection molding.

The bottom plate also has a mounting table on which the probe card to be stored is placed and positioned, the mounting table being made of synthetic resin and having a mounting surface on which the probe card is placed at a desired height, a protrusion formed on the inner peripheral side of one positioning portion formed on the probe card, the other positioning portion being positioned at the other positioning portion provided on the mounting portion so as to be movable relative to the mounting portion, and a fixing means for fixing the protrusion to the mounting table, the mounting portion being formed by injection molding together with the bottom plate.

The probe card storage case of the present invention comprises one case part made of synthetic resin for storing a probe card and the other case part for closing the one case part, and has a mounting table on a bottom plate of the one case part for mounting and positioning the probe card to be stored, the mounting table having a mounting surface made of synthetic resin for mounting the probe card at a desired height from the bottom plate , and a positioning portion formed on the probe card, which is provided on the mounting surface of the mounting part so as to be movable in the radial direction of the stored probe card, and a positioning portion formed on the probe card. The other positioning portion to be positioned comprises a protrusion formed on its inner side surface and a fixing means for fixing the protrusion, which is provided on the mounting portion so as to be movable in the radial direction, at a desired position to position the stored probe card, and when the protrusion is not fixed by the fixing means, it is movable in the radial direction of the stored probe card relative to the mounting portion, and when the protrusion is fixed by the fixing means, it is fixed to the mounting portion, and the mounting portion is formed by injection molding together with the bottom plate.

The protrusion also has an inner edge formed with a recess, into which a portion of the bent portion of a rod-shaped engaging rod of a probe card removal tool that is rotatable around an axis and has a bent portion formed at its lower end can be inserted.

In addition, the brim portion of the probe card of the present invention is characterized by having a cutout portion formed on the outer peripheral edge, a bent portion formed at the lower end, and a probe card removal tool having a rod-shaped engaging rod that can be freely rotatable around an axis , for inserting the bent portion .

(4. Explanation of the effects of the present invention)

According to the present invention, even a probe card storage case made of resin by injection molding can be manufactured with minimal shape error.

In addition, the protrusions are designed to be movable in the radial direction, making it possible to accurately position the probe card to be stored.

1 is a vertical cross-sectional side view of a probe card storage case according to the present invention. 2 is a plan view of a lower case portion of the probe card storage case of the present invention. FIG. 11 is a plan view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. 11 is a vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. 11 is an enlarged vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. 11 is a vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. 11 is an enlarged vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. 11 is an enlarged plan view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. 11 is an enlarged vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. 11 is a vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. 11 is an enlarged vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. 11 is an enlarged plan view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. 11 is a vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. 11 is an enlarged vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. 11 is an enlarged plan view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. 11 is a vertical cross-sectional side view illustrating a method for manufacturing the lower case part of the probe card storage case of the present invention. FIG. FIG. 2 is a plan view of the probe card of the present invention. FIG. 2 is a plan view of another probe card of the present invention. FIG. 2 is a side view of the probe card removal tool of the present invention. 1 is an enlarged plan view for explaining a method of using a probe card removal tool for a probe card storage case of the present invention. FIG. 1 is an enlarged plan view for explaining a method of using a probe card removal tool for a probe card storage case of the present invention. FIG. FIG. 1 is a vertical sectional side view of a conventional probe card storage case. FIG. 2 is a vertical cross-sectional side view of the probe card. FIG. 2 is a plan view of a probe card. FIG. 1 is a vertical sectional side view of a conventional probe card storage case. FIG. 13 is a plan view of a lower case portion of a conventional probe card storage case. FIG. 13 is a plan view of another probe card. FIG. 13 is a vertical cross-sectional side view of another probe card. FIG. 1 is a vertical sectional side view of a conventional probe card storage case.

The following drawings explain an embodiment of the present invention.

Note that parts that are not specifically explained are the same as the conventional example described above, and so explanations will be omitted.

