JP3013349B2 - Flatness measurement jig - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flatness measuring jig which supports a work when measuring flatness.

[0002]

2. Description of the Related Art Conventionally, for example, in a factory, when measuring the flatness of a processed work, three mini-jacks are mounted on a surface plate, and the works are placed on these mini-jacks. A method has been adopted in which the needle-shaped probe of the measuring device is moved along the line. More specifically, a work is first placed on a bean jack, and then a measuring element is brought into contact with the work at a position above each bean jack, and the bean jack is moved up and down to adjust the zero point. That is, each bean jack is moved up and down, and at three points corresponding thereto, the height of the tracing stylus indicated by the measuring device is set to a predetermined height, and the ideal plane of the upper surface of the work is determined. Next, the tracing stylus is moved horizontally along the work. At this time, the tracing stylus moves up and down according to the height of the upper surface of the work, whereby the height of each point on the upper surface of the work is measured. Based on this, the flatness of the upper surface of the work is obtained.

[0003]

However, in the above-mentioned conventional measuring method, a work is placed on a jack whose position is fixed, and a tracing stylus of a measuring device is moved with respect to the work. There is a problem in that the centering is required, and the positioning of the work is troublesome. If the position of the work is not accurately set, the predetermined horizontal movement trajectory of the tracing stylus will not reach a predetermined position on the upper surface of the work, and the measurement conditions will not be the same for each work. In some cases, the stylus may come off the work. In addition, two workers were required to measure the flatness because of the trouble of positioning.

On the other hand, Japanese Utility Model Laid-Open No. 63-142702 discloses
In the publication, a support table is mounted on a base by three adjusting members, a rotary table is rotatably mounted on the support table, and an object to be measured is fixed on the rotary table by fixing means. A support device is described. When the flatness is measured, the support device rotates the turntable on which the DUT is fixed so that the line connecting the two reference points of the DUT is 2.
Parallel to the line connecting the two adjustment members,
Leveling is performed by adjusting the height with the adjusting member, and the flatness is measured in this state. Further, in the support device described in the above publication, in order to rotatably support the turntable on the support table, while forming a plurality of partial cylindrical slots radially at the bottom of the circular recess on the upper surface of the support table, Rollers are arranged in these slots, respectively, and these rollers are engaged with a turntable. However, with this configuration, there is a problem that the frictional resistance becomes large and the turntable cannot be rotated smoothly.

An object of the present invention is to provide a jig for measuring flatness, which can solve the above-mentioned problems, and in which the positioning of the work is easy and the flatness of the work can be measured simply and efficiently. With the goal. It is a further object of the present invention to make the positioning of the work easier and more reliable in the flatness measuring device.

[0006]

According to a first aspect of the present invention, there is provided a flatness measuring jig supported by a base and a horizontally rotatable support on the base to achieve the former object. A turntable, three jack stands radially provided on the turntable and movable in the radial direction of the turntable, and a jack provided on each of the jack stands so as to be able to move up and down, the turntable, A plurality of balls arranged substantially densely along one circumference are rotatably supported on the base, and the plurality of balls are a plurality of large-diameter balls closely attached to the base and the turntable. It consists of a smaller diameter ball located between the larger diameter balls.

Further, in order to achieve the latter object, a jig for flatness measurement according to a second aspect of the present invention includes a plurality of vertical positioning members provided between the jack tables and provided on a rotary table. These positioning members are located radially outside of the rotary table and higher than the jacks, and are positioned at a same distance from the rotary axis of the rotary table by a common drive mechanism while maintaining the diameter of the rotary table. It can be moved in any direction.

[0008]

