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JP2522286B2 - Ultrasonic motor drive circuit - Google Patents
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JP2522286B2 - Ultrasonic motor drive circuit - Google Patents

Ultrasonic motor drive circuit

Info

Publication number
JP2522286B2
JP2522286B2 JP62036176A JP3617687A JP2522286B2 JP 2522286 B2 JP2522286 B2 JP 2522286B2 JP 62036176 A JP62036176 A JP 62036176A JP 3617687 A JP3617687 A JP 3617687A JP 2522286 B2 JP2522286 B2 JP 2522286B2
Authority
JP
Japan
Prior art keywords
ultrasonic motor
phase
electrostrictive element
signal
difference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62036176A
Other languages
Japanese (ja)
Other versions
JPS63206170A (en
Inventor
一之 風見
英洋 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP62036176A priority Critical patent/JP2522286B2/en
Priority to US07/117,328 priority patent/US4812699A/en
Publication of JPS63206170A publication Critical patent/JPS63206170A/en
Application granted granted Critical
Publication of JP2522286B2 publication Critical patent/JP2522286B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • H02N2/142Small signal circuits; Means for controlling position or derived quantities, e.g. speed, torque, starting, stopping, reversing
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163Motors with ring stator

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Description

【発明の詳細な説明】 A.産業上の利用分野 本発明は、電歪素子により進行性振動波が形成される
弾性体と、この弾性体に所定の押圧力により押圧されこ
の進行性振動波により駆動される移動体とを有する超音
波モータの駆動回路に関する。
DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention relates to an elastic body in which a progressive vibration wave is formed by an electrostrictive element, and the progressive vibration wave when the elastic body is pressed by a predetermined pressing force. The present invention relates to a drive circuit of an ultrasonic motor having a moving body driven by.

B.従来の技術 この種の超音波モータは、電歪素子に周波信号(例え
ば交流信号)を供給して振動させ、これにより弾性体に
進行性振動波を形成せしめ移動体を駆動するものであ
る。この時、移動体は弾性体に所定の押圧力で触媒して
いるため、移動体の負荷が大きくなると両者が摺動接触
することになる。したがって、両者の摩耗を防止して寿
命を向上させるため、移動体の負荷が大きい場合には超
音波モータを停止させるのが好ましい。
B. Conventional Technology This type of ultrasonic motor drives a moving body by supplying a frequency signal (for example, an AC signal) to an electrostrictive element to cause it to vibrate, which causes the elastic body to form a progressive vibration wave. is there. At this time, since the moving body catalyzes the elastic body with a predetermined pressing force, when the load of the moving body becomes large, the two come into sliding contact with each other. Therefore, it is preferable to stop the ultrasonic motor when the load of the moving body is large in order to prevent wear of both and to improve the life.

C.発明が解決しようとする問題点 そこで、移動体側にロータリーエンコーダ等のセンサ
を設け移動体の動きから大きな負荷が作用していること
を検知して超音波モータを停止させることも考えられる
が、モータ構成部品とは別設のセンサが必要であり、構
成が複雑となり好ましくない。従来のDCモータのように
過電流を検出してモータ負荷を検出することもできな
い。
C. Problems to be Solved by the Invention Therefore, it is possible to stop the ultrasonic motor by providing a sensor such as a rotary encoder on the moving body side to detect that a large load is acting from the movement of the moving body. However, the sensor is required separately from the motor component, which is not preferable because the configuration is complicated. It is also not possible to detect the motor load by detecting overcurrent as in conventional DC motors.

本発明の目的は、センサ等を別設することなく超音波
モータの駆動状態を検出して保護動作を行うことができ
る超音波モータの駆動回路を提供することにある。
An object of the present invention is to provide an ultrasonic motor drive circuit capable of detecting the drive state of an ultrasonic motor and performing a protection operation without separately providing a sensor or the like.

