JP2892629B2 - Actuator device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an actuator device for moving a sleeve member in a predetermined direction.

[0002]

2. Description of the Related Art Conventionally, as an example of an actuator device, for example, one shown in FIG. 18 is known. This known actuator device comprises three actuator means, that is, first to third actuator means. The actuator device is disposed between the upper wall 2 and the lower wall 4 which are disposed at an interval in the vertical direction, and moves along the walls 2, 4, for example, in a direction indicated by an arrow 6. The first actuator means 8 is disposed so as to be vertically displaced as indicated by a double arrow 10. The second actuator means 12 is fixed to one end of the first actuator means 8 and is disposed so as to be displaced in the horizontal direction as indicated by a double arrow 14, that is, in the horizontal direction in FIG. Further, the third actuator means 16 is fixed to one end of the second actuator means 12 and is arranged so as to be displaced in the vertical direction as indicated by a double arrow 18. First to third actuator means 8, 12, 16
Is composed of, for example, a piezoelectric actuator.

A drive voltage shown in FIG. 19, for example, is applied to this actuator device. That is, a rectangular driving voltage indicated by a solid line A in FIG. 19 is applied to the first actuator unit 8, and a solid line B (FIG. 19) is applied to the second (or third) actuator unit 12 (or 16). Alternatively, a rectangular drive voltage shown in C) is applied. Therefore, in this actuator device, first, a negative voltage is applied to the first actuator means 8, whereby the first actuator means 8 contracts. on the other hand,
A positive voltage is applied to the second and third actuator means 12, 16, whereby the second and third actuator means 12, 16 are extended. When the drive voltage is applied in this manner, the state is as shown in FIG. 19, and the actuator device is held between the upper wall 2 and the lower wall 4 by the third actuator means 16. Next, a positive drive voltage is applied to the first actuator means 8, the first actuator means 8 expands, and the actuator device is held by the first and third actuator means 8, 16. Next, a negative drive voltage is applied to the third actuator means 16, and the third actuator means 16 is contracted (at this time, held by the first actuator means 8). Thereafter, a negative drive voltage is applied to the second actuator means 12, whereby the second actuator means 12 is contracted, whereby the third actuator means 16 is moved in the direction indicated by the arrow 6. Thereafter, a positive drive voltage is applied to the third actuator means 16 and the third actuator means 1
6, a positive drive voltage is applied, and the third actuator means 16 is extended. Next, a negative drive voltage is applied to the first actuator means 8, and the first actuator means 8 is contracted. Thereafter, a positive drive voltage is again applied to the second actuator means 2, and the second actuator means 12 is extended, whereby the first actuator means 8 is moved in the direction indicated by the arrow 6. Then, the above-described operation is repeatedly performed, whereby the actuator device is moved in the direction indicated by the arrow 6.

[0004]

However, in the conventional actuator device, three actuator means are required, and there is a problem that the device itself becomes expensive. Also,
The control of the drive voltage applied to these actuator means is complicated, and the drive current to be applied is a rectangular wave, so that a large and expensive drive power supply is required.

It is an object of the present invention to provide an actuator device which can move a sleeve member in a predetermined direction with a relatively simple structure. It is another object of the present invention to provide an actuator device that can easily control a driving voltage and can be driven as required by a small power supply.

[0006]

SUMMARY OF THE INVENTION According to the present invention, there are provided first and second actuators having output portions disposed to face each other, and an axial direction of the output portions of the first and second actuators. Output converting means for converting the displacement of the first and second actuators into radial displacement, and a sleeve member extending in the axial direction so as to cover output portions of the first and second actuator means. When the outputs are displaced in directions approaching each other, their axial displacements are converted into radial displacements by the action of the output conversion means, whereby the outputs of the first and second actuator means are Acting on and holding the inner peripheral surface of the sleeve member, in a state where the sleeve member is held, one of the first and second actuator means has its output portion extended. The other of which is controlled so that its output is contracted, so that the sleeve member is moved in the axial direction by expansion and contraction of the first and second actuator means. Actuator device that According to the invention, the output portions of the first and second actuator means are arranged facing each other. When the output portions of these actuator means are displaced in directions approaching each other, the sleeve members, which are the output members of the actuator device, act on the output displacement means to convert their axial displacements into radial displacements. An output unit holds the sleeve member.
When one of the first and second actuator means is extended and the other is contracted while holding the sleeve member, the held sleeve member is moved in a predetermined direction. Therefore, the sleeve member can be moved in a predetermined direction by the two actuator means, and the configuration is relatively simple.

Further, according to the present invention, the output section of the first and second actuator means is constituted by a slider, and the output conversion means is constituted by an inclined surface formed on a tip end surface of the slider. When the sliders of the first and second actuators are displaced in a direction approaching each other, the axial displacement of both sliders is converted into a radial displacement in a direction away from each other by the action of the inclined surfaces of both sliders. Thus, the sliders of the first and second actuator means act on and hold the inner peripheral surface of the sleeve member. According to the present invention, since the output conversion means is constituted by the inclined surfaces of the sliders as their output portions, when the outputs of the first and second actuator means are displaced in the directions approaching each other, the output conversion means are provided. Due to the action of the inclined surfaces, the axial displacements of these sliders are converted into radial displacements, so that the axial displacements of the sliders can be converted into radial displacements with a relatively simple construction.