According to the flatness measuring jig of the first aspect of the present invention, when measuring flatness, a work is placed on three jacks. At this time, the center of the work is made to substantially coincide with the rotation axis of the turntable, but it can be roughly confirmed by turning the turntable whether or not this positioning has been performed. Then, at a position above each jack, the tracing stylus of the measuring device is brought into contact with the work, and the jack is moved up and down to adjust the zero point. At this time, each jack is brought to a position below the tracing stylus by rotating the turntable on the base while keeping the horizontal position of the tracing stylus fixed. Next, the probe is moved horizontally along the work by rotating the turntable. At this time, the tracing stylus moves relative to the upper surface of the work along one circumference centered on the rotation axis of the turntable. Thus, the height of each point on the upper surface of the work is measured, and the flatness of the upper surface of the work is obtained based on the measured height. By adjusting the position of the jack base relative to the rotary base in the radial direction, it is possible to cope with a difference in the size of the work. Further, the turntable is rotatably supported on the base by balls, but it is better that the number of balls closely contacting the base and the turntable is small in terms of accuracy.
However, if the number is too small due to dimensional errors of the ball, the base, or the turntable itself, rotation of the turntable may be uneven. Therefore, although a certain number of balls are required to be in close contact with the base and the rotating base, it is not preferable to arrange the balls densely because frictional resistance increases. So, to keep the distance between sparsely large balls,
Smaller balls are placed between the larger balls, such that the larger and smaller balls are substantially closely spaced along one circumference.

Furthermore, in the flatness measuring jig according to the second aspect of the present invention, after a work having a circular outer shape is placed on the three jacks, the positioning member between the jacks is moved by the drive mechanism to the rotary shaft of the rotary table. To make contact with the outer periphery of the work. At this time, the plurality of positioning members move while keeping the distance from the rotation axis of the turntable equal. Therefore, when all the positioning members are in contact with the outer periphery of the work, the center of the work is rotated by the turntable. It is positioned to match the axis. In this state, the flatness is measured as described above. If the work to be measured next is of the same type as the previous work, the work is positioned between the positioning members in the original state and placed on the jack, whereby the work is positioned.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of a flatness measuring jig according to the present invention will be described below with reference to FIGS. 1
Is a horizontal disk-shaped base, and a short cylindrical portion 2 is formed vertically around the upper surface of the base 1. Further, the base 1 is concentrically located on the inner peripheral side of the cylindrical portion 2.
On the upper side, the inner peripheral receiving cylinder 3 is fixed. The inner peripheral receiving cylinder 3 has a vertical cylindrical shape and is positioned higher than the cylindrical portion 2, but the upper part of the outer peripheral surface is a tapered surface 4. 6
Is a horizontal disk-shaped turntable. The turntable 6 is supported on the base 1 so as to be rotatable horizontally. For this purpose, a short cylindrical portion 7 is formed vertically around the lower surface of the turntable 6. Further, an outer peripheral receiving cylinder 8 is fixed to the lower surface of the turntable 6 concentrically on the inner peripheral side of the cylindrical portion 7. The outer peripheral receiving cylinder 8 has a vertical cylindrical shape and is positioned lower than the cylindrical portion 7, and is located on the outer peripheral side of the cylindrical portion 2 of the base 1. Then, between the cylindrical portions 2 and 7 in the axial direction, and the receiving cylinders 3 and 8
A large number of balls 11 and 12 are interposed in the radial direction
The turntable 6 is supported on the upper part so that rotation is possible horizontally. The balls 11 and 12 have a diameter of 5 mm and a diameter of 4 mm, and are arranged almost densely along one circumference. The big ball 11,
It forms a thrust bearing and is in close contact with the end surfaces of the cylindrical portions 2 and 7 in the axial direction of the base 1 and the turntable 6, that is, in the vertical direction.
In the radial direction, there is a gap of about 15 μm between the receiving cylinders 3 and 8. In addition, in order to improve the close contact of the ball 11 with the receiving cylinders 3, 8, the end surfaces of the cylindrical portions 2, 7 may be tapered. It is preferable that the number of the balls 11 is small in terms of accuracy. However, due to a dimensional error of the balls 11 or the base 1 or the turntable 6 itself, for example, only three balls 11 cause uneven rotation of the turntable 6. Therefore, although a certain number of balls 11 are required, it is not preferable to arrange them densely because frictional resistance is increased. Therefore, in order to keep the distance between the sparsely large balls 11, smaller balls 12 are arranged between the large balls 11 as play balls.

