JP2702609B2 - Pyrolytic boron nitride heating element - Google Patents
Pyrolytic boron nitride heating elementInfo
- Publication number
- JP2702609B2 JP2702609B2 JP6509175A JP50917594A JP2702609B2 JP 2702609 B2 JP2702609 B2 JP 2702609B2 JP 6509175 A JP6509175 A JP 6509175A JP 50917594 A JP50917594 A JP 50917594A JP 2702609 B2 JP2702609 B2 JP 2702609B2
- Authority
- JP
- Japan
- Prior art keywords
- graphite
- boron nitride
- heating element
- pyrolytic
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 title claims description 39
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 title claims description 27
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 39
- 229910002804 graphite Inorganic materials 0.000 claims description 39
- 239000010439 graphite Substances 0.000 claims description 39
- 229910052582 BN Inorganic materials 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 230000000712 assembly Effects 0.000 claims 1
- 238000000429 assembly Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 238000000197 pyrolysis Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010574 gas phase reaction Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical group C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007770 graphite material Substances 0.000 description 1
- 239000003701 inert diluent Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/145—Carbon only, e.g. carbon black, graphite
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/02—Details
- H05B3/06—Heater elements structurally combined with coupling elements or holders
Landscapes
- Resistance Heating (AREA)
- Surface Heating Bodies (AREA)
- Ceramic Products (AREA)
Description
【発明の詳細な説明】 発明の背景 熱分解窒化硼素（PBN:pyrolitic boron nitride）
は、反応容器内におけるアンモニアと三塩化硼素（BC
l3）のような硼素含有ガスとをガスとの気相反応によ
り、更に詳しくは、本明細書において参考とした米国特
許第3,152,006号に記載されているような気相反応によ
り、化学蒸着により形成される。熱分解窒化硼素は非常
に高純度であり、基板から分離し放出されると、純化さ
れた熱分解窒化硼素として自立した物質になる。Description of the Invention Background of the Invention Pyrolitic boron nitride (PBN)
Is the reaction between ammonia and boron trichloride (BC
l 3 ) by chemical vapor deposition with a gas containing a boron-containing gas, such as l3) by a gas phase reaction with the gas, more particularly by a gas phase reaction as described in U.S. Pat. It is formed. Pyrolytic boron nitride is of very high purity and, when separated and released from the substrate, becomes a free-standing substance as purified pyrolytic boron nitride.
熱分解窒化硼素加熱素子は、窒化硼素の誘電体と、グ
ラファイト特に熱分解グラファイトのような抵抗加熱が
できる導電性材料から形成された加熱体とを含む。加熱
体は外部の電源に接続されていて抵抗加熱器を構成して
いる。熱分解窒化硼素加熱素子は、分子線エピタキシ
ー、宇宙実験、電子顕微鏡用基板加熱器、および超伝導
膜の成長のような種々の用途で抵抗加熱用に用いられて
いる。超伝導膜の成長のようなある種の用途において
は、超伝導膜が成長する反応容器の雰囲気中に酸素を導
入する必要がある。雰囲気中の酸素は加熱素子中のグラ
ファイト導電体と反応してこれを酸化し、回路を開路状
態にする。これまで熱分解窒化硼素加熱素子用の電気接
触は、ネジまたはクランプで熱分解グラファイト導電体
を押しつけることによって行ってきた。この型の接触構
造は反応性のガスに対して非浸透性ではないため、グラ
ファイト加熱体との接触点の温度が40℃程度の高温にな
ると、酸化が起こる。更に、熱応力によって接触点での
ネジやクランプの圧力が失われるため、接触端子に反り
が生じて加熱素子に損傷を及ぼす。Pyrolytic boron nitride heating elements include a dielectric of boron nitride and a heater formed from a conductive material capable of resistive heating, such as graphite, especially pyrolytic graphite. The heating element is connected to an external power supply and constitutes a resistance heater. Pyrolytic boron nitride heating elements have been used for resistive heating in various applications such as molecular beam epitaxy, space experiments, substrate heating for electron microscopy, and growth of superconducting films. Certain applications, such as the growth of superconducting films, require the introduction of oxygen into the atmosphere of the reactor in which the superconducting film is grown. Oxygen in the atmosphere reacts with and oxidizes the graphite conductor in the heating element, leaving the circuit open. Heretofore, electrical contact for pyrolytic boron nitride heating elements has been made by pressing a pyrolytic graphite conductor with a screw or clamp. Since this type of contact structure is not impervious to reactive gases, oxidation occurs when the temperature of the point of contact with the graphite heater is as high as about 40 ° C. Further, the pressure of the screw or the clamp at the contact point is lost due to the thermal stress, so that the contact terminal is warped and the heating element is damaged.