The present invention is also directed to a first and a second actuator means having output portions opposed to each other, and an elastic member provided between the output portions of the first and second actuator means. A deformation means, and a sleeve member extending in the axial direction covering the elastic deformation means, and when the output portions of the first and second actuators are displaced in directions approaching each other, the displacements in the axial direction cause The elastic deformation means is elastically deformed in the radial direction, whereby the elastic deformation means acts on and holds the inner peripheral surface of the sleeve member, and the elastic deformation means holds the sleeve member while the elastic deformation means holds the sleeve member. One of the first and second actuator means is controlled to extend its output and the other is controlled to contract its output, thus the three Member is an actuator device characterized by being moved in the axial direction by expansion and contraction of the first and second actuator means. According to the invention, the output portions of the first and second actuator means are arranged facing each other. When the output portions of these actuator means are displaced in a direction approaching each other, the sleeve member, which is the output member of the actuator device, is elastically deformed by the elastic deformation means disposed between the two output portions to radial displacement. Hold the sleeve member. When one of the first and second actuator means is extended and the other is contracted while holding the sleeve member, the sleeve member held by the elastic deformation means is moved in a predetermined direction. You. Therefore, the sleeve member can be moved in a predetermined direction by the two actuator means, and the configuration is relatively simple.

Further, in the present invention, a driving circuit for driving the first and second actuator means is provided in relation to the first and second actuator means. A waveform driving voltage is supplied to the first and second actuators. According to the present invention, the output portions of the first and second actuator means can be moved as required by using a drive circuit for generating drive voltages of sine waveforms having phases different from each other by a predetermined angle. The sleeve member can be moved in a predetermined direction by the circuit.

In the present invention, a driving circuit for driving the first and second actuator means is provided in relation to the first and second actuator means, and the driving circuits have a phase difference from each other by a predetermined angle. The driving voltage having the waveform
And feeding to the second actuator. According to the present invention, the output portions of the first and second actuator means can be moved as required by using a drive circuit for generating a drive voltage having a saw-tooth waveform having a phase different from each other by a predetermined angle. The sleeve member can be moved in a predetermined direction by the circuit.

Further, the present invention is characterized in that the driving circuit includes an adjusting means for adjusting at least one of a frequency of the driving voltage, an amplitude of the driving voltage, and a phase difference of the driving voltage. According to the invention, the drive circuit includes an adjusting means. When the frequency of the drive voltage is adjusted by the adjusting means, the number of movements in a predetermined time, in other words, the movement speed of the sleeve member can be adjusted. When the amplitude of the driving voltage is adjusted by the adjusting means, the moving amount in one cycle, in other words, the moving speed of the sleeve member can be adjusted. Further, when adjusting the phase difference of the drive voltage by the adjusting means, the moving direction of the sleeve member and the holding force for holding the sleeve member can be adjusted.

Further, according to the present invention, two sets of the first and second actuators whose output portions face each other are provided, and the two sets of the first and second actuator means are connected in series or in parallel. The sleeve member is arranged and alternately acts on the sleeve member to move in the axial direction. According to the invention, two sets of first and second actuator means arranged in series or in parallel act on the sleeve member alternately. Therefore, there is no useless movement of the actuator device, and the sleeve member can be moved efficiently.

Further, the present invention is characterized in that the first and second actuator means are constituted by a piezoelectric actuator or a giant magnetostrictive actuator.
According to the present invention, since the first and second actuator means are constituted by piezoelectric actuators or magnetostrictive actuators, the sleeve member can be moved by changing the drive voltage or drive current applied thereto.

[0014]

BRIEF DESCRIPTION OF THE DRAWINGS FIG.
An actuator device according to the present invention will be described.

FIG. 1 is a sectional view showing a first embodiment of an actuator device according to the present invention. In FIG.
The actuator device shown has two actuator means, a first and a second actuator means 10.
2,104. The first and second actuator means 102 and 104 are constituted by piezoelectric actuators that undergo expansion and contraction when voltage is applied. First
And the second actuator means 102, 104 have actuator bodies 106, 108, and one end of the actuator bodies 106, 108 has shaft portions 110, 112, respectively.
, And sliders 114 and 116 constituting an output unit are provided at the distal ends of the shafts 110 and 112. In this embodiment, the sliders 114, 116 of the first and second actuator means 102, 104 are arranged so as to face each other. The other ends of the actuator bodies 106 and 108 are fixed to stationary members 118 and 120 which may be fixed walls, for example. Therefore, the first
When a drive voltage is applied to the actuator bodies 106 and 108 of the second actuator means 102 and 104, the sliders 114 and 116 are displaced in their axial directions, that is, in the left and right directions in FIG.

First and second actuator means 10
At the distal ends of the sliders 114 and 116 of the 2104, inclined surfaces 122 and 124 that constitute displacement conversion means are formed. First and second actuator means 102,
The inclined surfaces 122 and 124 of 104 incline downward and rightward in FIG. 1 in a predetermined direction.
22, 124 extend substantially in parallel. The inclination angles of these inclined surfaces 122 and 124 may be, for example, about 10 to 45 degrees.

First and second actuator means 10
A plurality of spherical members 126 are interposed between the sliders 114 and 116 so as to facilitate displacement of the sliders 114 and 116 described later in the radial direction. These spherical members 126 are disposed on substantially the entire area of the inclined surfaces 122 and 124. Instead of the spherical member 126, a cylindrical member is used in the vertical direction in FIG.
14 and 116 may be arranged in the direction in which they are displaced in the radial direction. When the sliders 114 and 116 move smoothly along the inclined surfaces 122 and 124,
The spherical member 126 can be omitted.

