JP2821799B2 - Method and apparatus for producing and recovering fine powder - Google Patents
Method and apparatus for producing and recovering fine powderInfo
- Publication number
- JP2821799B2 JP2821799B2 JP17212590A JP17212590A JP2821799B2 JP 2821799 B2 JP2821799 B2 JP 2821799B2 JP 17212590 A JP17212590 A JP 17212590A JP 17212590 A JP17212590 A JP 17212590A JP 2821799 B2 JP2821799 B2 JP 2821799B2
- Authority
- JP
- Japan
- Prior art keywords
- adherend
- fine particle
- particle powder
- temperature
- prevention wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000843 powder Substances 0.000 title claims description 55
- 238000000034 method Methods 0.000 title claims description 14
- 239000010419 fine particle Substances 0.000 claims description 50
- 239000000463 material Substances 0.000 claims description 50
- 238000001704 evaporation Methods 0.000 claims description 30
- 230000002265 prevention Effects 0.000 claims description 29
- 230000008020 evaporation Effects 0.000 claims description 18
- 239000011261 inert gas Substances 0.000 claims description 18
- 239000007789 gas Substances 0.000 claims description 12
- 238000002207 thermal evaporation Methods 0.000 claims description 8
- 238000000926 separation method Methods 0.000 claims description 5
- 238000011084 recovery Methods 0.000 description 13
- 238000004140 cleaning Methods 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 238000007790 scraping Methods 0.000 description 6
- 108091008695 photoreceptors Proteins 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000012860 organic pigment Substances 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- FKASFBLJDCHBNZ-UHFFFAOYSA-N 1,3,4-oxadiazole Chemical compound C1=NN=CO1 FKASFBLJDCHBNZ-UHFFFAOYSA-N 0.000 description 1
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 241000904500 Oxyspora paniculata Species 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- PGEHNUUBUQTUJB-UHFFFAOYSA-N anthanthrone Chemical compound C1=CC=C2C(=O)C3=CC=C4C=CC=C5C(=O)C6=CC=C1C2=C6C3=C54 PGEHNUUBUQTUJB-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003227 poly(N-vinyl carbazole) Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Glanulating (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、電子写真感光体の製造に当って用いる有機
光導電体微粒子粉体などを得る場合における微粒子粉体
の生成・回収方法と装置に係り、特にガス中蒸発法によ
り微粒子粉体を生成させこれを回収する方法とその装置
に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method and an apparatus for producing / recovering fine particles of organic photoconductor used for producing an electrophotographic photoreceptor. More particularly, the present invention relates to a method and an apparatus for generating and recovering fine powder by a gas evaporation method.
ガス中蒸発法とは、真空容器内に導入された不活性ガ
ス雰囲気中で種々の物質を加熱・蒸発・昇華させ、得ら
れる蒸気分子が不活性ガス分子と衝突しながら徐々に冷
却され分子同士が凝集し、微粒子粉体を形成させ、その
微粒子粉体を回収する方法である。In the gas evaporation method, various substances are heated, evaporated and sublimated in an inert gas atmosphere introduced into a vacuum vessel, and the resulting vapor molecules are gradually cooled while colliding with the inert gas molecules, and the molecules are cooled. Are aggregated to form fine particle powder, and the fine particle powder is collected.
電子写真感光体は、導電性基体上に感光層を形成した
基本構造をもっている。この感光層を形成するための光
導電物質としては、従来、セレンを用いたものが一般的
であり、その他無機光導電物質として硫化カドミウムや
酸化亜鉛等も知られている。An electrophotographic photosensitive member has a basic structure in which a photosensitive layer is formed on a conductive substrate. As a photoconductive material for forming the photosensitive layer, one using selenium has conventionally been generally used, and cadmium sulfide, zinc oxide and the like are also known as other inorganic photoconductive materials.
しかし、近年では有機光導電物質を用いることによっ
て、成膜性の向上を図り、塗工によって生産することに
より生産性を高める試みがなされている。また、有機光
導電物質を用いると、使用する染料や顔料等の増感剤を
選択すると、感色性を自在にコントロールできる利点が
ある。有機光導電物質としては、ポリ−N−ビニルカル
バゾールや2,5−ビス(P−ジエチルアミノフェニル)
−1,3,4−オキサジアゾール等が知られている。However, in recent years, attempts have been made to improve the film forming property by using an organic photoconductive substance, and to increase the productivity by producing by coating. When an organic photoconductive substance is used, there is an advantage that color sensitivity can be freely controlled by selecting a sensitizer such as a dye or a pigment to be used. Organic photoconductive materials include poly-N-vinylcarbazole and 2,5-bis (P-diethylaminophenyl)
1,3,4-oxadiazole and the like are known.
他方、近年、μmまたはÅオーダーの微粒子粉体に関
しての研究が種々なされている。かかる微粒子粉体は、
その比表面積が増大することによって、高い活性度を示
すことに着目して生成させるものである。On the other hand, in recent years, various studies have been made on fine particle powder of the order of μm or Å. Such fine particle powder,
It is generated by paying attention to exhibiting high activity by increasing the specific surface area.
