JP3185673B2 - How to apply chip sealing resin - Google Patents
How to apply chip sealing resinInfo
- Publication number
- JP3185673B2 JP3185673B2 JP19871596A JP19871596A JP3185673B2 JP 3185673 B2 JP3185673 B2 JP 3185673B2 JP 19871596 A JP19871596 A JP 19871596A JP 19871596 A JP19871596 A JP 19871596A JP 3185673 B2 JP3185673 B2 JP 3185673B2
- Authority
- JP
- Japan
- Prior art keywords
- resin
- chip
- substrate
- wall portion
- sealing resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/015—Manufacture or treatment of bond wires
- H10W72/01515—Forming coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/541—Dispositions of bond wires
- H10W72/5445—Dispositions of bond wires being orthogonal to a side surface of the chip, e.g. parallel arrangements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/884—Die-attach connectors and bond wires
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Description
【0001】[0001]
【発明の属する技術分野】本発明は、ディスペンサのノ
ズルから樹脂を注出しながら基板に搭載されたチップを
樹脂で封止するチップ封止用樹脂の塗布方法に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of applying a chip sealing resin for sealing a chip mounted on a substrate with a resin while discharging the resin from a nozzle of a dispenser.
【0002】[0002]
【従来の技術】基板に搭載されたチップを保護するため
に、チップを樹脂で封止することが行われる。以下、従
来のチップ封止用樹脂の塗布方法について説明する。2. Description of the Related Art In order to protect a chip mounted on a substrate, the chip is sealed with a resin. Hereinafter, a conventional method for applying a chip sealing resin will be described.
【0003】図4は、従来のチップ封止用樹脂の塗布方
法の説明図である。基板1にはチップ2がボンド3で接
着して搭載されている。基板1の上面の回路パターンの
電極4とチップ2の上面の電極はワイヤ5で接続されて
いる。6はディスペンサであって、チップ2に対して相
対的に水平移動させながら、ノズル7から樹脂8を注出
し、樹脂8でチップ2やワイヤ5を封止する。FIG. 4 is an explanatory view of a conventional method of applying a chip sealing resin. A chip 2 is mounted on a substrate 1 by bonding with a bond 3. The electrodes 4 of the circuit pattern on the upper surface of the substrate 1 and the electrodes on the upper surface of the chip 2 are connected by wires 5. Reference numeral 6 denotes a dispenser, which discharges a resin 8 from a nozzle 7 while horizontally moving relative to the chip 2, and seals the chip 2 and the wires 5 with the resin 8.
【0004】[0004]
【発明が解決しようとする課題】しかしながら上記従来
方法では、チップ2の側壁面の下部に気泡9が発生しや
すかった。この気泡9は、基板1の回路パターンを酸化
させやすく、またチップ2の内部抵抗による発熱で加熱
されることにより熱膨張して樹脂8にクラックを発生さ
せる。However, in the above-mentioned conventional method, bubbles 9 are easily generated at the lower portion of the side wall surface of the chip 2. These bubbles 9 easily oxidize the circuit pattern of the substrate 1, and are thermally expanded by the heat generated by the internal resistance of the chip 2, causing thermal expansion and causing cracks in the resin 8.
【0005】したがって本発明は、気泡の発生を解消で
きるチップ封止用樹脂の塗布方法を提供することを目的
とする。Accordingly, an object of the present invention is to provide a method for applying a chip sealing resin which can eliminate the generation of bubbles.
【0006】[0006]
【課題を解決するための手段】本発明は、チップの周囲
にチップから間隔をおいて樹脂を塗布してチップを包囲
する樹脂の外壁部を形成する第1工程と、チップと前記
外壁部の間に樹脂を注出することによりチップと前記外
壁部の間に樹脂を流し込む第2工程と、チップの上面に
樹脂を注出することによりチップを完全に封止する第3
工程と、からチップ封止用樹脂の塗布方法を構成した。According to the present invention, there is provided a first step of forming a resin outer wall surrounding a chip by applying a resin around the chip at an interval from the chip, and forming a resin outer wall surrounding the chip. A second step of pouring the resin between the chip and the outer wall by pouring the resin therebetween, and a third step of completely sealing the chip by pouring the resin onto the upper surface of the chip.