First and second actuator means 10
A sleeve member 128 which is fitted on the sliders 114 and 116 of the 2104 and extends in the axial direction is provided. This sleeve member 128 functions as an output member of the actuator device. In the present embodiment, the sleeve member 128
Is composed of a hollow member having a circular inner diameter. And
Corresponding to this shape, the sliders 114, 116 of the first and second actuator means 102, 104 are formed in a cylindrical shape, and the outer diameter of the sliders 114, 116 is relative to the sleeve member 128. In order to allow the movement, it is set slightly smaller than the inner diameter of the sleeve member 128, for example, about several tens μm. Note that the sleeve member 128 may be formed of a square hollow sleeve member. In this case, the outer shapes of the sliders 114 and 116 correspond to the inner peripheral shape of the sleeve member 128, and are somewhat smaller than the square pillar shape. Formed. Such a sleeve member 128 is held by a holding member 132 having a circular holding hole 130 with a relatively weak holding force. The holding member 132 can be formed from, for example, a rubber material.

In the above-described actuator device, when a positive drive voltage is applied to the first and second actuator means 102 and 104, the actuator body 10
6,108 are distorted and stretched, their sliders 114,
116 are displaced in directions approaching each other. So,
Since the tip surfaces of the sliders 114 and 116 are inclined,
These axial displacements are converted into radial displacements by the inclined surfaces 122, 124, and the sliders 114, 116 are displaced in the radial direction by the shaft portions 110, 112 being somewhat elastically deformed. When displaced, the slider 114 of the first actuator means 102 as shown in FIG.
Acts on the upper inner periphery of the sleeve member 128, and the slider 116 of the second actuator means 104 acts on the lower inner periphery of the sleeve member 128, whereby the sleeve member 128 is held by the pair of sliders 114 and 116. . In this holding state, the actuator body 106 of the first actuator means 102 is further extended, while the second actuator means 10
When the actuator body 108 of FIG. 4 is contracted, as shown in FIG. 3, the sleeve member 128 moves from the position shown by the two-dot chain line in FIG. 3 (the position shown in FIGS. 1 and 2) to the position shown by the solid line in FIG. It is moved in the direction indicated by arrow 134 (to the left in FIG. 3).

First and second actuator means 10
2 and 104 are driven by a drive circuit 136 (FIG. 1) that generates a drive voltage having a sine waveform shown in FIG. That is, the first actuator unit 102 is driven by the drive voltage indicated by the solid line P in FIG. 4A, and the second actuator unit 104 is driven by the broken line Q in FIG.
, That is, a drive voltage having a predetermined angular phase different from the drive voltage of the first actuator means 102. The first and second actuator means 102 and 104 are distorted and expanded when a positive driving voltage is applied, and are distorted and contracted when a negative driving voltage is applied. Therefore, when the drive voltage shown in FIG. 4A is applied, the sliders 114 and 116 assume that the displacement to the left is positive and the displacement to the right is negative in FIG. It is displaced as shown in FIG. That is, the slider 114 of the first actuator means 102
4B, the slider 116 of the second actuator means 104 is displaced as shown by a broken line S in FIG. 4B. In FIG. 4B, the first
And while the sliders 114, 116 of the second actuator means 102, 104 move from the negative displacement to the positive displacement, the sliders 114, 116 are displaced in directions approaching each other in the axial direction, and this axial displacement Is inclined surface 12
2 and 124, the sliders 114 and 116 are displaced in the radial direction.
At the left, thereby causing the sleeve member 12
8 is moved in the direction shown by the arrow 134 (FIG. 3) while being held by the holding member 132 with a relatively small force. On the other hand, in FIG. 4B, the sliders 114 and 11 of the first and second actuators 102 and 104 are used.
While the slider 6 moves from the positive displacement to the negative displacement, the slider 1
14 and 116 are displaced in a direction axially separated from each other, and their sliders 114 and 116 are
In this state, the sliders 114 and 116 move rightward in FIG.
As a result, the sliders 114 and 116 return to their original positions. At this time, the sleeve member 128 is
2 and does not move with the sliders 114 and 116. Such movement of the sleeve member 128 is performed for each cycle of the applied voltage from the drive circuit 136, and the sleeve member 128 can be moved a desired distance by applying the drive voltage for a predetermined time.

The drive circuit 136 of this embodiment includes an adjustment circuit 140 (adjusting means) for adjusting the frequency of the applied voltage, the amplitude of the drive voltage, and the phase difference between the drive voltages. The frequency of the applied driving voltage is related to the number of movements of the sleeve member 128 during a certain period, and thus the driving circuit 136 is controlled by the adjustment circuit 140.
By increasing (or decreasing) the frequency of the driving voltage from, the moving speed of the sleeve member 128 can be increased (or decreased). In addition, the amplitude of the drive voltage is related to the amount of movement in one movement, that is, one cycle of the movement. Therefore, when the amplitude of the drive voltage from the drive circuit 136 is increased (or decreased) by the adjustment circuit 140, the sleeve becomes The moving speed of the member 128 can be increased (or decreased). Furthermore, the phase difference of the drive voltage is determined by the
8 and the direction of movement of the sleeve member 128. Therefore, by increasing (or reducing) the phase difference of the driving voltage from the driving circuit 136 by the adjustment circuit 140, the holding force of the sliders 114 and 116 is reduced. It can be larger (or smaller). Further, the phase difference of the drive voltage is further greatly changed, and for example, a drive voltage indicated by a broken line in FIG. 4A is applied to the first actuator 102, and a drive voltage shown in FIG. When a driving voltage indicated by a solid line P is applied to the, the direction of movement of the sleeve member 128 is opposite to the above-described direction, as is easily understood. As described above, by adjusting the frequency, amplitude and phase difference of the driving voltage by the adjusting circuit 140, the moving speed, the holding force and the moving direction of the sleeve member 128 can be adjusted. The adjustment by the adjustment circuit 140 does not need to be performed at all, and by performing any one of the frequency, the amplitude, and the phase difference of the drive voltage, the corresponding adjustment element can be adjusted.

