JP3136370B2 - Size separation unit - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a porous silica filter used for filtering various liquids and gases required for the manufacture of semiconductor devices, a filter for enclosing the filter, and supplying a fluid. The present invention relates to a size separation unit having a tube and a housing made of quartz glass provided with a fluid discharge tube.

[0002]

2. Description of the Related Art Conventionally, this kind of size separation unit has
As shown in FIG. 10, a filtration layer made of porous silica having a required pore size is laminated on the surface of a support made of porous silica having a large pore size to form a porous silica having a controlled pore size. A filter body 31 having a tube shape (cylindrical shape with a bottom) sealed at one end and quartz glass (amorphous silica),
The filter body 31 is hermetically encapsulated, and includes a fluid supply body 32 for supplying a fluid to be filtered to the filter body 31 and a housing 34 provided with a fluid discharge pipe 33 for discharging the filtered fluid (Japanese Patent Application Laid-Open No. HEI 3 (1993) -313873). -202106 PR (Japanese Patent Application No. 1-343)
702)).

[0003]

In this conventional size separation unit, the fluid supply pipe and the fluid discharge pipe are made of quartz glass. Therefore, when used in connection with a glass piping system, the fluid supply pipe and the fluid discharge pipe may be used as they are or as joints. Although it is convenient because it can be directly welded by the method described above, when connecting it to a metal piping system such as stainless steel, use a flexible pipe such as a soft vinyl tube, or use a compression seal using an O-ring. Airtight connections are made by such methods as the above, however, accidents such as breakage of the fluid supply pipes are likely to occur during connection or use, so it is not possible to tighten sufficiently, and water leakage and disconnection during use will occur. There are problems that arise.

Accordingly, an object of the present invention is to provide a size separation unit made of quartz glass which enables highly reliable connection with a metal piping system.

[0005]

In order to solve the above-mentioned problems, a size separation unit according to the present invention comprises a tubular filter having a closed end made of porous silica having a controlled pore diameter, and a quartz glass. , The filter body is hermetically encapsulated,
And a housing provided with a fluid supply pipe for supplying a fluid to be filtered to the filter body and a fluid discharge pipe for discharging the filtered fluid, wherein at least one end of the fluid supply pipe and the fluid discharge pipe has a resin It has a metal tube joined by a joint.

[0006] It is preferable that the joint end of the metal pipe and the fluid supply pipe and / or the fluid discharge pipe connected by the resin joint is coaxially overlapped. In addition, it is preferable that the fluid supply pipe and / or the fluid discharge pipe and the metal pipe connected by the resin joint part abut each other via a flange or a large diameter part formed at at least one joint end.

The resin joint is preferably formed from the joint end of the fluid supply pipe and / or the fluid discharge pipe to the metal pipe to the housing or to the outer periphery of the housing. Further, it is preferable that a metal reinforcing pipe is fitted around the outer periphery of the resin joint formed from the joint end to the housing or the outer periphery of the housing.

[0008]

In the above means, the size separation unit made of quartz glass is provided with a connecting metal tube. The synthetic resin is applied to the outer periphery of the joining end by coaxially overlapping the joining end of the metal tube with the fluid supply pipe and / or the fluid discharge pipe connected by the resin joining part, and the non-filtered fluid and / or Contact with the filtration fluid is interrupted. Also, by joining a fluid supply pipe and / or a fluid discharge pipe and a metal pipe joined by a resin joint via a flange or a large-diameter portion formed on at least one joint end,
The joining strength with the resin joint covering the outer periphery is increased.

The resin joint is formed from the joint end of the fluid supply pipe and / or the fluid discharge pipe to the metal pipe to the housing or to the outer periphery of the housing.
The neck of the fluid supply and / or fluid drain is reinforced or the entire unit is protected. Further, since the metal reinforcing pipe is fitted around the resin joint formed from the joint end to the housing or the outer periphery of the housing, the fluid supply pipe and / or the fluid discharge pipe itself and the neck thereof are provided. The part or the whole unit is further reinforced.

[0010]

Next, the present invention will be described with reference to the drawings. FIG. 1 is a sectional view of a size separation unit according to a first embodiment of the present invention. In FIG. 1, reference numeral 1 denotes a tubular filter having one end sealed with porous silica having a controlled pore diameter, and a porous silica having a relatively large pore diameter is provided on the surface of a porous silica having a relatively large pore diameter. A fluid supply pipe which is formed by laminating a filtration layer made of silica and which is made of quartz glass and has a diameter substantially equal to that of the filtration body 1 and supplies a fluid to be filtered to the opening end of the filtration body 1. 2 are connected by fusing through one end.