この場合、中でもガス中蒸発法が注目を浴びている。
従来、この方法は専ら無機または金属材料の微粒子粉体
を得る場合について研究の指向性があったが、たとえば
「機能材料」1987年6月号、44〜49頁に記載のように、
有機物微粒子粉体を得る場合にも研究がなされている。In this case, among others, the gas evaporation method is receiving attention.
Heretofore, this method had a direction of research on obtaining a fine particle powder of an inorganic or metallic material exclusively. For example, as described in "Functional Materials", June 1987, pages 44 to 49,
Research has also been conducted on obtaining organic fine particle powder.
何れにしても、従来、ガス中蒸発し被付着体に付着し
た微粒子粉体の回収に際しては、第7図または第8図の
ようにしていた。In any case, conventionally, the recovery of the fine particle powder that has evaporated in the gas and adhered to the adherend has been performed as shown in FIG. 7 or FIG.
すなわち、その第1の方法は、第7図(a)のよう
に、蒸発性材料Mを収容する容器50、被付着体としての
平板または曲板51および必要により落下粉体の回収容器
52を真空チャンバー(図示せず)内に配設し、この真空
チャンバー内に不活性ガスを送入するとともに、その内
部を真空状態に減圧している状態で、容器50およびまた
は蒸発性材Mを加熱して蒸発させ、この蒸発した材料を
前記曲板51に付着させ、その後(b)のように、曲板51
表面の付着材料層をブラシ53などにより掻き落として回
収箱54に回収するものである。That is, the first method is, as shown in FIG. 7 (a), a container 50 for accommodating the evaporable material M, a flat or curved plate 51 as an adherend, and a container for collecting fallen powder as required.
52 is placed in a vacuum chamber (not shown), and while the inert gas is fed into the vacuum chamber and the inside thereof is evacuated to a vacuum state, the container 50 and / or the evaporative material M Is heated and evaporated, and the evaporated material is adhered to the curved plate 51, and thereafter, as shown in FIG.
The adhesion material layer on the surface is scraped off by the brush 53 or the like and collected in the collection box 54.
第2の方法は、第8図(a)のように、被付着体とし
てプラスチックウェブ60をリール61から繰り出しながら
リール62に巻き取る過程で、そのウェブ60の表面に、第
1の方法と同様な蒸発態様で、蒸発性材料Mを付着さ
せ、その回収に際しては、(b)のように、ウェブ60を
巻き取ったリール62からウェブ60を逆に巻き出し、その
過程で表面の付着した蒸発性材料Mをブラシなどにより
掻き取り回収箱54に回収するものである。In the second method, as shown in FIG. 8 (a), a plastic web 60 as an adherend is wound on a reel 62 while being fed from the reel 61, and the surface of the web 60 is formed on the surface of the web 60 in the same manner as the first method. The evaporating material M is adhered in a suitable evaporating manner, and when the evaporating material M is collected, the web 60 is unwound from the reel 62 on which the web 60 has been wound up as shown in FIG. The conductive material M is scraped by a brush or the like and collected in the collection box 54.
また、従来、蒸発性材料Mの容器50と被付着体、すな
わち曲板51またはウェブ60との間には、壁類などにより
規制するものはなかった。Conventionally, there has been no restriction between the container 50 of the evaporable material M and the adherend, that is, the curved plate 51 or the web 60, by walls or the like.
しかし、従来のように、蒸発源から蒸発した材料Mを
自由に被付着体に付着させる場合、被付着体以外の個所
に飛散することが多く、蒸発源の温度より真空チャンバ
ー壁やその内部に配設される部材は低温であるため、飛
散した材料が真空チャンバーの内壁に、あるいは他の内
部部材に熱沈着(付着)して、製品として回収できず、
もって微粒子粉体の回収率が悪いことが判明した。ま
た、真空チャンバー壁や内部部材に付着した微粒子粉体
は、次のバッチの生産を開始する前に、これを清掃、除
去する必要があり、その清掃に多大な手間を要し、生産
性の低下を招いていた。However, when the material M evaporated from the evaporation source is freely adhered to the adherend as in the related art, the material M often scatters at places other than the adherend, and the temperature of the evaporation source may cause the material M to evaporate on the vacuum chamber wall or inside thereof. Since the disposed members are at a low temperature, the scattered materials are thermally deposited (adhered) to the inner wall of the vacuum chamber or to other internal members, and cannot be collected as a product.
It turned out that the recovery rate of the fine particle powder was poor. In addition, fine particle powder adhering to the vacuum chamber walls and internal members must be cleaned and removed before starting the next batch production, which requires a great deal of time and effort for cleaning. Had led to a decline.
したがって、本発明の課題は、微粒子粉体の飛散およ
び熱沈着に伴う回収性の悪化を防止して、回収率を高め
るとともに、真空チャンバー内壁の清掃負担を低減する
ことにある。Accordingly, an object of the present invention is to prevent the deterioration of the recoverability due to the scattering and thermal deposition of the fine particle powder, increase the recovery rate, and reduce the burden of cleaning the inner wall of the vacuum chamber.
