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JP2718995B2 - Traveling-wave semiconductor laser amplifier - Google Patents
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JP2718995B2 - Traveling-wave semiconductor laser amplifier - Google Patents

Traveling-wave semiconductor laser amplifier

Info

Publication number
JP2718995B2
JP2718995B2 JP1148614A JP14861489A JP2718995B2 JP 2718995 B2 JP2718995 B2 JP 2718995B2 JP 1148614 A JP1148614 A JP 1148614A JP 14861489 A JP14861489 A JP 14861489A JP 2718995 B2 JP2718995 B2 JP 2718995B2
Authority
JP
Japan
Prior art keywords
active layer
face
layer
thickness
semiconductor laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1148614A
Other languages
Japanese (ja)
Other versions
JPH0312982A (en
Inventor
正 齊藤
孝彰 向井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
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Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP1148614A priority Critical patent/JP2718995B2/en
Publication of JPH0312982A publication Critical patent/JPH0312982A/en
Application granted granted Critical
Publication of JP2718995B2 publication Critical patent/JP2718995B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/50Amplifier structures not provided for in groups H01S5/02 - H01S5/30
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/50Amplifier structures not provided for in groups H01S5/02 - H01S5/30
    • H01S5/5009Amplifier structures not provided for in groups H01S5/02 - H01S5/30 the arrangement being polarisation-insensitive

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、光信号を電気信号に交換することなく直接
増幅できる進行波型半導体レーザ増幅器に関し、特に高
出力・低雑音・低動作電流密度であって、かつ利得の偏
波面依存性の少ない進行波型半導体レーザ増幅器に関す
るものである。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a traveling-wave type semiconductor laser amplifier capable of directly amplifying an optical signal without exchanging an optical signal into an electric signal, and more particularly to a high-power, low-noise, and low operating current density. And a traveling-wave type semiconductor laser amplifier having a small dependence of the gain on the polarization plane.

[従来の技術] 半導体レーザ増幅器は半導体レーザ媒質での誘導放出
を用いて入射信号光をコヒーレントに増幅する素子であ
る。このため、光信号を電気信号に変換することなく直
接増幅できるので、将来の超高速光伝送系やコヒーレン
ト光伝送系にとって重要な素子として注目されている。
進行波型半導体レーザ増幅器は光が入出射される両端面
からの反射による共振を抑圧して光信号を増幅する素子
であり、そのために両端面に反射防止膜を形成したり
〔T.Saitoh et al.,IEEE J.Quantum Electon.,vol.QE−
23,pp.1010−1020,1987.〕、斜めストライプ構造〔C.E.
Zah et al.,Electron.Lett.,vol.23,pp.990−991,198
7.〕や窓端面構造〔I.Cha et al.,Electron.Lett.,vol.
25,pp.242−243,1989.〕を導入した構造を有している。
[Related Art] A semiconductor laser amplifier is an element that coherently amplifies an incident signal light using stimulated emission in a semiconductor laser medium. For this reason, since an optical signal can be directly amplified without converting it into an electric signal, it is attracting attention as an important element for future ultrahigh-speed optical transmission systems and coherent optical transmission systems.
A traveling-wave semiconductor laser amplifier is an element that amplifies an optical signal by suppressing resonance due to reflection from both ends where light enters and exits. For this purpose, an anti-reflection film is formed on both ends [T. Saitoh et al. al., IEEE J.Quantum Electon., vol.QE−
23, pp. 1010-1020, 1987.), diagonal stripe structure (CE
Zah et al., Electron.Lett., Vol.23, pp.990-991,198
7.) and window edge structure [I. Cha et al., Electron Lett., Vol.
25, pp. 242-243, 1989].

