JP2563541B2 - Corrosion resistant material for turbo molecular pump - Google Patents
Corrosion resistant material for turbo molecular pumpInfo
- Publication number
- JP2563541B2 JP2563541B2 JP31303088A JP31303088A JP2563541B2 JP 2563541 B2 JP2563541 B2 JP 2563541B2 JP 31303088 A JP31303088 A JP 31303088A JP 31303088 A JP31303088 A JP 31303088A JP 2563541 B2 JP2563541 B2 JP 2563541B2
- Authority
- JP
- Japan
- Prior art keywords
- corrosion
- turbo molecular
- resistant material
- molecular pump
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000007797 corrosion Effects 0.000 title claims description 52
- 238000005260 corrosion Methods 0.000 title claims description 52
- 239000000463 material Substances 0.000 title claims description 34
- 238000007789 sealing Methods 0.000 claims description 23
- 229910000838 Al alloy Inorganic materials 0.000 claims description 21
- 239000003822 epoxy resin Substances 0.000 claims description 14
- 229920000647 polyepoxide Polymers 0.000 claims description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 9
- 229920005989 resin Polymers 0.000 claims description 8
- 239000011347 resin Substances 0.000 claims description 8
- MQRWBMAEBQOWAF-UHFFFAOYSA-N acetic acid;nickel Chemical compound [Ni].CC(O)=O.CC(O)=O MQRWBMAEBQOWAF-UHFFFAOYSA-N 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims description 5
- 229940078494 nickel acetate Drugs 0.000 claims description 5
- 238000009835 boiling Methods 0.000 claims description 4
- 238000000576 coating method Methods 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 7
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 6
- 238000007743 anodising Methods 0.000 description 6
- 238000005406 washing Methods 0.000 description 6
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 239000003513 alkali Substances 0.000 description 2
- 238000005238 degreasing Methods 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009661 fatigue test Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000004677 hydrates Chemical class 0.000 description 1
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001256 stainless steel alloy Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
Landscapes
- Structures Of Non-Positive Displacement Pumps (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Laminated Bodies (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、例えば半導体製造設備の排気ラインなどに
適用されるターボ分子ポンプ用耐食材料に関する。TECHNICAL FIELD The present invention relates to a corrosion resistant material for a turbo molecular pump applied to, for example, an exhaust line of a semiconductor manufacturing facility.
従来、例えば半導体製造設備の排気ラインなどにター
ボ分子ポンプが設置されているが、このターボ分子ポン
プはウエハパターン形成のエツチング工程で排出される
塩素ガスなど腐食性ガスの環境中で運転されるためター
ボ分子ポンプの設計に際しては動翼や静翼などの部材の
耐食性が重視されている。このため、翼材として軽量、
低コスト、強度などの面から通常アルミニウム合金が用
いられている。ただし、アルミニウム合金は塩素ガスな
どの環境中では著しく腐食するためにアルミニウム合金
の表面に陽極酸化処理により酸化被膜を生成させたり、
或いはNiメッキ処理によりメツキ被膜を生成させるなど
して耐食性の向上を計つている。Conventionally, for example, a turbo molecular pump is installed in an exhaust line of a semiconductor manufacturing facility, but since this turbo molecular pump is operated in an environment of corrosive gas such as chlorine gas exhausted in the etching process of wafer pattern formation. When designing a turbo molecular pump, importance is attached to the corrosion resistance of members such as moving blades and stationary blades. Therefore, it is lightweight as a wing material,
Aluminum alloys are usually used in terms of low cost and strength. However, since aluminum alloy is significantly corroded in an environment such as chlorine gas, an oxide film may be formed on the surface of the aluminum alloy by anodizing treatment,
Alternatively, the corrosion resistance is improved by forming a plating film by Ni plating treatment.
一般に、耐食性の向上を計るのみであればアルミニウ
ム合金よりも耐食性に優れる、例えばステンレス鋼或い
はチタン合金などの耐食材料を使用すれば良い。しかし
ながら、上記のような従来のターボ分子ポンプは軽量
化、比強度の向上、低コスト化などの要求が強く、これ
らを満足させるためにはアルミニウム合金以外に無い。
また、陽極酸化処理による酸化被膜は一般的に多孔質で
あり、空孔が無数にあるために封孔処理が行われている
が、この封孔処理によつて完全に空孔を皆無にすること
は不可能である。また、Niメツキ処理はピンホールなど
の欠陥が必ず発生するためにこの欠陥部から選択的に腐
食が進行し、局部的に著しい腐食を生ずるなどの不具合
を抱えている。Generally, if only the corrosion resistance is to be improved, a corrosion resistant material having a higher corrosion resistance than an aluminum alloy, such as stainless steel or titanium alloy, may be used. However, the above-mentioned conventional turbo molecular pumps are strongly required to be lightweight, have an improved specific strength, and have a low cost, and there is no other than aluminum alloy to satisfy these requirements.
