JP3094738B2 - Manufacturing method of end face type thermal head - Google Patents
Manufacturing method of end face type thermal headInfo
- Publication number
- JP3094738B2 JP3094738B2 JP13449293A JP13449293A JP3094738B2 JP 3094738 B2 JP3094738 B2 JP 3094738B2 JP 13449293 A JP13449293 A JP 13449293A JP 13449293 A JP13449293 A JP 13449293A JP 3094738 B2 JP3094738 B2 JP 3094738B2
- Authority
- JP
- Japan
- Prior art keywords
- face
- forming
- image signal
- protective film
- protection film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【0001】[0001]
【産業上の利用分野】本発明は、発熱体が基板の端面に
設けられた端面型サーマルヘッドの製造方法に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an end face type thermal head in which a heating element is provided on an end face of a substrate.
【0002】[0002]
【従来の技術】従来、多く用いられるサーマルヘッドの
一つとして、発熱体が基板の端面に設けられた端面型サ
ーマルヘッドがある。この端面型サーマルヘッドにはサ
ーマルヘッドが感熱紙と摺動しながら印字をする際に、
発熱体および電極の紙面との摩耗を防止する働きのある
耐摩耗保護膜が発熱体の周辺部に設置されている。例え
ば、この種のサーマルヘッドとしては特開昭60−19
558号公報に示されるようなものが一般的であった。
近年、この端面型サーマルヘッドの製造過程において、
耐摩耗保護膜を形成する際の発熱体および電極の表面処
理におけるグレーズ層のエッチング防止が強く求められ
ている。2. Description of the Related Art Conventionally, as one of the thermal heads often used, there is an end face type thermal head in which a heating element is provided on an end face of a substrate. When printing with the thermal head sliding on the thermal paper,
An abrasion-resistant protective film that functions to prevent the heating element and the electrodes from abrading the paper surface is provided around the heating element. For example, a thermal head of this type is disclosed in
What was shown in Unexamined-Japanese-Patent No. 558 was common.
In recent years, in the manufacturing process of this end face type thermal head,
There is a strong demand for preventing the glaze layer from being etched in the surface treatment of the heating element and the electrode when forming the wear-resistant protective film.
【0003】以下、従来の端面型サーマルヘッドの製造
方法について図面を参照しながら説明する。図3は従来
の端面型サーマルヘッドを示す斜視図である。図3に示
すように、端面型サーマルヘッドは一端面11aと主平
面11b,11cを持つ板状のグレーズドアルミナ基板
11と、ガラス等からなるグレーズ11dと、発熱体1
2と、電極13である画信号用電極取り出し部17を備
えた画信号用電極13aと共通リード取り出し部18を
備えた共通電極13bと、耐摩耗保護膜14と、電極コ
ート15と、半導体の端子とを接続する接続層16とか
らなり、まずアルミナなどからなる板状のグレーズドア
ルミナ基板11の一端面11aから一方側の主平面11
bにかけてガラス等からなるグレーズ層11dを形成
し、次にグレーズドアルミナ基板11の一端面11a上
のグレーズ層11dの一部にグレーズエッチ防止膜を形
成しつつ発熱体2を複数個列状に形成し、そしてグレー
ズドアルミナ基板11の一端面11aから一方側の主平
面11bにかけて画信号用電極13aを、一端面11a
から他方側の主平面11cにかけて共通電極13bを形
成し、その後耐摩耗保護膜14を密着形成するために発
熱体12および電極13の表面処理(酸化膜処理)をH
F(フッ化水素)を含んだ処理液を用いて行い、一端面
11aから両主平面11b,11cにかけて耐摩耗保護
膜14を形成し、最後に微細なパターン電極の傷による
断線あるいは金属粉によるショートを防ぐ電極コート1
5と、画信号用電極取り出し部17を被覆するように発
熱体12を駆動する半導体の端子とを接続する接続層1
6とを形成した構成である。Hereinafter, a method of manufacturing a conventional end face type thermal head will be described with reference to the drawings. FIG. 3 is a perspective view showing a conventional end face type thermal head. As shown in FIG. 3, the end-face type thermal head comprises a plate-like glazed alumina substrate 11 having one end face 11a and main planes 11b and 11c, a glaze 11d made of glass or the like, and a heating element 1
2, a common electrode 13b provided with an image signal electrode 13a provided with an image signal electrode lead-out part 17 as the electrode 13, a common lead lead-out part 18, a wear-resistant protective film 14, an electrode coat 15, and a semiconductor A connection layer 16 for connecting terminals is formed. First, from one end face 11a of a plate-shaped glazed alumina substrate 11 made of alumina or the like, a main plane 11 on one side is formed.
b, a glaze layer 11d made of glass or the like is formed, and then a plurality of heating elements 2 are formed in a row while forming a glaze etch prevention film on a part of the glaze layer 11d on one end face 11a of the glazed alumina substrate 11. The image signal electrode 13a extends from one end face 11a of the glazed alumina substrate 11 to one main plane 11b.