上記課題は、方法的には、ガス中蒸発法により蒸発源
から蒸発した微粒子粉体を被付着体に付着させ、その被
付着体に付着した微粒子粉体を除去して回収する方法に
おいて、 前記蒸発源から被付着体に向かって蒸発した微粒子粉
体の被付着体へ向かう方向の周りに飛散防止壁を設け、
かつ不活性ガスの導路を前記飛散防止壁内に連通させた
ことで解決できる。The above-mentioned subject is, in a method, a method in which fine particle powder evaporated from an evaporation source is attached to an adherend by an in-gas evaporation method, and the fine particle powder attached to the adherend is removed and collected. A scattering prevention wall is provided around the direction toward the adherend of the fine particle powder evaporated from the evaporation source toward the adherend,
In addition, the problem can be solved by connecting the passage for the inert gas to the inside of the scattering prevention wall.
この場合、前記飛散防止壁の少なくとも内面の温度は
微粒子粉体の熱沈着温度を超える温度とし、また、被付
着体の温度は、蒸発源温度および飛散防止壁温度未満で
あり、かつ微粒子粉体の熱沈着を充分生じる温度である
ことが好ましい。さらに好ましくは、可能なかぎり低温
であるのが良く、たとえば液体窒素温度まで冷却するの
が望ましい。In this case, the temperature of at least the inner surface of the scattering prevention wall is a temperature exceeding the thermal deposition temperature of the fine particle powder, and the temperature of the adherend is lower than the evaporation source temperature and the scattering prevention wall temperature, and It is preferable that the temperature be sufficient to cause thermal deposition. More preferably, the temperature is as low as possible, for example, it is desirable to cool to the temperature of liquid nitrogen.
さらに、装置的には、ガス中蒸発法により蒸発源から
蒸発した微粒子粉体を連続的に移動する被付着体に付着
させ、その被付着体に付着した微粒子粉体を除去して回
収する装置において、 前記蒸発源から被付着体に向かう方向の周りに飛散防
止壁が設けられ、その端縁と被付着体との離間距離が、
被付着体と蒸発性材料との距離の1/2以下であり、他方
で不活性ガスの導路が飛散防止壁内に連通されているこ
とで解決できる。Further, as an apparatus, an apparatus for attaching fine particle powder evaporated from an evaporation source by an in-gas evaporation method to a continuously moving adherend, and removing and collecting the fine powder attached to the adherend. In, a scattering prevention wall is provided around the direction from the evaporation source toward the adherend, the separation distance between the edge and the adherend,
This can be solved by being less than half the distance between the adherend and the evaporative material and, on the other hand, the passage of the inert gas communicating with the scattering prevention wall.
本発明に従って、蒸発源から被付着体に向かって蒸発
した微粒子粉体の被付着体へ向かう方向の周りに飛散防
止壁を設けると、微粒子粉体の被付着体以外への方向へ
の飛散が防止されるので、真空チャンバーの内壁面や他
の部材への熱沈着を防止できるので、専ら蒸発した微粒
子粉体が被付着体表面のみに付着するようになり、微粒
子粉体の回収率(回収した微粒子粉体の量/仕込んだ原
料量)が高まる。たとえば、後述の実施例にも示すよう
に、従来の回収率は20〜50%程度であったのに対して、
本発明によると、約95%程度まで大幅に高まる。According to the present invention, by providing a scattering prevention wall around the direction of the fine particle powder evaporated from the evaporation source toward the adherend, the scattering of the fine particle powder in the direction other than the adherend is prevented. This prevents heat deposition on the inner wall surface of the vacuum chamber and other members, so that the evaporated fine particle powder adheres only to the surface of the adherend, and the recovery rate of the fine particle powder (recovery) (The amount of the fine particle powder obtained / the amount of the charged raw material) is increased. For example, as shown in the examples described later, while the conventional recovery rate was about 20 to 50%,
According to the present invention, it is greatly increased to about 95%.
また、本発明においては、不活性ガスの導路を飛散防
止壁内に連通させてあるので、導入した不活性ガスの被
付着体に向かう流れに微粒子粉体が乗るので、一層被付
着体への付着割合が高まる。Further, in the present invention, since the passage of the inert gas is communicated with the inside of the scattering prevention wall, the fine particle powder rides on the flow of the introduced inert gas toward the adherend. Increases the adhesion rate.
かくして、真空チャンバー内壁への微粒子粉体の付着
量がきわめて少なくなるので、バッチ毎清掃する必要が
なくなるか、もしくは清掃するにしても、きわめて容易
に清掃することができ、生産性が高まる。Thus, the amount of the fine particle powder adhering to the inner wall of the vacuum chamber is extremely small, so that it is not necessary to perform cleaning for each batch, or even if cleaning is performed, cleaning can be performed very easily, thereby increasing productivity.
以下本発明をさらに詳説する。 Hereinafter, the present invention will be described in more detail.