In the above-described embodiment, the first and second actuator means 102 and 104 are applied with a sine waveform drive voltage. Instead of the sine waveform drive voltage, a sawtooth waveform (voltage increases linearly) is used. May be applied by a drive voltage having a waveform that decreases linearly after
In the case where a sawtooth drive voltage is applied from the drive circuit 136, the sleeve member 128 is provided with a relatively simple drive circuit, similarly to the case where a sine waveform drive voltage is applied.
Can be moved.

FIG. 5 shows a second embodiment of the actuator device according to the present invention. In this embodiment, the displacement conversion means is changed. Note that members that are substantially the same as those in the first embodiment are given the same numbers, and descriptions thereof are omitted.

In FIG. 5, the displacement converting means provided on the sliders 114, 116 of the first and second actuator means 102, 104 are provided with the sliders 114, 1
16 and a moving member 145 disposed between the inclined surfaces 142 and 144. The inclined surface 142 of the first actuator means 102 is inclined upward toward the right outside in FIG. 5, and the surface of the moving member 145 opposed to the inclined surface 142 is also inclined substantially parallel to the inclined surface 142. A spherical member 147 is interposed between the inclined surfaces 142 and 146 over substantially the entire area. Also, the second
The inclined surface 144 of the actuator means 104 is inclined upward toward the left outside in FIG. 5, and the surface of the moving member 145 opposed to the inclined surface 144 is also inclined substantially parallel to the inclined surface 144. And these inclined surfaces 144,
Between 148, a spherical member 149 is interposed substantially over the entire area. Other configurations of the second embodiment are substantially the same as those of the first embodiment.

In the second embodiment, when the first and second actuator means 102, 104 are extended, the first and second actuator means 102, 104 are actuated by the action of these inclined surfaces 142, 144, 146, 148. Actuator 10
2 and 104 sliders 114 and 116
The displacement of the moving member 145 in the radial direction is increased while the displacement of the sliders 114 and 116 in the axial direction is converted into the radial displacement. Therefore, when both the first and second actuator means 102, 104 extend, their sliders 114, 116 and moving member 145
Thereby, the sleeve member 128 is held, and the sleeve member 128 can be moved in the axial direction in the same manner as in the first embodiment.

FIG. 6 shows a third embodiment of the actuator device according to the present invention. In the third embodiment, two sets of the first and second actuator means and the components related thereto, that is, those having substantially the same configuration as the actuator device of FIG. 1 are provided. In the third embodiment as well, members that are substantially the same as those in the first embodiment are given the same numbers, and descriptions thereof are omitted.

In FIG. 6, the first and second actuator means 102, 104 of one set 152 and the first and second actuator means 102, 104 of the other set 154 are shown.
104 are substantially the same in configuration and are arranged in parallel with each other. The actuator bodies 106 of the first actuator means 102 are respectively fixed to the stationary member 118 at intervals, and the second actuator means 104
Are respectively fixed to the other stationary member 120.

In each set 152, 154, the slider 114 of the first actuator means 102 and the slider 116 of the second actuator means 104 are disposed so as to face each other. Are inclined surfaces 122 and 124 inclined in a predetermined direction (constituting displacement conversion means). A plurality of spherical members 12 are provided between the opposed inclined surfaces 122 and 124.
6 are interposed. A sleeve member 128 is fitted over the sliders 114 and 116, and the sleeve member 128
The sliders 114 and 116 can move in the axial direction (in the left-right direction in FIG. 6). In the third embodiment, the sleeve member 128 is a belt-shaped fastening member 15.
6 and these sleeve members 128
Are configured to move integrally.

In such an actuator device, the first and second actuator means 102 and 104 of one set 152 and the first and second actuator means of the other set 154 are provided.
Are controlled so as to act on the sleeve members 128 corresponding to each other alternately.
That is, as shown in FIG. 5, the sliders 114 and 116 of the first and second actuator means 102 and 104 of one (or the other) set 152 (or 154) act on the sleeve member 128 and indicate this by the arrow 158. When moving in the direction shown, the other (or one) pair 15
Fourth first and second actuator means 102, 10
The fourth sliders 114 and 116 do not substantially act on the sleeve member 128 and return to their original positions. Such operations are alternately performed, and by acting on the sleeve member 128 in this manner, the sleeve member 128 can be moved by a predetermined distance in a predetermined direction indicated by an arrow 158.

In this embodiment, as will be easily understood, the sleeve member 128 can be moved in the same manner as in the first embodiment, and the moving speed is twice the moving speed of the first embodiment. , Can be moved at a faster speed. Also, at least one set 152, 1 of the two sets of first and second actuator means 102, 104
Since 54 acts on the sleeve member 128, the sleeve member 128 can be held, and therefore, the holding member 132 in the first embodiment can be omitted.

FIG. 7 shows a fourth embodiment of the actuator device according to the present invention. In the fourth embodiment, two sets of first and second actuator means are arranged in series. In the fourth embodiment as well, members that are substantially the same as those in the first embodiment are given the same numbers, and descriptions thereof are omitted.

