Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JP3044571B2 - Magnetic recording media - Google Patents
[go: Go Back, main page]

JP3044571B2 - Magnetic recording media - Google Patents

Magnetic recording media

Info

Publication number
JP3044571B2
JP3044571B2 JP2322356A JP32235690A JP3044571B2 JP 3044571 B2 JP3044571 B2 JP 3044571B2 JP 2322356 A JP2322356 A JP 2322356A JP 32235690 A JP32235690 A JP 32235690A JP 3044571 B2 JP3044571 B2 JP 3044571B2
Authority
JP
Japan
Prior art keywords
magnetic recording
recording medium
magnetic
substrate
recording layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2322356A
Other languages
Japanese (ja)
Other versions
JPH04195818A (en
Inventor
信一 府川
俊雄 稲生
昭夫 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tosoh Corp
Original Assignee
Tosoh Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tosoh Corp filed Critical Tosoh Corp
Priority to JP2322356A priority Critical patent/JP3044571B2/en
Publication of JPH04195818A publication Critical patent/JPH04195818A/en
Application granted granted Critical
Publication of JP3044571B2 publication Critical patent/JP3044571B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Magnetic Record Carriers (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明はコンピュ−タの外部記憶装置(磁気ディスク
装置)などにおいて、磁気記憶体として用いることので
きる高密度記録用の磁気記録媒体に関するものである。
Description: FIELD OF THE INVENTION The present invention relates to a magnetic recording medium for high-density recording that can be used as a magnetic memory in an external storage device (magnetic disk device) of a computer and the like. It is.

(従来の技術) コンピュ−タなどの記憶媒体として磁気記録媒体が用
いられてきている。従来、この磁気記録媒体として、磁
性粉末を塗布した磁気テ−プなどが広く用いられていた
が、この磁気テ−プは記憶密度が小さく、アクセス時間
が長いなどの欠点があるため、近年磁気テ−プにかわり
ランダムアクセスが可能な円板状の磁気ディスクが上記
磁気記録媒体として開発されてきており、なかでもアル
ミニウムなどの堅い基板上に、厚さ1μm程度の磁気記
録層を形成して構成された磁気記録媒体が使用され始め
ている。ところで、このような磁気記録媒体の磁気記録
層は、はじめは酸化鉄などの磁性粉末をバインダと混合
し、これを基板上にスピンコ−トなどの手法で塗布する
ことにより得られていたが、この方法により得られた磁
気記録層を含む磁気記録媒体には飽和磁化の大きさに限
界があった。そこで最近では、より大きい飽和磁化を有
する金属薄膜を磁気記録層として用いた磁気記録媒体が
提案されており、このような磁気記録層はコバルトある
いはコバルト系合金からなる薄膜を真空蒸着、スパッタ
リングなどの真空成膜技術により形成したり、コバルト
−リン、コバルト−ニッケル−リンなどの合金薄膜を無
電解メッキなどの湿式法により形成することにより得ら
れている。しかしながら、このような磁気記録媒体にお
いては次の問題点が指摘されている。すなわち、高記録
密度領域において高出力、高分解能の電磁変換特性を得
るためには、磁気記録媒体の保持力(Hc)、残留磁化
(Mr)を大きくすると共に、角形比(S)、補磁力角形
比(S*)をも大きくしなければならないが、その反
面、角形比(S)や保持力角形比(S*)を向上させる
と、出力が増加する一方で媒体ノイズが急激に増加し、
その結果SN比が悪くなり、高出力で高いSN比をバランス
良く得るのが困難であるという問題がある。
(Prior Art) Magnetic recording media have been used as storage media such as computers. Conventionally, a magnetic tape coated with magnetic powder has been widely used as the magnetic recording medium. However, this magnetic tape has disadvantages such as low storage density and long access time. Disc-shaped magnetic disks that can be randomly accessed instead of tapes have been developed as the above-mentioned magnetic recording media. Among them, a magnetic recording layer having a thickness of about 1 μm is formed on a hard substrate such as aluminum. Configured magnetic recording media have begun to be used. By the way, the magnetic recording layer of such a magnetic recording medium was initially obtained by mixing a magnetic powder such as iron oxide with a binder, and applying this to a substrate by a technique such as spin coating. A magnetic recording medium including a magnetic recording layer obtained by this method has a limit in the magnitude of saturation magnetization. Therefore, recently, a magnetic recording medium using a metal thin film having a higher saturation magnetization as a magnetic recording layer has been proposed. Such a magnetic recording layer is formed by depositing a thin film made of cobalt or a cobalt-based alloy by vacuum evaporation, sputtering, or the like. It is obtained by forming it by a vacuum film forming technique, or by forming an alloy thin film of cobalt-phosphorus, cobalt-nickel-phosphorus or the like by a wet method such as electroless plating. However, the following problems have been pointed out in such a magnetic recording medium. That is, in order to obtain high output and high resolution electromagnetic conversion characteristics in a high recording density region, the coercive force (S), the coercive force, and the coercive force (Hc) and residual magnetization (Mr) of the magnetic recording medium are increased. The squareness ratio (S *) must also be increased. On the other hand, when the squareness ratio (S) or the holding force squareness ratio (S *) is improved, the output increases while the medium noise increases rapidly. ,
As a result, there is a problem that the SN ratio is deteriorated, and it is difficult to obtain a high output and a high SN ratio with good balance.