これまで従来技術において、電気接触領域を酸化から
保護するために種々の方法が試みられてきた。一つの方
法は、プラチナ皮膜によって熱分解グラファイトと酸化
性雰囲気との間の障壁を形成するものである。極端な場
合には、加熱素子を石英容器内に封入して、酸化性雰囲
気から保護した例もある。他の用途では、加熱体と電気
接触している点で装置が熱応力により反りを生じて、そ
の結果加熱素子が損傷してが機能しなくなる。Heretofore, various methods have been attempted in the prior art to protect the electrical contact area from oxidation. One method is to form a barrier between pyrolytic graphite and an oxidizing atmosphere by a platinum coating. In extreme cases, the heating element may be sealed in a quartz container to protect it from an oxidizing atmosphere. In other applications, the device may warp due to thermal stress at the point of electrical contact with the heating element, resulting in damage to the heating element but failure.
発明の概要 本発明の熱分解窒化硼素加熱素子は、加熱素子を外部
電源と接続し且つ導電性グラファイト加熱体と存在する
反応性ガス雰囲気との間に障壁を設けるための接触アセ
ンブリを用いている。一般的には、本発明の熱分解窒化
硼素加熱素子は、窒化硼素の誘電体ベースと、このベー
ス上に重ね合わせ且つ蛇行パターンに配置した熱分解グ
ラファイトの加熱体であって加熱素子に一対の接触端を
設けて上記熱分解グラファイト加熱体の両接触端を通る
直列導電路とした加熱体と、上記両接触端を外部電源に
接続する接触アセンブリとを含み、この接触アセンブリ
は、上記加熱体の個々の接触端用のグラファイト柱であ
って各々一端で上記加熱体の対応する接触端に取り付け
られていて他端が上記外部電源への取付用の一端から所
定距離だけ離れているグラファイト柱と、個々のグラフ
ァイト柱の上記取付用端以外を覆う熱分解窒化硼素とを
含んでいる。SUMMARY OF THE INVENTION The pyrolytic boron nitride heating element of the present invention uses a contact assembly to connect the heating element to an external power source and to provide a barrier between the conductive graphite heater and the existing reactive gas atmosphere. . In general, the pyrolytic boron nitride heating element of the present invention comprises a dielectric base of boron nitride and a pyrolytic graphite heater superimposed on the base and arranged in a meandering pattern, wherein a pair of heating elements is provided. A contact body provided with a contact end to form a serial conductive path passing through both contact ends of the pyrolytic graphite heater; and a contact assembly for connecting the contact ends to an external power source, the contact assembly comprising: A graphite column for individual contact ends, each having one end attached to the corresponding contact end of the heating element and the other end separated by a predetermined distance from one end for attachment to the external power source; And pyrolytic boron nitride covering the graphite columns other than the mounting ends.
図面の簡単な説明 本発明のその他の利点および目的は以下の詳細な説明
を下記の添付図面を参照して読むことにより明瞭にな
る。BRIEF DESCRIPTION OF THE DRAWINGS Other advantages and objects of the present invention will become apparent from the following detailed description when read in conjunction with the accompanying drawings.
