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JP2512005B2 - Magnetic recording media - Google Patents
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JP2512005B2 - Magnetic recording media - Google Patents

Magnetic recording media

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Publication number
JP2512005B2
JP2512005B2 JP21693887A JP21693887A JP2512005B2 JP 2512005 B2 JP2512005 B2 JP 2512005B2 JP 21693887 A JP21693887 A JP 21693887A JP 21693887 A JP21693887 A JP 21693887A JP 2512005 B2 JP2512005 B2 JP 2512005B2
Authority
JP
Japan
Prior art keywords
thin film
magnetic recording
film
fine particles
ferromagnetic metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP21693887A
Other languages
Japanese (ja)
Other versions
JPS6459623A (en
Inventor
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP21693887A priority Critical patent/JP2512005B2/en
Publication of JPS6459623A publication Critical patent/JPS6459623A/en
Application granted granted Critical
Publication of JP2512005B2 publication Critical patent/JP2512005B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 産業上の利用分野 本発明は、高密度磁気記録に適する強磁性金属薄膜を
磁気記録層とする磁気記録媒体に関する。
Description: TECHNICAL FIELD The present invention relates to a magnetic recording medium using a ferromagnetic metal thin film suitable for high-density magnetic recording as a magnetic recording layer.

従来の技術 近年、磁気記録媒体は、高保磁力化と表面平滑化によ
る周波数特性改善も、磁気ヘッドとの関係で限界がみえ
てきたことから、強磁性金属薄膜を磁気記録層とする磁
気記録媒体の実用化が強く望まれている(特公昭56−23
208号、特公昭58−91号、特開昭61−77128号等の公報参
照)。かかる磁気記録媒体の実用化は、所望の信号対雑
音比(以下C/Nと記す)を確保した上で、0.1μm程度の
極めて薄い強磁性金属薄膜に耐久性を付与できるか否か
にかかっているといっても過言ではない。そのためにい
くつかの改善アプローチがなされ、磁気記録層自身に高
密度の突起形状を形成する方法(特開昭59−84927号、
同59−121631号、同58−10021号、同60−21962号、同61
−74139号、同61−16019号、同60−9363号等の公報参
照)や、従来古くから検討されてきた、オーバーコート
と潤滑剤の組み合わせで、アモルファスカーボン膜とフ
ルオロカーボン系の潤滑剤の組み合わせ(特開昭61−14
2525号公報)、アモルファスSi−N−O膜とフルオロカ
ーボン系の潤滑剤の組み合わせ(特開昭61−131231号公
報)、硬質カーボンと含フッ素オイル(特開昭61−1266
27号公報)等数多くの提案がなされている。
2. Description of the Related Art In recent years, the magnetic recording medium has a limit in its frequency characteristics improvement due to high coercive force and surface smoothing in relation to the magnetic head. Therefore, a magnetic recording medium using a ferromagnetic metal thin film as a magnetic recording layer has been found. There is a strong demand for the practical use of (Japanese Patent Publication No. 56-23
No. 208, Japanese Patent Publication No. 58-91, JP-A No. 61-77128, etc.). Practical application of such a magnetic recording medium depends on whether or not durability can be imparted to an extremely thin ferromagnetic metal thin film of about 0.1 μm while securing a desired signal-to-noise ratio (hereinafter referred to as C / N). It is no exaggeration to say that Therefore, some improvement approaches have been taken, and a method of forming a high-density projection shape on the magnetic recording layer itself (JP-A-59-84927,
59-121631, 58-10021, 60-21962, 61
-74139, 61-16019, 60-9363, etc.) or a combination of an overcoat and a lubricant that has been studied for a long time, and a combination of an amorphous carbon film and a fluorocarbon lubricant. (JP-A-61-14
2525), a combination of an amorphous Si-N-O film and a fluorocarbon-based lubricant (JP-A-61-131231), hard carbon and a fluorine-containing oil (JP-A-61-1266).
No. 27), and many other proposals have been made.

発明が解決しようとする問題点 しかしながら上記した構成では、微粒子構造と、オー
バコート層を組み合わせたものでも、十分な耐久性を得
ようとすると、オーバコート膜厚と潤滑剤の合計の実効
的な厚みのスペーシング損失へ影響を及ぼす分が、200
Å程度は必要なため、より短波長化の進む今後の磁気記
録にとって、せっかくの短波長出力が犠牲になることか
ら改善が望まれていた。
DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention However, in the above-mentioned configuration, even if the fine particle structure and the overcoat layer are combined, if an attempt is made to obtain sufficient durability, an effective total of the overcoat film thickness and the lubricant is obtained. The amount that affects the spacing loss of thickness is 200
Since about Å is required, future magnetic recording with a shorter wavelength will sacrifice the short wavelength output, and therefore improvement has been desired.

