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JP2802013B2 - Ceramic joining method - Google Patents
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JP2802013B2 - Ceramic joining method - Google Patents

Ceramic joining method

Info

Publication number
JP2802013B2
JP2802013B2 JP5070530A JP7053093A JP2802013B2 JP 2802013 B2 JP2802013 B2 JP 2802013B2 JP 5070530 A JP5070530 A JP 5070530A JP 7053093 A JP7053093 A JP 7053093A JP 2802013 B2 JP2802013 B2 JP 2802013B2
Authority
JP
Japan
Prior art keywords
ceramic
joining
sintered body
joined
diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP5070530A
Other languages
Japanese (ja)
Other versions
JPH06279131A (en
Inventor
俊広 吉田
敬一郎 渡邊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority to JP5070530A priority Critical patent/JP2802013B2/en
Priority to DE4410767A priority patent/DE4410767A1/en
Publication of JPH06279131A publication Critical patent/JPH06279131A/en
Application granted granted Critical
Publication of JP2802013B2 publication Critical patent/JP2802013B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/001Joining burned ceramic articles with other burned ceramic articles or other articles by heating directly with other burned ceramic articles
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658Atmosphere during thermal treatment
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32Ceramic
    • C04B2237/36Non-oxidic
    • C04B2237/365Silicon carbide
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32Ceramic
    • C04B2237/36Non-oxidic
    • C04B2237/368Silicon nitride
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/704Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/76Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/80Joining the largest surface of one substrate with a smaller surface of the other substrate, e.g. butt joining or forming a T-joint
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/84Joining of a first substrate with a second substrate at least partially inside the first substrate, where the bonding area is at the inside of the first substrate, e.g. one tube inside another tube
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64Burning or sintering processes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Products (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、接合部の気密性及び接
合強度に優れるセラミックス接合体を容易にかつ安定し
て得ることができるセラミックスの接合方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for joining ceramics, which can easily and stably obtain a ceramic joined body having excellent airtightness and joint strength at a joint.

【0002】[0002]

【従来の技術】セラミックスは、その成分組成が酸化
物、非酸化物に拘らず、高度の耐熱・断熱性が有り、絶
縁性、導電性、磁気的・誘電的性質等の電気的・電子的
機能を有し、また、耐摩耗性等の機械的性質も優れ、各
種構造物の材料として既に使用され、研究開発されてい
る。セラミックスを機械部品材料や構造物材料として使
用する場合、種々の形状の機械部品や構造部材が要求さ
れ、また各部品や部材の組み合わせも求められることに
なり、一体成形により製造されるものは別として、あら
ゆる部分においてセラミックスを接合固定する必要が生
じる。
2. Description of the Related Art Ceramics have a high degree of heat and heat insulation irrespective of the composition of oxides and non-oxides, and have electrical and electronic properties such as insulation, conductivity, magnetic and dielectric properties. It has a function and also has excellent mechanical properties such as abrasion resistance, and has already been used as a material for various structures and has been researched and developed. When ceramics are used as mechanical part materials or structural materials, mechanical parts and structural members of various shapes are required, and combinations of parts and members are also required. As a result, it is necessary to bond and fix ceramics in all parts.

【0003】各種の部品・部材の中でも平板状部材と他
形状の部材とを組み合わせた接合体は、機械部品や構造
部材として多く使用され、平板に孔を穿ち管状体や丸棒
などを貫通固定して使う例も多い。例えば、出願人が特
開昭60−62592号公報で示したような工業用炉の
セラミック熱交換器には多数のセラミック管状体を板状
体に固定した部材が使用されている。
[0003] Among various parts and members, a joined body in which a plate-shaped member and a member having another shape are combined is often used as a mechanical part or a structural member. There are many examples to use. For example, in a ceramic heat exchanger of an industrial furnace as disclosed in Japanese Patent Application Laid-Open No. 60-62592 by the applicant, a member in which a number of ceramic tubular bodies are fixed to a plate-like body is used.