A cylindrical housing 3 made of quartz glass and having an outer diameter and a length which are appropriately larger than that of the filter 1 is coaxially encapsulated around the filter 1 around the one end of the fluid supply pipe 2. The housing 3 is made of quartz glass and has the same outer diameter as the fluid supply pipe 2 at the other end thereof. Further, a fluid discharge pipe 5 for discharging the filtered fluid filtered by the filter body 1 is integrally connected. And the fluid supply pipe 2
At the other end and the end of the fluid discharge pipe 5, a metal pipe 6 made of stainless steel and having the same outer diameter as the above is attached with an epoxy resin, an acrylic resin, etc. Are joined in a hermetically sealed manner by a resin joining portion 7 made of a synthetic resin having properties. The joining of the fluid supply pipe 2 and the fluid discharge pipe 5 to each metal pipe 6 is performed by appropriately applying a synthetic resin to each butt end face, and butt-solidifying each.

In the size separation unit of the first embodiment, since the size separation unit made of quartz glass is provided with the metal pipe 6 for connection, the connection with the metal piping system is made by the metal pipes. And a simple and highly reliable connection such as screwing, welding, flange fixing, etc., can be freely performed. As shown by the arrow in the drawing, one metal pipe 6 passes through the fluid supply pipe 2. The object to be filtered supplied to the filter 1 is filtered by the filtration layer of the filter 1, and the filtered fluid is discharged from the other metal 6 via the fluid discharge pipe 5.

FIGS. 2 and 3 are cross-sectional views of main parts of a size separation unit according to a second embodiment and a third embodiment of the present invention, respectively. In these size separation units, the diameters of the fluid supply pipe 2 and the fluid discharge pipe 5 (only the fluid discharge pipe side is shown in both figures) and each of the metal pipes 61 and 62 are changed relatively (FIG. The metal pipe is made larger than the fluid discharge pipe, and in FIG. 3, the metal pipe is made smaller than the fluid discharge pipe), and one is inserted into the other without gap so that the joint ends are overlapped coaxially. Resin joint 7 covering the outer periphery of the part
1 and 72. Other configurations are the same as those in FIG. 1, and thus the same members and the like are denoted by the same reference numerals and description thereof is omitted.

In the size separation units of the second and third embodiments, the resin joints 71 and 72 do not come into contact with the fluid to be filtered and the filtration fluid. 72 can be prevented from dissolving.

FIG. 4 is a sectional view of a main part of a size separation unit according to a fourth embodiment of the present invention. In order to simplify the joining, this size separation unit has a tapered taper which has a smaller outer diameter as it approaches the end of the joining end of the fluid supply pipe 2 and the fluid discharge pipe 5 (only the fluid discharge side is shown in the figure). Face 8
On the other hand, a tapered surface 9 that can be engaged with the tapered surface 8 is formed on the inner periphery of the joint end of each metal tube 6 so that the fluid supply tube 2 and the fluid discharge tube 5 and each metal tube 6 are tapered. In a state where the surfaces 8 and 9 are engaged and brought into contact with each other, the resin joint 73 covering the outer periphery of the joint end of the metal pipe 6 with the fluid supply pipe 2 and the fluid discharge pipe 5 is extended to the end of the housing 3. It is formed by molding. Other configurations are the same as those in FIG. 1, and thus the same members and the like are denoted by the same reference numerals and description thereof is omitted.

In the size separation unit according to the fourth embodiment, the neck which is most easily broken during connection work with the metal piping system and the fluid supply pipe 2 and the fluid discharge pipe 5 themselves are reinforced to increase their strength. Can be.

FIGS. 5 and 6 are sectional views of a main part of a size separation unit according to a fifth embodiment and a sixth embodiment of the present invention. These size separation units include flanges 10 and 11 and large-diameter portions 12 at the joint ends of the fluid supply pipe 2 and the fluid discharge pipe 5 (only a fluid discharge pipe example is shown in both figures) and each metal pipe 6. 13 and in a state where these are butted together,
The resin joint 73 covering the outer periphery of each joint end is connected to the housing 3.
And formed by molding.
The other configuration is the same as that of FIG.