第5図は従来例の進行波型半導体レーザ増幅器の構造
を模式的に示す図であり、1はヘテロ接合より成る活性
層、3はクラッド層、4は活性層1の一方の端面より入
射する光信号、5は活性層1の他方の端面より増幅され
て出射される出力光、IOPは活性層1にキャリアを注入
するための動作電流である。
FIG. 5 schematically shows the structure of a conventional traveling-wave type semiconductor laser amplifier, wherein 1 is an active layer formed of a heterojunction, 3 is a cladding layer, and 4 is incident from one end face of the active layer 1. An optical signal 5 is output light amplified and emitted from the other end face of the active layer 1, and I OP is an operating current for injecting carriers into the active layer 1.

[発明が解決しようとする課題] ところで、進行波型半導体レーザ増幅器の利得が未飽
和利得の値の半分になるときの出力光5のパワーを飽和
出力光パワーP3dBと定義すると、飽和出力光パワーは で示される。(1)式において、hνは光子エネルギ
ー、Agは微分利得、τはキャリア寿命時間、daは活性
層厚、wは活性層幅、ΓTEはTEモードに対する光モード
閉じ込め係数である。第6図にdaTEおよび各モード
閉じ込め係数の活性層厚依存性の計算結果を示してい
る。daTEの値は活性層厚da=0.2μm付近で最小にな
り、活性層厚daの小さい領域では活性層厚daの減少とと
もに急激に増大する。さらに、キャリア寿命はオージェ
効果により注入キャリア密度の増大に伴い急激に減少す
る。モード閉じ込め係数と活性層長Lはキャリア密度Ne
と次の関係にある。
[Problems to be Solved by the Invention] By the way, if the power of the output light 5 when the gain of the traveling wave type semiconductor laser amplifier becomes half the value of the unsaturated gain is defined as the saturated output light power P 3dB , the saturated output light Power is Indicated by (1) In the equation, hv is the photon energy, A g is the differential gain, tau C carrier lifetime, d a is the active layer thickness, w is the width of the active layer, gamma TE is an optical mode confinement factor for the TE mode. FIG. 6 shows the calculation results of the dependence of d a / Γ TE and the confinement coefficient of each mode on the active layer thickness. The value of d a / gamma TE is minimized in the vicinity of the active layer thickness d a = 0.2 [mu] m, with a small active layer thickness d a region increases rapidly with decreasing thickness of the active layer d a. Further, the carrier life sharply decreases as the injected carrier density increases due to the Auger effect. The mode confinement coefficient and the active layer length L depend on the carrier density N e
And the following relationship.

(2)式において、Rは端面反射率、VTEは残留端面反
射に依って生じるファブリー・ペロー・モードのリップ
ル、Noは媒質が透明になるときのキャリア密度である。
活性層厚daを薄くするとモード閉じ込めが減少し、キャ
リア密度が増大してキャリア寿命が減少することになる
ため、飽和出力光パワーP3dBは活性層厚daの減少ととも
に増大する。また、雑音指数Fは F〜2nsp …(3) で与えられる。ここに、反転分布パラメータnspで表される。nspはキャリア密度および利得係数gの増
大に伴い1に近付くため、飽和光パワーと同様にモード
閉じ込め係数の減少により雑音特性も改善できることが
わかる。
In the equation (2), R is the end face reflectivity, VTE is the Fabry-Perot mode ripple caused by residual end face reflection, and No is the carrier density when the medium becomes transparent.
When the active layer thickness da is reduced, the mode confinement decreases, the carrier density increases, and the carrier lifetime decreases. Therefore, the saturation output light power P 3dB increases with the decrease in the active layer thickness da. The noise figure F is given by F で 2n sp (3). Where the population inversion parameter n sp is It is represented by Since n sp approaches 1 as the carrier density and the gain coefficient g increase, it can be seen that the noise characteristics can be improved by reducing the mode confinement coefficient as in the case of the saturated optical power.

