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JP3155687B2 - Method for producing silicon nitride fiber - Google Patents
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JP3155687B2 - Method for producing silicon nitride fiber - Google Patents

Method for producing silicon nitride fiber

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Publication number
JP3155687B2
JP3155687B2 JP19871795A JP19871795A JP3155687B2 JP 3155687 B2 JP3155687 B2 JP 3155687B2 JP 19871795 A JP19871795 A JP 19871795A JP 19871795 A JP19871795 A JP 19871795A JP 3155687 B2 JP3155687 B2 JP 3155687B2
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JP
Japan
Prior art keywords
fiber
silicon nitride
temperature
atmosphere
gas atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP19871795A
Other languages
Japanese (ja)
Other versions
JPH08100327A (en
Inventor
忠男 瀬口
昇 笠井
健一 石上
誠二 神村
清 渡辺
秀樹 柳生
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Hitachi Cable Ltd
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Hitachi Cable Ltd
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Priority to JP19871795A priority Critical patent/JP3155687B2/en
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Publication of JP3155687B2 publication Critical patent/JP3155687B2/en
Anticipated expiration legal-status Critical
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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、Si−N骨格より
なる高純度かつ高強度の窒化ケイ素繊維の製造方法に関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a high-purity and high-strength silicon nitride fiber having a Si--N skeleton.

【0002】[0002]

【従来の技術】紡糸したポリカルボシラン繊維に0.5
〜90MGyの線量の電子線等の電離性放射線を照射し
て不融化処理を施したポリカルボシラン繊維を、アンモ
ニア等の窒素ガス雰囲気中で800〜1700℃に加熱
して窒化することにより、Si−N骨格よりなる窒化ケ
イ素繊維を製造する方法が提案されている。
2. Description of the Related Art Spun polycarbosilane fibers have a thickness of 0.5%.
The polycarbosilane fiber that has been infusibilized by irradiating it with ionizing radiation such as an electron beam at a dose of about 90 MGy is heated to 800 to 1700 ° C. in a nitrogen gas atmosphere such as ammonia to nitride the polycarbosilane fiber. A method for producing a silicon nitride fiber having a -N skeleton has been proposed.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、従来の
ポリカルボシラン繊維を出発原料として窒化ケイ素繊維
を製造する方法では、酸素が不純物として多量に取り込
まれたり、繊維が分解し、脆くなる現象がでてきてい
る。酸素を多量に含む繊維の引張強度は1GPa程度で
あり、機械的強度が低いという問題がある。
However, in the conventional method for producing silicon nitride fibers using polycarbosilane fibers as a starting material, a large amount of oxygen is taken in as impurities or the fibers are decomposed and become brittle. Is coming. The tensile strength of the fiber containing a large amount of oxygen is about 1 GPa, and there is a problem that the mechanical strength is low.

【0004】本発明の目的は、前記した従来技術の欠点
を解消し、高強度かつ高強度窒化ケイ素繊維を実現でき
る製造方法を提供することにある。
An object of the present invention is to solve the above-mentioned drawbacks of the prior art and to provide a manufacturing method capable of realizing high strength and high strength silicon nitride fibers.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するため
に本発明は、電離性放射線を照射して不融化処理を施し
たポリカルボシラン繊維を500℃以上のアンモニア雰
囲気中で窒化処理を行い、続いて1200〜1400℃
の不活性ガス雰囲気中で焼成処理を行い、酸素含有量1
0重量%以下、引張強度1.4GPa以上の高純度窒化
ケイ素を得ることを特徴としている。
In order to achieve the above object, the present invention provides a polycarbosilane fiber which has been subjected to infusibilization treatment by irradiating with ionizing radiation, by nitriding in an ammonia atmosphere at 500 ° C. or higher. Followed by 1200-1400 ° C
Baking in an inert gas atmosphere with an oxygen content of 1
It is characterized in that high-purity silicon nitride having a weight of 0% by weight or less and a tensile strength of 1.4 GPa or more is obtained.

