JP2853501B2 - Temperature compensation device for coordinate measuring machine - Google Patents
Temperature compensation device for coordinate measuring machineInfo
- Publication number
- JP2853501B2 JP2853501B2 JP1465493A JP1465493A JP2853501B2 JP 2853501 B2 JP2853501 B2 JP 2853501B2 JP 1465493 A JP1465493 A JP 1465493A JP 1465493 A JP1465493 A JP 1465493A JP 2853501 B2 JP2853501 B2 JP 2853501B2
- Authority
- JP
- Japan
- Prior art keywords
- base
- temperature
- measuring machine
- correction
- coordinate measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000523 sample Substances 0.000 claims description 16
- 238000005259 measurement Methods 0.000 claims description 15
- 230000008602 contraction Effects 0.000 claims description 10
- 230000036760 body temperature Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は座標測定機の温度補正
装置に係り、特に周囲温度の変化に対応して測定精度を
維持するための座標測定機の温度補正装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a temperature compensating device for a coordinate measuring machine, and more particularly to a temperature compensating device for a coordinate measuring machine for maintaining measurement accuracy in response to changes in ambient temperature.
【０００２】[0002]
【従来の技術】三次元座標測定機の周囲温度が測定精度
を維持する上で無視できない程大きく変化した場合、測
定精度を維持するために温度補正を行う必要がある。そ
して、温度補正は次の手順で行われる。先ず、温度計で
定期的に三次元座標測定機のスケール部材、機構部材な
ど、温度の変化が測定精度に影響すると思われる部位の
温度を測定する。また、測定するワークの温度も測定す
る。次に、測定して求められた測定温度と三次元座標測
定機のスケール部材、機構部材などの熱膨張係数から、
それらの部材の伸縮尺率を計算で求めて更に各部材の変
形率を計算で求め、三次元座標測定機の温度補正を行
う。次いで、三次元座標測定機でワーク形状等を測定す
ると同時にワークの温度補正を行う。これにより、三次
元座標測定機で測定されたワーク形状等の測定精度が維
持される。2. Description of the Related Art When the ambient temperature of a three-dimensional coordinate measuring machine changes so much that it cannot be ignored in maintaining the measurement accuracy, it is necessary to perform temperature correction in order to maintain the measurement accuracy. The temperature correction is performed in the following procedure. First, the temperature of a part, such as a scale member or a mechanism member of a three-dimensional coordinate measuring machine, which is considered to have an influence on the measurement accuracy, is periodically measured by a thermometer. Further, the temperature of the work to be measured is also measured. Next, from the measured temperature obtained by the measurement and the thermal expansion coefficient of the scale member of the three-dimensional coordinate measuring machine, the mechanism member, etc.,
The expansion / contraction ratios of these members are obtained by calculation, and the deformation ratio of each member is further obtained by calculation, and the temperature of the three-dimensional coordinate measuring machine is corrected. Next, the work shape and the like are measured by a three-dimensional coordinate measuring machine, and at the same time, the work temperature is corrected. Thereby, the measurement accuracy of the work shape and the like measured by the three-dimensional coordinate measuring machine is maintained.
【０００３】従って、温度補正を行う上で周囲温度や各
部材の温度を正確に測定することと、複雑な温度補正係
数を算出することが重要であり、そのために、温度計と
測定した温度をコンピュータに送るインターフェース、
そして、複雑な温度補正係数を計算するソストウェアか
ら構成されている温度計システムが使用されている。[0003] Therefore, it is important to accurately measure the ambient temperature and the temperature of each member and to calculate a complicated temperature correction coefficient in performing temperature correction. Interface to send to computer,
Then, a thermometer system composed of software for calculating a complicated temperature correction coefficient is used.
【０００４】[0004]
【発明が解決しようとする課題】このように、温度補正
システムは温度計及びコンピュータのインターフェース
等から構成されているので、複雑な構造で、かつ高価で
あるという問題がある。本発明はこのような事情に鑑み
てなされたもので、簡素な構造で、かつ安価な座標測定
機の温度補正装置を提供することを目的とする。As described above, since the temperature compensation system includes the thermometer and the interface of the computer, there is a problem that the temperature compensation system has a complicated structure and is expensive. The present invention has been made in view of such circumstances, and has as its object to provide an inexpensive temperature measuring device for a coordinate measuring machine having a simple structure.