一方、TEモードとTMモードの信号利得の差ΔGTE/TMで示される。(5)式において、ΓTE、ΓTMは各々TE、
TMモードに対する光モード閉じ込め係数、αはモード吸
収係数、Lは活性層長、Gsは単一通過利得である。
(5)式より信号利得の偏波面依存性はモード閉じ込め
係数の比に依存していることがわかる。通常の活性層厚
daではモード間の信号利得差が5dB以上になる[T.Saito
h et al.,IEEE J.Quantum Electron.,vol.QE−23,pp.10
10−1020,1987.]。このモード閉じ込めの偏波面依存性
を小さくするには、活性層厚daを大きくすればよいが、
これは飽和・雑音特性の点では好ましくないだけでな
く、動作電流Iopの電流密度も大きくなってしまうとい
う問題があった。
On the other hand, the difference ΔG TE / TM between the signal gains of TE mode and TM mode is Indicated by In equation (5), Γ TE and Γ TM are TE,
The optical mode confinement coefficient for the TM mode, α is the mode absorption coefficient, L is the active layer length, and Gs is the single-pass gain.
Equation (5) shows that the polarization plane dependence of the signal gain depends on the ratio of the mode confinement coefficients. Normal active layer thickness
In da, the signal gain difference between modes becomes 5 dB or more [T. Saito
h et al., IEEE J. Quantum Electron., vol. QE-23, pp. 10
10-1020, 1987.]. In order to reduce the polarization dependence of this mode confinement, the active layer thickness da may be increased.
This is not only unfavorable in terms of the saturation and noise characteristics, but also has a problem that the current density of the operating current Iop increases.

本発明は、上記問題点を解決するために創案されたも
ので、高出力・低雑音・低動作電流密度であり、かつ利
得の偏波面依存性の少ない進行波型半導体レーザ増幅器
を提供することを目的とする。
SUMMARY OF THE INVENTION The present invention has been made in order to solve the above problems, and provides a traveling-wave semiconductor laser amplifier having high output, low noise, low operating current density, and little dependence of gain on the polarization plane. With the goal.

[課題を解決するための手段] 上記の目的を達成するための本発明の進行波型半導体
レーザ増幅器の構成は、 ダブルヘテロ接合から成る活性層を有し、その活性層
の一方の端面を光入射端面とし、他方の端面を光出射端
面として、これらの両端面での反射による共振を抑圧
し、該活性層にそのバンドギャップとほぼ等しい波長の
光信号を該光入射端より入射し、該活性層に電流を注入
して誘導放出効果により上記光信号を増幅する進行波型
半導体レーザ増幅器であって、 前記活性層の増厚方向の少くとも片側に該活性層のバ
ンドキャップより大きいバンドギャップを持つ光導波層
を設け、前記活性層を膜厚が0.11μm以下である薄い層
とした構造を有することを特徴とする。
[Means for Solving the Problems] To achieve the above object, a traveling wave semiconductor laser amplifier according to the present invention has an active layer composed of a double heterojunction, and has one end face of the active layer formed of an optical layer. The incident end face, the other end face as a light emitting end face, suppresses resonance due to reflection at these two end faces, and an optical signal having a wavelength substantially equal to the band gap is incident on the active layer from the light incident end. What is claimed is: 1. A traveling-wave semiconductor laser amplifier for injecting a current into an active layer and amplifying the optical signal by a stimulated emission effect, wherein at least one side of the active layer in a thickness increasing direction has a band gap larger than a band gap of the active layer. And a structure in which the active layer is a thin layer having a thickness of 0.11 μm or less.

[作用] 本発明は、端面反射を抑圧した進行波型半導体レーザ
増幅器において、その活性層の少なくとも片側に光導波
層を設け、この導波層の設置により、活性層厚を厚くす
ることなく、モード閉じ込めの偏波依存性を小さくす
る。また、活性層厚を薄くすることによりキャリア密度
を大きくしても電流密度が大きくならないで済むように
し、低動作電流密度を保持する。さらに、活性層を薄く
したことから高出力・低雑音を満たすことが可能とな
る。
[Operation] The present invention provides a traveling wave semiconductor laser amplifier having suppressed end face reflection, wherein an optical waveguide layer is provided on at least one side of the active layer, and by providing this waveguide layer, the thickness of the active layer can be increased. Decrease the polarization dependence of mode confinement. Further, by reducing the thickness of the active layer, even if the carrier density is increased, the current density does not need to be increased, and a low operating current density is maintained. Further, since the active layer is made thin, high output and low noise can be satisfied.