【0006】[0006]

【発明の実施の形態】アンモニア雰囲気中での窒化処理
後のポリカルボシラン繊維を1200〜1400℃の不
活性ガス雰囲気中で焼成処理を行うことにより、酸素含
有量10重量%以下、引張強度1.4GPa以上の高強
度窒化ケイ素繊維を実現できる。
DETAILED DESCRIPTION OF THE INVENTION Polycarbosilane fibers after nitriding in an ammonia atmosphere are fired in an inert gas atmosphere at 1200 to 1400 ° C. to obtain an oxygen content of 10% by weight or less and a tensile strength of 1%. A high-strength silicon nitride fiber of .4 GPa or more can be realized.

【0007】紡糸後のポリカルボシラン繊維を不融化さ
せるために照射する電離性放射線としては、電子線、α
線、γ線、X線等があげられ、照射線量は0.5〜90
MGyであることが望ましい。照射線量が0.5MGy
以下では不融化が不十分であり、焼成中に繊維が溶融す
る可能性がある。90MGy以上でゲル分率は100%
となり、これ以上の線量を照射しても無意味となる。
The ionizing radiation to be irradiated to make the polycarbosilane fiber after spinning infusible includes an electron beam, α
Radiation, γ-ray, X-ray, etc., and the irradiation dose is 0.5 to 90.
Desirably MGy. The irradiation dose is 0.5MGy
In the following, infusibilization is insufficient and the fibers may melt during firing. Gel fraction is 100% at 90MGy or more
It becomes meaningless to irradiate a higher dose.

【0008】アンモニア雰囲気中でポリカルボシラン繊
維を窒化させる温度は、500℃以上であり、500℃
以下では窒化反応が起こらない。上限はとくに規定しな
いが、1400℃が望ましく、1400℃を越えると窒
化ケイ素繊維の結晶化が起こり始め、強度が低下する。
The temperature at which the polycarbosilane fibers are nitrided in an ammonia atmosphere is 500 ° C. or more,
Below, no nitriding reaction occurs. Although the upper limit is not particularly defined, 1400 ° C. is desirable, and when it exceeds 1400 ° C., crystallization of silicon nitride fibers starts to occur, and strength is reduced.

【0009】アンモニアは、500〜1000℃に予熱
したものを送り込むことが望ましく、予熱をしないアン
モニア気流を送り込むと、繊維表面の温度を下げ、酸素
混入の原因となり強度の低下が起こりやすい。
It is desirable to feed ammonia preheated to 500 to 1000 ° C. If a non-preheated ammonia gas stream is fed, the temperature of the fiber surface is lowered, causing oxygen to be mixed and the strength is likely to be reduced.

【0010】窒化処理後、不活性ガス雰囲気で連続焼成
する温度は、1200〜1400℃であり、1200℃
以下では窒化ケイ素繊維中に未反応の残存ラジカルが存
在し、それを室温大気中に取り出す大気中の酸素、水素
と結合して酸素含有率が高くなり、強度の低下が起こ
る。1400℃以上では窒化ケイ素繊維の結晶化が起こ
りはじめ、強度が低下する。昇温速度は200℃/時間
以上とすると、窒化ケイ素繊維中の酸素含有量を低くす
ることができる。
After the nitriding treatment, the temperature for continuous firing in an inert gas atmosphere is 1200 to 1400 ° C., and 1200 ° C.
In the following, unreacted residual radicals are present in the silicon nitride fibers, which are taken out into the room temperature atmosphere and combined with oxygen and hydrogen in the atmosphere to increase the oxygen content and decrease the strength. At 1400 ° C. or higher, crystallization of silicon nitride fibers starts to occur, and the strength decreases. When the heating rate is 200 ° C./hour or more, the oxygen content in the silicon nitride fiber can be reduced.

【0011】不活性ガスは1200〜1400℃に予熱
したものを送り込むことが望ましく、予熱しないガスを
送ると酸素混入の原因となり強度低下が起こりやすい。
不活性ガスとしては窒素ガス、アルゴンガス等があげら
れる。
It is desirable to feed an inert gas preheated to 1200 to 1400 ° C. If a gas that is not preheated is sent, it causes oxygen contamination and the strength tends to decrease.
Examples of the inert gas include a nitrogen gas and an argon gas.

【0012】なおアンモニア雰囲気中での窒化処理後大
気に触れることなく連続して不活性ガス雰囲気中で焼成
処理を行うことにより、窒化ケイ素繊維中の酸素含有量
を低くすることが可能となる。
[0012] After the nitriding treatment in an ammonia atmosphere, the sintering treatment is performed continuously in an inert gas atmosphere without exposure to the air, so that the oxygen content in the silicon nitride fiber can be reduced.

