JP2601760B2 - Laser marking method and transmission type liquid crystal mask marker - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser engraving method and a transmission type liquid crystal mass suitable for, for example, high-speed engraving a serial number or a pattern on the surface of an IC chip or other metal or nonmetallic article.
About Kummer .

[0002]

2. Description of the Related Art Transmissive liquid crystal mask markers include, for example, a laser irradiation format (collective irradiation format, raster irradiation format, etc.) and an optical system application (light collection, reduction, enlargement,
(For molding, splitting, deflecting, etc.) or itself (mirror,
Lenses, prisms, glass fibers, etc.), various driving systems (laser oscillators, liquid crystal masks, deflectors, work feeders, etc.) and their synchronous control systems, etc., are different depending on the presence or absence. In a word, unless otherwise specified, the transmissive liquid crystal mask marker writes a controller, a laser oscillator, and a still image (hereinafter simply referred to as an “image”) to be displayed based on a command from the controller. A transmissive liquid crystal mask that can be replaced (hereinafter simply referred to as “liquid crystal mask” except when emphasized), irradiates the image of the liquid crystal mask with laser light from a laser oscillator, and irradiates the transmitted light to the work surface. Thus, the image is engraved on the surface of the work. Here, the controller, of course the image document <br/> recombinant-out of the liquid crystal mask, a laser oscillator, that is carried out also synchronization control for driving <br/> kinematic system of the movable optical system and the like Normal.

In such a transmission type liquid crystal mask marker, conventionally, the "image writing instead of the liquid crystal mask" (1) First, all of the current image display voltage applied to the liquid crystal mask to 0V, and (2) After the current image disappears, the next image display voltage is applied to the liquid crystal mask to start the next image. Here, in the step (1), the burn-in of the liquid crystal display is prevented.
Stop and display the LCD mask from the current image to the next image in a short time
This is a necessary step.

[0004]

In recent years, transmission type liquid crystal mask markers have been required to have not only higher precision but also higher speed. To respond to this requirement without drastically changing the transmission-type liquid crystal mask marker body, conventionally, a drive system with better fine movement response or a sensor system with higher resolution has been adopted. I have. However, in such a simple alternative, for example, the alternative article itself is expensive, or it takes time to secure the engraving quality based on the performance difference between the articles, and the economic disadvantage is large in proportion to the obtained effect. I have.

The present invention has been made in view of the above-mentioned circumstances of the prior art, without greatly changing the transmission type liquid crystal mask marker itself.
It is another object of the present invention to provide a laser engraving method and a transmissive liquid crystal mask marker that can achieve high-speed engraving without using a substitute.

[0006]

SUMMARY OF THE INVENTION Accordingly, the present invention provides
The laser engraving method involves irradiating a laser image L1 emitted from a laser oscillator 2 onto a current image displayed on a transmission type liquid crystal mask 3 and transmitting the current image from the transmission type liquid crystal mask 3 displaying the current image . By irradiating the work surface 4 with light L2, the current image is imprinted on the work surface 4 and then the display of the current image is performed.
Erasing and displaying the next image on the transmissive liquid crystal mask 3
The light L1 is irradiated on the next image of the transmission type liquid crystal mask 3, and
The transmitted light L2 from the transmissive liquid crystal mask 3 displaying the image is
By irradiating the workpiece surface 4, the workpiece surface 4
A laser engraving method for engraving a serial image, the method comprising:
And <br/> time from the image to the image writing instead of the liquid crystal mask 3 to the next image, (1) First, all of the current image display voltage applied to the liquid crystal mask 3 substantially in 0V, (2 ) then, before the light transmittance of the liquid crystal mask 3 becomes 0%, it was decided to launch this next image by applying the following image display voltage to the liquid crystal mask 3.

