JP2889712B2 - Electrostatic micromotor - Google Patents
Electrostatic micromotorInfo
- Publication number
- JP2889712B2 JP2889712B2 JP1018291A JP1018291A JP2889712B2 JP 2889712 B2 JP2889712 B2 JP 2889712B2 JP 1018291 A JP1018291 A JP 1018291A JP 1018291 A JP1018291 A JP 1018291A JP 2889712 B2 JP2889712 B2 JP 2889712B2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- stator
- electrostatic
- electromagnetic wave
- generated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000006243 chemical reaction Methods 0.000 claims description 15
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001459 lithography Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
Landscapes
- Micromachines (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は数ｍｍ、或るいはそれ以
下の大きさのマイクロマシンに用いられる静電マイクロ
モータに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostatic micromotor used for a micromachine having a size of several mm or less.
【０００２】[0002]
【従来の技術】近年、マイクロマシンと称して数ｍｍ、
或るいはそれ以下の大きさの微小機械が提案され、様々
な研究開発が為されている。そのマイクロマシンを機械
的に駆動する駆動源として、シリコンなどの半導体に対
してフォトリソグラフィ技術を駆使して半導体製の回転
子と固定子とを形成し、その回転子と固定子との間に働
く静電力によって回転子を回転させる静電マイクロモー
タが試作されている（例えば「日本ロボット学会誌」８
巻４号１９９０年８月号６３頁以降参照）。2. Description of the Related Art In recent years, several millimeters have been referred to as micromachines,
A small or smaller micromachine has been proposed, and various researches and developments have been made. As a drive source for mechanically driving the micromachine, a semiconductor rotor and stator are formed by using photolithography technology on semiconductors such as silicon, and work between the rotor and stator. An electrostatic micromotor that rotates a rotor by electrostatic force has been prototyped (for example, “Journal of the Robotics Society of Japan” 8
Vol. 4, August 1990, p. 63 et seq.).
【０００３】[0003]
【発明が解決しようとする課題】然し乍らこの試作され
た静電マイクロモータにおける静電力は回転子の翼片の
先端と固定子片の先端との間の電荷によって発生するポ
イント間のクーロン力に依存する構成であるので、大き
な駆動力を得るには１００Ｖ以上の高電圧を用いる必要
がある。ところが試作されたマイクロモータはその回転
子の直径が２００μｍ程度で回転子、固定子間の距離が
２〜３μｍと極めて小サイズであり、モータの大きさに
対して用いる電圧が高いので回転子、固定子間や隣接す
る固定子間の耐圧とかに格別の配慮を払う必要がある。However, the electrostatic force in this prototype electrostatic micromotor depends on the Coulomb force between the points generated by the charge between the tip of the rotor wing and the tip of the stator. Therefore, it is necessary to use a high voltage of 100 V or more to obtain a large driving force. However, the prototype micromotor has a rotor diameter of about 200 μm and the distance between the rotor and the stator is extremely small as 2-3 μm. The voltage used for the size of the motor is high, so the rotor Special attention must be paid to the pressure resistance between stators and between adjacent stators.
【０００４】また回転駆動するために固定子に印加する
１００Ｖ以上の高電圧源を必要とする上に、その高電圧
を制御するための周辺回路も大型化する問題点があっ
た。In addition, there is a problem that a high voltage source of 100 V or more applied to the stator is required for rotational driving, and a peripheral circuit for controlling the high voltage becomes large.
【０００５】[0005]
【課題を解決するための手段】本発明はこのような課題
に鑑みて為されたものであって、回転子の複数の翼片
と、その翼片に面対向すべく延在せしめられた多数の固
定子片とを有し、これらの翼片の各表面側から同一極性
のＰＮ接合を形成してこれらの翼片に電磁波−電気変換
素子を設け、該各素子に電磁波を照射することによって
各翼片の表面と裏面に異なった電荷を生ぜしめ、その電
荷による静電力によって回転子を回転させるものであ
る。SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has a plurality of blades of a rotor and a plurality of blades extending so as to face the blades. By forming a PN junction of the same polarity from each surface side of these wing pieces, providing an electromagnetic wave-electric conversion element on these wing pieces, and irradiating each element with an electromagnetic wave. Different electric charges are generated on the front and rear surfaces of each wing piece, and the rotor is rotated by the electrostatic force generated by the electric charges.