【0004】上記したように、熱交換器の部品・部材と
してセラミックスを適用しようとする試みも多くなさ
れ、セラミック管状体をセラミック板状体に形成された
孔部に挿入し固定させる方法としては、特開昭60−6
2592号で出願人が開示したように圧縮スプリングを
利用し、機械的な押圧により球面接合する方法、あるい
はホウケイ酸ガラス等を成分とする無機接合材をペース
ト状に調製し、これを接合部に塗布して加熱接合する方
法等が一般に行われている。また、孔部を有する板状体
を成形体、仮焼体などの未焼結体とし、これに焼結体の
管状体を挿入して焼成を行い、両者の焼成収縮率の差を
利用して一体に接合する方法も知られている。
As described above, many attempts have been made to use ceramics as parts and members of a heat exchanger. As a method of inserting a ceramic tubular body into a hole formed in a ceramic plate and fixing the same, there are two methods. JP-A-60-6
As disclosed by the applicant in No. 2592, a method of spherically joining by mechanical pressing using a compression spring, or preparing an inorganic joining material containing borosilicate glass or the like as a paste, and applying this to a joint portion A method of coating and heating and bonding is generally used. In addition, a plate having a hole is formed into a green body such as a green body or a calcined body, and a tubular body of a sintered body is inserted into the green body and fired, and the difference in firing shrinkage between the two is utilized. Also known is a method of joining them together.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、上記接
合方法のうち、圧縮スプリングを利用して球面接合する
方法においては、使用時の熱応力による破損や、膨張や
収縮により球面接合部に間隙が生じて十分な気密性が保
てない等の問題があった。また、無機接合材を用いた接
合方法においては、接合時に接合材をペースト状に調製
して塗布する必要があるため、作業性が悪いうえに、気
孔やクラック等の接合欠陥が発生し易く、接合部の気密
性及び強度に問題があった。
However, among the above-mentioned joining methods, in the method of joining spherical surfaces using a compression spring, a gap is formed in the spherical joint portion due to breakage due to thermal stress during use and expansion or contraction. And it cannot maintain sufficient airtightness. In addition, in the joining method using an inorganic joining material, it is necessary to prepare and apply the joining material in a paste form at the time of joining, so that workability is poor and joining defects such as pores and cracks are easily generated, There were problems with the airtightness and strength of the joint.

【0006】焼成収縮率差を利用した接合方法において
は、上記接合材の調製等の煩雑な作業は不要であるが、
良好な接合強度や気密性を得るためには、管状体の外径
から何も挿入されていない状態で加熱焼成した場合の板
状体の穿設孔径を引いた値(いわゆる締め代)の設定が
重要となる。ところが、従来においては、この締め代の
設定値について特に言及した技術は知られておらず、気
密性及び接合強度に優れる所望の接合体を、必ずしも安
定して製造できたわけではなかった。
[0006] In the joining method utilizing the difference in firing shrinkage, a complicated operation such as preparation of the above-mentioned joining material is not required.
In order to obtain good bonding strength and airtightness, set the value (so-called interference) by subtracting the diameter of the perforated hole of the plate when heating and firing with nothing inserted from the outer diameter of the tube. Is important. However, in the related art, a technique specifically mentioning the set value of the interference is not known, and a desired bonded body having excellent airtightness and bonding strength has not always been stably manufactured.

【0007】本発明は、このような従来の状況に鑑みて
なされたものであり、その目的とするところは、円筒形
状又は円柱形状を有するセラミックス体と、これらが挿
入され接合されるための孔部を有するセラミックス体と
の焼成収縮率差を利用した接合において、接合部の気密
性及び接合強度に優れる接合体を容易かつ安定して得る
ことができる接合方法を提供することにある。
The present invention has been made in view of such a conventional situation, and an object thereof is to provide a ceramic body having a cylindrical or cylindrical shape and a hole for inserting and joining these ceramic bodies. It is an object of the present invention to provide a joining method capable of easily and stably obtaining a joined body excellent in hermeticity and joining strength of a joined portion in joining utilizing a difference in firing shrinkage rate with a ceramic body having a joint.

【0008】[0008]

【課題を解決するための手段】 本発明によれば、穿設
孔を有する第1セラミックス未焼結体と、円筒形状又は
円柱形状を有する第2セラミックス焼結体とを、該第1
セラミックス未焼結体の穿設孔に該第2セラミックス焼
結体を挿入し、接合材を使用しない状態で加熱焼成し、
一体的に接合する接合方法において、該第1セラミック
ス未焼結体及び該第2セラミックス焼結体が窒化珪素又
は炭化珪素であり、該第1セラミックス未焼結体の穿設
孔径が、何も挿入されていない状態で加熱焼成した場
合、該第2セラミックス焼結体の外径より0.1〜1.
0mm小さくなるように設定し、接合部からのリークを防
止したことを特徴とするセラミックスの接合方法が提供
される。
According to the present invention, a first ceramics unsintered body having a perforated hole and a second ceramics sintered body having a cylindrical shape or a columnar shape are separated from each other by the first ceramics sintered body.
The second ceramic sintered body is inserted into the perforated hole of the ceramic non-sintered body, and is heated and fired without using a bonding material.
In the joining method for joining integrally, the first ceramic
The green body and the second ceramic body are silicon nitride or
Is silicon carbide, and the diameter of the perforated hole of the first ceramics unsintered body is 0.1 to 1.
Set to be 0 mm smaller to prevent leakage from the joint
The present invention provides a method for joining ceramics, which is stopped .