【0013】[0013]

【実施例】以下、本発明の一実施例を比較例と対比して
説明する。
Hereinafter, an embodiment of the present invention will be described in comparison with a comparative example.

【0014】実施例1 紡糸装置を用いて得られた直径18μmのポリカルボシ
ラン繊維にヘリウムガス雰囲気中で10MGyの電子線
を照射して不融化した。照射後の不融化繊維を無張力下
において、アンモニアガス雰囲気中、室温から800℃
まで300℃/時間の速度で昇温した後、アルゴンガス
気流中で1300℃まで昇温した。その後室温まで徐冷
し、無色透明の繊維を得た。
Example 1 A polycarbosilane fiber having a diameter of 18 μm obtained by using a spinning device was irradiated with a 10 MGy electron beam in a helium gas atmosphere to make it infusible. The infusibilized fiber after irradiation is heated from room temperature to 800 ° C. in an ammonia gas atmosphere under no tension.
After the temperature was increased at a rate of 300 ° C./hour, the temperature was increased to 1300 ° C. in an argon gas stream. Thereafter, the mixture was gradually cooled to room temperature to obtain a colorless and transparent fiber.

【0015】得た繊維をメノウ乳ばちに入れ粉砕し、蛍
光X線分析により元素分析を行ったところ、酸素含有量
は5.8重量%であった。また引張試験機を用い、常温
における単繊維を評価したところ、引張強度は2.5G
Paであった。
[0015] The obtained fiber was put into agate milk loaf, pulverized, and subjected to elemental analysis by fluorescent X-ray analysis. As a result, the oxygen content was 5.8% by weight. When a single fiber was evaluated at room temperature using a tensile tester, the tensile strength was 2.5 G
Pa.

【0016】実施例2 紡糸装置を用いて得られた直径20μmのポリカルボシ
ラン繊維にアルゴンガス雰囲気中で15MGyのγ線を
照射して不融化した。照射後の不融化繊維を無張力下で
アンモニアガス雰囲気中、室温から1100℃まで昇温
した後、1200℃に予熱した窒素ガス気流中で140
0℃まで昇温した。その後室温まで徐冷し、無色透明の
繊維を得た。
Example 2 A polycarbosilane fiber having a diameter of 20 μm obtained by using a spinning apparatus was irradiated with 15 MGy γ rays in an argon gas atmosphere to make it infusible. The infusibilized fiber after irradiation is heated from room temperature to 1100 ° C. in an ammonia gas atmosphere under no tension and then heated in a nitrogen gas stream preheated to 1200 ° C.
The temperature was raised to 0 ° C. Thereafter, the mixture was gradually cooled to room temperature to obtain a colorless and transparent fiber.

【0017】得た繊維をメノウ乳ばちに入れ粉砕し、蛍
光X線分析により元素分析を行ったところ、酸素含有量
は6.0重量%であった。また、引張試験機を用い、常
温における単繊維を評価したところ引張強度は2.8G
Paであった。
The obtained fiber was put into agate milk loaf and pulverized, and subjected to elemental analysis by fluorescent X-ray analysis. As a result, the oxygen content was 6.0% by weight. When a single fiber at room temperature was evaluated using a tensile tester, the tensile strength was 2.8 G
Pa.

【0018】比較例1 紡糸装置を用いて得られた直径17μmのポリカルボシ
ラン繊維にアルゴンガス雰囲気中で20MGyのα線を
照射して不融化した。照射後の不融化繊維を無張力下で
アンモニアガス雰囲気中、室温から700℃まで300
℃/時間の速度で昇温した後、アルゴンガス気流中で1
000℃まで昇温した。その後、室温まで徐冷したとこ
ろ、黒色混りの白色繊維を得た。
Comparative Example 1 A polycarbosilane fiber having a diameter of 17 μm obtained by using a spinning apparatus was irradiated with 20 MGy α rays in an argon gas atmosphere to make it infusible. Irradiated infusibilized fiber is heated from room temperature to 700 ° C. in an ammonia gas atmosphere under tension without tension.
After the temperature was raised at a rate of ° C / hour,
The temperature was raised to 000 ° C. Then, when gradually cooled to room temperature, white fibers mixed with black were obtained.

