JP3099985B2 - Synchrotron radiation generator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a synchrotron radiation generator,
In particular, the electron beam emitted from the electron beam generator is sent to a plurality of electron storage rings via a branching electromagnet arranged in a beam transport unit that transports the electron beam, and the radiation light is emitted along with the acceleration of the electron beam in these electron storage rings. The present invention relates to a synchrotron radiation generating device that generates light.

[0002]

2. Description of the Related Art Synchrotron radiation (so-called SOR light) has recently attracted attention as a powerful X-ray source for X-ray lithography for the production of VLSI.

FIG. 19 shows a conventional synchrotron radiation generator SO
3 shows an R optical device. In FIG. 19, reference numeral 1 denotes an electron beam generator, and an electron beam emitted from the electron beam generator 1 passes through a plurality of branching electromagnets 11 arranged in the beam transport unit 2 to each of the branching electromagnets 11. The electron beam is guided to the electron storage ring 3 corresponding to, and is circulated on the beam orbit 8 by the deflecting magnet 6 placed on the vacuum duct 7.

Reference numeral 4 denotes a beam line for passing the SOR light 9, reference numeral 5 denotes a radiation light monitor for monitoring the intensity of the SOR light 9, reference numeral 12 denotes a beam current monitor for monitoring the intensity of the electron beam, and reference numeral Reference numeral 10 denotes a high-frequency accelerating cavity for accelerating electrons, and reference numeral 13 denotes control means for controlling the amount of additional incident current added to the electron storage ring 3.

[0005] In order for the radiation light generating device configured as described above to be applicable to the manufacture of semiconductor devices, it must be able to obtain SOR light having a temporally stable intensity.

Conventionally, in order to obtain stable SOR light, as disclosed in Japanese Patent Application Laid-Open No. 62-128500, the intensity of the SOR radiation light or the intensity of the electron beam of each electron storage ring 3 is measured. The measurement result is monitored by the monitor 5 or the beam current monitor 12, and the measured result is compared with a predetermined set value to add the electron storage ring 3 to the electron storage ring 3 by the control means 13 so that the intensity of the emitted light becomes constant. The amount of incident current was controlled.

The control means 13 controls the branching electromagnet 11 according to the result of the radiation monitor 5 of the electron storage ring 3 and the like to selectively form an additional injection current injection path, and maintain a constant intensity. Was made by injecting additional incident current. Injection of the additional incident current into each electron storage ring 13 is generally performed a plurality of times, as shown in FIG.

[0008]

As described above, conventionally, an additional incident current having a constant intensity has been injected. Then, in the injection of the additional incident current, the amount of the additional incident current could not be changed for each injection. That is, there is no special means for independently controlling the amount of additional incident current every time the additional incident current is injected. And, for example, FIG.
As shown in (a), injection a, injection b... Are performed a plurality of times with a constant intensity current amount, and the control of the additional incident current amount is controlled only by the injection time for repeated injection. Here, the time required for one injection is the incident time t3-t2 in FIG.

For this reason, when it is necessary to additionally enter a large number of electron storage rings 3, t3-
Since only t2 is required, the maximum number of connectable electron storage rings is limited. In particular, when the beam life is short, one incident time t3-t2 is longer, so that
Large restrictions are imposed on the maximum number of electron storage rings 3 that can be connected.

Further, only a certain electron storage ring performs a beam withering operation or the like, so that a large current is required at the time of incidence, while the other electron storage ring 3 is in a steady operation and requires a normal additional current. In such a case, the amount of additional incident current cannot be controlled independently for each injection injection, so that a large current cannot be applied only to the electron storage ring for performing beam withering operation or the like. For this reason, there is a limit in increasing the amount of injection incident current, and there is a problem that a long time is required for the beam withering operation and the like. This has been a problem in mass production rings that require a short startup time.

An object of the present invention is to solve the above-mentioned problems of the prior art, and to provide a large number of electron storage rings with a constant intensity of radiated light and capable of shortening the startup time of each electron storage ring. An object of the present invention is to provide a synchrotron radiation generator.