【０００６】[0006]
【作用】本発明によれば、回転子と固定子とに太陽電池
などの電磁波−電気変換素子を設けると共に、その回転
子と固定子とを面対向せしめ、その対向面間に生じるク
ーロン力による駆動力を用いているので、外部から駆動
用高電圧を印加することなく、回転子、固定子に太陽光
などの電磁波を照射するだけで回転子を回転させること
ができる。According to the present invention, an electromagnetic wave-to-electric conversion element such as a solar cell is provided on a rotor and a stator, and the rotor and the stator are made to face each other. Since the driving force is used, the rotor can be rotated only by irradiating the rotor and the stator with electromagnetic waves such as sunlight without applying a high driving voltage from the outside.
【０００７】[0007]
【実施例】図１、図２は本発明静電マイクロモータの要
部の拡大断面図、並びに上面図であって、１は静電モー
タの回転子であり、２は固定子である。これらの回転子
１や固定子２は半導体シリコン基板をベースとし、該基
板に対してフォトリソグラフィ法、ＣＶＤ法、エッチン
グ法などを駆使する既提案の手法を用いて回転子の直径
約２００μｍ、回転子１と固定子２との間隔１〜２μ
ｍ、回転子１並びに固定子２の厚み約１μｍ、のサイズ
で形成される。ここで既提案の構造と大きく相違すると
ころは、回転子１の複数の翼片３、３・・・が固定子２
の翼片４、４・・・の下面まで延長されていて、回転子
１の複数の翼片３、３・・・と、固定子２の多数の翼片
４、４・・・とが面対向しているところであり、また回
転子１の各翼片３、３・・・の表面近傍に不純物の注入
などの方法によってｐｎ接合５が形成されており、また
固定子２の各翼片４、４・・・の一側部の表面近傍にｐ
ｎ接合６が形成されている。そしてこれらのｐｎ接合
５、６は太陽光などの電磁波の照射を受けると電力を発
生する太陽電池で代表される電磁波−電気変換素子７を
構成している。そして回転子１の翼片３、３・・・に太
陽光８が照射されると、図１に示すようにその表面側に
＋の電荷が、裏面側に−の電荷が発生し、その異電荷に
よって面対向した回転子１と固定子２との間に静電力が
発生する。尚、この時固定子１に設ける電磁波−電気変
換素子７はその翼片４の全面に設けるのではなく、図２
の斜線で示す如く、翼片４の片側にのみ設けられてい
る。1 and 2 are an enlarged sectional view and a top view of a main part of an electrostatic micromotor according to the present invention, wherein 1 is a rotor of the electrostatic motor, and 2 is a stator. The rotor 1 and the stator 2 are based on a semiconductor silicon substrate, and the diameter of the rotor is set to about 200 μm by using a proposed method that makes full use of a photolithography method, a CVD method, an etching method, and the like. 1-2 μm between stator 1 and stator 2
m, the thickness of the rotor 1 and the stator 2 is about 1 μm. The major difference from the proposed structure is that the plurality of blades 3, 3,.
Are extended to the lower surfaces of the wing pieces 4, 4,... Of the rotor 1 and the plurality of wing pieces 4, 4,. The pn junction 5 is formed in the vicinity of the surface of each of the blade pieces 3, 3,... Of the rotor 1 by a method such as impurity injection. , P ... near the surface on one side
An n-junction 6 is formed. These pn junctions 5 and 6 constitute an electromagnetic wave-electric conversion element 7 typified by a solar cell that generates electric power when irradiated with electromagnetic waves such as sunlight. When the sunlight 8 is irradiated to the wings 3, 3,... Of the rotor 1, positive charges are generated on the front side and negative charges are generated on the rear side as shown in FIG. An electrostatic force is generated between the rotor 1 and the stator 2 facing each other by the electric charge. At this time, the electromagnetic wave-electric conversion element 7 provided on the stator 1 is not provided on the entire surface of the wing 4, but is shown in FIG.