(5.1. Description of the rib portion 17 of the present invention)

Figures 1 and 2 show a probe card storage case 16 that is integrally molded by injection molding according to the present invention. In the probe card storage case 16, a plurality of ribs 17 are provided at a desired distance in the conventional lower case portion 8, connecting the inner surface of the side wall portion 8b to the upper surface of the bottom plate 8a.

Similarly, in the conventional upper case portion 9, multiple rib portions 17 are provided at a desired distance to connect the inner surface of the side wall portion 9b to the underside of the ceiling plate 9a.

Conventionally, when a synthetic resin probe card storage case was made by injection molding, a molding error of 0.2 mm occurred, making it unusable. However, in the present invention, by providing the rib portion 17, it is possible to reduce the shape error.

In addition, without the rib portion 17, the thickness of the side wall of the upper case portion (or the lower case portion) would have had to be 5 mm or more in order to increase strength, but by providing the rib portion 17, this can be reduced to 4 mm or less, resulting in a reduction in weight of 20% or more.

The rib portion 17 is formed, for example, in the shape of a right-angled triangular plate, and the thickness of the rib portion 17 is made thinner than the thickness of the side wall portion, for example, less than half the thickness.

By thinning the rib portion 17, particularly by making it half or less, when the lower case portion (or the lower case portion) made of synthetic resin is formed by injection molding, the amount of raw material supplied to form the rib portion is significantly less than the amount of raw material supplied to form the side wall portion. This makes it possible to prevent the upper surface of the side wall portion from bending downward (or the lower surface upward) due to a lack of raw material supply (supply pressure) on the side wall portion 8b side when raw material is supplied, thereby improving the shape precision.

(5.2. Description of the mounting table 18 of the present invention)

In addition, in the conventional method, the mounting table 10, in which the mounting portion 10a and the protruding portion 10b are integrally formed, is fixed to the floor plate 8a by screws or adhesive, whereas in the present invention, a mounting table 18 is provided, and as shown in Figs. 1 to 16, the mounting table 18 is composed of a mounting portion 18a having a mounting surface 19 on which the probe cards 1, 14 are placed at a desired height from the bottom plate 8a of the lower case portion 8, a protruding portion 18b formed separately from the mounting portion 18a and having on its inner surface the other positioning portion 12, such as a convex portion, which engages with one of the positioning portions 7 of the probe cards 1, 14, and a fixing means 20 for fixing the protruding portion 18b to the mounting portion 18a.

The synthetic resin mounting portion 18a is molded integrally with the synthetic resin floor plate 8a by injection molding, and the protrusion 18b is provided separately from the mounting portion 18a. The protrusion 18b is provided on the mounting surface 19 so as to be movable in the radial direction, and the protrusion 18b can be fixed to the mounting portion 18a at a desired position by the fixing means 20.

The fixing means 20 is, for example, composed of a through hole 20a with a circular cross section that is provided perpendicular to the surface of the mounting surface 19 of the mounting portion 18a, a radially extending long hole 20b that is provided perpendicularly through the protruding portion 18b, and a threaded portion 20d that passes through the long hole 20b and the through hole 20a and has a nut 20c screwed to its tip.

Then, the tip of the screw portion 20d inserted from above the long hole 20b into the long hole 20b and the through hole 20a is screwed into the nut 20c, and without tightening it tightly, the protrusion 18b is moved radially relative to the mounting portion 18a to the desired location, and the nut 20c is then tightly tightened, so that the protrusion 18b is clamped between the head 20e of the screw portion 20d and the mounting portion 18a, and the protrusion 18b is fixed to the mounting portion 18a in the desired position.

A washer (not shown) with an elliptical hole may be interposed between the head 20e of the screw portion 20d and the mounting surface 19.

As described below, a recess 23 is formed on the inner peripheral edge of the protruding portion 18b of the mounting table 18, facing the notch portion 22 described below, so that even if the case has a shape error, it is easy to engage the bent tip of the improved probe card removal tool described below.