From the steps, a method for applying the chip sealing resin was configured.
【0007】[0007]
【発明の実施の形態】本発明によれば、第1工程でチッ
プの周囲に樹脂の外壁部を形成した後、チップと外壁部
の間に樹脂を流し込むようにしているので、チップの側
壁面の下部に気泡が生じるのを確実に防止し、続く第3
工程によりチップを樹脂で完全に封止することができ
る。According to the present invention, after the outer wall portion of the resin is formed around the chip in the first step, the resin is poured between the chip and the outer wall portion. To prevent air bubbles from forming at the bottom of the
Through the process, the chip can be completely sealed with the resin.
【0008】以下、本発明の一実施の形態を図面を参照
して説明する。図1は、本発明の一実施の形態のチップ
封止用樹脂の塗布装置の斜視図、図2は同基板の平面
図、図3は同チップ封止用樹脂の塗布工程図である。Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of an apparatus for applying a chip sealing resin according to an embodiment of the present invention, FIG. 2 is a plan view of the substrate, and FIG.
【0009】図1において、基板1の上面にはチップ2
がボンドで接着して搭載されている。基板1の電極4と
チップ2の上面の電極はワイヤ5で接続されている。6
はディスペンサであって、内部に貯溜された樹脂をノズ
ル7から注出する。ディスペンサ6はホルダ9に保持さ
れており、移動テーブル10が駆動することによりX方
向やY方向へ水平移動する。In FIG. 1, a chip 2 is provided on an upper surface of a substrate 1.
Is mounted by bonding with a bond. The electrodes 4 on the substrate 1 and the electrodes on the upper surface of the chip 2 are connected by wires 5. 6
Is a dispenser for discharging resin stored inside from a nozzle 7. The dispenser 6 is held by a holder 9 and moves horizontally in the X and Y directions when the moving table 10 is driven.
【0010】次に、図2および図3を参照して樹脂の塗
布方法を説明する。図2において、矢印はノズル7の移
動経路を示している。図示するように、樹脂8は外側か
ら中心側へ渦巻状に塗布されている。以下、塗布方法を
詳細に説明する。Next, a method of applying a resin will be described with reference to FIGS. In FIG. 2, arrows indicate the movement path of the nozzle 7. As shown, the resin 8 is spirally applied from the outside to the center. Hereinafter, the coating method will be described in detail.
【0011】まず、第1工程としてチップ2の周囲に樹
脂8を注出して塗布する。図3(a)はこの第1工程を
示している。3はチップ2を基板1に接着するボンドで
ある。図示するように、樹脂はチップ2から間隔Lをお
いてチップ2を包囲するように塗布され、これにより樹
脂の外壁部8aが形成される。この外壁部8aは、基板
1の電極4上に形成することが望ましく、これにより電
極4を確実に封止できる。First, as a first step, a resin 8 is poured around the chip 2 and applied. FIG. 3A shows this first step. Reference numeral 3 denotes a bond for bonding the chip 2 to the substrate 1. As shown in the figure, the resin is applied so as to surround the chip 2 at a distance L from the chip 2, thereby forming the outer wall portion 8a of the resin. The outer wall portion 8a is desirably formed on the electrode 4 of the substrate 1, so that the electrode 4 can be securely sealed.
【0012】この外壁部8aは樹脂の外形を整えるため
に塗布されるものである。図3(a)において鎖線で示
すように、単位面積当りの外壁部8aの塗布量が多い
と、樹脂は外方へ流出し(矢印a参照)、外形が崩れ
る。したがって外壁部8aはノズル7から比較的少量の
樹脂を注出しながら、小さく形成することが望ましい。
なおノズル7からの樹脂8の注出量は、ディスペンサ6
の内部の樹脂8の液面に加えられる圧力を加減したり、
ノズルの移動スピードを変化させるなどして自由に調整
できる。またこの第1工程におけるノズル7の移動スト
ロークは、後述する第2工程や第3工程よりもかなり長
いので、ノズル7の移動速度はなるべく速くしてタクト
タイムを短くすることが作業能率上望ましい。The outer wall 8a is applied to adjust the outer shape of the resin. As shown by a chain line in FIG. 3A, when the amount of application of the outer wall portion 8a per unit area is large, the resin flows out (see arrow a), and the outer shape is broken. Therefore, it is desirable to form the outer wall portion 8a small while pouring a relatively small amount of resin from the nozzle 7.