To the main plane 11c on the other side, and then the surface treatment (oxide film treatment) of the heating element 12 and the electrode 13 is performed in order to form the abrasion-resistant protective film 14 in close contact.
This is performed using a processing solution containing F (hydrogen fluoride), and an abrasion-resistant protective film 14 is formed from one end face 11a to both main planes 11b and 11c. Electrode coat 1 to prevent short circuit
5 and a connection layer 1 for connecting a semiconductor terminal that drives the heating element 12 so as to cover the image signal electrode lead-out portion 17.
6 is formed.
【0004】[0004]
【発明が解決しようとする課題】しかしながら、従来の
端面型サーマルヘッドの製造方法では耐摩耗保護膜14
の形成前の発熱体12と電極13との表面処理(酸化膜
処理)において、グレーズドアルミナ基板11の主平面
11bと画信号用電極13aとに挟まれるグレーズ層1
1dがHF(フッ化水素)を含んだ処理液によって約4
00nm程度エッチングされており、この結果画信号用
電極13aと発熱体12を駆動する半導体の端子とを接
続する接続層16の下側面のグレーズ層11dもエッチ
ングされ、画信号用電極13aの画信号用電極取り出し
部17と半導体の端子との接続における接続層16がグ
レーズ層11dの面に対して不安定となり接続力を弱め
るので、接続層16の接続に対する信頼性低下という問
題点を有していた。However, in the conventional method of manufacturing an end face type thermal head, the wear-resistant protective film 14 is not used.
In the surface treatment (oxide film treatment) of the heating element 12 and the electrode 13 before the formation, the glaze layer 1 sandwiched between the main plane 11b of the glazed alumina substrate 11 and the image signal electrode 13a is formed.
1d is about 4 by treatment solution containing HF (hydrogen fluoride).
The glaze layer 11d on the lower surface of the connection layer 16 that connects the image signal electrode 13a and the semiconductor terminal that drives the heating element 12 is also etched, and the image signal of the image signal electrode 13a is etched. Since the connection layer 16 in the connection between the electrode extraction portion 17 and the semiconductor terminal becomes unstable with respect to the surface of the glaze layer 11d and weakens the connection force, there is a problem that the reliability of the connection of the connection layer 16 is reduced. Was.
【0005】本発明は上記問題点を解決するもので、耐
摩耗保護膜の形成前の表面処理によるグレーズ層のエッ
チングを防止する端面型サーマルヘッドの製造方法を提
供するものである。The present invention solves the above problems and provides a method of manufacturing an end face type thermal head which prevents etching of a glaze layer by surface treatment before forming a wear-resistant protective film.
【0006】[0006]
【課題を解決するための手段】上記目的を達成するため
に本発明は、2つの端面と2つの主平面を有する板状の
絶縁性基板の一端面に複数の発熱体を列状に形成する第
1工程と、前記一端面上から一方の一主平面上に沿って
画信号用電極、前記一端面上から他方の一主平面上に沿
って共通電極を形成する第2工程と、前記一端面に形成
された発熱体および画信号用電極の一部、共通電極の一
部である耐摩耗保護膜用の表面部を表面処理する第3工
程と、表面処理された前記表面部に耐摩耗保護膜を被覆
形成する第4工程と、前記画信号用電極上に接続層を形
成する第5工程と、前記共通電極上に共通リード取り出
し層を形成する第6工程において、前記第2工程と前記
第3工程との間に前記絶縁性基板の2つの端面と2つの
主平面の内、発熱体側の前記一端面を除いて少なくとも
前記画信号用電極側の主平面を被覆するように表面保護
膜を形成する表面保護膜形成工程と、前記第3工程と前
記第4工程との間に前記表面保護膜を除去する表面保護
膜除去工程とを有する構成である。According to the present invention, a plurality of heating elements are formed in a row on one end face of a plate-like insulating substrate having two end faces and two main planes. A first step, and a second step of forming an image signal electrode along one main plane from the one end face and a common electrode along the other main plane from the one end face; A third step of surface-treating a part of the heating element and the image signal electrode formed on the end face, and a surface part for the wear-resistant protective film which is a part of the common electrode; A fourth step of forming a protective film by coating; a fifth step of forming a connection layer on the image signal electrode; and a sixth step of forming a common lead extraction layer on the common electrode. Heat is generated between two end faces and two main planes of the insulating substrate during the third step. A surface protection film forming step of forming a surface protection film so as to cover at least the main plane on the image signal electrode side except for the one end face on the side, and between the third step and the fourth step. And a surface protective film removing step of removing the surface protective film.