(6. Explanation of the brim part of the probe card)

In addition, instead of the screw holes 21 provided in the brim portions 6, 15 of the conventional probe cards 1, 14 that engage with the probe card removal tool, the probe cards 1, 14 of the present invention have, as shown in Figures 17 and 18, a long groove-shaped cutout portion 22 extending radially inward on the outer periphery 6a, 15a of the brim portions 6, 15.

In addition, in the present invention, an improved probe card removal tool 24 is used instead of a conventional probe card removal tool having a male threaded portion, as shown in Figure 19. The improved probe card removal tool 24 comprises a removal tool body 25 and an L-shaped rod-shaped engagement rod 26 that is suspended downward from the removal tool body 25 body and can slide up and down in the axial direction relative to the removal tool body 25 and can rotate around the axis. The engagement rod 26 comprises a suspended rod 16a and a bent portion 26b formed by bending at a right angle at the lower end of the suspended rod 16a.

As shown in FIG. 20, the bent portion 26b of the improved probe card removal tool 24 is rotated so that it coincides with the longitudinal direction of the notch 22, and then is hung down from above the notch 22 and penetrates into the notch 22. Then, by rotating the bent portion 26b by 90 degrees, for example, as shown in FIG. 21, the bent portion 26b is positioned on the underside of the brim portions 6 and 15. As a result, by lifting the probe card removal tool 25 upward, the probe cards 1 and 14 can be lifted upward.

As described above, by making the notch 22 a long groove, it is possible to engage the probe card removal tool with the probe card even if there is some shape error in the case.

Furthermore, the portion of the protruding portion 18b of the mounting table 18 that faces the cutout portion 22 is formed in a concave shape, so that even if there is some shape error in the case, a part of the bent portion of the probe card removal tool can be inserted into the cutout portion.

(7. Description of the manufacturing method for the probe card storage case 16)

Next, we will explain the manufacturing method of the probe card storage case of the present invention.

First, to manufacture the lower case portion 8 of the present invention, a thermoplastic resin or the like is injected with injection pressure into a mold for forming the bottom plate 8a, the side wall portion 8b, the rib portion 17, and the mounting portion 18a formed at a desired height from the bottom plate 8a, to form a lower case portion without the protruding portion 18b, as shown in Figures 3 and 4.

If the through hole 20a is not formed in the mounting portion 18a, a through hole 20a is formed separately as shown in FIG. 5.

Next, as shown in Figs. 6 to 8, a separately prepared protruding portion 18b having the other positioning portion 12 is placed on the mounting surface 19 of the mounting portion 18a. Then, as shown in Fig. 9, for example, a screw portion 20d is passed through an elongated hole 20b formed in the mounting portion 18a and a through hole 20a in the mounting portion 18a, and a nut 20c is slightly screwed onto the tip of the screw portion 20d, thereby temporarily fixing the protruding portion 18b to the mounting portion 18a with the fixing means 20.

The protrusion 18b is positioned radially outward so that the probe cards 1 and 14 can be placed on the mounting table later.

Then, as shown in Figures 10 to 12, the probe card 1, 14 to be stored is placed on the placement surface 19b of the placement section 18a.

At this time, the protrusion 18b is located radially outward, so the other positioning portion 12 of the protrusion 18b does not engage (match) with one of the positioning portions 7 of the probe card.

Next, as shown in Figures 13 to 15, each of the protrusions 18b is moved radially inward along the long holes 20b, so that the other positioning portion 12 of the protrusion 18b fits (aligns) with one of the positioning portions 7 of the probe card 14.

In addition, since it is only necessary to position the probe card storage case and the probe card, it is not necessary to move all of the protrusions 18b in the radial direction, and only the necessary protrusions 18b may be moved.

Then, the nut 20c is tightly tightened onto the screw portion 20d, so that the protrusion 18b is clamped between the head 20e of the screw portion 20d and the mounting portion 18a, and the protrusion 18b is firmly fixed to the mounting portion 18a.

Next, as shown in FIG. 16, the probe cards 1 and 14 are removed from the probe card storage case, allowing the upper case portion 8 of the present invention to be manufactured.

The upper case part 9 is also formed in the same manner as above.