図１（ａ）〜（ｃ）は、本発明の望ましい態様による
熱分解加熱素子を作成する工程を示し、 図２は、本発明の本発明の熱分解加熱素子の側面図で
あり、 図３は、図２の熱分解加熱素子の平面図である。1 (a) to 1 (c) show steps of manufacturing a pyrolysis heating element according to a preferred embodiment of the present invention. FIG. 2 is a side view of the pyrolysis heating element of the present invention of the present invention. FIG. 3 is a plan view of the pyrolysis heating element of FIG.
望ましい態様の詳細な説明 図１（ａ）〜（ｃ）に、本発明による熱分解窒化硼素
加熱素子を作成する工程の手順を示す。図１（ａ）に示
したように、一般には0.030〜0.050インチの範囲にある
所望の厚さを持つ熱分解窒化硼素ベースプレート10は、
図１（ｂ）に示したようにグラファイトが密着性良く均
一に薄く蒸着できるように、熱分解グラファイト層12で
被覆されている。ここで熱分解グラファイトと言う用語
は、高度の晶子の方位性が存在する結晶性炭素質構造を
指す、と定義する。晶子の方位性は通常のグラファイト
材料には見出されない。更に、熱分解グラファイトは、
通常のグラファイトの性質が等方的であるのに対して、
すべり面が方位を持つため物理的性質に異方性がある。
熱分解グラファイトは、例えば反応容器内で適当な不活
性希釈媒体を用いたメタンガスの化学蒸着によって形成
できる。Detailed Description of Desirable Embodiment FIGS. 1A to 1C show a procedure of a process for producing a pyrolytic boron nitride heating element according to the present invention. As shown in FIG. 1 (a), a pyrolytic boron nitride baseplate 10 having a desired thickness, typically in the range of 0.030 to 0.050 inches, comprises:
As shown in FIG. 1B, the graphite is coated with a pyrolytic graphite layer 12 so that the graphite can be deposited uniformly and thinly with good adhesion. The term pyrolytic graphite is defined herein to refer to a crystalline carbonaceous structure in which a high degree of crystallite orientation exists. Crystallite orientation is not found in ordinary graphite materials. In addition, pyrolytic graphite is
Whereas the properties of normal graphite are isotropic,
Since the slip plane has an orientation, the physical properties are anisotropic.
Pyrolytic graphite can be formed, for example, by chemical vapor deposition of methane gas in a reaction vessel using a suitable inert diluent medium.
次いで、被覆したベースプレート10を機械加工して、
図１（ｂ）に示すようなほぼ円形の断面を持ち２つのタ
ブ17が突き出ている薄いウェハ状の本体15を持つ加熱体
14にする。図１（ｃ）に示したような蛇行パターンの溝
16をグラファイト層12を貫通させて機械加工し、その下
にある窒化硼素プレート10を露出することにより、両方
のタブ17から電気的に直列接続関係で延びている熱分解
グラファイトの連続ストリップ12を形成する。タブ17を
貫通する孔19を開け、図２および図３に示したような柱
状コネクタ21を取り付ける孔とする。Then, the coated base plate 10 is machined,
Heating body having a thin wafer-shaped main body 15 having a substantially circular cross section and two tabs 17 protruding as shown in FIG.
To 14. A groove having a meandering pattern as shown in FIG.
16 is machined through the graphite layer 12 to expose the underlying boron nitride plate 10, thereby forming a continuous strip of pyrolytic graphite 12 extending in electrical series connection from both tabs 17. Form. A hole 19 penetrating through the tab 17 is made to be a hole for mounting the columnar connector 21 as shown in FIGS.