On the other hand, the transmission type liquid crystal mask marker includes a controller 1, a laser oscillator 2, and a command S1 from the controller 1.
And a transmission type liquid crystal mask 3 image can be rewritten with based on the laser beam L1 from the laser oscillator 2 Toru
The current image displayed on the oversized liquid crystal mask 3 is radiated to the current image .
By irradiating the transmitted light L2 from the transmission type liquid crystal mask 3 which displays the image to the workpiece surface 4, the surface of the workpiece 4 the engraved current image to, erases the display of the current image and we have continued the next image
Is displayed on the transmission type liquid crystal mask 3 and the laser beam L1 is transmitted.
The next image of the liquid crystal mask 3 was irradiated and the next image was displayed.
Transmitted light L2 from transmissive liquid crystal mask 3 to work surface 4
By irradiating, the next image is engraved on the work surface 4.
In the transmissive type liquid crystal mask marker indicia, transmission type liquid crystal Ma
The screen marker has a light transmittance detecting means of the liquid crystal mask 3,
The controller 1 stores the reference transmittance Qo of the liquid crystal mask 3 in advance , and switches from the current image of the liquid crystal mask 3 to the next image.
Upon image rewriting, (1) First, all of the current image display voltage applied to the liquid crystal mask 3 substantially in 0V, (2) Subsequently, the actual from the light transmittance detection means of the liquid crystal mask 3 (3) When this actual light transmittance Q becomes equal to the reference transmittance Qo, a next image display voltage is applied to the liquid crystal mask 3 to start the next image. I decided that.

The transmission type liquid crystal mask marker includes a controller 1, a laser oscillator 2, and a command S1 from the controller 1.
And a transmission type liquid crystal mask 3 you can rewrite an image based on the laser beam L1 from the laser oscillator 2 Toru
The current image displayed on the oversized liquid crystal mask 3 is radiated to the current image .
By irradiating the transmitted light L2 from the transmissive liquid crystal mask 3 displaying the image to the work surface 4, the current image is engraved on the work surface 4, and then the display of the current image is erased and the next image is erased.
Is displayed on the transmission type liquid crystal mask 3 and the laser beam L1 is transmitted.
The next image of the liquid crystal mask 3 was irradiated and the next image was displayed.
Transmitted light L2 from transmissive liquid crystal mask 3 to work surface 4
By irradiating, the next image is engraved on the work surface 4.
In the transmissive type liquid crystal mask marker indicia, the controller 1,
In advance, the liquid crystal mask 3 is used to display an image when erasing an image.
Storing a predetermined time from nearly the 0V voltage before the light transmittance Q of the liquid crystal mask 3 is = 0% as the reference time t1, the image written instead of the liquid crystal mask 3 of the to the next image from the current image (1) First, all the currents applied to the liquid crystal mask 3
The image display voltage to approximately 0V, (2) Subsequently, when the the developing image display voltage almost to 0V
When the elapsed time from t is equal to the reference time t1, may be to launch the said next image by applying the following image display voltage to the liquid crystal mask 3.

[0009]

According to the first method of the invention, the application timing of the next image display voltage Vc, which has been vague in the past, is determined by the light transmittance Q of the liquid crystal mask 3.
It was determined by introducing a specific controllable factor. The second and third device inventions are specific examples of the device using the first invention.

According to a second aspect of the present invention, the transmission type liquid crystal mask marker is provided with a light transmittance detecting means, and the reference transmittance Qo is stored in advance in the controller 1 so that the actual transmittance from the light transmittance detecting means can be obtained. When the light transmittance Q becomes equal to the reference transmittance Qo (Q = Qo ≠ 0), a next image display voltage Vc is applied to the liquid crystal mask 3 to start the next image.

The third invention focuses on the fact that the light transmittance Q of the second invention is a function of the elapsed time t, and compares the light transmittance detection means of the second invention and the reference transmittance Qo with the reference time Qo. t1
Is stored in the controller 1. Therefore, when the elapsed time t reaches the reference time t1 (t = t1),
A next image display voltage Vc is applied to the liquid crystal mask 3 to start the next image.

[0012]

Embodiments of the present invention will be described below. First, an example of a transmissive liquid crystal mask marker body will be described with reference to FIG. Transmission type liquid crystal mask marker in the figure, the controller 1, the image on the basis of a command S1 from the laser oscillator 2 and the controller 1 is provided with a liquid crystal mask 3 to be rewritten. The details are as follows.

Therefore, a transmission type liquid crystal mask according to the present invention is provided.
The markers are shown in FIG. Liquid crystal mask 3 from laser oscillator 2
A beam shaping lens 5 and an XY deflector 6 for raster irradiation are provided in this order in the optical path. The XY deflector 6 includes a Y deflector 6Y for line feed and an X deflector 6X for irradiation in each scanning line direction. A condensing lens 61 is provided in the optical path from the Y deflector 6Y to the X deflector 6X. In the optical path from the liquid crystal mask 3 to the work surface 4,
XY deflectors 7X and 7Y for setting an image marking area and an objective lens 8 are provided in this order. XY deflector 7X,
7Y is effectively used, for example, when combining several images to imprint one whole image on the work surface 4 or when imprinting at different positions on the work surface 4.

The operation example of the transmission type liquid crystal mask marker of FIG . 1 is as follows.
This is shown below. (1) The controller 1 transmits the stored overall pattern information
Divided into a plurality of block-shaped division pattern information,
Recorded along with the marking position information of the lock-shaped division pattern information
And 憶, (2) the time stamp to the work 4 above, Lee. One division from the plurality of division pattern information
The pattern information is read together with the stamp position information, and b. Next, the divided pattern information read in step (a) is
( C) displaying the divided patterns on the mask 3 ; Next, the second deflectors 7X and 7Y are read out in step A.
Drive based on the stamp position information
Stop, d. Next, a laser beam from the laser oscillator 2 is emitted.
At the same time, the liquid crystal mask is controlled by the first deflectors 6X and 6Y.
Raster scanning of the display division pattern on
Is engraved with the division pattern . The above steps a to d are entirely patterned on the workpiece 4.
Pattern until the next segmented pattern
Liquid crystal mask by executing
Engraved area larger than the area corresponding to size 3
It is carried out.

The first embodiment will be described. The transmission type liquid crystal mask marker is provided with light transmittance detecting means for the liquid crystal mask 3. As shown in the figure, the light projecting unit 12A, its communication line S3, the light receiving unit 12B, its communication line S4, and the controller 1 (hard surface) are not shown,
And an arithmetic program (software surface) stored in the controller 1. The calculation program includes the light emitting means 12
In the optical path through which the light passes through the liquid crystal mask 3 and is received by the light receiving means 12B, the light projection intensity of the light projecting means 12A and the light receiving intensity of the light receiving means 12B are input, and the light transmittance Q of the liquid crystal mask 3 is obtained. Is calculated for a predetermined time. That is,
When rewriting the image of the liquid crystal mask 3, the controller 1 sets (1) all the current image display voltages Vc applied to the liquid crystal mask 3 to 0 V, and (2) the light transmittance detecting means. (3) When the actual light transmittance Q becomes equal to the reference transmittance Qo, the next image display voltage V is applied to the liquid crystal mask 3.
The next image is activated by applying c.

A second embodiment will be described. A predetermined time from when all the image display voltages Vc are set to 0 V when the image of the liquid crystal mask 3 is erased to before the light transmittance Q of the liquid crystal mask 3 becomes 0% is defined as t1. Here, the predetermined time t1 is
Although this corresponds to the predetermined light transmittance Q of the first embodiment, if this is stored in the controller 1 in advance, it corresponds to the light transmittance detecting means and the reference transmittance Qo in the first embodiment. In FIG. 1 showing the first embodiment, light projecting means 12A,
The communication line S3, the light receiving means 12B, and the communication line S4 become unnecessary. Therefore the predetermined time t1 as the reference time t1, upon the image writing instead of the liquid crystal mask 3, (1) First, all of the current image display voltage Vc that is applied to the liquid crystal mask 3 to 0V, (2) then When the elapsed time t becomes equal to the reference time t1, the next image display voltage Vc is applied to the liquid crystal mask 3 to start the next image.