[実施例] 以下、本発明の実施例を図面に基づいて詳細に説明す
る。
Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings.

第1図は本発明の一実施例の構成を模式的に示す斜視
図である。図において、1はダブルヘテロ接合から成る
層厚da,層長L,層幅Wの活性層、2,2は活性層1の両側に
設けた光導波層、3はクラッド層、4は活性層1の一方
の端面である光入射端面より入射する光信号、5は活性
層1の他方の端面である光出射端面より増幅されて出射
される出力光、Iopは活性層1にキャリアを注入するた
めの動作電流である。上記において、光導波層2,2およ
びクラッド層3は、半導体レーザー媒体を用いて形成す
るが、活性層1にキャリアと光を閉じ込めめるために、
活性層1のバンドギャップより大きいバンドギャップを
持つ媒質を選択する。また、活性層1の両端面即ち光信
号4の光入射端面と光出力5の光出射端面は、これらの
両端面での反射による共振を抑圧して光信号4を増幅す
るために、反射防止膜を形成するなどの手段や対策を講
じる。講導波層2,2は、活性層1の両側に同じ層厚dw/2
で対称に設ける。なお、光導波層2は活性層1の片側に
層厚dwで設けても、以下に述べる本実施例の効果が得ら
れる。
FIG. 1 is a perspective view schematically showing the configuration of one embodiment of the present invention. In the drawing, 1 is an active layer having a layer thickness da, a layer length L, and a layer width W of a double hetero junction, 2, 2 are optical waveguide layers provided on both sides of the active layer 1, 3 is a cladding layer, and 4 is an active layer. optical signal incident from the light incident end face which is one end surface of the 1, 5 output light emitted is amplified from the light emitting end face which is the other end face of the active layer 1, I op is injecting carriers into the active layer 1 Operating current. In the above description, the optical waveguide layers 2 and 2 and the cladding layer 3 are formed using a semiconductor laser medium, but in order to confine carriers and light in the active layer 1,
A medium having a band gap larger than the band gap of the active layer 1 is selected. Both end faces of the active layer 1, that is, the light incident end face of the optical signal 4 and the light emitting end face of the optical output 5 suppress the resonance due to the reflection at these two end faces and amplify the optical signal 4. Take measures and countermeasures such as forming a film. The waveguide layers 2, 2 have the same layer thickness dw / 2 on both sides of the active layer 1.
Are provided symmetrically. Even if the optical waveguide layer 2 is provided on one side of the active layer 1 with a layer thickness dw, the effects of the present embodiment described below can be obtained.

第2図の(a),(b)は活性層に光導波層を設けた
構造(以下SCH(Separate Confinement Heterostructur
e)構造と記す)の屈折率構造図であり、(a)は第1
図のように活性層1の両側に光導波層2を設けた対称両
側SCH構造の場合を示し、(b)は片側SCH構造を示して
いる。各図の横軸はSCH構造の各層厚を示し、縦軸は各
層の屈折率を示している。この図に示すように、光導波
層2の屈折率は活性層1よりも小さくする。これによっ
て、活性層1に光の閉じ込めを可能とする。
2A and 2B show a structure in which an optical waveguide layer is provided on an active layer (hereinafter referred to as SCH (Separate Confinement Heterostructur).
FIG. 3 e is a refractive index structure diagram of FIG.
As shown in the figure, a case of a symmetric double-sided SCH structure in which optical waveguide layers 2 are provided on both sides of an active layer 1 is shown, and FIG. In each figure, the horizontal axis indicates the thickness of each layer of the SCH structure, and the vertical axis indicates the refractive index of each layer. As shown in this figure, the refractive index of the optical waveguide layer 2 is smaller than that of the active layer 1. Thereby, light can be confined in the active layer 1.