The dispensing amount of the resin 8 from the nozzle 7 is
The pressure applied to the liquid surface of the resin 8 inside the
It can be adjusted freely by changing the moving speed of the nozzle. Further, since the movement stroke of the nozzle 7 in the first step is considerably longer than the second step and the third step described later, it is desirable from the viewpoint of work efficiency that the movement speed of the nozzle 7 be as fast as possible to shorten the tact time.
【0013】次に第2工程の塗布を行う。図3(b)は
第2工程の塗布状態を示すものであって、第2工程では
チップ2と外壁部8aの間に樹脂8bを注出する。これ
によりチップ2と外壁部8aの間に樹脂8bを流し込
む。このようにチップ2と外壁部8aの間に樹脂8bを
流し込めば、チップ2と外壁部8aの間に気泡が生じる
のを確実に防止でき、またワイヤ5を確実に封止でき
る。この場合、ノズル7からの樹脂8bの単位面積当り
の注出量は第1工程の場合よりも多くし、これによりチ
ップ2と外壁部8aの間に充分に樹脂8bを流し込んで
気泡の発生を防止する。また樹脂8bの外方への流出は
先に塗布した外壁部8aが壁となって阻止され、外形を
崩すことはない。Next, the coating in the second step is performed. FIG. 3B shows a coating state in the second step. In the second step, the resin 8b is poured out between the chip 2 and the outer wall portion 8a. Thereby, the resin 8b is poured between the chip 2 and the outer wall portion 8a. If the resin 8b is poured between the chip 2 and the outer wall portion 8a as described above, it is possible to reliably prevent bubbles from being generated between the chip 2 and the outer wall portion 8a, and to reliably seal the wire 5. In this case, the amount of resin 8b to be discharged from the nozzle 7 per unit area is set to be larger than that in the first step, whereby the resin 8b is sufficiently poured between the chip 2 and the outer wall portion 8a to generate bubbles. To prevent. Further, the outflow of the resin 8b to the outside is prevented by the outer wall portion 8a applied previously serving as a wall, and the outer shape is not broken.
【0014】次に第3工程の塗布を行う。図3(c)は
第3工程の塗布状態を示すものであって、第3工程では
チップ2の上面に樹脂8cを注出し、これによりチップ
2を完全に封止する。以上により樹脂8の塗布は終了
し、続いて基板1はキュア炉へ送られ、樹脂8は加熱さ
れて硬化する。図3(d)はキュア後の状態を示すもの
であって、樹脂8a,8b,8cは完全に一体化して全
体として緩やかな山形状となり、チップ2、電極4、ワ
イヤ5を完全に封止している。Next, a third step of coating is performed. FIG. 3C shows the application state in the third step. In the third step, the resin 8c is poured out onto the upper surface of the chip 2, and the chip 2 is completely sealed. Thus, the application of the resin 8 is completed, the substrate 1 is then sent to a cure furnace, and the resin 8 is heated and hardened. FIG. 3D shows a state after curing, in which the resins 8a, 8b, and 8c are completely integrated to form a gentle mountain shape as a whole, and the chip 2, the electrode 4, and the wire 5 are completely sealed. are doing.
【0015】上記実施の形態では、ワイヤにより基板と
接続するチップを例にとって説明したが、チップとして
はフリップチップなどの他の品種のチップにも本発明は
適用できる。In the above embodiment, a chip connected to a substrate by wires has been described as an example. However, the present invention can be applied to other types of chips such as flip chips.