According to the first and second embodiments,
Upon image writing instead of the liquid crystal mask 3, both (1) First, all of the current image display voltage applied to the liquid crystal mask 3 to 0V, and subsequently (2), the liquid crystal mask 3
These are common in that a next image display voltage is applied to the liquid crystal mask 3 to start the next image before the light transmittance becomes 0%.

The effects of the above embodiment will be described with reference to the experimental results shown in FIG. FIG. 3A is a diagram illustrating the relationship between the image display voltage Vc and time, and FIG. 3B is a diagram illustrating the relationship between the light transmittance Q and time. The image rewriting time T12 includes a fall time T1 and a rise time T2 (T12 = T1
+ T2). The fall time T1 is a time from when all the current image display voltages Vc applied to the liquid crystal mask 3 are set to 0 V to when the next image display voltage Vc is applied. The experimental results are the results based on the prior art (line P1 in FIG. 4B) and the results based on the first embodiment (FIG. 4B).
P2 line).

In the prior art, the voltage Vc for displaying the next image is applied after the current image disappears , and T1 = T2 = 30 ms
ec, T12 = 60 msec. On the other hand, in the first embodiment, the reference transmittance Qo of Qo = 2% is set before the light transmittance Q of the liquid crystal mask 3 becomes 0% (that is, before the current image disappears). According to this, as shown by the P2 line, t1 = 20 msec, t2 = 15 msec, t
12 = 35 msec. That is, t1 is the conventional technology
１ ／ of T1 (10 msec), and t2 of conventional technology
1/2 of the start-up time T2 (15 msec), and t
12 is 7/12 of the conventional image rewriting time T12.
(25 msec).

Incidentally, if the viewpoint of the above experiment is changed, the second embodiment
An exampleBecomesThat is, the falling time, which is the result time of the first embodiment,
Timet1 as reference timeIf it is stored in advance as
Even if there is no excess rate detecting means (therefore, the calculation of the light transmittance Q
Without having to memorize the reference transmittance Qo
Also),Elapsed time t1 = 20 msecIf it becomesTime
Has a light transmittance Q of 2%.Changetimet12
Well, its contentst1 and t2 have the same valueIt is clear that it will be shortened
Is. However, the second embodiment is different from the first embodiment,
Since the light transmittance detection means is not used, the reference time t1
Regular verification and correctionRequired.

[0021] Image writing based on the above experimental resultsChangeTime T1
2Further analysis of shortening to t12 shows that
Shortening the falling time T1 to t1 and starting up
Is shortened more than expected and becomes t2.
You. Here, the inventors say, "Shut down the liquid crystal display,
Raising is an independent event, and the fall time is changed
However, the startup time does not change. "I expected.

The fall time T1 is reduced to t1.
This means that the next image will be established earlier than in the prior art.
The finger that brings about such a shortened t1
Light transmittance is introduced as a target.

Now, the fall time is changed from T1 to t1.
As a result, the start-up time T2 is shorter than expected.
To become t2, it is necessary to use t1 and t2 in some form.
Means that a mutual relationship exists between Less than
Below, this mutual relationship is explained.

The response indicated by the liquid crystal mask 3 when switching images.
When the display image voltage Vc is set to 0 V,
The electric charge is discharged from the liquid crystal for 100 μsec.
Do you get it. On the other hand, the above TI is on the order of several tens of microseconds.
is there. Therefore, the change in light transmittance at the time of image switching
Position of the crystal molecule when no voltage is applied
Transition (hereinafter referred to as equilibrium position)
State, that is, while the spatial arrangement of liquid crystal molecules is changing.
You.

