JP6470993B2 - Rotating device - Google Patents

Description

  The present invention relates to a rotating device that rotates a rotating body using photovoltaic power.

  2. Description of the Related Art Conventionally, a micro-analysis chip used for analyzing a mixed liquid obtained by mixing two or more kinds of liquids (fluids) with a fluorescence microscope or the like is known (see Patent Document 1).

  As shown in FIG. 18, this micro analysis chip has a minute flow path 102 through which a fluid flows. The flow path 102 is configured by connecting a first flow path 103, a second flow path 104, and a third flow path 105. At the connection site of the first to third channels 103 to 105 in the channel 102, one ends of the channels 103, 104, and 105 are connected to form a Y shape. A first inlet 103 </ b> A is provided at the other end of the first channel 103, and a second inlet 104 </ b> A is provided at the other end of the second channel 104. A discharge port 105 </ b> A is provided at the other end of the third flow path 105. In the channel 102 configured in this way, for example, the width is about 0.5 mm and the depth is about 0.9 mm.

  In the micro-analysis chip 100 described above, the first liquid, which is a fluid containing a specimen, is introduced into the first flow path 103 from the first introduction port 103A, and the second liquid, which is a fluid containing a reagent, is introduced from the second introduction port 104A. It is introduced into the two flow paths 104. The first liquid and the second liquid enter the third flow path 105 through the first flow path 103 and the second flow path 104, and are mixed while flowing through the third flow path 105 to perform a predetermined chemical reaction. Wake up. And the antigen or antibody which is a measuring object is detected by observing the fluid after this chemical reaction (mixed liquid of 1st liquid and 2nd liquid) with a fluorescence microscope etc. FIG.

JP 2009-63436 A

  However, in the above-described microanalysis chip 100, the first liquid and the second liquid are naturally mixed while flowing through the third flow path 105, so that they are not sufficiently mixed due to the influence of the liquid flow velocity, viscosity, etc. In some cases, no chemical reaction was obtained.

  For this reason, for example, it is conceivable that a rotating body or the like is disposed in the third flow path 105 and the first liquid and the second liquid are stirred and mixed by the rotation of the rotating body or the like. A complex mechanism (for example, a rotational drive source such as a motor or the like, and rotational power from the motor or the like for rotating the rotational body or the like after the rotational body or the like is disposed in a minute space of about 5 mm. It is difficult to connect a transmission mechanism or the like that transmits to the rotating body or the like. Further, even if the complicated mechanism can be applied (arranged) to the micro analysis chip 100, the micro analysis chip 100 is not practical because it increases in size.

  In view of the above problems, an object of the present invention is to provide a rotating device that can rotate a rotating body with a simple configuration without connecting a transmission mechanism that transmits rotational power to the rotating body. .

A rotating device according to the present invention is a rotating body that is rotatable about a rotation axis extending in a predetermined direction, and extends in a direction orthogonal or substantially orthogonal to the rotation axis and is configured by a p-type semiconductor, And a rotating body having a second portion that extends to the opposite side of the first portion across the rotating shaft and is made of an n-type semiconductor, and an electrode that is disposed around a rotating region in which the rotating body rotates. A case that rotatably accommodates the rotating body in an internal space , wherein a p-type semiconductor constituting the first part and an n-type semiconductor constituting the second part are joined, and the electrode is The case is disposed outside the internal space, and the case includes an opening that communicates the internal space with the external space of the case, and a light transmitting portion that transmits light from the outside of the case to the internal space .

  According to such a configuration, the rotating body can be rotated (turned) by a simple configuration such as the rotating body and the electrode without connecting a mechanism for transmitting rotational power to the rotating body. Specifically, it is as follows.

When the rotating body (first part and second part) is irradiated with light, a photovoltaic force is generated, and the first part is positively charged and the second part is negatively charged. Alternatively, by negatively charging, at least one of the first part and the second part is attracted to the electrode or repels the electrode, whereby the rotating body can be rotated. That is, according to the above configuration, rotational power is transmitted by attracting or repelling at least one of the first part and the second part charged positively or negatively by the photovoltaic force to the electrode using Coulomb force. The rotating body can be rotated without connecting a transmission mechanism or the like to the rotating body.
In addition, according to the above configuration, in a state where a plurality of types of fluids are allowed to flow into the internal space of the case from the opening, the rotator is irradiated with light through the translucent part and applied to the electrodes. By rotating (turning), it is possible to sufficiently mix (stir) a plurality of types of fluids that have flowed into the internal space.