【0009】[0009]

【作用】本発明は、上記のように構成され、焼成収縮率
の小さい第2セラミックス焼結体を、焼成収縮率の大き
い第1セラミックスの穿設孔に挿入し、この焼成収縮率
差を利用して一体に接合する方法において、該第1セラ
ミックス未焼結体の穿設孔径が、何も挿入されていない
状態で加熱焼成した場合に、該第2セラミックス焼結体
の外径より0.1〜1.0mm小さくなるように設定した
こと、すなわち、いわゆる締め代を0.1〜1.0mmの
範囲に限定したことを特徴とするものである。この限定
範囲は、発明者らの種々の実験により得られたものであ
り、この範囲においては、接合強度、気密性ともに優れ
た接合体を安定して得られることが確認された。
According to the present invention, the second ceramics sintered compact having a small firing shrinkage is inserted into a perforated hole of the first ceramic having a high firing shrinkage, and the difference in firing shrinkage is utilized. In this method, when the first ceramic green body is heated and fired in a state where nothing is inserted, the diameter of the perforated hole of the first ceramic green body is larger than the outer diameter of the second ceramic sintered body by 0.3 mm. It is characterized in that it is set to be smaller by 1 to 1.0 mm, that is, the so-called interference is limited to the range of 0.1 to 1.0 mm. This limited range was obtained by various experiments by the inventors, and in this range, it was confirmed that a bonded body excellent in both bonding strength and airtightness could be stably obtained.

【0010】これに対し、締め代が0.1mm未満では、
接合力が弱く、また接合部に間隙が生じ易い。この間隙
が接合部の上端から下端に通じる貫通孔となっている場
合には、気密性が著しく劣るものとなる。また、締め代
が1.0mmを超えると、クラック等の接合部欠陥が生じ
ることとなる。
On the other hand, if the interference is less than 0.1 mm,
The bonding force is weak, and a gap is likely to be formed at the bonding portion. If this gap is a through hole extending from the upper end to the lower end of the joint, the airtightness will be extremely poor. Further, if the interference exceeds 1.0 mm, joint defects such as cracks will occur.

【0011】 本発明において、第1セラミックス未焼
結体及び第2セラミックス焼結体に用いるセラミックス
としては、エンジン、産業機械及び熱交換器等に使用す
る場合を考慮して、高強度・高耐熱性の窒化珪素や炭化
珪素を採用する。また、第1セラミックス未焼結体の形
状、厚み、大きさは特に制限されず、使用目的、条件に
あわせて選択すればよいが、例えば熱交換器に用いる場
合、高圧ガス流れ方向に対し、接合部の接合距離が長い
ほどシール効果が大きくなるので、3mm以上の厚みを有
することが好ましい。第1セラミックス未焼結体の穿設
孔数にも特に制限はなく、1つの穿設孔のみを有する単
孔板であっても、複数の穿設孔を有する多孔板であって
もよい。更に、締め代0.1〜1.0mmの範囲にある限
り、第1セラミックス未焼結体の穿設孔の孔径や配置、
第2セラミックス焼結体の外径や長さにも特に制限はな
い。第1セラミックス未焼結体の穿設孔は、成形時に同
時に設けてもよいし、成形後に穿つようにしてもよい。
In the present invention, the ceramics used for the first ceramic green body and the second ceramic sintered body
As such, silicon nitride or silicon carbide having high strength and high heat resistance is adopted in consideration of use in engines, industrial machines, heat exchangers, and the like . The shape, thickness, and size of the first ceramic green body are not particularly limited, and may be selected according to the purpose of use and conditions. For example, when used in a heat exchanger, Since the sealing effect increases as the joining distance of the joining portion increases, it is preferable to have a thickness of 3 mm or more. The number of perforated holes in the first ceramic green body is not particularly limited, and may be a single-hole plate having only one perforated hole or a perforated plate having a plurality of perforated holes. Furthermore, as long as the interference is in the range of 0.1 to 1.0 mm, the diameter and arrangement of the perforated holes of the first ceramic green body,
There is no particular limitation on the outer diameter or length of the second ceramic sintered body. The perforation hole of the first ceramic green body may be provided at the same time as molding or may be formed after molding.