(発明が解決しようとする課題) 本発明の目的は、高記録密度に適し、優れた出力及び
SN比を有する磁気記録媒体を提供することにある。
(Problems to be Solved by the Invention) An object of the present invention is to provide a high recording density, excellent output
An object of the present invention is to provide a magnetic recording medium having an SN ratio.

(問題を解決するための手段) 本発明者らは上記課題を解決するために鋭意検討を行
った結果、磁気記録層を特定の組成を有するCoCrTa系の
合金から構成し、更に基板に特定の粗さの同心円状の傷
(以下、テクスチュアリングという)を設けることによ
り、高出力を得ながらにして、媒体ノイズを低くおさえ
ることができ、これにより高記録密度に適した、優れた
SN比を有する磁気記録媒体が得られることを見出だし本
発明を完成するに至った。すなわち本発明は、非磁性下
地層を被覆した基板、該非磁性下地層上部に設けた磁気
記録層及び該磁気記録層を保護するための保護層を含ん
でなる磁気記録媒体において、上記磁気記録層が下記組
成式、 Co1-x-yCrxTay 0.05≦x≦0.2 0.005≦y≦0.1 で示される合金薄膜からなり、上記基板上にその円周方
向にテクスチュアリングを施し、該基板の平均表面粗さ
(Ra)が8〜12nmであることを特徴とする磁気記録媒体
である。
(Means for Solving the Problem) The present inventors have conducted intensive studies in order to solve the above-mentioned problems, and as a result, the magnetic recording layer was composed of a CoCrTa-based alloy having a specific composition, and further a specific substrate was formed. By providing concentric scratches of roughness (hereinafter referred to as texturing), it is possible to suppress medium noise while obtaining high output, thereby providing an excellent medium suitable for high recording density.
It has been found that a magnetic recording medium having an SN ratio can be obtained, and the present invention has been completed. That is, the present invention provides a magnetic recording medium comprising a substrate coated with a nonmagnetic underlayer, a magnetic recording layer provided on the nonmagnetic underlayer, and a protective layer for protecting the magnetic recording layer. There the following composition formula, an alloy thin film represented by Co 1-xy Cr x Ta y 0.05 ≦ x ≦ 0.2 0.005 ≦ y ≦ 0.1, subjected to texturing in its circumferential direction on the substrate, the average surface of the substrate A magnetic recording medium having a roughness (Ra) of 8 to 12 nm.

