JP2887112B2 - Spin processing device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a spin processing apparatus, and more particularly to a spin processing apparatus for performing processing such as drying of a substrate by high-speed rotation.

[0002]

2. Description of the Related Art In a film forming process and a photo process for forming a circuit pattern on a substrate such as a liquid crystal substrate, for example, processing and cleaning of a rectangular glass substrate as a work are repeatedly performed.

In order to dry the washed substrate, the substrate is placed on a spin table, rotated at high speed together with the spin table, and the cleaning liquid attached to the substrate is removed by utilizing the centrifugal force generated thereby. Elimination is being done.

FIG. 4 shows an example of a conventional spin table 2 for holding a rectangular substrate 1. The spin table 2 has a main body 3. The main body 3 has four arms 3b projecting from the outer periphery of a disk-shaped central portion 3a at intervals of 90 degrees in the circumferential direction. The four arms 3b are set to the same length, and the tip of each arm 3b is a substrate holding part 3c. The substrate holding portion 3c has two cylindrical guide pins 4 spaced apart from each other at a predetermined interval as engaging portions, and one receiving pin formed shorter than the guide pins 4 and located on the main body 3 side. 5 is fixedly protruded.

In the spin table 2, the substrate 1 has four corners engaged with a pair of guide pins 4 of each arm 3b, and the lower surfaces of the corners are supported by the receiving pins 5. That is, the substrate 1 is held on the spin table 2 in a state where the four arms 3b are along the diagonal direction of the rectangle.

As described above, when the spin table 2 holding the substrate 1 is driven to rotate at a high speed, the cleaning liquid attached to the substrate 1 is removed by centrifugal force, so that the substrate 1 can be dried.

The guide pin 4 and the receiving pin 5 are
For example, the spin table 2 is formed of a soft material such as a fluororesin, and can be held without damaging the substrate 1 when the spin table 2 holds and rotates the substrate 1 at high speed.
In this case, the guide pins 4 come into contact with the outer peripheral portion of the substrate 1,
When the spin table 2 rotates at a high speed, a contact portion of the guide pin 4 with the substrate 1 receives a centrifugal force.

[0008]

The guide pin 4 has a structure as shown in FIG. That is, the screw 6 is inserted from the lower surface side of the substrate holding portion 3c, the screw 6 is held by the nut 7, and the guide pin 4 is screwed to the screw 6 from above to be fixedly provided. Therefore, only a limited portion of the outer peripheral surface of the guide pin 4 on the inner peripheral side of the spin table 2 contacts the substrate 1. That is, the holding of the substrate 1 is repeatedly performed at the contact portion.

When the spin table 2 is driven at a high speed, the substrate 1 exerts a large stress on the contact portion due to the centrifugal force, so that the outer peripheral portion of the substrate 1 bites into the guide pins 4.

That is, the guide pins 4 may come into contact with the outer peripheral portion of the substrate 1 at the time of mounting, and the outer peripheral portion of the substrate 1 bites into the guide pins 4 by high-speed rotation.
Further, the substrate 1 is moved from this state at the end of the processing.
When this operation is repeatedly performed, only the contact portion with the substrate 1 is cut off at an early stage, and the cylindrical guide pin 4 becomes, for example, D
It may be unevenly worn in the shape of a letter, or cracked when the substrate 1 moves from the bite. Therefore, the life of the guide pin 4 is short.

The present invention has been made in view of the above circumstances, and an object of the present invention is to prevent uneven wear of a substrate guide pin for guiding the holding of a substrate and extend the life of the substrate guide pin. It is an object of the present invention to provide a spin processing device that can perform the spin processing.

[0012]

According to a first aspect of the present invention, there is provided a spin processing apparatus having a spin table, wherein a substrate is mounted on the spin table for processing. The spin table is provided with a substrate holding means, the substrate holding means has a substrate supporting means for supporting the lower surface of the substrate, and a guide roller rotatably provided, and the guide roller is provided for the substrate. And a substrate guide means engaged with the outer peripheral surface.

[0013] The invention according to claim 2 is the spin processing apparatus according to claim 1, wherein the guide roller is formed of a synthetic resin. According to the first aspect of the present invention, the spin table is provided with substrate holding means, and the substrate holding means has substrate supporting means for supporting a lower surface of the substrate, and a guide roller rotatably provided. Since the guide roller is a substrate guiding means that engages with the outer peripheral surface of the substrate, the rotation of the guide roller prevents the substrate and the substrate holding means from always coming into contact at the same abutting portion. The life of the holding means can be extended.