On the upper surface of the turntable 6, three T-grooves are provided.
16 are formed. These T grooves 16 are located radially with respect to the rotation axis of the turntable 6 and are separated from each other by 120 °. A jack base 17 is slidably mounted in each T groove 16. That is, these three jack stands 17 are movable in the radial direction of the turntable 6 along the T-grooves 16 respectively. Each jack base 17 can be fixed at any position to the turntable 6 with bolts 18 respectively. Also, on each jack stand 17,
Bolts 19 are screwed together so as to project vertically upward. The jacks 21 are integrally provided at the upper ends of the bolts 19, respectively. Therefore, these jacks 21 can be raised and lowered by rotating them. Note that the upper end of the jack 21 is tapered. Further, on the upper surface of the turntable 6, a scale 22 composed of a plurality of circumferences centered on the rotation axis is formed.

Next, the operation of the above configuration will be described. The work W whose flatness is to be measured is annular. Of course, other workpieces can also be measured. At the time of measurement, first, the work W is placed on the three jacks 21. At this time, the difference in the diameter of the work W can be dealt with by adjusting the position of the jack table 17 with respect to the rotary table 6 in the radial direction. In addition, as shown in FIGS. 1 and 2, by reversing the direction of the jack base 17, it is possible to cope with a wider range of diameters. Further, the center of the work W is made to substantially coincide with the rotation axis of the turntable 6. This positioning, that is, centering, can be easily performed by the scale 22 composed of the circumference of the upper surface of the turntable 6 because the work W is annular. Even if the scale 22 is not provided, since the turntable 6 has a disk shape, it is easy to position the turntable 6 and the work W substantially coaxially. By turning, you can roughly check whether the centering has been performed.

Then, at a position above each jack 21, the tracing stylus 26 of the measuring device is brought into contact with the work W, and the jack 21 is moved up and down to adjust the zero point. That is, each jack 21 is moved up and down, the height of the tracing stylus 26 indicated by the measuring device is set to a predetermined height at three points corresponding thereto, and the ideal plane of the upper surface of the work W is determined. When adjusting the zero point, the stylus 26
The jack 21 is brought to a position below the tracing stylus 26 by rotating the turntable 6 on the base 1 while keeping the horizontal position of the base fixed. Next, while the horizontal position of the tracing stylus 26 is fixed, the turntable 6 is rotated to relatively horizontally move the tracing stylus 26 along the upper surface of the workpiece W. At this time, the tracing stylus 26 moves relative to the upper surface of the workpiece W along one circumference centered on the rotation axis of the turntable 6. Then, the tracing stylus 26 moves up and down in accordance with the height of the upper surface of the work W, whereby the height of each point on the upper surface of the work W is measured. Based on this, the flatness of the upper surface of the work W is determined.

As described above, the use of the flatness measuring jig of the first embodiment makes it possible to easily position the work W, particularly in the preceding stage of the measurement, and to easily measure the flatness of the work W. Thereby, the work efficiency of the flatness inspection is improved.

The flatness measuring jig is a jack stand.
By removing 17, it can be used as a rotating surface plate. As for the turntable, the flatness and parallelism between the upper and lower surfaces of the whole, that is, the lower surface of the base 1 and the upper surface of the turntable 6 must be sufficiently increased.

Next, the second embodiment of the flatness measuring jig of the present invention will be described.
An embodiment will be described with reference to FIG. In addition,
Portions corresponding to those of the first embodiment are denoted by the same reference numerals, and description thereof is omitted. On the upper surface side of the turntable 6, another T-groove 31 is formed in the middle of each of the three T-grooves 16 in which the jack base 17 is incorporated. These T grooves 31 are located radially with respect to the rotation axis of the turntable 6 and
120 ° apart. Each T-groove 31 has a pin base 3
2 are slidably assembled respectively. That is, these three pin bases 32 can move in the radial direction of the turntable 6 along the T-grooves 31 respectively. Each pin stand 32
, A pin 33 is vertically provided as a positioning member. These pins 33 are located higher than the jack 21 and are located radially outward of the turntable 6. Each pin base 32 is moved in the radial direction of the turntable 6 by a common mechanism similar to a scroll chuck in a lathe, while keeping the distance from the center axis of the turntable 6 equal. A bolt 34 for moving the pin base 32 is exposed on the upper surface of the turntable 6. That is,
By turning the bolt 34 using a tool, the pin base 32
Can be moved. Thus, each pin 33
Are always located at the same distance from the central axis of the turntable 6.
Note that handles 36 and 37 are provided on the outer peripheral surfaces of the base 1 and the turntable 6, respectively. In particular, handles 37 provided at equal intervals on the outer peripheral surface of the turntable 6 enable the turntable 6 to be easily turned by hand.