以下に、上記のように構成した実施例の作用を述べ
る。
Hereinafter, the operation of the embodiment configured as described above will be described.

本実施例は、活性層1の光入射端面からそのバンドギ
ャップとほぼ等しい波長のレーザ光信号を入射し、動作
電流IOPを流して活性層1にキャリアを注入することに
より誘導放出を生じさせ、反射による共振を抑圧しなが
ら上記の光信号をコヒーレントに増幅して、出力光を光
出射端面より出力する。ここで、本実施例における信号
利得,飽和出力光パワー,雑音指数および動作電流は、
活性層1の層厚だけでなく光導波層2の層厚にも依存性
を示す。
In this embodiment, stimulated emission is caused by injecting a laser light signal having a wavelength substantially equal to the band gap from a light incident end face of the active layer 1 and flowing an operating current IOP to inject carriers into the active layer 1. The optical signal is coherently amplified while suppressing resonance due to reflection, and output light is output from the light emitting end face. Here, the signal gain, the saturation output light power, the noise figure, and the operating current in this embodiment are
The dependence is shown not only on the thickness of the active layer 1 but also on the thickness of the optical waveguide layer 2.

第3図(a),(b),(c),(d)および第4図
(a),(b),(c),(d)は、各々対称両側SCH,
片側SCH構造の場合のTE・TM偏波光に対する信号利得
差,飽和出力光パワー,雑音指数および動作電流の活性
層厚および光導波層厚依存性を示す特性図である。第3
図は対称両側SCH構造の場合を、第4図は片側SCH構造の
場合を示し、それぞれ横軸を活性層厚da〔μm〕とし縦
軸を光導波層厚dw〔μm〕として、(a)は信号利得差
ΔGTE/TM〔dB〕の、(b)は飽和出力光パワーP3dB〔d
Bm〕の、(c)は雑音指数F〔dB〕の、(d)は動作電
流IOP〔mA〕の各層厚依存特性を示している。上記各図
では、第1図および第2図における活性層1の端面反射
率R,活性層長L、信号利得を各々0.01%、300μm、20d
Bとし、波長1.55μmにおける活性層1,光導波層2(バ
ンドギャップ波長1.35μm)、クラッド層3の屈折率を
各々3.524,3.413,3.169とした場合について示してい
る。
FIGS. 3 (a), (b), (c), (d) and FIGS. 4 (a), (b), (c), (d) show symmetrical two-sided SCH,
FIG. 8 is a characteristic diagram showing the signal gain difference, the saturation output light power, the noise figure, and the operating current of the single-sided SCH structure with respect to TE / TM polarized light, depending on the active layer thickness and the optical waveguide layer thickness. Third
The figure shows the case of the symmetric double-sided SCH structure, and FIG. 4 shows the case of the single-sided SCH structure. The horizontal axis represents the active layer thickness da [μm], and the vertical axis represents the optical waveguide layer thickness dw [μm]. Is the signal gain difference ΔG TE / TM [dB], and (b) is the saturated output optical power P 3dB [d
Bm], (c) shows the noise figure F [dB], and (d) shows the layer thickness dependence of the operating current I OP [mA]. In each of the above figures, the end face reflectivity R, active layer length L, and signal gain of the active layer 1 in FIGS. 1 and 2 are 0.01%, 300 μm, and 20 d, respectively.
B, the case where the refractive index of the active layer 1, the optical waveguide layer 2 (bandgap wavelength 1.35 μm), and the refractive index of the cladding layer 3 at the wavelength of 1.55 μm are 3.524, 3.413, and 3.169, respectively.