The oxide film formed by anodizing treatment is generally porous and has a large number of pores, and therefore has been sealed. However, this sealing completely eliminates pores. Is impossible. Further, the Ni plating treatment has a defect that defects such as pinholes always occur, so that corrosion selectively progresses from this defective portion, causing significant local corrosion.
本発明に係るターボ分子ポンプ用耐食材料は上記の課
題を解決することを目的にしており、アルミニウム金属
またはアルミニウム合金の表面に酸化被膜と、該酸化被
膜を酢酸ニツケル浴により処理して得られた水和物およ
び水酸化物による封孔処理層と、該封孔処理層上に形成
されたエポキシ樹脂層とを有することを特徴としてい
る。A corrosion resistant material for a turbo molecular pump according to the present invention is intended to solve the above problems, and is obtained by treating an oxide film on the surface of aluminum metal or aluminum alloy, and treating the oxide film with a nickel acetate bath. It is characterized by having a sealing treatment layer made of a hydrate and a hydroxide and an epoxy resin layer formed on the sealing treatment layer.
また、本発明に係るターボ分子ポンプ用耐食材料はア
ルミニウム金属またはアルミニウム合金の表面に酸化被
膜と、該酸化被膜を温水中で沸騰処理して得られた水和
物による封孔処理層と、該封孔処理層上に形成された中
間結合用樹脂層と、該中間結合用樹脂層上に形成された
エポキシ樹脂層とを有することを特徴としている。Further, the corrosion-resistant material for a turbo molecular pump according to the present invention, an oxide film on the surface of aluminum metal or aluminum alloy, a sealing treatment layer by a hydrate obtained by boiling the oxide film in warm water, It is characterized by having a resin layer for intermediate bonding formed on the sealing treatment layer and an epoxy resin layer formed on the resin layer for intermediate bonding.
即ち、本発明に係るターボ分子ポンプ用耐食材料はア
ルミニウム金属またはアルミニウム合金の表面の第１層
に酸化被膜が形成されている。そして、その封孔のため
に水和物Al2O3・xH2Oが第２層として形成されている。
さらに、この水和物が形成される際に水酸化物Ni（OH）
2,Al（OH）３が同時に形成され、第３層としてエポキシ
樹脂が形成されている。一般に、酸化被膜は多孔質であ
り、そのままでは十分な耐食性を得ることが難しいので
封孔処理によりできる限り空孔を封じ込め耐食性の向上
を計つている。封孔処理としては沸騰封孔処理が一般的
であるが、本発明に於いては酢酸ニツケル浴により封孔
処理を施している。沸騰封孔処理では水和物Al2O3・xH2
Oにより空孔を封じ込むのに対し、酢酸ニツケル浴では
水和物と水酸化物Ni（OH）2,Al（OH）３とにより空孔を
封じ込むことによつて耐食性の向上を計り、さらに第３
層にエポキシ樹脂を形成させて耐食性を向上させてい
る。このように、複数の被膜を重ね合わせることにより
従来よりも優れた耐食性を有するターボ分子ポンプ用耐
食材料が得られる。That is, in the corrosion resistant material for turbo molecular pump according to the present invention, an oxide film is formed on the first layer on the surface of aluminum metal or aluminum alloy. The hydrate Al 2 O 3 .xH 2 O is formed as a second layer due to the sealing.
In addition, the hydroxide Ni (OH) formed during the formation of this hydrate.
2 and Al (OH) 3 are simultaneously formed, and an epoxy resin is formed as the third layer. Generally, since the oxide film is porous and it is difficult to obtain sufficient corrosion resistance as it is, the pores are sealed as much as possible to improve the corrosion resistance. A boiling sealing treatment is generally used as the sealing treatment, but in the present invention, the sealing treatment is carried out with a nickel acetate bath. Hydrate Al 2 O 3 · xH 2 in boiling sealing treatment
While the holes are sealed with O, in the nickel acetate bath, the corrosion resistance is improved by sealing the holes with hydrates and hydroxides Ni (OH) 2 and Al (OH) 3 . Furthermore the third
Epoxy resin is formed on the layer to improve corrosion resistance. Thus, by superposing a plurality of coatings, a corrosion-resistant material for a turbo molecular pump having a corrosion resistance superior to conventional ones can be obtained.