  In the rotating device, the rotating body has a through-hole through which the rotating shaft is inserted, and a third portion constituted by the p-type semiconductor and the n-type semiconductor so that the p-type semiconductor and the n-type semiconductor are joined to each other. And a first part extending from the third part, and the second part extending from the fourth part.

  According to such a configuration, the rotating body is configured by the rotating body main body having the through hole, and the first portion and the second portion extending from the rotating body main body. The configuration can be simplified.

  Moreover, it is preferable that the rotating device includes an application unit that applies a voltage to the electrodes so that the polarities of the electrodes are alternately switched.

  According to such a configuration, since the polarity of the electrode is alternately switched by the application unit, the first part and the second part are alternately attracted (or repelled alternately) to the electrode. And can be rotated stably.

  In the rotating device, the electrode includes a first electrode arranged at a predetermined position around the rotating region, and a second electrode facing the first electrode across the rotating region, The application unit may alternately switch the polarities of the first electrode and the second electrode so that the first electrode and the second electrode have opposite polarities.

  According to this configuration, each of the first part and the second part extending in opposite directions with respect to the rotation axis are simultaneously attracted to the pair of electrodes (first electrode and second electrode) facing each other with the rotation region interposed therebetween. Or since it repels simultaneously, the rotational torque of a rotary body increases compared with the case where there is one electrode.

  The opening may include a plurality of inflow portions that allow fluid to flow into the internal space and at least one outflow portion that allows fluid to flow out from the internal space.

  According to such a configuration, in a state where the rotating body is rotated, the fluid in the internal space is caused to flow out from the outflow portion while the fluid is allowed to flow into the internal space from each inflow portion, thereby mixing (stirring) a plurality of types of fluids. Can be performed continuously.

  The rotating device may include an irradiation unit that can irradiate the rotating body with light.

  According to such a configuration, the rotating body can be stably rotated by irradiating the rotating body with light by the irradiating unit, regardless of the light environment (the distribution state of light around the rotating body).

  As described above, according to the present invention, it is possible to provide a rotating device that can rotate a rotating body with a simple configuration.

FIG. 1 is a schematic configuration diagram illustrating a configuration of a mixing apparatus according to the present embodiment. 2 is a cross-sectional view taken along the line II-II in FIG. FIG. 3 is a schematic diagram for explaining a method of applying a voltage to the electrode, and is a schematic diagram showing a state in which the voltage is applied to the electrode. FIG. 4 is a schematic diagram for explaining a method of applying a voltage to the electrode, and is a schematic diagram showing a state in which the rotating body rotates and faces the opposing direction of the electrode. FIG. 5 is a schematic diagram for explaining a method of applying a voltage to the electrode, and is a schematic diagram showing a state in which the polarity of the electrode is switched. FIG. 6 is a cross-sectional view for explaining the manufacturing method of the mixing apparatus, and is a cross-sectional view in a state where Si ₃ N ₄ is deposited in the first region. FIG. 7 is a plan view for explaining the manufacturing method of the mixing apparatus, and is a plan view in a state in which the second region and the opening are formed by etching. 8 is a cross-sectional view taken along the line VIII-VIII in FIG. FIG. 9 is a cross-sectional view for explaining the manufacturing method of the mixing apparatus, and is a cross-sectional view in a state where SiO ₂ is deposited in the second region. FIG. 10 is a cross-sectional view for explaining the manufacturing method of the mixing apparatus, and is a cross-sectional view in a state where an insulating film is formed on the wall surface defining the third region after the third region is formed by etching. . FIG. 11 is a cross-sectional view for explaining the manufacturing method of the mixing apparatus, in which a Si ₃ N ₄ layer is formed after the polycrystalline Si is deposited in the third region. FIG. 12 is a cross-sectional view for explaining the manufacturing method of the mixing apparatus, and is a cross-sectional view in a state where a conductive material is fitted in the fourth region. FIG. 13 is a cross-sectional view for explaining the manufacturing method of the mixing apparatus, in which a part of the Si ₃ N ₄ layer is removed. FIG. 14 is a cross-sectional view for explaining the manufacturing method of the mixing apparatus, and is a cross-sectional view in a state where SiO ₂ in the second region is removed. FIG. 15 is a schematic diagram illustrating a configuration of a rotating device including one electrode. FIG. 16 is a schematic diagram illustrating a configuration of a rotating device including three or more electrodes. FIG. 17 is a schematic diagram illustrating a configuration of a circuit device including a plurality of rotating bodies. FIG. 18 is a schematic diagram of a conventional micro analysis chip.

  Hereinafter, an embodiment of the present invention will be described with reference to FIGS.