[0025] That is, as before the liquid crystal light transmittance Q becomes 0%, Ru der before spatial arrangement of molecules not cured even taken to reach equilibrium 0V. Therefore, applying the next image display voltage Vc in such a transient state requires a shorter time to start the image than moving the liquid crystal molecules from the equilibrium state.
Estimated to reach the spatial arrangement of liquid crystal molecules corresponding to the closed state
Is done. As a result, as described above, it is estimated that this is related to the start of the next image in a shorter time than expected.
You.

[0026] Incidentally, transmission type liquid crystal mask marker body according to the present invention is not necessarily limited to the above example embodiments, at least a controller, a laser oscillator, an image based on a command from the controller is rewritten transmission A transmission type liquid crystal mask marker having a configuration in which a laser beam from a laser oscillator is applied to an image of the liquid crystal mask, and the transmitted light is applied to the surface of the work to engrave the image on the work surface. If so, all types of transmission type liquid crystal mask markers can be applied.
Some are already described in the section of the prior art. Then, among the high-speed image writing recombination is required, for example, on the downstream side of the liquid crystal mask, XY deflector 7X, with a 7Y, such as engraved one whole image on the work surface by combining several images It goes without saying that the above effects are particularly remarkable in the transmission type liquid crystal mask marker.

[0027]

As described above, according to the present invention, records according to the present invention
According to chromatography The stamping method, <br/> when the image writing instead of the liquid crystal mask to the current image display voltage to 0V, and before its light transmittance becomes 0%, the next image display voltages Is applied to start the next image, so that not only the fall time but also the start time can be shortened more than expected, and the image rewriting can be greatly reduced. Needless to say, this contributes to speeding up the engraving.

The transmissive liquid crystal mask marker according to the present invention is a typical example of use of the above-mentioned method invention. First, it is provided with a liquid crystal mask light transmittance detecting means.
Storing the reference transmittance Qo (Qo ≠ 0), Saishi <br/> the image writing recombinant, after all of the current image display voltage to 0V, and inputs the light transmittance Q of the light transmittance detection means When the reference transmittance Qo is reached, the next image display voltage is applied to start the next image. Second, the controller sets the light transmittance Q to 0 from when the image display voltage is set to 0 V in advance.
% Is stored as a reference time t1, and when rewriting an image, all current image display voltages are set to 0.
When the elapsed time t after the voltage V becomes the reference time t1, the next image display voltage is applied to start the next image.

According to the above, the main configuration of the conventional transmissive liquid crystal mask marker is slightly changed (first configuration), or the control program is slightly changed without any change (second configuration). Thus, the above-described effect of the above-described method invention (that is, shortening of the image rewriting time) can be achieved.
Of course, as a result, it goes without saying that the high-speed engraving performance of the transmissive liquid crystal mask marker is improved.

[Brief description of the drawings]

FIG. 1 is an external view of an embodiment.

FIGS. 2A and 2B are graphs of experimental results, in which FIG. 2A is an image voltage graph, and FIG. 2B is a light transmittance graph.

[Description of Signs] 1 ... Controller, 2 ... Laser oscillator, 3 ... Transmissive liquid crystal mask, 4 ... Work surface, 12A ... Light emitting means,
12B: light receiving means, L1: laser light, L2: transmitted light, Q
o: Reference transmittance, Q: Light transmittance, S1: Command, S3: Communication line, S4: Communication line, t12: When rewriting the image of the present invention
Interval, t1 ... reference time ( fall time of the present invention) , t2 ...
Start-up time of the present invention, T12 ... prior art image rewriting time, T1 ... fall time of the prior art, T2 ... conventional technique
Operation start-up time, Vc: voltage for image display.