本発明は上記した事情に鑑み、なされたもので、スペ
ーシング損失の小さい、耐久性をもった磁気記録媒体を
提供するものである。
The present invention has been made in view of the above circumstances, and provides a durable magnetic recording medium with a small spacing loss.

問題点を解決するための手段 上記した問題点を解決するため、本発明の磁気記録媒
体は、高分子フイルム上に強磁性金属薄膜Aを配し、そ
の上に先端が露出した微粒子を含む強磁性金属薄膜Bを
配し、且つ薄膜Bに露出した微粒子高さより低い硬質炭
素薄膜を配したものである。
Means for Solving the Problems In order to solve the above-mentioned problems, the magnetic recording medium of the present invention has a ferromagnetic metal thin film A on a polymer film, and a strong magnetic film containing fine particles having exposed tips. The magnetic metal thin film B is arranged, and the hard carbon thin film having a height lower than the height of the fine particles exposed on the thin film B is arranged.

作用 本発明の磁気記録媒体は、上記した構成により、直接
主として、高速で磁気ヘッド構成材と摺動するのは、露
出した微粒子であり、かつ、突発的に平滑な部分に接触
が起っても、その部分は硬い炭素膜で保護されているの
で、磁気記録層の破壊が起りにくいのと、先端の露出高
さを低くできるのでスペーシング損失を小さくできるこ
とになるのである。
The magnetic recording medium of the present invention having the above-mentioned structure directly and mainly slides on the magnetic head constituent material at high speed due to the exposed fine particles, and the contact with the smooth part occurs suddenly. However, since that portion is protected by the hard carbon film, the magnetic recording layer is less likely to be destroyed, and the exposed height of the tip can be reduced, so that the spacing loss can be reduced.

実施例 以下、図面を参照しながら本発明の一実施例について
説明する。図は本発明の一実施例に係る磁気記録媒体の
拡大断面図で、図で1はポリフェニルサルファイド,ポ
リエーテルサルフォン,ポリエチレンナフタレータ,ポ
リアミドイミド等の高分子フイルムで、2は強磁性金属
薄膜Aで、Co,Co−Ni,Co−Fe,Co−Cu,Co−Cr,Co−O,Co
−Cr−Nb,Co−Ni−O,Co−Ni−Pr−O等の電子ビーム蒸
着法や高周波スパッタリング法等の薄膜形成方法で形成
されたもので、膜厚は高々2000Åまでで、必要なら、多
層構成とすることもできる。3は微粒子で、CaCO3,Si
O2,Eu2O3,Cr2O3,MoS2,WS2等の無機微粒子で、4は強磁
性金属薄膜Bで、材質、製法は、2と同じ類の中から適
宜選択できる。但し、4の膜圧は、微粒子3の直径より
小さいことは勿論で、5の硬質炭素薄膜を加えた厚みで
も微粒子の直径より小さく設定しなければならない。微
粒子の密度にもよるが、50Å程度の差が必要である。微
粒子先端が薄膜から露出している構成を得る方法として
は、通常通り微粒子を配した上に薄膜を形成してから後
で研磨により除去する方法か、突起先端に低沸点材料を
転写法で付着せしめておいて、薄膜形成時に、低沸点材
が蒸発し、その部分に薄膜が形成されないようにする方
法かのいずれかで実施できる。硬質炭素薄膜の形成方法
は、炭化水素系ガスのプラズマを利用する方法、グラフ
ァイトをターゲットにしてスパッタリング法により形成
する方法等から適宜選べばよい。6はパーフルオロカル
ボン酸,パーフルオロアルキルスルホン酸,パーフルオ
ロポリエーテル等の潤滑剤層で、溶液塗布法,真空蒸着
法等で形成する。以下、更に具体的に本発明の一実施例
について、比較例と対比で説明する。
Embodiment An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is an enlarged cross-sectional view of a magnetic recording medium according to an embodiment of the present invention, in which 1 is a polymer film such as polyphenyl sulfide, polyether sulfone, polyethylene naphthalator and polyamide imide, and 2 is a ferromagnetic metal. In the thin film A, Co, Co-Ni, Co-Fe, Co-Cu, Co-Cr, Co-O, Co
-Cr-Nb, Co-Ni-O, Co-Ni-Pr-O, etc. are formed by a thin film forming method such as electron beam evaporation method or high frequency sputtering method. The film thickness is up to 2000 Å, if necessary. It is also possible to have a multilayer structure. 3 is a fine particle, CaCO 3 , Si
Inorganic fine particles such as O 2 , Eu 2 O 3 , Cr 2 O 3 , MoS 2 , WS 2 and the like, 4 is a ferromagnetic metal thin film B, and the material and manufacturing method can be appropriately selected from the same group as 2. However, it is needless to say that the film pressure of 4 is smaller than the diameter of the fine particles 3 and the thickness of the hard carbon thin film of 5 is also set to be smaller than the diameter of the fine particles. Although it depends on the density of the particles, a difference of about 50Å is required. To obtain a structure in which the tips of the fine particles are exposed from the thin film, the fine particles are arranged on the thin film as usual, and then the thin film is removed by polishing, or the low boiling point material is attached to the projection tips by the transfer method. At the very least, it can be carried out by any method of preventing the low boiling point material from evaporating at the time of forming the thin film and forming the thin film on that portion. The method for forming the hard carbon thin film may be appropriately selected from a method using plasma of hydrocarbon gas, a method of forming a target with graphite and a sputtering method, and the like. Reference numeral 6 is a lubricant layer of perfluorocarboxylic acid, perfluoroalkylsulfonic acid, perfluoropolyether or the like, which is formed by a solution coating method, a vacuum deposition method or the like. Hereinafter, one example of the present invention will be described more specifically in comparison with a comparative example.