D.問題点を解決するための手段 実施例を示す第1図および第2図(a),(b)によ
り本発明を説明する。本発明に係わる超音波モータ10
は、周波信号(例えば交流信号等)が印加される電歪素
子13により弾性体11に進行性振動波が形成され、その弾
性体11の進行性振動波により移動体12が駆動されるもの
である。第3図も参照するに、本発明では、周波信号の
電圧位相に相関する信号と電歪素子へ流入する電流位相
に相関する信号との差分を演算する差分演算手段AND
と、演算された差分を積分して、周波信号の電圧位相と
電歪素子へ流入する電流位相との位相差を検出する位相
差検出手段CODと、検出された位相差に基づいて、振動
波により駆動される移動体の負荷量が所定量以上か否か
を判定する判定手段28と、判定手段28の判定により超音
波モータの駆動状態に異常があると判定されると、超音
波モータを保護するための保護動作を行なう保護手段22
とを備え、積分値を周波信号の1サイクルごとにリセッ
トすることにより、上述の問題は解決される。
D. Means for Solving Problems The present invention will be described with reference to FIGS. 1 and 2 (a) and (b) showing an embodiment. Ultrasonic motor 10 according to the present invention
Is a progressive vibration wave is formed in the elastic body 11 by the electrostrictive element 13 to which a frequency signal (such as an AC signal) is applied, and the moving body 12 is driven by the progressive vibration wave of the elastic body 11. is there. Referring also to FIG. 3, in the present invention, a difference calculation means AND for calculating the difference between the signal correlated with the voltage phase of the frequency signal and the signal correlated with the current phase flowing into the electrostrictive element.
And a phase difference detection means COD that integrates the calculated difference to detect the phase difference between the voltage phase of the frequency signal and the current phase flowing into the electrostrictive element, and the vibration wave based on the detected phase difference. The determination means 28 for determining whether the load amount of the moving body driven by the predetermined amount or more, and when it is determined by the determination of the determination means 28 that the driving state of the ultrasonic motor is abnormal, the ultrasonic motor is turned on. Protective means 22 for performing protective operation for protection
And resetting the integrated value every cycle of the frequency signal solves the above-mentioned problem.

E.作用 駆動電圧と電流の位相の差分の積分値が負荷量に相関
する。積分値に基づいて、判定手段28で超音波モータの
負荷が所定量以上と判定されると保護手段28により超音
波モータが保護される。また、その積分値は1サイクル
ごとにリセットされる。
E. Action The integrated value of the phase difference between the drive voltage and current correlates with the load. When the determination means 28 determines that the load of the ultrasonic motor is not less than the predetermined amount based on the integrated value, the protection means 28 protects the ultrasonic motor. The integrated value is reset every cycle.

F.実施例 第1図ないし第4図により本発明の実施例を説明す
る。
F. Embodiment An embodiment of the present invention will be described with reference to FIGS.

第1図において、10は超音波モータであり、この実施
例では回転型の超音波モータを示している。この超音波
モータ10は、第2図(a),(b)に示すように、環状
の弾性体11に同形状の移動体12を不図示のばね部材によ
り所定の押圧力で押圧して構成されている。弾性体11の
裏面には電歪素子13が貼着され、その電歪素子13の表面
13aにはセグメント電極14a〜14dが形成されている。セ
グメント電極14bと14dの下の電歪素子13は交互に互い違
いに分極されている。
In FIG. 1, reference numeral 10 denotes an ultrasonic motor, and in this embodiment, a rotary ultrasonic motor is shown. As shown in FIGS. 2 (a) and 2 (b), the ultrasonic motor 10 is constructed by pressing a moving body 12 having the same shape against an annular elastic body 11 with a predetermined pressing force by a spring member (not shown). Have been. An electrostrictive element 13 is attached to the back surface of the elastic body 11, and the surface of the electrostrictive element 13 is
On 13a, segment electrodes 14a to 14d are formed. The electrostrictive elements 13 below the segment electrodes 14b and 14d are alternately polarized.

第1図において、交流電源21の出力はスイッチ22を介
して90度位相遅延回路23と、電流位相検出回路24と、位
相差検出回路25とに入力されている。90度位相遅延回路
23は、入力される交流信号の位相を90度遅延させて出力
し、その出力はアンプ26を介してセグメント電極14dに
供給される。電流位相検出回路24は、入力される交流信
号の電流位相を検出するもので、その出力は位相差検出
回路25に入力されるとともに、アンプ27を介してセグメ
ント電極14bにも入力される。位相差検出回路25は、電
歪素子13に印加される電圧の位相と該電圧の印加により
電歪素子13に流入する電流の位相との位相差を検出す
る。検出された位相差は判定回路28に入力され、所定値
以上の位相差と判定されると端子29に判定信号が出力さ
れる。端子29には、判定信号をラッチするラッチ回路30
が後続し、そのラッチ出力によりスイッチ22が開閉され
る。すなわち、両位相の差が所定以上のときにスイッチ
22が開放される。なお、本発明にラッチ回路30は必須で
はない。
In FIG. 1, the output of the AC power supply 21 is input to a 90-degree phase delay circuit 23, a current phase detection circuit 24, and a phase difference detection circuit 25 via a switch 22. 90 degree phase delay circuit
23 delays the phase of the input AC signal by 90 degrees and outputs the delayed AC signal. The output is supplied to the segment electrode 14d via the amplifier 26. The current phase detection circuit 24 detects the current phase of the input AC signal, and its output is input to the phase difference detection circuit 25 and also to the segment electrode 14b via the amplifier 27. The phase difference detection circuit 25 detects the phase difference between the phase of the voltage applied to the electrostrictive element 13 and the phase of the current flowing into the electrostrictive element 13 due to the application of the voltage. The detected phase difference is input to the determination circuit 28, and when it is determined that the phase difference is equal to or greater than a predetermined value, a determination signal is output to a terminal 29. The terminal 29 has a latch circuit 30 for latching the judgment signal.
, And the latch output opens and closes the switch 22. That is, when the difference between the two phases is more than a predetermined value, the switch
22 is open. The latch circuit 30 is not essential to the present invention.

スイッチ22が閉成しているとき、交流電源21からアン
プ26,27を介して電歪素子13のセグメント電極14b,14dに
90度位相のずれた交流信号が供給される。このため、弾
性体11の表面には進行性振動波が生じ、移動体12を回転
駆動せしめる。スイッチ22が開放すると、電歪素子13へ
の給電が停止されるので電歪素子13が振動せず移動体12
が停止する。
When the switch 22 is closed, the AC power supply 21 is connected to the segment electrodes 14b and 14d of the electrostrictive element 13 via the amplifiers 26 and 27.
AC signals 90 degrees out of phase are supplied. Therefore, a progressive vibration wave is generated on the surface of the elastic body 11, and the moving body 12 is rotationally driven. When the switch 22 is opened, the power supply to the electrostrictive element 13 is stopped, so that the electrostrictive element 13 does not vibrate and the moving body 12
Stops.

位相差検出回路25と判定回路28の詳細を第3図に示
す。第3図において、位相差検出回路25は2つの入力端
子IN1およびIN2を有し、入力端子IN1には電圧位相が、
入力端子IN2には電流位相がそれぞれ入力される。入力
端子IN1はアンドゲートANDとインバータINV1とに接続さ
れ、入力端子IN2はインバータINV2に接続されている。
アンド出力は抵抗REを介してコンパレータCOMの非反転
入力端子に接続される一方、コンデンサCONおよびトラ
ンジスタTRを介して接地されている。抵抗REとコンデン
サCONにより積分回路が構成される。インバータINV1の
出力はトランジスタTRのベースに入力されている。また
コンパレータCOMの反転入力端子は電源BAに接続されVba
で示される基準電圧が印加されている。
FIG. 3 shows details of the phase difference detection circuit 25 and the determination circuit 28. In FIG. 3, the phase difference detection circuit 25 has two input terminals IN1 and IN2, and a voltage phase is applied to the input terminal IN1.
The current phase is input to the input terminal IN2. The input terminal IN1 is connected to the AND gate AND and the inverter INV1, and the input terminal IN2 is connected to the inverter INV2.
The AND output is connected to the non-inverting input terminal of the comparator COM via the resistor RE, and is grounded via the capacitor CON and the transistor TR. An integrating circuit is constituted by the resistor RE and the capacitor CON. The output of the inverter INV1 is input to the base of the transistor TR. The inverting input terminal of the comparator COM is connected to the power supply BA and Vba
The reference voltage indicated by is applied.

第4図を参照して位相差検出回路25及び判定回路28の
動作を説明する。なお、電歪素子13のセグメント電極14
b,14dには90度位相のずれた交流信号が供給され、弾性
体11に進行性振動波が形成されて移動体12が回転駆動さ
れているものとする。
The operation of the phase difference detection circuit 25 and the determination circuit 28 will be described with reference to FIG. Incidentally, the segment electrode 14 of the electrostrictive element 13
It is assumed that AC signals having a phase difference of 90 degrees are supplied to b and 14d, a progressive vibration wave is formed in the elastic body 11, and the moving body 12 is rotationally driven.