In FIG. 7, the first and second actuator means 102, 104 of one set 162 and the first and second actuator means 102, 104 of the other set 164 are shown.
104 are substantially the same in configuration and are arranged in series with each other. The actuator body 106 of the first actuator means 102 of one set 162
8, the actuator body 108 of the second actuator means 104 of which the stationary members 166, 168
The fixing member 170 is fixed to one side of the mounting member 170, which is fixed to the right side in FIG. Also, the actuator body 106 of the first actuator means 102 of the other set 164
7 is fixed to the other surface of the mounting member 170, the left surface in FIG. 7, and the actuator main body 108 of the second actuator means 104 is fixed to the stationary member 120.

In each set 162, 144, the slider 114 of the first actuator means 102 and the slider 116 of the second actuator means 104 are disposed so as to face each other. Are inclined surfaces 122 and 124 inclined in a predetermined direction (constituting displacement conversion means). A plurality of spherical members 12 are provided between the opposed inclined surfaces 122 and 124.
6 are interposed. In the fourth embodiment, the sleeve member 172 includes two sets 162, 164 of the first and second sets.
The slider 114 of the actuator means 102, 104,
116, the sliders 114, 11
7 together with the second actuator means 104 of one set 162 and the first actuator means 102 of the other set 164 are accommodated in a sleeve member 172, in which sliders 114 and 116 are axially moved (in FIG. Left and right directions). In addition,
In this embodiment, in order to allow the sleeve member 172 to move in the axial direction, a pair of slit openings 174 extending in the axial direction is formed in an intermediate portion of the sleeve member 172, and the mounting member is inserted through the slit openings 174. Both ends of 170 protrude in the vertical direction. Therefore, the sleeve member 172 can move to a position where the mounting member 170 is located at one end of the slit opening 174.

In the actuator device of the fourth embodiment, similarly to the third actuator device, the first and second actuator means 102 of one set 162,
104 and the first and second actuator means 102 and 104 of the other set 164 are alternately
2 is controlled. That is, the first and second sets of one (or the other) set 162 (or 164)
Slider 11 of the actuator means 102 and 104
4, 116 act on and move the sleeve member 172, the other (or one) set 164 (or 162) of the first and second actuator means 10
2 and 104 sliders 114 and 116 are sleeve members 1
72 does not substantially act and returns to its original position. Such operations are performed alternately, and by acting on the sleeve member 172 in this manner, the sleeve member 172 can be moved in a predetermined direction by a predetermined distance.

In this embodiment, as will be easily understood, the sleeve member 172 can be moved in the same manner as in the first embodiment, and the moving speed is twice the moving speed of the first embodiment. , Can be moved at a faster speed. Also, the first and second sets of two sets 162 and 164
Since at least one set of the actuator means 102 and 104 acts on the sleeve member 128, the sleeve member 172 can be held, and therefore, the holding member 132 in the first embodiment can be omitted.

FIG. 8 shows a fifth embodiment of the actuator device according to the present invention. In the fifth embodiment, an elastic deformation means is used instead of the displacement conversion means.

In FIG. 8, the illustrated actuator device comprises first and second actuator means 202, 20.
4 is provided. The first and second actuator means 202, 204 comprise actuator bodies 206, 208
And one end of each of actuator main bodies 206 and 208 is provided with sliders 214 and 216 via shafts 210 and 212.
The sliders 214 and 216 are arranged so as to face each other. The other ends of the actuator bodies 206 and 208 are connected to stationary members 215 and 217, respectively.
It is fixed to. Therefore, the actuator body 2 of the first and second actuator means 202, 204
When the drive voltage is applied to the sliders 06 and 208, the sliders 214 and 216 are displaced in their axial directions, that is, in the left and right directions in FIG.

First and second actuator means 10
Between the tip portions of the sliders 214 and 216 of 2,104
A pair of spring members 218 constituting elastic deformation means are interposed. As shown in FIG. 10, the spring member 218
It is formed of a thin conical spring member, and is disposed between the sliders 214 and 216 such that base portions having a large outer diameter are in contact with each other.

In the fifth embodiment, the sliders 214, 2 of the first and second actuator means 202, 204 are used.
A sleeve member 220 that fits the sleeve 16 and extends in the axial direction is provided. The sleeve member 220 is formed of a hollow member having a circular inner diameter corresponding to the outer diameter of the spring member 218. The outer diameter of the base of the spring member 218 is set to be slightly smaller than the inner diameter of the sleeve member 220, for example, about several tens μm, in order to allow relative movement of the spring member 218 with respect to the sleeve member 220. . The sleeve member 220 is held by a holding member (not shown) as in the first embodiment.

In the actuator device of the fifth embodiment, the first and second actuator means 202 and 2
When a positive drive voltage is applied to the actuator 04, as shown in FIG. 9, the actuator bodies 206 and 208 are distorted and expanded, and the sliders 114 and 116 are displaced in directions approaching each other. Thus, the sliders 114, 116
The pair of spring members 218 are compressed by the pressing force, and the pair of spring members 218 are elastically deformed and expanded in the radial direction. Thus, a part of the outer peripheral surface of the spring member 218 acts on the inner peripheral surface of the sleeve member 220, whereby the sleeve member 220 is held by the pair of spring members 218. Then, in the holding state, the first
Actuator body 20 of the actuator means 202
When the actuator body 208 of the second actuator means 204 is contracted while the armature 6 is further extended, the sleeve member 220 is moved in a predetermined direction. The first
The second actuator means 202 and 204 are applied with a drive voltage as shown in FIG. 4A, for example, as in the first embodiment, and are applied in the same manner as in the first embodiment. The sleeve member 220 is moved in the axial direction.