第1図および第2図は本発明の第1実施例を示したも
ので、真空チャンバー1内に、蒸発性材料Mの収容容器
2、外面円筒の回転ドラム3およびこれに臨む一部が開
口した回収箱4が配設されている。真空チャンバー1に
はアルゴンやヘリウムなどの不活性ガスGの供給管5、
真空ポンプ6に連なる排気管7がそれぞれ連通してお
り、真空チャンバー1には真空度を検出するための圧力
計8が取付られている。回転ドラム3は収容容器2の上
方に位置して配置されている。また、回収箱4は熱遮蔽
材料により形成され、収容容器2および回転ドラム3へ
の蒸発性材料Mの付着部と熱的に遮断されている。FIGS. 1 and 2 show a first embodiment of the present invention. In a vacuum chamber 1, a container 2 for an evaporable material M, an outer cylindrical rotating drum 3, and a part facing the same are open. A collection box 4 is provided. The vacuum chamber 1 has a supply pipe 5 for an inert gas G such as argon or helium,
The exhaust pipes 7 connected to the vacuum pump 6 are connected to each other, and the vacuum chamber 1 is provided with a pressure gauge 8 for detecting the degree of vacuum. The rotating drum 3 is located above the container 2. Further, the collection box 4 is formed of a heat shielding material, and is thermally shielded from a portion where the evaporable material M adheres to the storage container 2 and the rotating drum 3.
他方、回収箱4内には、ブラシロール9Aの周囲に多数
のブラシ毛9Bを有する外面円筒ブラシ9が、回収箱4の
開口を介して回転ドラム3表面に接触するように、回転
ドラム3の回転軸と平行な回転軸をもって配設されてい
る。さらに、回転ドラム3は実施例では時計方向に図示
しない駆動モータにより回転されるようになっていると
ともに、ブラシ9はブラシロール9Aが図示しない駆動モ
ータにより同時計方向に回転するようになっており、こ
の場合は、回転ドラム3とブラシ9とが向流に接触す
る。ブラシ9の回転方向は逆にすることも可能である。On the other hand, in the collection box 4, the outer cylindrical brush 9 having a large number of brush bristles 9 </ b> B around the brush roll 9 </ b> A is brought into contact with the surface of the rotation drum 3 via the opening of the collection box 4. It is provided with a rotation axis parallel to the rotation axis. Further, in the embodiment, the rotating drum 3 is rotated clockwise by a drive motor (not shown), and the brush 9 is configured such that a brush roll 9A is rotated clockwise by a drive motor (not shown). In this case, the rotating drum 3 and the brush 9 come in countercurrent contact. The rotation direction of the brush 9 can be reversed.
また、ブラシ9のブラシ毛9Bの回転域において、振り
落とし板10が回収箱4に固定された状態で設けられてい
る。In the rotation range of the bristles 9B of the brush 9, the swing-off plate 10 is provided in a state fixed to the collection box 4.
さらに、蒸発性材料Mの収容容器2はセラミックなど
の耐熱性材料で形成しておくのが好ましく、この収容容
器2およびまたは直接蒸発性材料Mがヒーター加熱、誘
導加熱、レーザー加熱、抵抗加熱あるいは電子銃加熱な
どによりその材料Mが充分蒸発する温度に加熱される。
また、その際、回転ドラム3は真空チャンバー1内の温
度にしておく他、好ましくは冷却、たとえば10℃以下に
冷却しておく。この冷却には、回転ドラム3内に冷却用
熱媒体たとえば冷却水を通すことで可能である。また、
液体窒素により冷却することがより好適である。Further, the container 2 of the evaporable material M is preferably formed of a heat-resistant material such as a ceramic, and the container 2 and / or the directly evaporable material M are heated by heating, induction heating, laser heating, resistance heating, or the like. The material M is heated to a temperature at which the material M is sufficiently evaporated by heating the electron gun or the like.
At that time, the rotating drum 3 is kept at a temperature in the vacuum chamber 1 and preferably cooled, for example, to 10 ° C. or less. This cooling can be performed by passing a cooling heat medium, such as cooling water, through the rotating drum 3. Also,
More preferably, cooling with liquid nitrogen.
一方、本発明においては、収容容器2から被付着体す
なわち回転ドラム3に延在して蒸発した微粒子粉体の回
転ドラム3へ向かう方向以外の飛散を防止するための飛
散防止壁11が設けられている。第1図の飛散防止壁11の
上端は、回転ドラム3に近接している。また、この飛散
防止壁11に、加熱ヒータ12が取り付けられ、飛散防止壁
11を加熱するようにしてある。On the other hand, in the present invention, a scattering prevention wall 11 is provided to prevent the scattering of the evaporated fine particle powder in a direction other than the direction toward the rotating drum 3 which extends from the storage container 2 to the adherend, that is, the rotating drum 3. ing. The upper end of the scattering prevention wall 11 shown in FIG. A heater 12 is attached to the scatter prevention wall 11, and the scatter prevention wall 11 is attached.
11 is to be heated.
さらに、不活性ガスGの吹込み管5は飛散防止壁11で
囲まれる部分の内部に連通しており、この内部に吹き込
まれた不活性ガスGは、下方より蒸発してきた材料Mの
蒸気分子と衝突を繰り返しながら微粒子を形成するとと
もに、真空ポンプ6の吸引力により、蒸発して上昇して
いる微粒子粉体を同伴しながら、回転ドラム3近傍まで
到り、自らは飛散防止壁11の上端と回転ドラム3との隙
間から真空チャンバー1内に逃げた後、その外部に排出
される。Further, the blowing pipe 5 for the inert gas G communicates with the inside of the portion surrounded by the scattering prevention wall 11, and the inert gas G blown into the inside is filled with vapor molecules of the material M evaporated from below. The particles reach the vicinity of the rotating drum 3 while entraining the fine particles evaporating and rising by the suction force of the vacuum pump 6 by the suction force of the vacuum pump 6. After escaping into the vacuum chamber 1 through a gap between the rotating drum 3 and the vacuum chamber 1, the air is discharged to the outside.
このように構成された装置において、真空チャンバー
1内を真空ポンプ6により減圧して高真空にした後、飛
散防止壁11内に不活性ガスを送入し、好ましくは0.01〜
50Torrに保つ。この状態で、蒸発性材料Mに対して加熱
すると、そのガス中蒸発が生じ、蒸発した材料Mは、回
転している回転ドラム3の表面に連続的に付着する。こ
のとき、実施例のように、不活性ガスが飛散防止壁11内
に吹き込まれるので、蒸発してわずかな時点で不活性ガ
スによる冷却作用を受けるとともに、不活性ガスの上昇
に同伴することにより、回転ドラム3表面への指向性が
増す。In the apparatus configured as described above, the inside of the vacuum chamber 1 is depressurized by the vacuum pump 6 to a high vacuum, and then an inert gas is fed into the scattering prevention wall 11, preferably from 0.01 to
Keep at 50 Torr. When the evaporative material M is heated in this state, the gas evaporates, and the evaporated material M is continuously attached to the surface of the rotating drum 3 that is rotating. At this time, as in the embodiment, since the inert gas is blown into the scattering prevention wall 11, the inert gas evaporates and is cooled by the inert gas at a short time, and accompanied by the rise of the inert gas. Thus, the directivity to the surface of the rotating drum 3 increases.
かくして、回転ドラム3表面に付着した材料Mは、接
触部において向流的に接触するブラシ9により掻き取ら
れ回収箱4内に回収される。また、ブラシ毛9Bに付着し
た材料Mについては、掻き落とし板10に毛先が接触する
ので、同様に掻き取られる。材料Mが掻き取られ裸にな
った回転ドラム3の表面には次の新たな材料が付着され
る。このようにして、回転ドラム3の表面において、材
料Mの付着および掻き取りが連続的になされる。Thus, the material M adhered to the surface of the rotating drum 3 is scraped off by the brush 9 contacting countercurrently at the contact portion and is collected in the collection box 4. Further, the material M adhered to the brush bristles 9B is scraped off similarly because the bristle tips come into contact with the scraping plate 10. The next new material is adhered to the surface of the rotating drum 3 that has been stripped and stripped of the material M. In this way, the attachment and scraping of the material M is continuously performed on the surface of the rotating drum 3.
したがって、回転ドラム3の表面に付着した材料は速
やかに、再び材料加熱用熱源からの輻射熱を受けること
なく掻き取られるので、従来の第1法のように、熱によ
る劣化(熱ダメージ)がなく、良質な微粒子粉体を得る
ことができる。蒸発付着から掻き取りまでの時間は、た
とえば回転ドラム3の回転速度を調節することで設定で
きる。Therefore, the material adhering to the surface of the rotating drum 3 is quickly scraped off again without receiving the radiant heat from the heat source for heating the material, so that there is no deterioration (thermal damage) due to heat as in the first conventional method. And high quality fine particle powder can be obtained. The time from evaporation attachment to scraping can be set, for example, by adjusting the rotation speed of the rotating drum 3.
回収箱4に回収された微粒子粉体は、ある程度の量と
なった時点で、ガス中蒸発操作を終了して、真空チャン
バー1を開放して取り出される。When the amount of the fine particle powder recovered in the recovery box 4 reaches a certain amount, the operation of evaporating in gas is terminated, and the vacuum chamber 1 is opened to be taken out.
第3図は変形例を示したもので、回転ドラム3に対し
て、複数図示例では2つのブラシ9X、9Yを配設したもの
である。この場合、ブラシ9Yによる掻き取り力をブラシ
9Xの掻き取り力より大きくすることができる。FIG. 3 shows a modification, in which a plurality of brushes 9X and 9Y are arranged on the rotating drum 3 in a plurality of illustrated examples. In this case, the scraping force of brush 9Y is
Can be greater than 9X scraping force.
ブラシ毛9Bの材料、植設密度、高さ、太さなどは適宜
選定できる。材質としては、通常金属繊維を用いるが、
カーボン繊維なども用いることができる。回転ドラム3
の材質としては、適宜のものを用いることができるが、
通常、金属製のものを用いることができる。The material, planting density, height, thickness, and the like of the brush bristles 9B can be appropriately selected. As a material, usually metal fibers are used,
Carbon fibers and the like can also be used. Rotating drum 3
As for the material of, appropriate materials can be used,
Usually, a metal thing can be used.