【0012】[0012]

【実施例】以下、本発明を実施例に基づいて更に詳細に
説明するが、本発明はこれらの実施例に限定されるもの
ではない。
EXAMPLES Hereinafter, the present invention will be described in more detail with reference to examples, but the present invention is not limited to these examples.

【0013】(実施例1)窒化珪素原料粉末に焼結助剤
としてY23を1重量%、MgOを1重量%、ZrO2
を0.5重量%(いずれも外配量)添加し、これをアト
ライターで混合粉砕した後、乾燥造粒して得た原料を用
いて、プレス成形により直径20mm、厚さ10mmの円盤
状成形体を得た。これに、直径7mmの孔を1ヶ打抜きに
より形成し、110℃で10時間乾燥した後、空気中5
00℃で5時間バインダ仮焼して第1セラミックス未焼
結体を作製した。また、第1セラミックス未焼結体の作
製で用いたものと同じ原料を用いて、押出成形により円
柱棒を成形し、第1セラミックス未焼結体におけると同
様の条件で乾燥及びバインダ仮焼を行った後、窒素雰囲
気中1650℃で1時間焼成して直径6mm、長さ50mm
の第2セラミックス焼結体を得た。
(Example 1) 1% by weight of Y 2 O 3 , 1% by weight of MgO, 1% by weight of ZrO 2
Was added and added in an amount of 0.5% by weight (all of which were externally added). The mixture was pulverized by an attritor, and then dried and granulated. A molded article was obtained. A hole having a diameter of 7 mm was formed by punching, and dried at 110 ° C. for 10 hours.
The binder was calcined at 00 ° C. for 5 hours to produce a first ceramic green body. In addition, a cylindrical rod was formed by extrusion using the same raw materials used in the production of the first ceramics green body, and dried and binder calcined under the same conditions as in the first ceramics green body. After performing, baking at 1650 ° C for 1 hour in a nitrogen atmosphere, diameter 6mm, length 50mm
Was obtained.

【0014】次いで、図1に示すように、第1セラミッ
クス未焼結体2の穿設孔4に第2セラミックス焼結体3
を、第2セラミックス未焼結体3の端部が第1セラミッ
クス未焼結体2の一表面に合致するように挿入し、この
状態で、窒素雰囲気中1650℃で加熱焼成して接合一
体化し、図2に示すような接合体1を得た。なお、この
接合において、締め代(第2セラミックス焼結体の外径
−何も挿入されていない状態で加熱焼成した場合の加熱
焼成後における第1セラミック未焼結体の穿設孔径)は
0.2mmとした。
Next, as shown in FIG. 1, the second ceramic sintered body 3 is inserted into the perforation hole 4 of the first ceramic green body 2.
Is inserted so that the end of the second ceramics unsintered body 3 coincides with one surface of the first ceramics unsintered body 2, and in this state, is heated and fired at 1650 ° C. in a nitrogen atmosphere to be joined and integrated. Thus, a joined body 1 as shown in FIG. 2 was obtained. In this connection, the interference (the outer diameter of the second ceramic sintered body—the diameter of the perforated hole of the first ceramic unsintered body after the heating and sintering in the case where the heating and sintering in a state where nothing is inserted) is 0 in this joining. .2 mm.

【0015】得られた接合体について、図3に示す気密
性試験装置を用い接合部の気密性を調べた。図3におい
て、接合体1は、水槽6に設置された保持治具7により
保持され、この保持治具7と接合体1との間は、Oリン
グ9より封止されている。そして、この状態で、7kg
/cm2のエアを通気路10を介して接合部に負荷し、
接合部から漏出したエアをメスシリンダーにより補集
し、その容量を測定した。
With respect to the obtained joined body, the airtightness of the joined portion was examined using an airtightness test apparatus shown in FIG. In FIG. 3, the joined body 1 is held by a holding jig 7 installed in a water tank 6, and the space between the holding jig 7 and the joined body 1 is sealed by an O-ring 9. And in this state, 7kg
/ Cm 2 air is applied to the joint through the air passage 10,
Air leaked from the joint was collected by a measuring cylinder, and the volume was measured.