柱状コネクタ21は、グラファイト柱22および23と、グ
ラファイトネジ24および25とを含む。グラファイト柱に
は一端にネジ24および25を受け入れるネジ孔26および27
があり、また他端には外部電源（図示せず）への取付用
のタップ孔28および29がある。望ましくは、各柱状コネ
クタ21と一緒に一対のフレキシブル（可撓性）グラファ
イトワッシャ30および31を用い、それぞれ個々のタブ17
の表側および裏側に配置して個々の柱状コネクタ21と加
熱体14との間の取り付けを機械的および電気的に強固に
するために用いる。フレキシブルグラファイトは、本発
明においてその開示内容を参考にした米国特許第3,404,
061号に教示されているように、酸性溶液中に積層生成
したグラファイト粒子を剥離して作成される。柱22およ
び23がそれぞれ電源に取り付けられる端部35で温度が加
熱体14の表面温度よりも実質的に低くなるように、柱22
および23は、加熱体14と外部電源との電気的接触点を離
すのに十分な長さＬを持つ。長さＬは１〜３インチの範
囲でよい。望ましくは、次に、加熱体14と柱状コネクタ
21とのアセンブリを熱分解窒化硼素層で被覆して加熱体
14と柱状コネクタ21を封入するが、ただしその際にタッ
プ孔28および29は外部電源への取付用として被覆しない
ままにしておく。あるいは、柱状コネクタ21の両接触端
35に、電源への接続部となるマスクを被せてもよい。The columnar connector 21 includes graphite columns 22 and 23 and graphite screws 24 and 25. Screw holes 26 and 27 at one end for receiving screws 24 and 25 in graphite column
The other end has tap holes 28 and 29 for attachment to an external power supply (not shown). Preferably, a pair of flexible graphite washers 30 and 31 are used with each column connector 21 and each individual tab 17
And used to mechanically and electrically strengthen the attachment between the individual columnar connector 21 and the heating element 14. Flexible graphite is disclosed in U.S. Pat.
As taught in No. 061, it is made by exfoliating graphite particles laminated in an acidic solution. Pillars 22 and 23 are positioned such that the temperature is substantially lower than the surface temperature of heater 14 at end 35 where each is attached to a power source.
And 23 have a length L sufficient to separate the point of electrical contact between the heating element 14 and the external power supply. Length L may range from 1 to 3 inches. Preferably, the heating element 14 and the columnar connector
The assembly with 21 is coated with a pyrolytic boron nitride layer and heated.
14 and the columnar connector 21 are sealed, but the tap holes 28 and 29 are left uncovered for attachment to an external power supply. Alternatively, both contact ends of the columnar connector 21
A mask serving as a connection portion to a power supply may be placed on 35.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭54−101781（ＪＰ，Ａ) 特開 平４−32182（ＪＰ，Ａ) 特公 昭58−18753（ＪＰ，Ｂ２) ──────────────────────────────────────────────────続 き Continuation of front page (56) References JP-A-54-101781 (JP, A) JP-A-4-32182 (JP, A) JP-B-58-18753 (JP, B2)
Claims (5)
ース（10）上に重ね合わせ且つ蛇行パターン（16）に配
置した熱分解グラファイトの加熱体（14）であって加熱
素子に一対の接触端（17）を設けて上記熱分解グラファ
イト加熱体（12）の両接触端を通る直列導電路とした加
熱体（14）と、上記両接触端を外部電源に接続する接触
アセンブリとを含み、この接触アセンブリは、上記加熱
体の個々の接触端用のグラファイト柱（22,23）であっ
て各々一端（26,27）で上記加熱体の対応する接触端（1
7）に取り付けられていて他端（35）が上記外部電源へ
の取付用の一端から所定距離だけ離れているグラファイ
ト柱と、上記加熱体（14）を封入し且つ個々のグラファ
イト柱（22,23）の上記外部電源への取付用端（35）以
外を覆う一体の熱分解窒化硼素被覆としての熱分解窒化
硼素皮膜とを含んで成ることを特徴とする高温の反応性
雰囲気中で用いるための熱分解窒化硼素加熱素子。1. A heating body (14) of pyrolytic graphite which is superposed on the base (10) and arranged in a meandering pattern (16), comprising a dielectric base of boron nitride (10) and a pair of heating elements. And a contact assembly for connecting the contact ends to an external power source by providing a series conductive path passing through both contact ends of the pyrolytic graphite heater (12). The contact assembly comprises graphite columns (22, 23) for the individual contact ends of the heating element, each at one end (26, 27) having a corresponding contact end (1) of the heating element.