As described above, in the fifth embodiment, the sleeve member 22 is formed similarly to the first embodiment.
0 can be moved in a predetermined direction, and the same effect as in the first embodiment is achieved.

FIG. 11 shows a sixth embodiment of the actuator device according to the present invention. In the sixth embodiment, spring members having different shapes are used as spring members. In the sixth embodiment, members that are substantially the same as those in the fifth embodiment are given the same reference numerals, and descriptions thereof are omitted.

11 and 13, in the actuator device according to the sixth embodiment, a pair of spring members 242 includes a thin dish-shaped spring main body 244 and a spring main body 24.
4 has an annular flange portion 246 provided on the outer peripheral portion. The pair of spring members 242 are configured such that the sliders 214, 214 of the first and second actuator means 202, 204 are arranged such that the base side on which the flange portion 246 is provided faces outward.
216. Other configurations in the sixth embodiment are substantially the same as those in the fifth embodiment.

In the actuator device of the sixth embodiment, the first and second actuator means 202, 2
When a positive drive voltage is applied to the actuator 04, as shown in FIG. 12, the actuator bodies 206 and 208 are distorted and expanded, and the sliders 214 and 216 are displaced in directions approaching each other. Thus, the sliders 214, 216
Presses the spring body 244 of the spring member 242, and the pressing force compresses the pair of spring members 242, whereby the pair of spring members 242 elastically deform and expand in the radial direction. Thus, the flange portion 2 of the spring member 242
44 acts on the inner peripheral surface of the sleeve member 220,
As a result, the sleeve member 220 is connected to the pair of spring members 24.
2 is held. In this holding state, when the actuator main body 206 of the first actuator means 202 is further extended, while the actuator main body 208 of the second actuator means 204 is contracted, the sleeve member 220 is moved in a predetermined direction. . The first and second actuator means 202, 20
4 is, for example, similar to the first embodiment shown in FIG.
It is applied by the drive voltage as shown by.

As described above, also in the sixth embodiment, the sleeve member 22 is formed similarly to the fifth embodiment.
0 can be moved in a predetermined direction, and the same effect as in the fifth embodiment is achieved. Further, in this embodiment,
When the spring member 242 is compressed, its flange 24
Since substantially the entire area of the outer peripheral surface of the sleeve 6 acts on the sleeve member 220, the sleeve member 220 can be held more reliably than in the fifth embodiment.

FIG. 14 shows a seventh embodiment of the actuator device according to the present invention. In the seventh embodiment, an elastic block member is used as the elastic deformation means. Note that, in the seventh embodiment, the fifth
Members that are substantially the same as those in the first embodiment are given the same reference numerals, and descriptions thereof are omitted.

In FIG. 14, in the actuator device according to the seventh embodiment, the elastic deformation means is constituted by a cylindrical block-shaped member 252. One end of the block-shaped member 252 is fixed to the slider 214 of the first actuator means 202 by, for example, an adhesive, and the other end is fixed to the slider 216 of the second actuator means 204 by, for example, an adhesive. Such a block-shaped member 252 can be formed from a synthetic rubber material. Other configurations in the seventh embodiment are substantially the same as those in the fifth embodiment.

In the actuator device of the seventh embodiment, the first and second actuator means 202 and 2
When a positive drive voltage is applied to the actuator 04, as shown in FIG. 15, the actuator bodies 206 and 208 are distorted and expanded, and the sliders 214 and 216 are displaced in directions approaching each other. Thus, the sliders 214, 216
Presses the block-shaped member 252, and the pressing force causes the block-shaped member 252 to expand radially outward. Thus, the outer peripheral surface of the block-shaped member 252 acts on the inner peripheral surface of the sleeve member 220, whereby the sleeve member 220 is held by the block-shaped member 252. Then, in this holding state, while the actuator body 206 of the first actuator means 202 is further extended, while the actuator body 208 of the second actuator means 204 is contracted, the sleeve member 220
Is moved in a predetermined direction. The first and second actuator means 202 and 204 are applied by, for example, the same drive voltage as in the first embodiment.

As described above, in the seventh embodiment, the sleeve member 22 is formed in the same manner as in the fifth embodiment.
0 can be moved in a predetermined direction, and the same effect as in the fifth embodiment is achieved. Further, in this embodiment,
Since the block-shaped member 252 is used as the elastic deformation means, the sleeve member 220 can be held and moved with a simple configuration.

FIG. 16 shows an eighth embodiment of the actuator device according to the present invention. In the eighth embodiment, an elastic member filled with hydraulic oil is used as the elastic deformation means. In the eighth embodiment, members that are substantially the same as those in the fifth embodiment are given the same reference numerals, and descriptions thereof are omitted.

In FIG. 16, in the actuator device according to the eighth embodiment, the elastically deforming means is the slider 2 of the first and second actuator means 202 and 204.
The elastic member 262 is provided between the elastic members 14 and 216. One end of the elastic member 262 has the slider 21.
4 has a film-like member 264 attached to the slider 216 at the other end, and the inside of the film-like member 264 is filled with hydraulic oil 266. Therefore, when the hydraulic oil 266 flows in the film-like member 264,
The elastic member 262 can be elastically deformed. The film-like member 264 can be formed from, for example, a rubber material or a synthetic resin material. Other configurations in the eighth embodiment are substantially the same as those in the fifth embodiment.