【０００５】[0005]
【課題を解決するための手段】本発明は、前記目的を達
成する為に、座標軸方向に移動自在に設けられたプロー
ブでワークの形状等を測定する座標測定機において、第
１ベースに設けられ、開口部が形成された第２ベース
と、熱膨張率の比較的小さい部材で形成されると共に前
記第２ベースの開口部を介して端部が第１ベースに設け
られ、かつ、周囲温度の変化に対応して伸縮した量が前
記第２ベースの伸縮量と同一に設定された第１補正部材
と、端部が前記第２ベースに設けられた第２補正部材
と、から成る温度補正ユニットであって、該温度補正ユ
ニットの第１、２補正部材が座標測定機の座標軸にほぼ
平行に位置決めされた状態で前記座標測定機の測定範囲
内に配置された温度補正ユニットと、基準温度における
前記第２ベースの基準面から第１、２補正部材の自由端
までの基準長さ及び第２補正部材の熱膨張係数が予め記
憶され、該予め記憶されたデータと前記プローブで新た
に測定した前記第２ベースの基準面から第１、２の補正
部材の自由端までの測定長さから前記測定時の温度補正
係数を計算する制御部と、を備えたことを特徴とする。SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a coordinate measuring machine for measuring the shape and the like of a workpiece with a probe movably provided in a coordinate axis direction, wherein the probe is provided on a first base. A second base having an opening formed thereon, a member having a relatively low coefficient of thermal expansion, an end provided on the first base through the opening of the second base, and a base having an ambient temperature. A temperature correction unit comprising: a first correction member having an amount of expansion and contraction corresponding to a change set to be equal to the amount of expansion and contraction of the second base; and a second correction member having an end provided on the second base. Wherein the first and second correction members of the temperature correction unit are positioned within a measurement range of the coordinate measuring machine in a state where the first and second correction members are positioned substantially parallel to a coordinate axis of the coordinate measuring machine; The second base criteria The reference length from the free end of the first and second correction members to the free end of the first and second correction members and the coefficient of thermal expansion of the second correction member are stored in advance, and the previously stored data and the reference surface of the second base newly measured by the probe are stored. And a controller for calculating a temperature correction coefficient at the time of the measurement from a measured length from the free end of the first and second correction members to the first and second correction members.
【０００６】[0006]
【作用】本発明によれば、温度補正ユニットは第１、第
２ベース及び第１、第２補正部材を備えている。第２ベ
ースは開口部を有していて、第１ベースに設けられてい
る。第１補正部材は熱膨張率の比較的小さい部材で形成
されると共に第２ベースの開口部を介して端部が第１ベ
ースに設けられている。また、第１補正部材は周囲温度
の変化に対応して伸縮した量が第２ベースの伸縮量と同
一に設定されている。そして、第２補正部材は端部が第
２ベースに設けられている。この温度補正ユニットは温
度補正ユニットの第１、２補正部材が座標測定機の座標
軸にほぼ平行に位置決めされた状態で座標測定機の測定
範囲内に配置されている。According to the present invention, the temperature compensating unit has first and second bases and first and second compensating members. The second base has an opening and is provided on the first base. The first correction member is formed of a member having a relatively small coefficient of thermal expansion, and has an end provided on the first base via an opening of the second base. The amount of expansion and contraction of the first correction member corresponding to the change in the ambient temperature is set to be the same as the amount of expansion and contraction of the second base. The end of the second correction member is provided on the second base. The temperature compensating unit is disposed within the measuring range of the coordinate measuring machine with the first and second compensating members of the temperature compensating unit positioned substantially parallel to the coordinate axes of the coordinate measuring machine.
【０００７】さらに、制御部には基準温度における第２
ベースの基準面から第１、２補正部材の自由端までの基
準長さ及び第２補正部材の熱膨張係数が予め記憶されて
いる。そして、制御部は、予め記憶されたデータと新た
にプローブで測定した第２ベースの基準面から第１、２
の補正部材の自由端までの測定長さから測定時の温度補
正係数を計算する。Further, the control unit has a second
The reference length from the reference surface of the base to the free ends of the first and second correction members and the coefficient of thermal expansion of the second correction member are stored in advance. Then, the control unit determines the first, second, and third values from the data stored in advance and the reference surface of the second base newly measured by the probe.
The temperature correction coefficient at the time of measurement is calculated from the measured length up to the free end of the correction member.