  In the present embodiment, a mixing device capable of continuously mixing a plurality of types of fluids will be described as an example of a rotating device. As shown in FIGS. 1 and 2, the mixing apparatus includes a rotating body 2 that can rotate around a rotating shaft 42 extending in a predetermined direction (vertical direction in FIG. 2; hereinafter, also simply referred to as “axial direction”). And an electrode 3 arranged around a region (rotation region, rotation space) in which the rotating body 2 rotates. Specifically, the mixing device 1 applies a voltage to the rotating body 2, the electrode 3, the case 4 that rotatably accommodates the rotating body 2 in the internal space S, and the electrode 3 so that the polarity of the electrode 3 is switched alternately. And an applying unit 5 for applying. The internal space S includes the rotation area. The internal space S of the present embodiment substantially coincides with the rotation area and is slightly larger than the rotation area.

  The rotating body 2 extends in a direction orthogonal or substantially orthogonal to the rotating shaft 42, extends to the opposite side of the first portion 21 across the rotating shaft 42, and n And a second portion 22 made of a type semiconductor. The p-type semiconductor constituting the first portion 21 and the n-type semiconductor constituting the second portion 22 are joined (specifically, a pn junction or a pin junction). The rotating body 2 also has a through hole 230 through which the rotating shaft 42 is inserted, and also has a rotating body main body 23 that can rotate around the rotating shaft 42 in a state where the rotating shaft 42 is inserted into the through hole 230.

  The first portion 21 extends straight from the rotating body main body 23 in a direction orthogonal to the axial direction. The first part 21 of the present embodiment is a prismatic part extending in the orthogonal direction. The first portion 21 has a prismatic shape in which the size of the cross section at each position in the extending direction (longitudinal direction) is substantially constant.

  The second part 22 extends straight from the position opposite to the first part 21 in the rotating body 23 in the direction opposite to the first part 21. The second part 22 of the present embodiment has the same shape as the first part 21. Specifically, the second part 22 is a prismatic part extending from the rotary body 23 in the opposite direction to the first part 21. The second portion 22 has a prismatic shape in which the size of the cross section at each position in the extending direction (longitudinal direction) is substantially constant.

  In the rotating body 2 of this embodiment, the length dimension from the front-end | tip of the 1st site | part 21 to the front-end | tip of the 2nd site | part 22 is 50 micrometers-500 micrometers. Moreover, the width | variety (dimension of the transversal direction in FIG. 1) of the 1st site | part 21 and the 2nd site | part 22 is 10 micrometers-100 micrometers, and height (dimension of an axial direction) is 10 micrometers-100 micrometers.

  The rotating body 23 has a through hole 230 through which the rotating shaft 42 is inserted, and has a third portion 231 made of a p-type semiconductor and a fourth portion 232 made of an n-type semiconductor. The third part 231 and the fourth part 232 are pn-junctioned. The rotating body main body 23 of the present embodiment is a cylindrical portion having a through hole 230 in the direction of the rotating shaft 42, one side being a third portion 231 and the other side being a fourth portion 232 across a predetermined diameter. . In the rotating body 23, the first part 21 extends from the third part 231 and the second part 22 extends from the fourth part 232. In addition, the internal diameter (diameter of the through-hole 230) of the rotary body main body 23 of this embodiment is 30 micrometers-300 micrometers, and the thickness (length dimension of an axial direction) of the rotary body main body 23 is 10 micrometers-100 micrometers.

  In the rotating body 2 of the present embodiment, the first portion 21 and the third portion 231 are continuous, that is, integrally formed of a common p-type semiconductor material. The second portion 22 and the fourth portion 232 are continuous, that is, are integrally formed of a common n-type semiconductor material. Then, the third portion 231 and the fourth portion 232 have a photoelectric effect (specifically, a depletion layer is formed in the vicinity of the junction (boundary) surface between the third portion 231 and the fourth portion 232. ) It is joined. The rotating body 2 has an insulating film (protective film) 24 formed of an insulating member on the surface thereof. That is, the first portion 21, the second portion 22, and the rotating body main body 23 that are integrally formed are covered with the insulating film 24.

  The p-type semiconductor constituting the rotating body 2 configured as described above is Si, Ge, SiGe or the like, and the n-type semiconductor is Si, Ge, SiGe or the like.

  The case 4 communicates the case main body 41 that defines the internal space S, the rotating shaft 42 that is inserted into the through hole 230 of the rotating body 2 in the internal space S, and the internal space S and the outside of the case 4 (external space). And an opening 43 to be made.