【0016】[0016]
【発明の効果】本発明によれば、第1工程でチップの周
囲に樹脂の外壁部を形成した後、チップと外壁部の間に
樹脂を流し込むようにしているので、チップの側壁面の
下部に気泡が生じるのを確実に防止し、続く第3工程に
よりチップを樹脂で完全に封止することができる。また
第1工程で外壁部を形成することにより樹脂の外形を整
え、形状のよい樹脂封止を行うことができる。According to the present invention, after the outer wall portion of the resin is formed around the chip in the first step, the resin is poured between the chip and the outer wall portion. Air bubbles are reliably prevented from being generated, and the chip can be completely sealed with resin in the subsequent third step. Further, by forming the outer wall portion in the first step, the outer shape of the resin can be adjusted, and the resin can be sealed with a good shape.
【図1】本発明の一実施の形態のチップ封止用樹脂の塗
布装置の斜視図FIG. 1 is a perspective view of an apparatus for applying a chip sealing resin according to an embodiment of the present invention.
【図2】本発明の一実施の形態の基板の平面図FIG. 2 is a plan view of a substrate according to an embodiment of the present invention.
【図3】本発明の一実施の形態のチップ封止用樹脂の塗
布工程図FIG. 3 is a view showing a coating process of a chip sealing resin according to an embodiment of the present invention;
【図4】従来のチップ封止用樹脂の塗布方法の説明図FIG. 4 is an explanatory view of a conventional method of applying a chip sealing resin.
1 基板 2 チップ 4 基板 5 ワイヤ 6 ディスペンサ 7 ノズル 8 樹脂 8a 外壁部 L 間隔 Reference Signs List 1 substrate 2 chip 4 substrate 5 wire 6 dispenser 7 nozzle 8 resin 8a outer wall L interval
フロントページの続き (56)参考文献 特開 平3−196646(JP,A) 特開 平8−196646(JP,A) (58)調査した分野(Int.Cl.7,DB名) H01L 21/56,23/28 Continuation of the front page (56) References JP-A-3-196646 (JP, A) JP-A-8-196646 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) H01L 21 / 56,23 / 28
Claims (1)
がら基板に搭載されたチップを樹脂で封止するチップ封
止用樹脂の塗布方法であって、チップの周囲にチップか
ら間隔をおいて樹脂を塗布してチップを包囲する樹脂の
外壁部を形成する第1工程と、チップと前記外壁部の間
に樹脂を注出することによりチップと前記外壁部の間に
樹脂を流し込む第2工程と、チップの上面に樹脂を注出
することによりチップを完全に封止する第3工程と、を
含むことを特徴とするチップ封止用樹脂の塗布方法。1. A method of applying a resin for chip sealing in which a chip mounted on a substrate is sealed with a resin while pouring the resin from a nozzle of a dispenser. A first step of forming a resin outer wall surrounding the chip by coating, and a second step of pouring the resin between the chip and the outer wall by pouring the resin between the chip and the outer wall; A third step of completely sealing the chip by pouring the resin onto the upper surface of the chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19871596A JP3185673B2 (en) | 1996-07-29 | 1996-07-29 | How to apply chip sealing resin |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19871596A JP3185673B2 (en) | 1996-07-29 | 1996-07-29 | How to apply chip sealing resin |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1050742A JPH1050742A (en) | 1998-02-20 |
| JP3185673B2 true JP3185673B2 (en) | 2001-07-11 |
Family
ID=16395810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19871596A Expired - Fee Related JP3185673B2 (en) | 1996-07-29 | 1996-07-29 | How to apply chip sealing resin |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3185673B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4562403B2 (en) * | 2004-02-26 | 2010-10-13 | 京セラ株式会社 | Manufacturing method of display device |
| US12464656B2 (en) | 2020-12-09 | 2025-11-04 | Hitachi Astemo, Ltd. | Electronic control device and method for manufacturing the same |
-
1996
- 1996-07-29 JP JP19871596A patent/JP3185673B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH1050742A (en) | 1998-02-20 |
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