【０００８】[0008]
【実施例】以下添付図面に従って本発明に係る座標測定
機の温度補正装置について詳説する。図１には本発明に
係る座標測定機の温度補正装置が使用されている三次元
座標測定機の斜視図が示されている。同図に示すように
三次元座標測定機１０の本体１２には一対のＹキャリッ
ジ１４がＹ軸方向に移動自在に設けられている。一対の
Ｙキャリッジ１４の上端部にはＸ梁１６が固定されてい
て、Ｘ梁１６にはＸキャリッジ１８がＸ梁１６に沿って
（Ｘ軸方向に）移動自在に設けられている。また、Ｘキ
ャリッジ１８にはＺキャリッジ２０がＺ軸方向に移動自
在に設けられている。Ｚキャリッジ２０の下端部にはプ
ローブ２２が設けられている。従って、プローブ２２は
Ｘ、Ｙ、Ｚ軸の３軸方向に移動することができるので、
プローブ２２でワークの形状等を測定することができ
る。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram of a coordinate measuring machine according to the present invention; FIG. 1 is a perspective view of a three-dimensional coordinate measuring machine in which a temperature correcting device for a coordinate measuring machine according to the present invention is used. As shown in the figure, a pair of Y carriages 14 are provided on the main body 12 of the three-dimensional coordinate measuring machine 10 so as to be movable in the Y-axis direction. An X beam 16 is fixed to the upper ends of the pair of Y carriages 14, and an X carriage 18 is provided on the X beam 16 so as to be movable along the X beam 16 (in the X-axis direction). In addition, a Z carriage 20 is provided on the X carriage 18 so as to be movable in the Z axis direction. A probe 22 is provided at the lower end of the Z carriage 20. Therefore, since the probe 22 can move in three X, Y, and Z axes,
The shape and the like of the work can be measured by the probe 22.
【０００９】図２、図３には本発明に係る座標測定機の
温度補正装置２４が示されている。これらの図に示すよ
うに、第１ベース２５には第２ベース２６が同軸上に設
けられていて、第２ベース２６には中央開口部が形成さ
れていている。第２ベース２６は熱膨張係数が知られて
いる部材で形成されていて、ここで第２ベース２６の熱
膨張係数をρ1 と設定する。また、温度が２０°Ｃ（以
下基準温度と称す。）の時に、第２ベース２６の厚みを
Ａ1 と設定する。第２ベース２６の中央開口部には円柱
体２８が嵌入されていて、円柱体２８の端部は第１ベー
ス２５の中央部に取り付けられている。円柱体２８は熱
膨張係数が比較的小さいとして知られている部材で形成
されていて、ここで円柱体２８の熱膨張係数をρ2 と設
定する。また、温度が基準温度の時に、円柱体２８の長
さをＬ1 と設定する。さらに、円柱体２８の周囲には同
軸上に筒体３０が配置されていて、筒体３０の端部は第
２ベース２６に取り付けられている。筒体３０は熱膨張
係数が知られている部材で形成されていて、ここで筒体
３０の熱膨張係数をρ3 と設定する。また、温度が基準
温度の時に、筒体３０の長さをＬ2 と設定する。FIGS. 2 and 3 show a temperature correcting device 24 of the coordinate measuring machine according to the present invention. As shown in these figures, a second base 26 is provided coaxially with a first base 25, and a central opening is formed in the second base 26. The second base 26 is formed of a member known thermal expansion coefficient, sets wherein the thermal expansion coefficient of the second base 26 [rho 1 and. When the temperature is 20 ° C. (hereinafter referred to as a reference temperature), the thickness of the second base 26 is set to A 1 . A column 28 is fitted into the center opening of the second base 26, and the end of the column 28 is attached to the center of the first base 25. The cylinder 28 is formed of a member known to have a relatively small coefficient of thermal expansion, where the coefficient of thermal expansion of the cylinder 28 is set to ρ 2 . Further, when the temperature of the reference temperature, setting the length of the cylindrical body 28 and L 1. Further, a cylindrical body 30 is disposed coaxially around the cylindrical body 28, and an end of the cylindrical body 30 is attached to the second base 26. The tubular body 30 is formed of a member whose thermal expansion coefficient is known. Here, the thermal expansion coefficient of the tubular body 30 is set to ρ 3 . Further, when the temperature of the reference temperature, setting the length of the cylindrical body 30 and L 2.