In the actuator device of the eighth embodiment, the first and second actuator means 202 and 2
When a positive drive voltage is applied to the actuator 04, as shown in FIG. 17, the actuator bodies 206 and 208 are distorted and expanded, and the sliders 214 and 216 are displaced in directions approaching each other. Thus, the sliders 214, 216
Presses the elastic member 252, and the pressing force causes the internal operating oil 266 to flow, thereby expanding the elastic member 262 radially outward. Thus, the film-like member 2 of the elastic member 262
64 acts on the inner peripheral surface of the sleeve member 220, whereby the sleeve member 220 is held by the elastic member 262. In this holding state, the actuator main body 206 of the first actuator means 202 is further extended, while the second actuator means 204
When the actuator body 208 is contracted, the sleeve member 220 is moved in a predetermined direction. The first and second actuator means 202 and 204 may be, for example, the same as in the first embodiment.

As described above, in the eighth embodiment, the sleeve member 22 is formed in the same manner as in the fifth embodiment.
0 can be moved in a predetermined direction, and the same effect as in the fifth embodiment is achieved.

Although various embodiments of the actuator device according to the present invention have been described above, the present invention is not limited to these embodiments, and various modifications and changes can be made without departing from the scope of the present invention. It is.

For example, in the illustrated embodiment, the first and second actuator means are constituted by piezoelectric actuators, but a giant magnetostrictive actuator may be used instead of the piezoelectric actuator. As the giant magnetostrictive actuator, for example, an electromagnetic coil for generating a magnetic field may be provided inside a permanent magnet sleeve, and a giant magnetostrictive rod may be provided inside this electromagnetic coil. Fixed to giant magnetostrictive rod. When such a giant magnetostrictive actuator is used, a magnetic field is generated by sending a current to the electromagnetic coil, and the giant magnetostrictive rod is distorted and expanded by the magnetic field. Therefore, the sleeve member can be moved by using the expansion due to the distortion of the giant magnetostrictive actuator, as in the case of using the piezoelectric actuator.

[0056]

According to the actuator device of the first aspect of the present invention, the output portions of the first and second actuator means are disposed to face each other. When the output portions of these actuator means are displaced in directions approaching each other, the sleeve members, which are the output members of the actuator device, act on the output displacement means to convert their axial displacements into radial displacements. An output unit holds the sleeve member. When one of the first and second actuator means is extended and the other is contracted while holding the sleeve member, the held sleeve member is moved in a predetermined direction. Therefore, the sleeve member can be moved in a predetermined direction by the two actuator means, and the configuration is relatively simple.

According to the actuator device of the second aspect of the present invention, since the output conversion means is constituted by the inclined surfaces of the sliders as their output portions, the first and second output devices are formed.
When the outputs of the actuator means are displaced in directions approaching each other, the axial displacement of the sliders is converted into a radial displacement by the action of the inclined surfaces,
Therefore, the displacement of the slider in the axial direction can be converted into the displacement in the radial direction with a relatively simple configuration.

According to the third aspect of the present invention, the output portions of the first and second actuator means are disposed to face each other. When the output portions of these actuator means are displaced in a direction approaching each other, the sleeve member, which is the output member of the actuator device, is elastically deformed by the elastic deformation means disposed between the two output portions to radial displacement. Hold the sleeve member. When one of the first and second actuator means is extended and the other is contracted while holding the sleeve member, the sleeve member held by the elastic deformation means is moved in a predetermined direction. You. Therefore, the sleeve member can be moved in a predetermined direction by the two actuator means, and the configuration is relatively simple.

According to the actuator device of the fourth aspect of the present invention, the output portions of the first and second actuator means are provided by using a drive circuit for generating a drive voltage having a sine waveform having a phase different from each other by a predetermined angle. The sleeve member can be moved as required, and the sleeve member can be moved in a predetermined direction with a simple drive circuit.

According to the actuator device of the fifth aspect of the present invention, the output portions of the first and second actuator means are provided by using a drive circuit for generating a drive voltage having a sawtooth waveform having a phase different from each other by a predetermined angle. The sleeve member can be moved as required, and the sleeve member can be moved in a predetermined direction with a simple drive circuit.

According to the actuator device of the sixth aspect of the present invention, the drive circuit includes the adjusting means. When adjusting the frequency of the drive voltage by this adjusting means,
The number of movements in a predetermined time, in other words, the movement speed of the sleeve member can be adjusted. When the amplitude of the driving voltage is adjusted by the adjusting means, the moving amount in one cycle, in other words, the moving speed of the sleeve member can be adjusted. Further, when adjusting the phase difference of the drive voltage by the adjusting means, the moving direction of the sleeve member and the holding force for holding the sleeve member can be adjusted.

According to the actuator device of the present invention, two sets of the first and second actuator means arranged in series or in parallel act on the sleeve member alternately. Therefore, there is no useless movement of the actuator device, and the sleeve member can be moved efficiently.

Further, according to the actuator device of the present invention, since the first and second actuator means are constituted by a piezoelectric actuator or a magnetostrictive actuator, the drive voltage or the drive current applied thereto is changed. Thereby, the sleeve member can be moved.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view schematically showing a first embodiment of an actuator device according to the present invention.

FIG. 2 is a sectional view schematically showing a state in which first and second actuator means are extended in the actuator device of FIG. 1;

FIG. 3 is a cross-sectional view schematically showing a state in which the first actuator is expanded and the second actuator is contracted in a state where the sleeve member is held by the slider in the actuator device of FIG.

FIG. 4 (a) is a diagram showing a waveform of a driving voltage applied to first and second actuator means, and FIG. 4 (b) is a diagram in which the voltage of FIG. 4 (a) is applied; First when
FIG. 7 is a diagram showing displacement of a second actuator means.