7) and a graphite column whose other end (35) is separated by a predetermined distance from one end for mounting to the external power source; and a graphite column (22, 23) a pyrolytic boron nitride coating as an integral pyrolytic boron nitride coating covering the end other than the end (35) for attachment to the external power supply, for use in a high-temperature reactive atmosphere. Pyrolytic boron nitride heating element.
が、上記グラファイト柱への取付用の孔（19）を有する
請求項１に記載の熱分解窒化硼素加熱素子。2. The individual contact end (17) of said heating element (14).
2. The pyrolytic boron nitride heating element according to claim 1, wherein said element has a hole (19) for attachment to said graphite column.
ァイト柱との間に用いるフレキシブルグラファイトワッ
シャ（30,31）を更に含む請求項２に記載の熱分解窒化
硼素加熱素子。3. The pyrolytic boron nitride heating element according to claim 2, further comprising a flexible graphite washer (30, 31) used between each contact end of said heating element and each graphite column.
ト柱用のグラファイトネジ（26,27）を更に含み、個々
のグラファイト柱（22,23）がこのグラファイトネジを
受け入れるための対応したネジ孔を有する請求項３に記
載の熱分解窒化硼素加熱素子。4. The contact assembly further includes graphite screws (26,27) for the individual graphite posts, and the individual graphite posts (22,23) have corresponding screw holes for receiving the graphite screws. The pyrolytic boron nitride heating element according to claim 3.
チの範囲にある請求項４に記載の熱分解窒化硼素加熱素
子。 本発明は、熱分解窒化硼素加熱素子に関し、更に詳し
くは窒化硼素加熱素子用の電気接触アセンブリに関す
る。5. The pyrolytic boron nitride heating element according to claim 4, wherein each graphite column has a length in the range of 1 to 3 inches. The present invention relates to pyrolytic boron nitride heating elements, and more particularly to electrical contact assemblies for boron nitride heating elements.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US953,156 | 1978-10-20 | ||
| US07/953,156 US5343022A (en) | 1992-09-29 | 1992-09-29 | Pyrolytic boron nitride heating unit |
| PCT/US1993/009053 WO1994008436A1 (en) | 1992-09-29 | 1993-09-24 | Pyrolytic boron nitride heating unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08500932A JPH08500932A (en) | 1996-01-30 |
| JP2702609B2 true JP2702609B2 (en) | 1998-01-21 |
Family
ID=25493651
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6509175A Expired - Lifetime JP2702609B2 (en) | 1992-09-29 | 1993-09-24 | Pyrolytic boron nitride heating element |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5343022A (en) |
| EP (1) | EP0663138B1 (en) |
| JP (1) | JP2702609B2 (en) |
| KR (1) | KR0174587B1 (en) |
| CA (1) | CA2141340C (en) |
| DE (1) | DE69307525T2 (en) |
| WO (1) | WO1994008436A1 (en) |
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Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07172963A (en) * | 1993-12-22 | 1995-07-11 | Shin Etsu Chem Co Ltd | Pyrolytic boron nitride-coated multi-layer molded article and method for producing the same |
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5818753B2 (en) | 2012-08-13 | 2015-11-18 | 株式会社東芝 | Spoken dialogue system and spoken dialogue method |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1528388A (en) * | 1923-11-26 | 1925-03-03 | Morgan Crucible Co | Resistor for electric heating |
| US2640861A (en) * | 1950-11-27 | 1953-06-02 | Harshaw Chem Corp | Resistance furnace |
| US3637980A (en) * | 1970-07-13 | 1972-01-25 | Motorola Inc | Electrical and mechanical connections and support for evaporating boats |