The case body 41 includes a translucent part 411 that transmits light from the outside of the case 4 to the internal space S. The case main body 41 of the present embodiment defines a disk-shaped internal space S. That is, the case main body 41 has an inner wall surface 412 that defines a disk-shaped inner space S. The inner wall surface 412 includes an inner circumferential surface 413 that defines the cylindrical peripheral edge of the inner space S, and a pair of opposing surfaces 414 that define the edge of the inner space S in the axial direction (vertical direction in FIG. 2). Have. The diameter of the internal space S (the diameter of the facing surface 414) is slightly larger than the length dimension from the tip of the first part 21 to the tip of the second part 22 of the rotating body 2 (see FIG. 2). Further, the dimension of the internal space S in the axial direction is slightly larger than the dimension of the rotating body 2 in the axial direction. Here, the diameter (inner diameter) of the inner peripheral surface 413 of the present embodiment is 70 μm to 520 μm, and the axial interval between the pair of opposed surfaces 414 is 30 μm to 120 μm. That is, the volume of the internal space S is about 0.00053 mm ^{3 to} 0.023 mm ³ .

  Further, in the case main body 41, the wall portion including the one opposing surface 414 (the upper wall portion in FIG. 2) is transparent and constitutes the light transmitting portion 411.

  The rotating shaft 42 is a cylindrical portion that extends across the inner space S at the center of the inner space S (the central position in the diameter direction of the inner peripheral surface 413). The rotating shaft 42 of the present embodiment extends so as to connect the centers of the pair of opposing surfaces 414 and has a cylindrical shape with a diameter (outer diameter) slightly smaller than the inner diameter of the through hole 230 of the rotating body 2. The diameter (outer diameter) of the rotating shaft 42 of this embodiment is 10 μm to 100 μm.

  The opening 43 includes a plurality of inflow portions 431 through which fluid can flow into the internal space S and at least one outflow portion 432 through which fluid can flow out from the internal space S. The opening 43 according to the present embodiment has two inflow portions 431 and one outflow portion 432. The two inflow portions 431 are arranged at a predetermined interval in the circumferential direction of the inner peripheral surface 413 (in the example of the present embodiment, an interval that is less than half the length of the inner peripheral surface 413 in the circumferential direction). ing. One outflow portion 432 is disposed at a position opposite to the two inflow portions 431 with the rotation shaft 42 interposed therebetween. That is, the two inflow portions 431 are arranged symmetrically with respect to a line connecting the rotation shaft 42 and the outflow portion 432 in the axial direction view.

  The electrode 3 has a pair (one set) of electrodes (a first electrode 31 and a second electrode 32). The pair of electrodes 31 and 32 are disposed so as to face each other with the rotation region of the rotating body 2 interposed therebetween. That is, the first electrode 31 is arranged at a predetermined position around (around) the rotation area of the rotating body 2, and the second electrode 32 is arranged at a position facing the first electrode 31 across the rotation area. The pair of electrodes 31 and 32 of the present embodiment are embedded on the outer side (diameter direction outer side) of the inner peripheral surface 413 of the case body 41 so as to face each other with the internal space S interposed therebetween.

  Specifically, the first electrode 31 has a distal end of the first portion 21 and a distal end of the second portion 22 (opposite to the end on the rotating body main body 23 side) when the rotating body 2 continues to rotate around the rotation shaft 42. Are arranged at positions alternately facing each other. The second electrode 32 faces the first electrode 31 across the rotation region (internal space S), and the tip of the first part 21 when the rotating body 2 continues to rotate around the rotation axis 42. And it arrange | positions in the position which alternately opposes the front-end | tip (end part opposite to the edge part by the side of the rotary body 23) of the 2nd site | part 22. FIG. More specifically, each of the first electrode 31 and the second electrode 32 is formed on the inner peripheral surface 413 so that the distance from the inner peripheral surface 413 is constant outside the inner peripheral surface 413 (outside in the diameter direction). Along the arc. The first electrode 31 is arranged between one (left side in FIG. 1) inflow portion 431 and the outflow portion 432, and the second electrode 32 is the other (left side in FIG. 1) inflow portion 431 and outflow portion 432. It is arranged between. The pair of electrodes 31 and 32 are connected to the application unit 5 so as to be conductive.

