JP2997085B2 - Roll stamper for forming information recording media - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a roll-shaped stamper used for a roller / groove molding method for manufacturing a substrate for an information recording medium, and more particularly to a roll-shaped stamper which can easily be mounted on a roller.

[0002]

2. Description of the Related Art In general, substrates for information recording media are disclosed in JP-A-56-87203, JP-A-56-84921 and JP-A-52-84921.
As described in Japanese Patent No. 82204, grooves such as tracking grooves and information pits are formed on the information recording surface.

[0003] As a method for forming a groove on a substrate for an information recording medium, 1) When a plastic resin is used as a material for the substrate for an information recording medium, the injection molding method, the compression molding method, or the roller / groove molding method is used. 2) When a photocurable resin composition is used, a replica of a groove forming stamper of an information recording medium is transferred to a transparent resin substrate, that is, a so-called 2P molding method, 2P roller.
It is known that the groove is formed by a casting method using a resin monomer or a prepolymer containing a solvent.

In the 2P roller / groove forming method of 2), the track groove of the optical information recording medium is rolled.
A roll stamper for forming an information recording medium 2P (hereinafter referred to as a roll stamper for 2P), which can be formed in a continuous continuous process of a two-roll system, is exclusively used.

As a method of manufacturing the roll stamper for 2P, Japanese Patent Application Nos. 1-38872 and 1-338346.
As described in the publication, there is a method in which a paper-like glass stamper is manufactured by a photolithography technique, and is fixed to a roller with a heat-shrinkable tube or a shape memory alloy via an adhesive.

In the roller / groove forming method of the above 1), a roll-shaped stamper for molding an information recording medium (hereinafter, referred to as a stamper for forming an information recording medium) can be formed in a continuous continuous process of a roll-to-roll method. , Roll-shaped stampers) are used exclusively.

As a method of manufacturing the roll-shaped stamper, as described in Japanese Patent Application No. 63-264691, a roller-shaped stamper is manufactured by directly exposing a roller using a paper-shaped glass mask and directly engraving the roller. There are known ways to do this.

However, in the above-mentioned "method by direct engraving", a predetermined pattern (tracking groove, tracking groove,
For example, when a defect occurs in a predetermined pattern of one to several information recording media, a whole roll-type stamper is used. As a result, the efficiency of using the predetermined pattern of the information recording medium per one roll-type stamper formed by directly engraving the predetermined pattern of the plurality of information recording media is extremely low.

Further, in order to improve the production efficiency,
Many predetermined patterns must be formed by direct engraving on the roll-shaped stamper, so that the roller diameter of the roll-shaped stamper is increased, the weight is increased, and replacing one roll-shaped stamper requires a large amount of labor. Required.

In order to solve such a defect, a sheet-like stamper is manufactured by an electroforming method, and the stamper is fixed by using a shape memory alloy with an adhesive between the stamper and the roller (Japanese Patent Application No. 63-1988). 285873) or a method using a configuration (Japanese Patent Application No. 1-38872) in which a paper lithography technique is used, and a heat-shrinkable tube is used with an adhesive interposed between the rollers and fixed.

[0011]

However, in the above-mentioned conventional example, as shown in FIG. 3, a predetermined pattern for one information recording medium is formed on one sheet-shaped stamper 10, and between the sheet-shaped stamper 10 and the roller. Since a roll-shaped stamper is manufactured by fixing a plurality of sheet-shaped stampers via an adhesive, there are the following defects.

(1) When a defect occurs in one or several sheet-like stampers, the defective sheet-like stamper must be replaced, but it takes about four hours to fix a new sheet-like stamper to the roller. , And during that time, the roller / groove molding apparatus is stopped, and the molding efficiency is reduced.

(2) One method is to prepare a newly pasted roll stamper and perform rotation. However, in order to improve production efficiency, more roll stampers are required for one roll stamper. The sheet stamper must be fixed. For this reason, the roller diameter of the roll-shaped stamper becomes large, the weight also increases, and replacing one roll-shaped stamper requires a large amount of labor (currently, replacing a 300 mm-diameter roll-shaped stamper requires 3 to 4 times). It takes about 3 hours for a person.) (3) Even if the sheet-shaped stamper is fixed, the work in the bonding process becomes more difficult as the roller diameter increases, and if the bonding and fixing device is required, the size of the bonding and fixing device may be increased. Is done. Therefore, equipment costs, personnel costs, and the like may increase.