Next, the operation of the above configuration will be described. The workpiece W for measuring the flatness has a circular outer shape. After placing the work W on the three jacks 21, the three pin bases 32 are moved toward the rotation axis of the turntable 6, and the pins 33 are brought into contact with the outer periphery of the work W. At this time,
Since the three pins 33 separated by 120 ° move while maintaining the same distance from the rotation axis, when the three pins 33 are in contact with the outer periphery of the work W, the center of the work W Is positioned or centered so as to coincide with the rotation axis of. In this state, the flatness is measured in the same manner as in the first embodiment. Then, if the work W to be measured next is of the same type as the previous work W, the work W is inserted between the positioning members in the front state, and the jack 21 is moved.
When the work W is placed on the work, the work W is positioned.

As described above, according to the configuration of the second embodiment, the work W can be easily and accurately positioned with respect to the turntable 6 by the pins 33. Therefore, the measurement accuracy is further improved. Further, once the position of the pin 33 is adjusted for the same type of work W, the work W can be reliably positioned by merely inserting the work W between the pins 33 regardless of how many times measurement is repeated thereafter. . Therefore, the efficiency of the measurement operation is further improved.

It should be noted that the present invention is not limited to the above embodiment, and various modifications can be made. In particular, the workpiece W to be measured is not limited to the annular workpiece as shown in the above embodiment. Further, the configurations of the jack and the positioning member are not limited to those of the above-described embodiment.

[0020]

According to the first aspect of the present invention, the turntable is supported on the base so as to be rotatable horizontally, and three jack stands can be moved radially on the turntable in the radial direction of the turntable. The work to be measured is placed on three jacks using a flatness measuring jig provided on each of these jack stands so that the jack can be raised and lowered, and the measuring element of the measuring device in contact with the upper surface of this work is By rotating the turntable without moving horizontally, adjusting the zero point and measuring the height of the upper surface of the work, the work can be easily positioned and the flatness of the work can be easily measured. Work efficiency is improved. The turntable is rotatably supported on the base by a plurality of balls arranged substantially densely along one circumference, and the plurality of balls are a plurality of large-diameter balls closely attached to the base and the turntable. And the ball having a smaller diameter located between the balls having the larger diameter, the height accuracy of the turntable can be improved and the turntable can be smoothly rotated.

Further, according to the second aspect of the present invention, a plurality of vertical positioning members are provided between the jack stands on the rotary table and in contact with the outer periphery of the work, and these positioning members are shared by a common driving mechanism. By moving the rotary table in the radial direction while maintaining the same distance from the rotary axis of the rotary table, the center of the work having a circular outer shape can be easily and accurately coincident with the rotary axis of the rotary table. The measurement accuracy is further improved, and for the same kind of work, once the position of the positioning member is adjusted, the work can be reliably positioned only by inserting the work between the positioning members, and therefore, In addition, the efficiency of the measurement operation is further improved.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a first embodiment of a flatness measuring jig according to the present invention.

FIG. 2 is a plan view of the same.

FIG. 3 is a sectional view of the same.

FIG. 4 is a perspective view showing a second embodiment of the flatness measuring jig of the present invention.

[Explanation of symbols]

 1 base 6 turntable 17 jack stand 21 jack 33 pin (positioning member)

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G01B 5/00-5/30

Claims (2)

(57) [Claims] 1. A base, a turntable horizontally rotatably supported on the base, and three jack stands radially provided on the turntable and movable in a radial direction of the turntable. A jack provided on each of the jack bases so as to be able to move up and down, wherein the turntable is rotatably supported on the base by a plurality of balls arranged substantially densely along a circumference. Wherein the ball comprises a plurality of large-diameter balls in close contact with the base and the turntable, and a smaller-diameter ball located between the large-diameter balls. A plurality of vertical positioning members provided between the jack bases and provided on the turntable, the positioning members being located radially outward of the turntable relative to the jacks and being higher than the jacks; The flatness measuring jig according to claim 1, wherein the jig is positioned and can be moved in the radial direction of the turntable while keeping the distance from the rotation axis of the turntable equal by a common drive mechanism.