以下、図面を参照して本発明を詳細に説明する。第1
図は本発明の磁気記録媒体の一例の部分断面図を示す。
本発明の磁気記録媒体は第1図に示すように比磁性下地
層2を被覆した基板1上部に磁気記録層3及び該磁気記
録層を保護するための保護層4を含んで構成される。基
板1は例えばニッケル−リンメッキ膜、陽極酸化アルマ
イト膜などを被覆したアルミニウム合金や窒化珪素焼結
体、酸化アルミ焼結体などのセラミックスあるいはステ
ンレス、チタン合金などの金属、ガラスなどから構成す
ることができる。また、この基板上にはその円周方向に
該基板の平均表面粗さ(Ra)が8〜12nmとなるようにテ
クスチュアリングが施される。ここで、基板の平均表面
粗さ(Ra)が8nm未満である場合、得られる磁気記録媒
体からの信号を高出力で得ることができなくなり、12nm
を越える場合、得られる磁気記録媒体の媒体ノイズが大
きくなり、SN比が低下してしまう。この基板1は非磁性
下地層2により被覆されるが、この非磁性下地層2はク
ロムなどの非磁性金属薄膜などから構成することができ
る。この非磁性下地層2の厚みは適宜決定されるが、通
常500〜5000Å程度とすることが好ましい。次に非磁性
下地層2の上には組成式、 Co1-x-yCrxTay 0.05≦x≦0.2 0.005≦y≦0.1 で示されるCoCrTa系合金薄膜から構成される磁気記録層
3が300〜1000Å程度の厚みで形成される。ここで、磁
気記録層の組成が上記組成式に示されるものとすること
により、本発明の磁気記録媒体の保磁力、SN比は高いも
のとなる。また本発明の磁気記録媒体は磁気記録層3を
保護するための保護層4を含むが、この保護層は例えば
炭素などから構成することができ、その厚みは100〜400
Åとすることが好ましい。更に本発明の磁気記録媒体の
使用にあたっては、必要に応じて液体潤滑剤、固体潤滑
剤あるいはこれらの複合潤滑剤を塗布し、潤滑層5を形
成して使用してもよい。
Hereinafter, the present invention will be described in detail with reference to the drawings. First
The figure shows a partial sectional view of an example of the magnetic recording medium of the present invention.
As shown in FIG. 1, the magnetic recording medium of the present invention includes a magnetic recording layer 3 and a protective layer 4 for protecting the magnetic recording layer on the substrate 1 covered with the specific magnetic underlayer 2. The substrate 1 may be made of, for example, a ceramic such as an aluminum alloy, a silicon nitride sintered body, or an aluminum oxide sintered body coated with a nickel-phosphorous plating film or an anodized alumite film, or a metal such as stainless steel or a titanium alloy, or a glass. it can. The substrate is textured in the circumferential direction so that the average surface roughness (Ra) of the substrate is 8 to 12 nm. Here, when the average surface roughness (Ra) of the substrate is less than 8 nm, a signal from the obtained magnetic recording medium cannot be obtained with a high output, and
When the value exceeds, the medium noise of the obtained magnetic recording medium increases, and the SN ratio decreases. The substrate 1 is covered with a non-magnetic underlayer 2. The non-magnetic underlayer 2 can be made of a non-magnetic metal thin film such as chromium. The thickness of the nonmagnetic underlayer 2 is determined as appropriate, but is preferably about 500 to 5000 °. Then composition formula on the nonmagnetic underlayer 2, a Co 1-xy Cr x Ta y 0.05 ≦ x ≦ 0.2 0.005 ≦ y ≦ 0.1 magnetic recording layer 3 composed of a CoCrTa alloy film represented by 300 It is formed with a thickness of about 1000 mm. Here, when the composition of the magnetic recording layer is represented by the above composition formula, the coercive force and the SN ratio of the magnetic recording medium of the present invention are high. The magnetic recording medium of the present invention includes a protective layer 4 for protecting the magnetic recording layer 3, and this protective layer can be made of, for example, carbon or the like, and has a thickness of 100 to 400.
Å is preferred. Further, when using the magnetic recording medium of the present invention, a liquid lubricant, a solid lubricant or a composite lubricant of these may be applied as necessary to form the lubricating layer 5 before use.

以上、非磁性下地層2から保護層4までの金属あるい
は無機物質の薄膜の形成にあたっては、DCあるいはRFス
パッタリング法または真空蒸着法などの真空成膜技術が
有効に用いられる。
As described above, in forming a thin film of a metal or an inorganic substance from the nonmagnetic underlayer 2 to the protective layer 4, a vacuum film forming technique such as DC or RF sputtering or vacuum evaporation is effectively used.

本発明の磁気記録媒体は上述の構成を有することによ
り、高出力を得ながらにして、媒体ノイズを低くおさえ
ることができ、これにより高記録密度に適した、優れた
SN比を有する磁気記録媒体となるが、その理由は磁気記
録層の基板に対する円周方向と半径方向との磁気特性に
バランスのとれた異方性が生じることに起因するものと
考えられる。すなわち、本発明の磁気記録媒体におい
て、磁気記録媒体の円周方向に外部磁界を引加して測定
したときの保磁力角形比(S*c)と、半径方向に外部
磁界を印加して測定したときの保磁力角形比(S*r)
との比(S*c/S*r)はほぼ1.05〜1.25とバランスの
とれた異方性を示す。
Since the magnetic recording medium of the present invention has the above-described configuration, the medium noise can be suppressed while obtaining a high output, and thus, an excellent, suitable for high recording density can be obtained.
The magnetic recording medium having the SN ratio is considered to be due to the occurrence of balanced anisotropy in the magnetic properties of the magnetic recording layer with respect to the substrate in the circumferential direction and the radial direction. That is, in the magnetic recording medium of the present invention, the coercive force squareness ratio (S * c) measured by applying an external magnetic field in the circumferential direction of the magnetic recording medium and the measurement by applying the external magnetic field in the radial direction. Coercive force squareness ratio (S * r)
The ratio (S * c / S * r) is approximately 1.05 to 1.25, indicating a well-balanced anisotropy.

(実施例) 以下、本発明の実施例について説明するが、本発明は
これら実施例に限定されるものではない。
(Examples) Hereinafter, examples of the present invention will be described, but the present invention is not limited to these examples.

実施例1 第1図に示す断面構造を有する磁気記録媒体を作製し
た。基板1としてニッケル−リンメッキ膜を被覆した円
板状のアルミニウム合金の表面を鏡面研磨した後、平均
表面粗さ(Ra)が10nmとなるように、円周方向にテクス
チャリングを施したものを用いた。はじめにこの基板1
上にDCスパッタリング法により、3000Åのクロム膜から
なる非磁性下地層2を形成し、その上に磁気記録層3と
してクロムを12原子%、タンタルを2原子%含むコバル
ト−クロム−タンタル合金膜をDCスパッタリング法によ
り600Åの厚みで形成した。更にこの上に、保護層4と
して炭素膜をDCスパッタリング法により300Å形成し、
その上に潤滑層5として液体潤滑剤をディッピング法に
より形成して磁気記録媒体を作製した。
Example 1 A magnetic recording medium having a sectional structure shown in FIG. 1 was produced. For the substrate 1, a disk-shaped aluminum alloy coated with a nickel-phosphorus plating film is mirror-polished, and then textured in the circumferential direction so that the average surface roughness (Ra) is 10 nm. Was. First, this board 1
A nonmagnetic underlayer 2 made of a chromium film of 3000 ° is formed thereon by a DC sputtering method, and a cobalt-chromium-tantalum alloy film containing chromium of 12 atom% and tantalum of 2 atom% is formed thereon as a magnetic recording layer 3. It was formed to a thickness of 600 mm by DC sputtering. Further, a carbon film was formed thereon as a protective layer 4 by DC sputtering to a thickness of 300 mm.
A liquid lubricant was formed thereon as a lubricating layer 5 by a dipping method to produce a magnetic recording medium.

その後、以上のように得られた磁気ディスクの磁気特
性と電磁変換特性を測定した。磁気特性は振動試料型磁
力計(VSM)、電磁変換特性はサ−ティファイヤ−を用
いて表1の条件で測定した。測定結果を表2に示す。
Thereafter, the magnetic characteristics and electromagnetic conversion characteristics of the magnetic disk obtained as described above were measured. The magnetic characteristics were measured using a vibration sample magnetometer (VSM), and the electromagnetic conversion characteristics were measured using a certifier under the conditions shown in Table 1. Table 2 shows the measurement results.