【0007】[0007]
【作用】上記構成により、耐摩耗保護膜の形成前の表面
処理において、接続層を形成する主平面上の画信号用電
極取り出し部を表面保護膜が被覆するので、画信号用電
極取り出し部の下側面のグレーズ層を表面処理用の処理
液より保護することができ、耐摩耗保護膜の形成前の表
面処理によるグレーズ層のグレーズエッチを防止し、接
続層の接続に対する信頼性の向上を図ることができるも
のである。With the above structure, in the surface treatment before the formation of the wear-resistant protective film, the image signal electrode take-out portion on the main plane on which the connection layer is formed is covered with the surface protective film. The glaze layer on the lower surface can be protected from the processing solution for surface treatment, preventing glaze etching of the glaze layer due to surface treatment before the formation of the wear-resistant protective film, and improving the reliability of connection of the connection layer. Is what you can do.
【0008】[0008]
【実施例】以下、本発明の第1の実施例について図面を
参照しながら説明する。図1は本実施例における表面保
護膜の形成時を示す断面図である。端面型サーマルヘッ
ドの概略は従来例と同等なので省略する。図1に示すよ
うに、端面型サーマルヘッドの製造方法は、第1にアル
ミナなどからなる板状のグレーズドアルミナ基板1の一
端面1aから一方側の主平面1bにかけてガラス等から
なるグレーズ層1dを形成し、第2にグレーズドアルミ
ナ基板1の一端面1a上のグレーズ層1dの一部にグレ
ーズエッチ防止膜を形成しつつ発熱体2を複数個列状に
形成し、第3にグレーズドアルミナ基板1の一端面1a
から一方側の主平面1bにかけて画信号用電極3を、一
端面1aから他方側の主平面1cにかけて共通電極4を
形成し、第4に画信号用電極3側の主平面1b上にレジ
スト等により表面保護膜5を形成して、基板全体を表面
処理液に浸し非保護部表面をHF(フッ化水素)および
酸等により処理し、第5に一端面1aにおける発熱体2
および画信号用電極3、共通電極4の上面に耐摩耗保護
膜6を形成し、第6に表面保護膜5を除去して、第7に
接続層および電極コートを形成する構成である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a cross-sectional view showing a state in which a surface protective film is formed in the present embodiment. The outline of the end-face type thermal head is the same as that of the conventional example, so that the description is omitted. As shown in FIG. 1, a method of manufacturing an end face type thermal head is as follows. Second, a plurality of heating elements 2 are formed in a row while forming a glaze-etch prevention film on a part of the glaze layer 1d on one end face 1a of the glazed alumina substrate 1. One end face 1a
And the common electrode 4 is formed from the one end face 1a to the other main plane 1c. Fourth, a resist or the like is formed on the main plane 1b on the image signal electrode 3 side. To form a surface protection film 5, and then immerse the entire substrate in a surface treatment solution and treat the surface of the unprotected portion with HF (hydrogen fluoride) and an acid.
In addition, a wear-resistant protective film 6 is formed on the upper surface of the image signal electrode 3 and the common electrode 4, the surface protective film 5 is removed sixth, and a connection layer and an electrode coat are formed seventh.
【0009】上記構成による本発明の端面型サーマルヘ
ッドの製造方法について、以下その特性について説明す
る。耐摩耗保護膜6の形成時における表面処理の際に、
あらかじめ画信号用電極3側の主平面1b上にレジスト
等により表面保護膜5を形成しているので、主平面1b
上のグレーズ層1dが表面処理液によってエッチングさ
れることがないものである。The characteristics of the method of manufacturing the end face type thermal head of the present invention having the above-described structure will be described below. At the time of surface treatment at the time of forming the wear-resistant protective film 6,
Since the surface protection film 5 is formed in advance on the main plane 1b on the image signal electrode 3 side by a resist or the like, the main plane 1b
The upper glaze layer 1d is not etched by the surface treatment liquid.