  The application unit 5 alternately switches the polarities of the first electrode 31 and the second electrode 32 so that the first electrode 31 and the second electrode 32 have opposite polarities. That is, the application unit 5 maintains the state in which the polarity of the first electrode 31 and the polarity of the second electrode 32 are opposite to each other so that the polarities of the first electrode 31 and the second electrode 32 are alternately switched. Apply to each electrode 31, 32. Specifically, the application unit 5 includes a detection unit 51 that detects the rotation state of the rotating body 2 and electrodes that apply voltages to the electrodes 31 and 32 based on the rotation state of the rotation body 2 detected by the detection unit 51. And an application unit 52.

  The detection unit 51 detects the rotation state of the rotating body 2 using an image sensor or various sensors. The detection unit 51 of the present embodiment detects the position of at least one of the tip of the first part 21 and the tip of the second part 22. The detection unit 51 outputs the detected rotation state of the rotating body 2 to the electrode application unit 52 as a detection signal.

  The electrode application unit 52 switches the polarities of the first electrode 31 and the second electrode 32 based on the received detection signal. That is, the electrode application unit 52 applies the voltages to the electrodes 31 and 32 so that the polarities of the first electrode 31 and the second electrode 32 are switched in accordance with the rotation of the rotating body 2. The electrode application unit 52 of the present embodiment has an AC power supply. A specific application method of the electrode application unit 52 is as follows.

  Since the p-type semiconductor and the n-type semiconductor are pn-junction in the rotator 2, when the rotator 2 is irradiated with light, a photovoltaic force is generated. As a result, the first part 21 is positively charged and the second part 22 is negatively charged (see FIG. 3). Note that while the rotating body 2 continues to rotate, light continues to be applied to the rotating body 2.

  Next, the electrode application unit 52 applies the first electrode 31 and the second electrode 32. For example, the electrode application unit 52 applies the voltage to the electrodes 31 and 32 so that the first electrode 31 is negatively charged and the second electrode 32 is positively charged. Thereby, while the 1st site | part 21 is drawn near to the 1st electrode 31, the 2nd site | part 22 is drawn near to the 2nd electrode 32, As a result, the rotary body 2 begins to rotate (refer arrow (alpha) of FIG. 3). At this time, the tip of the first part 21 moves closer to the first electrode 31 than the second electrode 32, and the tip of the second part 22 moves closer to the second electrode 32 than the first electrode 31. Then, charges concentrate (collect) at the tips of the respective portions 21 and 22, so that the tip of the first portion 21 is attracted to the first electrode 31 with a stronger force, and the tip of the second portion 22 is the second electrode. Attracted to 32.

  Subsequently, as shown in FIG. 4, the detection unit 51 causes at least one tip position of the first part 21 and the second part 22 to pass through the rotation shaft 42 and connect the first electrode 31 and the second electrode 32. When detecting that the line 55 is overlapped, the electrode application unit 52 switches the polarities of the first electrode 31 and the second electrode 32 to be opposite to each other (that is, the first electrode 31 is positive and the second electrode 32 is negative). ) To the first electrode 31 and the second electrode 32. At this time, since the rotating body 2 is rotating, even if the polarities of the first electrode 31 and the second electrode 32 are switched, the tip of the first part 21 and the tip of the second part 22 are bounded by the inertial force. Continue to rotate in the same direction over line 55. Then, as shown in FIG. 5, when the tip of each part 21, 22 exceeds the boundary line 55, the first part 21 is drawn to the second electrode 32 and the second part 22 is drawn to the first electrode 31. It is done. Thereby, the rotating body 2 continues to rotate in the same direction (see arrow α in FIG. 5).

  In this way, the polarity of the first electrode 31 and the second electrode 32 is switched at the timing when the tip of the first part 21 and the tip of the second part 22 of the rotating rotator 2 exceed the boundary line 55. Thus, the rotating body 2 continues to rotate (rotate) around the rotation axis 42.

  In the mixing apparatus 1 of the present embodiment, when the first electrode 31 and the second electrode 32 are applied by the application unit 5 as described above in a state where the rotator 2 is irradiated with light, the rotator 2 rotates. to continue. Then, when fluid (for example, liquid) is caused to flow into the internal space S from each of the two inflow portions 431 in a state where the rotating body 2 is rotated, the two types of fluid are rotating in the internal space S. It is sufficiently mixed (stirred) by the body 2 and flows out of the case 4 from the outflow portion 432 in a sufficiently mixed state.

  Next, an example of the manufacturing method of the mixing apparatus 1 will be described with reference to FIGS. 2 and 6 to 14. In addition, when the mixing apparatus 1 is completed, the same parts (parts) as the respective parts (parts) of the mixing apparatus 1 described above will be described using the same reference numerals.

First, as shown in FIG. 6, for example, a predetermined first region 61 is etched on a single crystal Si substrate (hereinafter simply referred to as “substrate”) 6 by lithography and etching techniques, and then etched first. In the region 61, for example, Si ₃ N ₄ , which is a material that is resistant to chemicals and hardly causes mechanical wear, is deposited, and the surface of the substrate 6 or the like (the upper surface in FIG. 6) is polished. Thereby, Si ₃ N ₄ remains only in the etched region (first region) 61.

Next, as shown in FIGS. 7 and 8, the second region S where the rotating body 2 is disposed is etched by lithography and etching technique in a portion (first region) 61 where Si ₃ N ₄ is deposited. At this time, the portion corresponding to the rotating shaft 42 is left without being etched. Further, the portions corresponding to the openings 43 (specifically, the two inflow portions 431 and the one outflow portion 432) are also removed by etching.

Next, as shown in FIG. 9, for example, SiO ₂ is deposited on the etched second region S, and the surface is polished. Thereby, SiO ₂ remains only in the second region S.

Next, as shown in FIG. 10, the third region 63 having a shape corresponding to the rotating body 2 in the second region S on which SiO ₂ is deposited is removed by lithography and etching technology, and then the formed recess (etching) is performed. A film (insulating film) 24 of an insulating material is formed on the surface of the formed portion.

Next, as shown in FIG. 11, polycrystalline Si is deposited in the third region 63, and p-type impurities and n-type impurities are introduced into predetermined regions. Specifically, p-type impurities are introduced into regions corresponding to the first portion 21 and the third portion 231, and n-type impurities are introduced into regions corresponding to the second portion 22 and the fourth portion 232. Thereafter, the surface of the deposit (polycrystalline Si) 2 deposited on the third region 63 (the surface on the surface side of the substrate 6) is covered with the insulating film 24. Subsequently, the surface of the substrate 6 or the like is slightly oxidized by, for example, a thermal oxidation method (see reference numeral 62 in FIG. 11). After that, Si ₃ N ₄ is deposited on the surface of the substrate 6 or the like (the upper surface in FIG. 10) to form a Si ₃ N ₄ layer 65.

  Next, as shown in FIG. 12, a fourth region (corresponding to the first electrode 31 and the second electrode 32) in which the conductive materials 31 and 32 are arranged around the first region 61 by lithography and etching technology. The portion 64 to be etched is etched, and then conductive materials (for example, high impurity concentration semiconductors) 31 and 32 are fitted into the fourth region 64. At this time, a conducting wire or the like for applying a voltage to the conductive materials 31 and 32 is drawn to the outside of the case 4.

Next, as shown in FIG. 13, a part of the layer of Si ₃ N ₄ formed on the second region S is formed by lithography so as to leave a portion overlapping with the peripheral portion of the second region S in the axial direction. Remove. Subsequently, as shown in FIG. 14, SiO ₂ remaining in the second region S is removed with HF acid.

  Next, the surface of the substrate 6 or the like is covered with glass 66, the electrode application unit 52 is connected to the drawn lead wire or the like, and the detection unit 51 is disposed, whereby the mixing apparatus 1 is completed (see FIG. 2).

  According to the mixing device (rotating device) 1 described above, the rotating body 2 is rotated (rotated) by a simple configuration such as the rotating body 2 and the electrode 3 without connecting a mechanism for transmitting rotational power to the rotating body 2. ). Specifically, it is as follows.

  When the rotating body 2 (the first part 21 and the second part 22) is irradiated with light, a photovoltaic force is generated, and the first part is positively charged and the second part is negatively charged. For this reason, when the electrode 3 is applied and the electrode 3 is positively or negatively charged, at least one of the first portion 21 and the second portion 22 is attracted to or repels the electrode 3, The rotating body 2 can be rotated. That is, according to the mixing device 1 of the present embodiment, at least one of the first portion 21 and the second portion 22 that are positively or negatively charged by the photovoltaic force is attracted or repelled to the electrode 3 using Coulomb force. Thus, the rotating body 2 can be rotated without connecting a transmission mechanism or the like for transmitting rotational power to the rotating body 2.

  In the mixing apparatus 1 of the present embodiment, the rotating body 2 is configured by the rotating body main body 23 having the through hole 230 and the first portion 21 and the second portion 22 extending from the rotating body main body 23. The configuration can be simplified as compared with the configuration in which the rotary shaft 42 is provided on the 2 itself.

  In the mixing apparatus 1 of the present embodiment, since the polarity of the electrode 3 is alternately switched by the application unit 5, the first part 21 and the second part 22 are alternately attracted to the electrode 3 (or repelled alternately). Thereby, the rotating body 2 can be continuously and stably rotated.

  In the mixing apparatus 1 according to the present embodiment, the first electrode and the second electrode are arranged with the internal space S (the rotation region of the rotating body 2) interposed therebetween, and are alternately alternated by the application unit 5 while maintaining the opposite polarities. Can be switched to. For this reason, each of the first part 21 and the second part 22 that extend in opposite directions with respect to the rotating shaft 42 has a pair of electrodes (first electrode 31 and second electrode) that face each other with the internal space S (rotating region) therebetween. The electrodes 32) are attracted simultaneously or repel at the same time. As a result, the rotational torque of the rotating body 2 is increased as compared with the case where there is one electrode 3.

  The mixing apparatus 1 according to the present embodiment includes a case 4 having an opening 43 and a translucent part 411. For this reason, in a state where a plurality of kinds of fluids are allowed to flow into the internal space S of the case 4 from the opening 43, the rotating body 2 is irradiated with light through the light transmitting portion 411 and applied to the electrode 3. 2 rotates (turns). Thereby, the multiple types of fluids that have flowed into the internal space S can be sufficiently mixed (stirred).

  Further, in the mixing device 1, the opening 43 has a plurality (two in the example of the present embodiment) of the inflow portions 431 and at least one (one in the example of the present embodiment) of the outflow portions 432. For this reason, in a state where the rotating body 2 is rotated, the fluid in the internal space S is caused to flow out from the outflow portion 432 while flowing the fluid from each inflow portion 431 into the internal space S, thereby mixing a plurality of types of fluids ( Stirring) can be carried out continuously.

  The rotating device of the present invention is not limited to the above-described embodiment, and it is needless to say that various changes can be made without departing from the gist of the present invention. For example, the configuration of another embodiment can be added to the configuration of a certain embodiment, and a part of the configuration of a certain embodiment can be replaced with the configuration of another embodiment. Furthermore, a part of the configuration of an embodiment can be deleted.

  In the said embodiment, although the mixing apparatus 1 was demonstrated as an example of a rotation apparatus, it is not limited to this. For example, the rotating device may be a device that generates propulsive force by making the rotating body 2 into a propeller shape (specifically, the first portion 21 and the second portion 22 are in a blade shape). In this case, the rotating shaft 42 is supported by another member or the like, and the case 4 is unnecessary. That is, when the rotating device 1 is used as a device that does not need to confine a fluid or the like in a region where the rotating body 2 rotates (in the example of the above embodiment, the internal space S), the case 4 may be omitted. In addition, the rotating device can be used as a flow meter by changing the shape of the rotating body 2. Further, the rotating device can be used as a gyro sensor by arranging the three rotating bodies 2 so that the rotating shafts 42 are oriented in directions orthogonal to each other (that is, three rotating bodies 2 are arranged three-dimensionally). it can. Further, when a rotating device is used as a device for generating a propulsive force as described above, for example, the rotating device can be used as a source of generating a propulsive force for an inspection mini-robot that moves in the aorta of a living body.

  In the rotating device 1 of the above-described embodiment, the pair of electrodes (the first electrode 31 and the second electrode 32) are disposed, but the configuration is not limited to this. For example, as shown in FIG. 15, the number of the electrodes 3 may be one. In this case, the electrode application unit (AC power supply) 52 can alternately switch the polarity of the electrode 3 by setting one of the pair of external terminals to the ground potential.

  Further, as shown in FIG. 16, the rotating device 1 may have three or more (six in the example shown in FIG. 16) electrodes 3 that are arranged at intervals in the rotation direction of the rotating body 2. . In this case, the polarities of the adjacent electrodes 3 are made different. Specifically, for example, the polarity of the electrode 3 in front of the rotating direction of the tip of the first portion 21 of the rotating body 2 is such that the tip of the first portion 21 draws the tip. The polarity of each electrode 3 is controlled by the application unit 5 so that the electrode 3 at the rear in the rotation direction has a polarity repelling the tip. Thereby, the rotary body 2 can rotate more smoothly.

  In the rotating device 1 of the above embodiment, the rotating shaft 42 is provided in the case 4, but is not limited to this configuration. For example, the rotating shaft 42 may be provided on the rotating body 2. In this case, a recess or the like (bearing portion) that receives the rotation shaft 42 is provided on the pair of facing surfaces 414 that define the internal space S of the case 4.

  The specific shapes of the first part 21 and the second part 22 of the rotating body 2 are not limited. In the rotating device 1 of the above embodiment, the first part 21 and the second part 22 have a prismatic shape, but may be, for example, a cylindrical shape or a blade (blade) shape as described above. Good. Moreover, the cross-sectional shape in each position of the longitudinal direction of the 1st site | part 21 and the 2nd site | part 22 may not be the same.

  In the rotation device 1 of the above embodiment, the application unit 5 includes the detection unit 51, but may not be provided. In this case, the polarity of each electrode 3 is switched at a predetermined time interval set in advance.

  Although the application part 5 of the rotating apparatus 1 of the said embodiment has AC power supply (electrode application part 52), it is not limited to this structure. The application unit 5 has, for example, a predetermined circuit, and when an external AC power source (excluding the rotating device 1) is connected, each electrode 31, The structure which can be applied to this electrode 31 and 32 so that the polarity of 32 may switch may be sufficient.

  In the rotating device 1 of the above embodiment, there is one rotating body, but the present invention is not limited to this configuration. For example, the rotating device 1 may include a plurality of rotating bodies 2 (two in the example shown in FIG. 17) as shown in FIG. In addition, if there is at least one electrode 3 around the rotation region of the rotator 2, the rotator 2 can be rotated. Therefore, as the number of the rotators 2 increases, the electrodes provided in the rotator 1 The number of 3 also increases.

  The rotating device 1 may include an irradiating unit that can irradiate the rotating body 2 with light. According to such a configuration, the rotating body 2 can be stably rotated by irradiating the rotating body 2 with light by the irradiating unit, regardless of the light environment (the distribution state of light around the rotating body).

DESCRIPTION OF SYMBOLS 1 ... Rotating body (mixing apparatus), 2 ... Rotating body, 21 ... 1st part, 22 ... 2nd part, 230 ... Through-hole, 231 ... 3rd part, 232 ... 4th part, 23 ... Rotating body main body, 24 Insulating film, 3 ... electrode, 31 ... first electrode (conductive material), 32 ... second electrode (conductive material), 4 ... case, 41 ... case body, 411 ... translucent part, 412 ... inner wall surface, 413: inner peripheral surface, 414: facing surface, 42: rotating shaft, 43 ... opening, 431 ... inflow portion, 432 ... outflow portion, 5 ... application portion, 51 ... detection portion, 52 ... electrode application portion, 55 ... boundary line, 6 ... monocrystalline Si substrate, 61 ... first region, 63 ... third region, 64 ... fourth region, 65 ... _Si 3 _{N 4} layer, 66 ... glass, S ... internal space (second region), DESCRIPTION OF SYMBOLS 100 ... Micro analysis chip, 102 ... Channel, 103 ... First channel, 103 ... Each channel, 103 ... First channel, 103 ... first inlet, 104 ... second flow path, 104A ... second inlets, 105 ... third flow path, 105A ... outlet

Claims (6)

A rotating body rotatable around a rotation axis extending in a predetermined direction, extending in a direction orthogonal or substantially orthogonal to the rotation axis and configured by a p-type semiconductor, and the rotation axis interposed therebetween A rotating body having a second part extending to the opposite side of the first part and made of an n-type semiconductor;
An electrode disposed around a rotating region in which the rotating body rotates;
A case for accommodating the rotating body in an internal space in a rotatable manner ,
The p-type semiconductor constituting the first part and the n-type semiconductor constituting the second part are joined ,
The electrode is disposed outside the internal space;
The case includes an opening that communicates the internal space and the external space of the case, and a light transmitting portion that transmits light from the outside of the case to the internal space.
Rotating device. The rotating body has a through-hole through which the rotating shaft is inserted, and is configured by a third portion configured by the p-type semiconductor and the n-type semiconductor so that the p-type semiconductor and the n-type semiconductor are joined. A fourth part,
The rotating device according to claim 1, wherein the first part extends from the third part, and the second part extends from the fourth part.   The rotating device according to claim 1, further comprising an application unit configured to apply a voltage to the electrodes so that the polarities of the electrodes are alternately switched. The electrode includes a first electrode disposed at a predetermined position around the rotation region, and a second electrode facing the first electrode across the rotation region,
4. The rotating device according to claim 3, wherein the application unit alternately switches the polarities of the first electrode and the second electrode so that the first electrode and the second electrode have opposite polarities. The opening includes a plurality of inlet capable of flowing a fluid into said internal space, and at least one outlet section capable of flowing out the fluid from the interior space, according to claim 1 to 4 The rotating device according to any one of the above. Comprising the irradiator capable of irradiating the rotating body to the light, the rotation device according to any one of claims 1-5.

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