JP2854637B2 - Automatic image analyzer - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to an automatic image analysis device that can execute analysis and inspection processing even during drive system control by using a pipeline system.

[Prior art] Generally, in an automatic image analyzer such as an image analyzer and a surface inspection device, a field of view is narrow due to a high magnification of a microscope to be used. It is necessary to measure while changing the field of view. At that time, the depth of focus of the microscope becomes shallower as the magnification becomes higher. There has been a problem that the distance from the objective lens becomes non-uniform, and as a result, the focal length cannot be adjusted.

When the XY stage is stopped at a predetermined position after moving at high speed, the vibration is transmitted to the microscope, thereby causing a defocus.

Further, when the control of the XY stage and the control of the drive system such as the automatic focus are performed by the CPU of the processing device, as shown in FIG. 4, in addition to the time required for the image analysis and the surface inspection processing,
In addition to the time required for drive system control, an image cannot be captured until the vibration of the drive part has been corrected as described above, resulting in a disadvantage that the processing time becomes longer.

[Problems to be Solved by the Invention] The present invention provides an automatic image analysis device capable of executing analysis and inspection processing even during drive system control.

“Means for Solving the Problems” The present invention provides a microscope, an imaging unit that captures an image of a sample by the microscope, an XY table that moves the sample to an arbitrary position, a unit that moves the XY table, and an imaging unit. Means for storing the obtained image data in the image memory, means for detecting the focal position from the image data and moving the microscope to the in-focus position, and an automatic image analyzing apparatus including a CPU for controlling these processes, An automatic image processing apparatus comprising: an image processing device (3) including a CPU (1); and a host computer (4) for controlling processing and analysis of image data together with the image processing device (3) in a pipeline manner. It is an analyzer.

[Operation] The automatic image analyzer of the present invention will be described in more detail with reference to FIG.

FIG. 1 shows an embodiment of the present invention, in which a television camera (6) as an imaging means for imaging a sample image by a microscope (5) and a microscope (5) mounted on the upper part of the lens barrel.
Are supported by the support (7) so as to be able to move up and down. A Z-axis drive motor (8) for moving the microscope (5) up and down is controlled by a motor driver (9) from a CPU (1) via an XYZ controller (2) which is an intelligent controller. I have.

The object to be measured (10) is placed on the support (7), and
An XY table (11) for changing the field of view of the microscope (5) in the direction is provided, and an XY axis drive motor (12) is also provided from a CPU (1) by a motor driver (9) via an XYZ controller (2). Is controlled.

Hereinafter, a method of using the automatic image analyzer according to the present invention will be specifically described with reference to FIGS.

First, when the apparatus is started, the CPU (1) initializes peripheral devices based on the contents of the ROM (13) (A), and thereafter, when processing is started, the host computer (4)
Thus, information such as the measurement position and the processing content is sent to the CPU (1) via the host interface (14) (b).

The CPU (1) uses this information to create an XYZ controller (2)
Set peripheral devices such as.

When the host computer (4) transmits (C) a command to start measurement to the CPU (1), the CPU (1)
Sends a command to the XYZ controller (2) to move to the XY table (11) to the first measurement position (d).

The XYZ controller (2) controls the XY axis drive motor (12) by the motor driver (9) to move the XY table (11) to the set position (e).

After the movement is completed, the XYZ controller (2) notifies the CPU (1) of completion (f), and the CPU (1) at this position uses the information in the frame memory (15) to execute the XYZ controller (2).
By controlling the motor driver (9) through the controller and raising and lowering the Z-axis drive motor (8), the focusing operation (note that
The calculation means and operation of the focal point are disclosed in JP-A-63-127148 and JP-A-63-24, which have been filed and published by the present applicants.
No. 3907. Do) (g).

After focusing, the image data is taken into the frame memory (15) (h).

Thereafter, the CPU (1) transmits a next position movement command to the XYZ controller (2) ((1)). The XYZ controller (2) operates the XY axis drive motor (12) to the second measurement position by the motor driver (9), and the XY table (1)
1) Move (e).

Next, the CPU (1) releases the data in the RAM (16) in another area (the contents have already been taken in by the host computer (4), and the contents of the RAM (16) have been newly overwritten, whereby the previous contents have been deleted. If it has been destroyed, it is transferred to the RAM (16). If not released, it is transferred to the RAM (16) after waiting until it is released (nu).

Subsequently, the CPU (1) processes the image data transferred to the RAM (16) in the first half of processing and analysis according to the processing content transferred from the host computer (4) (generally, the image processing method is based on the captured image. , Density correction, filter processing, FFT, binarization, geometric shape measurement, etc.
While the data is allocated to the CPU, continuous processing (referred to as a pipeline method) of a part given to the CPU (1), hereinafter referred to as the first half of the processing, is performed (l).

After this process is completed, the CPU (1) sends a signal to the host computer (4) to the effect that the process has been completed (ヲ). During this time, the CPU (1) performs the focusing process when the movement of the XY table has been completed (g). When the focusing process is completed, the CPU (1) fetches the image signal into the frame memory (15) (h), and A table movement command is transmitted to the XYZ controller (2) (Re). The XYZ controller (2) drives the drive motor with the motor driver (9) to move the XY table (11) to the next measurement position (e). Meanwhile, the CPU (1) has the frame memory (15)
Is transferred to the RAM (16) (ル), and the first half of the processing of the second screen is performed (ル).

When the host computer (4) receives a notification from the CPU (1) that the processing has been completed (ヲ), the host computer (4) returns to the RAM (16).
The processing contents (partially processed image data) are loaded into the RAM in the host computer (4) (W), and then C
A release notification of the RAM (16) is issued to the PU (1) (f).

Next, the second half of the first half processed image data (CPU
(Refer to the unprocessed portion in (1)), further process (Y), display the result on a CRT, etc., save the result in an external storage device, print the result on a printer, etc. ), And waits for a signal from the CPU (1) indicating that the processing of the second screen is completed (来 る).

By performing the above operations while sequentially moving the XY table (11), image processing, measurement, and analysis can be performed within the movement time of the XY table (11) and the time for focusing, and the XY table (11) , There is sufficient time for the vibration to subside, resulting in a reduction in processing time (FIG. 3).

[Effect] According to the image processing apparatus of the present invention, the number of measurement points is large and the focusing time due to the surface condition of the sample is increased, so that more time is required in addition to the original measurement and measurement time. Even in this case, processing analysis can be performed in a time only for image analysis and processing.

Therefore, analysis and inspection processing can be performed even during drive system control, and the XY table can be moved to a predetermined position accurately, at high speed, and with minimal vibration to other optical systems.

[Brief description of the drawings]

FIG. 1 is a schematic explanatory view of an automatic image processing apparatus according to the present invention. FIG. 2 is a flowchart for explaining the operation. Third
The figure shows a timing chart of the present invention. FIG.
4 shows a timing chart of a conventional case. (1) CPU (2) Intelligent controller (XYZ controller) (3) Image processing device, (4) Host computer (5) Microscope, (6) CCD camera (7) Support (8) Z-axis drive (for focusing) ) Motor (9) Motor driver, (10) DUT (11) XY table (12) XY axis drive (for XY table) motor (13) ROM (14) Host interface (15) Frame memory, (16) RAM (17) A / D, (18) D / A (19) Camera monitor

Continued on the front page (72) Inventor Masaru Maruki 4-3-1 Jokoji, Amagasaki-shi, Hyogo Kanzaki Paper Co., Ltd. Kanzaki Mill (56) References JP-A-3-9485 (JP, A) JP-A-63 -250510 (JP, A) (58) Fields investigated (Int. Cl. ⁶ , DB name) G06T 1/00-1/20 G01B 11/00

Claims (1)

(57) [Claims] A microscope, imaging means for photographing a sample image by the microscope, an XY table for moving the sample to an arbitrary position, means for moving the XY table, and an image memory for storing image data obtained by the imaging means. Means, a means for detecting the focal position from the image data and moving the microscope to the focal point, and an automatic image analyzer including a CPU for controlling these processes, an image processing apparatus including the CPU, An automatic image analysis apparatus, comprising: a host computer that controls processing and analysis of the image data together with the image processing apparatus by a pipeline method.