【００１０】そして、第２ベース２６の熱膨張係数ρ1
及び厚みＡ1 と、円柱体２８の熱膨張係数ρ2 及び長さ
Ｌ1 とは次式（１）の関係が成立するように設定されて
いる。 Ａ1 ×ρ1 ＝Ｌ1 ×ρ2 …（１） 従って、第２ベース２６と円柱体２８とが周囲温度の変
化により伸縮した場合、各々の伸縮長さが同一になるの
で、円柱体２８が伸縮した長さ分は第２ベース２６で吸
収される。これにより、第２ベース２６の基準面２６Ａ
から円柱体２８の自由端までの長さＬ1 ′は周囲温度の
変化に影響されずに常時一定に維持される。The thermal expansion coefficient ρ 1 of the second base 26 is
The thickness A 1 and the thermal expansion coefficient ρ 2 and the length L 1 of the cylinder 28 are set so as to satisfy the following equation (1). A 1 × ρ 1 = L 1 × ρ 2 (1) Therefore, when the second base 26 and the cylindrical body 28 expand and contract due to a change in the ambient temperature, the respective expanded and contracted lengths become the same, so that the cylindrical body 28 The length of the expansion and contraction is absorbed by the second base 26. Thereby, the reference surface 26A of the second base 26
The length L 1 to the free end of the cylinder 28 'from being always kept constant without being affected by changes in ambient temperature.
【００１１】尚、筒体３０は円柱体２８を収納している
ので、円柱体２８は筒体３０によって損傷しないように
保護される。これにより、円柱体２８は局所的な温度変
化の影響を受けないようにすることができる。そして、
座標測定機の温度補正装置２４は座標測定機の測定範囲
内に配置され、さらに、円柱体２８及び筒体３０は座標
測定機の各軸にほぼ平行に位置決めされている。従っ
て、座標測定機が三次元座標測定機の場合、座標測定機
の温度補正装置２４が３個必要になる。Since the cylindrical body 30 houses the cylindrical body 28, the cylindrical body 28 is protected from being damaged by the cylindrical body 30. Thereby, the cylindrical body 28 can be prevented from being affected by a local temperature change. And
The temperature compensating device 24 of the coordinate measuring machine is arranged within the measuring range of the coordinate measuring machine, and the cylinder 28 and the cylinder 30 are positioned substantially parallel to each axis of the coordinate measuring machine. Therefore, when the coordinate measuring machine is a three-dimensional coordinate measuring machine, three temperature correcting devices 24 of the coordinate measuring machine are required.
【００１２】前記の如く構成された本発明に係る座標測
定機の温度補正装置を三次元座標測定機で使用する場合
の作用について説明する。３個の温度補正装置２４が三
次元座標測定機１０の測定範囲内に配置され、かつ、各
々の円柱体２８及び筒体３０が三次元座標測定機１０の
Ｘ、Ｙ、Ｚ軸の３軸方向にほぼ平行に位置決めされてい
る（図１参照）。この場合、温度が２０°Ｃの基準温度
の状態で、３個の温度補正装置２４の円柱体２８及び筒
体３０は、第２ベース２６の基準面２６Ａから円柱体２
８及び筒体３０のそれぞれの自由端２８Ａ、３０Ａまで
の長さＬ1 ′、Ｌ2 が求められている。そして、求めら
れた円柱体２８及び筒体３０の長さＬ1 ′、Ｌ2 を基準
長さと設定して、三次元座標測定機１０の制御部３６
（図１参照）に記憶する。The operation when the temperature compensating device for a coordinate measuring machine according to the present invention configured as described above is used in a three-dimensional coordinate measuring machine will be described. The three temperature correction devices 24 are arranged within the measurement range of the three-dimensional coordinate measuring machine 10, and each of the cylindrical body 28 and the cylindrical body 30 are arranged in three axes of the X, Y, and Z axes of the three-dimensional coordinate measuring machine 10. Are positioned substantially parallel to the direction (see FIG. 1). In this case, when the temperature is the reference temperature of 20 ° C., the cylindrical body 28 and the cylindrical body 30 of the three temperature correction devices 24 are moved from the reference surface 26A of the second base 26 to the cylindrical body 2.
The lengths L 1 'and L 2 up to the free ends 28A and 30A of the cylinder 8 and the cylindrical body 30 are determined. Then, the determined lengths L 1 ′ and L 2 of the cylindrical body 28 and the cylindrical body 30 are set as reference lengths, and the control unit 36 of the three-dimensional coordinate measuring machine 10 is set.