(4) As shown in FIG. 3, the presence of the adhesive paste 11 requires an effort to remove it. Further, if roller groove molding is performed while the adhesive is left as it is, a change over time occurs in about 20 hours, and the adhesive itself causes defects.

[0015]

The present inventors have made intensive studies to solve the above-mentioned problems, and as a result, have completed the present invention. That is, the present invention provides the information recording medium preform
-Flexible with a pattern corresponding to the mat on the surface
Stamper; a fixture fixed to the back surface of both ends of the stamper; and
Running in parallel with the axis direction, the fixtures can be inserted respectively
A mirror roll having a plurality of locking grooves on a peripheral surface thereof,
Tools are respectively inserted into the locking grooves, and the stamper is
Information recording arranged along the peripheral surface of the surface roll base material
A roll stamper for forming a medium substrate,
And a means for applying tension to the damper.
This is a roll-shaped stamper for forming an information recording medium.

FIG. 1 is a schematic view of a roll-shaped stamper 5 according to the present invention. In the drawing, 1 is a long flexible stamper, 2 is a roller for fixing the long flexible stamper 1, 3 is a stamper fixing tool for fixing the stamper 1 to the roller 2, and 4 is formed on the long flexible stamper 1. 6 is a wedge for applying tension to the long flexible stamper 1,
Is a screw for fixing the stamper to the roller 2. Here, as the long flexible stamper 1, a plurality of stripe-shaped or spiral-shaped concave and convex patterns are formed as shown in FIGS.

[0017]

EXAMPLES The present invention will be described below in detail with reference to examples, but the present invention is not limited to these examples.

Embodiment 1 First, as shown in FIG.
A layer of photoresist 13 was formed (34 cm long × 30 cm wide) (Step A). The photoresist 13 is made of Az1
370 (manufactured by Hoechst Japan Co., Ltd.) was dropped onto the substrate 12 and applied to a thickness of 3000 ° using a spinner. Thereafter, prebaking was performed at 90 ° C. for 30 minutes.

Next, as shown in FIG. 1B, a laser exposure apparatus [mirror projector mask aligner M
PA-1500 (manufactured by Canon Inc.)] or the like, a predetermined pattern (striped shape) of a plurality of information recording media is exposed and developed with a developing solution Az312MIF (manufactured by Hoechst Japan) to perform tracking. A concave / convex fine pattern 13 'such as a groove for information and a pit for information was formed, and a glass master disk 14 for an optical card was manufactured (step B).

Further, as shown in FIG. 2C, as a pretreatment for forming a metal film by an electroforming method, a conductive treatment is performed using a film forming apparatus such as a sputtering apparatus and a vapor deposition apparatus (step C). . By forming a nickel film having a thickness of 1000 to 2000 mm by a sputtering apparatus, the conductive film 15 is formed.
Was formed on the glass master 14.

Next, as shown in FIG.
The metal film 1 is formed on the glass master 14 provided with
6 is formed (step D).

First, the nickel chip in the electroforming tank was set to the + side electrode, and the glass master 14 provided with the conductive film 15 was set to the − side electrode. At this time, it is preferable to use an outer peripheral electrode plate 17 as shown in FIGS. 5A and 5B as the electrode plate. This is because the outer electrode plate has a better film thickness distribution than the inner electrode plate. Further, when the outer peripheral electrode plate 17 is made rectangular according to the shape of the stamper as shown in FIG. 5B, the lines of electric force are concentrated on the edge portion 18 of the electrode plate, and the film thickness distribution may be extremely deteriorated. Therefore, here, a ring-shaped one as shown in FIG. 5A was used.