他方、回転ドラム3に付着した微粒子粉体を回転ドラ
ム3の表面から除去して回収する手段としては、上記例
のように、ブラシ方式によることなく、たとえば第4図
に示す掻き落としブレード91による方式や、第5図に示
す拭き落としウェブ92による方式なども採用できる。拭
き落としウェブ92による場合、ウェブ92に付着した微粒
子粉体は、巻取後にウェブ92から回収される。On the other hand, as a means for removing and collecting the fine particle powder adhering to the rotating drum 3 from the surface of the rotating drum 3, for example, a scraping blade 91 shown in FIG. A method or a method using the wiping web 92 shown in FIG. 5 can be adopted. In the case of the wiping-off web 92, the fine particle powder adhering to the web 92 is recovered from the web 92 after winding.
また、被付着体としては、上記例のように、回転ドラ
ムのように、被付着体を連続的に回転させながら微粒子
粉体を付着させ、一方で連続的に除去するのが、微粒子
粉体の熱劣化を少なくする上で好ましいが、第7図や第
8図に示す従来例の被付着体をそのまま用いることがで
きる。Further, as the adherend, as in the above-described example, the fine powder is attached while continuously rotating the adherend, and the fine powder is continuously removed while rotating the adherend continuously. Although it is preferable in order to reduce the thermal deterioration of the substrate, the conventional adherend shown in FIGS. 7 and 8 can be used as it is.
本発明において、飛散防止壁11の上端は、被付着体、
実施例では回転ドラム3に必ずしも近接していることを
必須とするものでない。すなわち、第2図のように、飛
散防止壁11の上端と回転ドラム3との離間距離lが、回
転ドラム3と材料Mとの離間距離Lに対して、1/2を超
えるものであるときは、蒸発した微粒子粉体が飛散防止
壁11の存在により指向性を示し、飛散する割合がきわめ
て少なくなるからである。しかし、一般にはその離間距
離lは、20mm以下が望ましい。In the present invention, the upper end of the scattering prevention wall 11 is an adherend,
In the embodiment, it is not always necessary to be close to the rotating drum 3. That is, as shown in FIG. 2, when the distance l between the upper end of the scattering prevention wall 11 and the rotary drum 3 is more than 1/2 of the distance L between the rotary drum 3 and the material M. This is because the evaporated fine particle powder exhibits directivity due to the presence of the scattering prevention wall 11, and the rate of scattering becomes extremely small. However, it is generally desirable that the distance l be equal to or less than 20 mm.
ところで、飛散防止壁11の少なくとも内面の温度は、
たとえば加熱ヒータ12により微粒子粉体の熱沈着温度を
超える温度とすることが熱沈着を防止する上で好まし
い。熱沈着(TheramalPrecipitation)とは、熱泳動現
象により蒸発微粒子が壁近傍における温度勾配により壁
に付着(沈着)する現象である。By the way, the temperature of at least the inner surface of the scattering prevention wall 11 is
For example, it is preferable to set the temperature to be higher than the thermal deposition temperature of the fine particle powder by the heater 12 in order to prevent thermal deposition. Thermal deposition (TheramalPrecipitation) is a phenomenon in which evaporated fine particles adhere (deposit) to a wall due to a temperature gradient near the wall due to a thermophoretic phenomenon.
また、被付着体の温度は、蒸発源温度(蒸発性材料温
度)および飛散防止壁11の温度未満であり、かつ微粒子
粉体が充分熱沈着する温度以下である範囲内において、
可能な限り低温であり、もって蒸発源温度と被付着体と
の間に大きな熱勾配を採るのが望まれる。In addition, the temperature of the adherend is less than the temperature of the evaporation source temperature (the temperature of the evaporative material) and the temperature of the scattering prevention wall 11, and is not more than the temperature at which the fine particle powder is sufficiently thermally deposited.
It is desired that the temperature be as low as possible and that a large thermal gradient be established between the evaporation source temperature and the adherend.
このような温度の設定は、基本的には、対象の材料の
種類に依存するので、これに応じて適切に設定される。Since the setting of such a temperature basically depends on the type of the target material, it is appropriately set accordingly.
上記各例では、蒸発性材料を収容容器にバッチ的に供
給したが、真空チャンバー内の加熱容器へスクリューフ
ィーダーなどにより連続的に供給するなどすれば大量の
蒸発処理が可能である。In each of the above examples, the evaporable material is supplied to the storage container in a batch manner, but a large amount of evaporation can be performed by continuously supplying the evaporable material to the heating container in the vacuum chamber by a screw feeder or the like.
本発明において、目的の微粒子粉体としては、10〜数
万Å、特に10〜数千Åの超微粒子を得る場合において好
適に適用できる。また、微粒子粉体の種類としては、無
機材料、金属材料の他、有機材料であってもよい。特
に、本発明者らは、有機感光体を得る場合の有機顔料、
とりわけアンスアンスロン系顔料を得る場合に最適であ
ることを確認済である。In the present invention, the target fine particle powder can be suitably applied when obtaining ultrafine particles of 100 to several tens of thousands, particularly ten to several thousand of particles. The type of the fine particle powder may be an inorganic material, a metal material, or an organic material. In particular, the present inventors, an organic pigment when obtaining an organic photoreceptor,
In particular, it has been confirmed that it is optimal for obtaining an anthranthrone pigment.