In the size separation units of the fifth and sixth embodiments, the shrinkage of the resin joint 73 when the synthetic resin is solidified causes the flanges 10 and 11 or the large-diameter portions 12 and
13 are pressed and brought into contact without any gap, and the joining end of the fluid supply pipe 2 and the fluid discharge pipe 5 with each metal pipe 6;
The bonding strength with the resin bonding portion 73 increases.

FIG. 7 is a sectional view of a size separation unit according to a seventh embodiment of the present invention. This size separation unit forms a flange 14 at the joint end of each metal tube 6 and
A small-diameter portion 15 that can be inserted into the fluid supply pipe 2 and the fluid discharge pipe 5 is formed on the distal end side of the flange 14, each small-diameter section 15 is inserted into the fluid supply pipe 2 and the fluid discharge pipe 5, and the flange 14 is attached. A resin joint 7 covering the outer periphery of each joint end in a state of contacting the end faces of the fluid supply pipe 2 and the fluid discharge pipe 5
4 extends to the outer periphery of the housing 3 and is molded to have the same diameter over the entire length. Other configurations are the same as those in FIG. 1, and thus the same members and the like are denoted by the same reference numerals and description thereof is omitted.

In the size separation unit of the seventh embodiment, as in the fifth and sixth embodiments, the two flanges 14 are separated from each other by the shrinkage force of the synthetic resin of the resin joint 74 when the synthetic resin is solidified. By being pressed in the approaching direction, each flange 14 is pressed against the end faces of the fluid supply pipe 2 and the fluid discharge pipe 5 to eliminate a gap and protect the entire unit.

FIG. 8 is a sectional view of a main part of a size separation unit according to an eighth embodiment of the present invention. This size separation unit is obtained by fitting a cylindrical metal reinforcing tube 16 around the outer periphery of the resin joining portion 73 of FIG. 4, and by doing so, the neck portion, the fluid supply pipe 2 and the fluid discharge pipe 5
The reinforcement of itself can be further enhanced. The other configuration is the same as that of FIG. 4, and the same members and the like are denoted by the same reference numerals and description thereof is omitted.

FIG. 9 is a sectional view of a size separation unit according to a ninth embodiment of the present invention. This size separation unit forms a tapered surface 17 having a smaller outer diameter as approaching the ends on the outer periphery of the joint end of the fluid supply pipe 2 and the fluid discharge pipe 5, while forming an inner periphery of the joint end of each metal pipe 6. , The tapered surface 1
7 is formed, and a flange 19 is formed on the outer periphery of the joint end, and the fluid supply pipe 2 and the fluid discharge pipe 5 and each metal pipe 6 are respectively tapered faces 17, 18.
In the state of being engaged with and abutting on each other, a resin joint portion 75 covering the outer periphery of each joint end portion is extended to the outer periphery of the housing 3 and molded to have the same diameter over the entire length. The cylindrical metal reinforcing pipe 20 is fitted around the outer periphery of the portion 75. Other configurations are the same as those in FIG. 1, and thus the same members and the like are denoted by the same reference numerals and description thereof is omitted.

In the size separation unit of the ninth embodiment, when the resin joint 75 is formed, the joint between the fluid supply pipe 2 and the fluid discharge pipe 5 and each metal pipe 6 does not move, so that the formation is simplified. At the same time, the two flanges 19 are pressed in directions approaching each other by the contraction force of the resin joint 75 when the synthetic resin is solidified, so that there is no gap between the tapered surfaces 17 and 18 of the joint and the entire unit Can be further enhanced.

Here, the resin joints 73, 74,
In the molding of the 75, it is desirable to add a filler such as glass particles to the synthetic resin to improve the strength. In each of the above embodiments, the metal tubes 6, 6
A case has been described in which the fluid supply pipes 1 and 62 are joined to both the fluid supply pipe 2 and the fluid discharge pipe 5. However, the present invention is not limited to this, and only one of the fluid supply pipe 2 and the fluid discharge pipe 5 is provided with a metal pipe. 6, 61 and 62 may be joined. In addition to the case where the object to be filtered is supplied to the inside of the filter 1 and the filtered fluid is allowed to flow out of the body, the fluid to be filtered is supplied from the outside of the filter 1 and the filtered fluid is filtered. You may make it flow out from the inside.

[0025]

As described above, according to the size separation unit of the present invention, the size separation unit made of quartz glass has a metal pipe for connection, so that the connection with the metal piping system is made of metal. The pipes are connected to each other, and simple and highly reliable connections such as screwing, welding, and flange fixing can be performed.

The synthetic resin is applied to the outer periphery of the joint end by coaxially overlapping the joint end of the metal pipe with the fluid supply pipe and / or fluid discharge pipe connected by the resin joint, and the fluid to be filtered is Since the contact with the filtration fluid is interrupted, it is possible to prevent the resin joint from being dissolved when filtering ethylene glycol or the like.
In addition, the fluid supply pipe and / or the fluid discharge pipe and the metal pipe joined by the resin joining portion are joined to each other through a flange portion or a large-diameter portion formed at at least one end, so that a resin covering the outer periphery thereof is formed. Since the joining strength with the joint is increased, the reliability of the joint can be improved.

The resin joint is formed from the joint end of the fluid supply pipe and / or the fluid discharge pipe to the metal pipe to the housing or to the outer periphery of the housing.
Since the fluid supply pipe and / or the fluid discharge pipe and its neck are reinforced or the whole unit is protected, the neck and the fluid supply pipe and / or which are most likely to break during the connection work with the metal piping system.
Alternatively, the strength of the fluid discharge pipe or the entire unit can be increased. Further, since the metal reinforcing pipe is fitted around the resin joint formed from the joint end to the housing or to the outer periphery of the housing, the fluid supply pipe and / or the fluid discharge pipe and the neck thereof are provided. Is further reinforced or the whole unit is further protected, so that the strength of the fluid supply pipe and / or the fluid discharge pipe and its neck or the whole unit can be further increased.

[Brief description of the drawings]

FIG. 1 is a sectional view of a size separation unit according to a first embodiment of the present invention.

FIG. 2 is a sectional view of a main part of a size separation unit according to a second embodiment of the present invention.

FIG. 3 is a sectional view of a main part of a size separation unit according to a third embodiment of the present invention.

FIG. 4 is a sectional view of a main part of a size separation unit according to a fourth embodiment of the present invention.

FIG. 5 is a sectional view of a main part of a size separation unit according to a fifth embodiment of the present invention.

FIG. 6 is a sectional view of a main part of a size separation unit according to a sixth embodiment of the present invention.

FIG. 7 is a sectional view of a size separation unit according to a seventh embodiment of the present invention.

FIG. 8 is a sectional view of a main part of a size separation unit according to an eighth embodiment of the present invention.

FIG. 9 is a sectional view of a size separation unit according to a ninth embodiment of the present invention.

FIG. 10 is a sectional view of a conventional size separation unit.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Filtration body 2 Fluid supply pipe 3 Housing 5 Fluid discharge pipe 6 Metal pipe 7 Resin joint 10 Flange 11 Flange 12 Large diameter part 13 Large diameter part 14 Flange 16 Metal reinforcement pipe 19 Flange 20 Metal reinforcement pipe 61 Metal pipe 62 Metal pipe 71 Resin joint 72 Resin joint 73 Resin joint 74 Resin joint 75 Resin joint

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Kenji Takahashi 30 Soya, Hadano-shi, Kanagawa Toshiba Ceramics, Inc. Central Research Laboratory (56) References JP-A-1-202373 (JP, A) 83415 (JP, U) (58) Field surveyed (Int. Cl. ⁷ , DB name) B01D 35/02 B01D 39/20 B01D 46/24

Claims (5)

(57) [Claims] An end-sealed tubular filter body made of porous silica having a controlled pore diameter, and quartz glass, said filter body being airtightly encapsulated, and a fluid to be filtered is filled in the filter body. In a size separation unit having a fluid supply pipe for supplying and a housing provided with a fluid discharge pipe for discharging a filtration fluid, a metal pipe joined to at least one end of the fluid supply pipe and the fluid discharge pipe by a resin joint A size separation unit comprising: 2. The size separation unit according to claim 1, wherein a joint end of the fluid supply pipe and / or the fluid discharge pipe joined by the resin joint is coaxially overlapped. Size separation unit. 3. The size separation unit according to claim 1, wherein the fluid supply pipe and / or the fluid discharge pipe and the metal pipe joined by the resin joint are formed at at least one joint end. A size separation unit characterized by being abutted through the majority. 4. The size separation unit according to claim 1, wherein the resin joint extends from a joint end between the fluid supply pipe and / or the fluid discharge pipe and the metal pipe to the housing or to an outer periphery of the housing. A size separation unit characterized in that it is formed in a shape. 5. The size separation unit according to claim 4, wherein a metal reinforcing pipe is fitted around an outer periphery of the resin joint.