入力端子IN1には電圧位相Aが、入力端子IN2には電流
位相Bがそれぞれ入力される。両位相の差は超音波モー
タ10の負荷に相応して大きくなる。移動体12に負荷が作
用して両位相にずれが生じると、電圧位相Aが立ち上が
って電流位相Bが立ち下がっている間だけアンド出力C
が立ち上がる。このときそのアンド出力Cによりコンデ
ンサCONが充電される。そして、電圧位相Aが立ち下が
るとNIV1からハイレベル出力が得られ、トランジスタTR
がオンするからコンデンサCONが放電される。したがっ
て、コンパレータCOMの非反転入力端子の入力電圧Dは
第4図に示すようになる。いま、コンパレータCOMの反
転入力端子の基準電圧がVbaに設定されているので、非
反転入力端子の入力電圧DがVbaを越えるとコンパレー
タCOMの出力Eがハイレベルとなり、その出力Eが端子2
9から取り出されラッチ回路30でラッチされる。ラッチ
回路30はハイレベルなラッチ信号を出力するから、スイ
ッチ22が開放される。この結果、電歪素子13への給電が
中止され超音波モータ10が停止される。移動体12の負荷
を解放して不図示のリセットスイッチによりラッチ回路
30をリセットすればスイッチ22が閉じ、再び超音波モー
タ10に給電され超音波モータ10が起動される。
The voltage phase A is input to the input terminal IN1, and the current phase B is input to the input terminal IN2. The difference between the two phases increases in accordance with the load on the ultrasonic motor 10. When a load is applied to the moving body 12 and the two phases are shifted from each other, the AND output C is generated only while the voltage phase A rises and the current phase B falls.
Stands up. At this time, the capacitor CON is charged by the AND output C. Then, when the voltage phase A falls, a high level output is obtained from NIV1 and the transistor TR
Is turned on, the capacitor CON is discharged. Therefore, the input voltage D at the non-inverting input terminal of the comparator COM is as shown in FIG. Since the reference voltage of the inverting input terminal of the comparator COM is now set to Vba, when the input voltage D of the non-inverting input terminal exceeds Vba, the output E of the comparator COM goes high and the output E of the terminal 2
It is taken out from 9 and latched by the latch circuit 30. Since the latch circuit 30 outputs a high level latch signal, the switch 22 is opened. As a result, the power supply to the electrostrictive element 13 is stopped and the ultrasonic motor 10 is stopped. The load of the moving body 12 is released and the latch circuit is opened by a reset switch (not shown)
If the switch 30 is reset, the switch 22 is closed, the ultrasonic motor 10 is supplied with power again, and the ultrasonic motor 10 is started.

なお、以上の説明では、交流信号により電歪素子を駆
動することとしたが、パルス信号等、周期的に電圧が変
動する周波信号ならばどのような信号で電歪素子を駆動
してもよい。また、コンパレータがハイレベル信号を出
力すると超音波モータへの給電を停止したが、警報灯や
警告音により移動体の負荷が大きくなったことを報知せ
しめても良い。更に、基準電圧Vbaのコンパレータを1
つだけ用いたが、基準電圧がそれぞれ異なるコンパレー
タを複数個設けて、移動体を負荷の大きさを、どのコン
パレータから出力があったかにより判定することもでき
る。さらにまた、回転型超音波モータ以外、リニア型超
音波モータにもこの発明を適用できる。
In the above description, the electrostrictive element is driven by the AC signal, but the electrostrictive element may be driven by any signal as long as it is a frequency signal such as a pulse signal in which the voltage periodically changes. . Further, although the power supply to the ultrasonic motor is stopped when the comparator outputs the high level signal, an alarm lamp or a warning sound may be used to notify that the load on the moving body has increased. Furthermore, set the comparator of the reference voltage Vba to 1
Although only one comparator is used, a plurality of comparators having different reference voltages may be provided to determine the magnitude of the load on the moving body based on which comparator outputs the load. Furthermore, the present invention can be applied to linear ultrasonic motors as well as rotary ultrasonic motors.

G.発明の効果 本発明によれば、電歪素子へ供給する周波信号の駆動
電圧と電流の位相の差分を積分し、その積分値に基づい
て超音波モータの負荷を判定するようにしたので、別設
のセンサを用いることなく、簡素な構成で超音波モータ
を保護できる上、積分値を1サイクルごとにリセットす
ることにより負荷検出レスポンスが向上する。また、実
施例のように、負荷が所定以上になると超音波モータへ
の給電を停止して超音波モータを停止させることによ
り、大負荷時に移動体と弾性体との間の不所望な摩擦を
防止して長寿命の超音波モータが得られる。
G. Effect of the Invention According to the present invention, the difference between the drive voltage and the phase of the current of the frequency signal supplied to the electrostrictive element is integrated, and the load of the ultrasonic motor is determined based on the integrated value. The ultrasonic motor can be protected with a simple structure without using a separate sensor, and the load detection response is improved by resetting the integral value every cycle. Further, as in the embodiment, when the load exceeds a predetermined value, the power supply to the ultrasonic motor is stopped and the ultrasonic motor is stopped, so that undesired friction between the moving body and the elastic body at the time of heavy load is eliminated. It is possible to obtain an ultrasonic motor with a long life.

【図面の簡単な説明】[Brief description of drawings]

第1図〜第4図は本発明の一実施例を説明する図であ
り、第1図は全体構成を示すブロック図、第2図(a)
は超音波モータの平面図、第2図(b)はそのb−b断
面図、第3図は位相差検出回路および判定回路の詳細
図、第4図は各部の信号のタイムチャートである。 10:超音波モータ、11:弾性体 12:移動体、13:電歪素子 21:交流電源、22:スイッチ 23:90度位相遅延回路 24:電流位相検出回路 25:位相差検出回路、28:判定回路 30:ラッチ回路
1 to 4 are diagrams for explaining one embodiment of the present invention, and FIG. 1 is a block diagram showing the overall configuration, and FIG. 2 (a).
2 is a plan view of the ultrasonic motor, FIG. 2 (b) is a bb cross-sectional view thereof, FIG. 3 is a detailed view of a phase difference detection circuit and a judgment circuit, and FIG. 4 is a time chart of signals of each section. 10: Ultrasonic motor, 11: Elastic body 12: Moving body, 13: Electrostrictive element 21: AC power supply, 22: Switch 23: 90 degree phase delay circuit 24: Current phase detection circuit 25: Phase difference detection circuit, 28: Judgment circuit 30: Latch circuit

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】位相差を有する2相の周波信号が印加され
る電歪素子により弾性体に振動波を形成し、その振動波
により移動体を駆動する超音波モータの駆動回路におい
て、 前記周波信号の電圧位相に相関する信号と前記電歪素子
へ流入する電流位相に相関する信号との差分を演算する
差分演算手段と、 前記演算された差分を積分して、前記周波信号の電圧位
相と前記電歪素子へ流入する電流位相との位相差を検出
する位相差検出手段と、 前記検出された位相差に基づいて超音波モータの負荷量
が所定量以上か否かを判定する判定手段と、 前記判定手段の判定により前記超音波モータの駆動状態
に異常があると判定されると、前記超音波モータを保護
するための保護動作を行なう保護手段とを備え、 前記積分値を前記周波信号の1サイクルごとにリセット
することを特徴とする超音波モータの駆動回路。
1. A drive circuit of an ultrasonic motor for forming a vibration wave in an elastic body by an electrostrictive element to which a two-phase frequency signal having a phase difference is applied, and driving the moving body by the vibration wave. Difference calculating means for calculating the difference between the signal correlated with the voltage phase of the signal and the signal correlated with the current phase flowing into the electrostrictive element, integrating the calculated difference, and the voltage phase of the frequency signal Phase difference detection means for detecting a phase difference with the current phase flowing into the electrostrictive element, and determination means for determining whether or not the load amount of the ultrasonic motor is a predetermined amount or more based on the detected phase difference. When the drive unit of the ultrasonic motor is determined to be abnormal by the determination of the determination unit, a protection unit that performs a protection operation to protect the ultrasonic motor is provided, and the integrated value is the frequency signal. 1 cycle of Driving circuit of the ultrasonic motor, characterized in that the reset and.
JP62036176A 1986-11-11 1987-02-19 Ultrasonic motor drive circuit Expired - Lifetime JP2522286B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP62036176A JP2522286B2 (en) 1987-02-19 1987-02-19 Ultrasonic motor drive circuit
US07/117,328 US4812699A (en) 1986-11-11 1987-11-06 Drive control device in an ultrasonic vibration motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62036176A JP2522286B2 (en) 1987-02-19 1987-02-19 Ultrasonic motor drive circuit

Publications (2)

Publication Number Publication Date
JPS63206170A JPS63206170A (en) 1988-08-25
JP2522286B2 true JP2522286B2 (en) 1996-08-07

Family

ID=12462431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62036176A Expired - Lifetime JP2522286B2 (en) 1986-11-11 1987-02-19 Ultrasonic motor drive circuit

Country Status (1)

Country Link
JP (1) JP2522286B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2727633B2 (en) * 1989-03-22 1998-03-11 日産自動車株式会社 Electric sliding sun visor device
JP2538088B2 (en) * 1990-01-23 1996-09-25 松下電器産業株式会社 Driving method for ultrasonic motor
JP2018186680A (en) * 2017-04-27 2018-11-22 セイコーエプソン株式会社 Method for controlling vibration actuator, method for detecting abnormality of vibration actuator, control apparatus for vibration actuator, robot, electronic component conveying apparatus, printer, projector, and vibration device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61191394A (en) * 1985-02-20 1986-08-26 株式会社東芝 Water stream control apparatus of washing machine
JPH0815398B2 (en) * 1985-06-26 1996-02-14 松下電器産業株式会社 Ultrasonic motor drive

Also Published As

Publication number Publication date
JPS63206170A (en) 1988-08-25

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