Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JP3278655B2 - Magnetic recording media - Google Patents
[go: Go Back, main page]

JP3278655B2 - Magnetic recording media - Google Patents

Magnetic recording media

Info

Publication number
JP3278655B2
JP3278655B2 JP03517497A JP3517497A JP3278655B2 JP 3278655 B2 JP3278655 B2 JP 3278655B2 JP 03517497 A JP03517497 A JP 03517497A JP 3517497 A JP3517497 A JP 3517497A JP 3278655 B2 JP3278655 B2 JP 3278655B2
Authority
JP
Japan
Prior art keywords
magnetic
recording medium
layer
metal compound
magnetoresistive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP03517497A
Other languages
Japanese (ja)
Other versions
JPH10233313A (en
Inventor
広幸 秋永
ファン ロイ ビレム
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
National Institute of Advanced Industrial Science and Technology AIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute of Advanced Industrial Science and Technology AIST filed Critical National Institute of Advanced Industrial Science and Technology AIST
Priority to JP03517497A priority Critical patent/JP3278655B2/en
Publication of JPH10233313A publication Critical patent/JPH10233313A/en
Application granted granted Critical
Publication of JP3278655B2 publication Critical patent/JP3278655B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、新規な磁気抵抗記
録媒体、さらに詳しくいえば、これまで磁気記録媒体と
しては全く用いられていなかった材料から成る新規な形
式の磁気抵抗記録媒体に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a novel magnetoresistive recording medium, and more particularly, to a novel type of magnetoresistive recording medium made of a material which has never been used as a magnetic recording medium. is there.

【0002】[0002]

【従来の技術】これまで、磁気記録媒体としては、磁性
微粒子をバインダー中に分散して基板上に塗布した媒体
が主流であったが、近年バインダーを用いずに蒸着やス
パッタリングを用いて直接基板上に磁性膜を形成させた
媒体に漸次移行しつつある。この直接基板上にスパッタ
リングか真空蒸着によりフェライトや合金の薄膜を形成
させたものは、薄膜形磁気記録媒体と呼ばれ、最近要望
されている超高密度記録にはこれが使用されている。
2. Description of the Related Art Conventionally, as a magnetic recording medium, a medium in which magnetic fine particles are dispersed in a binder and coated on a substrate has been mainly used. The medium is gradually shifting to a medium having a magnetic film formed thereon. A thin film of ferrite or an alloy formed directly on the substrate by sputtering or vacuum evaporation is called a thin film type magnetic recording medium, which is used for ultra-high density recording recently required.

【0003】ところで、このように密度を増加させる手
段の一つとして薄膜の磁気抵抗効果を用いた磁気ヘッド
の開発がなされ、実用化がはかられている。このものは
従来の磁気記録に用いられていた電磁誘導型の磁気ヘッ
ドに比べ、格段の磁気感度を有し、記録密度を著しく向
上させることができるという利点がある。
Incidentally, as one of means for increasing the density, a magnetic head using a thin film magnetoresistance effect has been developed and put to practical use. This has an advantage that it has remarkable magnetic sensitivity and can remarkably improve the recording density as compared with an electromagnetic induction type magnetic head used for conventional magnetic recording.

【0004】このような磁気ヘッドは、Fe、Co、N
iなどの3d遷移金属元素又はそれらの合金から成る強
磁性金属とCuのような非磁性金属との多層膜構造体で
あって、非磁性金属層を介した強磁性金属層のスピン依
存の伝導率の変化、すなわち巨大磁気抵抗効果を利用し
た点で従来の電磁誘導型の磁気ヘッドと基本的に異なっ
ている。
[0004] Such a magnetic head is composed of Fe, Co, N
A multi-layer structure of a ferromagnetic metal composed of a 3d transition metal element such as i or an alloy thereof and a non-magnetic metal such as Cu, wherein the spin-dependent conduction of the ferromagnetic metal layer through the non-magnetic metal layer This is basically different from a conventional electromagnetic induction type magnetic head in that a change in rate, that is, a giant magnetoresistance effect is used.