[0012]

In order to achieve the above-mentioned object, the present invention provides a plurality of electron storages via a branching electromagnet disposed in a beam transport section for transporting an electron beam emitted from an electron beam generator. In the synchrotron radiation generating apparatus that generates light in accordance with the acceleration of the electron beam in these electron storage rings, a quantity related to the intensity of the radiant light generated in each of the electron storage rings is detected, and a predetermined set value and Control means for controlling the intensity of the emitted light so as to be constant, and the control means controls the amount of excitation of the incident bump electromagnet or the timing of the incident bump electromagnet of each of the electron storage rings. The amount of additional incident current added to the electron storage ring is controlled.

The control means controls the amount of excitation or the excitation timing of the bump electromagnet for incidence of the electron synchrotron, controls the amount of electron beam current emitted from the electron synchrotron, and adds the additional incident current to the electron storage ring. The amount is controlled.

The control means controls the frequency of the high frequency applied to the RF knockout electrode disposed in the electron synchrotron, the high frequency application time or the high frequency applied voltage, and controls the number of charges in the electron synchrotron ring to control the electron synchrotron. The amount of additional incident current added to the storage ring is controlled.

The control means controls the power supplied to the high-frequency accelerating cavity disposed in the electron synchrotron and controls the number of charges in the electron synchrotron ring by changing the height of the RF bucket, thereby controlling the number of charges in the electron synchrotron ring. It is characterized in that the amount of additional incident current to be added to is controlled.

Further, the control means controls an applied voltage time width applied to the grid pulser of the electron gun of the electronic linac to control an additional incident current amount added to the electron storage ring.

Further, the control means controls the excitation time width of the emission kicker magnet of the electron synchrotron to control the amount of additional incident current added to the electron storage ring.

Further, the control means controls an excitation time width or an excitation timing for exciting the branching electromagnet to control an additional incident current amount added to the electron storage ring.

Further, the control means controls a driving device for opening and closing the slit provided in the beam transport unit to control the amount of additional incident current added to the electron storage ring.

The control means controls the phase of the RF power input to the electron synchrotron or the high-frequency accelerating cavity arranged in the electron storage ring to control the phase difference between the RF power of the electron synchrotron and the RF power of the electron storage ring. And controlling the amount of additional incident current added to the electron storage ring.

[0021]

The control means of the synchrotron radiation generator configured as described above can independently control the amount of additional incident current additionally injected into the electron storage ring for each incident. A quantity related to the intensity of the emitted light is detected and compared with a predetermined set value, so that the intensity of the emitted light of each electron storage ring can be controlled to be constant.

For example, even if the current amount of the electron storage ring suddenly decreases as shown at t4 in FIG. 20 (b), the incident current to the ring can be controlled as needed, so that the storage current can be quickly increased. The amount can be returned. Conventionally, even in the case of the steady operation, as shown in FIG. 20 (a), additional injection takes a time of t3-t2, but in the present invention, the amount of additional incident charge required in advance is controlled by the control means. Therefore, a predetermined current can be obtained by one additional incidence, so that the incidence time can be shortened. Therefore, it is possible to drive a large number of electron storage rings.

Further, the amount of incident current to a certain electron storage ring can be adjusted appropriately even when a large current is required at the time of incidence due to beam withdrawal operation or when another ring is in a steady operation. Therefore, the ring can be quickly started.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a radiation light generating apparatus according to the present invention will be described below with reference to FIGS. Note that the same members as those of the conventional synchrotron radiation generator shown in FIG.

A first embodiment of the present invention will be described with reference to FIGS. In FIG. 1, an electron beam emitted from an electron beam generator 1 is guided to an electron storage ring 3 corresponding to each branching electromagnet 11 through a plurality of branching electromagnets 11 arranged in a beam transport unit 2. The orbital motion on the beam orbit 8 is performed by the deflection magnet 6 placed on the vacuum duct 7.

SOR generated in each electron storage ring 3
Part of the light 9 passes through the beam line 4, and the intensity of the emitted light is detected by the emitted light monitor 5. The intensity of the electron beam in each electron storage ring 3 is measured by the beam current monitor 1.
2 detected. The electron beam in the electron storage ring 3 is accelerated by the high-frequency acceleration cavity 10.

The amount of radiated light or the amount of current measured by the radiated light monitor 5 or the current monitor 12 is
3 detects a difference from a preset value, and controls the amount of additional incident current added to the electron storage ring 3 by the control means 13 so as to reduce the difference. Specifically, the control means 13 controls the amount of excitation of the incident bump electromagnets 17a and 17b of the electron storage ring 3, or the timing of the injection time of the additional incident current to be added. This makes it possible to change the number of rotations of the electron beam injected into the electron storage ring 3 during multiple rotation incidence, that is, the amount of additional incident current.

The operation of this embodiment will be described with reference to FIG.

FIG. 2A is a schematic view of the incident bump trajectory 19 of the electron storage ring 3. The bump trajectory 19 at the time of incidence is formed by the incident part beta electromagnets 17a and 17b installed on the balanced orbit 8 of the electron storage ring 3. The incident electron beam enters the electron storage ring 3 from the incident deflector 15 and performs so-called betatron oscillation around the incident bump orbit 19.

FIGS. 2B to 2D show phase diagrams at the incident point 16. Each of FIGS. 2B to 2D corresponds to t ₀ , t ₁ , and t ₂ in FIG. 2E. Electron storage ring 3
FIG. 2 (b) is a phase diagram before the additional light is incident on. The stored electron beam is on an equilibrium orbit 8.

FIG. 2C shows a phase diagram at the time of incidence. At this time, since the incident bump electromagnet is excited, the accumulated electron beam moves from the balanced orbit 8 to the incident bump orbit 19. At this time, the incident electron beam 20 is incident from the incident deflector 15. At this time, if the pulse width of the incident electron beam is longer than the time required for the electrons to move around the circumference of the electron storage ring, the incident current for multiple rotations can be incident.

FIG. 2D is a conceptual diagram of a phase diagram immediately after the end of the incidence. At this time, the incident bump magnetic field is t _{2 in} FIG.
, The accumulated beam returns to the equilibrium orbit 8
Is back up. 21 schematically shows the distribution of the additionally incident electron beam in the phase space.

At this time, the number of rotations of the additionally incident electron beam for multi-rotation incidence, that is, the amount of additional incident current, changes depending on the maximum magnetic field B ₀ of the bump electromagnet, the shape of the pulse magnetic field, and the timing between the pulse magnetic field and the incident electron beam. Therefore, by measuring the amount of change in advance, it becomes possible to additionally input a necessary amount of current according to a command from the control means 13 in FIG.

Thereafter, the additional electron beam 20 undergoes a so-called betatron oscillation around the equilibrium orbit 8, but shifts to the equilibrium orbit within a certain time due to radiation attenuation. In the phase diagram, the state returns to the state shown in FIG.

By repeating this operation in response to a command from the control means 13, additional incidence on each electron storage ring is performed sequentially.

By performing this operation for each of the plurality of electron storage rings, the amount of current incident on each electron storage ring can be controlled for each additional injection into each electron storage ring. Can be promptly dealt with in the event of a decrease.

Further, even when a large current is required at the time of incidence of a certain electron storage ring during beam withering operation or the like and another electron storage ring is in a steady operation, the amount of current incident on the ring can be adjusted by the control means. The ring can be quickly started up without hindering the operation of another ring.

Next, a second embodiment of the present invention will be described with reference to FIGS.

In the first embodiment, the incident bump electromagnets 17a and 17b of the electron storage ring 3 are controlled, whereas in the present embodiment, the incident bump electromagnets 17a and 17b of the electron linear accelerator (electronic linac) are controlled. Is done.

In FIG. 3, an electron beam accelerated by a pre-accelerator 24 such as an electron linear accelerator (electronic linac) is incident on an electron synchrotron 22 through a beam transport unit 2 by an incident deflector 15.

The difference between the amount of emitted light or the amount of current measured by the emitted light monitor 5 or the current monitor 12 is detected by a control means. By the signal output from the control means 13 according to this difference,
The number of rotations, that is, the amount of current for multi-rotation incidence to the electron synchrotron 22 is changed by controlling the excitation amount or timing of the bump electromagnets 17 a and 17 b for incidence of the electron synchrotron 22, whereby additional incidence to the electron storage ring 3 is performed. Control the current.

FIG. 4A is a schematic diagram of the incident bump trajectory 19 of the electron synchrotron 22. The bump trajectory 19 at the time of incidence is formed by the incident part beta electromagnets 17a and 17b installed on the balanced orbit 8 of the electron synchrotron 22. The incident electron beam enters the electron synchrotron through the incident deflector 15 and performs so-called betatron oscillation around the incident bump orbit 19.

FIGS. 4B to 4D show phase diagrams at the incident point 16. Each of FIGS. 4B to 4D corresponds to FIG.
T ₀ , t ₁ , and t ₂ . FIG. 4B is a phase diagram before the light enters the electron synchrotron.

FIG. 4D shows a phase diagram at the time of incidence. At this time, since the incident bump electromagnet is excited, the center of the phase diagram moves from the balanced orbit 8 to the incident bump orbit 19. At this time, the incident electron beam 20 is incident from the incident deflector 15. At this time, if the pulse width of the incident electron beam is longer than the time for the electrons to rotate around the circumference of the electron synchrotron, the incident current for multiple rotations can be incident.

FIG. 4D is a conceptual diagram of a phase diagram immediately after the end of the incidence. At this time, the incident bump magnetic field is t _{2 in} FIG.
, The center of the phase diagram returns to the equilibrium orbit 8 again. 21 schematically shows the distribution of the incident electron beam on the phase space. At this time, the number of rotations, ie, the amount of current, of the incident electron beam during multiple rotations varies depending on the maximum magnetic field B ₀ of the bump electromagnet, the shape of the pulse magnetic field, and the timing between the pulse magnetic field and the incident electron beam. Therefore, by measuring the amount of change in advance, it becomes possible to inject only a necessary amount of current according to a command from the control means 13 in FIG.

Thereafter, the incident electron beam 21 undergoes so-called betatron oscillation around the equilibrium orbit 8, but shifts to the equilibrium orbit within a certain time due to radiation attenuation. If it says in a phase diagram, it will return to the state of FIG.4 (b).

After controlling the amount of current incident on the electron synchrotron in this way, the electron beam accelerated to a predetermined energy by the high-frequency accelerating cavity 10 emits the electron beam.
3, which is emitted to the beam transport unit 2 and is branched into electromagnets 11
Incident on the electron storage ring.

By repeating this operation in response to a command from the control means 13, additional incidence on each electron storage ring is performed sequentially.

By performing this operation for each of the plurality of electron storage rings, the amount of current incident on each of the electron storage rings can be controlled for each additional incidence, so that the amount of stored current decreases sharply. In case, we can respond quickly.

Further, even when a certain electron storage ring requires a large current at the time of incidence due to beam withering operation or the like and the other electron storage ring is operating in a steady state, the amount of current incident on the ring can be adjusted by the control means. The ring can be quickly started up without hindering the operation of another ring.

Next, a third embodiment of the present invention will be described with reference to FIG.

In FIG. 5, an electron beam accelerated by a pre-accelerator 24 such as an electron linear accelerator (electron linac) is incident on an electron synchrotron 22 via a beam transport unit 2 by an incident deflector 15.

Next, the difference between the amount of radiation or the amount of current measured by the radiation light monitor 5 or the current monitor 12 installed on the electron storage ring 3 is detected by the control means 13. In accordance with the difference, the control means 13 controls the RF knockout electrode 25 of the electron synchrotron 22 to adjust the number of charges in the electron synchrotron, thereby controlling the additional incident current to the electron storage ring 3.

The rate of change in the number of charges by the RF knockout electrode 25 depends on the frequency of the high frequency applied to the knockout electrode, the high frequency application time, or the high frequency applied voltage. Therefore, by measuring the amount of change in advance, it becomes possible to control only a necessary current by a command from the control means 13 in FIG.

After controlling the amount of incident current in this way,
The electron beam accelerated to a predetermined energy by the high-frequency acceleration cavity 10 is emitted to the beam transport unit 2 by the emission deflector 23, and is incident on a desired electron storage ring by the branching electromagnet 11. The control of the charge amount by the RF knockout electrode can be performed during and after acceleration as needed.

By repeating this operation in response to a command from the control means 13, additional incidence on each electron storage ring is performed sequentially.

By performing this operation on each of the plurality of electron storage rings, the amount of current incident on each electron storage ring can be controlled for each additional incidence, so that the amount of stored current decreases sharply. In case, we can respond quickly.

Further, even when a certain electron storage ring requires a large current at the time of incidence due to a beam withering operation or the like and another electron storage ring is in a steady operation, the amount of current incident on the ring can be adjusted by the control means. Therefore, it is possible to quickly start the ring without hindering the operation of another ring.

Next, a fourth embodiment of the present invention will be described with reference to FIG.

The electron beam accelerated by the pre-accelerator 24 such as an electron linear accelerator (electron linac) is incident on the electron synchrotron 22 through the beam transport unit 2 by the incident deflector 15.

Next, the difference between the amount of radiation or the amount of current measured by the radiation monitor 5 or the current monitor 12 installed on the electron storage ring 3 is detected by the control means 13. In accordance with the difference, the control means 13 controls the high-frequency accelerating cavity 10 of the electron synchrotron 22 to adjust the number of charges in the electron synchrotron, thereby controlling an additional incident current to the electron storage ring 3.

The rate of change in the number of charges by the high-frequency acceleration cavity 10 depends on the size of the RF bucket. The size of the RF bucket depends on the high frequency power input to the high frequency acceleration cavity. Therefore, by measuring the amount of change in advance, it becomes possible to control only a necessary current by a command of the control means 13 in FIG.

After controlling the amount of incident current in this way,
The electron beam accelerated to a predetermined energy by the high-frequency accelerating cavity 10 is emitted to the beam transport unit 2 by the emission deflector 23 and is incident on a desired electron storage ring by the branching electromagnet 11. The charge amount can be controlled by the high-frequency accelerating cavity during and after acceleration as needed.

By repeating this operation in response to a command from the control means 13, additional incidence on each electron storage ring is performed sequentially.

By performing this operation for each of the plurality of electron storage rings, it is possible to control the amount of current incident on each electron storage ring for each additional incidence, so that the amount of stored current is sharply reduced. In case, we can respond quickly.

Further, even when a certain electron storage ring requires a large current at the time of incidence due to beam withdrawal operation or the like and another electron storage ring is in a steady operation, the amount of current incident on the ring can be adjusted by the control means. Therefore, it is possible to quickly start the ring without hindering the operation of another ring.

Next, a fifth embodiment of the present invention will be described with reference to FIG.

In FIG. 7, the difference between the amount of radiated light or the amount of current measured by the radiated light monitor 5 or the current monitor 12 installed on the electron storage ring 3 and a value preset by the controller 13 is detected. . The number of electric charges emitted from the electron linear accelerator 24 is adjusted by controlling the time width of application of the electron gun 26 of the electron linear accelerator 24 to the grid pulsar by a signal output from the control means 13 according to this difference. The additional incident current to the storage ring 3 is controlled.

The electron beam accelerated by the electron linear accelerator 24 passes through the beam transport unit 2 and is transmitted to the electron synchrotron 22
Is incident by the incident deflector. Next, the electron beam accelerated to a predetermined energy by the high-frequency acceleration cavity 10 is emitted to the beam transport unit 2 by the emission deflector 23 and is incident on a desired electron storage ring by the branching electromagnet 11.

By repeating this operation in response to a command from the control means 13, additional incidence on each electron storage ring is performed sequentially. By performing this operation for each of the plurality of electron storage rings, the amount of current incident on each of the storage rings can be controlled for each additional incidence. Can respond to.

Further, even when a certain storage ring requires a large current at the time of incidence due to beam withdrawal operation or the like and another storage ring is operating in a steady state, the amount of incident current to the ring can be adjusted by the control system. It is possible to quickly start up the ring without hindering the operation of the ring.

The present invention is not limited to the case where the injector is composed of the electron linear accelerator and the electron synchrotron, but is also applicable to the case where the injector is composed of the electron linear accelerator alone as shown in FIG. is there.

Next, a sixth embodiment of the present invention will be described with reference to FIGS.

In FIG. 9, an electron beam accelerated by a pre-accelerator 24 such as an electron linear accelerator (electronic linac) is incident on an electron synchrotron 22 via a beam transport unit 2 by an incident deflector 15. The electron beam accelerated to a predetermined energy by the high-frequency acceleration cavity 10 of the electron synchrotron is emitted to the beam transport unit 2 by the emission deflector 23. At this time, the difference between the amount of radiated light or the amount of current measured by the radiated light monitor 5 or the current monitor 12 installed on the storage ring 3 and a value preset by the control device 13 is detected. The excitation time width of the kicker electromagnet 27 for emission of the electronic synchrotron 22 is controlled by a signal output from the control unit 13 in accordance with the difference to change the number of charges emitted from the electronic synchrotron 22 to thereby change the electron storage ring 3. To control the additional incident current to the

FIG. 10A is a schematic view of the emission orbit 28 of the electron synchrotron 22. Electronic synchrotron 22
Extraction kicker magnet 27 installed on the equilibrium orbit 8
As a result, the electron beam passes through the emission trajectory 28, and the
3, the light is emitted from the electron synchrotron.