表1 測定半径 30.5mm 回転数 2400rpm 1F周波数 1.25MHz 2F周波数 5.00MHz ヘッド トラック幅 20μm ギャップ長 0.6μm 浮上量 0.20μm 比較例1 磁気記録層3として、ニッケルを20原子%、クロムを
10原子%含むコバルト−ニッケル−クロム合金膜を用い
た以外は、実施例と同様の方法で磁気記録媒体を作製
し、その磁気特性及び電磁変換特性を測定した。その測
定結果を表2に示す。得られた磁気記録媒体は媒体ノイ
ズが大きく、SN比の低いものであった。
Table 1 Measurement radius 30.5mm Rotation speed 2400rpm 1F frequency 1.25MHz 2F frequency 5.00MHz Head Track width 20μm Gap length 0.6μm Flying height 0.20μm Comparative example 1 As the magnetic recording layer 3, nickel was 20 atom% and chromium was
A magnetic recording medium was manufactured in the same manner as in the example except that a cobalt-nickel-chromium alloy film containing 10 atomic% was used, and its magnetic characteristics and electromagnetic conversion characteristics were measured. Table 2 shows the measurement results. The obtained magnetic recording medium had a large medium noise and a low SN ratio.

比較例2 基板1として、テクスチャリングを施していない鏡面
基板を用いた以外は、実施例と同様の方法で磁気記録媒
体を作製し、その磁気特性及び電磁変換特性を測定し
た。その測定結果を表2に示す。得られた磁気記録媒体
は出力、SN比とも低いものであった。
Comparative Example 2 A magnetic recording medium was manufactured in the same manner as in the example, except that a mirror-finished substrate without texturing was used as the substrate 1, and its magnetic characteristics and electromagnetic conversion characteristics were measured. Table 2 shows the measurement results. The obtained magnetic recording medium had low output and SN ratio.

比較例3 基板1として、平均表面粗さ(Ra)が20nmとなるよう
にテクスチャリングを施した基板を用いた以外は実施例
と同様の方法で磁気記録媒体を作製し、その磁気特性及
び電磁変換特性を測定した。その測定結果を表2に示
す。得られた磁気記録媒体は媒体ノイズが大きく、SN比
の低いものであった。
Comparative Example 3 A magnetic recording medium was prepared in the same manner as in Example 1, except that a substrate subjected to texturing so that the average surface roughness (Ra) was 20 nm was used as the substrate 1. The conversion characteristics were measured. Table 2 shows the measurement results. The obtained magnetic recording medium had a large medium noise and a low SN ratio.

Hc:保磁力 Mr*t:残留磁化と磁気記録層の厚みの積 S :角形比 S* :保磁力角形比 S*c:磁気記録媒体の円周方向に外部磁界を引加して
測定したときの保持力角形比 S*r:磁気記録媒体の半径方向に外部磁界を引加して
測定したときの保持力角形比 Res:2F出力/1F出力 本発明の磁気記録媒体は高記録密度領域において、高
出力を得ながらにしてノイズの増加を抑えることがで
き、その結果優れたSN比を得ることができるものである
ことがわかる。
Hc: Coercive force Mr * t: Product of residual magnetization and thickness of magnetic recording layer S: Square ratio S *: Coercive force square ratio S * c: Measured by applying an external magnetic field in the circumferential direction of the magnetic recording medium S * r: Coercive force squareness ratio measured when an external magnetic field is applied in the radial direction of the magnetic recording medium. Res: 2F output / 1F output. The magnetic recording medium of the present invention has a high recording density area. It can be seen that the increase in noise can be suppressed while obtaining a high output, and as a result, an excellent SN ratio can be obtained.

(発明の効果) 以上述べたとおり、本発明の磁気記録媒体は高記録密
度に適し、優れた出力及びSN比を有するものとなる。
(Effects of the Invention) As described above, the magnetic recording medium of the present invention is suitable for high recording density and has excellent output and SN ratio.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明の磁気記録媒体の一例の部分断面を示す
図である。 図中、 1……基板、2……非磁性下地層 3……磁気記録層、4……保護層 5……潤滑層 を各々示す。
FIG. 1 is a diagram showing a partial cross section of an example of the magnetic recording medium of the present invention. In the figure, 1... Substrate, 2... Non-magnetic underlayer 3... Magnetic recording layer, 4... Protective layer 5.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平1−303601(JP,A) 特開 平1−133217(JP,A) 特開 平2−154323(JP,A) 特開 昭62−60119(JP,A) 特開 平2−273315(JP,A) 特開 平3−125325(JP,A) 特開 昭61−202324(JP,A) (58)調査した分野(Int.Cl.7,DB名) G11B 5/64 ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-1-303601 (JP, A) JP-A-1-133217 (JP, A) JP-A-2-154323 (JP, A) JP-A-62-162 60119 (JP, A) JP-A-2-273315 (JP, A) JP-A-3-125325 (JP, A) JP-A-61-202324 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) G11B 5/64

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】基板と、該基板上に設けたクロム膜からな
る非磁性下地層、該非磁性下地層上部に設けた磁気記録
層及び該磁気記録層を保護するためのカーボン膜からな
る保護層を含んでなる磁気記録媒体において、上記磁気
記録層が下記組成式、 Co1-x-yCrxTay 0.05≦x≦0.2 0.005≦y≦0.1 で示される合金薄膜からなり、上記基板上にその円周方
向に同心円状の傷を施し、該基板の平均表面粗さ(Ra)
が8〜12nmであることを特徴とする磁気記録媒体。
A non-magnetic underlayer made of a chromium film provided on the substrate; a magnetic recording layer provided on the nonmagnetic underlayer; and a protective layer made of a carbon film for protecting the magnetic recording layer. in the magnetic recording medium comprising the above magnetic recording layer the following composition formula, Co 1-xy Cr x Ta y an alloy thin film represented by 0.05 ≦ x ≦ 0.2 0.005 ≦ y ≦ 0.1, the circle on the substrate The concentric scratches are made in the circumferential direction, and the average surface roughness (Ra) of the substrate
Is 8 to 12 nm.
JP2322356A 1990-11-28 1990-11-28 Magnetic recording media Expired - Lifetime JP3044571B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2322356A JP3044571B2 (en) 1990-11-28 1990-11-28 Magnetic recording media

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2322356A JP3044571B2 (en) 1990-11-28 1990-11-28 Magnetic recording media

Publications (2)

Publication Number Publication Date
JPH04195818A JPH04195818A (en) 1992-07-15
JP3044571B2 true JP3044571B2 (en) 2000-05-22

Family

ID=18142730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2322356A Expired - Lifetime JP3044571B2 (en) 1990-11-28 1990-11-28 Magnetic recording media

Country Status (1)

Country Link
JP (1) JP3044571B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0148842B1 (en) * 1993-07-22 1998-10-15 가나이 쯔또무 Magnetic recording medium, process for producing the same and magnetic recording system

Also Published As

Publication number Publication date
JPH04195818A (en) 1992-07-15

Similar Documents

Publication Publication Date Title
JPH087250A (en) Magnetic recording medium and magnetic storage device using the same
JP3044571B2 (en) Magnetic recording media
JP3588039B2 (en) Magnetic recording medium and magnetic recording / reproducing device
JP3359706B2 (en) Magnetic recording media
JP3625865B2 (en) Magnetic recording medium and magnetic recording / reproducing apparatus
JP3030990B2 (en) Magnetic recording media
US4939045A (en) Magnetic recording medium
JP2814630B2 (en) Magnetic recording media
JP2952967B2 (en) Magnetic recording media
JP2906480B2 (en) Magnetic recording medium
JP2650282B2 (en) Magnetic recording media
JP3204548B2 (en) In-plane magnetic storage medium and method of manufacturing the same
JP2527616B2 (en) Metal thin film magnetic recording medium
JPH11250438A (en) Magnetic recording medium, method of manufacturing magnetic recording medium, and magnetic recording device
JP3066847B2 (en) Magnetic recording media
JP2802017B2 (en) Metal thin-film magnetic recording media
JP2792118B2 (en) Manufacturing method of magnetic recording medium
JPH05109045A (en) Magnetic recording medium
JPH0969440A (en) Magnetic recording medium and magnetic recording / reproducing apparatus
JPH0554358A (en) Magnetic recording medium
JP3204655B2 (en) Magnetic disk storage
JPH01237925A (en) Magnetic recording medium
Onishi et al. Substrate effects on the magnetic characteristics of sputtered media
JPH0334122A (en) Magnetic recording medium and production thereof
JPH02121116A (en) Magnetic recording medium