(See FIG. 1).
【００１３】そして、ステップ１００において三次元座
標測定機１０の周囲温度が変化した場合、三次元座標測
定機１０のプローブ２２でＸ軸にほぼ平行に配置されて
いる円柱体２８及び筒体３０の基準面２６Ａから自由端
２８Ａ、３０Ａまでの各々の長さＬ1 ″、Ｌ2 ′を測定
する。次に、ステップ１０２において各々の測定長さＬ
1 ″、Ｌ2 ′は三次元座標測定機１０の制御部３６に入
力され、この制御部３６は、円柱体２８の測定長さ
Ｌ1 ″から円柱体２８の基準長さＬ1 ′を差し引いた値
Ｄ1 と、筒体３０の測定長さＬ2 ′から筒体３０の基準
長さＬ2 を差し引いた値Ｄ2 を算出する。When the ambient temperature of the three-dimensional coordinate measuring machine 10 changes in step 100, the probe 22 of the three-dimensional coordinate measuring machine 10 changes the position of the cylindrical body 28 and the cylindrical body 30 arranged almost in parallel to the X axis. The respective lengths L 1 ″ and L 2 ′ from the reference surface 26A to the free ends 28A and 30A are measured.
1 ″ and L 2 ′ are input to the control unit 36 of the coordinate measuring machine 10, and the control unit 36 subtracts the reference length L 1 ′ of the cylindrical body 28 from the measured length L 1 ″ of the cylindrical body 28. and the value D 1, calculates a value D 2 of the measurement of the cylindrical body 30 from the length L 2 'minus the reference length L 2 of the cylindrical body 30.
【００１４】さらに、ステップ１０４において三次元座
標測定機１０のＸ、Ｙ、Ｚ軸の各軸の温度補正係数
αX 、αY 、αZ を次式（２）、（３）、（４）に基づ
いて求める。 αX ＝Ｄ1X／Ｌ1X … （２） αY ＝Ｄ1Y／Ｌ1Y … （３） αZ ＝Ｄ1Z／Ｌ1Z … （４） 次に、ステップ１０６において制御部３６が次式（５）
に基づいて温度ＴX を次の近似式で計算する。Further, in step 104, the temperature correction coefficients α X , α Y , α Z of the X, Y, Z axes of the three-dimensional coordinate measuring machine 10 are calculated by the following equations (2), (3), (4). Based on α X = D 1X / L 1X ... (2) α Y = D 1Y / L 1Y ... (3) α Z = D 1Z / L 1Z ... (4) Next, the control unit 36 the following equation at step 106 (5 )
Calculating the temperature T X by the following approximate expression based on.
【００１５】 但し、ρは筒体３０の熱膨張係数であり、筒体３０の熱
膨張係数ρは三次元座標測定機１０の制御部３６に予め
記憶されている。[0015] Here, ρ is the coefficient of thermal expansion of the cylinder 30, and the coefficient of thermal expansion ρ of the cylinder 30 is stored in the control unit 36 of the three-dimensional coordinate measuring machine 10 in advance.
【００１６】以下同様にＹ軸方向及びＺ軸方向の温度Ｔ
Y 、ＴZ を計算する。そして、ステップ１０８において
次式（６）に基づいて筒体３０の温度Ｔが求められ、求
められた筒体３０の温度Ｔを制御部３６に記憶する。 そして、求められたＸ、Ｙ、Ｚ軸の各軸の温度補正係数
αX 、αY 、αZ は三次元座標測定機１０の制御部３６
に記憶される。制御部３６は記憶された測定機の温度補
正係数αX，αY，αZに基づいてワークの測定中に測定
機の温度補正を行う。Similarly, the temperature T in the Y-axis direction and the Z-axis direction
Calculate Y and T Z. Then, in step 108, the temperature T of the cylinder 30 is calculated based on the following equation (6), and the calculated temperature T of the cylinder 30 is stored in the control unit 36. Then, the obtained temperature correction coefficients α X , α Y , and α Z of the X, Y, and Z axes are determined by the control unit 36 of the coordinate measuring machine 10.
Is stored. The control unit 36 corrects the temperature of the measuring device during the measurement of the workpiece based on the stored temperature correction coefficients α X , α Y , and α Z of the measuring device.