【0010】このように本実施例によれば、耐摩耗保護
膜の形成時における表面処理の際に、画信号用電極3側
の主平面1b上に表面保護膜が形成されているので接続
層の下側面のグレーズ層を表面処理液によってエッチン
グされることがなく、接続層の接続に対する信頼性を向
上させることができるものである。As described above, according to this embodiment, the surface protection film is formed on the main surface 1b on the image signal electrode 3 side during the surface treatment at the time of forming the wear-resistant protection film. The glaze layer on the lower surface is not etched by the surface treatment liquid, and the reliability of connection of the connection layer can be improved.
【0011】なお、表面保護膜を形成する方法として
は、画信号用電極側の主平面上に表面保護膜を直接印刷
成形する印刷法、あるいは発熱体側の端面を除いた2つ
の主平面と一端面とを保護膜液に浸すことによって基板
の3面に表面保護膜を成形するディップ法あるいは基板
の4面を保護膜液に浸すことによって基板の4面に表面
保護膜を成形しスピン−コーターにより表面保護膜の層
を均一にし、その後発熱体側の端面上の表面保護膜を露
光現像して除去する3面ディップ塗布スピンナー法等を
用いても同様の効果が生じるものである。The surface protection film may be formed by a printing method in which the surface protection film is directly formed on the main surface on the image signal electrode side, or by a method similar to the two main surfaces excluding the end surface on the heating element side. A dip method in which a surface protective film is formed on three surfaces of a substrate by immersing the end surfaces in a protective film solution, or a surface protective film is formed on four surfaces of a substrate by immersing four surfaces of the substrate in a protective film solution. The same effect can be obtained by using a three-sided dip coating spinner method or the like in which a layer of the surface protective film is made uniform and the surface protective film on the end face on the side of the heating element is exposed and developed and removed.
【0012】さらに、表面保護膜はそれを形成する方法
に応じて、画信号用電極側の主平面上だけでなく、図2
に示すように共通電極側の主平面上あるいは基板の発熱
体側とは他端の端面上に同時に形成しても同様の効果が
生じるものである。Further, depending on the method of forming the surface protective film, the surface protective film is not only formed on the main plane on the image signal electrode side, but also in FIG.
As shown in (1), the same effect can be obtained by simultaneously forming on the main plane on the common electrode side or on the end face of the other end of the substrate with the heating element side.
【0013】[0013]
【発明の効果】以上のように本発明の製造方法によれ
ば、耐摩耗保護膜の形成前に少なくとも画信号用電極側
の主平面上に表面保護膜を形成するので、耐摩耗保護膜
形成時における表面処理によって接続層の下側面のグレ
ーズ層のグレーズエッチの発生を防止することができ、
画信号用電極取り出し部と発熱体を駆動する半導体との
接続を強度にし、接続層の接続に対する信頼性を向上さ
せることができる端面型サーマルヘッドの製造方法を提
供できるものである。As described above, according to the manufacturing method of the present invention, before the formation of the wear-resistant protective film, the surface protective film is formed on at least the main plane on the image signal electrode side. By the surface treatment at the time, the occurrence of glaze etching of the glaze layer on the lower surface of the connection layer can be prevented,
An object of the present invention is to provide a method of manufacturing an end face type thermal head capable of enhancing the connection between the image signal electrode extraction portion and the semiconductor for driving the heating element and improving the reliability of connection of the connection layer.
【図1】本発明の一実施例の端面型サーマルヘッドの製
造方法における表面保護膜の形成時を示す断面図FIG. 1 is a cross-sectional view showing a state in which a surface protective film is formed in a method of manufacturing an end surface type thermal head according to one embodiment of the present invention.
【図2】同実施例における表面保護膜の形成時を示す断
面図FIG. 2 is a cross-sectional view showing a state where a surface protective film is formed in the embodiment.
【図3】従来の端面型サーマルヘッドを示す斜視図FIG. 3 is a perspective view showing a conventional end face type thermal head.