また、本発明に係る他のターボ分子ポンプ用耐食材料
はアルミニウム金属またはアルミニウム合金の表面の第
１層に酸化被膜が形成され、その封孔のために水和物Al
2O3・xH2Oが第２層として形成されているが、第３層に
中間結合用樹脂層が形成されている。この中間結合用樹
脂層は第１層の酸化被膜の表面に生成しているOH基およ
び中間結合用樹脂層の上に形成されるエポキシ樹脂のエ
ポキシ基と化学的に結びついており、このような被膜構
造を有することによつて単に機械的に形成されている被
膜に比べて基材との密着力が弱い。このため、繰返し応
力が作用しても被膜が破壊され難く、耐食性とともに疲
労強度が改善されたターボ分子ポンプ用耐食材料が得ら
れる。In addition, another corrosion-resistant material for turbo molecular pumps according to the present invention has an oxide film formed on the first layer of the surface of aluminum metal or aluminum alloy, and the hydrated Al is formed due to the sealing of the oxide film.
2 O 3 · xH 2 O is formed as the second layer, but an intermediate bonding resin layer is formed on the third layer. The intermediate bonding resin layer is chemically bonded to the OH group formed on the surface of the oxide film of the first layer and the epoxy group of the epoxy resin formed on the intermediate bonding resin layer. Due to the coating structure, the adhesion to the substrate is weaker than that of a coating formed mechanically. For this reason, the coating is not easily destroyed even when subjected to repeated stress, and a corrosion resistant material for a turbo molecular pump having improved corrosion resistance and fatigue strength can be obtained.
第１図は本発明の一実施例に係るターボ分子ポンプ用
耐食材料の断面図、第２図はその作用説明図、第３図は
そのターボ分子ポンプの断面図である。図に於いて、本
実施例に係るターボ分子ポンプ用耐食材料は第１図に示
すように脱脂、アルカリ洗浄、水洗、中和、水洗の順に
行われる工程で前処理されたJIS 2014に基づくアルミ
ニウム合金を一定の濃度、温度に保持された硫酸水溶液
中に浸漬する。そして、アルミニウム合金に所定の時間
通電し、電解によりアルミニウム合金の表面にAl2O3か
ら成る酸化被膜（商品名はアルマイト被膜）を形成させ
る。なお、この場合の通電時間は被膜の厚さによつて異
なる。このように酸化被膜を形成させた後水洗を行い、
温度80℃以上、pH5.0〜6.0に保持された酢酸ニツケル中
に10分間以上浸漬し、空孔の部分にAl2O3・xH2Oからな
る水和物とNi（OH）２およびAl（OH）３からなる水酸化
物を生成させて封孔し、封孔処理層を形成させる。この
ように陽極酸化処理ならびに封孔処理によりアルミニウ
ム合金の表面に形成される酸化被膜と水和物および水酸
化物による封孔処理層との上にエポキシ樹脂を浸漬処理
により付着させる。次いで、これを引き上げ回転させて
不要のエポキシ樹脂を除去して均一な膜厚のエポキシ樹
脂層を形成させる。エポキシ樹脂層を形成させた後、密
着力を向上させるために温度50〜100℃の範囲で乾燥処
理を行う。なお、この乾燥処理の温度が100℃を越える
とエポキシ樹脂表面に割れが生じやすくなる。FIG. 1 is a sectional view of a corrosion resistant material for a turbo molecular pump according to an embodiment of the present invention, FIG. 2 is an explanatory view of its action, and FIG. 3 is a sectional view of the turbo molecular pump. In the figure, as shown in FIG. 1, the corrosion-resistant material for turbo molecular pump according to the present embodiment is an aluminum based on JIS 2014 which has been pretreated in the order of degreasing, alkali washing, water washing, neutralization and water washing. The alloy is immersed in an aqueous sulfuric acid solution maintained at a constant concentration and temperature. Then, the aluminum alloy is energized for a predetermined time to form an oxide film (trade name is alumite film) made of Al 2 O 3 on the surface of the aluminum alloy by electrolysis. The energization time in this case varies depending on the thickness of the coating. After forming the oxide film in this way, washing with water,
A hydrate consisting of Al 2 O 3 · xH 2 O, Ni (OH) 2 and Al was immersed in the nickel acetate kept at a temperature of 80 ° C or higher and pH 5.0 to 6.0 for 10 minutes or longer. Hydroxide consisting of (OH) 3 is generated and sealed to form a sealing treatment layer. In this way, the epoxy resin is attached by dipping treatment on the oxide film formed on the surface of the aluminum alloy by the anodizing treatment and the sealing treatment and the sealing treatment layer made of hydrate and hydroxide. Then, this is pulled up and rotated to remove unnecessary epoxy resin to form an epoxy resin layer having a uniform film thickness. After forming the epoxy resin layer, a drying process is performed at a temperature of 50 to 100 ° C. to improve the adhesion. If the temperature of this drying treatment exceeds 100 ° C, cracks are likely to occur on the epoxy resin surface.