Next, in a nickel sulfamate electroforming solution, the glass master 14 on which the conductive film 15 has been
While rotating at 0 rpm, the time integral value of
100 to 200 under the condition of 34 AH (ampere hour)
A metal film 16 was formed by depositing nickel metal of μm.

The electroforming solution used here was nickel sulfamate tetrahydrate [Ni (NH ₂ SO ₃ ) ₂ .4H ₂ O] 50.
0 g / l, boric acid [H ₃ BO ₃ ] 35-38 g / l, pit inhibitor 2.5 ml / l, and the like.

Finally, as shown in FIG. 4E, the conductive film 15 and the metal film 16 are integrated and
Further, the photoresist adhering to the surface is removed, and cut as shown in FIG. 6 to obtain a line and space: 9.5 μm / 2.5 μm, a step: 25
A long flexible stamper as shown in FIG. 1 (b), in which stripe guide grooves of 00 to 3000 ° were formed, was obtained (step E).

Next, using the obtained long flexible stamper, a stamper fixture 3 made of Ni-plated steel material
(310 mm × 15 mm × t5) is fixed by welding. As a welding method, fixing was performed by a method such as EB (electron beam) welding, silver brazing welding, or YAG laser welding.

As shown in FIG. 2, the stamper fixture 3 is installed at a predetermined position of a welding jig 8 having a beam slit 9. Next, the welding surface of the long flexible stamper 1 (the surface on which the concavo-convex pattern such as the tracking groove and the information pit is not applied) and the welding surface of the stamper fixture 3 are fitted, and the upper lid is attached from above and screwed. Complete the settings.

Using a EB welding apparatus, EBW6LB (manufactured by Mitsubishi Electric Corporation), the long flexible stamper having been set was subjected to EB welding and fixed to the stamper fixture 3.

The conditions for EB welding are as follows: degree of vacuum: 5 × 10 ^-2 T
orr, acceleration voltage: 60 kV, beam current: 3.2 m
A, Beam speed: 4.0 m / min.

Under the above conditions, when a large distortion occurs in the long flexible stamper, the welding may be performed by using an electron beam as a pulse. The pulse beam conditions are as follows: frequency: 60 Hz, duty: 20 to 5;
0%, deflection device volume: 100 mV, offset: 50 mV.

In the case of using YAG laser welding, the welding surface of the long flexible stamper and the welding surface of the stamper fixture are aligned in the same manner as in the above-mentioned EB welding, and the upper lid of the welding jig is attached from above and screwed. To complete the setting. This welding jig is mounted on an XY stage. The XY stage is linked to the YAG laser welding device. As YAG laser welding equipment,
Using ML-2220A (manufactured by Miyaji Laser System Co., Ltd.), charging voltage: 350 V, pulse width: 1.0 ms, defocus: 5 mm, REP-RATE (PPS):
20, the power: 35 to 65 W, the stamper fixture was fixed to the long flexible stamper.

When fixing the stamper fixing device by silver brazing, the welding surfaces are joined together via a silver brazing foil between the welding surface of the long flexible stamper and the welding surface of the stamper fixing device. The setting is completed by applying a pressure of 50 kg / cm ² . This is the degree of vacuum 2
Silver brazing was performed in a vacuum heating furnace under the conditions of × 10 ⁻⁵ Torr, peak heating temperature: 820 ° C., and heating time: 7 hours, and the stamper fixture was fixed to the long flexible stamper. FIG. 7 shows the temperature change in the vacuum heating furnace.

The method of fixing the long flexible stamper and the stamper fixing tool is not limited to the above-mentioned method, and a method such as a low-melting metal, a low-melting glass, a heat-resistant adhesive, a screw, and a clamp may be used. Can also.

Next, grooves (locking grooves) formed on the roller by a method such as electric discharge machining, cutting, dressing and the like.
Next, a method of attaching the stamper fixing tool of the long flexible stamper to a mechanism capable of applying tension by inserting a wedge will be described. As shown in FIG. 8, the roller 2 has a square groove (width 20 mm, depth 5 m).
m) is machined using an electric discharge machine, and the fixture 3 of the long flexible stamper is attached to the groove. Next, by tightening the tension screw 19, the wedge 6
, The tension is applied to the long flexible stamper 1 in the direction of arrow B.

The tension applied to the long flexible stamper 1 can be set by adjusting the torque of the tension screw 19. However, in the roller / groove molding, the molding temperature condition is 125 ° C. to 145 ° C. After reaching, it is desirable to tighten the tension screw 19 again and adjust the tension applied to the long flexible stamper 1.

At this time, since the shape of the groove formed on the roller 2 is square, the tensioner is used to easily release the stamper fixing tool 3 from the groove. After the fixing, the fixing tool was fixed with screws 7 so that the fixing tool did not come off the groove, thereby completing the roll-shaped stamper of the present invention. In addition, the fixture holder 20
Was removed from the roller after the tension adjustment was completed.

Example 2 The shape of the groove to be formed on the roller 2 was processed into a trapezoidal shape (upper side 12 mm, lower side 20 mm, depth 5 mm) as shown in FIG. Is also trapezoidal (top 10mm, bottom 18mm, height 5m
A roll-shaped stamper was produced in the same manner as in Example 1 except that m) was used. In the present embodiment, since the groove shape is trapezoidal, the central portion of the long flexible stamper 1 (the portion located at the center with respect to the direction perpendicular to the extrusion direction).
Also, the fixation was completely performed.

Embodiment 3 As shown in FIG. 10, a trapezoidal groove is formed on the roller 2 in the same manner as in Embodiment 2, and the stamper fixture 3 is attached. Next, the beam slit 9 is brought into close contact with the long flexible stamper at a predetermined position, and the long flexible stamper 1 and the stamper fixture 3 are welded by YAG laser welding.
And welded. With the tension applied to the long flexible stamper 1, the other stamper fixture 3 was similarly welded with the YAG laser 21 to complete the roll stamper. By welding the stamper fixing tool 3 and the long flexible stamper 1 after setting the stamper fixing tool 3 in the groove of the roller 2 as in the present embodiment, welding positioning is performed with high precision.

Example 4 As shown in FIG. 11, a hollow structure was provided in a stamper fixture 3, and a magnet rod 21 was inserted into the hollow structure and was welded to a long flexible stamper 1 by YAG laser welding. In the same manner as in Example 1, the stamper fixing tool 3 was fitted into the groove of a roller having a square groove, and the long flexible stamper 1 was fixed. Next, when the set temperature of the roller groove molding is reached in the same manner as in the first embodiment, the tension screw 19 is tightened as in the first embodiment, and the tension applied to the long flexible stamper 1 is adjusted. The roll-shaped stamper 5, which is completely fixed at the center, was completed.

The hollow structure can be manufactured by a method such as drilling, electric discharge machining, and plate bending. In the present embodiment, it was manufactured by electric discharge machining. The material of the magnet rod 21 is SmC
o ₅ , Nd ₂ Fe ₁₄ B, Sm (Co, Fe, Cu) _6.8 ,
Sm (Co, Fe, Cu, Zr) _7.4 or the like can be used, but in this embodiment, a Nd-Fe-B-based magnet was used.

When the groove is formed on the roller 2 if the groove has a square shape, the groove can be formed more easily than a trapezoidal shape. However, the stamper fixture 3 is easily detached from the groove. Therefore, as in this embodiment, the stamper fixture 3
Is provided with a hollow structure, and a magnet rod 2 is provided in the hollow structure.
By inserting 1, the fixing is complete without using the fixture retainer 20 used in the first and second embodiments, and it becomes possible to minimize the occurrence of unevenness when applying tension. The shape of the hollow structure and the shape of the magnet rod can be shapes as shown in FIGS. 11B to 11D, but are not limited to only these shapes.

Embodiment 5 As shown in FIG. 12, a slide portion 24 is provided on the side surface of the roller 2 to adjust the mounting position of the tension bar 23. Next, as shown in the figure, one end of the tension bar 23 was hooked on the stamper fixture 3, and the other end was fitted into the slide portion 23. As the material of the tension bar 23, a shape memory alloy whose shape recovers when the temperature reaches the set temperature of the roller / groove molding temperature, a bimetal whose shape changes at the set temperature, or the like can be used.

As the shape memory alloy, an Au—Cd alloy,
Cu-Al-Zn alloy, Cu-Al-Ni alloy, In-
Any material that is generally known as a shape memory alloy, such as a Tl alloy, a Ni-Al alloy, or a Ni-Ti alloy, can be used as long as it can recover its shape at a temperature near a set roller / groove forming temperature. This time, Ni- has an overwhelming advantage in terms of performance, especially in terms of life for repeated use.
Using a Ti alloy, the tension bar 23 is designed to be deformed into a V shape when the set temperature exceeds 80 ° C. At that time, the end of the tension bar slides in the slide portion 24, and when the shape of the tension bar is deformed, tension is applied to the long flexible stamper 1 to complete the roll stamper 5.

In the above, an example in which a shape memory alloy is used as the tension bar has been described. However, a bimetal can be used as described above. Bimetallic materials include brass (30 to 40% Zn) and nickel steel (Ni3
4%), brass (30-40% Zn) and invar (Ni3
6%), Monel metal (Ni-Cu) and nickel steel (N
i34-42%) can be used.

Embodiment 6 Next, an example in which a helical spring is used as a method for applying tension to the long flexible stamper 1 will be described. In this embodiment, since the helical spring is an elastic body, even if an overload occurs in the long flexible stamper 1, the long flexible stamper 1 is hardly damaged.

As shown in FIG. 13, a helical spring 25 was fixed to the side surface of the roller 2. The other end of the helical spring was fixed to the stamper fixture 3. The helical spring was fixed to the side surface of the roller 2 by providing a slide portion 24 so that the helical spring could be fixed while adjusting the strength of the tension.

[0047] As shown in Example 7 FIG. 14, subjected to a tapering on both sides which is in contact with the side surface of the groove surface and the roller contacting the shape of wedge 6 on the stamper fastener 3, further stamper tip of the wedge
A fixture provided with a contactable protrusion 26 near the center of the fixture 3 was used. By using a wedge having such a shape, tension can be simultaneously applied to the center of the stamper fixture, and the long flexible stamper 1 can be fixed without further distortion.

[0048]

As is clear from the above description, the roll-shaped stamper according to the present invention has the following remarkable effects.

(1) Since a predetermined pattern of a plurality of information recording media can be formed on one roll-shaped stamper in about 10 minutes, simplification of work and improvement of production efficiency can be achieved at the same time.

(2) The long flexible stamper can be replaced in a very short time, and during that time, the roller / groove molding device does not need to be stopped, and the generation of wasted time can be suppressed.

(3) Since no adhesive is used, the adhesive does not protrude, and the adhesive itself does not cause defects. Also, no adhesive fixing device is required.

(4) By molding the information recording medium substrate with a roll-shaped stamper using a long flexible stamper, the manufacturing cost of the information recording medium substrate can be reduced and an inexpensive information recording medium can be provided. .

[Brief description of the drawings]

FIG. 1A is a schematic diagram of a roll stamper of the present invention, and FIGS. 1B and 1C are schematic diagrams of a flexible stamper that can be installed on the roll stamper of FIG.

2A is a schematic view of a jig for welding a stamper fixing tool to a long flexible stamper, and FIG. 2B is a long flexible stamper 1 to which a stamper fixing tool 3 is attached.

FIG. 3 is a conventional roll stamper.

FIG. 4 is a schematic view showing a manufacturing process of a long flexible stamper usable in the present invention.

FIG. 5 is a schematic view showing an example of attaching an outer peripheral electrode plate used in an electroforming process in a manufacturing process of the long flexible stamper 1.

FIG. 6 is a schematic diagram showing a cutting method of the long flexible stamper 1.

FIG. 7 is a graph showing a temperature change of the vacuum heating furnace when the stamper fixing device 3 is attached to the long flexible stamper 1 by silver brazing.

FIG. 8 is a schematic diagram showing an example of a mechanism for applying tension to the long flexible stamper 1 by using a wedge;
(A) is a side view and (b) is a plan view.

FIGS. 9A and 9B are schematic views showing another example of a mechanism for applying tension to the long flexible stamper 1 by using a wedge, where FIG. 9A is a side view and FIG. 9B is a plan view.

FIG. 10 is a schematic view illustrating a method for manufacturing a roll stamper used in Example 3.

FIG. 11 is a schematic diagram showing a method of fixing the stamper fixing device 3 to the roller 2 by inserting a magnet rod;
(A) is a roller side view, (b)-(d) is sectional drawing of a stamper fixing tool.

FIG. 12 is a schematic view showing an example of a mechanism for applying tension to the long flexible stamper 1 using a tension bar.

FIG. 13 is a schematic view showing an example of a mechanism for applying tension to the long flexible stamper 1 by a helical spring.

FIG. 14 is a long flexible stamper 1 formed by a wedge.
FIG. 9 is a schematic diagram showing another example of a mechanism for applying tension to the helmet.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Long flexible stamper 2 Roller 3 Stamper fixture 4 Concavo-convex pattern 5 Roll stamper 6 Wedge 7 Screw 8 Welding jig 9 Beam slit 19 Tension screw 20 Fixer holder 22 Magnet bar 23 Tension rod 25 Hanging spring 26 Projection

────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Naoki Kushida 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Canon Inc. (72) Inventor Hitoshi Yoshino 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Incorporated (72) Inventor Hisanori Hayashi 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (56) References JP-A-4-107503 (JP, A) (58) Fields investigated (Int) .Cl. ⁷ , DB name) B29C 59/00-59/18 B29C 33/00-33/76 G11B 7/26

Claims (12)

(57) [Claims] 1. A flexible stamper having a pattern corresponding to a preformat of an information recording medium on a front surface thereof; a fixing member fixed to the back surfaces of both ends of the stamper; and a fixing member running parallel to the axial direction. A mirror surface roll having a plurality of engagement grooves that can be inserted into the peripheral surface thereof, wherein the fixing tool is inserted into each of the engagement grooves, and the stamper is arranged along the peripheral surface of the mirror surface roll base material. What is claimed is: 1. A roll stamper for forming a substrate for an information recording medium, comprising: means for applying tension to the stamper. 2. The wedge according to claim 1, wherein the means for applying the tension includes a wedge insertable between the fixture and the wall of the locking groove, and a means for applying a pressing force to the wedge. Roll-shaped stamper for forming an information recording medium. 3. The roll stamper for forming an information recording medium according to claim 2, wherein the wedge is inserted between at least one fixture and a wall of the locking groove. 4. A roll-shaped stamper for forming an information recording medium according to claim 2, wherein said fixing tool has a tapered portion capable of engaging with said wedge. 5. A side face of a locking groove in which the fixing tool is inserted is tapered, and the wedge contacts both a tapered portion of the fixing tool and a tapered portion of a side face of the locking groove. 5. The roll stamper for forming an information recording medium according to claim 4, wherein 6. The roll-shaped stamper for forming an information recording medium according to claim 5, wherein the wedge has a projection at a tip end capable of contacting the fixing tool . 7. A roll-shaped stamper for forming an information recording medium according to claim 1, wherein said fixing device has a trapezoidal cross section. 8. The roll stamper for forming an information recording medium according to claim 1, wherein said fixture has a hollow structure, and said hollow structure has a magnet. 9. The means for applying tension to the stamper,
A tension rod that is fixed to a side surface of the roll base material and is deformed in a direction in which tension is applied to the stamper when the roll-shaped stamper is heated to a predetermined temperature by engaging with at least one fixing tool. 2. The roll-shaped stamper for forming an information recording medium according to claim 1, wherein: 10. The roll stamper for forming an information recording medium according to claim 9, wherein said tension bar is formed of a bimetal. 11. The roll stamper for forming an information recording medium according to claim 9, wherein said tension bar is formed of a shape memory alloy. 12. The roll for forming an information recording medium according to claim 1, wherein the means for applying tension to the stamper is a spring having one end fixed to a side surface of the roll base material and the other end engaged with the fixing tool. Stamper.