Are provided only on one side of the wing piece 4.
【０００８】一方、一般にモータの回転子１は回転軸
（図示せず）に軸枢されているので、回転子１と固定子
２との間に発生する静電力は回転子１を固定子２側に近
づける力としては働かない。On the other hand, since the rotor 1 of the motor is generally pivoted about a rotating shaft (not shown), the electrostatic force generated between the rotor 1 and the stator 2 causes the rotor 1 to move between the rotor 1 and the stator 2. It does not work as a force to approach the side.
【０００９】この時固定子１に設ける電磁波−電気変換
素子７は図２の斜線で示す如く、翼片４の片側にのみ設
けられているので、回転子１と固定子２との間に働く静
電力は、回転子１を回転させる力として作用する。At this time, since the electromagnetic wave-electric conversion element 7 provided on the stator 1 is provided only on one side of the wing piece 4 as shown by oblique lines in FIG. 2, it works between the rotor 1 and the stator 2. The electrostatic force acts as a force for rotating the rotor 1.
【００１０】即ち、回転子１１の固定子２６によって被
われていない個所には＋の電荷が発生し、また固定子２
１の電磁波−電気変換素子７１の裏面には−の電荷が生
起されるので、回転子１１には左方向の回転力が働く。
また回転子１２の電磁波照射個所表面の＋電荷は固定子
２２の電磁波−電気変換素子７２の裏面の−電荷に吸引
される。更に回転子１３と電磁波−電気変換素子７４、
並びに回転子１４と電磁波−電気変換素子７５との間に
同様に回転子１を左方向へ回転させる力が発生する。そ
の結果、回転子１は左側回転をする。That is, a positive charge is generated at a portion of the rotor 11 which is not covered by the stator 26, and
Since a negative electric charge is generated on the back surface of one electromagnetic wave-electric conversion element 71, a leftward rotational force acts on the rotor 11.
The positive charges on the surface of the rotor 12 where the electromagnetic waves are irradiated are attracted to the negative charges on the back surface of the electromagnetic wave-electric conversion element 72 of the stator 22. Further, the rotor 13 and the electromagnetic wave-electric conversion element 74,
Similarly, a force for rotating the rotor 1 to the left is generated between the rotor 14 and the electromagnetic wave-electric conversion element 75. As a result, the rotor 1 rotates leftward.
【００１１】ここでこの回転子１と固定子２との間に働
く静電力について説明する。図３に示すように、厚さ１
μｍの単結晶シリコン基板から構成された電磁波−電気
変換素子７に太陽光８を照射すると、正負の電荷が発生
し、その電荷はシリコン基板を誘電体とみなし、基板の
表裏に電磁波−電気変換素子の開放電圧を発生するため
にその電荷量Ｑは、Here, the electrostatic force acting between the rotor 1 and the stator 2 will be described. As shown in FIG.
When the electromagnetic wave-electric conversion element 7 composed of a single-crystal silicon substrate of μm is irradiated with sunlight 8, positive and negative electric charges are generated, and the electric charges are regarded as the dielectric of the silicon substrate, and the electromagnetic wave-electric conversion In order to generate an open circuit voltage of the element, its charge Q is
【００１２】[0012]
【数１】 (Equation 1)
【００１３】ここで図４に示す如く、回転子１と固定子
２の各々の電荷量を、面積１μｍ2 の点電荷とみなして
静電吸引力Ｆを計算すると、As shown in FIG. 4, when the amount of charge of each of the rotor 1 and the stator 2 is regarded as a point charge having an area of 1 μm 2 , an electrostatic attraction force F is calculated.
【００１４】[0014]
【数２】 (Equation 2)
【００１５】となり、回転子１に働くトルクＴとして
は、回転子１の半径ｒを１００μｍとすると、As a torque T acting on the rotor 1, if the radius r of the rotor 1 is 100 μm,
【００１６】[0016]
【数３】 (Equation 3)
【００１７】が得られ、回転子１は電磁波、例えば太陽
光を照射することによって回転を始める。The rotor 1 starts rotating by irradiating electromagnetic waves, for example, sunlight.
【００１８】尚、図１、図２においては、説明の簡単の
ために回転子１が４極で固定子２が６極の構成を示した
が、これらの極数は任意に変更し得ることは当然であ
る。Although FIGS. 1 and 2 show a configuration in which the rotor 1 has four poles and the stator 2 has six poles for simplicity of explanation, the number of these poles can be arbitrarily changed. Is natural.
【００１９】また電磁波−電気変換素子に照射される電
磁波としては太陽光に限ることなく、太陽光以外に、波
長の短い紫外線域の光から波長の長い赤外線域の光も同
様に用いることができ、また単位面積当りのエネルギー
密度が高い収束レーザ光を用いれば静電モータとして大
きなトルクを得ることができるであろう。The electromagnetic wave applied to the electromagnetic wave-to-electrical conversion element is not limited to sunlight, and other than sunlight, light in the ultraviolet region having a short wavelength and light in the infrared region having a long wavelength can be similarly used. If a convergent laser beam having a high energy density per unit area is used, a large torque can be obtained as an electrostatic motor.
【００２０】[0020]
【発明の効果】本発明は以上の説明から明らかな如く、
回転子の複数の翼片と、その各翼片に面対向すべく延在
せしめられた多数の固定子片とを有し、これらの翼片の
各表面側から同一極性のＰＮ接合を形成してこれらの翼
片に電磁波−電気変換素子を設け、該各素子に電磁波を
照射することによって各翼片の表面と裏面に異なった電
荷を生ぜしてその電荷による静電力によって回転子を回
転させているので、マイクロマシン外部から駆動用電源
を供給することなくモータを回転させることができる。
またモータ駆動用エネルギー供給がワイヤレス化される
ので、マイクロマシンの行動に自由度が増すと共に、そ
の応用範囲を拡大することができる。As apparent from the above description, the present invention provides:
It has a plurality of rotor blades and a number of stator pieces extending so as to face each of the blades, and forms a PN junction of the same polarity from each surface side of these blades. An electromagnetic wave-electric conversion element is provided on each of these wing pieces, and by irradiating the respective elements with electromagnetic waves, different charges are generated on the front and back surfaces of each wing piece, and the rotor is rotated by electrostatic force due to the charges. Therefore, the motor can be rotated without supplying a driving power supply from outside the micromachine.
In addition, since the energy supply for driving the motor is made wireless, the degree of freedom of the operation of the micromachine is increased, and the range of application thereof can be expanded.
【図１】本発明静電モータの要部の拡大断面図である。FIG. 1 is an enlarged sectional view of a main part of an electrostatic motor of the present invention.
【図２】本発明静電モータの要部の拡大上面図である。FIG. 2 is an enlarged top view of a main part of the electrostatic motor of the present invention.
【図３】本発明静電モータにおける電荷量算出のための
説明図である。FIG. 3 is an explanatory diagram for calculating a charge amount in the electrostatic motor of the present invention.
【図４】本発明静電モータにおける静電吸引力算出のた
めの説明図である。FIG. 4 is an explanatory diagram for calculating an electrostatic attraction force in the electrostatic motor of the present invention.
１ 回転子 ２ 固定子 ３ 回転子の翼片 ４ 固定子の翼片 ７ 電磁波−電気変換素子 DESCRIPTION OF SYMBOLS 1 Rotor 2 Stator 3 Rotor wing piece 4 Stator wing piece 7 Electromagnetic wave-electric conversion element
───────────────────────────────────────────────────── フロントページの続き (72)発明者 中嶋 行雄 守口市京阪本通２丁目18番地 三洋電機 株式会社内 (72)発明者 津田 信哉 守口市京阪本通２丁目18番地 三洋電機 株式会社内 (56)参考文献 特開 平２−79784（ＪＰ，Ａ) 特開 平２−214483（ＪＰ，Ａ) (58)調査した分野(Int.Cl.6，ＤＢ名) H02N 1/00 H02N 11/00 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Yukio Nakajima 2--18 Keihanhondori, Moriguchi-shi Sanyo Electric Co., Ltd. (72) Inventor Shinya Tsuda 2--18 Keihanhondori, Moriguchi-shi Sanyo Electric Co., Ltd. ( 56) References JP-A-2-79784 (JP, A) JP-A-2-214483 (JP, A) (58) Fields investigated (Int. Cl. 6 , DB name) H02N 1/00 H02N 11/00
Claims (1)
駆使して半導体製の回転子と固定子とを形成し、その回
転子と固定子との間に働く静電力によって回転子を回転
させる静電マイクロモータにおいて、回転子の複数の翼
片と、その翼片に面対向すべく延在せしめられた多数の
固定子片とから成り、これらの翼片の各表面側から同一
極性のＰＮ接合を形成してこれらの翼片に電磁波−電気
変換素子を構成し、該各素子に電磁波を照射することに
よって各翼片の表面と裏面に異なった電荷を生ぜしめ、
その電荷による静電力によって回転子を回転させること
を特徴とした静電マイクロモータ。1. An electrostatic device for forming a semiconductor rotor and a stator using a lithography technique on a semiconductor substrate, and rotating the rotor by electrostatic force acting between the rotor and the stator. In a micromotor, the rotor is composed of a plurality of blade pieces and a plurality of stator pieces extending so as to face the blade pieces, and a PN junction having the same polarity is formed from each surface side of these blade pieces. By forming an electromagnetic wave-electric conversion element on these wing pieces, by irradiating each element with an electromagnetic wave, a different charge is generated on the front and back surfaces of each wing piece,
An electrostatic micromotor characterized in that a rotor is rotated by electrostatic force generated by the electric charge.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1018291A JP2889712B2 (en) | 1991-01-30 | 1991-01-30 | Electrostatic micromotor |
| US07/823,459 US5262695A (en) | 1991-01-24 | 1992-01-22 | Micromachine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1018291A JP2889712B2 (en) | 1991-01-30 | 1991-01-30 | Electrostatic micromotor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04244790A JPH04244790A (en) | 1992-09-01 |
| JP2889712B2 true JP2889712B2 (en) | 1999-05-10 |
Family
ID=11743150
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1018291A Expired - Fee Related JP2889712B2 (en) | 1991-01-24 | 1991-01-30 | Electrostatic micromotor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2889712B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2703256C1 (en) * | 2018-12-29 | 2019-10-16 | Николай Иванович Кузин | Electrostatic motor |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3265479B2 (en) | 1999-11-15 | 2002-03-11 | 独立行政法人産業技術総合研究所 | Optical actuator |
| WO2007094113A1 (en) * | 2006-02-13 | 2007-08-23 | Seiko Instruments Inc. | Spindle motor and information recording/reproducing device |
| WO2007094112A1 (en) * | 2006-02-13 | 2007-08-23 | Seiko Instruments Inc. | Spindle motor and information recording/reproducing device |
| JP6470993B2 (en) * | 2015-02-13 | 2019-02-13 | 学校法人 関西大学 | Rotating device |
-
1991
- 1991-01-30 JP JP1018291A patent/JP2889712B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2703256C1 (en) * | 2018-12-29 | 2019-10-16 | Николай Иванович Кузин | Electrostatic motor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04244790A (en) | 1992-09-01 |
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