| DE2402111C3 (en) * | 1974-01-17 | 1979-01-11 | Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln | Series evaporator for vacuum evaporation systems |
| DE2654606A1 (en) * | 1976-12-02 | 1978-06-08 | Leybold Heraeus Gmbh & Co Kg | Spring contact clamps for holding evaporator boat - for direct resistance heating in vacuum vapour deposition plant |
| US4264803A (en) * | 1978-01-10 | 1981-04-28 | Union Carbide Corporation | Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization |
| US4164646A (en) * | 1978-04-24 | 1979-08-14 | Grise Frederick Gerard J | Solid current carrying and heatable member with electric connection |
| US4755658A (en) * | 1985-11-12 | 1988-07-05 | Ultra Carbon Corporation | Segmented heater system |
| FR2627658B3 (en) * | 1988-02-18 | 1990-05-04 | Lgd Paris | CARBON FIBER HEATING ELEMENTS |
| US4927994A (en) * | 1989-02-28 | 1990-05-22 | The United States Of America As Represented By The Secretary Of The Air Force | Modular resistance heater assembly |
| US5031229A (en) * | 1989-09-13 | 1991-07-09 | Chow Loren A | Deposition heaters |
| US5059770A (en) * | 1989-09-19 | 1991-10-22 | Watkins-Johnson Company | Multi-zone planar heater assembly and method of operation |
| JPH0432182A (en) * | 1990-05-25 | 1992-02-04 | Toshiba Lighting & Technol Corp | Infrared heater |
| US5155652A (en) * | 1991-05-02 | 1992-10-13 | International Business Machines Corporation | Temperature cycling ceramic electrostatic chuck |
| FR2677840B1 (en) * | 1991-06-11 | 1993-10-15 | Propulsion Ste Europeenne | ELECTRIC HEATING RESISTANCE USING RESISTIVE ELEMENTS OF CARBON / CARBON COMPOSITE MATERIAL. |
-
1992
- 1992-09-29 US US07/953,156 patent/US5343022A/en not_active Expired - Lifetime
-
1993
- 1993-09-24 CA CA002141340A patent/CA2141340C/en not_active Expired - Fee Related
- 1993-09-24 EP EP93922354A patent/EP0663138B1/en not_active Expired - Lifetime
- 1993-09-24 KR KR1019950701156A patent/KR0174587B1/en not_active Expired - Lifetime
- 1993-09-24 WO PCT/US1993/009053 patent/WO1994008436A1/en not_active Ceased
- 1993-09-24 JP JP6509175A patent/JP2702609B2/en not_active Expired - Lifetime
- 1993-09-24 DE DE69307525T patent/DE69307525T2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5818753B2 (en) | 2012-08-13 | 2015-11-18 | 株式会社東芝 | Spoken dialogue system and spoken dialogue method |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7329842B2 (en) | 2005-11-08 | 2008-02-12 | Shin-Etsu Chemical Co., Ltd. | Ceramic heater and method for producing ceramic heater |
| JP2011146290A (en) * | 2010-01-15 | 2011-07-28 | Bridgestone Corp | Heater unit |
| US20140263281A1 (en) * | 2013-03-13 | 2014-09-18 | Shin-Etsu Chemical Co., Ltd. | Ceramic heater |
| KR20140112389A (en) | 2013-03-13 | 2014-09-23 | 신에쓰 가가꾸 고교 가부시끼가이샤 | Ceramic heater |
| US9351344B2 (en) | 2013-03-13 | 2016-05-24 | Shin-Etsu Chemical Co., Ltd. | Ceramic heater |
Also Published As
| Publication number | Publication date |
|---|---|
| CA2141340C (en) | 1999-01-12 |
| JPH08500932A (en) | 1996-01-30 |
| US5343022A (en) | 1994-08-30 |
| EP0663138B1 (en) | 1997-01-15 |
| WO1994008436A1 (en) | 1994-04-14 |
| KR0174587B1 (en) | 1999-05-01 |
| DE69307525D1 (en) | 1997-02-27 |
| DE69307525T2 (en) | 1997-04-30 |
| CA2141340A1 (en) | 1994-04-14 |
| EP0663138A1 (en) | 1995-07-19 |
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