【００１７】また、ステップ１１０においてワークの熱
膨張係数が三次元座標測定機１０の制御部３６に予め記
憶されているので、制御部３６は筒体３０の温度Ｔをワ
ークの温度と設定してワークの温度補正係数を求めるこ
とができる。従って、温度補正装置の測定によって求め
られた測定機とワークの温度補正係数に基づいて測定値
の温度補正を行う。前記ステップ１００乃至１１０の工
程を制御部３６内のプログラムに基づいて自動的に行
う。In step 110, since the thermal expansion coefficient of the work is stored in the control unit 36 of the three-dimensional coordinate measuring machine 10 in advance, the control unit 36 sets the temperature T of the cylinder 30 as the temperature of the work. The temperature correction coefficient of the work can be obtained. Therefore, the temperature of the measured value is corrected based on the temperature correction coefficient of the measuring device and the work obtained by the measurement of the temperature correction device. The steps 100 to 110 are automatically performed based on a program in the control unit 36.
【００１８】また、前記実施例では基準長さと設定した
円柱体２８及び筒体３０の長さＬ1′、Ｌ2 を三次元座
標測定機１０の制御部３６に記憶する場合のみについて
説明したが、これに限らず、基準長さＬ1 ′、Ｌ2 を制
御部３６に記憶すると共に円柱体２８等に刻印しておい
てもよい。さらに、前記実施例では三次元座標測定機１
０の周囲温度が変化した場合に温度補正する場合につい
て説明したが、これに限らず、周囲温度の変化にかかわ
らず定期的な校正サイクルにおいて温度補正してもよ
い。In the above-described embodiment, only the case where the lengths L 1 ′ and L 2 of the cylindrical body 28 and the cylindrical body 30 set as the reference lengths are stored in the control unit 36 of the three-dimensional coordinate measuring machine 10 has been described. However, the present invention is not limited to this. The reference lengths L 1 ′ and L 2 may be stored in the control unit 36 and stamped on the cylindrical body 28 and the like. Further, in the above embodiment, the three-dimensional coordinate measuring machine 1
Although the case where the temperature is corrected when the ambient temperature of 0 changes has been described, the temperature correction may be performed in a regular calibration cycle regardless of the change of the ambient temperature.
【００１９】尚、円柱体２８を筒体３０内に収納して、
円柱体２８の損傷等を防止するようにし、円柱体２８が
局所的な温度変化に影響を受けないようにしたが、これ
に限らず、筒体３０を円柱体等に形成して円柱体２８を
と平行にベース２６に取り付けてもよい。The cylindrical body 28 is housed in the cylindrical body 30,
Although the cylindrical body 28 is prevented from being damaged and the like, and the cylindrical body 28 is not affected by a local temperature change, the present invention is not limited to this. May be attached to the base 26 in parallel with.
【００２０】[0020]
【発明の効果】以上説明したように本発明に係る座標測
定機の温度補正装置によれば、温度補正ユニットは第
１、第２ベース及び第１、第２補正部材を備えている。
第２ベースは開口部を有していて、第１ベースに設けら
れている。第１補正部材は熱膨張率の比較的小さい部材
で形成されると共に第２ベースの開口部を介して端部が
第１ベースに設けられている。また、第１補正部材は周
囲温度の変化に対応して伸縮した量が第２ベースの伸縮
量と同一に設定されている。そして、第２補正部材は端
部が第２ベースに設けられている。この温度補正ユニッ
トは温度補正ユニットの第１、２補正部材が座標測定機
の座標軸にほぼ平行に位置決めされた状態で座標測定機
の測定範囲内に配置されている。As described above, according to the temperature compensating device of the coordinate measuring machine according to the present invention, the temperature compensating unit includes the first and second bases and the first and second compensating members.
The second base has an opening and is provided on the first base. The first correction member is formed of a member having a relatively small coefficient of thermal expansion, and has an end provided on the first base via an opening of the second base. The amount of expansion and contraction of the first correction member corresponding to the change in the ambient temperature is set to be the same as the amount of expansion and contraction of the second base. The end of the second correction member is provided on the second base. The temperature compensating unit is disposed within the measuring range of the coordinate measuring machine with the first and second compensating members of the temperature compensating unit positioned substantially parallel to the coordinate axes of the coordinate measuring machine.
