JPH03785B2 - - Google Patents

Description

Detailed Description of the Invention [Industrial Application Field] The present invention relates to a device for rotating a thin plate-like object, and more specifically, the present invention relates to a rotating device for a thin plate-like object. By using an arc-shaped holder, the notch can be held reliably and accurately regardless of its position.

[Prior Art] For example, when a wafer as a thin plate-like object is dried in the process of manufacturing a semiconductor product and the front and back surfaces of the wafer are simultaneously dried, or when a resist is applied to the front and back surfaces, the wafer is heated as shown in FIG. 1
The peripheral edge of the wafer 1 is held by three or four V-shaped grooved roller-shaped holders 2, and in this state the wafer 1 is rotated around its center.

[Problems to be Solved by the Invention] By the way, a notch 3 called an orientation flat indicating the crystal direction is formed in a part of the peripheral edge of the wafer 1. When the wafer 1 transported by the transport line is set on the rotating device, the notch 3 may come to the holder 2. When the notch 3 comes to the holder 2 in this manner, the state in which the wafer 1 is held becomes uncertain, and there is a risk that the center of the wafer 1 may deviate from the center of rotation. Such positional misalignment not only causes vibration and noise as it rotates, but also causes friction between the holder 2 and the wafer 1, causing the problem that the generated dust contaminates the wafer 1. Ta. Further, the vibration of the wafer 1 may shorten the life of the spindle, motor, etc. of the rotating device.

Note that some devices are equipped with a positioning mechanism for the wafer 1 so that the notch 3 does not reach the holder 2, but in this case there is a problem that the device becomes complicated.

In view of the problems of the prior art, an object of the present invention is to reliably and stably hold a circular thin plate-like object having a notch in a part of its periphery, and to rotate the thin plate-like object. To provide a device for rotating a thin plate-like object, which does not generate vibration or noise and is free from the possibility of generating dust due to friction between a holder and the object being held.

[Means for Solving the Problems] In order to achieve the above object, the present invention provides a rotating device for rotating a circular thin plate-like object having a notch in a part of the peripheral edge, which rotates the thin plate-like object. In this case, a pair of holders for holding the thin plate-like object are each provided with an arc-shaped groove portion having a length that includes the notch of the thin plate-like object and can come into contact with the peripheral edge of the thin plate-like object, and The thin plate-shaped object is held by the holder by moving the holder in the radial direction of a rotating shaft for rotating the holder and pressing the grooves of the holder against the peripheral edges of the thin plate-shaped object, respectively. Each of the holders is provided with a hole extending from the groove toward the outer surface.

[Function] In this configuration, even if the notch of the thin plate-like object is located at the holder, the holder has an arc-shaped groove with a length that can come into contact with the peripheral edge including the notch of the thin plate-like object. Since the thin plate-like object is held by this, the thin plate-like object is held reliably and stably. Therefore, the thin plate-like object can be rotated without fear of generating vibrations or noise or generating dust due to friction between the holder and the object being held. Moreover,
The holder is provided with a hole that extends from the groove toward the outer surface, so if liquid adheres to the surface of the thin plate-like object, the liquid is removed through the through hole. Drying of the object takes place without any problems. That is, by rotating the circular thin plate-shaped object having a notch in a part of the peripheral edge, the drying can be performed reliably.

[Examples] Examples will be specifically described below with reference to the drawings.

1 and 2 show a rotating device for a wafer (thin plate-like object) 1 constructed according to the present invention,
In the figure, 7 is a pair of arc-shaped holders,
The pair of holders 7 are each attached to the tip of an L-shaped slide shaft 8. The base end of the slide shaft 8 is attached to the upper end of the rotating shaft 9 so as to be slidable in the radial direction, so that the slide shaft 8 can be moved in the radial direction by operating an operating device (not shown). It is configured.

More specifically, the holder 7 has a V-shaped groove 10 formed along its longitudinal direction on its inner surface, and the groove 10 is pressed against the peripheral edge of the wafer 1 to hold the wafer 1.
It is now possible to hold. The length of the holder 7 is such that it can come into contact with the peripheral edge of the wafer 1 including the notch 3, as shown in FIG.
A plurality of drain holes 11 are formed in the holder 7 at equal intervals from the groove 10 to the outer surface, and the cleaning liquid on the surface of the wafer 1 is drained radially outward from these drain holes 11 by centrifugal force. The structure is such that it can be discharged smoothly.

In the wafer 1 rotation apparatus having the above-described configuration, the wafer 1 transported by the wafer transport line (not shown) is held between the pair of holders 7
By moving the slide shaft 8 radially inward, the grooves 10 of the pair of holders 7 are pressed against the peripheral edge of the wafer 1, and the wafer 1 is held.

At this time, even if the notch 3 of the wafer 1 is at the holder 7 when the wafer 1 is set between the pair of holders 7, the peripheral edges on both sides of the notch 3 are Since the wafer 1 is in contact with the wafer 1, the wafer 1 is held securely and accurately, and there is no fear of so-called misalignment.

The wafer 1 held in this manner is subjected to centrifugal drying by rotation or resist coating, and then
The slide shaft 8 is moved radially outward to open the pair of holders 7 and sent to the conveying line.
Note that as the conveyance line, conveyance means such as a belt, a vacuum suction hand, an air bearing, or a water bearing can be used.

Although one embodiment of the present invention has been described above, the present invention is also applicable to devices for rotating thin plate-like objects other than the wafer 1.

[Effects of the Invention] As explained above, according to the present invention, the thin plate-shaped object has an arc-shaped groove portion of a length that can be connected to the peripheral edge including the notch portion, and the groove portion extends from the groove portion toward the outer surface. Since the thin plate-shaped object is held by a holder with a through hole, the thin plate-shaped object can be held securely and stably, and the thin plate-shaped object can be rotated without the fear of generating vibrations, noise, or dust due to friction. Moreover, when drying a thin plate-like object, the liquid is expelled through the through-hole, and drying can be carried out without any problem.

[Brief explanation of drawings]

FIG. 1 is a plan view of a wafer rotation device constructed according to the present invention, FIG. 2 is a sectional view taken along the line -- in FIG. 1, and FIG. 3 is a plan view of a conventional wafer rotation device. 1... Wafer, 3... Notch, 7... Holder,
8...Slide shaft, 9...Rotary shaft.

Claims (1)

[Claims] 1. In a rotating device for rotating a circular thin plate-like object having a notch in a part of the peripheral edge, a pair of holders that hold the thin plate-like object when rotating the thin plate-like object are provided with a pair of holders for holding the thin plate-like object. An arc-shaped groove portion including a notch portion and having a length capable of coming into contact with the peripheral edge of the thin plate-like object is provided, and the holding device is moved in a radial direction of a rotation axis for rotating the holding device to hold the holding device. By pressing the grooves of the tool against the peripheral edges of the thin plate-like object, the thin plate-like object is held by the holder, and each of the holders has a hole penetrated from the groove toward the outer surface. A rotating device for a thin plate-like object, characterized in that it is provided with a.