The pressing member 13 of the upper case part 9 may be molded integrally with the upper case part 9 using a die, or may be a separate member that is attached to the upper case part 9.

In addition, elastic members 10c and 13a may be provided as necessary.

Then, one side of the upper case part 8 and one side of the lower case part 9 are connected by the hinge part 2a so as to be freely tiltable.

The protrusion 18b may be attached to the mounting portion 18a after the hinge portion 2c is attached.

In the present invention, a probe card storage case made of synthetic resin is formed by injection molding, and even if there is a shape error, the probe card and storage case are positioned after molding, so it is possible to create a probe card storage case that can be accurately positioned.

In addition, the mounting portion 18a and the protruding portion 18b of the mounting table 18 are molded separately, and since there is no need to move the mounting portion 18a on which the probe card is placed when aligning, the probe cards 1 and 14 can be positioned easily, and no excessive force is applied to the brim portions 6 and 15 of the probe cards 1 and 14, which prevents damage to the brim portions 6 and 15.

In addition, in the present invention, in addition to the probe card 14 without the stiffener 5, the probe card 1 having the stiffener 5 can also be stored.

1 Probe card 2 Probe card storage case 2a Hinge portion 3 Probe card substrate 4 Probe 5 Stiffener 6 Brim portion 6a Outer periphery 7 One positioning portion 8 Lower case portion 8a Bottom plate 8b Side wall portion 9 Upper case portion 9a Ceiling plate 9b Side wall portion 10 Mounting base 10a Mounting portion 10b Protruding portion 10c Elastic member 11 Mounting surface 12 The other positioning portion 13 Pressing member 13a Elastic member 14 Probe card 15 Brim portion 15a Outer periphery 16 Probe card storage case 17 Rib portion 18 Mounting base 18a Mounting portion 18b Protruding portion 19 Mounting surface 20 Fixing means 20a Through hole 20b Long hole 20c Nut 20d Screw portion 20e Head portion 21 Screw hole 22 Notch portion 23 Recess 24 Probe card removal tool 25 Removal tool main body 26 Engagement rod 26a Suspended rod 26b Bent part

Claims (4)

The probe card is inserted into the probe holder 10. The probe card is inserted into the probe holder 10. The probe card is inserted into the probe holder 10.
a mounting table for mounting and positioning a probe card to be stored on a bottom plate of the one of the case parts;
the mounting table includes a mounting portion made of synthetic resin and having a mounting surface on which the probe card is mounted at a desired height from the bottom plate ;
A positioning portion is provided on the mounting surface of the mounting portion so as to be movable in the radial direction of the probe card to be accommodated, the positioning portion being positioned by one of the positioning portions formed on the probe card, the other positioning portion being a protrusion formed on the inner peripheral side surface of the positioning portion;
a fixing means for fixing the protruding portion provided on the placement portion so as to be movable in the radial direction at a desired position for positioning the probe card to be stored;
the protrusion is configured to be movable in a radial direction of the probe card stored in the placement section when not fixed by the fixing means, and to be fixed to the placement section when fixed by the fixing means;
The probe card storage case is characterized in that the placement portion is formed together with the bottom plate by injection molding. The one case portion includes a bottom plate, a side wall portion standing on an outer peripheral edge portion of the bottom plate, and a plurality of ribs connecting the bottom plate and the side wall portion,
2. The probe card storage case according to claim 1, wherein the one case portion is formed by injection molding. The other case portion is made of synthetic resin,
the other case portion comprises a ceiling plate, a side wall portion hanging down from an outer peripheral edge portion of the ceiling plate, and a plurality of ribs connecting the ceiling plate and the side wall portion,
3. The probe card storage case according to claim 1, wherein the other case portion is formed by injection molding. A recess is formed on an inner edge of the protrusion,
A probe card storage case as described in any one of claims 1 to 3, characterized in that the recess can accommodate a portion of the bent portion of a probe card removal device having a rod-shaped engaging rod with a bent portion formed at its lower end and capable of rotating around an axis.

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