【００２１】さらに、制御部には基準温度における第２
ベースの基準面から第１、２補正部材の自由端までの基
準長さ及び第２補正部材の熱膨張係数が予め記憶されて
いる。そして、制御部は、予め記憶されたデータとプロ
ーブで測定した第２ベースの基準面から第１、２の補正
部材の自由端までの測定長さからプローブで測定した時
の三次元座標測定機とワークの温度補正係数を求め、さ
らに三次元座標測定機やワークの温度補正を行う。Further, the control unit has a second
The reference length from the reference surface of the base to the free ends of the first and second correction members and the coefficient of thermal expansion of the second correction member are stored in advance. Then, the control unit measures the three-dimensional coordinate measuring machine when the probe is measured from the data stored in advance and the measurement length from the reference surface of the second base measured by the probe to the free ends of the first and second correction members. And the temperature correction coefficient of the work are obtained, and the temperature of the three-dimensional coordinate measuring machine and the work is further corrected.
【００２２】従って、温度補正ユニットを座標測定機に
設け、その長さを測定するだけで温度補正係数を求める
ことができるので、構造の簡素化や安価化を図ることが
できる。また、温度の影響を受けて複雑に変化し解析的
に求める事が困難な温度補正係数を直接求めることがで
きる。Therefore, since the temperature correction coefficient can be obtained only by providing the temperature correction unit in the coordinate measuring machine and measuring the length thereof, the structure can be simplified and the cost can be reduced. In addition, it is possible to directly obtain a temperature correction coefficient that changes in a complicated manner under the influence of temperature and is difficult to obtain analytically.
【図１】本発明に係る本発明に係る座標測定機の温度補
正装置が使用された三次元座標測定機の斜視図FIG. 1 is a perspective view of a three-dimensional coordinate measuring machine using a temperature correcting device for a coordinate measuring machine according to the present invention according to the present invention.
【図２】本発明に係る座標測定機の温度補正装置の要部
拡大図FIG. 2 is an enlarged view of a main part of a temperature correction device of the coordinate measuring machine according to the present invention.
【図３】本発明に係る座標測定機の温度補正装置の要部
拡大図FIG. 3 is an enlarged view of a main part of the temperature correction device of the coordinate measuring machine according to the present invention.
【図４】本発明に係る座標測定機の温度補正装置の作動
を説明するフローチャートFIG. 4 is a flowchart for explaining the operation of the temperature correction device of the coordinate measuring machine according to the present invention.
１０…三次元座標測定機 ２２…プローブ ２４…温度補正ユニット ２５…第１ベース ２６…第２ベース ２６Ａ…第２ベースの基準面 ２８…円柱体 ３０…筒体 ３６…制御部 DESCRIPTION OF SYMBOLS 10 ... 3D coordinate measuring machine 22 ... Probe 24 ... Temperature correction unit 25 ... 1st base 26 ... 2nd base 26A ... 2nd base reference surface 28 ... Cylindrical body 30 ... Cylindrical body 36 ... Control part
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) G01B 5/00 - 5/30 G01B 21/00 - 21/32──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 6 , DB name) G01B 5/00-5/30 G01B 21/00-21/32
Claims (3)
ーブでワークの形状等を測定する座標測定機において、前記プローブで測定可能な位置にそれぞれ配設された第
２ベース、第１補正部材及び第２補正部材であって、第
１ベースに設けられ、熱膨張率が比較的大きい部材で形
成された前記第２ベースと、 熱膨張率の比較的小さい部
材で形成されると共に端部が前記第１ベースに設けら
れ、かつ、周囲温度の変化に対応して伸縮した量が前記
第２ベースの伸縮量と同一に設定された前記第１補正部
材と、端部が前記第２ベースに設けられ、熱膨張可能な
部材で形成された前記第２補正部材と、 基準温度における前記第２ベースの基準面から第１、２
の補正部材の自由端までの基準長さ及び第２の補正部材
の熱膨張係数が記憶された記憶手段と、 前記記憶手段に記憶された前記第２ベースの基準面から
第１の補正部材の自由端までの基準長さと、前記プロー
ブで新たに測定した前記第２ベースの基準面から第１の
補正部材の自由端までの測定長さとから前記座標測定機
の測定温度における温度補正係数を計算する第１の演算
手段と、 前記記憶手段に記憶された前記第２ベースの基準面から
第１、第２の補正部材の自由端までの基準長さ及び第２
の補正部材の熱膨張係数と、前記プローブで測定した第
２ベースの基準面から第１、第２の補正部材の自由端ま
での測定長さとに基づいて座標測定機の周囲温度を計算
する第２の演算手段と、 前記ワークの形状等の測定実測値を、前記第１、第２の
演算手段によって計算した温度補正係数、周囲温度及び
前記記憶手段に記憶された該ワークの熱膨張係数に基づ
いて温度補正する補正手段と、 を備えたことを特徴とする座標測定機の温度補正装置。1. A coordinate measuring machine for measuring a shape and the like of a workpiece by a probe movably provided in a coordinate axis direction, wherein said probe is provided at a position measurable by said probe.
2 base, a first correction member and a second correction member,
It is a member that is provided on one base and has a relatively large coefficient of thermal expansion.
The second base is formed of a member having a relatively small coefficient of thermal expansion and an end is provided on the first base, and the amount of expansion and contraction corresponding to a change in ambient temperature is equal to the second base. The first correction member set to be equal to the expansion and contraction amount of the base, and an end portion is provided on the second base and is thermally expandable.
A second correction member formed of a member, a first and a second correction member from a reference surface of the second base at a reference temperature.
Storage means for thermal expansion coefficient of the reference length and the second correction member to the free end is remembers correction member, from the second base reference plane that is stored in the storage means
A reference length to a free end of the first correction member;
From the reference plane of the second base newly measured at the first
From the measurement length to the free end of the correction member, the coordinate measuring machine
Calculation for calculating the temperature correction coefficient at the measured temperature of
Means, from the reference surface of the second base stored in the storage means
A reference length to a free end of the first and second correction members and a second length
Coefficient of thermal expansion of the correction member and the second measured by the probe
2 From the reference plane of the base to the free ends of the first and second correction members
The ambient temperature of the coordinate measuring machine based on the length measured at
A second calculating means for calculating the actual measured values of the shape and the like of the workpiece by the first and second
The temperature correction coefficient, the ambient temperature,
Based on the coefficient of thermal expansion of the work stored in the storage means,
And a correcting means for correcting the temperature.
の各座標軸ごとにその座標軸とほぼ平行になるように座
標測定機のベースに配設され、前記第１の演算手段は、
前記記憶手段に記憶された前記第１の補正部材の基準長
さと、前記プローブで測定した第１の補正部材の各座標
軸方向の測定長さとから各座標軸ごとに前記座標測定機
の測定温度における温度補正係数を計算することを特徴
とする 請求項１の座標測定機の温度補正装置。 2. The coordinate measuring machine according to claim 1, wherein the first correction member is a coordinate measuring machine.
Coordinate so that it is almost parallel to each coordinate axis.
The first computing means is disposed on a base of the target measuring machine,
The reference length of the first correction member stored in the storage unit
And each coordinate of the first correction member measured by the probe
From the measured length in the axial direction, the coordinate measuring machine is used for each coordinate axis.
Calculates the temperature correction coefficient at the measured temperature
The temperature compensating device for a coordinate measuring machine according to claim 1.
の補正部材、第２ベースはそれぞれ円柱体及び筒体に形
成され、該円柱体は筒体内に収納されたことを特徴とす
る請求項１又は２の座標測定機の温度補正装置。 3. The first correction member, a first base, and a second base.
Correction member, a second base is respectively formed on the cylindrical body and the cylindrical body, the circular column body temperature correction device coordinate measuring machine according to claim 1 or 2, characterized in that housed in the tubular body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1465493A JP2853501B2 (en) | 1993-02-01 | 1993-02-01 | Temperature compensation device for coordinate measuring machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1465493A JP2853501B2 (en) | 1993-02-01 | 1993-02-01 | Temperature compensation device for coordinate measuring machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06229706A JPH06229706A (en) | 1994-08-19 |
| JP2853501B2 true JP2853501B2 (en) | 1999-02-03 |
Family
ID=11867206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1465493A Expired - Fee Related JP2853501B2 (en) | 1993-02-01 | 1993-02-01 | Temperature compensation device for coordinate measuring machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2853501B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8676527B2 (en) | 2010-08-02 | 2014-03-18 | Mitutoyo Corporation | Industrial machine |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7138284B2 (en) * | 2018-08-27 | 2022-09-16 | 株式会社東京精密 | Three-dimensional measuring machine and three-dimensional measuring method |
-
1993
- 1993-02-01 JP JP1465493A patent/JP2853501B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8676527B2 (en) | 2010-08-02 | 2014-03-18 | Mitutoyo Corporation | Industrial machine |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06229706A (en) | 1994-08-19 |
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