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JP2594380B2 - Magnetic recording media - Google Patents
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JP2594380B2 - Magnetic recording media - Google Patents

Magnetic recording media

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Publication number
JP2594380B2
JP2594380B2 JP27395590A JP27395590A JP2594380B2 JP 2594380 B2 JP2594380 B2 JP 2594380B2 JP 27395590 A JP27395590 A JP 27395590A JP 27395590 A JP27395590 A JP 27395590A JP 2594380 B2 JP2594380 B2 JP 2594380B2
Authority
JP
Japan
Prior art keywords
magnetic recording
film
fine particles
recording media
particle diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP27395590A
Other languages
Japanese (ja)
Other versions
JPH04147419A (en
Inventor
紘一 篠原
猛 村上
敏明 国枝
裕昭 舘野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP27395590A priority Critical patent/JP2594380B2/en
Publication of JPH04147419A publication Critical patent/JPH04147419A/en
Application granted granted Critical
Publication of JP2594380B2 publication Critical patent/JP2594380B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 産業上の利用分野 本発明は、高密度磁気記録に適する強磁性金属薄膜を
磁気記録層とする磁気記録媒体に関する。
Description: TECHNICAL FIELD The present invention relates to a magnetic recording medium using a ferromagnetic metal thin film suitable for high-density magnetic recording as a magnetic recording layer.

従来の技術 記録再生機器の小型化,高性能化の為に記録密度向上
の努力は継続的に行われており、最近では強磁性金属薄
膜を磁気記録層として実用化することが待望されるに至
っている[IEEE TRANS−ACTIONS ON MAGNETICS Vo
l.MAG−21,No.3,p.p.1217〜1220(1985)]。強磁性金
属薄膜は材料としての組合わせは多数考えられるが、現
実的な可能性が示されているものは少く、Co−Cr等の垂
直磁化膜[特公昭58−91号公報,特開昭61−120331号公
報]やCo−Ni,Co−Ni−O等の斜め蒸着膜や湿式めっき
膜[特公昭41−19389号公報,特開昭53−42010号公報]
等で、実用化の目的で最近ではもっぱら保護潤滑層の開
発が検討の中心となっている。現状ではポリエチレンテ
レフタレートフィルム等の高分子フィルム上に直接ある
いは微粒子などの下塗りを行った後、電子ビーム蒸着法
やスパッタリング法で強磁性金属薄膜を配し、その面に
直接溶剤に脂肪酸やパーフルオロポリエーテル等の潤滑
剤を溶かした溶液を塗布乾燥する法[特開昭57−179948
号公報,特開昭61−178718号公報]や、酸化膜を介して
潤滑済を配する[特開昭61−151830号公報]ことや、炭
素膜とフロロカーボン系の組み合わせ[特開昭61−1425
25号公報]等が提案され、磁気ディスクではまだ炭素膜
が厚いとはいうものの一部実用化され、炭素質について
も検討が進み硬度を高めることの有用性[米国特許4717
622号公報]も知られるに至っている。
2. Description of the Related Art Efforts to increase the recording density have been continuously made to reduce the size and improve the performance of recording / reproducing devices. Recently, it has been expected that a ferromagnetic metal thin film will be put to practical use as a magnetic recording layer. [IEEE TRANS-ACTIONS ON MAGNETICS Vo
l.MAG-21, No. 3, pp 1217-1220 (1985)]. Although many combinations of ferromagnetic metal thin films are conceivable as materials, few of them have shown a practical possibility, and a perpendicular magnetization film of Co-Cr or the like [Japanese Patent Publication No. 58-91, Japanese Unexamined Patent Publication No. 61-120331] and obliquely deposited films or wet-plated films of Co-Ni, Co-Ni-O, etc. [JP-B-41-19389, JP-A-53-42010]
For these reasons, the development of a protective lubricating layer has recently been mainly focused on for practical use. At present, a ferromagnetic metal thin film is placed directly on a polymer film such as a polyethylene terephthalate film or a polymer film by applying an undercoat such as fine particles, and then an electron beam evaporation method or a sputtering method is applied. A method in which a solution in which a lubricant such as ether is dissolved is applied and dried [JP-A-57-179948]
JP-A-61-178718], disposing of lubrication via an oxide film [JP-A-61-151830], and a combination of a carbon film and a fluorocarbon system [JP-A-61-178718]. 1425
No. 25 gazette] and the like, and although the carbon film is still thick in a magnetic disk, it is partially put to practical use, and studies have been made on carbonaceous materials, and the usefulness of increasing the hardness [US Pat.
No. 622] is also known.

発明が解決しようとする課題 しかしながら、粒子塗布面に形成した強磁性金属薄膜
でより高密度記録を進め、とりわけ狭トラック記録を行
うと、クロストーク量が増大し、単一オントラック状態
で得られるピュアな高C/Nが実機で得られないといった
課題があり、改善が望まれていた。
However, when high-density recording is advanced with a ferromagnetic metal thin film formed on a particle-coated surface, and especially when narrow-track recording is performed, the amount of crosstalk increases and a single on-track state can be obtained. There is a problem that a pure high C / N cannot be obtained with the actual machine, and improvement has been desired.

本発明は上記した事情に鑑みてなされたもので、耐久
性のある粒状性を示す磁気記録層での狭トラックC/Nを
改善した磁気記録媒体を提供するものである。
The present invention has been made in view of the above circumstances, and provides a magnetic recording medium with improved narrow track C / N in a magnetic recording layer exhibiting durable granularity.

課題を解決するための手段 上記した課題を解決するため本発明の磁気記録媒体
は、磁気記録層を構成する柱状微粒子の微粒子径が、平
滑部の粒子径に比して、粒状部の粒子系を1.5〜3倍の
範囲内であるよう構成したものである。
Means for Solving the Problems In order to solve the above-mentioned problems, the magnetic recording medium of the present invention is characterized in that the particle diameter of the columnar fine particles constituting the magnetic recording layer is smaller than the particle diameter of the smooth part, Is within the range of 1.5 to 3 times.

作用 本発明の磁気記録媒体は、上記した構成により、磁気
特性の微視的均一性が、実質的に確保でき、狭トラック
化されてもC/Nの改善がはかれるものである。
Effect The magnetic recording medium of the present invention can substantially secure the microscopic uniformity of the magnetic characteristics and improve the C / N even if the track is narrowed by the above-described configuration.

実施例 以下、図面を参照しながら本発明の一実施例について
説明する。第1図は本発明の要部拡大断面図である。図
で1はポリエチレンテレフタレート,ポリエチレン−2,
6−ナフタレート,ポリフェニレンサルファイド,ポリ
エーテルエーテルケトン,ポリエーテルサフォン,ポリ
イミド,アラミド等の高分子フィルムで、2はSiO2,TiO
2,Al2O3,Eu2O3,SnO2,Cr2O3,WO3等の微粒子で、3はポリ
エステル,ポリウレタン,ポリスルフォン等の固定樹脂
である。
Embodiment Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an enlarged sectional view of a main part of the present invention. In the figure, 1 is polyethylene terephthalate, polyethylene-2,
6-naphthalate, polyphenylene sulfide, polyether ether ketone, polyether safone, polyimide, aramid and other polymer films, 2 is SiO 2 , TiO 2
Fine particles such as 2 , Al 2 O 3 , Eu 2 O 3 , SnO 2 , Cr 2 O 3 , WO 3 and the like, and 3 is a fixing resin such as polyester, polyurethane, polysulfone and the like.

微粒子2は、80Å〜300Åの範囲で用いられ、密度は
5ヶ/μ〜100ヶ/μの範囲が好ましい。
The fine particles 2 are used in the range of 80 ° to 300 °, and the density is preferably in the range of 5 / μ 2 to 100 / μ 2 .

4,5は磁気記録層を構成する柱状微粒子で、4は、平
滑部に成長した柱状微粒子Aで、5は上記した微粒子2
の影響を受けて成長した柱状微粒子Bである。4と5に
は、粒径に於て好ましい範囲があり、4の粒径をd1、5
の粒径をd2とした時d1/d2が1.5から3の間が後述するよ
うに高密度記録性能面から要請されることである。ここ
で粒径の定義は高分解能走査型電子顕微鏡,高エネルギ
ー透過型電子顕微鏡等で柱状微粒子構造を固定した時
に、膜厚をt0とした時に表面より0.1t0の位置での直径
に相当するものとする。
4 and 5 are columnar fine particles constituting the magnetic recording layer, 4 is columnar fine particles A grown on a smooth portion, and 5 is the fine particles 2 described above.
Columnar fine particles B grown under the influence of the above. 4 and 5 have a preferable range in the particle diameter, and the particle diameter of 4 is d 1 , 5
When d 1 / d 2 is from 1.5 to 3, where d is the particle size of d 2 , this is required from the viewpoint of high density recording performance as described later. Here the definition of particle size high-resolution scanning electron microscope, corresponding to the diameter of when fixing the columnar fine particle structure with high energy transmission electron microscope or the like, at a position of 0.1 t 0 from the surface when the film thickness was set to t 0 It shall be.

こう定義した粒径は、30Åから200Åの範囲で、上記
した関係を満足することで本発明の効果を十分得ること
ができるものである。
By satisfying the above-mentioned relationship within the range of 30 ° to 200 ° in the particle diameter defined in this way, the effect of the present invention can be sufficiently obtained.

d2/d1の制御は、粒状部でのCo,Co−Ni,Co−Cr,Co−T
a,Co−Mo等の蒸着原子の易動度を、平滑部と同じか、そ
れに近づけることで行える。その為の方法として一例を
挙げれば、酸素トラップ効果の大きいAlを高分子フィル
ムに対して90゜〜70゜の高入射角範囲内で計算上の膜厚
を5〜20Å程度蒸着してから、酸素中でCo,Co−Ni等を3
000Å/sec以上、好ましくは5000Å/secで蒸着する方法
がある。加えて、高分子フィルムを支持するキャンを−
30℃〜−40℃に冷却することでも制御できる。
The control of d 2 / d 1 is based on Co, Co-Ni, Co-Cr, Co-T
a, It can be performed by making the mobility of the vapor-deposited atoms such as Co-Mo equal to or close to that of the smooth portion. As an example of a method therefor, Al having a large oxygen trapping effect is vapor-deposited on a polymer film with a calculated film thickness of about 5 to 20 ° within a high incident angle range of 90 ° to 70 °, Co, Co-Ni, etc. in oxygen
There is a method of vapor deposition at 000 ° / sec or more, preferably 5000 ° / sec. In addition, a can that supports the polymer film
It can also be controlled by cooling to 30 to -40C.

以上のべた構成要素に加えて、保護潤滑層は、プラズ
マ重合膜,酸化膜,炭素膜,脂肪族アルコール,パーフ
ルオロカルボン酸,パーフルオロポリエーテル等の組み
合わせの中で、スペーシング損失を考慮して、50Å〜20
0Åで優れた耐久信頼性の得られる構成を選べばよい。
バックコート層も必要であれば配することも当然行われ
ることである。
In addition to the above components, the protective lubricating layer is made of a combination of plasma polymerized film, oxide film, carbon film, aliphatic alcohol, perfluorocarboxylic acid, perfluoropolyether, etc. in consideration of spacing loss. 50 ~ 20
What is necessary is just to select the structure which can obtain excellent durability reliability at 0 °.
If necessary, a back coat layer is also provided.

以下、更に具体的に本発明の実施例について比較例と
の対比で説明する。
Hereinafter, more specific examples of the present invention will be described in comparison with comparative examples.

厚み10μmの平均粗さ20Å,最大粗さ40Åの特別に内
在粒子を持たない平滑なポリエチレンテレフタレートフ
ィルム上に、直径150Åの超遠心分離SiO2微粒子を20ヶ
/μ2,ポリエステル樹脂で固定し、その面を0.08(Tor
r)[初期排気3×10-5(Torr)]の酸素分圧で、15
(kHz)600(W)のグロー放電処理を2秒間行ってか
ら、Alを電子ビーム蒸着した。
On a smooth polyethylene terephthalate film with a thickness of 10 μm and an average roughness of 20 mm and a maximum roughness of 40 mm without any intrinsic particles, ultracentrifugal SiO 2 fine particles of 150 mm in diameter are fixed with 20 / μ 2 polyester resin, 0.08 (Tor
r) With an oxygen partial pressure of [initial exhaust 3 × 10 -5 (Torr)], 15
After performing glow discharge treatment at (kHz) 600 (W) for 2 seconds, Al was electron-beam evaporated.

その上に直径1mの円筒キャンに沿わせて、最小入射角
と、酸素導入量,キャン温度を夫々、10゜〜58゜,0.11
〜1.3(/min),−35℃〜+30℃の範囲で変化させ、C
o−Ni(Ni:20wt%)を0.17μm電子ビーム蒸着し、粒子
系を変化させ、磁気記録層を形成した。比較例の一部は
Al処理なしで常法によった。夫々の磁気記録層形成後、
その表面にパーフルオロポリエーテルリノレイルを約40
Å塗布し、反対面に0.4μmのポリエステルとCaCoO3,カ
ーボンの混合フィラー(1:1)を重量で同じ配合の塗布
液を塗布乾燥して得たバックコート層を配し、8ミリ幅
の磁気テープとした。
On top of that, along the cylindrical can with a diameter of 1 m, the minimum incident angle, the amount of introduced oxygen, and the can temperature were set to 10 ゜ to 58 ゜, 0.11 respectively.
~ 1.3 (/ min), change in the range of -35 ℃ ~ + 30 ℃, C
O-Ni (Ni: 20 wt%) was subjected to 0.17 μm electron beam evaporation to change the particle system to form a magnetic recording layer. Some of the comparative examples
The conventional method was used without Al treatment. After forming each magnetic recording layer,
Approximately 40 perfluoropolyether linoleyl on its surface
ÅApply, and on the other side, a back coat layer obtained by applying and drying a coating liquid of the same composition with a mixed filler (1: 1) of 0.4 μm polyester, CaCoO 3 , and carbon, and disposing an 8 mm wide Magnetic tape was used.

夫々を8ミリビデオを改造し、狭トラックC/Nを評価
し、あわせてスチル耐久性についての任意の10ヶ所で評
価した。磁気記録媒体の構成要件と、特性を第1表にま
とめて示した。
Each of them was modified from an 8mm video, and the narrow track C / N was evaluated. In addition, still durability was evaluated at any 10 points. Table 1 summarizes the constituent requirements and characteristics of the magnetic recording medium.

第1表よりわかるように、d2/d1が1.5以下では、スチ
ル耐久性の面で弱くなり、3.0以上では狭トラックC/Nで
特性が劣化するので、1.5から3の範囲で構成するのが
好ましいといえる。
As can be seen from Table 1, if d 2 / d 1 is 1.5 or less, the durability of the still becomes weak, and if d 2 / d 1 is 3.0 or more, the characteristics deteriorate in a narrow track C / N. It can be said that it is preferable.

次にCo−O垂直磁化膜の例について説明する。 Next, an example of a Co-O perpendicular magnetization film will be described.

厚み9μmのアラミドフィルム(平均粗さ25Å,最大
粗さ35Å)の表面にCo−Fe微粒子(微粒子径100Å,CoiF
e=45:55at%)を30ヶ/μ配した。固定樹脂はポリア
ミドで均一膜厚換算で、20Åとした。表面をAr0.09(To
rr)13.56(MHz),1(kW)でスパッタエッチングし
て、Co−Fe表面を露出させ、粒径制御範囲を広く行うよ
うにした。
9 μm thick aramid film (average roughness 25 mm, maximum roughness 35 mm) with Co-Fe fine particles (fine particle diameter 100 mm, CoiF
e = 45: 55at%) was placed a 30-month / μ 2. The fixing resin was polyamide and was 20 mm in uniform film thickness. Ar0.09 (To surface
rr) Sputter etching was performed at 13.56 (MHz) and 1 (kW) to expose the Co-Fe surface and widen the particle size control range.

直径50cmの円筒キャン(キャン温度−10℃〜+150
℃)に沿わせて、Coを入射角35度から12度の範囲で電子
ビーム蒸着し0.2μmのCo−O垂直磁化膜を形成した。
酸素ガスは入射角12度を限定するマスクの先端部のノズ
ルより導入し、入射角35度を限定するマスク部の先端の
ノズルよりHeガスを導入し、柱状粒子径を調整した。Co
−O膜状にパーフルオロポリエーテルステアリルアミド
を約50Å塗布し、0.4μmのバックコート層を配し、8
ミリ幅のテープに加工した。比較例は、直径120ÅのCr2
O3微粒子を25ヶ/μ塗布し、スパッタエッチングなし
で、Co−O膜を形成した以外は実施例と同じ条件で製作
したものを用いた。
50cm diameter cylindrical can (can temperature -10 ℃ ~ + 150
(° C.), Co was electron-beam evaporated at an incident angle of 35 ° to 12 ° to form a 0.2 μm Co—O perpendicular magnetization film.
Oxygen gas was introduced from the nozzle at the tip of the mask that limited the incident angle to 12 degrees, and He gas was introduced from the nozzle at the tip of the mask that limited the incident angle to 35 degrees, to adjust the columnar particle diameter. Co
-O film is coated with perfluoropolyether stearylamide at about 50 °, and a 0.4 μm back coat layer is provided.
Processed into a millimeter wide tape. The comparative example is a 120 mm diameter Cr 2
O 3 fine particles were applied at a rate of 25 / μ 2, and a film produced under the same conditions as in the example except that a Co—O film was formed without sputter etching was used.

夫々のテープをピット長0.17μm,トラックピッチ10μ
mと5μmでC/Nを相対比較した結果を第2表に示し
た。
Each tape is pit length 0.17μm, track pitch 10μ
Table 2 shows the results of the relative comparison of C / N between m and 5 μm.

既にのべた実施例の他にも、スパッタリング法で形成
したCo−Cr(Cr20wt%)垂直磁化膜,電子ビーム蒸着法
で形成したCo−O斜め蒸着膜の2層構成のもの等でも同
様の効果を確認した。
In addition to the above-described embodiments, the same effect can be obtained with a two-layer structure of a Co-Cr (Cr20 wt%) perpendicular magnetization film formed by a sputtering method and a Co-O obliquely deposited film formed by an electron beam evaporation method. It was confirmed.

発明の効果 以上のように本発明によれば、狭トラック化による高
密度記録に於いても良好なC/Nを得ることができ、耐久
性も実用域に保持できるといったすぐれた効果がある。
Advantageous Effects of the Invention As described above, according to the present invention, excellent C / N can be obtained even in high-density recording by narrowing the track, and durability is maintained in a practical range.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明の一実施例に係る磁気記録媒体の要部拡
大断面図である。 1……高分子フィルム、2……微粒子、4……柱状微粒
子A、5……柱状微粒子B。
FIG. 1 is an enlarged sectional view of a main part of a magnetic recording medium according to one embodiment of the present invention. 1 ... polymer film, 2 ... fine particles, 4 ... columnar fine particles A, 5 ... columnar fine particles B

───────────────────────────────────────────────────── フロントページの続き (72)発明者 舘野 裕昭 大阪府門真市大字門真1006番地 松下電 器産業株式会社内 (56)参考文献 特開 昭59−157833(JP,A) ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Hiroaki Tateno 1006 Kadoma, Kadoma, Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd. (56) References JP-A-59-157833 (JP, A)

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】磁気記録層を構成する柱状微粒子の微粒子
径が平滑部の粒子径に対して、粒状部の粒子径が1.5〜
3倍の範囲であることを特徴とする磁気記録媒体。
1. The method according to claim 1, wherein the particle diameter of the columnar fine particles constituting the magnetic recording layer is 1.5 to 1.5 times the particle diameter of the smooth part.
A magnetic recording medium having a range of three times.
JP27395590A 1990-10-11 1990-10-11 Magnetic recording media Expired - Lifetime JP2594380B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27395590A JP2594380B2 (en) 1990-10-11 1990-10-11 Magnetic recording media

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27395590A JP2594380B2 (en) 1990-10-11 1990-10-11 Magnetic recording media

Publications (2)

Publication Number Publication Date
JPH04147419A JPH04147419A (en) 1992-05-20
JP2594380B2 true JP2594380B2 (en) 1997-03-26

Family

ID=17534901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27395590A Expired - Lifetime JP2594380B2 (en) 1990-10-11 1990-10-11 Magnetic recording media

Country Status (1)

Country Link
JP (1) JP2594380B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06176360A (en) * 1992-12-03 1994-06-24 Fuji Photo Film Co Ltd Production of magnetic recording medium

Also Published As

Publication number Publication date
JPH04147419A (en) 1992-05-20

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