このような処理方法によつて得られたターボ分子ポン
プ用耐食材料について、塩素ガスに温度80℃、相対湿度
70％になるように水分を含ませた湿りガス中で従来の耐
食材料との耐食性の比較試験を行つた。第２図は腐食試
験前後の試験片の重量減量から計算により求めた腐食速
度と試験日数との関係を表わすグラフで、図に示すよう
にアルミニウム合金は従来の陽極酸化処理による耐食コ
ーテイング材料、Niメツキ処理による耐食コーテイング
材料および本実施例に係る耐食材料に比べ著しく耐食性
が劣る。さらに、従来の陽極酸化処理による耐食コーテ
イング材料およびNiメツキ処理による耐食コーテイング
材料とも本実施例に係る耐食材料に比べるとピンホール
などの欠陥の影響により耐食性が劣つており、本実施例
に係る耐食材料が耐食性に最も優れている。なお、本実
施例に於いてはアルミニウム合金について記載したが、
アルミニウム金属に適用しても同様の作用効果が得られ
る。Regarding the corrosion-resistant material for turbo molecular pumps obtained by such a treatment method, chlorine gas was used at a temperature of 80 ° C and a relative humidity.
A comparative test of corrosion resistance with conventional corrosion resistant materials was conducted in a moist gas containing 70% water. Fig. 2 is a graph showing the relationship between the corrosion rate calculated by weight loss of the test piece before and after the corrosion test and the number of test days. As shown in the figure, the aluminum alloy is a conventional corrosion resistant coating material by anodizing treatment, Ni The corrosion resistance is remarkably inferior to the corrosion resistant coating material obtained by the plating treatment and the corrosion resistant material according to the present embodiment. Furthermore, both the corrosion-resistant coating material by the conventional anodizing treatment and the corrosion-resistant coating material by the Ni plating treatment are inferior in corrosion resistance due to the influence of defects such as pinholes as compared with the corrosion-resistant material according to this example, and the corrosion The material has the best corrosion resistance. Although the aluminum alloy is described in this example,
Similar effects can be obtained even when applied to aluminum metal.
第３図は動翼および静翼に本ターボ分子ポンプ用耐食
材料が適用されたターボ分子ポンプの断面図である。図
に於いて、このターボ分子ポンプはケーシング１の上部
に吸気口２、ケーシング１の下部に排気口３が設けられ
ており、ロータ６に装着した複数の動翼５をケーシング
１に設けられた複数の静翼４間の溝状の空間内で高速回
転させることにより、排気作用を得て吸気口２側を高真
空にしている。ロータ６をこのように高速回転させるた
め、ロータ６の上部軸受はロータ６の中心軸７に装着し
た永久磁石8aとロータ６の中心軸７の周囲に中心軸７と
間隔をおいてケーシング１の下部から上方に向つて伸び
る支持台10に装着した永久磁石8bとを磁気的に反撥させ
て或る間隙を設けて対向させた磁気軸受８であり、下部
軸受はロータ６の中心軸７の軸方向および軸直角方向に
負荷能力を有する、例えばスパイラルグループベアリン
グのようなすべり軸受９で構成されている。11はモータ
である。FIG. 3 is a sectional view of a turbo molecular pump in which the present corrosion resistant material for turbo molecular pumps is applied to the moving blades and the stationary blades. In this figure, this turbo molecular pump has an inlet 2 at the top of a casing 1, an exhaust 3 at the bottom of the casing 1, and a plurality of rotor blades 5 mounted on a rotor 6 provided in the casing 1. By rotating at high speed in the groove-shaped space between the plurality of stationary blades 4, the exhaust action is obtained and the suction port 2 side is made into a high vacuum. In order to rotate the rotor 6 at such a high speed, the upper bearing of the rotor 6 has a permanent magnet 8a mounted on the central shaft 7 of the rotor 6 and the central shaft 7 around the central shaft 7 of the rotor 6 and is spaced apart from the central shaft 7 of the casing 1. The magnetic bearing 8 is a magnetic bearing 8 that is magnetically repelled to face a permanent magnet 8b mounted on a support base 10 extending upward from the lower portion with a certain gap. The lower bearing is the shaft of the central shaft 7 of the rotor 6. It is made up of a plain bearing 9 such as a spiral group bearing, which has a load capacity in both the direction and the direction perpendicular to the axis. 11 is a motor.