According to the second aspect of the present invention, since the guide roller is formed of a synthetic resin, the outer periphery of the substrate is not damaged even if the outer periphery of the substrate comes into contact with the guide roller.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. The spin processing device 10 shown in FIG. 2 has a cup 11, which is composed of a lower cup 11a and an upper cup 11b. The lower cup 11a is formed in a bowl shape with an open upper end surface, and the bottom surface has a gently curved shape inclined downward from the center toward the outer periphery. A through hole 12 is formed at the center of the bottom surface of the lower cup 11a, and a receiving flange 13 is formed at the upper end of the outer periphery of the lower cup 11a.

The upper cup 11b also has a convex curved surface with an open central portion, and a locking flange 14 is provided on the outer peripheral portion. The receiving flange 13 and the locking flange 14 are combined and integrated by a plurality of bolts 16 via, for example, a packing 15 or the like.

A rotary shaft 18 connected to a motor 17 is inserted into a through hole 12 formed at the center of the lower cup 11a.
9 is attached. The spin table 19 is provided with a rectangular substrate 20 which has been cleaned in the previous process.
Is mounted thereon and is driven to rotate at a high speed to remove the cleaning liquid adhering to the substrate 20 by centrifugal force.

The lower cup 11a has a plurality of drainage channels 2.
The cleaning liquid removed by the high-speed rotation passes through the drainage channel 21 and is discharged to the outside. Further, in the spin processing apparatus 10, the exhaust path 22 is provided and connected to the external suction means, and the air flow generated by the high-speed rotation is discharged outward to be formed by the lower cup 11a and the upper cup 11b. The air flow in the space is smooth.

As shown in FIG. 1, the spin table 19 has a disk-shaped main body 23 connected to the rotary shaft 18, and the main body 23 has guide portions 24 protruding every 90 degrees in the circumferential direction. Are provided. In the guide part 24,
An arm 25 provided separately from the main body 23 is connected. The pair of arms 25 facing each other are set to have different lengths so as to hold the rectangular substrate 20 as described later.

The arm 25 has an arm 25a,
And a holding portion 25b, which form a T-shaped integral shape. The holding portion 25b has an outer periphery formed in an arc shape, and has a receiving pin 26 as a substrate holding means and a guide pin 27 on the upper surface.

The receiving pin 26 is fixed to the holding portion 25b by a screw. The receiving pin 26 has a columnar shape, and its tip is a pointed portion having a slight flat surface at the top.
The material of the receiving pin 26 is, for example, a fluorine resin such as PTFE.

The guide pin 27 is provided at a position close to the receiving pin 26 on the outer side from the center of the main body 23. As shown in FIG. 3, the guide pin 27 has a shaft 31 formed on a roller receiving portion 30 having a small diameter on the upper side. A screw 28 penetrates from the lower surface side of the holding portion 25b, and the screw 28 is held and fixed by a nut 29 on the upper surface side of the holding portion 25b. Screw 2
The shaft 31 is screwed to 8. A cylindrical guide roller 32 is rotatably fitted to the roller receiving portion 30 so that there is no play. The guide roller 32 has such a height that the outer peripheral surface of the substrate 20 placed on the receiving pin 26 abuts on the outer peripheral surface thereof.

The guide roller 32 is made of a fluorine resin such as PCTFE. An upper portion of the guide roller 32, that is, a portion not in contact with the outer peripheral surface of the substrate 20, has a tapered portion 32a having a smaller diameter toward the upper end.
Is formed.

A set screw 33 for preventing the guide roller 32 from being pulled out is screwed into the upper end of the shaft 31. Spin processing apparatus 10 having the above configuration
The operation of is described below.

The substrate 20 having been subjected to the cleaning process and having the cleaning solution attached thereto is transferred to the spin table 19 by a transfer means such as a robot. And spin table 19
The board 20 is supported on the upper end of the upper receiving pin 26. In this state, the eight guide pins 27 are located on the outer peripheral portion of the board 20 and regulate the board 20 from sliding.