【0005】他方、半導体上にエピタキシャル成長によ
り結晶を形成させて巨大磁気抵抗効果を示す構造体を製
造することや、半導体の電子の濃度を外部から制御しス
ピン依存伝導の変化を利用して、より高度の機能を有す
る磁気ヘッドを得ることも試みられているが、まだ実現
していない。
On the other hand, it is possible to produce a structure exhibiting a giant magnetoresistance effect by forming crystals on a semiconductor by epitaxial growth, or to control the electron concentration of the semiconductor from the outside and utilize the change in spin-dependent conduction. Attempts have been made to obtain magnetic heads having advanced functions, but they have not been realized yet.

【0006】[0006]

【発明が解決しようとする課題】本発明は、巨大磁気抵
抗効果を利用した全く新規な形式の磁気抵抗記録媒体を
提供することを目的としてなされたものである。
SUMMARY OF THE INVENTION An object of the present invention is to provide a completely new type of magnetoresistive recording medium utilizing the giant magnetoresistance effect.

【0007】[0007]

【課題を解決するための手段】本発明者らは、巨大磁気
抵抗効果を利用した磁気抵抗記録媒体を開発するために
鋭意研究を重ねた結果、従来の強磁性体/半導体多層膜
が明瞭な巨大磁気抵抗効果を示さなかったのはこれらが
単体同士の組み合せ、例えばFとSiの組み合せである
ため、それらの界面付近で単体同士の反応が起り、界面
構造に荒れを生じることに起因していること、したがっ
て金属化合物強磁性体と化合物半導体とを組み合わせて
安定な界面を形成させれば巨大磁気抵抗効果を示す構造
体が得られることを見出し、この知見に基づいて本発明
をなすに至った。
The present inventors have conducted intensive studies to develop a magnetoresistive recording medium utilizing the giant magnetoresistive effect, and as a result, the conventional ferromagnetic / semiconductor multilayer film has become clear. The reason why the giant magnetoresistance effect was not exhibited is that these are combinations of simple substances, for example, a combination of F and Si, so that a reaction between the simple substances occurs near their interface, and the interface structure is roughened. Therefore, the present inventors have found that a structure exhibiting a giant magnetoresistance effect can be obtained by forming a stable interface by combining a metal compound ferromagnetic material and a compound semiconductor, and based on this finding, led to the present invention. Was.

【0008】すなわち、本発明は、基板上に金属化合物
磁性体/化合物半導体/金属化合物磁性体の組み合せの
多層積層体を設けて成る磁気抵抗記録媒体を提供するも
のである。
That is, the present invention provides a magnetoresistive recording medium comprising a substrate and a multilayer laminate of a combination of a metal compound magnetic material / compound semiconductor / metal compound magnetic material provided on a substrate.

【0009】[0009]

【発明の実施の形態】次に、添付図面に従って本発明を
さらに詳細に説明する。図1は、本発明の磁気抵抗記録
媒体の構造の1例を示す拡大断面図であって、基板1上
に第一の金属化合物磁性体層2、化合物半導体3及び第
二の金属化合物磁性体層4が順次積層されている。
Next, the present invention will be described in more detail with reference to the accompanying drawings. FIG. 1 is an enlarged sectional view showing an example of the structure of a magnetoresistive recording medium of the present invention, in which a first metal compound magnetic layer 2, a compound semiconductor 3, and a second metal compound magnetic material are provided on a substrate 1. Layers 4 are sequentially stacked.

【0010】本発明磁気抵抗記録媒体における基板とし
ては、従来一般に磁気記録媒体の基板として用いられて
いる非磁性基体材料の中から任意に選択することができ
る。すなわち、ビデオテープやビデオディスクの場合は
適度なたわみ性及び硬さを有するプラスチック、例えば
ポリエチレンテレフタレート(PET)、ポリエチレン
ナフタレート(PEN)、ポリフェニレンスルフィド
(PPS)、ポリエーテルエーテルケトン(PEE
K)、ポリイミド、ポリイミンイミド、ポリカーボネー
ト(PC)、アラミド樹脂などを、またビデオディスク
の場合は、アルミニウム、ケイ素、Al−Mg合金など
を用いることができるが、各層をエピタキシャル成長に
より形成させる場合には特にGaAs基板が好適であ
る。これらの基板には、従来の磁気記録層の場合と同
様、下地層例えばケイ素酸化物SiOx(ただし1.8
0≦x≦1.95)の層を設けることができる。
The substrate in the magnetoresistive recording medium of the present invention can be arbitrarily selected from non-magnetic base materials conventionally used as substrates for magnetic recording media. That is, in the case of video tapes and video discs, plastics having appropriate flexibility and hardness, for example, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyphenylene sulfide (PPS), polyether ether ketone (PEE)
K), polyimide, polyimine imide, polycarbonate (PC), aramid resin, and the like, and in the case of a video disc, aluminum, silicon, an Al—Mg alloy, and the like. Particularly, when each layer is formed by epitaxial growth, GaAs substrates are preferred. As in the case of the conventional magnetic recording layer, these substrates are provided with an underlayer, for example, a silicon oxide SiO x (where 1.8 is used).
0 ≦ x ≦ 1.95).

【0011】本発明の磁気抵抗記録層は、基本的には金
属化合物磁性体/化合物半導体/金属化合物磁性体の組
み合せの3層構造から構成されるが、所望に応じさらに
層を増加させることもできる。この金属化合物磁性体と
しては、MnGa、MnAlのような周期表3B族元素
と7A族元素との金属化合物が用いられ、また化合物半
導体としては、GaAs、GaSb、ZnSe、ZnT
e、CdSe、CdTe、AlAs、AlSb、InA
s、InSb、PbSe、PbTe、Ga2Se3、Al
2Se3のような周期表2B族元素又は3B族元素と5B
族及び6B族元素との化合物が用いられる。
The magnetoresistive recording layer of the present invention is basically composed of a three-layer structure of a combination of a metal compound magnetic material / compound semiconductor / metal compound magnetic material. it can. As the metal compound magnetic material, a metal compound of a group 3B element of the periodic table and a group 7A element such as MnGa and MnAl is used, and as a compound semiconductor, GaAs, GaSb, ZnSe, ZnT
e, CdSe, CdTe, AlAs, AlSb, InA
s, InSb, PbSe, PbTe, Ga 2 Se 3 , Al
Periodic Table 2B or 3B element such as 2 Se 3 and 5B
Compounds with Group 6B and Group 6B elements are used.

【0012】本発明の磁気抵抗記録層における第一の金
属化合物磁性体層の厚さは、通常10〜100nm、好
ましくは15〜25nm、化合物半導体層の厚さは通常
1〜100モノレーヤー(ML)、好ましくは2〜30
ML、第二の金属化合物磁性体層は通常5〜50nm、
好ましくは7〜20nmの範囲で選ばれる。ここでモノ
レーヤー(ML)とは、各層を構成する材料の1原子層
の厚みを基準とした単位である。
The thickness of the first metal compound magnetic layer in the magnetoresistive recording layer of the present invention is usually 10 to 100 nm, preferably 15 to 25 nm, and the thickness of the compound semiconductor layer is usually 1 to 100 monolayer (ML). , Preferably 2 to 30
ML, the second metal compound magnetic layer is usually 5 to 50 nm,
Preferably, it is selected in the range of 7 to 20 nm. Here, the monolayer (ML) is a unit based on the thickness of one atomic layer of the material constituting each layer.

【0013】本発明の磁気抵抗記録媒体は、エピタキシ
ー法によって製造するのが有利である。すなわち、基板
平面上に、先ず金属化合物磁性体をエピタキシャル成長
させて10〜100nmの厚さの磁性体層を形成させた
のち、その上に化合物半導体を1〜100MLの厚さで
形成させ、最後に金属化合物磁性体を5〜50nmの厚
さに形成させ、3層のサンドイッチ構造とする。
The magnetoresistive recording medium of the present invention is advantageously produced by an epitaxy method. That is, first, a metal compound magnetic material is epitaxially grown on a substrate plane to form a magnetic material layer having a thickness of 10 to 100 nm, and then a compound semiconductor is formed thereon with a thickness of 1 to 100 ML. A metal compound magnetic material is formed to a thickness of 5 to 50 nm to form a three-layer sandwich structure.

【0014】このようにして形成された磁気抵抗記録媒
体は、金属化合物磁性体層の磁化の方向に依存して電気
抵抗が変化するという巨大磁気抵抗効果を示し、その変
化の割合は約1%という十分に大きい値となる。また、
この変化は急激に起る上に、経時的変化がないことか
ら、この巨大磁気抵抗効果を利用して、磁気的な情報の
記録を行うことができる。なお、本発明の磁気抵抗記録
媒体において、第一の金属化合物磁性体と第二の金属化
合物磁性体とが、同一の元素の組み合せから成る場合に
は、エピタキシャル成長に際し、一方の元素の割合を制
御することによって保磁力を変えることができるし、ま
た各層の成膜条件例えば基板や原料の温度を制御するこ
とにより各層の厚さを任意に変えることができる。この
ように、本発明の磁気抵抗記録媒体は、従来の電磁誘導
型の記録媒体と同様、情報担体として、あるいは磁気ヘ
ッドとして利用することができる。
The magnetoresistive recording medium thus formed exhibits a giant magnetoresistive effect in which the electric resistance changes depending on the direction of magnetization of the metal compound magnetic layer, and the rate of the change is about 1%. That is a sufficiently large value. Also,
Since this change occurs rapidly and does not change with time, magnetic information can be recorded using this giant magnetoresistance effect. In the magnetoresistive recording medium of the present invention, when the first metal compound magnetic material and the second metal compound magnetic material are composed of the same combination of elements, the ratio of one element is controlled during epitaxial growth. By doing so, the coercive force can be changed, and the thickness of each layer can be arbitrarily changed by controlling the film forming conditions of each layer, for example, the temperature of the substrate and the raw material. As described above, the magnetoresistive recording medium of the present invention can be used as an information carrier or a magnetic head, like the conventional electromagnetic induction type recording medium.

【0015】[0015]

【実施例】次に、実施例により本発明をさらに詳細に説
明する。
Next, the present invention will be described in more detail with reference to examples.

【0016】実施例1 UHVロード・ロックシステムにより連結されている2
個の分子線エピタキシー(MBE)装置を用い、GaA
sとMnGaとをエピタキシャル成長させることにより
GaAs(001)基板上にMnGa/GaAs/Mn
Gaの3層構造を形成させた。この際、Mn供給源のフ
ラックス組成を変えることによって、第一の金属化合物
磁性体層をMn54Ga46、第二の金属化合物磁性体層を
Mn60Ga40の組成に調整した。このようにしてGaA
s基板上に厚さ20nmのMn54Ga46層、厚さ12M
LのGaAs層及び厚さ10nmのMn60Ga40層が順
次積層したサンドイッチ構造をもつ磁気抵抗記録媒体が
得られた。このものについて、室温におけるマグネチッ
ク−サーキュラー−ダイクロイズム(MCD)曲線を測
定し、その結果を図2に示す。このMCDは以下の式の
θにより定義される。
Example 1 2 linked by UHV load lock system
GaAs using molecular beam epitaxy (MBE)
s and MnGa are epitaxially grown to form MnGa / GaAs / Mn on a GaAs (001) substrate.
A three-layer structure of Ga was formed. At this time, the composition of the first metal compound magnetic layer was adjusted to Mn 54 Ga 46 and the composition of the second metal compound magnetic layer was adjusted to Mn 60 Ga 40 by changing the flux composition of the Mn supply source. Thus, the GaAs
Mn 54 Ga 46 layer of 20 nm thickness on s substrate, 12 M thickness
A magnetoresistive recording medium having a sandwich structure in which an L GaAs layer and a 10 nm thick Mn 60 Ga 40 layer were sequentially laminated was obtained. For this, a magnetic-circular-dichroism (MCD) curve at room temperature was measured, and the result is shown in FIG. This MCD is defined by θ in the following equation.

【0017】[0017]

【数1】 (ただし、R+及びR-は、それぞれσ+及びσ-偏光に対
する反射率である)。
(Equation 1) (Where R + and R - are the reflectivity for σ + and σ - polarized light, respectively).

【0018】また、このものの室温における電流を試料
表面に平行に通したときの抵抗の磁場変化を測定し、図
3に示す。この図の縦軸は各磁場での抵抗値R(H)と
零磁場の抵抗値R(0)との差を、零磁場の抵抗値R
(0)で除した磁気抵抗値(%)であり、横軸は磁場
(単位T:テスラ)である。この図から明らかなよう
に、白及び黒の矢印で示した第一の金属化合物磁性層と
第二の金属化合物磁性層の磁化が反平行のとき、抵抗の
値が約1%小さくなり、また0T及び0.5Tで観測さ
れる抵抗の変化は非常に急激である。
Further, a change in the magnetic field of the resistance when a current at room temperature was passed in parallel to the sample surface was measured and is shown in FIG. The vertical axis in this figure indicates the difference between the resistance value R (H) at each magnetic field and the resistance value R (0) at zero magnetic field, and the resistance value R at zero magnetic field.
The magnetic resistance (%) divided by (0), and the horizontal axis is the magnetic field (unit T: Tesla). As is clear from this figure, when the magnetizations of the first metal compound magnetic layer and the second metal compound magnetic layer indicated by white and black arrows are antiparallel, the resistance value decreases by about 1%, and The change in resistance observed at 0T and 0.5T is very sharp.

【0019】実施例2GaAs層の厚さを16MLにし
た以外は、全く実施例1と同様にして、磁気抵抗記録媒
体を製造した。このもののMCD履歴曲線を図4に示
す。
Example 2 A magnetoresistive recording medium was manufactured in the same manner as in Example 1, except that the thickness of the GaAs layer was changed to 16 ML. The MCD hysteresis curve of this is shown in FIG.

【0020】[0020]

【発明の効果】本発明は、これまで知られていなかった
構造の磁気抵抗記録媒体であって、経時変化がなくかつ
磁場変化に敏感に応答するので、高密度記録用として好
適である。
The present invention is a magnetoresistive recording medium having a structure which has not been known so far, and is suitable for high-density recording because it does not change with time and responds sensitively to a magnetic field change.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明の磁気抵抗記録媒体の1例の拡大断面
図。
FIG. 1 is an enlarged sectional view of one example of a magnetoresistive recording medium of the present invention.

【図2】 実施例1で得た試料のMCD履歴曲線を示す
グラフ。
FIG. 2 is a graph showing an MCD hysteresis curve of the sample obtained in Example 1.

【図3】 実施例1で得た試料の抵抗の磁場変化を示す
グラフ。
FIG. 3 is a graph showing a change in the magnetic field of the resistance of the sample obtained in Example 1.

【図4】 実施例2で得た試料のMCD履歴曲線を示す
グラフ。
FIG. 4 is a graph showing an MCD hysteresis curve of the sample obtained in Example 2.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平8−180477(JP,A) 特開 平10−173253(JP,A) ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-8-180479 (JP, A) JP-A-10-173253 (JP, A)

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 基板上に金属化合物磁性体/化合物半導
体/金属化合物磁性体の組み合せの多層積層体を設けて
成る磁気抵抗記録媒体。
1. A magnetoresistive recording medium comprising a substrate and a multilayer laminate of a combination of a metal compound magnetic material / compound semiconductor / metal compound magnetic material provided on a substrate.
【請求項2】 金属化合物磁性体がMnGaである請求
項1記載の磁気抵抗記録媒体。
2. The magnetoresistive recording medium according to claim 1, wherein the metal compound magnetic material is MnGa.
【請求項3】 化合物半導体がGaAsである請求項1
又は2記載の磁気抵抗記録媒体。
3. The compound semiconductor according to claim 1, wherein the compound semiconductor is GaAs.
Or the magnetoresistive recording medium according to 2.
【請求項4】 金属化合物磁性体として同じ元素から成
り組成の異なる2種の金属化合物を用いる請求項1、2
又は3記載の磁気抵抗記録媒体。
4. A metal compound magnetic material comprising two kinds of metal compounds composed of the same element and having different compositions.
Or a magnetoresistive recording medium according to 3.
JP03517497A 1997-02-19 1997-02-19 Magnetic recording media Expired - Lifetime JP3278655B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03517497A JP3278655B2 (en) 1997-02-19 1997-02-19 Magnetic recording media

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03517497A JP3278655B2 (en) 1997-02-19 1997-02-19 Magnetic recording media

Publications (2)

Publication Number Publication Date
JPH10233313A JPH10233313A (en) 1998-09-02
JP3278655B2 true JP3278655B2 (en) 2002-04-30

Family

ID=12434499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP03517497A Expired - Lifetime JP3278655B2 (en) 1997-02-19 1997-02-19 Magnetic recording media

Country Status (1)

Country Link
JP (1) JP3278655B2 (en)

Also Published As

Publication number Publication date
JPH10233313A (en) 1998-09-02

Similar Documents

Publication Publication Date Title
US5688380A (en) Method of producing giant magnetoresistive material film and magnetic head
US5872502A (en) Magnetoresistance effect film and production process thereof
US6455178B1 (en) Exchange coupling film and magnetoresistive element
JP2778626B2 (en) Magnetoresistance effect film, method of manufacturing the same, and magnetoresistance effect element
US5661449A (en) Magnetic multilayer film, method for making, and magnetoresistance device
US5462795A (en) Magnetoresistance effect element
EP0814519B1 (en) Magnetoresistive effect device, process for fabricating the same, and magnetic head produced using the same
JPH05266436A (en) Magnetoresistive sensor
US5796560A (en) Magnetoresistive head
US20100188771A1 (en) Magnetoresistive Magnetic Head
US5514469A (en) Magnetoresistance effect element
US5919580A (en) Spin valve device containing a Cr-rich antiferromagnetic pinning layer
US6165329A (en) Multilayer magnetic transducer and structure having a high magnetoresistance and process for the production of the structure
Xi et al. Annealing effect on exchange bias in Ni/sub 81/Fe/sub 19//Cr/sub 50/Mn/sub 50/bilayers
US5432661A (en) Magnetoresistance effect element
JP3278655B2 (en) Magnetic recording media
Tanaka et al. Top, bottom, and dual spin valve recording heads with PdPtMn antiferromagnets
US5591532A (en) Giant magnetoresistance single film alloys
JPH0936455A (en) Magnetoresistance effect element
JPH0923031A (en) Magnetoresistance effect multilayered film
JPH06310329A (en) Multilayer magnetoresistive film and magnetic head
US6001430A (en) Magnetoresistance effect film and production process thereof
JP2543374B2 (en) Magnetic artificial lattice film
JPH06260337A (en) Multilayer magnetoresistive film and magnetic head
JPH104013A (en) Magnetoresistive element and method of manufacturing the same

Legal Events

Date Code Title Description
S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

EXPY Cancellation because of completion of term