【0019】得た繊維をメノウ乳ばちに入れ粉砕し、蛍
光X線分析により元素分析を行ったたところ、酸素含有
量は15重量%であった。また、引張試験機を用い、常
温における単繊維を評価したところ引張強度は1.2G
Paであった。
The obtained fiber was put into agate milk plum and pulverized, and subjected to elemental analysis by fluorescent X-ray analysis. As a result, the oxygen content was 15% by weight. When a single fiber was evaluated at room temperature using a tensile tester, the tensile strength was 1.2 G.
Pa.

【0020】比較例2 紡糸装置を用いて得られた直径19μmのポリカルボシ
ラン繊維にヘリウムガス雰囲気中で3MGyの電子線を
照射して不融化した。照射後の不融化繊維を無張力下で
アンモニア雰囲気中、室温から1400℃まで300℃
/時間の速度で昇温した後、窒素ガス気流中で1500
℃まで昇温した。
Comparative Example 2 A polycarbosilane fiber having a diameter of 19 μm obtained by using a spinning device was irradiated with a 3MGy electron beam in a helium gas atmosphere to make it infusible. The infusibilized fiber after irradiation is 300 ° C. from room temperature to 1400 ° C. in an ammonia atmosphere under no tension.
/ Hour after heating at a rate of 1500 hours in a nitrogen gas stream.
The temperature was raised to ° C.

【0021】得た繊維は、非常に脆く、結晶化が開始し
ていると推察される。
The obtained fiber is very brittle, and it is presumed that crystallization has started.

【0022】実施例3 紡糸装置を用いて得られた直径18μmのポリカルボシ
ラン繊維にヘリウムガス雰囲気中で15MGyの電子線
を照射して不融化した。照射後の不融化繊維を無張力下
でアンモニア雰囲気中、室温から800℃まで300℃
/時間の速度で昇温して1時間保持し、その後大気に触
れることなく連続して窒素ガス雰囲気に切替え、800
℃から1200℃まで300℃/時間の速度で昇温して
1時間保持した。その後、室温まで徐冷し、無色透明の
繊維を得た。
Example 3 A polycarbosilane fiber having a diameter of 18 μm obtained by using a spinning device was irradiated with an electron beam of 15 MGy in a helium gas atmosphere to make it infusible. Irradiated infusibilized fiber under ambient temperature in an ammonia atmosphere at 300 ° C. from room temperature to 800 ° C.
/ Hour and maintained for 1 hour, then continuously switched to nitrogen gas atmosphere without touching the air, 800
The temperature was increased from 300 ° C. to 1200 ° C. at a rate of 300 ° C./hour and maintained for 1 hour. Thereafter, the mixture was gradually cooled to room temperature to obtain a colorless and transparent fiber.

【0023】得た繊維をメノウ乳ばちに入れ粉砕し、蛍
光X線分析により元素分析を行ったところ、酸素含有量
は6.0重量%であった。また引張試験機を用い、常温
における単繊維を評価したところ引張強度は2.1GP
aであった。
The obtained fiber was put in agate milk powder and pulverized, and subjected to elemental analysis by fluorescent X-ray analysis. As a result, the oxygen content was 6.0% by weight. When a single fiber at room temperature was evaluated using a tensile tester, the tensile strength was 2.1 GP.
a.

【0024】実施例4 実施例3と同様にして不融化した直径18μmのポリカ
ルボシラン繊維を、無張力下で800℃に予熱したアン
モニア気流を吹き込みながら、室温から800℃まで3
00℃/時間の速度で昇温して1時間保持し、その後大
気に触れることなく連続して1200℃に予熱した窒素
ガス気流を吹き込みながら800℃から1200℃まで
300℃/時の速度で昇温して1時間保持した。その
後、室温まで徐冷し、無色透明の繊維を得た。
Example 4 A polycarbosilane fiber having a diameter of 18 μm infusibilized in the same manner as in Example 3 was blown from a room temperature to 800 ° C. while blowing an ammonia stream preheated to 800 ° C. under no tension.
The temperature is raised at a rate of 00 ° C./hour and maintained for 1 hour, and then raised from 800 ° C. to 1200 ° C. at a rate of 300 ° C./hour while continuously blowing a nitrogen gas stream preheated to 1200 ° C. without contacting the atmosphere. Warmed and held for 1 hour. Thereafter, the mixture was gradually cooled to room temperature to obtain a colorless and transparent fiber.

【0025】得た繊維をメノウ乳ばちに入れ粉砕し、蛍
光X線分析により元素分析を行ったところ、酸素含有量
は2.8重量%であった。また引張試験機を用い、常温
における単繊維を評価したところ引張強度は3.2GP
aであった。
The obtained fiber was put in agate milk powder and pulverized, and subjected to elemental analysis by fluorescent X-ray analysis. As a result, the oxygen content was 2.8% by weight. When a single fiber at room temperature was evaluated using a tensile tester, the tensile strength was 3.2 GP.
a.

【0026】実施例5 実施例3と同様にして不融化した直径18μmのポリカ
ルボシラン繊維を、無張力下でアンモニア雰囲気中、室
温から800℃まで100℃/時間の速度で昇温して1
時間保持し、その後大気にに触れることなく連続して窒
素ガス雰囲気に切替え、800℃から1200℃まで1
00℃/時間の速度で昇温して1時間保持した。その
後、室温まで徐冷し、金白色繊維を得た。
Example 5 A polycarbosilane fiber having a diameter of 18 μm, which was made infusible in the same manner as in Example 3, was heated from room temperature to 800 ° C. at a rate of 100 ° C./hour in an ammonia atmosphere without tension.
Hold for a period of time, then switch to nitrogen gas atmosphere continuously without exposure to air,
The temperature was raised at a rate of 00 ° C./hour and maintained for 1 hour. Thereafter, the mixture was gradually cooled to room temperature to obtain a golden white fiber.

【0027】得た繊維をメノウ乳ばちに入れ粉砕し、蛍
光X線分析により元素分析を行ったところ、酸素含有量
は9重量%であった。また引張試験機を用い、常温にお
ける単繊維を評価したところ引張強度は1.5GPaで
あった。
The obtained fiber was put in agate milk powder and pulverized, and subjected to elemental analysis by fluorescent X-ray analysis. As a result, the oxygen content was 9% by weight. When a single fiber at normal temperature was evaluated using a tensile tester, the tensile strength was 1.5 GPa.

【0028】比較例3 実施例3と同様にして不融化した直径18μmのポリカ
ルボシラン繊維を、無張力下でアンモニア雰囲気中、室
温から400℃まで300℃/時間の速度で昇温して1
時間保持し、その後大気に触れることなく連続して窒素
ガス雰囲気に切替え、400℃から1000℃まで30
0℃/時間の速度で昇温して1時間保持した。その後、
室温まで徐冷し、黒色混じりの白色繊維を得た。
Comparative Example 3 A polycarbosilane fiber having a diameter of 18 μm, which was made infusible in the same manner as in Example 3, was heated from room temperature to 400 ° C. at a rate of 300 ° C./hour in an ammonia atmosphere under no tension.
Hold for a while, then switch to nitrogen gas atmosphere continuously without touching the air,
The temperature was raised at a rate of 0 ° C./hour and maintained for 1 hour. afterwards,
The mixture was gradually cooled to room temperature to obtain a white fiber mixed with black.

【0029】得た繊維をメノウ乳ばちに入れ粉砕し、蛍
光X線分析により元素分析を行ったところ、炭素含有量
が50重量%となり、炭化ケイ素となった。
The obtained fiber was put into agate milk loaf, pulverized, and subjected to elemental analysis by fluorescent X-ray analysis. As a result, the carbon content was 50% by weight and silicon carbide was obtained.

【0030】[0030]

【発明の効果】以上説明してきた通り、本発明は、電離
性放射線を照射して不融化処理を施したポリカルボシラ
ン繊維を500℃以上のアンモニア雰囲気中で窒化処理
を行い後、続いて1200〜1400℃の不活性ガス雰
囲気中で焼処理を行うものであり、酸素含有量10重量
%以下、引張強度1.5GPa以上の高純度かつ高強度
窒化ケイ素繊維を得ることが可能となる。
As described above, according to the present invention, a polycarbosilane fiber which has been infusibilized by irradiation with ionizing radiation is subjected to a nitriding treatment in an ammonia atmosphere at 500 ° C. or higher, and then to 1200 The baking treatment is performed in an inert gas atmosphere at 1400 ° C., and high-purity and high-strength silicon nitride fibers having an oxygen content of 10% by weight or less and a tensile strength of 1.5 GPa or more can be obtained.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 石上 健一 茨城県日立市日高町5丁目1番1号 日 立電線株式会社パワーシステム研究所内 (72)発明者 神村 誠二 茨城県日立市日高町5丁目1番1号 日 立電線株式会社パワーシステム研究所内 (72)発明者 渡辺 清 茨城県日立市日高町5丁目1番1号 日 立電線株式会社パワーシステム研究所内 (72)発明者 柳生 秀樹 茨城県日立市日高町5丁目1番1号 日 立電線株式会社パワーシステム研究所内 (56)参考文献 特開 平2−258611(JP,A) 特開 平2−258612(JP,A) 特開 平1−139819(JP,A) 特開 昭63−235526(JP,A) (58)調査した分野(Int.Cl.7,DB名) D01F 9/10 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Kenichi Ishigami 5-1-1 Hidaka-cho, Hitachi City, Ibaraki Prefecture Inside Power System Research Laboratories, Hitachi, Ltd. (72) Inventor Seiji Kamimura Hidaka-cho, Hitachi City, Ibaraki Prefecture 5-1-1, Nippon Electric Wire & Cable Co., Ltd. Power System Research Laboratory (72) Inventor Kiyoshi Watanabe 5-1-1, Hidaka-cho, Hitachi City, Ibaraki Pref. Nippon Electric Wire & Cable Co., Ltd. Power System Research Laboratory (72) Inventor Yagyu Hideki 5-1-1, Hidaka-cho, Hitachi City, Ibaraki Prefecture Inside the Power System Research Laboratories, Hitachi, Ltd. (56) References JP-A-2-258611 (JP, A) JP-A-2-258612 (JP, A) JP-A-1-139819 (JP, A) JP-A-63-235526 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) D01F 9/10

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 電離性放射線を照射して不融化処理を施
したポリカルボシラン繊維を500℃以上のアンモニア
雰囲気中で窒化処理を行い、続いて1200〜1400
℃の不活性ガス雰囲気中で焼成処理を行い、酸素含有量
10重量%以下、引張強度1.4GPa以上の高純度窒
化ケイ素を得ることを特徴とする窒化ケイ素繊維の製造
方法。
1. A polycarbosilane fiber which has been infusibilized by irradiation with ionizing radiation is nitrided in an ammonia atmosphere at 500 ° C. or higher, followed by 1200 to 1400
A method for producing a silicon nitride fiber, comprising: performing a baking treatment in an inert gas atmosphere at a temperature of 10 ° C. to obtain high-purity silicon nitride having an oxygen content of 10% by weight or less and a tensile strength of 1.4 GPa or more.
【請求項2】 上記アンモニア雰囲気中の焼成温度は、
500〜1400℃である請求項1記載の窒化ケイ素繊
維の製造方法。
2. The sintering temperature in the ammonia atmosphere is as follows:
The method for producing a silicon nitride fiber according to claim 1, wherein the temperature is 500 to 1400C.
【請求項3】 上記アンモニア雰囲気中での昇温速度及
び上記不活性ガス雰囲気中での昇温速度は共に200℃
/時間である請求項1又は2記載の窒化ケイ素繊維の製
造方法。
3. The temperature rising rate in the ammonia atmosphere and the temperature rising rate in the inert gas atmosphere are both 200 ° C.
3. The method for producing a silicon nitride fiber according to claim 1 or 2, wherein
【請求項4】 アンモニア雰囲気中での窒化処理後、大
気に触れることなく連続して不活性ガス雰囲気中で焼成
処理を行う請求項1、2又は3記載の窒化ケイ素繊維の
製造方法。
4. The method for producing silicon nitride fibers according to claim 1, wherein after the nitriding treatment in an ammonia atmosphere, the sintering treatment is carried out continuously in an inert gas atmosphere without being exposed to the air.
JP19871795A 1994-08-05 1995-08-03 Method for producing silicon nitride fiber Expired - Fee Related JP3155687B2 (en)

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JP6-184783 1994-08-05
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