厚み12μmのポリエチレンテレフタレートフイルム
(表面粗さ、20Å)を準備し、表面をブロー放電処理
〔13.56(MHz),2(KW),0.01(Torr)酸素〕し、その
上で、直径1mの円筒キャンに沿わせて、該フイルムを巻
取りながら、5.2×10-5(Torr)の酸素中で、Co−Ni(C
o:80wt%)を最小入射角45度で電子ビーム蒸着し、1000
ÅのCo−Ni−O膜を形成し、その上に直径600Åの水を
吸着させたMoS2粒子を3×107ケ/cm2配し、同じ蒸着機
を用いて、3.8×10-5(Torr)の酸素中でCo−Ni(Co:80
wt%)を最小入射角55度で電子ビーム蒸着し、480ÅのC
o−Ni−O膜を形成した。その時、円筒キャン温度を60
℃にして、MoS2から吸着水分が蒸着時に加熱されて蒸発
し、Co−Ni−O膜がMoS2微粒子の部分に形成されないよ
うにした。更に、グラファイトをターゲットにして、Ar
とH2の混合ガスを放電ガスにして2×10-2(Torr)〔A
r:H2=1:3〕,2.5(KW)13.56(MHz)の条件でスパッタ
リング法によりダイアモンド状硬質炭素薄膜を50Å形成
した。この薄膜形成前にローラーにより、パルミチン酸
を突起先端に転写させ、スパッタリング時に、薄膜がの
らないように操作した。この状態で、パーフルオロオク
タン酸を真空蒸着法で50Å形成し、8ミリ幅の磁気テー
プにした。
Prepare a polyethylene terephthalate film (surface roughness, 20Å) with a thickness of 12 μm, blow discharge the surface [13.56 (MHz), 2 (KW), 0.01 (Torr) oxygen], and place it on a cylindrical can with a diameter of 1 m. Along with the film, while winding the film, in a oxygen of 5.2 × 10 -5 (Torr), Co-Ni (C
o: 80wt%) and electron beam evaporation at a minimum incident angle of 45 degrees
A Å Co-Ni-O film is formed, and MoS 2 particles having a diameter of 600 Å adsorbed with water are placed on the surface of 3 × 10 7 pieces / cm 2 and the same vapor deposition machine is used to deposit 3.8 × 10 -5. (Torr) oxygen in Co-Ni (Co: 80
wt%) with electron beam evaporation at a minimum incident angle of 55 degrees,
An o-Ni-O film was formed. At that time, set the cylinder can temperature to 60.
At a temperature of ℃, the adsorbed moisture from MoS 2 was heated and vaporized during the vapor deposition so that the Co—Ni—O film was not formed in the MoS 2 fine particle portion. Furthermore, using graphite as a target, Ar
And then a mixed gas of H 2 to the discharge gas 2 × 10 -2 (Torr) [A
r: H 2 = 1: 3], 2.5 (KW) 13.56 (MHz) was used to form 50 Å diamond-like hard carbon thin film by sputtering. Before forming this thin film, palmitic acid was transferred to the tips of the projections by a roller, and operation was performed so that the thin film did not deposit during sputtering. In this state, 50 Å of perfluorooctanoic acid was formed by a vacuum vapor deposition method to obtain an 8 mm wide magnetic tape.

一方比較例として、同じ高分子フイルム上に、直径30
0ÅのSiO2微粒子を1.5×109ケ/cm2配し、Co−Ni−O膜
を、実施例と同じ条件で、1000Åと480Å重ねて蒸着
し、その上に150Åのダイアモンド状硬質炭素薄膜を配
したものを比較テープAとし、この膜のないものを比較
テープBとし、夫々にパーフルオロオクタン酸を、50Å
真空蒸着し8ミリ幅に加工した。
On the other hand, as a comparative example, the diameter of 30
0.5 Å SiO 2 fine particles are arranged at 1.5 × 10 9 pieces / cm 2 and 1000 Å and 480 Å of Co-Ni-O films are vapor-deposited under the same conditions as in the example, and 150 Å diamond-like hard carbon thin film Was placed as Comparative Tape A, the one without this film was designated as Comparative Tape B, and perfluorooctanoic acid was added to 50Å
It was vacuum-deposited and processed to have a width of 8 mm.

夫々のテープを改造した8ミリビデオデッキにより、
ギャップ長0.2μmのアモルファス合金をギャップ近傍
にスパッタ形成したフェライトとの複合型リングヘッド
により、キャリア周波数を5(MHz)から7(MHz)にあ
げて、C/Nを比較した。初期値の比較では比較比BをO
(dB)とすると、実施例は−0.7(dB)、比較例Aは−
2.3(dB)であった。40℃85%RHの環境でくり返し記録
再生しての比較では、夫々初期との相対C/Nで示すと、1
50回目の記録再生で実施例は−0.2〜−0.4(dB)、比較
例Aは−0.2〜−0.5(dB)、比較例Bは−2.3〜−3.8
(dB)であった。−5℃での200回のくり返し記録再生
では、実施例は、−0.5〜−0.9(dB)、比較例Aは−1.
1〜−1.5(dB)、比較例Bは−3.1〜−5.7(dB)であっ
た。
By the 8mm video deck which remodeled each tape,
C / N was compared by raising the carrier frequency from 5 (MHz) to 7 (MHz) using a composite ring head with ferrite in which an amorphous alloy with a gap length of 0.2 μm was formed near the gap by sputtering. When comparing the initial values, set the comparison ratio B to O
(DB), the example is -0.7 (dB), and the comparative example A is-.
It was 2.3 (dB). In a comparison of repeated recording and reproduction in an environment of 40 ° C and 85% RH, the relative C / N with the initial value is 1 respectively.
At the 50th recording / reproduction, the example is -0.2 to -0.4 (dB), the comparative example A is -0.2 to -0.5 (dB), and the comparative example B is -2.3 to -3.8.
It was (dB). When the recording and reproducing are repeated 200 times at -5 ° C, the example is -0.5 to -0.9 (dB), and the comparative example A is -1.
1 to -1.5 (dB), Comparative Example B was -3.1 to -5.7 (dB).

発明の効果 以上のように本発明によれば、短波長域でのC/Nと耐
久性のバランスの改善された磁気記録媒体が得られると
いったすぐれた効果がある。
EFFECTS OF THE INVENTION As described above, according to the present invention, there is an excellent effect that a magnetic recording medium having an improved balance of C / N and durability in a short wavelength region can be obtained.

【図面の簡単な説明】[Brief description of drawings]

図は本発明の一実施例に係る磁気記録媒体の拡大断面図
である。 1……高分子フイルム、2……強磁性金属薄膜A、3…
…微粒子、4……強磁性金属薄膜B、5……硬質炭素薄
膜。
FIG. 1 is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention. 1 ... Polymer film, 2 ... Ferromagnetic metal thin film A, 3 ...
... fine particles, 4 ... ferromagnetic metal thin film B, 5 ... hard carbon thin film.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】高分子フイルム上に強磁性金属薄膜Aを配
し、その上に先端が露出した微粒子を含む強磁性金属薄
膜Bを配し、且つ、前記強磁性金属薄膜Bに露出した微
粒子高さより低い硬質炭素薄膜を配したことを特徴とす
る磁気記録媒体。
1. A ferromagnetic metal thin film A is arranged on a polymer film, a ferromagnetic metal thin film B containing fine particles having exposed tips is arranged thereon, and fine particles exposed on the ferromagnetic metal thin film B. A magnetic recording medium comprising a hard carbon thin film having a height lower than the height.
JP21693887A 1987-08-31 1987-08-31 Magnetic recording media Expired - Lifetime JP2512005B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21693887A JP2512005B2 (en) 1987-08-31 1987-08-31 Magnetic recording media

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21693887A JP2512005B2 (en) 1987-08-31 1987-08-31 Magnetic recording media

Publications (2)

Publication Number Publication Date
JPS6459623A JPS6459623A (en) 1989-03-07
JP2512005B2 true JP2512005B2 (en) 1996-07-03

Family

ID=16696281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21693887A Expired - Lifetime JP2512005B2 (en) 1987-08-31 1987-08-31 Magnetic recording media

Country Status (1)

Country Link
JP (1) JP2512005B2 (en)

Also Published As

Publication number Publication date
JPS6459623A (en) 1989-03-07

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