【0016】更に、図4に示す接合強度試験装置を用い
て接合部の強度を測定した。図4において、接合体1を
回転機11に固定し、接合体1の頂部にロードセル12
を介して荷重を負荷し、その回転片持ち梁曲げ強度を測
定した。なお、ロードセル12の最大負荷加重は500
kgである。また、外観観察により、肉眼で観察可能な
接合部欠陥の有無を調べた。それぞれの結果を表1に示
す。
Further, the bonding strength was measured using a bonding strength test apparatus shown in FIG. In FIG. 4, the joined body 1 is fixed to a rotating machine 11, and a load cell 12 is mounted on the top of the joined body 1.
, And the bending strength of the rotating cantilever was measured. Note that the maximum load weight of the load cell 12 is 500
kg. In addition, the presence or absence of a joint defect observable with the naked eye was examined by appearance observation. Table 1 shows the results.

【0017】(実施例2)締め代を0.6mmとした以外
は実施例1と同様にして接合体の作製及び評価試験を行
った。結果を表1に示す。
(Example 2) A joint was produced and an evaluation test was performed in the same manner as in Example 1 except that the interference was set to 0.6 mm. Table 1 shows the results.

【0018】(実施例3)締め代を0.1mmとした以外
は実施例1と同様にして接合体の作製及び評価試験を行
った。結果を表1に示す。
Example 3 A joined body was produced and an evaluation test was performed in the same manner as in Example 1 except that the interference was set to 0.1 mm. Table 1 shows the results.

【0019】(実施例4)締め代を1.0mmとした以外
は実施例1と同様にして接合体の作製及び評価試験を行
った。結果を表1に示す。
(Example 4) A bonded body was produced and an evaluation test was performed in the same manner as in Example 1 except that the interference was set to 1.0 mm. Table 1 shows the results.

【0020】(実施例5)第1セラミックス未焼結体
は、実施例1と同じ原料・成形法・穿設孔形成法を用い
て得た直径20mm、厚さ3mm、穿設孔数1ヶの円盤状成
形体を、実施例1と同じ条件で乾燥・バインダ仮焼した
後、さらに窒素雰囲気中1350℃で3時間の仮焼を施
して得た。また、第2セラミック焼結体は、その形状を
外径6mm、内径4mm、長さ50mmのチューブ状とした以
外は実施例1と同様にして得た。得られた第1セラミッ
クス未焼結体と第2セラミック焼結体を、締め代を0.
4mmとした以外は実施例1と同様にして接合し、接合体
の評価試験を行った。結果を表1に示す。
(Example 5) A first ceramic green body was obtained by using the same raw material, molding method, and perforated hole forming method as in Example 1, and had a diameter of 20 mm, a thickness of 3 mm, and one perforated hole. Was dried and calcined under the same conditions as in Example 1 and then calcined at 1350 ° C. for 3 hours in a nitrogen atmosphere. The second ceramic sintered body was obtained in the same manner as in Example 1 except that the shape was a tube having an outer diameter of 6 mm, an inner diameter of 4 mm, and a length of 50 mm. The obtained first ceramic unsintered body and the second ceramic sintered body are set with a tightening margin of 0.
Joining was performed in the same manner as in Example 1 except that the thickness was 4 mm, and an evaluation test of the joined body was performed. Table 1 shows the results.

【0021】(実施例6)第1セラミックス未焼結体
は、実施例1と同じ原料を用い押出成形により得た90
×90mm、厚さ20mmの角板状成形体に打ち抜きにより
20ヶの孔を穿設後、実施例1と同じ条件で乾燥・バイ
ンダ仮焼して得た。また、第2セラミック焼結体は、そ
の形状を外径6mm、内径4mm、長さ50mmのチューブ状
とし、焼成後その接合面に切削加工を施した以外は実施
例1と同様にして得た。得られた、第1セラミックス未
焼結体と第2セラミック焼結体を、締め代を0.4mmと
した以外は実施例1と同様にして接合し、接合体の評価
試験を行った。結果を表1に示す。
Example 6 A first ceramic green body was obtained by extrusion molding using the same raw materials as in Example 1.
Twenty holes were punched out of a square plate-shaped body having a size of 90 mm and a thickness of 20 mm, and then dried and calcined under the same conditions as in Example 1. The second ceramic sintered body was obtained in the same manner as in Example 1 except that the shape of the second ceramic sintered body was a tube having an outer diameter of 6 mm, an inner diameter of 4 mm, and a length of 50 mm. . The obtained first ceramic unsintered body and the second ceramic sintered body were joined in the same manner as in Example 1 except that the interference was set to 0.4 mm, and an evaluation test of the joined body was performed. Table 1 shows the results.

【0022】(実施例7)第1セラミックス未焼結体
は、実施例1と同じ原料・成形法・穿設孔形成法を用い
て得た直径20mm、厚さ2mm、穿設孔数1ヶの円盤状成
形体を、実施例1と同じ条件で乾燥・バインダ仮焼して
得た。また、第2セラミック焼結体は、実施例1同様に
して得た。得られた第1セラミックス未焼結体と第2セ
ラミック焼結体を、締め代を0.6mmとした以外は実施
例1と同様にして接合し、接合体の評価試験を行った。
結果を表1に示す。
(Example 7) A first ceramic green body was obtained by using the same raw material, molding method, and perforated hole forming method as in Example 1, and had a diameter of 20 mm, a thickness of 2 mm, and one perforated hole. Was obtained by drying and calcining the binder under the same conditions as in Example 1. The second ceramic sintered body was obtained in the same manner as in Example 1. The obtained first ceramic green body and the second ceramic sintered body were joined in the same manner as in Example 1 except that the interference was 0.6 mm, and an evaluation test of the joined body was performed.
Table 1 shows the results.

【0023】(実施例8)炭化珪素原料粉末に焼結助剤
としてB4Cを1.5重量%、Cを1重量%(いずれも
外配量)添加し、これをアトライターで混合粉砕した
後、乾燥造粒して得た原料を用いて、プレス成形により
60×60mm、厚さ10mmの角板状の成形体を得た。こ
れに、直径6.7mmの孔を7ヶ打抜きにより形成し、1
10℃で10時間乾燥した後、窒素雰囲気中500℃で
5時間バインダ仮焼して第1セラミックス未焼結体を作
製した。また、第1セラミックス未焼結体で用いたもの
と同じ原料を用いて、押出成形により直径6mm、長さ5
0mmの円柱棒を成形し、第1セラミックス未焼結体にお
けると同様の条件で乾燥及びバインダ仮焼を行った後、
アルゴン雰囲気中2000℃で3時間焼成して第2セラ
ミックス焼結体を得た。得られた焼結体の接合面には、
切削加工を施した。これらを、アルゴン雰囲気中200
0℃で3時間加熱焼成して接合一体化した。なお、この
接合において、締め代は0.4mmとした。得られた接合
体について、実施例1と同様に評価試験を行った。結果
を表1に示す。
Example 8 1.5% by weight of B 4 C and 1% by weight of C were added to a raw material powder of silicon carbide as a sintering aid (all external amounts), and these were mixed and pulverized with an attritor. After that, a raw material obtained by dry granulation was used to obtain a square plate-shaped molded body having a size of 60 × 60 mm and a thickness of 10 mm by press molding. In this, a hole having a diameter of 6.7 mm was formed by punching seven holes.
After drying at 10 ° C. for 10 hours, the binder was calcined in a nitrogen atmosphere at 500 ° C. for 5 hours to produce a first ceramic green body. Also, the same raw material as that used for the first ceramic green body was extruded to a diameter of 6 mm and a length of 5 mm.
After forming a cylindrical rod of 0 mm and drying and calcining the binder under the same conditions as in the first ceramic green body,
It was fired at 2000 ° C. for 3 hours in an argon atmosphere to obtain a second ceramic sintered body. On the joining surface of the obtained sintered body,
Cutting was performed. These were placed in an argon atmosphere for 200
Heating and sintering at 0 ° C. for 3 hours were performed to join and integrate. In this connection, the interference was set to 0.4 mm. An evaluation test was performed on the obtained joined body in the same manner as in Example 1. Table 1 shows the results.

【0024】(比較例1)第1セラミックス未焼結体
は、実施例1と同じ原料・成形法・穿設孔形成法を用い
て得た直径20mm、厚さ5mm、穿設孔数1ヶの円盤状成
形体を、実施例1と同じ条件で乾燥・バインダ仮焼して
得た。また、第2セラミック焼結体は、焼成後その接合
面に切削加工を施した以外は実施例1と同様にして得
た。得られた第1セラミックス未焼結体と第2セラミッ
ク焼結体を、締め代を0.05mmとした以外は実施例1
と同様にして接合し、接合体の評価試験を行った。結果
を表1に示す。
(Comparative Example 1) A first ceramic green body was obtained by using the same raw material, molding method, and perforated hole forming method as in Example 1, and had a diameter of 20 mm, a thickness of 5 mm, and one bored hole. Was obtained by drying and calcining the binder under the same conditions as in Example 1. The second ceramic sintered body was obtained in the same manner as in Example 1 except that the joint surface was cut after firing. Example 1 Example 1 was repeated except that the interference between the obtained first ceramic unsintered body and the second ceramic sintered body was 0.05 mm.
In the same manner as described above, and an evaluation test of the joined body was performed. Table 1 shows the results.

【0025】(比較例2)締め代を1.2mmとした以外
は、比較例1と同様にして接合体の作製及び評価試験を
行った。結果を表1に示す。
(Comparative Example 2) A joined body was manufactured and evaluated in the same manner as in Comparative Example 1 except that the interference was 1.2 mm. Table 1 shows the results.

【0026】(比較例3)実施例1と同様にして得た第
1セラミックス未焼結体を、更に窒素雰囲気中1650
℃で1時間焼成して焼結体とした。また、第2セラミッ
ク焼結体は、その形状を外径6mm、内径4mm、長さ50
mmのチューブ状とし、焼成後その接合面に切削加工を施
した以外は実施例1と同様にして得た。次いで、それぞ
れの接合面にCeO2:34.5重量%、MgO:2
7.6重量%、SiO2:13.8重量%、SrCO3
10.3重量%、Al23:6.9重量%、Si34
6.9重量%の組成からなる接合材をペースト状にして
塗布し、接合面をあわせた後、窒素雰囲気中1650℃
で3時間焼成して接合体を得た。得られた接合体につい
て、実施例1と同様にして評価試験を行った。結果を表
1に示す。
(Comparative Example 3) The first ceramic green body obtained in the same manner as in Example 1 was further subjected to 1650 in a nitrogen atmosphere.
C. for 1 hour to obtain a sintered body. The second ceramic sintered body has an outer diameter of 6 mm, an inner diameter of 4 mm, and a length of 50 mm.
It was obtained in the same manner as in Example 1 except that the tube was formed into a mm-shaped tube, and the joined surface was cut after firing. Next, CeO 2 : 34.5% by weight, MgO: 2
7.6% by weight, SiO 2 : 13.8% by weight, SrCO 3 :
10.3 wt%, Al 2 O 3: 6.9 wt%, Si 3 N 4:
A bonding material having a composition of 6.9% by weight is applied in the form of a paste, and the bonding surfaces are adjusted.
For 3 hours to obtain a joined body. An evaluation test was performed on the obtained joined body in the same manner as in Example 1. Table 1 shows the results.

【0027】[0027]

【表1】 [Table 1]

【0028】表1に示すとおり、本発明にかかる実施例
の接合体は、接合部の気密性、接合部強度のいずれにも
優れたものであった(ただし、実施例4及び実施例6は
多管形状のため接合部強度の測定は不実施)。これに対
し、締め代が本発明の下限値である0.1mmを下回る比
較例1、本発明の上限値である1.0mmを上回る比較例
2、及び接合材を用いて接合した比較例3の各接合体
は、接合部に欠陥が生じ、気密性、接合部強度ともに劣
るものとなった。
As shown in Table 1, the joined body of the embodiment according to the present invention was excellent in both the hermeticity of the joint and the strength of the joint. No measurement of joint strength due to multi-tube shape). On the other hand, Comparative Example 1 in which the interference is below the lower limit of 0.1 mm of the present invention, Comparative Example 2 in which the upper limit of the present invention exceeds 1.0 mm, and Comparative Example 3 in which the joining material is used for bonding In each of the bonded bodies, a defect occurred in the bonded portion, and both the airtightness and the bonded portion strength were poor.

【0029】[0029]

【発明の効果】以上説明したように、本発明は、円筒形
状又は円柱形状を有するセラミックス体と、これらが挿
入され接合されるための孔部を有するセラミックス体と
の焼成収縮率差を利用した接合において、優れた接合体
を得るための重要な因子となる締め代を所定範囲に限定
することで、接合部の気密性及び接合強度に優れる接合
体を容易にかつ安定して得ることができる。
As described above, the present invention utilizes the difference in firing shrinkage between a ceramic body having a cylindrical or cylindrical shape and a ceramic body having a hole for inserting and joining the ceramic body. In joining, by limiting the interference, which is an important factor for obtaining an excellent joined body, to a predetermined range, it is possible to easily and stably obtain a joined body having excellent airtightness and joining strength of a joined portion. .

【図面の簡単な説明】[Brief description of the drawings]

【図1】実施例における接合前の第1セラミックス未焼
結体と第2セラミックス焼結体との組み合わせ状態を示
す断面説明図である。
FIG. 1 is an explanatory cross-sectional view showing a combined state of a first ceramic green body and a second ceramic sintered body before joining in an example.

【図2】本発明により得られるセラミック接合体の一例
を示す側面図である。
FIG. 2 is a side view showing an example of a ceramic joined body obtained by the present invention.

【図3】気密性試験装置を示す説明図である。FIG. 3 is an explanatory view showing an airtightness test device.

【図4】接合強度試験装置を示す説明図である。FIG. 4 is an explanatory view showing a bonding strength test device.

【符号の説明】[Explanation of symbols]

1 接合体 2 第1セラミックス未焼結体 3 第2セラミックス焼結体 4 穿設孔 6 水槽 7 保持治具 9 Oリング 10 通気路 11 回転機 12 ロードセル DESCRIPTION OF SYMBOLS 1 Joined body 2 1st ceramic unsintered body 3 2nd ceramics sintered body 4 Drilled hole 6 Water tank 7 Holding jig 9 O-ring 10 Vent path 11 Rotary machine 12 Load cell

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 穿設孔を有する第1セラミックス未焼結
体と、円筒形状又は円柱形状を有する第2セラミックス
焼結体とを、該第1セラミックス未焼結体の穿設孔に該
第2セラミックス焼結体を挿入し、接合材を使用しない
状態で加熱焼成し、一体的に接合する接合方法におい
て、該第1セラミックス未焼結体及び該第2セラミック
ス焼結体が窒化珪素又は炭化珪素であり、該第1セラミ
ックス未焼結体の穿設孔径が、何も挿入されていない状
態で加熱焼成した場合、該第2セラミックス焼結体の外
径より0.1〜1.0mm小さくなるように設定し、接合
部からのリークを防止したことを特徴とするセラミック
スの接合方法。
A first ceramic unsintered body having a perforated hole and a second ceramic sintered body having a cylindrical or columnar shape are inserted into the perforated hole of the first ceramic unsintered body. (2) In a joining method of inserting a ceramic sintered body, heating and firing without using a joining material, and integrally joining, the first ceramic unsintered body and the second ceramic
When the sintered body is silicon nitride or silicon carbide and the diameter of the perforated hole of the first ceramic unsintered body is heated and fired in a state where nothing is inserted, the outer diameter of the second ceramic sintered body is set to more 0.1~1.0mm decreases, bonding
A method for joining ceramics, wherein leakage from a part is prevented .
【請求項2】 該第1セラミックス未焼結体の厚みが3
mm以上である請求項1記載の接合方法。
2. The first ceramic green body having a thickness of 3
The joining method according to claim 1, wherein the diameter is not less than mm.
【請求項3】 該第1セラミックス未焼結体が複数の穿
設孔を有する多孔板である請求項1又は2記載の接合方
法。
3. A bonding method according to claim 1 or 2 wherein said first ceramic green body is porous plate having a plurality of drilled holes.
JP5070530A 1993-03-29 1993-03-29 Ceramic joining method Expired - Fee Related JP2802013B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP5070530A JP2802013B2 (en) 1993-03-29 1993-03-29 Ceramic joining method
DE4410767A DE4410767A1 (en) 1993-03-29 1994-03-28 Process for producing a ceramic composite article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5070530A JP2802013B2 (en) 1993-03-29 1993-03-29 Ceramic joining method

Publications (2)

Publication Number Publication Date
JPH06279131A JPH06279131A (en) 1994-10-04
JP2802013B2 true JP2802013B2 (en) 1998-09-21

Family

ID=13434187

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (2)

Country Link
JP (1) JP2802013B2 (en)
DE (1) DE4410767A1 (en)

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JP2019023158A (en) * 2012-03-22 2019-02-14 サン−ゴバン セラミックス アンド プラスティクス,インコーポレイティド Extended length tube structures

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