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁶ Identification number Agency reference number FI Technical display location H01L 23/00 H01L 23/00 A

Claims (3)

(57) [Claims] 1. A laser beam L1 emitted from a laser oscillator 2 is applied to a current image displayed on a transmissive liquid crystal mask 3, and transmitted light L2 from the transmissive liquid crystal mask 3 displaying the current image is applied to a work surface. 4, the current image is engraved on the work surface 4 and then the display of the current image is turned off.
The next image is displayed on the transmissive liquid crystal mask 3 and the laser light
L1 is irradiated on the next image of the transmissive liquid crystal mask 3, and the next image
The transmitted light L2 from the transmissive liquid crystal mask 3 displaying
By irradiating the work surface 4, the work surface 4
A laser engraving method for engraving a next image , comprising writing an image of a liquid crystal mask 3 from the current image to the next image.
At the time of replacement , (1) first, all the current image display voltages applied to the liquid crystal mask 3 are set to almost 0 V. (2) Subsequently, before the light transmittance of the liquid crystal mask 3 becomes 0%, laser marking method characterized by launching the said next image by applying the following image display voltage to the liquid crystal mask 3. And wherein the controller 1, a laser oscillator 2, be rewritten image based on a command S1 from the controller 1
And a transmission type liquid crystal mask 3 capable of transmitting the laser light L1 from the laser oscillator 2 to the current transmission type liquid crystal mask 3 displayed on the transmission type liquid crystal mask 3.
Irradiating the image, transmission type liquid crystal mask 3 which displays the the developing image
Irradiating the workpiece surface 4 with the transmitted light L2 from the surface of the workpiece, the current image is engraved on the workpiece surface 4,
The display of the image is erased and the next image is displayed on the transmissive liquid crystal mask 3.
And irradiates the laser beam L1 to the next image of the transmission type liquid crystal mask 3.
And the transmission from the transmission type liquid crystal mask 3 displaying the next image.
By irradiating the work surface 4 with light L2, the work
In the transmissive liquid crystal mask marker for engraving the next image on the front surface 4 , the transmissive liquid crystal mask marker includes a light transmittance detecting means for the liquid crystal mask 3, and the controller 1 controls the reference transmittance Qo of the liquid crystal mask 3 in advance . From the current image of the liquid crystal mask 3 to the next image.
Upon image rewriting, (1) First, all of the current image display voltage applied to the liquid crystal mask 3 substantially in 0V, (2) Subsequently, the actual from the light transmittance detection means of the liquid crystal mask 3 (3) When this actual light transmittance Q becomes equal to the reference transmittance Qo, a next image display voltage is applied to the liquid crystal mask 3 to start the next image. transmission type liquid crystal mask marker, characterized in that. 3. Rewriting an image based on a controller 1, a laser oscillator 2, and a command S1 from the controller 1.
And a transmission type liquid crystal mask 3 capable of transmitting the laser light L1 from the laser oscillator 2 to the current transmission type liquid crystal mask 3 displayed on the transmission type liquid crystal mask 3.
Irradiating the image, transmission type liquid crystal mask 3 which displays the the developing image
Irradiating the workpiece surface 4 with the transmitted light L2 from the surface of the workpiece, the current image is engraved on the workpiece surface 4,
The display of the image is erased and the next image is displayed on the transmissive liquid crystal mask 3.
And irradiates the laser beam L1 to the next image of the transmission type liquid crystal mask 3.
And the transmission from the transmission type liquid crystal mask 3 displaying the next image.
By irradiating the work surface 4 with light L2, the work
In the transmissive type liquid crystal mask marker be engraved the next image on the surface 4, the controller 1 in advance, the light transmittance of the liquid crystal mask 3 from the time of nearly 0V voltage for displaying an image during image erasing of the liquid crystal mask 3 a predetermined time before the Q is = 0% is stored as the reference time t1, the upon image writing instead of liquid <br/> crystal mask 3 to the next image from the current image, (1) first, the liquid crystal mask 3 All the currents applied to
The image display voltage to approximately 0V, (2) Subsequently, when the the developing image display voltage almost to 0V
When the elapsed time t of the pressurization et al is equal to the reference time t1, transmission type liquid crystal mask marker, wherein the launch said next image by applying the following image display voltage to the liquid crystal mask 3.