第４図は本発明の他の実施例に係るターボ分子ポンプ
用耐食材料の縦断説明図、第５図はその作用説明図であ
る。図に於いて、本実施例に係るターボ分子ポンプ用耐
食材料は第４図に示すように脱脂、アルカリ洗浄、水
洗、中和、水洗の順に行われる工程で前処理されたJIS
2014に基づくアルミニウム合金を一定の濃度、温度に保
持された硫酸水溶液中に浸漬する。そして、アルミニウ
ム合金に所定の時間通電し、電解によりアルミニウム合
金の表面にAl2O3からなる酸化被膜（商品名はアルマイ
ト被膜）を形成させる。なお、この場合の通電時間は被
膜の厚さによつて異なる。このように酸化被膜を形成さ
せた後水洗を行い、一定の温度と水素イオン濃度に保持
された温水中に所定の時間浸漬し、沸騰処理により空孔
の部分にAl2O3・xH2Oからなる水和物を生成させて封孔
し、封孔処理層を形成させる。このように陽極酸化処理
ならびに封孔処理によりアルミニウム合金の表面に形成
された酸化被膜と水和物により形成された封孔処理層と
の上に中間結合層としてγ−グリシドキシプロピルトリ
メトキシシラン樹脂を浸漬処理によつて形成させた後、
さらにエポキシ樹脂を浸漬処理により付着させる。その
後温度100℃で熱処理を行い。化学結合を促進させる。FIG. 4 is a vertical sectional view of a corrosion-resistant material for a turbo molecular pump according to another embodiment of the present invention, and FIG. 5 is an explanatory view of its action. As shown in FIG. 4, the corrosion-resistant material for turbo molecular pump according to the present embodiment is pre-treated in the order of degreasing, alkali cleaning, water washing, neutralization and water washing.
An aluminum alloy based on 2014 is immersed in an aqueous sulfuric acid solution maintained at a constant concentration and temperature. Then, the aluminum alloy is energized for a predetermined time to form an oxide film (trade name is alumite film) made of Al 2 O 3 on the surface of the aluminum alloy by electrolysis. The energization time in this case varies depending on the thickness of the coating. After forming the oxide film in this way, it is washed with water, immersed in warm water maintained at a constant temperature and hydrogen ion concentration for a predetermined time, and Al 2 O 3 xH 2 O A hydrate consisting of is formed and sealed to form a sealing treatment layer. As described above, γ-glycidoxypropyltrimethoxysilane was used as an intermediate bonding layer on the oxide film formed on the surface of the aluminum alloy by the anodizing treatment and the sealing treatment and the sealing treatment layer formed by the hydrate. After forming the resin by immersion treatment,
Further, an epoxy resin is attached by dipping treatment. After that, heat treatment is performed at a temperature of 100 ° C. Promotes chemical bonding.
このような処理方法によつて得られたターボ分子ポン
プ用耐食材料について、塩素ガスに温度80℃、相対湿度
70％になるように水分を含ませた湿りガス中で疲労試験
を行つた。第５図はその結果を示すグラフで、図に示す
ように従来の単に陽極酸化被膜のみのもの、或いはその
上にエポキシ樹脂層を形成させたものよりも本ターボ分
子ポンプ用耐食材料は強度的に優れている。なお、上記
の実施例に係るターボ分子ポンプ用耐食材料と同程度に
耐食性にも優れることは明らかである。また、本実施例
に於いてはアルミニウム合金について記載したが、アル
ミニウム金属に適用しても同様の作用効果が得られる。Regarding the corrosion-resistant material for turbo molecular pumps obtained by such a treatment method, chlorine gas was used at a temperature of 80 ° C and a relative humidity.
A fatigue test was conducted in a moist gas containing 70% of water. FIG. 5 is a graph showing the results. As shown in the figure, the corrosion resistant material for turbo molecular pump is stronger than the conventional one having only an anodized film or the one having an epoxy resin layer formed thereon. Is excellent. It is obvious that the material has excellent corrosion resistance to the same extent as the corrosion resistant material for turbo molecular pumps according to the above-mentioned examples. Further, although an aluminum alloy has been described in this embodiment, the same effect can be obtained by applying it to aluminum metal.
本発明に係るターボ分子ポンプ用耐食材料は前記の通
り構成されており、従来の耐食材料よりも耐食性に優れ
ているので塩素ガスなど腐食性ガスの環境中でもターボ
分子ポンプが十分安全に運転されるなどの効果が奏せら
れる。The corrosion-resistant material for a turbo molecular pump according to the present invention is configured as described above, and since it is superior in corrosion resistance to conventional corrosion-resistant materials, the turbo-molecular pump can be operated sufficiently safely even in an environment of corrosive gas such as chlorine gas. And the like.
第１図は本発明の一実施例に係るターボ分子ポンプ用耐
食材料の断面図、第２図はその作用説明図、第３図はそ
のターボ分子ポンプの断面図、第４図は本発明の他の実
施例に係るターボ分子ポンプ用耐食材料の縦断説明図、
第５図はその作用説明図である。 ４……静翼、５……動翼。FIG. 1 is a sectional view of a corrosion resistant material for a turbo molecular pump according to an embodiment of the present invention, FIG. 2 is an explanatory view of its action, FIG. 3 is a sectional view of the turbo molecular pump, and FIG. 4 is a sectional view of the present invention. Longitudinal explanatory view of a corrosion-resistant material for a turbo molecular pump according to another embodiment,
FIG. 5 is an explanatory view of its operation. 4 ... stationary blade, 5 ... moving blade.
Claims (2)
の表面に酸化被膜と、該酸化被膜を酢酸ニツケル浴によ
り処理して得られた水和物および水酸化物による封孔処
理層と、該封孔処理層上に形成されたエポキシ樹脂層と
を有することを特徴とするターボ分子ポンプ用耐食材
料。1. An oxide film on the surface of an aluminum metal or an aluminum alloy, a pore-sealing layer made of a hydrate and a hydroxide obtained by treating the oxide film with a nickel acetate bath, and the pore-sealing layer. A corrosion-resistant material for a turbo molecular pump, comprising an epoxy resin layer formed on the top.
の表面に酸化被膜と、該酸化被膜を温水中で沸騰処理し
て得られた水和物による封孔処理層と、該封孔処理層上
に形成された中間結合用樹脂層と、該中間結合用樹脂層
上に形成されたエポキシ樹脂層とを有することを特徴と
するターボ分子ポンプ用耐食材料。2. An oxide film formed on the surface of aluminum metal or an aluminum alloy, a pore-sealing layer made of a hydrate obtained by boiling the oxide film in warm water, and a sealing layer formed on the pore-sealing layer. A corrosion-resistant material for a turbo molecular pump, comprising: a resin layer for intermediate bonding, and an epoxy resin layer formed on the resin layer for intermediate bonding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31303088A JP2563541B2 (en) | 1988-12-13 | 1988-12-13 | Corrosion resistant material for turbo molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31303088A JP2563541B2 (en) | 1988-12-13 | 1988-12-13 | Corrosion resistant material for turbo molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02158336A JPH02158336A (en) | 1990-06-18 |
| JP2563541B2 true JP2563541B2 (en) | 1996-12-11 |
Family
ID=18036372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31303088A Expired - Fee Related JP2563541B2 (en) | 1988-12-13 | 1988-12-13 | Corrosion resistant material for turbo molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2563541B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1393140B1 (en) * | 2009-03-17 | 2012-04-11 | Nuovo Pignone Spa | METHOD OF PRODUCTION OF A PROTECTIVE COATING FOR A COMPONENT OF A TURBOMACCHINA, THE SAME COMPONENT AND THE RELATED MACHINE |
| EP4390130B1 (en) | 2022-12-21 | 2025-03-19 | Pfeiffer Vacuum Technology AG | Pump and method for forming a coating |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5817839B2 (en) | 2011-11-01 | 2015-11-18 | 株式会社村田製作所 | PTC thermistor and method for manufacturing PTC thermistor |
-
1988
- 1988-12-13 JP JP31303088A patent/JP2563541B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5817839B2 (en) | 2011-11-01 | 2015-11-18 | 株式会社村田製作所 | PTC thermistor and method for manufacturing PTC thermistor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02158336A (en) | 1990-06-18 |
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