FIG. 10B shows a pulse waveform of the kicker magnet 27. The amount of current of the electron beam emitted from the electron synchrotron changes depending on the pulse width Δt of the kicker magnet. Therefore, by measuring the amount of change in advance, it becomes possible to input only a necessary amount of current according to a command from the control means 13 in FIG. 6 (a).

By repeating this operation in accordance with a command from the control means 13, additional incidence on each electron storage ring is performed sequentially.

By performing this operation for each of the plurality of storage rings, the amount of current incident on each of the storage rings can be controlled for each additional incidence. Can also respond quickly.

Further, even when a large current is required at the time of incidence of a certain storage ring during beam withering operation or the like and another storage ring is in a steady operation, the amount of current incident on the ring can be adjusted by the control means. It is possible to quickly start up the ring without hindering the operation of the ring.

Next, a seventh embodiment of the present invention will be described with reference to FIGS.

In FIG. 11, an electron beam accelerated by a pre-accelerator 24 such as an electron linear accelerator (electronic linac) is incident on an electron synchrotron 22 via a beam transport unit 2 by an incident deflector 15.

Next, the difference between the amount of radiated light or the amount of current measured by the radiated light monitor 5 or the current monitor 12 installed on the storage ring 3 is detected by the control device 13. By controlling the excitation time width or the excitation timing of the deflecting magnet 29 disposed in the beam transport unit 2 by a signal output from the control unit 13 according to the difference, the number of charges incident on the electronic synchrotron 22 is changed. The additional incident current to the electron storage ring 3 is controlled.

High-frequency accelerating cavity 10 of electron synchrotron
The electron beam accelerated to a predetermined energy is emitted to the beam transport unit 2 by the emission deflector 23.

FIG. 12 shows a pulse waveform of the deflection magnet 29 installed in the beam transport unit. The current amount of the electron beam incident on the electron synchrotron is determined by the pulse width Δt of the bending electromagnet.
And changes due to timing t _0. Therefore, by measuring the amount of change in advance, it becomes possible to inject only a necessary amount of current by a command from the control means 13 in FIG.

By repeating this operation in response to a command from the control means 13, additional incidence on each electron storage ring is performed sequentially.

By performing this operation for each of the plurality of storage rings, the amount of current incident on each of the storage rings can be controlled for each additional incidence. Can also respond quickly.

Further, even when a certain storage ring requires a large current at the time of incidence due to beam withering operation or the like and another storage ring is in a steady operation, the amount of current incident on the ring can be adjusted by the control means. It is possible to quickly start up the ring without hindering the operation of the ring.

The present embodiment is not limited to the case where the injector is composed of the pre-accelerator and the electron synchrotron and the deflection magnet is installed in the beam transport section from the pre-accelerator to the electron synchrotron. It is also applicable when a deflection magnet is installed in the beam transport section between the vessel and the electron storage ring.

Next, an eighth embodiment of the present invention will be described with reference to FIGS.

In FIG. 14, an electron beam accelerated by a pre-accelerator 24 such as an electron linear accelerator (electronic linac) is incident on an electron synchrotron 22 via a beam transport unit 2 by an incident deflector 15. At this time, the synchrotron radiation monitor 5 or the current monitor 12
The difference between the amount of radiation or the amount of current measured by the controller 13 and the value set in advance by the controller 13 is detected. According to the difference, the driving device of the slit 30 arranged in the beam transport unit 2 is controlled in advance by a signal output from the control unit 13 to change the number of electric charges incident on the electron synchrotron 22, thereby changing the electron storage ring 3 To control the additional incident current to the

Electron synchrotron high-frequency acceleration drive 10
The electron beam accelerated to a predetermined energy is emitted to the beam transport unit 2 by the emission deflector 23.

FIG. 15 is a schematic view of the slit 30 provided in the beam transport unit. The amount of current of the electron beam incident on the electron synchrotron changes depending on the interval Δx between the slits 30 provided on the electron trajectory of the beam transport unit. So by measuring the amount of change in advance,
By operating the slit drive system 31 in accordance with a command from the control means 13 and adjusting the slit drive system 31 to a predetermined slit width Δx in advance, it becomes possible to input only a necessary amount of current.

By repeating this operation in response to a command from the control means 13, additional incidence on each electron storage ring is performed sequentially.

By performing this operation for each of the plurality of storage rings, the amount of current incident on each of the storage rings can be controlled for each additional incidence. Can also respond quickly.

Further, even when a certain storage ring requires a large current at the time of incidence due to beam withdrawal operation or the like and another storage ring is in a steady operation, the amount of current incident on the ring can be adjusted by the control means. It is possible to quickly start up the ring without hindering the operation of the ring.

This embodiment is not limited to the case where the injector is constituted by the pre-accelerator and the electron synchrotron and the slit is provided in the beam transport section from the pre-accelerator to the electron synchrotron. As shown in FIG. It can also be applied to a case where a slit is provided in the beam transport section between the electron storage ring and the electron storage ring.

Next, a ninth embodiment of the present invention will be described with reference to FIGS.

In FIG. 17, an electron beam accelerated by a pre-accelerator 24 such as an electron linear accelerator (electronic linac) is incident on an electron synchrotron 22 via a beam transport unit 2 by an incident deflector 15.

Next, the difference between the amount of radiated light or the amount of current measured by the radiated light monitor 5 or the current monitor 12 provided on the electron storage ring 3 is detected by the control device 13. In response to the difference, a signal output from the control means 13 causes the high frequency accelerating cavity 10 of the electron synchrotron 22 or the electron storage ring 3 to move.
The additional incident current to the electron storage ring 3 is controlled by controlling the phase of the RF power supplied to the electron storage ring 3 and controlling the number of charges in the electron synchrotron.

FIG. 18 is a phase diagram of RF of the electron storage ring 3. The horizontal axis ψ is the RF phase, and the vertical axis is the energy difference ΔE /
E is shown. The electrons orbiting the electron storage ring 3 oscillate around a phase corresponding to the origin in FIG. Usually, the phase difference of the RF power is adjusted so that the electrons incident from the electron synchrotron are at the position A. When the incident beam is located at the position B in FIG. 18, a part of the incident beam goes out of the RF bucket 32 indicating a region where the beam is stable. Therefore, part of the incident beam will be lost. The rate of change of the incident beam depends on the RF phase at the point of incidence. R
F phase is electron synchrotron or electron storage ring 3
The phase is changed by controlling the phase of the RF power input to the high-frequency accelerating cavity 10 disposed at the position. Therefore, by measuring the amount of change in advance, it becomes possible to control only a necessary current by a command from the control means 13 in FIG.

After controlling the amount of incident current in this way,
This operation is repeated by the high-frequency accelerating cavity 10 in accordance with a command from the control means 13, so that additional incidence on each electron storage ring is sequentially performed.

By performing this operation for each of the plurality of electron storage rings, the amount of current incident on each electron storage ring can be controlled for each additional incidence, so that the amount of stored current sharply decreases. In case, we can respond quickly.

Further, even when a large current is required at the time of incidence of a certain electron storage ring during beam withdrawal operation or the like and another electron storage ring is operating in a steady state, the amount of current incident on the ring can be adjusted by the control means. Therefore, it is possible to quickly start the ring without hindering the operation of another ring.

[0104]

As is apparent from the above description, according to the present invention, since the predetermined control means is provided, the amount of additional incident current injected into each of the plurality of electron storage rings can be controlled independently. And when the injection of the additional incident current into a certain electron storage ring is repeated, the amount of the additional incident current can be controlled independently for each injection.

As a result, when a large current is required at the time of incidence of a certain electron storage ring during beam withering operation or the like and another electron storage ring is operating in a steady state, a large amount of additional incident current is applied only to this electron storage ring. Since the injection can be performed, the electron storage ring that requires a large current can be quickly started.

Further, when the injection of the additional incident current into a certain electron storage ring is repeated and the electron beam in the electron storage ring changes rapidly, the amount of additional incident current can be controlled according to this change. The accumulated current amount can be quickly restored.

Further, since the electron storage rings can be individually controlled in the case of an emergency operation such as a beam withering operation, the maximum number of electron storage rings 3 that can be connected in the case of a steady operation can be increased.