When the substrate 20 is placed on the receiving pin 26 of the spin table 19 by the transport means, the accuracy of the positioning is impaired and the tapered portion 32a of the guide roller 32 is lost.
There is a case where the outer peripheral portion of the substrate 20 comes into contact with the substrate. in this case,
Since the guide pin 32 is rotatable with respect to the guide pin 27, the guide roller 32 rotates even if the outer periphery of the substrate 20 comes into contact and slides. Therefore, the guide roller 32 made of a soft material reduces wear and shaving due to sliding of the substrate 20.

When the substrate 20 is placed on the spin table 19 and the spin table 19 is driven to rotate at a high speed, the substrate 20 comes into strong contact with the outer surface of the guide pin 27 by centrifugal force.

At this time, since the guide roller 32 of the guide pin 27 rotates slightly, it is prevented that the guide roller 32 bites into a large part at that portion. Therefore, the guide roller 32
It is possible to escape this digging over the entire circumference of.
Also, even when the spin table 19 is accelerated or decelerated, the guide roller 32 is slightly rotated so that the guide roller 3 slides on the substrate 20.
2, wear and shaving are reduced.

Further, when the processing of the substrate 20 by the high-speed rotation is completed, and the substrate 20 is lifted from the spin table 19 and taken out, the substrate 20 may bite into the guide roller 32 in some cases. However, even if a bite occurs, the guide roller 32 is rotatable if the bite is slight, and the guide roller 32 is rotated by the contact with the substrate 20. Can be removed from

Further, as described above, the guide pin 27
Since the guide roller 32 that is in contact with the substrate 20 is rotatably provided, even if the guide roller 32 is worn, only a part of the guide roller 32 is worn or scraped, and the guide roller 32 is unevenly worn, for example, in a D-shape. It is unlikely to cause repeated contact or repeated contact with the same portion, and it is unlikely to dig into that portion. Therefore, the guide roller 32 is worn or scraped over the entire circumference in a well-balanced manner.

As described above, since the guide roller 32 of the guide pin 27 is rotatably provided, only a part of the guide pin 27 is not sharply cut at an early stage, and the life can be extended. It has become.

Although the embodiment of the present invention has been described above, the present invention can be variously modified. This is described below. In the above embodiment, the material of the guide roller 32 and the receiving pin 26 is a fluororesin. However, the material is not limited to this, and may be a synthetic resin such as a peak material or UHMW. In the above embodiment, as shown in FIG. 1, the side edge of the outer periphery of the substrate 20 is supported. However, the present invention is not limited to this, and may support the corner of the substrate 20.

[0033]

As described above, according to the first aspect of the present invention, the spin table is provided with the substrate holding means, and the substrate holding means is provided with the substrate supporting means for supporting the lower surface of the substrate. A guide roller abutting on the outer periphery of the substrate is a guide roller rotatably provided, and since the guide roller is a substrate guide means engaged with the outer peripheral surface of the substrate, the substrate and the substrate are rotated by the rotation of the guide roller. The holding means does not always touch at the same abutment part,
Therefore, the life of the substrate holding means can be extended.

According to the second aspect of the present invention, since the guide roller is formed of a synthetic resin, the outer periphery of the substrate is not damaged even if the outer periphery of the substrate comes into contact with the guide roller.

[Brief description of the drawings]

FIG. 1 is a plan view showing a configuration of a spin processing device according to an embodiment of the present invention.

FIG. 2 is a side sectional view showing the spin table according to the embodiment;

FIG. 3 is a side sectional view showing a configuration of a guide pin according to the embodiment.

FIG. 4 is a plan view showing a conventional spin table.

FIG. 5 is a side sectional view showing a configuration of a conventional guide pin.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Spin processing apparatus 11 ... Cup 12 ... Through-hole 17 ... Motor 18 ... Rotating shaft 19 ... Spin table 20 ... Substrate 23 ... Main body 24 ... Guide part 25 ... Arm body 26 ... Receiving pin 27 ... Guide pin 32 ... Guide roller

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁶ , DB name) H01L 21/304 H01L 21/68 H01L 21/027 B05C 11/08

Claims (2)

(57) [Claims] 1. A spin processing apparatus having a spin table and mounting and processing a substrate on the spin table, wherein the spin table is provided with substrate holding means. A substrate support means for supporting a lower surface of the substrate; and a substrate guide means having a guide roller rotatably provided, the guide roller engaging with an outer peripheral surface of the substrate. apparatus. 2. The spin processing apparatus according to claim 1, wherein said guide roller is formed of a synthetic resin.