FIG. 5 is a sectional view schematically showing a second embodiment of the actuator device according to the present invention.

FIG. 6 is a sectional view schematically showing a third embodiment of the actuator device according to the present invention.

FIG. 7 is a sectional view schematically showing a fourth embodiment of the actuator device according to the present invention.

FIG. 8 is a sectional view schematically showing a fifth embodiment of the actuator device according to the present invention.

9 is a partial cross-sectional view schematically showing a state in which first and second actuator means are extended in the actuator device of FIG.

FIG. 10 is a perspective view showing a spring member in the actuator device of FIG. 8;

FIG. 11 is a sectional view schematically showing a sixth embodiment of the actuator device according to the present invention.

FIG. 12 shows a first example of the actuator device shown in FIG.
FIG. 7 is a partial cross-sectional view schematically showing a state where the second actuator means is extended.

FIG. 13 is a perspective view showing a spring member in the actuator device of FIG.

FIG. 14 is a sectional view schematically showing a seventh embodiment of the actuator device according to the present invention.

FIG. 15 shows a first example of the actuator device shown in FIG.
FIG. 7 is a partial cross-sectional view schematically showing a state where the second actuator means is extended.

FIG. 16 is a sectional view schematically showing an eighth embodiment of the actuator device according to the present invention.

FIG. 17 shows a first example of the actuator device shown in FIG.
FIG. 7 is a partial cross-sectional view schematically showing a state where the second actuator means is extended.

FIG. 18 is a diagram schematically showing an example of a conventional actuator device.

19 is a diagram showing waveforms of driving voltages for driving three actuator units of the actuator device of FIG. 18 respectively.

[Explanation of symbols]

102, 202 First actuator means 104, 204 Second actuator means 106, 108, 206, 208 Actuator body 114, 116, 214, 216 Slider 122, 124, 142, 144, 146, 148 Inclined surface 126 Spherical member 128 , 162, 220 Sleeve member 136 Drive circuit 140 Adjustment circuit 145 Moving member 218, 242 Spring member 252 Block-shaped member 262 Elastic member

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-1-274673 (JP, A) JP-A-2-99889 (JP, A) JP-A-4-341644 (JP, A) JP-A-6-341 327268 (JP, A) JP-A-7-107755 (JP, A) JP-A 62-104593 (JP, U) JP-A 63-693 (JP, U) (58) Fields investigated (Int. ⁶ , DB name) H02N 2/00 H01L 41/083

Claims (8)

(57) [Claims] A first output unit disposed opposite to the first output unit;
And second actuator means, output conversion means for converting an axial displacement of an output section of the first and second actuator means into a radial displacement, and an output section of the first and second actuator means. A sleeve member extending in the axial direction so as to cover the first and second actuators. When the output portions of the first and second actuators are displaced in directions approaching each other, their axial displacements are changed to a radius by the action of the output conversion means. The output of the first and second actuator means acts on and holds the inner peripheral surface of the sleeve member. In the state where the sleeve member is held, And one of the second actuator means is controlled to extend its output and the other is controlled to contract its output. Thus the sleeve member is an actuator device characterized by being moved in the axial direction by expansion and contraction of the first and second actuator means. 2. An output section of said first and second actuator means is constituted by a slider, and said output conversion means is constituted by an inclined surface formed on a tip end surface of said slider. When the sliders of the second actuator are displaced in a direction approaching each other, the axial displacement of both sliders is converted into a radial displacement in a direction away from each other by the action of the inclined surfaces of both sliders,
2. The actuator device according to claim 1, wherein the sliders of the first and second actuators act on and hold the inner peripheral surface of the sleeve member. 3. A first power supply, wherein output units are arranged to face each other.
And second actuator means, elastic deformation means disposed between the output portions of the first and second actuator means, and a sleeve member extending in the axial direction covering the elastic deformation means, When the output portions of the first and second actuators are displaced in a direction approaching each other, the elastic deformation means is elastically deformed in the radial direction by their axial displacement, whereby the elastic deformation means is connected to the sleeve member. Acting on the inner peripheral surface of the first and second actuator means in a state where the elastic deformation means holds the sleeve member, one of the first and second actuator means is controlled such that its output portion is extended, The other of them is controlled so that its output is contracted, so that the sleeve member is caused by the expansion and contraction of the first and second actuator means. Actuator device characterized by being moved in Kijikusen direction. 4. A driving circuit for driving the first and second actuator means is provided in relation to the first and second actuator means, and the driving circuit drives a sine waveform having a phase different from each other by a predetermined angle. 4. The actuator device according to claim 1, wherein a voltage is supplied to the first and second actuators. 5. A driving circuit for driving the first and second actuator means is provided in association with the first and second actuator means, and the driving circuit drives a sawtooth waveform having a phase different from each other by a predetermined angle. 4. The actuator device according to claim 1, wherein a voltage is supplied to the first and second actuators. 6. The driving circuit according to claim 4, wherein the driving circuit includes adjusting means for adjusting at least one of a frequency of the driving voltage, an amplitude of the driving voltage, and a phase difference of the driving voltage. The actuator device according to any one of the preceding claims. 7. An output unit is provided with two sets of said first and second actuators facing each other, and said two sets of first and second actuator means are arranged in series or in parallel, 4. The device according to claim 1, wherein the sleeve member alternately acts on the sleeve member to move in the axial direction.
An actuator device according to claim 1. 8. The apparatus according to claim 1, wherein said first and second actuator means are constituted by a piezoelectric actuator or a giant magnetostrictive actuator.
The actuator device according to any one of the preceding claims.