[Brief description of the drawings]

FIG. 1 is a plan view schematically showing a first embodiment of a synchrotron radiation generator according to the present invention.

FIGS. 2A and 2B are schematic diagrams showing (a) an incident bump trajectory, (b) a phase diagram before incidence, (c) a phase diagram during incidence, and (d) a phase diagram immediately after incidence in the first embodiment of the present invention. (E) Bump electromagnet pulse waveform diagram.

FIG. 3 is a plan view schematically showing a second embodiment of the synchrotron radiation generator according to the present invention.

4 (a) is a schematic diagram showing an incident bump trajectory, (b) is a phase diagram before incidence, (c) is a phase diagram during incidence, and (d) is a phase diagram immediately after incidence in the second embodiment of the present invention. (E) Bump electromagnet pulse waveform diagram.

FIG. 5 is a plan view schematically showing a third embodiment of a radiation light generating device according to the present invention.

FIG. 6 is a plan view schematically showing a fourth embodiment of a synchrotron radiation generator according to the present invention.

FIG. 7 is a plan view schematically showing a fifth embodiment of the radiation light generating apparatus according to the present invention.

FIG. 8 is a plan view schematically showing a modification of the fifth embodiment of the radiation light generating apparatus according to the present invention.

FIG. 9 is a plan view schematically showing a sixth embodiment of the radiation light generating apparatus according to the present invention.

FIGS. 10A and 10B are (a) a schematic diagram of an emission trajectory and (b) a waveform diagram of a kicker magnet magnetic field in a sixth embodiment of the radiation light generating apparatus according to the present invention.

FIG. 11 is a plan view schematically showing a seventh embodiment of a synchrotron radiation generator according to the present invention.

FIG. 12 is a magnetic field waveform of a deflection magnet 29 in a seventh embodiment of the present invention.

FIG. 13 is a plan view schematically showing a modification of the seventh embodiment of the synchrotron radiation generator according to the present invention.

FIG. 14 is a plan view schematically showing an eighth embodiment of a synchrotron radiation generator according to the present invention.

FIG. 15 is a schematic view of a slit according to an eighth embodiment of the present invention.

FIG. 16 is a plan view schematically showing a modification of the eighth embodiment of the radiation light generating apparatus according to the present invention.

FIG. 17 is a plan view schematically showing a ninth embodiment of a synchrotron radiation generator according to the present invention.

FIG. 18 is an RF phase diagram of the ninth embodiment of the present invention.

FIG. 19 is a plan view schematically showing a conventional synchrotron radiation generator.

20A is a characteristic diagram for explaining the operation of a conventional synchrotron radiation generator, and FIG. 20B is a characteristic diagram for explaining the operation of a synchrotron radiation generator according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Incident electron accelerator 2 Beam transport part 3 Electron storage ring 4 Synchrotron radiation beam line 5 Synchrotron radiation monitor 6 Bending electromagnet 7 Vacuum duct 8 Beam trajectory 9 Synchrotron radiation 10 High-frequency accelerator 11 Branch electromagnet 12 Beam current monitor 13 Control means 14 4 Polar magnet 15 Incident deflector 16 Beam incident point 17 Incident bartabeta magnet 19 Incident bump trajectory 20 Incident electron beam 21 Distribution of additional incident beam in phase space 22 Electron synchrotron 23 Outgoing deflector 24 Pre-accelerator 25 RF knockout electrode 26 Electron gun 27 kicker magnet for emission 28 beam emission orbit 29 deflection magnet 30 slit 31 slit drive system

Continuation of the front page (56) References JP-A-4-43599 (JP, A) JP-A-4-43600 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) H05H 13 / 04

Claims (1)

(57) [Claims] An electron beam emitted from an electron beam generator is sent to a plurality of electron storage rings via a branching electromagnet disposed in a beam transport section for transporting the electron beam. In a radiation light generating device that generates light by using a control, a quantity related to the intensity of the radiation light generated in each of the electron storage rings is detected and compared with a predetermined set value to control the intensity of the radiation light to be constant. Means for controlling the amount of excitation of the incident bump electromagnet of each of the electron storage rings or the timing of the incident bump electromagnet to control the amount of additional incident current added to the electron storage ring. A synchrotron radiation generator.