以上の各特性図から、飽和・雑音特性は光導波層厚に
はあまり依存せず活性層厚を薄くするほど改善でき、信
号利得の偏波面依存性は活性層または光導波層厚を増加
するほど改善できることがわかる。従って、活性層厚は
薄くして導波層厚を厚くすれば、飽和・雑音特性を変え
ずに信号利得の偏波面依存性を低減できる。すなわち、
活性層の片側または両側に光導波層を設けたSCH構造を
用いると、高出力・低雑音を満たすとともにモード閉じ
込め係数を変えずにモードに対する偏波面依存性を小さ
くすることができる。本実施例はこのような作用効果を
活用するものである。上記において、本実施例は活性層
厚を厚くする必要がないため、キャリア密度は大きくし
ても動作電流密度が大きくならないで済む。
From the above characteristic diagrams, the saturation and noise characteristics do not depend much on the thickness of the optical waveguide layer and can be improved as the thickness of the active layer is reduced, and the polarization plane dependence of the signal gain increases the thickness of the active layer or the optical waveguide layer. It can be seen that the better it can be improved. Therefore, if the thickness of the active layer is reduced and the thickness of the waveguide layer is increased, the polarization plane dependence of the signal gain can be reduced without changing the saturation and noise characteristics. That is,
Using an SCH structure in which an optical waveguide layer is provided on one or both sides of the active layer can satisfy high output and low noise and reduce the polarization plane dependence on the mode without changing the mode confinement coefficient. The present embodiment utilizes such an effect. In the above, in this embodiment, it is not necessary to increase the thickness of the active layer, so that even if the carrier density is increased, the operating current density does not need to be increased.

表1は通常の活性層による従来構造と本実施例の片側
SCH構造および両側SCH構造の各特性、すなわち、各構造
のTE・TM偏波光に対する信号利得差,雑音指数,動作電
流(密度)を比較した表である。ここでは活性層長Lを
300μm、飽和出力光パワーP3dBを10dBm一定の条件を比
較している。
Table 1 shows the conventional structure with a normal active layer and one side of this embodiment.
6 is a table comparing characteristics of the SCH structure and the double-sided SCH structure, that is, a signal gain difference, a noise figure, and an operating current (density) of each structure with respect to TE / TM polarized light. Here, the active layer length L is
A comparison is made under the conditions of 300 μm and a saturation output light power P of 3 dB and a constant of 10 dBm.

この表1から、片側SCH構造,対称両側のSCH構造のい
ずれも信号利得の偏波依存性が改善でき、動作電流密度
は従来例とほぼ同じであることがわかる。特に、対称両
側SCH構造の場合には優れた特性が期待できる。
From Table 1, it can be seen that both the single-sided SCH structure and the symmetrical SCH structure can improve the polarization dependence of the signal gain, and the operating current density is almost the same as the conventional example. In particular, in the case of a symmetric double-sided SCH structure, excellent characteristics can be expected.

[発明の効果] 以上の説明で明らかなように、本発明の進行波型半導
体レーザ増幅器によれば、端面反射による共振を抑圧し
てレーザ光信号を増幅する活性層の両側に光導波層を設
けることにより、低動作電流密度・低偏波面依存性を保
持しながら高出力・低雑音を満たすことができる。
[Effects of the Invention] As is apparent from the above description, according to the traveling wave type semiconductor laser amplifier of the present invention, the optical waveguide layers are provided on both sides of the active layer for suppressing the resonance due to the end face reflection and amplifying the laser light signal. By providing this, high output and low noise can be satisfied while maintaining low operating current density and low polarization plane dependency.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明の一実施例の構造を模式的に示す斜視
図、第2図(a),(b)は対称両側SCH構造と片側SCH
構造の屈折率構造図、第3図(a),(b),(c),
(d)は対称両側SCH構造の場合のTE・TM偏波光に対す
る信号利得差,飽和出力光パワー,雑音指数および動作
電流の活性層厚および光導波層厚依存性を示す特性図、
第4図(a),(b),(c),(d)は片側SCH構造
の場合のTE・TM偏波光に対する信号利得差,飽和出力光
パワー,雑音指数および動作電流の活性層厚および光導
波層厚依存性を示す特性図、第5図は従来例の模式的な
構造図、第6図は各偏波面に対するモード閉じ込め係数
およびその比と活性層厚の関係を示す図である。 1……活性層、2……光導波層、3……クラッド層、4
……光信号、5……出力光。
FIG. 1 is a perspective view schematically showing the structure of one embodiment of the present invention, and FIGS. 2 (a) and 2 (b) show a symmetrical double-sided SCH structure and a single-sided SCH.
Fig. 3 (a), (b), (c),
(D) is a characteristic diagram showing the dependence of the signal gain difference, the saturation output optical power, the noise figure, and the operating current on the active layer thickness and the optical waveguide layer thickness for TE / TM polarized light in the case of a symmetric double-sided SCH structure.
FIGS. 4 (a), (b), (c) and (d) show the signal gain difference with respect to TE / TM polarized light, the saturation output optical power, the noise figure and the operating current of the operating current in the case of a single-sided SCH structure. FIG. 5 is a characteristic diagram showing the dependency of the optical waveguide layer thickness, FIG. 5 is a schematic structural diagram of a conventional example, and FIG. 6 is a diagram showing a mode confinement coefficient with respect to each polarization plane and a relationship between the ratio and the active layer thickness. 1 ... active layer, 2 ... optical waveguide layer, 3 ... clad layer, 4
…… optical signal, 5 …… output light.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】ダブルヘテロ接合から成る活性層を有し、
その活性層の一方の端面を光入射端面とし、他方の端面
を光出射端面として、これらの両端面での反射による共
振を抑圧し、該活性層にそのバンドギャップとほぼ等し
い波長の光信号を該光入射端より入射し、該活性層に電
流を注入して誘導放出効果により上記光信号を増幅する
進行波型半導体レーザ増幅器であって、 前記活性層の増厚方向の少くとも片側に該活性層のバン
ドギャップより大きいバンドギャップを持つ光導波層を
設け、前記活性層を膜厚が0.11μm以下である薄い層と
した構造を有することを特徴とする進行波型半導体レー
ザ増幅器。
1. An active layer comprising a double heterojunction,
One end face of the active layer is used as a light incident end face, and the other end face is used as a light emitting end face to suppress resonance due to reflection at these two end faces, and to transmit an optical signal having a wavelength substantially equal to the band gap to the active layer. A traveling wave type semiconductor laser amplifier which is incident from the light incident end, injects a current into the active layer and amplifies the optical signal by a stimulated emission effect, wherein the active layer has at least one side in a thickness increasing direction. A traveling-wave semiconductor laser amplifier, comprising: an optical waveguide layer having a band gap larger than that of an active layer; and a structure in which the active layer is a thin layer having a thickness of 0.11 μm or less.
JP1148614A 1989-06-12 1989-06-12 Traveling-wave semiconductor laser amplifier Expired - Lifetime JP2718995B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1148614A JP2718995B2 (en) 1989-06-12 1989-06-12 Traveling-wave semiconductor laser amplifier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1148614A JP2718995B2 (en) 1989-06-12 1989-06-12 Traveling-wave semiconductor laser amplifier

Publications (2)

Publication Number Publication Date
JPH0312982A JPH0312982A (en) 1991-01-21
JP2718995B2 true JP2718995B2 (en) 1998-02-25

Family

ID=15456723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1148614A Expired - Lifetime JP2718995B2 (en) 1989-06-12 1989-06-12 Traveling-wave semiconductor laser amplifier

Country Status (1)

Country Link
JP (1) JP2718995B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007221172A (en) * 1999-06-03 2007-08-30 Fujitsu Ltd Polarization-independent semiconductor optical amplifier

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02185084A (en) * 1989-01-11 1990-07-19 Nec Corp Semiconductor laser type optical amplifier
JPH02234485A (en) * 1989-03-08 1990-09-17 Canon Inc optical amplifier

Also Published As

Publication number Publication date
JPH0312982A (en) 1991-01-21

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