1 アルミナ基板 1a 端面 1b,1c 主平面 2 発熱体 3 画信号用電極 4 共通電極 5 表面保護膜 6 耐摩耗保護膜 DESCRIPTION OF SYMBOLS 1 Alumina substrate 1a End surface 1b, 1c Main plane 2 Heating element 3 Image signal electrode 4 Common electrode 5 Surface protective film 6 Wear resistant protective film
───────────────────────────────────────────────────── フロントページの続き (72)発明者 竹ノ内 義人 大阪府門真市大字門真1006番地 松下電 器産業株式会社内 (72)発明者 山本 茂 大阪府門真市大字門真1006番地 松下電 器産業株式会社内 (72)発明者 中西 努 大阪府門真市大字門真1006番地 松下電 器産業株式会社内 (56)参考文献 特開 平2−111566(JP,A) 特開 昭62−149461(JP,A) 特開 昭62−259873(JP,A) (58)調査した分野(Int.Cl.7,DB名) B41J 2/335 ──────────────────────────────────────────────────の Continued on the front page (72) Inventor Yoshito Takenouchi 1006 Kadoma Kadoma, Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd. (72) Inventor Tsutomu Nakanishi 1006 Kazuma Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (56) References JP-A-2-111566 (JP, A) JP-A-62-149461 (JP, A) JP-A-62-259873 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) B41J 2/335
Claims (2)
の絶縁性基板の一端面に複数の発熱体を列状に形成する
第1工程と、前記一端面上から一方の一主平面上に沿っ
て画信号用電極、前記一端面上から他方の一主平面上に
沿って共通電極を形成する第2工程と、前記一端面に形
成された発熱体および画信号用電極の一部、共通電極の
一部である耐摩耗保護膜用の表面部を表面処理する第3
工程と、表面処理された前記表面部に耐摩耗保護膜を被
覆形成する第4工程と、前記画信号用電極上に接続層を
形成する第5工程と、前記共通電極上に共通リード取り
出し層を形成する第6工程において、前記第2工程と前
記第3工程との間に前記絶縁性基板の2つの端面と2つ
の主平面の内、発熱体側の前記一端面を除いて少なくと
も前記画信号用電極側の主平面を被覆するように表面保
護膜を形成する表面保護膜形成工程と、前記第3工程と
前記第4工程との間に前記表面保護膜を除去する表面保
護膜除去工程とを有する端面型サーマルヘッドの製造方
法。1. A first step of forming a plurality of heating elements in a row on one end surface of a plate-shaped insulating substrate having two end surfaces and two main planes, and one main plane from the one end surface A second step of forming an image signal electrode along the top, a common electrode from the one end face to the other main plane, and a part of the heating element and the image signal electrode formed on the one end face Third, a surface treatment for a wear-resistant protective film surface part which is a part of the common electrode.
A fourth step of forming a wear-resistant protective film on the surface-treated surface, a fifth step of forming a connection layer on the image signal electrode, and a common lead extraction layer on the common electrode. In the sixth step of forming the image signal, between the second step and the third step, at least the image signal except for the one end face on the heating element side of the two end faces and the two main planes of the insulating substrate. A surface protection film forming step of forming a surface protection film so as to cover the main surface on the side of the electrode for use, and a surface protection film removing step of removing the surface protection film between the third step and the fourth step. A method for manufacturing an end face type thermal head having:
も画信号用電極側の主平面と発熱体側の端面とを被覆す
るように表面保護膜を形成し、その後発熱体側の端面上
の表面保護膜を除去する工程を第2工程と第3工程との
間に有する請求項1記載の端面型サーマルヘッドの製造
方法。2. A surface protection film is formed so as to cover at least the main surface on the image signal electrode side and the end face on the heating element side instead of the step of forming the surface protection film, and thereafter the surface protection film on the end face on the heating element side is formed. 2. The method according to claim 1, further comprising the step of removing the film between the second step and the third step.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13449293A JP3094738B2 (en) | 1993-06-04 | 1993-06-04 | Manufacturing method of end face type thermal head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13449293A JP3094738B2 (en) | 1993-06-04 | 1993-06-04 | Manufacturing method of end face type thermal head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06344585A JPH06344585A (en) | 1994-12-20 |
| JP3094738B2 true JP3094738B2 (en) | 2000-10-03 |
Family
ID=15129592
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13449293A Expired - Fee Related JP3094738B2 (en) | 1993-06-04 | 1993-06-04 | Manufacturing method of end face type thermal head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3094738B2 (en) |
-
1993
- 1993-06-04 JP JP13449293A patent/JP3094738B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06344585A (en) | 1994-12-20 |
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|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |