JP3312897B2 - Liquid absorption device from liquid tank overflow box - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid tank, and more particularly to a liquid tank connected to a filtering device for sucking a liquid stored in the liquid tank and filtering impurities in the liquid tank. The liquid flowing into the overflow box of a liquid tank having one or more overflow boxes for causing impurities floating in the upper layer in the liquid stored in the tank to overflow from the weir together with the liquid is absorbed for filtration. To a liquid absorbing device.

For example, an article processing apparatus which performs processing with a liquid, particularly an article processing apparatus using a liquid which requires filtration of a processing liquid, such as an article processing apparatus such as a plating apparatus, a photographic developing apparatus, and a dyeing apparatus; The present invention relates to a device for absorbing liquid from an overflow box of a liquid tank that can be employed in a liquid processing device that filters a liquid such as water without performing a process.

[0003]

2. Description of the Related Art Treating an article with a treatment liquid involves:
2. Description of the Related Art As is known in various fields, such as a plating process for an article with a plating solution, a photographic developing process with a developing solution, a dyeing process of a cloth or the like with a dyeing solution, and a washing process for an article.

[0004] In addition, the article treatment with the treatment liquid is performed by various methods such as spraying the liquid on the article, and bringing the liquid into contact with the article. One of the typical methods is to put the treatment liquid into the liquid tank. The object to be treated is stored and immersed in the processing liquid in the liquid tank while controlling the liquid quality or liquid composition of the liquid, the amount of the processing liquid in the liquid tank, the amount of filtration, the temperature, etc. as required. A case in which the processing is performed can be given. The above-mentioned plating, photographic development, dyeing and the like are usually carried out by this method.

[0005] Such a process involving immersion may be performed using only one liquid tank, but in many cases, a plurality of liquid tanks are employed in order to process a large number of articles or to process many kinds of articles. .

In any case, in a liquid-based article processing apparatus which employs an article processing liquid tank, the processing liquid in the liquid tank may be used to carry impurities and the processing liquid by the article to be processed during repeated use. Impurities such as impurities generated due to deterioration of the processing liquid such as deterioration and impurities that may fall into the liquid in the liquid tank from the outside increase, so this processing liquid is used while being filtered by a filtration device including a pump and a filter. It is widely done. As a typical example, a case where the treatment liquid is filtered by a circulation filtration device including a liquid circulation pump and a filter, and the treatment liquid after the filtration is returned to the liquid tank and reused.

[0007] Further, a process for removing impurities in a liquid without carrying out article processing is also performed. A typical example thereof is a filtration treatment of water.

[0008] The impurities in the liquid in the liquid tank move in the liquid along a complicated flow, but generally float from the upper part to the middle part in the liquid in order from the one having the lower specific gravity to the one having the higher specific gravity. It tends to be divided into those that have a large specific gravity and float in the lower part of the liquid, and those that settle at the bottom of the liquid tank or in the vicinity thereof. In many cases, aeration is performed by blowing air into the liquid from the bottom of the liquid tank. In this case, impurities having an intermediate specific gravity are affected by the upward flow of the air into the liquid tank. Some diffuse and float in an elliptical shape between the top and bottom.

Therefore, when filtering the liquid, the liquid in the liquid tank is suctioned from the bottom of the liquid tank by a pump, and an overflow box is installed on the upper part of the liquid tank via a weir for liquid overflow. At the same time, a suspended matter is caused to flow in, a liquid is sucked from the box by a pump, and the sucked liquid is filtered by a filter.

[0010] Further, the whole of the liquid stored in the liquid tank is also subjected to replacement filtration using a replacement liquid tank separately prepared in an appropriate cycle.

FIG. 16 shows a conventional example (an example of a plating solution tank). In FIGS. 16A and 16B, 10 ′
Is a liquid tank, B1 ', B2' and B3 'are overflow boxes attached to the liquid tank, 21', 22 'and 23' are rectangular weirs facing the overflow box, and V 'is a conventional one installed at the bottom of the liquid tank. It is a type foot valve.

In FIG. 16A, an overflow box B1 'is a groove-shaped box, and the processing liquid L' flowing therein flows into a box B2 '. A liquid inlet Lb is provided at the bottom of the overflow box B2 'shown in FIG. 16A, and is connected to the liquid inlet of the liquid filter F via valves v1' and v2 'and a pump P. Have been. The liquid tank foot valve V 'is connected to the liquid inlet of the liquid filter F via valves v7' and v2 'and a pump P. The liquid discharge port of the filter F is connected to a heat exchanger H for liquid heating or liquid cooling via valves v3 ', v4' and v5 ', and further to a valve v6'.
Is connected to the liquid return port 100 'to the liquid tank 10' through a valve V3 ', and between the valves v3' and v4 'to the liquid discharge port 511' to the drainage tank 511 via the valve V8 '. Piping is connected. At the bottom of the refilling tank 511, a liquid suction foot valve 511v is installed, and this is connected to the liquid suction port of the pump P via a valve v9 '.

The bottom of the overflow box B3 'shown in FIG. 16 (B) is provided with a liquid passage Lb' via a valve v1 ", and a foot valve V 'in the liquid tank is connected to a valve v1.
7 "via the same valve v as shown in FIG.
It is connected to the pipe to 2 '. Figure 1 for other points
6 (A) is the same as the liquid circuit.

The circuit for pre-coating the filter aid in the filter is not shown.

The opening and closing of each valve is as follows. Valve For normal drainage filtration For drainage filtration During plating process When transferring liquid to tank 511 When returning liquid from tank 511 to tank 10 'Pump operation Operation operation v1' Open Open Close v2 'Open Open Close v3 'Open Open Open v4' Open Close Open v5 'Open Close Open v6' Open Close Open v7 'Open Open Close v1 "Open Open Close v7" Open Open Close v8' Close Open Close v9 'Close Close Open When the amount of liquid in the overflow box B2 '(B3') decreases and the inside of the overflow box B2 '(B3') becomes dry due to the replacement filtration, the valve v1 '( v1 ") is closed.

[0016]

However, liquid absorption by a pump for liquid filtration from an overflow box in a conventional liquid tank is, for example, as shown in FIG.
The operation is performed from the liquid inlet Lb (Lb ') provided at the bottom of the overflow box B2' (B3 ') through the on-off valve V1' (V1 ").
Since the liquid is sucked downward from (Lb ′), impurities in the liquid or miscellaneous articles that may fall into the liquid are clogged in the liquid passage port or the on-off valve, and the liquid flow rate decreases, In such a case, the liquid passage or the on-off valve may be blocked so that liquid cannot be passed. When such a situation occurs, the liquid filtration is significantly hindered.

In order to perform appropriate filtration of the liquid in the liquid tank,
Basically, the amount of liquid absorbed from the bottom of the liquid layer and the amount of liquid absorbed from inside the overflow box are set in advance according to the capabilities of the filter and the pump.

However, if the ratio of the amount of liquid absorbed by the pump from the inside of the overflow box to the amount of liquid flowing into the overflow box from the liquid tank through the weir is relatively low, the amount of liquid eventually reaches over time. The liquid level in the layer and the liquid level in the box have the same height, and only the liquid flows into the box without a drop.

In a state in which the liquid does not flow into the overflow box due to the head as described above, the flow velocity of the liquid flowing from the liquid tank through the weir to the overflow box is extremely reduced, and the overflow of impurities in the liquid is reduced. The flow into the box is also reduced, which impedes liquid filtration.

Conversely, if the ratio of the amount of liquid absorbed by the pump from the inside of the overflow tank to the amount of liquid flowing into the overflow box from the liquid tank through the weir is relatively large, eventually the amount of liquid absorbed by the time elapses. The inside of the overflow box is in a dry state, and the suction of air which is most to be avoided by the pump and the filter is generated, so that filtration becomes impossible.

Therefore, it is necessary to maintain the liquid level of the liquid in the overflow box at an appropriate drop relative to the liquid level in the liquid tank.

As a simple general method for maintaining the appropriate head, as shown in the conventional example of FIG. 16, an on-off valve V1 '(V1') connected to the liquid passage Lb (Lb ') at the bottom of the overflow box. An example can be given by controlling the amount of aspirated liquid from the box by adjusting the opening degree of ") and visually observing the liquid level in the overflow box.

However, when the liquid tank becomes large, the opening degree of the on-off valve V1 '(V1 ") located below the overflow box B2' (B3 ') is adjusted, and the liquid is looked into from above the overflow box. Visual observation of the liquid level in the box cannot be performed at the same time, and the visual observation of the liquid level is performed by an operator climbing a work deck normally provided near the upper end opening of the overflow box, and an on-off valve V1 '
The adjustment of the opening of (V1 ") must be performed by the operator descending from the deck. This operation of adjusting the liquid level by one operator is extremely labor-intensive and time-consuming. Attempting to solve this would require two workers, both above and below the deck, which would increase labor costs.

Accordingly, the present invention relates to a liquid tank having one or more overflow boxes for causing impurities floating in an upper layer in a liquid stored in the liquid tank to overflow together with the liquid from the weir section. A liquid suction device from a liquid tank overflow box that absorbs an inflowing liquid for a filtration treatment, wherein the liquid in the overflow box is clogged with impurities or the like at a bottom liquid inlet of an overflow box of a conventional liquid tank. Eliminates problems and allows smooth extraction and removal for filtration and replacement filtration.Also, during filtration, the liquid level in the overflow box is easily and easily adjusted while visually observing the liquid level in the box. Level can be maintained at an appropriate drop with respect to the liquid level in the liquid tank. Et even when recovering the liquid, and to provide a liquid absorbing apparatus from easily liquid tank overflow box prevented air sucked into the pump and filter of the filtration device from the overflow box.

[0025]

According to the present invention, there is provided a liquid tank having one or more overflow boxes for causing impurities floating in an upper layer in a liquid stored in the liquid tank to overflow together with the liquid from a weir section. A suction head for sucking a liquid flowing from the bottom of the overflow box for the filtration, wherein the suction head sucks the liquid flowing into the overflow box for filtration. A liquid suction device from a liquid tank overflow box that includes a liquid suction pipe extending upward from a suction head and out of the box and having an open / close valve near an upper end opening of the box.

According to the liquid absorbing device of the present invention, the liquid in the overflow box can be taken out upward and filtered by the suction head provided at the bottom of the box and the liquid suction pipe connected to the suction head and extending upward. it can.

Regarding the liquid in the overflow box,
In this way, the suction head and the suction pipe connected to it and extending upward can be suctioned and taken out upward instead of the liquid passage port at the bottom of the overflow box as in the conventional case. There is no room for the problem of clogging due to impurities in the liquid or the like, and it can be smoothly taken out of the box and filtered.

The liquid level in the overflow box can be adjusted by only one worker by using an open / close valve near the upper end opening of the box in a suction pipe connected to the suction head at the bottom of the box and extending upward. By performing the operation, the amount of liquid absorbed from the box can be controlled, and the liquid level in the box can be easily and easily adjusted while visually observing the liquid level in the box from substantially the same position as the on-off valve.

When the liquid in the liquid tank is drained from the overflow box in the filtration treatment, the drought in the overflow box that causes unacceptable air suction into the pump and the filter is monitored from above, and air suction occurs. Before closing, the on-off valve can be closed to avoid air suction.

Thus, the filtration treatment or the replacement filtration treatment of the liquid in the liquid tank can be performed smoothly without any trouble.

The overflow box may be provided with a lid. The on-off valve in the liquid suction pipe extending upward from the suction head may be provided outside the overflow box or may be provided in a space above the liquid level in the overflow box. In any case, it is provided near the upper end opening of the overflow box so that the inside of the overflow box can be seen from a position near the valve.

When a plurality of overflow boxes communicating with each other are provided, a suction head common to these overflow boxes, in other words, a suction head serving also as a suction head for each of the plurality of overflow boxes communicating with each other, is provided in any of the overflow boxes. And so on.

When the suction head installed in the overflow box is connected to a centrifugal pump for sucking liquid for liquid filtration, the diameter of each suction hole of the suction head is determined by the size of the impeller of the centrifugal pump. It is desirable to keep it equal to or smaller than the blade height. By setting the diameter of each liquid suction hole in this way, a part of the article to be treated that may fall into the overflow box or miscellaneous articles brought in from the outside is sucked into the centrifugal pump and the liquid absorption amount is set. Can be suppressed, and the pump can be prevented from being broken down due to, for example, the impeller blade biting.

The suction head installed at the bottom of the overflow box extends along the longitudinal direction of the inside bottom of the overflow box so that impurities can be uniformly and smoothly sucked from the entirety of the overflow box as much as possible. It is desirable that the liquid suction holes of the suction head are dispersed and formed toward the bottom surface of the box so that a uniform amount of liquid can be sucked at each part extending in the longitudinal direction of the suction head.

The apparatus for absorbing liquid from a liquid tank overflow box according to the present invention can be applied to an overflow box of an article processing liquid tank in an article processing apparatus using various liquids.
For example, it can be applied to an overflow box of an article processing solution tank in a plating apparatus using an article plating solution, a dyeing apparatus using a dyeing solution, a developing apparatus using a photographic developer, an article washing apparatus, etc., and a liquid such as water without article processing. Can also be applied to an overflow box of a liquid tank of a liquid processing apparatus for performing a filtration treatment.

[0036]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a plating apparatus which is an example of a liquid-based article processing apparatus which employs an apparatus for absorbing liquid from a liquid tank overflow box according to the present invention.

The plating apparatus shown in FIG. 1 includes five article processing liquid tanks 11, 12, 13, 14, and 15.
Here, each liquid tank is a plating liquid tank for plating an article. Each liquid tank may contain a different amount of plating solution, for example, a different amount of plating solution in each tank of the same liquid quality, but each liquid tank here has a capacity for containing the same amount of plating solution. Have.

These five liquid tanks are divided into three groups. That is, a first group including one liquid tank 11, a second group including two liquid tanks 12 and 13, and a third group including liquid tanks 14 and 15. Each liquid tank stores a predetermined plating solution L.

In the figure, the pretreatment washing tank 1 is located on the left side of the liquid tank 11.
The cleaning water W is stored in the cleaning water 6 so that the plating object can be cleaned as needed before the plating process. On the left side of the liquid tank 16, a work deck D1 is provided.

A work deck D2 is provided between the liquid tanks 11 and 12, a work deck D3 is provided between the liquid tanks 13 and 14, and a work deck D4 is provided outside the liquid tank 15.

Each liquid tank has substantially the same structure. The structure of the liquid tank will be described with reference to FIGS. 1 to 4 taking the liquid tanks 12 and 13 as examples. FIG. 2 is an enlarged plan view of the liquid tanks 12 and 13 and its peripheral part, and FIG. 3 is an enlarged side view of the liquid tank 12 and its peripheral part. Note that FIG. 3 also shows an exchange device 51, which will be described later. FIG.
3 is a perspective view of a part of the liquid tank 12. FIG.

Each of the liquid tanks is rectangular in a plan view (when viewed from a plane), and a liquid overflow box B1 is provided along one long side of the rectangle, and a liquid overflow box B2 is provided along one short side of the rectangle. have.

The box B1 is formed shallower than the box B2, and the box B2 is formed deeper than the box B1. The box B1 communicates with the upper part of the box B2 so that the liquid overflowing here flows into the box B2, and the bottom of the box B1 is inclined downward toward the box B2. Box B1
Does not necessarily have to be so inclined.

The box B1 is installed via a weir 21 provided along the long side direction of the liquid tank.
Reference numeral 2 is provided via a weir 22 provided along the short side direction of the liquid tank. The weir portions 21 and 22 will be described later in detail.

As shown in FIG. 2, FIG. 3 and FIG.
An inner bottom groove 102 is integrally formed at one position on the peripheral edge of the inner bottom 101 of the liquid tank. The inner bottom groove 102 here extends along the short side direction of one side of the liquid tank over the length of the short side.

Anode busbars A are installed parallel to each other above the longitudinal sides of the liquid tank, and a cathode busbar C is installed parallel to the anode busbars above the central part of the liquid tank. Have been.

In plating the article, for example, as shown in FIGS. 2, 3 and 5, one or more conductive hangers H (see FIG. 5 (C)) are placed on a cathode bus bar C at a predetermined interval. And a conductive anode case CS (see FIG. 5 (A)) containing an anode material m ′ is hung at a predetermined position of each anode bus bar A and immersed in the plating solution L, thereby plating the articles a1, a2. Hook member S
(See FIG. 5 (C)). The hook member S may be hung on a hanger H and immersed in the plating solution L together with the articles a1 and a2. FIG.
CSb shown in (B) is an anode bag made of a filter cloth, which is attached to the anode case CS in order to prevent impurities generated on the anode side from leaking into the plating solution.

There are many plating treatments for the object to be treated, such as plating of copper, nickel, zinc, tin and their alloys. In the case of nickel plating, for example, a plating solution is used. The case where L is a nickel plating solution, the anode case CS is a corrosion-resistant titanium cage, and a nickel chip is accommodated in the anode case m ′ as the anode material m ′ can be exemplified.

An aeration device 103 is provided on the inner bottom 101 of each liquid tank. This is a structure in which a perforated pipe for air ejection is connected and connected to a compressed air supply device (not shown).
03a is ejected to perform so-called aeration. The treatment liquid L is agitated by this aeration, so that the liquid quality is uniform in each part in terms of the liquid composition and the like, and the liquid temperature is also uniform. In addition, impurities in the liquid are appropriately moved so as to be smoothly sucked from each part of the processing liquid in circulating filtration described below. Further, by aeration, the articles a1,
Adhesion of impurities in the liquid to a2 is also suppressed.

The first suction head 104 shown in FIG. 6 is installed in the inner bottom groove 102 of each liquid layer so as to extend in the longitudinal direction of the inner bottom groove 102. The suction head 104 is a tubular body having a pipe connection port 104a at one end and a closed end at the other end, and is provided with a plurality of liquid suction holes 104b.

An air-blocking wall plate 105 is provided between the first suction head 104 and the aeration device 103. The air blocking wall plate 105 is slightly lifted from the bottom of the inner bottom groove 102 by the support piece 105a, so that the liquid can flow under the wall plate 105. A support plate 105b is provided between the support piece 105a and the air blocking wall plate 105, and supports the first suction head 104.

The first suction head 104 is also slightly lifted from the bottom of the inner bottom groove 102 by the support piece 105a, so that the liquid can flow under the suction head 104.

Liquid suction hole 104b of first suction head 104
Is within an angle range θ1 of 90 degrees or less from the lower end of the suction head to the side opposite to the air blocking wall plate 105 around the central axis in the longitudinal direction of the suction head, and
The center angle θ (θ1 within the angle range θ2 of 45 degrees or less toward the fifth side
+ Θ2) = 135 °. The angle θ is set so that the precipitated impurities accumulated in the inner bottom groove 102 can be smoothly sucked, and the aeration device 103 is used.
This is an angle range for orienting the liquid suction holes so that air from the air is hardly sucked, and is approximately 135 degrees here.

Further, the liquid suction hole 10 of the first suction head 104
Reference numerals 4b are dispersed and formed so that a uniform amount of liquid can be sucked at each part extending in the longitudinal direction of the suction head.

In order for each part of the suction head to be able to absorb a uniform amount of liquid, the total cross-sectional area of the liquid-absorbing hole at a portion near the pipe connection port of the suction head is larger than the total cross-sectional area of the liquid-absorbing hole at a portion farther away. The number and / or diameter of the liquid-absorbing holes may be adjusted so as to be small, and the liquid-absorbing holes may be dispersedly formed.
Here, the diameter of each of the liquid suction holes is the same, and the pipe connection port portion 10 is formed.
In the part close to 4a and the part farther therefrom, the liquid suction holes 104b are formed more sparsely in the near part than in the far part, and more densely formed in the far part.

According to the first suction head 104, impurities which easily precipitate at the bottom of the inner bottom groove 102 can be uniformly and smoothly sucked from the entire inner bottom groove as much as possible.

The inner bottom groove 102 formed by dropping into the inner bottom 101 of the liquid tank is provided, and the first suction head 1
Since the first suction head 104 is provided and the air blocking wall plate 105 is further provided, it is difficult for the first suction head 104 to suck in the air ejected from the aeration device 103. Further, impurities that easily accumulate in the liquid tank bottom 101 and impurities that float in the vicinity of the liquid tank bottom are collected in the inner bottom groove 102 and are collected by the first suction head 104.
Smooth and easy suction. Furthermore, as described later, when the liquid in the liquid tank is exchanged and filtered, the sedimentation that still remains when cleaning the liquid tank that has been emptied or substantially emptied with the exchange filtration processing. The impurities and the liquid containing the same are easily collected in the inner bottom groove 102 together with a cleaning liquid (usually cleaning water) which is discharged (usually water discharged) into the liquid tank for cleaning, and smoothly collected by the first suction head 104. Can be easily sucked. Further, it is possible to prevent the object to be plated from dropping due to the contact between the object to be plated and the suction head 104 and the like without the need for expensive measures such as increasing the depth of the entire liquid tank. it can.

As a result, the filtering treatment of the liquid in the liquid tank can be performed more smoothly than before and without causing a remarkable increase in cost.

In order to more efficiently suck impurities that easily accumulate in the bottom of the liquid tank, in addition to the first suction head 104, a portion of the inner bottom 101 other than the inner groove 102, for example, the inner bottom 101 A third suction head is attached to a part of the periphery, etc.
Or you may install two or more. FIG. 3 shows an example in which the third suction head 108 is installed at a peripheral portion along the longitudinal direction of the liquid tank bottom 101 by a chain line.

The third suction head 108 also has the same structure as that of the first suction head 104, and the liquid suction holes are preferably formed in a dispersed manner so that a uniform amount of liquid can be sucked at each part of the suction head in the longitudinal direction. In addition, the third suction head 10
An air-blocking wall plate 109 may be provided between the aeration device 8 and the aeration device 103.

Further, each of the liquid suction ports of the third suction head 108 also has an angle range θ1 of 90 degrees or less from the lower end of the suction head to the side opposite to the air blocking wall plate 109 around the central axis in the longitudinal direction of the suction head. And a center angle θ within an angle range θ2 of 45 degrees or less from the lower end of the head to the blocking wall plate 109 side.
It is preferable to form a dispersion within the range of (θ1 + θ2) = 135 °.

The deeper overflow box B2
A second suction head 106 (not shown in FIGS. 1 and 4) shown in FIG. 6C, FIG.

The second suction head 106 is supported via a support piece 106c and a support plate 106d erected on the support piece 106c, and the liquid can flow below the suction head 106. The suction head 106 extends substantially parallel to the short side of the liquid tank, has a pipe connection port 106a at one end, is a closed cylinder at the other end, and has a plurality of liquid suction holes 106b. are doing. The liquid suction holes 106b are formed so as to be able to absorb a uniform amount of liquid in each part of the suction head 106 extending in the longitudinal direction.

For the second suction head installed in the overflow box B2 as well, in order for each part of the suction head to be able to absorb a uniform amount of liquid, it is necessary to cut off the liquid suction hole at a position near the pipe connection port of the suction head. The number and / or diameter of the liquid-absorbing holes may be adjusted so that the liquid-absorbing holes are dispersed and formed such that the total area is smaller than the total cross-sectional area of the liquid-absorbing holes at a farther part. Here, the diameter of each of the liquid suction holes 106b is made the same, and in a portion close to the pipe connection port portion 106a and in a portion farther from the port connection portion 106a, the liquid absorption holes are sparser in the near portion than in the far portion, and more in the far portion. It is densely dispersed and formed.

According to the second suction head 106, liquid and impurities can be sucked uniformly and smoothly from the entirety of the overflow box B2 as much as possible.

Conventionally, when a liquid is sucked from the overflow box, a liquid outlet to the outside is provided at the bottom of the overflow box, a liquid suction pipe is connected to the liquid inlet, and the liquid is sucked downward by the liquid suction pipe. Since the liquid was condensed, impurities in the liquid were easily clogged at the liquid inlet and the connection part thereof, causing a significant trouble in the filtering operation.Here, the liquid suction pipe of the second suction head 106 is Since the liquid can be absorbed upward from the bottom of the box, clogging of the head 106 and the liquid suction tube connected thereto with impurities is sufficiently suppressed.

Each liquid suction hole 104 of the first suction head 104
b, the diameter of each of the liquid suction holes 106b of the second suction head 106 and the diameter of each of the liquid suction ports of the third suction head 108 is the same as that of the liquid filtration through which the suction head is connected via a manifold described later. Is set to be equal to or smaller than the impeller blade height in the liquid circulation centrifugal pump.

By reducing the aperture in this way,
Suppresses the failure of pumps, such as parts of parts to be plated and parts that may fall into the liquid tank and other miscellaneous goods brought in from outside, being sucked into the centrifugal pump and biting into the impeller blades. can do.

Note that another type of suction head may be used instead of the second suction head 106. For example, a suction head 107 shown in FIG. 8 may be employed.

The suction head 107, which can be called a dust removing strainer, is in the form of a small box, has a pipe connection port 107a at the top, and has a plurality of liquid suction holes 107b dispersedly formed on the side peripheral wall and the bottom wall. Things. The foot 107c is attached, and it stands at the bottom of the overflow box B2. The diameter of each of the liquid suction holes 107b may be set to be equal to or smaller than the impeller blade height of the centrifugal pump for liquid circulation.

The first suction head 104 and the second suction head 104
The suction head 106 (or 107) or the third suction head 108 is a component of the circulating filtration device described below.

The first group including the aforementioned one liquid tank 11, the second group including the two liquid tanks 12 and 13, the liquid tank 1
A circulating filtration device is provided for each of the third group including 4 and 15. Further, from the liquid tank 11 to the liquid tank 1
There is also provided a circulating filtration device for a fourth group containing up to 5 liquid tanks.

In FIG. 1, reference numeral 3 denotes a circulating filtration device for the liquid tank 11, reference numeral 4A denotes a circulating filtration device for the liquid tanks 12 and 13, and reference numeral 4 denotes a circulating filtration device for the liquid tanks 14 and 15.
In B, the circulating filtration device for all the liquid tanks 11 to 15 is denoted by reference numeral 6.
Indicated by

The manual on-off valve employed in each of the circulating filtration devices described below and the replacement filtration device described below may be automatically controlled as an electric valve or the like.

In the circulating filtration device, the circulating filtration device 3 of the first group includes a liquid circulating pump (here, a centrifugal pump) 1
It is a single-circulation filtration device of one liquid tank with a single unit, and the second group of circulation filtration devices 4A and the third group of circulation filtration devices 4B are each equipped with one liquid circulation pump (here, a centrifugal pump) for two treatment liquid tanks. Is a circulating filtration device. Further, the circulation filtration device 6, which is a fourth group, is a circulation filtration device using one liquid circulation pump (here, a centrifugal pump) for all five treatment liquid tanks.

The filtering devices 4A and 4B of the second group and the filtering device 4B of the third group are circulating filtering devices of two liquid tanks each using one liquid circulating pump. In the process, the liquid flow rate in the circulation circuit slightly increases or decreases, and as time passes, the liquid level of one of the two liquid tanks falls, and in contrast, the liquid level of the other liquid tank decreases. An increase and inflow of the liquid amount corresponding to the liquid reduction in the descending liquid tank occurs, and finally the processing liquid overflows from the other liquid tank, and the liquid surface level of the processing liquid in one liquid tank falls too much, and both liquids are dropped. In some cases, plating with the processing solution cannot be performed in both tanks.

Therefore, in this case, a circulating filtration device 6 for simultaneously performing circulating filtration by one liquid circulating pump is installed and operated in all of the 5 liquid tanks so as to suppress a vertical difference in liquid level between the liquid tanks. In addition, the liquid level is controlled and the liquid is mixed, so that the circulating filtration is performed while the composition and temperature of the liquid in each liquid tank are made uniform. That is, the circulation filtration device 6 is not only a circulation filtration device but also a device for liquid mixing and liquid level position control.

The apparatus for mixing liquids and controlling the liquid surface position can perform circulating filtration while performing liquid mixing and liquid surface position control in each liquid tank even when the capacity of each liquid tank is different.

The circulating filtration device 3 for the liquid tank 11 includes a filter 31 and a circulating pump 32 for liquid circulation (a centrifugal pump is used in this example). The liquid tank 11 can communicate with the liquid suction port of the circulation pump 32 via a liquid suction circuit. The filter 31 can communicate with the liquid tank 11 via a liquid sending circuit.

As shown in FIG. 1, the liquid suction circuit has a liquid tank 11.
Suction head 104 and second suction head 10 in FIG.
6 (omitted in FIG. 1; see FIGS. 2, 6, 7 and the like), a manifold 33 for liquid merging, and pipe connection ports 104a (see FIG. 6), 106a (see FIG. 6, FIG. (See FIG. 7), each of which rises upward and extends upward, and is connected to the branch pipe of the manifold 33 via manual open / close valves v11 and v12 near the upper end opening of the liquid tank and near the upper end opening of the overflow box. The opening is a manual on-off valve v13
And a pipe connected to the liquid suction port of the circulation pump 32 via the

When employing the third suction head 108,
The liquid aspirated by this is ultimately the valve v1
1, and is connected to the pump 32 via a valve or the like so as to be mixed and merged with the liquid sucked through the v12 and flow into the pump 32.

The liquid sending circuit includes a pipe for connecting the liquid sending port of the filter 31 to two locations of the liquid tank 11 via the manual opening / closing valve v14 and the temperature control circuit 45 and two manual opening / closing valves v15. I have. The communication with the liquid tank 11 is not limited to two places as described above, but may be one place or three or more places.

The discharge port of the circulation pump 32 is connected to the liquid supply port of the filter 31 via a check valve v16.

The filter 31 can be of various types adapted to the type of liquid and the amount of filtrate. In this case, the liquid to be injected into the filter is a filter having a precoat layer with a suitable filter aid. This is a type of filter in which impurities are filtered and purified by passing through a bed. The filters in the circulating filtration devices 4A and 4B, which will be described later, and in the device 6 for liquid mixing and liquid level position control are also of the same type.

[0086] In the liquid feed circuit, an exchanging device 51 for restoring the liquid structure that changes due to the deterioration and consumption of the plating solution in one liquid tank, and for removing and filtering the accumulated impurities.
(See FIGS. 1 and 3).

The basic structure of the temperature control circuit 45 and the exchanging device 51 in the circulating filtration device 3 is the same as that of the temperature control circuit 45 and the exchanging device 51 in the circulating filtration devices 4A and 4B, which will be described later. The circuit 45 and the device 51 in the filtration device 4A will be described, and the description of the temperature control circuit 45 and the device 51 will be omitted.

Since the circulating filtration devices 4A and 4B have exactly the same structure and operation, only the device 4A will be described and the description of the device 4B will be omitted. The same components in the devices 4A and 4B are denoted by the same reference numerals in the drawings.

As shown in FIG. 1, the circulating filtration device 4A includes a filter 41 and a circulating pump 42 (here, a centrifugal pump) for circulating the liquid. The liquid tanks 12 and 13 can communicate with the liquid suction port of the circulation pump 42 via a liquid suction circuit. Filter 41
Can communicate with the liquid tanks 12 and 13 via a liquid sending circuit.

The liquid suction circuit includes a first suction head 104 and a second suction head 10 in each of the liquid tanks 12 and 13.
6 (omitted in FIG. 1, see FIG. 2 etc.), manifolds 431, 432, and 430 for liquid merging, and pipe connection ports 104a of suction heads 104 and 106 of one liquid tank 12 (see FIG. 6).
106a (see FIGS. 6 and 7), each of which rises and extends upward, and is connected to a branch pipe of one manifold 431 via manual open / close valves v41 and v42 near the upper end opening of the liquid tank and near the upper end opening of the overflow box. And the pipe connection port 104 of the suction heads 104 and 106 of the other liquid tank 13.
a and 106a, respectively, and extend upward, and the other manifold 43 is connected via manual open / close valves v41 and v42 near the upper end opening of the liquid tank and near the upper end opening of the overflow box.
2; a pipe connecting the main openings of the manifolds 431 and 432 to the branch pipe of the manifold 430; and a circulating pump 42 connecting the main opening of the manifold 430 to the manual opening / closing valve v43. And a pipe connected to the liquid suction port.

In the liquid tanks 12 and 13, the third suction head 1
08, the liquid sucked by this is finally mixed with the liquid sucked through the valves v41 and v42, merged and flow into the pump 42,
The piping is connected to the pump 42 via a manifold or the like.

The liquid supply circuit includes a pipe connecting the liquid supply port of the filter 41 to the main opening of the liquid distribution manifold 433 via the manual open / close valve v44 and the temperature control circuit 45, and a manifold 433.
A pipe for branching one branch pipe to two places of the liquid tank 12 via two manual opening / closing valves v45, and two manual opening / closing valves for the other branch pipe of the manifold 433 as in the case of the liquid tank 12. and a pipe that branches and communicates with two portions of the liquid tank 13 via v45.

The discharge port of the pump 42 is connected to the liquid supply port of the filter 41 via a check valve v46.

The filter 41 is of the same type as the filter 31 in the circulating filter 3. Note that different types may be used.

Further, two liquid tanks 12 and 13 are provided in the liquid sending circuit.
, A replacement tank 51 (FIG. 3) for restoring the liquid structure that changes due to the deterioration and consumption of the plating solution in the tank, and for removing and filtering the accumulated impurities.
Reference).

The temperature control circuit 45, as shown in FIG.
Manual on-off valve va ', heat exchanger 451, manual on-off valve vb'
Are connected in parallel to a flow control valve V in a circuit in which the inlet of the valve va 'on the heat exchanger inlet side and the flow control valve V
Is connected to the valve v4 through the manifold 452 for liquid distribution.
4 (a valve on the outlet side of the filter), and the outlet of the valve vb ′ and the outlet of the flow rate adjusting valve V are connected to the liquid distribution manifold 433 that leads to the liquid tank.

The temperature control circuit 45 in the circulation filtration device 3
Has basically the same structure as the temperature control circuit 45 of the circulating filter 4A. However, in the temperature control circuit 45 in the circulating filtration device 3, a valve corresponding to the valve vb 'and the flow control valve V
The outlets of the valves corresponding to are collected in one pipe without passing through the manifold, and are further branched and communicated with the liquid tank 11 through two manual opening / closing valves v15.

[0098] As shown in FIG.
The piping is connected so that the liquid sending port of the filter 41 can be communicated with the drainage tank 511 via the manual opening / closing valve v51, and the liquid suction port of the pump 42 is located at the bottom of the draining tank 511 via the manual opening / closing valve v52. Installed conventional foot valve
ve) A pipe connected to v53.

[0099] The replacement device 51 in the circulation filtration device 3
The structure of the replacement device 51 is basically the same as that of the replacement device 51. Here, regarding the above-mentioned and later-described `` manifolds '' referred to in the present specification, the manifolds include a manifold body in the form of a closed cylinder having one end closed, and a plurality of branch pipes connected thereto. Contains. And in a circulating filtration device using the manifold for the liquid suction circuit from the liquid tank and the liquid sending circuit from the filter to the liquid tank by the circulation pump, a plurality of the same or different cross-sectional areas provided on the main body of the manifold are provided. The flow rate of liquid absorption or liquid transfer from each of the branch pipes is determined by the cross-sectional area of the branch pipe.

More specifically, in each of the plurality of branch pipes, the flow rate per unit sectional area may be, for example, such that the pre-coat layer of the filter aid of the filter is significantly clogged beyond the allowable range for removing impurities, and the pre-coat layer The pressure difference before and after, in other words, unless there is any inconvenience such as the pressure difference between the stock solution chamber and the filtration chamber in the filter fluctuates remarkably, the amount is substantially the same, and each branch pipe has the same amount per unit cross-sectional area. It has a cross-sectional area to obtain a required predetermined flow rate based on the flow rate. The manifold body has the same cross-sectional area over substantially the entire length of the cylinder constituting the manifold body, and has a cross-sectional area slightly larger than the total cross-sectional area of the plurality of manifolds. The pressure in the manifold main body is set to the same negative pressure or the same positive pressure under the same cross-sectional area over substantially the entire length of the inside of the cylinder, and a predetermined flow rate for each branch pipe can be obtained without excess or shortage. Returning to the original description, the manifold 33 for the liquid confluence and the manifold (not shown) of the temperature control circuit 45 in the circulation filtration device 3 described above, and the circulation filtration device 4
A, 4B, manifolds 431, 432, 43 for liquid merging
The manifold 433 for the liquid distribution 433 and the manifold 452 for the temperature control circuit 45 have basically the same structure as the manifold shown in FIG. 9, and are made of vinyl chloride resin (PVC).
The material is the same for the manifold shown in FIG. 10 described later. These manifolds may be made of another material, for example, another synthetic resin or metal.

That is, the manifold 33 for the liquid junction in the circulating filtration device 3 and the manifold (not shown) of the temperature control circuit 45,
And manifold 4 for merging liquids in circulation filtration devices 4A and 4B
31, 432, 430, the manifold 433 for liquid distribution, and the manifold 452 of the temperature control circuit 45 are all structurally not limited as shown in FIG. And two connected thereto, but not limited thereto, a branch pipe 40 having a circular cross section here.
2, 403. The manifold main body 401 is a closed cylindrical body having a main opening 401a at one end for connecting another pipe and closing the other end 401b and having a substantially uniform inner diameter (a liquid flow cross-sectional area is substantially uniform).

The opening 4 of the manifold body 401 under the same positive or negative pressure on the branch pipes 402 and 403
The cross-sectional area of 01a has a cross-sectional area corresponding to the total cross-sectional area of the branch pipes 402 and 403 that provide the required predetermined liquid flow rates.

The cross-sectional area of the manifold body 401 has a cross-sectional area slightly larger than that of the opening 401a as a marginal cross-sectional area with respect to the total cross-sectional area of the plurality of branch pipes.

The branch pipes 402 and 403 are connected to the manifold main body 401.
At two locations in the longitudinal direction of the manifold body, they are inserted into the manifold body from a direction perpendicular to the longitudinal direction of the manifold body, and the degree of projection (projection insertion height) α of each branch pipe 402, 403 into the manifold body. Is in the range of about 1/2 to 3/5 of the inner diameter R of the main body 401.

The manifold body 40 of the branch pipes 402 and 403
The height of the protruding insertion into 1 is determined by the pressure (negative or positive pressure) in the manifold main body under the suction pressure (negative pressure) or the liquid sending pressure (positive pressure) of the pump over the manifold main body. It is kept under uniform pressure.

The manifold body 401 is connected to the two branch pipes 40.
2, 403 are connected in a liquid-tight manner by an adhesive, welding or the like.

The basic structure of the manifold shown in FIG. 10, which will be described later, and the manifold main body 600 and the branch pipes 601 to 605 are the same as those of the manifold described above.

In any of the manifolds, the connecting portion of the branch pipe to the manifold main body is not particularly limited, and can be connected to an arbitrary portion around the manifold main body according to the liquid circuit configuration. Further, the angle of the branch pipe at the time of the connection does not necessarily have to be a direction orthogonal to the longitudinal direction of the manifold main body.

According to the manifold having such a structure, when the suction port of the liquid circulation pump is connected to the main opening 401a of the manifold main body 401 and used as a manifold for liquid merging, the suction pressure of the pump (negative pressure) Pressure), that is, the liquid pressure (suction pressure) in the manifold main body is made uniform in each part in the manifold main body. Therefore, the amount of liquid absorbed from each branch pipe 402 and 403 into the manifold main body 401 is equal to the liquid in each branch pipe. It depends on the flow cross section.

The main opening 401 of the manifold body 401 is also provided.
When the outlet of the pump is connected to a and used as a manifold for liquid distribution, the discharge pressure (positive pressure) of the pump, that is, the liquid pressure (positive pressure) in the manifold main body, is uniform in each part in the manifold main body. Therefore, the amount of liquid discharged from each of the branch pipes 402 and 403 depends on the liquid flow cross-sectional area of the branch pipe.

Here, the manifold having such a structure is used as a manifold 33 (not shown) for the manifold 33 and the temperature control circuit 45 in the circulating filtration device 3, and a manifold 431 for liquid merging in the circulating filtration devices 4A and 4B. 432, 430, the manifold 433 for liquid distribution and the manifold 452 of the temperature control circuit 45, a predetermined amount of liquid is sucked from the inner bottom groove 102 of the liquid tank and the overflow box B2, and the circulation filtration device 3 In the above, a predetermined amount of the filtered liquid can be returned to the liquid tank 11, and for the circulating filtration devices 4A and 4B provided for the plurality of liquid tanks, a predetermined amount is filtered into the plurality of liquid tanks. In each temperature control circuit 45, a manifold 452 is provided as shown in FIG. 3, and heat exchange is easily performed at an arbitrary heat exchange flow rate set by the flow control valve V. It can be fed to the vessel.

The manifold 9 conventionally used is provided with a main opening 9 for liquid circulation at one location as shown in FIG.
1a, and branch pipes 92 are connected to a plurality of locations except for the position of the main opening 91a. The connection of the branch pipe 92 is made by connecting one end of the branch pipe 92 to a hole 91 provided in the wall of the manifold main body 91.
The connection is made according to b.

However, in such a conventional manifold, the hydraulic pressure does not act uniformly at each part of the entire length of the manifold body, and particularly when the filtration pressure in the filter rises due to the removal of impurities, such a problem may occur. Even when the filtration pressure is within the permissible range of the filter itself, the liquid pressure does not act uniformly at each part. For example, if the liquid is introduced into the manifold main body 91 from the main opening 91a under a positive pressure by a pump, the main A large amount of liquid flows out to the branch pipe near the opening 91a, and at each position sequentially away from the main opening 91a, the liquid pressure decreases due to the liquid flowing out to the branch pipe at a position earlier than that. Only a smaller amount of liquid flows into the branch at the location.

On the other hand, when a liquid flows into the branch pipe 92 from the outside under the liquid suction pressure (negative pressure) of the pump and is sucked from the main opening 91a, a large amount of liquid flows from the branch pipe near the main opening 91a. Of the main opening 91
The liquid suction effect of the pump decreases as the distance from the point a gradually increases, and only a smaller amount of liquid can be sucked from the branch pipe 92 at that position.

A liquid circuit for filtering the processing liquid, a liquid circuit for maintaining the processing liquid in a plurality of liquid tanks described later uniformly, and a liquid circuit for controlling the liquid surface position in each liquid tank are provided. If it is used in a liquid circuit or the like, it will hinder desired filtration processing, maintenance of the processing liquid quality, and liquid level control.

In order to solve such a problem, it is necessary to provide a flow control valve 90 in each branch pipe. However, this increases the cost and reduces the amount with the passage of date and time according to the amount of impurities removed by filtration. In order to equalize the amount of filtration, the amount of suction due to pipe resistance, and the reduction of the flow rate of each liquid feed pipe, it is extremely time-consuming to adjust the degree of opening or throttling of the flow control valve 90.

In this respect, according to the manifold having the structure shown in FIG. 9, it is not necessary to provide a flow control valve 90 for flow control as shown in FIG. The flow rate can be obtained simply, easily and inexpensively.

Next, the filtering device described above will be described from the filtering device 4A for convenience of explanation.

According to the circulating filtration device 4A, in the ordinary circulating filtration, the valves v41 to v45 are opened, and the valves va ', vb', and V in the temperature control circuit 45 are set to any predetermined opening. (Always open) and the manual on-off valves v51, v
52 is closed.

Then, a circulation pump (a centrifugal pump in this example)
By driving the valve 42, the liquid tanks 12, 1 are connected via the valve v43.
3, a plating solution containing precipitating impurities is mainly suctioned by the first suction head 104 from the inner bottom groove 102, and the third suction head 108 is transferred to another portion of the inner bottom of the liquid tank as shown by a chain line in FIG. Is also installed, the third suction head also sucks the plating solution containing impurities in the bottom of the liquid tank and the vicinity thereof from the third suction head, while the weir 21 is supplied to the overflow boxes B1 and B2 in the liquid tanks 12 and 13, respectively. , 22 and with the plating solution, the floating impurities collected in the box B2 are sucked together with the plating solution in the box B2 by the second suction head 106, and these impurities are filtered by the filter 41, and the filtered plating solution is filtered. The liquid is returned to each of the liquid tanks 12 and 13
Reflux to the point. In this way, the filtered liquid is returned to a plurality of locations instead of a single location in each liquid tank, thereby improving the cleanliness of the liquid in each part of the liquid tank.

During the circulating filtration, the plating solution is controlled to a predetermined temperature by the heat exchanger 451 in the temperature control circuit 45.

When starting the operation of the plating apparatus during a consecutive holiday or a holiday opening, if the temperature of the plating solution greatly deviates from the predetermined temperature, the flow rate in the temperature control circuit 45 is maintained until the temperature reaches or approaches the predetermined temperature. Regulating valve V
By squeezing or closing the plating solution and intensively flowing the plating solution into the heat exchanger 451, a predetermined working temperature of the plating solution can be promptly obtained.

In general, in the case of an article processing liquid tank, the processing liquid contains impurities which are attached to the object to be processed from the beginning and impurities generated during the pre-processing step of the object to be processed. The impurities that are brought into the object and the impurities and the like generated by electrolysis, deterioration, and the like in the process of processing the object in the processing solution synergistically accumulate the impurities every day, thereby increasing the cost. Frequent washing and restoration of the filtration bed of the filter and refilling of the liquid tank must be performed.

In the case of an article plating solution bath, for example, the plating solution contains impurities which are attached to the object to be treated from the beginning and which are generated during the pretreatment step of the object. Impurities which are brought in by being adhered to the object to be processed, and impurities generated due to anode electrolysis, deterioration of the processing solution, etc. in the process of processing the object to be processed in the plating solution tank, and fall into the liquid tank from outside. Impurities accumulate every day due to the synergistic effect of certain impurities and the like, which necessitates frequent cleaning and restoring operations of the filter bed in the filter, and liquid tank replacement filtration. In addition, due to these operations, the production of plating products is interrupted, overtime is increased, labor costs are increased, expensive plating solutions are lost, chemicals and drainage management costs are increased, and energy such as electricity is excessive. This leads to wear and, consequently, soaring of plated products.

In the case of exchange filtration, as an example, the cycle of the exchange filtration is largely determined by the liquid quality, the product type, and the like, but is generally between one month and three months. Activated carbon treatment for removing inorganic and organic impurities, filtration and the like are performed by replacement filtration to regenerate and restore the liquid composition, and the recovered liquid is returned to the original liquid tank again.

The plating solution baths 11 to 1 which have just been described.
In step 5, the re-filtering process is performed as follows.

That is, when performing the replacement filtration of the plating solution in the liquid tank 12, the liquid tank 12 in the circulating filtration device 4A is used.
Valve v42 on the side, valve v41, v42 on the liquid tank 13 side, valve v44 communicating with the inlet of the temperature control circuit 45, the opening change device 5
1 valve v52 is closed, the valve v41 on the liquid tank 12 side, the pump 4
The valve v51 of the replacement device 51 is opened together with the valve v43 communicating with the liquid suction port 2 to operate the pump.

As a result, the liquid tank 12 passes through the valve v41 on the liquid tank 12, the manifold 431, the manifold 430, the valve v43 on the pump suction side, the pump 42, the check valve v46, the filter 41, and the valve v51. The plating solution in 12 can be collected in the replacement tank 511. The liquid collected in the replacement tank 511 is subjected to activated carbon filtration, liquid composition restoration, and the like.

[0129] From the replacement tank 511 of the treated liquid to the liquid tank 12
For the recirculation, the valve v51 of the replacement device 51 and the pump 4
The valve v43 connected to the liquid suction port 2 and the valve v45 on the liquid tank 13 side are closed, and the valve v52 of the refilling device, the valve v44 connected to the temperature control circuit 45, the valve V of the temperature control circuit 45, and the valve on the liquid tank 12 side are closed. Open v45 and operate the pump 42.

As a result, the plating solution recovered from the foot valve v53 at the bottom of the replacement tank 511 is sucked,
Valve v52, pump 42, check valve v46,
Filter 41, valve v44, manifold 45 of temperature control circuit 45
2. The valve v4 on the liquid tank 12 side via the valve V and the manifold 433
Reflux from 5 to the liquid tank 12.

On the other hand, when the drainage filtration of the plating solution in the liquid tank 13 is performed, the liquid tank 13 in the circulating filtration device 4A is used.
The valve v42 on the side, the valves v41 and v42 on the side of the liquid tank 12 and the valve v44 leading to the temperature control circuit 45, the valve v52 of the refilling device 51 are closed, and the valve v41 on the side of the liquid tank 13 and the suction port of the pump 42 are closed. The valve v51 in the replacement device 51 is opened together with the valve v43, and the pump 42 is operated.

Thus, the liquid tank 13 passes through the valve v41, the manifold 432, the manifold 430, the pump suction side valve v43, the pump 42, the check valve v46, the filter 41, and the valve v51. The plating solution in 13 can be collected in the replacement tank 511. The liquid collected in the replacement tank 511 is subjected to a filtration treatment or the like.

To return the liquid from the drainage tank 511 to the liquid tank 13, the valve v51 of the drainage device 51, the valve v43 communicating with the suction port of the pump 42, and the valve v45 of the liquid tank 12 are closed. Valve v52, valve v leading to the temperature control circuit 45
44, valve V of temperature control circuit 45, valve v45 on liquid tank 13 side
Is opened, and the pump 42 is operated.

As a result, the reconstituted plating solution is sucked from the hood valve v53 at the bottom of the replacement tank 511, and the valve v52, the pump 42, the check valve v46, the filter 41, and the valve v44 of the replacement apparatus 51 are provided. The liquid is returned from the valve v45 on the liquid tank 13 side to the liquid tank 13 via the manifold 452, the valve V, and the manifold 433 of the temperature control circuit 45.

As described above, in the replacement filtration of the plating solution in the solution tanks 12 and 13, the entire amount of the plating solution in each tank can be separately replaced and filtered.

The reason that the plating solutions in the liquid tanks 12 and 13 can be individually changed and subjected to the filtration process is that if the two tanks are to be exchanged together, the capacity of the exchange tank 511 must be increased accordingly. This is because the installation space of the replacement tank 511 becomes large and the cost increases, and further, the reason why the replacement filtration is required often occurs in each tank.

When there is a space for installing a large-capacity refilling tank 511, two refilling filtration operations may be performed at once.

In the circulating filtration device 4B, the filtration device 4
As in the case A, the plating solution in the solution tanks 14 and 15 can be circulated and filtered. Also, the temperature of the plating solution can be controlled. Further, the entire amount of the plating solution in each of the liquid tanks 14 and 15 can be individually drained and filtered.

According to the circulating filtration device 3, in normal circulating filtration, the valves v11 to v15 are opened, the on-off valve and the flow control valve in the temperature control circuit 45 are set to predetermined opening degrees, respectively, The on-off valve leading to 51 is closed. By operating the circulation pump 32, the second suction head 104 is moved from the inner bottom groove 102 of the liquid tank 11.
In the main, the precipitating impurities are sucked together with the plating solution,
Also, as shown by the chain line in FIG.
When the suction head 108 is also installed, the third suction head also sucks the plating solution containing impurities at the bottom in the liquid tank and in the vicinity thereof.

On the other hand, the floating impurities flowing into the overflow boxes B1 and B2 attached to the liquid tank 11 together with the plating solution over the weirs 21 and 22 are collected by the second suction head 106 in the box B2. By sucking together with the plating solution, these impurities are filtered by the filter 31, and the filtered plating solution can be returned to two places of the liquid tank 11 again. In this way, the liquid after filtration is placed in the liquid tank 11.
Since it is returned to a plurality of locations instead of locations, the degree of cleanliness of the liquid in each part of the liquid tank 11 improves accordingly.

During the circulating filtration, the plating solution can be controlled to a predetermined temperature by the temperature controller 45.

When the plating apparatus is started to operate during consecutive holidays and during holidays, if the temperature of the plating solution greatly deviates from the predetermined temperature, the flow rate in the temperature control circuit 45 is reduced until the temperature reaches or approaches the predetermined temperature. By squeezing or closing the regulating valve V and intensively flowing the plating solution into the heat exchanger, a predetermined plating solution temperature can be quickly obtained.

When performing the replacement filtration of the plating solution in the liquid tank 11, the valve v11 on the liquid tank 11 side is opened and the v12 is closed in the filtration device 3 in the same manner as the above-described replacement device 51 for the liquid tanks 12, 13. , And a valve v4 leading to the temperature control circuit 45
4 and the valve v52 of the apparatus 51 are closed, and the opening / closing valve v51 for liquid supply to the replacement tank 511 is opened. By operating the pump 32, the plating solution in the liquid tank 11 can be recovered to the replacement tank.

The recovered, regenerated and restored plating solution is supplied to the above-mentioned solution tanks 12 and 13 by a refilling device 51.
The liquid can be returned to the liquid tank 11 in the same manner as described above.

The adjustment of the liquid level in the overflow box B2 in each liquid tank can be performed by only one worker.
By operating the on-off valve v12 (or v42) near the upper end opening of the box in the liquid suction pipe connected to the second suction head 106 at the bottom of the box and extending upward, the amount of liquid suction from the box is controlled, In addition, the level of the liquid in the box can be easily and easily adjusted while visually observing the liquid level in the box from the work deck substantially at the same position as the on-off valve. This makes it possible to easily and easily maintain the liquid level in the overflow box at an appropriate drop relative to the liquid level in the liquid tank in the filtration process.

In the replacement filtration process, the residual liquid in the overflow box B2 is also removed from the valve v12 (or the valve v42).
Can be recovered in the refilling tank 511, but when doing so, while monitoring the drought in the box B2 that causes unacceptable air suction into the pump and the filter from above, the on-off valve v12 before air suction occurs (Or v42) can be closed to avoid air suction.

The plating apparatus described above further collects and mixes the plating liquid from each of the liquid tanks 11 to 15, controls the liquid surface position in each liquid tank to a predetermined position while returning the liquid to each liquid tank again. A device 6 for mixing and controlling the liquid level is provided. This will be described below.

As shown in FIG. 1, the liquid mixing and liquid level control device 6 is manually opened and closed by a liquid circulation pump 61 (here, a centrifugal pump) and overflow boxes B2 of the liquid tanks 11 to 15. A circuit for guiding the liquid to the suction port of the pump 61 via a valve v71, a first manifold J1 for liquid merging and a second manifold J2 for liquid merging, and a manual open / close valve v62; From each overflow box B2, via a manual opening / closing valve v61 and a liquid discharge electric valve Va corresponding to each liquid tank (there are five in total), to a third manifold J3 for liquid merging, and further to the third manifold J3 A circuit that can guide liquid from the pump to the suction port of the pump 61 through the second manifold J2 and the manual on-off valve v62;
1 through the check valve Vo and the filter 60, further through the manual open / close valve v63, the fourth manifold J4 for liquid distribution and the fifth manifold J5 for liquid distribution, 12,
A circuit for guiding the liquid to 13, 14, 15 and a discharge port of the pump 61, through the check valve Vo and the filter 60, a valve v63, the fourth manifold J4, and a sixth manifold for liquid distribution. Each liquid tank 1 is connected via a pipe J6 and an electric valve Vb for liquid supply corresponding to each liquid tank (there are a total of five valves), and further through a manual opening / closing valve v64.
A circuit capable of guiding the liquid to 1, 12, 13, 14, and 15. The device 6 for liquid mixing and liquid level control further includes a liquid level detecting device 62 installed in the overflow box B2 of each liquid tank.

Electric valve for discharging liquid Va, electric valve for supplying liquid Vb
Here, all are valves provided with a valve opening / closing drive motor.

The plating apparatus shown in FIG.
A control unit 7 for controlling the operation of the entire apparatus as shown in FIG.
And a part of the control unit 7 constitutes a part of the device 6 for liquid mixing and liquid surface position control described here.

An operation panel 71 is connected to the control section 7, and a switch for starting and stopping each pump is mounted on the operation panel 71.

As shown in FIG. 11A, each of the pumps 32, 42, 42, and 61 is connected to the control unit and operates based on an instruction from the control unit. In addition, the liquid discharge electric valve Va, the liquid supply electric valve Vb, and the liquid surface position detecting device 62 corresponding to each liquid tank in the device 6 for liquid mixing and liquid surface position control are also connected to the control unit. .

Each of the liquid surface position detecting devices 62 has the same structure, and one of them is suspended and inserted into the overflow box B2 from above, as schematically shown in FIG. 11B. Five electrode rods 621-
625.

These electrode rods are electrode rods 621, 622, 6
23, 624, long, box B deep
2 has been inserted. The electrode rod 625 is a ground electrode rod, and is inserted into the box B2 substantially the same as or deeper than the electrode rod 624.

In the overflow box B2 of each liquid tank, the electrode rod 621 is an electrode rod for detecting an abnormal upper limit of the liquid level, and the electrode rod 622 is used to detect the abnormal liquid level when the liquid level reaches the upper limit of the allowable range. An electrode rod for detection,
The electrode rod 623 is an electrode rod that detects when the liquid level reaches the lower limit of the allowable range, and the electrode rod 624 is an electrode rod that detects that the overflow box is in a dry state.

In any one of the liquid tanks 11 to 15, the liquid level of the liquid contained in the overflow box over the weirs 21 and 22 in the liquid tank is within a predetermined upper limit and a lower limit. When the liquid level in the box B2 is lower than the lower end of the electrode rod 622 and higher than the lower end of the electrode rod 623, the liquid discharge corresponding to the liquid tank is performed. Electric valve Va, liquid supply electric valve V
b remains open under the instruction of the control unit 7,
Discharge and supply of the liquid to the liquid tank are continued.

However, in any one of the liquid tanks, the liquid level of the liquid contained in the box B2, which exceeds the weir portions 21 and 22 in the liquid tank, exceeds a predetermined range and becomes higher than the electrode rod 622. Contact with the lower end of the liquid tank, the liquid supply motor-operated valve Vb communicating with the liquid tank via the valve v64 (normally opened) closes under the instruction of the control unit 7 to close the liquid tank. While the liquid supply is stopped, the liquid discharge electric valve Va is opened and the valve v
The liquid is discharged from the liquid tank via 61 (usually opened).

At this time, aside from the discharge circuit via the motor-operated valve Va, the liquid discharged via the valve v71 (normally opened) and the manifold J1 flows through the manifold J2 into the motor-operated valves Va and The liquid merges with the liquid discharged from the manifold J3, and these liquids are sucked into the pump 61 via the valve v62.

When the liquid surface position in any one of the liquid tanks falls and leaves the lower end of the electrode rod 623, the liquid discharge corresponding to the liquid tank is instructed by the control unit 7. The electric valve Va for liquid supply is closed while the electric valve Vb for liquid supply is opened, and the liquid is supplied to the liquid tank via the valve v64. At this time,
The liquid sent from the pump 61 passes through the check valve Vo and the filter 60, and is passed through the manifold J6, the electric valve Vb, and the valve v64 to the liquid tank by one of the two branch pipes of the manifold J4. At the same time, the liquid is returned from the other branch pipe of the manifold J4 to the manifold J5, and further to the liquid outlet 63 to the liquid tank.

(1) In the circulation filtration device 6,
The electric valve Va from the valve v61 in the liquid suction circuit of the pump 61
And the valve v without passing through the electric valve Va
(2) The amount of liquid sent back to the liquid tank via the electric valve Vb and the valve v64 in the liquid supply circuit of the pump, and the total amount of liquid discharged from 71 through the manifolds J1 and J2. When,
It is initially set so that the total amount of liquid to be sent is substantially equal to the total amount of liquid flowing from the liquid outlet 63 to the liquid tank via the manifolds J4 and J5 without passing through the electric valve Vb.

The filtration devices 3 and 4A related to the liquid tanks 11 to 15
When the liquid level of any of the liquid tanks fluctuates up and down during the filtration operation by 4B and 4B, the electric valve Va for liquid discharge and the liquid distribution connected to the manifold J3 for liquid confluence of the apparatus 6 in this way. The normal operation of plating can be continued without interruption by alternately operating the electric valve Vb for supplying liquid that communicates with the manifold J6.

In the overflow box B2,
When the liquid level of the processing liquid becomes lower than the predetermined height due to an unexpected situation or the like and the liquid level leaves the electrode rod 624, or when the liquid level of the processing liquid becomes higher than the predetermined height, When the surface comes into contact with the electrode rod 621, not only the pump 61 but also all the pumps are emergency-stopped under the instruction of the control unit 7 for both the front and rear sides. An alarm device for issuing an alarm in this case may be provided for safety management.

The manifolds J1 to J3 for liquid merging are:
A manifold body having a liquid-absorbing space for liquid-absorbing and having a liquid-flow main opening in one place communicating with the liquid-absorbing space,
A branch pipe connected to each of a plurality of predetermined locations except for the position of the main opening of the manifold main body, wherein the liquid flows into each branch pipe and merges in the manifold main body to form a main opening. It flows out of the department.

Further, the manifolds J4 to J6 for distributing the liquid described above.
A manifold body that has a liquid sending space for liquid sending and has a liquid flow main opening in one place communicating with the liquid sending space, and a plurality of manifold main bodies excluding the main opening position of the manifold body. A branch pipe connected to each of the predetermined locations,
The liquid flows into the main opening, separates from each branch pipe, and flows out.

The first manifold J1 and the third manifold J3, and the fifth manifold J5 and the sixth manifold J6, respectively,
The same number (in this case, 5) of branch pipes as the number of liquid tanks are provided, and the second manifold J2 and the fourth manifold J4 are provided with 2 pipes.
A branch pipe is provided. The manifold J2 for liquid merging and the manifold J4 for liquid distribution employed in the device 6 are:
It has the same basic structure as the manifold having the structure shown in FIG. 9 employed in the circulating filtration apparatus, and can obtain a liquid flow rate corresponding to the liquid flow cross-sectional area in each branch pipe. The manifolds J1 and J3 for liquid merging and the manifolds J5 and J6 for liquid distribution employed in the apparatus 6 have the same structure as the manifold shown in FIG. 10, and are made of vinyl chloride resin. (PVC). These manifolds may be made of another material, for example, other synthetic resin or metal, depending on the quality of the processing liquid.
As shown in FIG. 10, each of J3, J5, and J6 is not limited thereto, but here is a manifold body 6 having a circular cross section.
00 and five connected thereto, here, but not limited to, branch pipes 601, 602, 603, having a circular cross section.
604 and 605.

The manifold main body 600 has a main opening 600a at one end for connecting another pipe, and a closed cylindrical body having a substantially uniform inner diameter (a substantially uniform liquid flow cross-sectional area) closed at the other end 600b. It is.

The opening 6 of the manifold main body 600 under the same positive or negative pressure on the branch pipes 601 to 605.
The cross-sectional area of 00a has a cross-sectional area corresponding to the total cross-sectional area of the branch pipes 601 to 605 that provide the required predetermined liquid flow rates. The liquid flow cross-sectional area of each branch pipe is the same here. The cross-sectional area of the manifold main body 600 has a cross-sectional area slightly larger than the opening 600a as a cross-sectional area having a margin with respect to the total cross-sectional area of the plural branch pipes.

The branch pipes 601 to 605 are inserted into the manifold main body at five points in the longitudinal direction of the manifold main body 600 from a direction orthogonal to the longitudinal direction of the manifold main body. Is greater than or equal to １ ／ and ３ of the inner diameter R ′ of the main body 600.
Within the following range:

The projecting insertion height of each of the branch pipes 601 to 605 into the manifold main body 600 is determined under the liquid suction pressure (negative pressure) or the liquid sending pressure (positive pressure) of the pump 61 over the manifold main body. The pressure (negative or positive pressure) in the manifold body is kept under a uniform pressure.

The manifold body 600 includes branch pipes 601 to 605.
Are connected in a liquid-tight manner by an adhesive, welding or the like.

Also in the manifold having this structure, when the suction port of the pump 61 is communicated with the main opening 600a of the manifold body 600 and used as a manifold for liquid merging, the hydraulic pressure in the manifold body ( Negative pressure) is equalized in each part in the manifold body,
Therefore, the amount of liquid absorbed from each of the branch pipes 601 to 605 into the manifold main body 600 depends on the liquid flow cross-sectional area of the branch pipe. Here, the liquid absorption amounts are the same.

The main opening 600 of the manifold main body 600
When the discharge port of the pump 61 is communicated with a and used as a manifold for liquid distribution, the liquid pressure (positive pressure) in the manifold main body is equalized in each part in the manifold main body.
The amount of liquid discharged from 605 depends on the liquid flow cross-sectional area of the branch pipe. Here, the same amount of liquid is discharged.

As described above, here, the manifold J
As manifolds 1 to J6 (see FIG. 1), manifolds capable of obtaining a flow rate corresponding to the cross-sectional area of the liquid flow in each branch pipe are employed, thereby continuing the mutual liquid mixing of each liquid tank. The liquid level control in each of the liquid tanks 11 to 15 can be appropriately performed in a state corresponding to the liquid level in each liquid tank, and accordingly, each valve for controlling the liquid level can be controlled. V
The number of times of opening and closing a and Vb (see FIG. 1) can be reduced, and the opening and closing cycle can be lengthened accordingly, and the durability of the electric valves Va and Vb can be lengthened.

According to the liquid mixing and liquid level control apparatus 6 described above, when the liquid level in the overflow box B2 of each liquid tank is at the normal position, each valve Va,
When Vb is opened and the liquid circulation pump 61 is operated,
The liquid is sucked from the respective overflow boxes B2 of the plurality of liquid tanks 11 to 15 via the valves v61 and v71,
The liquid in each tank is divided into a first manifold J1 and a third manifold J for liquid merging.
3, the branch pipes flow into the main body of the manifold from the branch pipes, merge, and further flow from the main body of the manifold to the branch pipe of the second manifold J2 for liquid merging, and the manifold J2 And the liquid circulation pump 61 in a state where the liquids in the respective tanks are mixed.
Sucked into.

The liquid sucked into the liquid circulating pump 61 is discharged from the pump, filtered by the filter 60, and then flows into the main body of the fourth manifold J4 for liquid distribution. The liquid flows into the main bodies of the fifth manifold J5 and the sixth manifold J6 for liquid distribution, and is returned to each of the liquid tanks 11 to 15 via each branch pipe of the manifold.

The plating solutions sucked from the respective liquid tanks merge at manifolds J1 and J3, further merge at manifold J2, are sucked and discharged by the liquid circulation pump 61, and further pass through the filter 60. Then, in the process of being distributed by the fourth manifold J4 and further distributed by the fifth manifold J5 and the sixth manifold J6, the plating solutions from the plurality of liquid tanks 11 to 15 are mixed, and this is continuously performed. As a result, the plating solution composition in each solution tank is maintained homogeneous.

As described above, the liquid surface position of each liquid tank is controlled.

As described above, by mixing the processing liquids in the respective liquid tanks, the production operation can be continuously performed under a uniform liquid composition. Moreover, these liquid mixing and liquid level control are achieved by one liquid circulation pump 61.

As described above, the processing liquid can be maintained homogeneously between the liquid tanks while the complexity, size, and cost of the apparatus are suppressed, and the liquid level position in each liquid tank is determined. Can be suppressed.

It should be noted that at least the liquid circulating pump 6 has the same configuration as the liquid mixing and liquid level control device 6 described above.
By providing each circuit for guiding the liquid to 1 and the liquid surface position detecting device 62 for the overflow box B2, the plating processing is performed with little obstruction in the portion containing the liquid before passing over the weir of the liquid tank. I can do it. In addition, in an overflow box in which the vertical fluctuation of the liquid level can be made large with respect to the fluctuation of the liquid amount in the entire liquid tank, the fluctuation of the liquid surface position in the liquid tank can be determined more finely, and appropriate liquid surface position control can be performed.

The filter 60 may be smaller in size than the original filters 31 and 41 for circulating filtration that can handle the amount of liquid flowing into the overflow box. Moreover, one filter 60 is sufficient as described above.

The circulation filtration of the plating solution by the circulation filtration devices 3, 4A and 4B in the plating apparatus shown in FIG. 1 is not limited to each of the liquid tanks. About 3
It can be circulated and filtered once. That is, the filtration amount can be about three times the volume as a standard.

The liquid processing amount for liquid mixing and liquid level control by the circulating filtration device 6 can be, for example, an amount of circulating filtration about 0.5 times per hour with respect to the liquid capacity of one liquid tank.
That is, the filtration amount can be about 0.5 times the volume as a standard.

For example, assuming that the regular liquid storage amount in each of the five liquid tanks shown in FIG. 1 is 5 m ³ , the filtration amount per minute can be set as shown in the following table.

Number of circulation filtration times × liquid storage amount × liquid tank number ÷ filtration time = 1 minute filtration amount Filtration device 33 × 5 m ³ × 1 × 60 minutes = 0.25 m ³ / min Filtration device 4A 3 × 5 m ³ × 2 × 60 min = 0.5 m ³ / min Filtration device 4B 3 × 5 m ³ × 2 ６０ 60 min = 0.5 m ³ / min Filtration device 6 0.5 × 5 m ³ × 5 ６０ 60 min = 0.208 m ³ / min Next, each liquid tank 11 15 to 15, weirs 21 and 22 (see also FIG. 4) facing the overflow boxes B1 and B2 will be described.

Since the weir portions 21 and 22 are the same for any of the liquid tanks, the description will be made exemplifying the liquid tank 12 provided here. Regarding other liquid tanks, the following description applies to the point of the weir.

The weir 21 is formed by forming an overflow notch 20 at the upper edge of a partition wall w1 (see FIG. 4) between the liquid tank 12 and the overflow box B1. The weir 22 is composed of the liquid tank 12 and the overflow box B2.
A notch (notch) 20 for overflow is formed at the upper end edge of the partition wall w2 (see FIG. 4). Here, the overflow notches 20 in the dams 21 and 22 have the same shape and size.

Here, each notch 20 has an inverted triangular shape, and a plurality of notches 20 and 22 are formed.

As described above, the notch 20 for liquid overflow is used.
The liquid overflows from the notch 20 to the overflow boxes B1 and B2 by adopting the weirs 21 and 22 formed with the above, so that the liquid flows from the weirs 21 and 22 together with the floating impurities to the overflow boxes B1 and B2. Once they have flowed in, they can be pumped out of the box as described above, and these aspirated liquids can be subjected to filtration.

The weirs 21 and 22 formed with the notch 20 for liquid overflow are employed so that the liquid overflows from the notch 20 to the overflow boxes B1 and B2. Even if it rises slightly from the liquid level position for overflow, as long as the rising liquid level position faces the notch 20,
The overflow does not suddenly increase at the same time over the entire length of the upper edge of the weir as in the conventional rectangular weir, so that the total overflow does not increase significantly. Only the overflow amount increases by the increase in the liquid flow cross-sectional area.

Even if the liquid level in the liquid tank 12 is lowered, as long as the lowered liquid level position faces the notch 20, the overflow amount is simultaneously increased over the entire length of the upper end edge of the weir portion as in a conventional rectangular weir. Does not significantly reduce the total amount of overflow.
The overflow amount is only reduced by the decrease in the liquid flow cross-sectional area due to the lowering of the liquid level at zero.

Therefore, even if the liquid level in the liquid tank 12 fluctuates up and down, the overflow amount increases or decreases very slowly as compared with the conventional rectangular weir. In other words, even if the liquid level in the liquid tank 12 fluctuates up and down, the fluctuation in the overflow amount is suppressed to be very small as compared with the conventional rectangular weir.

Thus, for appropriate filtration of the liquid, the amount of liquid absorbed from the bottom of the liquid tank 12 (for example, approximately 70% of the amount of circulating filtrate) is set according to the amount of circulating filtration corresponding to the capacity of the filtration pump. ) And the amount of liquid absorbed from the overflow box (for example, approximately 30% of the amount of circulating filtrate), and appropriate filtration of the liquid is achieved.

Also, weirs 21 and 22 formed with a notch 20 for liquid overflow are adopted so that the liquid overflows from the notch 20 to the overflow boxes B1 and B2. Since the liquid extends in the depth direction of the liquid before passing over the notch 22, not only the buoyant impurities that easily float on the liquid surface in the liquid tank 12 but also the impurities that easily float below the liquid tank 12 are removed from the notch 20 by the overflow box B1. , B2, and impurities floating below the liquid level can be collected and filtered.

Further, the shape of the notch 20 (in particular, the angle of the apex of the lower end of the inverted triangle of the notch and the depth of the notch)
There is also an advantage that the overflow amount can be easily set by selecting the number and the number. Although the notch 20 is illustrated as having an inverted triangular shape, it may have another shape such as a rectangular shape or a U-shape.

When an inverted triangular notch is used as shown in the figure, the lower apex angle of the inverted triangular shape is not limited to 40 ° to 90 °, more preferably 50 °.
６０60 ° can be exemplified.

As shown in FIG. 12A, the width is 500 mm.
And the standard liquid level in the liquid tank is at a position h = 10 mm higher than the upper end of the rectangular weir 200. At this time, the standard liquid amount (predetermined liquid amount) that overflows beyond the weir 200 is approximately Assuming that the liquid level in the liquid tank rises to 15 mm, 20 mm, and 25 mm, the amount of liquid overflowing the rectangular weir 200 is 101.4 liters / minute, as shown in the following table. Minutes, 15
6.1 liters / minute and 218.2 liters / minute.

Here, instead of the rectangular weir 200, a rectangular notch N1 having a width of 40 mm as shown in FIGS. 12B, 12C and 12D, and a notch N having an inverted triangular lower end having a vertex angle of 90 degrees are used.
2. When the weirs 201, 202, and 203 each having a notch N3 having an inverted triangular lower end apex angle of 60 degrees are used,
In order to obtain the same standard overflow liquid amount of 55.2 liters / minute as that of the rectangular weir 200, as shown in the following table, assuming that the number P of the notches N1 is 5 for the weir portion 201, the liquid of each notch N1 The height h1 of the flow cross section is 18.4 m
m.

As for the weir portion 202, assuming that the number P of the notches N2 is 5, the height h of the liquid flow section of each notch N2 is h.
2 may be set to 28 mm.

As for the weir portion 203, assuming that the number P of the notches N3 is four, the height h of the liquid flow section of each notch N3 is h.
3 may be 38.1 mm.

That is, in any of the weirs 201, 202, and 203 having notches for liquid overflow, the notches extend in the depth direction of the liquid.
It is cut deeper than the height h = 10 mm from the upper end of 0 to the liquid surface. Thus, it can be seen that not only floating impurities that easily float on the liquid surface but also impurities that easily float in the lower layer can overflow from the notch.

Further, the liquid level of the liquid tank was changed to the rectangular weir 2 as described above.
When trying to obtain the same overflow liquid amount as the overflow liquid amount exceeding the weir 200 when h = 15 mm, 20 mm, and 25 mm, respectively, from the upper end of 00, the number of notches in each of the notched weir portions 201, 202, and 203 is obtained. The height h1, h of the liquid flow cross section at P and the notch
2, h3 is as shown in the following table. That is, according to the following table, the height of the liquid level is 5 m from the normal liquid level position (position at a height of 10 mm)
Even if it changes to m (when h = 15 mm), 10 mm (when h = 20 mm), and 15 mm (when h = 25 mm), the notch dams 201, 202, and 203 do not change the overflow liquid amount. It can be seen that it can be suppressed smaller than the rectangular weir 200.

In the following table, M indicates the amount of overflow liquid liter / minute in the rectangular weir 200, m indicates the amount of overflow liquid liter / minute in each notch, and P indicates the number of notches. The unit of h, h1, h2, and h3 is [mm]. By the way, according to the so-called rectangular weir in which the conventional upper edge extends horizontally and straight, the amount of liquid absorbed from the bottom of the liquid tank and the amount of liquid absorbed from the overflow box are set to a predetermined ratio according to the capacity of the filtration pump. However, even if the liquid level in the liquid tank rises slightly, the amount of overflow increases greatly, causing the amount of liquid in the overflow box to exceed the capacity of the pump box to absorb the liquid from the overflow box. As described above, the liquid level in the liquid tank and the liquid level in the overflow box are close to the same position, and the head becomes small, and eventually the floating impurities may not be sufficiently collected in the overflow box. This will be explained a little more.

For example, in an electroplating solution treatment of an article,
The amount of circulating filtration of the plating solution in the plating solution tank varies depending on the material to be plated, but a filtration amount that is approximately three times the amount of the treatment solution in the solution tank per hour is regarded as a standard. The following is an example of the amount of circulating filtration of a liquid tank having the overflow boxes B1 and B2 for overflowing the plating solution from a conventional so-called rectangular weir.

Liquid tank inner width Liquid tank inner length and liquid height Liquid amount Weir length (liquid depth) Liquid tank 1.0m 10m 1.1m Liquid tank Internal liquid amount 11m ³ Box B1 0.2m 10m 0.3m Box B1 circulating total filtration amount per hour of the liquid volume 0.6 m ³ box B2 0.4 m 1 m 0.5 m box B2 fluid volume 0.2 m ³ total 11.8 m ³ the liquid volume 11.8 m ³ is, 11.8 m ³ × 3 times = It becomes 35.4 m ³ / hr.

Then, the filtration amount of the treatment liquid in the liquid tank and the overflow box was set to 70%, 30% of the total filtration amount, respectively.
Setting it to% gives:

Amount of filtration of liquid in liquid tank 35.4 m ³ /hr×70%=24.8 m ³ / hr Overflow box 35.4 m ³ /hr×30%=10.6 m ³ / hr overflow amount by total 35.4m ³ / hr However conventional rectangular weir, and the height h from the weir upper end to the liquid surface (see FIG. 12 (a)) and the general average h = 10 mm, as follows Become.

When the weir width is 500 mm as described above when h = 10 mm, the overflow amount is approximately 55.2 liters / minute as described above, and the weir width is set to the box B1.
10m and the length of the box B2 1m are 11m in total, so 55.2 liters / min @ 500mm × 11m
× 60 minutes = 72.86 m ³ / hr, and the circulating filtrate amount set for the overflow box.
It is much more than 6 m ³ / hr.

This means that the amount of liquid in the overflow box becomes too large, exceeding the capacity of the pump to absorb the liquid from the overflow box, and the liquid level in the liquid tank and the liquid level in the overflow box rapidly become the same. This means that the head is close to the position and the head is eliminated, so that floating impurities cannot be sufficiently collected in the overflow box. As a result, there is a serious problem that defective liquids are frequently generated such that liquid filtration becomes insufficient, impurities adhere to the surface of the object to be plated, and roughness occurs.

The position of the liquid level in the liquid tank is determined by the pumping liquid and / or the adhering liquid to the object in the pretreatment step of the object, and Since it fluctuates every moment due to the pumping of the processing liquid and the evaporation of water when the liquid is heated by the heat exchanger, it is frequently necessary to adjust the liquid surface position in each liquid tank and the amount of liquid flowing into the overflow box. It was annoying and important work.

In this respect, the use of the weir portion provided with the notch for liquid orver flow as described above allows the overflow amount to be increased as compared with the conventional rectangular weir even if the liquid level in the liquid tank fluctuates up and down. Fluctuation is suppressed to a small value, thereby maintaining the amount of liquid absorbed from the bottom of the liquid tank and the amount of liquid absorbed from the overflow box set in accordance with the amount of circulating filtration liquid corresponding to the capacity of the pump for filtration. Appropriate filtration can be achieved, and the occurrence of rejects can be greatly reduced.

The dams 21 and 22 are fixedly provided by forming a notch 20 at the upper edge of the partition walls w1 and w2 between the liquid tank and the overflow boxes B1 and B2. In order to more easily and easily perform the appropriate filtration of the liquid, a weir member that can be detachably installed at the upper edge of the partition wall between the liquid tank and the overflow box may be employed as the weir. FIG. 13 shows an example of such a detachable weir member, and FIG. 14 shows another example of the detachable weir member.

FIG. 13A is a perspective view of the dam member 8. FIG.
FIG. 13B shows a use state of the weir member, and FIG.
3 (A) is shown in a cross section along the line XX. Weir member 8
Is formed integrally with a plate body 81 in which four rectangular notches 80 for liquid overflow are formed, and a wall insertion portion 800 having a gate shape in section (or U-shape) is formed, and a reinforcing rib 83 is also integrally formed avoiding the notch 80. It is formed in.

Although not limited to this, the wall insertion portion 800 here is in the form of a recess, and is formed by integrally providing an inverted L-shaped bent plate portion 82 in the middle of one surface of the plate body 81. I have. In the lower part of the bent plate portion 82 and the plate body 81 located at a position overlapping with the bent plate portion 82, elongated holes 82a long in the vertical direction for bolt penetration are provided. This weir member 8 is
Although not limited to this, here, the whole is integrally formed of a synthetic resin (for example, vinyl chloride resin when the processing liquid is an electroplating liquid) that is resistant to the processing liquid in the liquid tank.

The weir member 8 is connected to the liquid tank 11 (12, 13,
14, 15) and the overflow boxes B1, B2. FIG. 13B shows a state in which the weir member 8 is inserted into the partition wall w2 between the liquid tank 11 and the overflow box B2 from above at the wall insertion portion 800. The weir member 8 may be 1 or 2 depending on the amount of liquid in the liquid tank, the size of the notch 80, and the like.
The above is used. When two or more dam members are used, the adjacent weir members 8 are brought into contact with each other and inserted into the partition wall w2. Although not shown, a weir member similar to the weir member 8 is also inserted into the partition wall w1 between the liquid tank and the overflow box B1.

As shown in FIG. 13 (A), when the dam member 8 is inserted into the partition wall w2, a liner LN for height adjustment is disposed at the back of the upper end of the wall insertion portion 800 as required. The dam member 8 can be placed directly or through the liner LN on the upper end of the partition wall w2.

The weir member 8 inserted into the partition wall w2 as described above is provided with the elongated hole 82a for bolt penetration therethrough in advance from the side of the inverted L-shaped bent plate portion 82 and the wall w2 in advance. Bolts 8 are inserted into bolt holes having an inner diameter through which the bolts 84 can just pass and elongated bolt holes 82 a of the plate body 81.
4 is passed through and tightened with a nut. At this time, if necessary, the liquid sealing material 840 fitted to the bolt 84 is applied to the respective outer surfaces of the bent plate portion 82 and the plate body 81, whereby the portion where the bolt through slot 82a is opened becomes liquid-tight. close.

Thus, the weir member 8 has a predetermined height on the partition wall between the liquid tank and the overflow box, in other words,
The notch 80 is set with its height set to a height at which a predetermined liquid overflow amount is obtained.

According to this weir member 8, since the notch 80 for liquid overflow is formed, there is an advantage similar to that of the weir portions 21 and 22 having the notch 20 described above.

Further, according to this weir member 8, the overflow amount can be easily set by selecting and adopting an appropriate weir member from among the weir members 8 for which the overflow amount is variously set.
The overflow amount can be easily changed by changing the mounting height of the dam member 8 by changing the liner LN to one having a different height, or by replacing the dam member 8.

When the partition walls w2 and w1 have poor corrosion resistance to the processing liquid, for example, are made of a metal material, and when the surfaces thereof are coated with a corrosion resistant synthetic resin or the like, holes for passing the bolts 84 are provided. The portion of the metal material or the like that is exposed at the time of providing the holes may be protected by putting a corrosion-resistant sealant into the bolt holes.

FIG. 14A is a perspective view of the weir member 8 '. FIG. 14B shows a use state of the weir member.
It is shown in a cross section along the line YY in FIG. The weir member 8 ′ is a modified example of the weir member 8 described above, and differs from the weir member 8 in the following points. The other points are the same as those of the weir member 8, and the same parts as those of the weir member 8 are denoted by the same reference numerals.

In this weir member 8 ', a long hole 82a for bolt penetration is also formed in the upper part of the plate 81 on which a rectangular notch 80 for liquid overflow is formed. Such a long hole 82a
Are formed at both ends of the plate 81 here. The upper horizontal portion of the inverted L-shaped bent plate portion 82 is removed at positions outside the reinforcing ribs 83 at both ends of the plate body 81.

This weir member 8 'is similar to the weir member 8 in FIG.
As shown in FIG. 4B, the partition wall w is formed at the wall insertion portion 800.
Plug into 2. However, at this time, a rising wall W ′ which is integrally extended in advance from the upper end of the partition wall w2 in advance and penetrates through the deleted portion of the upper horizontal portion of the inverted L-shaped bent plate portion 82, and It overlaps the upper part of both ends of the body 81. Although not shown, a weir member similar to the weir member 8 'is also inserted into the partition wall w1 between the liquid tank and the overflow box B1.

The weir member 8 'is not only bolted and fastened to the partition wall w2 at the lower part of the plate body as in the case of the weir member 8, but also bolted to the rising wall W' at the upper part of the plate body 81. Is done. That is, the bolt 84 ′ is passed through a bolt hole having an inner diameter through which the bolt 84 ′ is provided in advance on the rising wall W ′ and an elongated hole 82 a for bolt penetration above the plate body 81, and tightened with a nut.
Also at this time, if necessary, the liquid sealing material 840 fitted to the bolt 84 ′ is applied to the plate body 81, thereby closing the open portion of the elongated bolt hole 82 a in a liquid-tight manner. Thus, the weir member 8 'is attached to the partition wall between the liquid tank and the overflow box at a predetermined height, in other words, the height position of the notch 80 is set to a height position to obtain a predetermined liquid overflow amount. Can be

This dam member 8 ′ has the same advantages as the dam member 8. Further, in the weir member 8 ', a wall W' corresponding to a part of the partition wall w2 is overlapped and fixed on a part thereof, so that the dam member 8 may be damaged by a large liquid pressure in the liquid tank. At some point, there is no danger in the weir member 8 '.

In the weir members 8 and 8 'described with reference to FIGS. 13 and 14, the notch 80 for liquid overflow is a rectangular notch, but the notch for liquid overflow is also provided in the weir members 8 and 8'. The above-mentioned weirs 21 and 22 may have inverted triangular notches, or may have other shapes.

Further, the weir members 8 and 8 'are separated from the partition walls w1 and w2.
In place of the above-mentioned through bolt 84, a member which is screwed into the weir members 8 and 8 'to abut against the wall surfaces of the partition walls w1 and w2 to fix the weir member to the partition wall is adopted. You may.

[0229]

As described above, according to the present invention, there is provided one or more overflow boxes for causing impurities floating in the upper layer in the liquid stored in the liquid tank to overflow from the weir together with the liquid. A liquid suction device from a liquid tank overflow box for absorbing a liquid flowing into the overflow box of a liquid tank for a filtration treatment, wherein the liquid in the overflow box is passed through a bottom liquid passage port of a conventional liquid tank. Eliminates the problem of clogging due to impurities, etc., can be smoothly removed by suction for filtration and replacement filtration.In addition, the level of liquid in the overflow box can be easily and easily adjusted by visual observation during filtration. As a result, the liquid level in the box can be maintained at an appropriate level with respect to the liquid level in the liquid tank, and in the replacement filtration process, If also recover liquid from the bar headbox, it is possible to provide a liquid absorbing apparatus from easily liquid tank overflow box prevented air sucked into the pump and filter of the filtration device from the overflow box.

[Brief description of the drawings]

FIG. 1 is a schematic plan view of a plating apparatus which is an example of a liquid-based article processing apparatus employing a liquid tank according to the present invention.

FIG. 2 is an enlarged plan view of a part of a liquid tank and a peripheral part thereof.

FIG. 3 is an enlarged side view of one of the liquid tanks shown in FIG. 2 and a peripheral portion thereof.

FIG. 4 is a perspective view of a part of the liquid tank.

5A is a perspective view of an anode case and the like, FIG. 5B is a perspective view of an anode bag, and FIG. 5C is a perspective view of a cathode bus bar, a hanger, a hook member, and the like.

FIG. 6A is a plan view of a first suction head, and FIG.
Is a side view of the first suction head, and FIG. (C) is a cross-sectional view of the bottom groove in the liquid tank, the bottom of the overflow box, and components related thereto.

FIG. 7 is a side view of the second suction head.

FIG. 8 is a perspective view of another example of the second suction head.

FIG. 9 is a side view, partially in section, of a manifold having two branch pipes.

FIG. 10 is a side view showing a cross section of a part of a manifold having five branch pipes.

11A is a block diagram of a control circuit of the plating apparatus shown in FIG. 1, and FIG. 11B is a view showing a schematic configuration of a liquid level detection device.

FIG. 12A is a diagram showing an example of a conventional rectangular weir member, FIG. 12B is a diagram showing an example of a weir member having a rectangular notch for liquid overflow, and FIGS. It is a figure which shows the weir member example which has the inverted triangular notch for each liquid overflow.

FIG. 13A is a perspective view of an example of a detachable weir member, and FIG. 13B is a diagram illustrating a use state of the weir member.
It is sectional drawing which follows the X-ray.

14A is a perspective view of another example of a detachable weir member, and FIG. 14B is a cross-sectional view taken along line YY of FIG. is there.

FIG. 15 is a side view showing a partial example of a conventional manifold.

FIG. 16 is a schematic perspective view of a conventional liquid tank and its peripheral portion.

[Explanation of symbols]

11, 12, 13, 14, 15 Plating solution tank (example of article processing solution tank) 16 Pretreatment washing tank L Plating solution W Washing water D1, D2, D3, D3, D4 Work deck 101 Inner bottom 102 of solution tank Inner bottom groove provided in liquid tank 103 Aeration device 103a Air bubble 104 First suction head 104a Pipe connection port 104b Liquid suction hole 105 Air blocking wall plate 105a Supporting piece 105b Support plate 106 Second suction head 106a Pipe connection port 106b Suction Liquid hole 106c Support piece 106d Support plate 107 Suction head 107a Pipe connection port 107b Suction hole 107c Foot 108 Third suction head B1, B2 Overflow boxes w1, w2 Partition walls 21, 22 between liquid tank and overflow box Weir Part 20 Notch of the weir part A Anode bus bar C Cathode bus bar H Hanger S Hanging member m 'Anode material CS Anode case CSb Anode bag a1, a2 Plated article 3 Circulating filter 31 Filter 32 Circulating pump (centrifugal pump in this example) 33 Manifold for liquid merging v11-v15 Manual open / close valve v16 Check valve 4A, 4B Circulating filtration device 41 Filtration device 42 Circulating pump (centrifugal pump in this example) 430, 431, 432 Manifold for liquid merging 433 Manifold for liquid distribution v41 to v45 Manual open / close valve v46 Check valve 45 Temperature control circuit 451 Heat exchanger va ', vb' Manual open / close valve V Flow rate regulating valve 452 Liquid distribution manifold 51 Opening change device v51, v52, v61-v64, v71 Manual open / close valve 511 Opening change tank v53 Foot valve 401 Manifold body 402, 403 Branch pipe 401a Main opening of manifold body 401 401b Manifold The other end of the main body 401 9 Conventional manifold 91 Manifold main body 91a Main opening 91b Hole 92 Branch pipe 90 Flow control valve 6 Device for liquid mixing and liquid surface position control 60 Filter 61 Circulating pump (centrifugal in this example) Pump) 62 liquid level position detection device 621-625 electrode rod 63 liquid outlet Vo check valve J1, J2, J3 manifold for liquid merging J4, J5, J6 manifold for liquid distribution Va electric valve for liquid discharging Vb Electric valve for liquid supply 7 Control unit 71 Operation panel 600 Manifold main body 601 to 605 Branch pipe 600a Main opening of manifold main body 600b Other end of manifold main body 600 200 Conventional rectangular weir 201 to 203 Weir N1 and N2 , N3 Notch 8, 8 'Weir member 80 Rectangular notch for liquid overflow 81 Plate body 82 Inverted L-shaped bent plate part 82a Long hole for bolt penetration 83 Reinforcement 84, 84 'bolt 800 wall insertion portion 840 liquid sealing material LN liner W' rising wall 10x liquid tank Ax liquid tank bottom groove Bx overflow box 10 'liquid tank L' liquid B1 ', B2', B3 'overflow box 21' , 22 ', 23' rectangular weir v1'-v7 ', v1 ", v7", v8', v9 'manual opening / closing valve V' foot valve Lb, Lb 'liquid inlet F filter P circulation pump H heat exchanger 100 'Liquid return port 511v Foot valve 511' Liquid discharge port

──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int. Cl. ⁷ , DB name) C25D 21/06 C25D 21/18

Claims (1)

(57) [Claims] 1. A liquid flowing into an overflow box of a liquid tank having one or more overflow boxes for causing impurities floating in an upper layer portion of the liquid stored in the liquid tank to overflow together with the liquid from a weir section. A suction device for absorbing liquid from a liquid tank overflow box that absorbs liquid for a filtration process, a suction head for absorbing liquid from a bottom portion of the overflow box for the filtration, and a suction head extending upward from the suction head. A liquid suction pipe extending out of the box and having an on-off valve near an upper end opening of the box.