有機感光体は、導電性基体上に、有機光導電体粒子
を、分散機によってバインダー樹脂中に分散したものや
その他の層を塗布することにより一般的に得ることがで
きる。The organic photoreceptor can be generally obtained by applying organic photoconductor particles dispersed in a binder resin by a disperser or other layers on a conductive substrate.
この場合、最終的に得ようとする感光体としては、導
電性基体上に、有機光導電体粒子(顔料)を電荷発生材
料として電荷輸送材料中に分散させた単一層型感光体
と、導電性基体上に、電荷発生材料層を形成しその上に
電荷輸送材料層を形成した機能分離型感光体とがある。
本発明は、これら両者の形態の感光体の製造における微
粒子粉体を得る場合に適している。In this case, the photoconductor finally obtained includes a single-layer photoconductor in which organic photoconductor particles (pigment) are dispersed in a charge transport material as a charge generation material on a conductive substrate; There is a function-separated type photoreceptor in which a charge generating material layer is formed on a conductive substrate and a charge transporting material layer is formed thereon.
The present invention is suitable for obtaining fine particle powder in the production of both types of photoconductors.
次に実施例を示し本発明の効果を明らかにする。 Next, examples will be shown to clarify the effects of the present invention.
(実施例1) 第1図の装置により、ガス中蒸発を行った。(Example 1) Evaporation in gas was performed by the apparatus shown in FIG.
電子写真用有機感光体を製造するために用いる有機顔
料微粒子粉体を生成・回収した。この有機顔料として
は、4,10−ジブロモアンスアンスロンを用い、真空チャ
ンバーをヘリウムガス雰囲気下に置き、かつ10-1Torrに
減圧し、材料を300〜350℃に加熱し真空蒸発させ第1図
法に従って微粒子粉体を得た。なお、材料Mと回転ドラ
ム3表面との離間距離Lは、95mm、飛散防止壁11と回転
ドラム3との離間距離lは10mmとした。Organic pigment fine-particle powder used for manufacturing an organic photoreceptor for electrophotography was generated and collected. As this organic pigment, 4,10-dibromoanthran is used, the vacuum chamber is placed under a helium gas atmosphere, the pressure is reduced to 10 -1 Torr, the material is heated to 300 to 350 ° C., and the material is evaporated in vacuum to obtain To obtain a fine particle powder. The distance L between the material M and the surface of the rotating drum 3 was 95 mm, and the distance l between the scattering prevention wall 11 and the rotating drum 3 was 10 mm.
その結果、熱劣化がない微粒子粉体を約95%の回収率
をもって回収できた。As a result, fine powder without thermal degradation was recovered with a recovery rate of about 95%.
他方、1バッチ毎、真空チャンバー内の清掃を行うこ
となく、単に蒸発源の残渣の片付けおよび新原料の仕込
みのみを行い、5回以上の連続的操作を繰り返したが、
回収した各操作回ごとの微粒子粉体の品位に差異は認め
られなかった。On the other hand, for each batch, without cleaning the inside of the vacuum chamber, only cleaning of the residue of the evaporation source and preparation of new raw materials were performed, and a continuous operation of 5 times or more was repeated.
No difference was found in the quality of the collected fine particle powder for each operation.
(比較例1) 飛散防止壁が設けないことを除いて、実施例と同一に
して微粒子粉体の回収率を調べたところ、約45%であっ
た。さらに、一回の操作の後に、真空チャンバー内を点
検してみたところ、その内壁に多量の微粒子粉体の付着
がみられ、次回の操作に移るためには、これを除去清掃
することが必要であることが明らかに認められた。(Comparative Example 1) The recovery rate of the fine particle powder was examined in the same manner as in the example except that the scattering prevention wall was not provided, and it was about 45%. Furthermore, after one operation, the inside of the vacuum chamber was inspected, and a large amount of fine particle powder was found to adhere to the inner wall, and it was necessary to remove and clean it before moving on to the next operation. Was clearly recognized.
(比較例2) 他方、比較例1と同一の条件で、材料Mと回転ドラム
3表面との離間距離Lを種々変更したところ、第6図の
ように、回収率が離間距離Lに大きく依存することが判
明した。(Comparative Example 2) On the other hand, when the separation distance L between the material M and the surface of the rotary drum 3 was variously changed under the same conditions as in Comparative Example 1, the recovery rate greatly depends on the separation distance L as shown in FIG. It turned out to be.
なお、逆に離間距離Lを極短くすれば、回収率が高ま
るが、たとえば30mmとした場合、回収した粉体は糸状と
なり、かつその内部は、オレンジ色、表面は深紅色とな
っており、熱劣化の影響が明らかに認められた。Conversely, if the separation distance L is extremely short, the recovery rate is increased. For example, when the distance is 30 mm, the recovered powder is in a thread form, and the inside thereof is orange and the surface is crimson. The effect of thermal degradation was clearly observed.
以上の通り、本発明によれば、回収率が高まるととも
に、真空チャンバー内壁の清掃負担が少なくなり、生産
性が高まる。As described above, according to the present invention, the recovery rate is increased, the burden of cleaning the inner wall of the vacuum chamber is reduced, and the productivity is increased.
第1図は本発明の第1実施例の概要図、第2図はその変
形例の要部拡大図、第3図〜第5図は変形例の概要図、
第6図は回収率の変化グラフ、第7図および第8図はそ
れぞれ従来技術の概要説明図である。 1……真空チャンバー、2……収容容器、3……回転ド
ラム、4……回収箱、6……真空ポンプ、9……ブラ
シ、11……飛散防止壁、12……加熱ヒータ、M……蒸発
性材料、G……不活性ガスFIG. 1 is a schematic diagram of a first embodiment of the present invention, FIG. 2 is an enlarged view of a main part of the modification, FIGS. 3 to 5 are schematic diagrams of the modification,
FIG. 6 is a graph showing a change in the recovery rate, and FIGS. 7 and 8 are schematic explanatory diagrams of the prior art. DESCRIPTION OF SYMBOLS 1 ... Vacuum chamber, 2 ... Container, 3 ... Rotary drum, 4 ... Collection box, 6 ... Vacuum pump, 9 ... Brush, 11 ... Scatter prevention wall, 12 ... Heater, M ... ... Evaporative material, G ... Inert gas
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6,DB名) B01J 19/00 B22F 9/12 G03G 5/00──────────────────────────────────────────────────続 き Continuation of the front page (58) Field surveyed (Int. Cl. 6 , DB name) B01J 19/00 B22F 9/12 G03G 5/00
Claims (4)
粒子粉体を被付着体に付着させ、その被付着体に付着し
た微粒子粉体を除去して回収する方法において、 前記蒸発源から被付着体に向かって蒸発した微粒子粉体
の被付着体へ向かう方向の周りに飛散防止壁を設け、か
つ不活性ガスの導路を前記飛散防止壁内に連通させたこ
とを特徴とする微粒子粉体の生成・回収方法。1. A method for adhering fine particle powder evaporated from an evaporation source to an adherend by an in-gas evaporation method, and removing and recovering the fine particle powder adhering to the adherend, comprising: A fine particle powder, wherein a scattering prevention wall is provided around a direction of the fine particle powder evaporated toward the adherend toward the adherend, and a conduit for an inert gas is communicated with the scattering prevention wall. How to create and recover your body.
微粒子粉体の熱沈着温度を超える温度とする請求項1記
載の方法。2. The method according to claim 1, wherein the temperature of at least the inner surface of the scattering prevention wall is higher than the thermal deposition temperature of the fine particle powder.
防止壁温度未満であり、かつ微粒子粉体の熱沈着を充分
生じる温度である請求項1記載の方法。3. The method according to claim 1, wherein the temperature of the adherend is lower than the temperature of the evaporation source and the temperature of the scattering prevention wall, and is a temperature at which sufficient thermal deposition of the fine particle powder occurs.
粒子粉体を連続的に移動する被付着体に付着させ、その
被付着体に付着した微粒子粉体を除去して回収する装置
において、 前記蒸発源から被付着体に向かう方向の周りに飛散防止
壁が設けられ、その端縁と被付着体との離間距離が、被
付着体と蒸発性材料との距離の1/2以下であり、他方で
不活性ガスの導路が飛散防止壁内に連通されていること
を特徴とする微粒子粉体の生成・回収装置。4. An apparatus for adhering fine particle powder evaporated from an evaporation source by an in-gas evaporation method to a continuously moving adherend, removing and recovering the fine particle powder adhered to the adherend, A scattering prevention wall is provided around the direction from the evaporation source toward the adherend, the separation distance between the edge and the adherend is not more than 1/2 of the distance between the adherend and the evaporable material. On the other hand, an apparatus for generating and recovering fine particle powder, wherein a passage for an inert gas is communicated with the inside of the scattering prevention wall.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17212590A JP2821799B2 (en) | 1990-06-29 | 1990-06-29 | Method and apparatus for producing and recovering fine powder |
| DE4121119A DE4121119A1 (en) | 1990-06-29 | 1991-06-26 | METHOD AND DEVICE FOR PRODUCING AND COLLECTING ULTRAFINE PARTICLES |
| US07/722,973 US5186872A (en) | 1990-06-29 | 1991-06-28 | Method for generation and collection of ultra fine particles without scatter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17212590A JP2821799B2 (en) | 1990-06-29 | 1990-06-29 | Method and apparatus for producing and recovering fine powder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0463129A JPH0463129A (en) | 1992-02-28 |
| JP2821799B2 true JP2821799B2 (en) | 1998-11-05 |
Family
ID=15936024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17212590A Expired - Fee Related JP2821799B2 (en) | 1990-06-29 | 1990-06-29 | Method and apparatus for producing and recovering fine powder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2821799B2 (en) |
-
1990
- 1990-06-29 JP JP17212590A patent/JP2821799B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0463129A (en) | 1992-02-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |