JP3312992B2 - Interference surface correction jig for light wave interference measurement of block gauge size - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a jig for correcting an interference surface of a block gauge, which is used when determining the size of the block gauge by light wave interference measurement.

[0002]

BACKGROUND ART It is stipulated in JISB7506 that the dimension measurement of a block gauge is basically determined by light wave interference measurement. According to this JISB7506, both the measurement surface of the block gauge and a reference block having a reference plane to which the block gauge is closely attached (ringed) are irradiated with light,
The distance between the measurement surface and the reference plane is measured as the block gauge size using the light reflected from the measurement surface and the reference plane of these block gauges. Here, the measurement surface and the reference plane act as interference surfaces during measurement.
The material of the block gauge is generally steel or ceramic, but JISB7506 stipulates that the block gauge and the reference block are the same material. However, since the quality of the close contact between the block gauge and the reference plane affects the dimension measurement result, it is necessary to check whether the block gauge is securely adhered to the reference plane. Therefore, in practice, the reference block is made of synthetic quartz or the like so as to be substantially transparent so that the adherence between the block gauge and the reference plane can be visually confirmed from the back surface.

[0003]

The close contact between the block gauge and the reference plane is performed manually by an operator. During this operation, the temperature of the block gauge and the reference block rises due to the influence of the worker's body temperature, and the state is increased. The two are brought into close contact. However, since the temperature rise of the block gauge and the reference block is not preferable, the measurement is performed after the temperature is brought close to room temperature (about 20 ° C.) for a certain period of time. Since the block gauge and the reference block are made of different materials and have different coefficients of linear expansion, when performing light wave interference measurement, thermal stress distortion occurs in the block gauge and the reference block, and the flatness of the measurement surface and the reference plane is measured. However, there is a problem that the precision measurement of the block gauge dimension is not sufficiently performed due to deterioration of the gauge.

The present invention has been made in view of such circumstances, and an object of the present invention is to accurately measure the dimensions of a block gauge by recovering the deterioration of the flatness between the measurement surface of the block gauge and the reference plane of the reference block. It is an object of the present invention to provide an interference surface correction jig for light wave interference measurement having a block gauge dimension that can be performed and can reduce damage to a contact surface between a reference plane and a block gauge at the time of correcting an interference surface. Different objects of the invention are:
In addition to the above object, an object of the present invention is to provide an interference plane correction jig for light wave interference measurement having a block gauge dimension that does not cause the close contact between the reference plane and the block gauge.

[0005]

SUMMARY OF THE INVENTION It is an object of the present invention to achieve the above object by making a reference block and a block gauge relatively movable in a reference plane by a piezoelectric element while maintaining a close contact state. Specifically, the interference surface correction jig for light wave interference measurement of the block gauge dimensions of the present invention uses a block gauge and a reference block formed of different materials, respectively, and is in close contact with a reference plane of the reference block. An interference surface correction jig used for light wave interference measurement for determining the size of a block gauge, a reference block holding means for holding the reference block, a block gauge holding means for holding the block gauge, and these blocks A piezoelectric element provided on at least one of the gauge holding means and the reference block holding means for relatively moving the block gauge and the reference block within the reference plane while maintaining a close contact state.

Here, an applied voltage signal is sent from the control means to the piezoelectric element, and the applied voltage signal may be a rectangular wave-like signal or a step-like signal with time. Further, the piezoelectric element may be provided in the block gauge holding means, and the reference block holding means may have a structure including a stopper mechanism for restricting movement of the reference block in the block gauge pressing direction. The stopper mechanism includes a stopper block, and a reference block holding member disposed between the stopper block and the reference block, the reference block holding member being orthogonal to the reciprocating vibration direction of the piezoelectric element and movable in the same plane as the reference plane. The reference block holding member may have a guide formed so as to coincide with a side surface of the reference block. Further, the piezoelectric element may have a structure in which the short side surface of the rectangular parallelepiped block gauge can be pressed via the block gauge holding means. The block gauge holding means may have a structure having a tapered portion with a taper and an operating plate whose tip end presses the block gauge in the vicinity of the reference plane. At least one of the reference block holding means and the block gauge holding means,
A configuration may be provided that includes a reference block movement restricting member that restricts the movement of the reference block on the block gauge side.

[0007]

In order to measure the light wave interference of a block gauge, first, an operator manually brings the block gauge into close contact with the reference plane of the reference block. The close contact between the block gauge and the reference plane is confirmed by visual observation from the back surface of the reference block. Since the body temperature of the worker is transmitted to these members as the block gauge and the reference plane of the reference block are brought into close contact with each other, the temperature is brought close to room temperature (around 20 ° C.) for a certain period of time. After a lapse of a predetermined time after the end of the temperature break-in, the block size is measured. Before the measurement, an interference surface correction jig is used. That is, a temperature change occurs due to temperature break-in or the like, and thermal stress distortion occurs in the block gauge and the reference block. Although the flatness of the measurement plane and the reference plane deteriorates due to the thermal stress distortion, an applied voltage signal is sent to the piezoelectric element in order to recover the deterioration.

Accordingly, the block gauge and the reference block are relatively displaced via the block gauge holding means and the reference block holding means while maintaining a close contact state in the reference plane. The generated thermal stress strain is released and corrected to an appropriate flatness. Here, the distance by which the block gauge and the reference block are relatively moved by the piezoelectric element is 0.05 to 0.1 m.
m. If the thickness exceeds 0.1 mm, the contact between the two will come off, making it impossible to measure the appropriate block gauge dimensions, and may result in significant damage to the contact surface between the reference plane and the block gauge at the time of correcting the interference surface. By the interference surface correction jig
When the flatness between the reference plane and the measurement surface of the block gauge is corrected, in accordance with JISB7506, light is applied to both the measurement surface of the block gauge and the reference plane on which the block gauge is in close contact, and these measurement surfaces and Using the light reflected from the reference plane, the distance between the measurement plane and the reference plane is measured as a block gauge dimension.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of an interference surface correcting jig for measuring light wave interference with a block gauge according to the present invention will be described below.
This will be described in detail with reference to the accompanying drawings. FIG. 1 is a front view showing an interference surface correcting jig according to an embodiment, FIG. 2 is a plan view thereof, and FIG. 3 is a cross-sectional view taken along line III-III of FIG. 1 and 2, an interference surface correction jig includes a reference block holding means 2 for holding a cylindrical reference block 1, and a block gauge holding means for holding a block gauge 3 disposed on the reference block 1. 4 and
The block gauge 3 is provided on the block gauge holding means 4 and is provided through the block gauge holding means 4.
And a control means 20 for sending an applied voltage signal to the piezoelectric element 18.
The reference block 1 is formed of a substantially transparent material such as synthetic quartz, and has an upper end surface having a high flatness.
A. The block gauge 3 is in close contact (ringing) with the reference plane 1A. The block gauge 3 is formed in a rectangular parallelepiped from a material different from the reference block 1, such as steel or ceramic. The surface of the block gauge 3 facing the reference plane 1A and the surface opposite to this surface are defined as measurement surfaces 3A, and the distance between the measurement surfaces 3A is defined as the block gauge size. Further, when measuring the light wave interference of the block gauge size specified in JISB7506, the reference plane 1A and the measurement surface 3A act as interference surfaces.

The reference block holding means 2 includes a flat base block 6, a base plate substrate 7 provided on the base block 6 and supporting a lower end surface of the reference block 1, and a block of the reference block 1. A stopper mechanism 8 for regulating movement in the gauge pressing direction,
The structure has a micrometer head 5 attached to one end of the base block 6 via a micrometer head holding block 9. The micrometer head 5 has a structure including a main body 5A on which graduations are formed and a spindle 5B that can contact the piezoelectric element 18. The base plate substrate 7 has a hole 7A at its center.
The inner diameter of the hole 7A is smaller than the outer diameter of the reference block 1 (see FIG. 3). The stopper mechanism 8 includes a stopper block 10 fixed to the other end of the base block 6 and the stopper block 1.
0 and a reference block holding member 11 disposed between the reference block 1 and the reference block holding member 1.
Numeral 1 is movable in a direction perpendicular to the axial direction of the spindle 5B of the micrometer head 5 in the same plane as the reference plane 1A. An arcuate guide 11A is formed on the upper part of the reference block holding member 11 so as to coincide with the circumferential side surface of the reference block 1.

The block gauge holding means 4 includes a substantially flat operating plate 12 for pressing the block gauge 3, an operating plate guide 14 attached to lower surfaces on both sides of the operating plate 12 by bolts 13, A handle 16 attached to an upper surface of a central portion of the piezoelectric element 12 by bolts 15;
And a piezoelectric element mounting plate 17 provided on a side portion of the operation plate 12 for mounting the operation plate 8, and can be advanced and retracted along the axis of the spindle 5B. FIG.
As shown in FIG. 2, the two operation plate guides 14 and the operation plate 1
2 to form a gate-shaped shape that straddles the reference block 1,
The lower end surface of the operation plate guide 14 is in contact with the upper surface of the base block 6, and the lower surface of the operation plate 12 is in contact with the reference plane 1A of the reference block 1. The handle 16 is formed in a ladder shape from a heat-insulating material, for example, Duracon (trade name), and has a structure that does not easily transmit the body temperature of the worker to the reference block 1 and the block gauge 3. The handle 16 also functions as a weight for urging the operation plate 12 toward the reference block. Here, a reference block movement restricting member 19 for restricting the movement of the reference block 1 on the block gauge side from the operation plate 12, the operation plate guide 14 and the handle 16, in other words, preventing the reference block 1 from floating is provided. It is configured.

As shown in FIG. 2, a window 12A is formed at the center of the operation plate 12 to avoid interference with the block gauge 3 on the reference block 1. Inside the window 12A, Is formed with a tapered portion 12B having substantially the same width as the short side direction of the block gauge 3.
The width direction of the tapered portion 12B is orthogonal to the axis direction of the spindle 5B of the micrometer head 5, and the center in the width direction coincides with the axis line of the spindle 5B.
FIG. 4 shows a sectional structure of the operation plate 12. FIG.
In the above, the tapered portion 12B has a tapered shape, and the tip thereof is configured to press the short side surface of the block gauge 3 near the reference plane 1A. The height of the micrometer head 5 is adjusted so that the axial direction of the spindle 5B is located above the reference plane 1A. The piezoelectric element 18 has a general structure, and is mounted on the piezoelectric element mounting plate 17 such that its vibration direction coincides with the axial direction of the spindle 5B. FIG. 5 shows the waveform of the applied voltage signal sent from the control means 20 to the piezoelectric element 18. The control means 20 may apply one rectangular wave applied voltage signal as shown in FIG. 5A, a plurality of rectangular wave applied voltage signals as shown in FIG. As shown in C), an applied voltage signal that increases in a stepwise manner with time is sent to the piezoelectric element 18.

Next, a method for performing light wave interference measurement of a block gauge size will be described. First, an operator manually brings one measurement surface 3A of the block gauge 3 into close contact with the reference plane 1A of the reference block 1. The state of adhesion between the measurement surface 3A of the block gauge 3 and the reference plane 1A is confirmed by visual observation from the back surface of the reference block 1. These measurement surfaces 3
Block gauge 3 due to the close contact work between A and reference plane 1A
Since the body temperature of the worker is transmitted to the reference block 1, the temperature is brought close to room temperature (around 20 ° C.) for a certain period of time. When a predetermined time elapses after the temperature break-in, the block size is measured. Before the measurement, the measurement surface 3A and the reference plane 1A, which are interference surfaces, are corrected by an interference surface correction jig.

A temperature change occurs due to temperature break-in or the like, and thermal stress distortion occurs in the block gauge 3 and the reference block 1. Although the flatness of the measurement surface 3A and the reference plane 1A deteriorates due to the thermal stress distortion, an interference surface correction jig is used to recover the deterioration. First, the micrometer head 5
Is operated to retract the spindle 5B sufficiently, and the reference block 1 in a state where the block gauge 3 is in close contact with the reference plane 1A is arranged on the base plate substrate 7 of the reference block holding means 2. Thereafter, the reference block 1 is covered with the block gauge holding means 4 to which the piezoelectric element 18 is attached, and the window 12A of the operation plate 12 of the holding means 4 is provided.
The block gauge 3 inside. At this time, the block gauge 3 is arranged such that the tip of the tapered portion 12B of the operation plate 12 abuts on the short side surface thereof.

In this state, the micrometer head 5 is operated to move the spindle 5B forward until it comes into contact with the piezoelectric element 18. After that, the control unit 20 sends the piezoelectric element 1
8 to send an applied voltage signal. Then, the piezoelectric element 18 reciprocates and the tip of the tapered portion 12B presses the short side surface of the block gauge 3 by the vibration. The applied voltage signal sent from the control means 20 to the piezoelectric element 18 is shown in FIG.
In the case of (A), the tip of the tapered portion 12B rapidly presses the short side surface of the block gauge 3 by one vibration. When the applied voltage signal is as shown in FIG. 5 (B), the tip of the tapered portion 12B rapidly presses the short side surface of the block gauge 3 a plurality of times by a plurality of vibrations. FIG. 5 shows the applied voltage signal.
In the case of (C), the tip of the tapered portion 12B gradually presses the short side surface of the block gauge 3 by repeating the minute vibration a plurality of times. When the block gauge 3 is pressed, the reference block 1 also attempts to move in the same direction. However, since the side surface of the reference block 1 is held by the stopper mechanism 8 of the reference block holding means 2, The movement of the reference block 1 in the block gauge pressing direction is restricted. Here, as shown in FIG. 6, when the center P of the reference block 1 is shifted from above the axis L of the spindle 5B, the stopper mechanism 8
The reference block holding member 11 is moved in a direction orthogonal to the axial direction of the spindle 5B to align the guide 11A with the reference block 1.

The reciprocating vibration of the piezoelectric element 18 causes the block gauge 3 and the reference block 1 to relatively relatively shift while maintaining the close contact state in the reference plane 1A. The generated thermal stress strain is released, and the flatness of the reference plane 1A and the measurement plane 3A, which are interference planes, is corrected. Here, the piezoelectric element 18
The distance by which the block gauge 3 and the reference block 1 are relatively moved is 0.05 to 0.1 mm. If it exceeds 0.1 mm, the close contact between them will be released and the measurement of the appropriate block gauge dimensions will not be possible, and the contact surface between the reference plane 1A and the block gauge 3 will be greatly damaged when the interference surface is corrected. is there.

When the flatness between the reference plane 1A and the measurement surface 3A of the block gauge 3 is corrected by the interference surface correction jig, the micrometer head 5 is operated to operate the spindle 5B.
Retreat. Further, the block gauge holding means 4 to which the piezoelectric element 18 is attached is removed, and the reference block 1 on which the block gauge 3 is in close contact is taken out from the reference block holding means 2. The close contact state between the block gauge 3 taken out from the reference block holding means 2 and the reference plane 1A of the reference block 1 is confirmed. Thereafter, in accordance with JISB7506, both the measurement surface 3A of the block gauge 3 and the reference plane 1A to which the block gauge 3 is adhered are irradiated with light, and the light reflected from the measurement surface 3A and the reference plane 1A is used. The distance between the measurement surface 3A and the reference plane 1A is measured as a block gauge dimension.

Therefore, according to the present embodiment, the reference block holding means 2 for holding the reference block 1, the block gauge holding means 4 for holding the block gauge 3, and the block gauge provided in the block gauge holding means 4. 3
And the piezoelectric element 18 for relatively moving the reference block 1 in the reference plane 1A while maintaining the close contact state, the interference surface correction jig is configured. Even if it occurs, the block gauge 3 and the reference block 1 are relatively moved to release the thermal stress distortion, to recover the deterioration of the flatness, and to perform the precise measurement of the block gauge dimensions. Since the relative movement distance between the gauge 3 and the reference block 1 can be reduced, damage to the contact surface between the reference plane 1A and the block gauge 3 at the time of correcting the interference surface can be reduced. Further, the interference surface correction jig of the present embodiment is provided with the control means 20, and the control means 20 is configured to send the applied voltage signal in the form of a rectangular wave one or more times to the piezoelectric element 18. The distal end of the tapered portion 12B of the operation plate 12 rapidly presses the short side surface of the block gauge 3 to reliably release the thermal stress distortion. Further, since the control means 20 is configured to send the applied voltage signal, which increases stepwise with time, to the piezoelectric element 18, the minute vibration of the piezoelectric element 18 is repeated a plurality of times so that the tapered portion 12B Can gradually reduce the damage to the contact surface between the reference plane 1 </ b> A and the block gauge 3 by gradually pressing the short side surface of the block gauge 3.

Further, since the short side surface of the block gauge 3 is pressed by the piezoelectric element 18 via the block gauge holding means 4, the close contact between the block gauge 3 and the reference plane 1A when the thermal strain is released. It does not come off. Also, the block gauge holding means 4 has a structure having a tapered tapered portion 12B and an operating plate 12 whose tip end presses the block gauge 3 near the reference plane 1A. A force for relatively moving the gauge 3 and the reference block 1 can be applied to the vicinity of the reference plane 1A, and from this point, the close contact between the block gauge 3 and the reference plane 1A can be prevented. Further, the piezoelectric element 18 is provided on the block gauge holding means 4 and the stopper mechanism 8 of the reference block holding means 2 restricts the movement of the reference block 1 larger than the block gauge 3 in the block gauge pressing direction. From the point of view, it is possible to prevent the contact between the block gauge 3 and the reference plane 1A from coming off by setting the force for relatively moving the block gauge 3 and the reference block 1 near the reference plane 1A.

The stopper mechanism 8 is provided between the stopper block 10 and the stopper block 10 and the reference block 1, and is orthogonal to the reciprocating vibration direction of the piezoelectric element 18 (the axis direction of the spindle 5B). A reference block holding member 11 that is movable in the same plane as the reference plane 1A, and a guide 11A that matches the peripheral side surface of the reference block 1 is formed on the reference block holding member 11. Even if the center P of the reference block 1 is displaced from the axis L of the spindle 5B, the reference block holding member 11 of the stopper mechanism 8 is moved in a direction orthogonal to the axis of the spindle 5B to guide the guide 11A. Of the block gauge 3 in the longitudinal direction of the spindle 5
It is possible to prevent the close contact between the block gauge 3 and the reference plane 1A in accordance with the axis of B.

Further, the block gauge holding means 4
Is configured to include the reference block movement restricting member 19 for restricting the movement of the reference block 1 on the block gauge side. Therefore, even if the side surface of the block gauge 3 is pressed, the pressing direction of the block gauge 3 changes. In this respect, the close contact between the block gauge 3 and the reference plane 1A can be prevented from this point. Further, since the handle 16 of the block gauge holding means 4 is formed of a heat insulating member, the body temperature of the worker is hardly transmitted to the block gauge 3 and the reference block 1 via the handle 16.

Although the present invention has been described with reference to preferred embodiments, the present invention is not limited to these embodiments, and various improvements and design changes may be made without departing from the spirit of the present invention. Of course, it is possible. For example, in the above-described embodiment, the control device 20 includes a control unit 20 that sends a rectangular wave applied voltage signal to the piezoelectric element 18 or an applied voltage signal that increases in a stepwise manner with time to the piezoelectric element 18. Although a surface correction jig is configured, the present invention may be configured such that the control means sends an applied voltage signal, which decreases stepwise with time, to the piezoelectric element 18. Further, the piezoelectric element 18 is provided on the block gauge holding means 4 and the stopper mechanism 8 of the reference block holding means 2 restricts the movement of the reference block 1 in the block gauge pressing direction. 3, the piezoelectric element 18 is provided on the reference block holding means 2 and the reference block 1 is moved, or the piezoelectric element 18 is provided on both the reference block holding means 2 and the block gauge holding means 4 and the block gauge is provided. 3 and the reference block 1 may be moved in the directions facing each other.

Further, the stopper mechanism 8 is constituted by the stopper block 10 and the reference block holding member 11, but in the present invention, the stopper mechanism 8 may be constituted only by the stopper block 10. Although the short side surface of the block gauge 3 is pressed by the piezoelectric element 18 via the block gauge holding mechanism 4, the long side surface of the block gauge 3 may be pressed. In addition, the operation plate 12
Has a structure in which a tapered portion 12B is tapered and the tip of the tapered portion 12B presses the vicinity of the reference plane 1A of the block gauge 3, but the portion that presses the block gauge 3 is not necessarily the tip of the tapered portion 12B. It does not need to be. For example, the operating plate 12 may be formed from a flat plate, and the block gauge 3 may be pressed by the vertical end face of the flat plate.

Further, in the above embodiment, the reference block movement restricting member 19 includes the operating plate 12, the operating plate guide 14 and the handle 1, which are constituent members of the block gauge holding means 4.
6, the reference block movement restricting member is not limited to this configuration. For example, the reference block movement restricting member is configured to include a hook that locks the reference plane 1A of the reference block 1, and the hook is a reference block holding unit 2.
May be fixed to the base block 6. Further, the handle 16 of the block gauge holding means 4 does not necessarily need to be formed from a heat insulating material. Further, the reference block 1 may have a shape other than a cylinder such as a prism. Further, a screw or a ball screw may be used instead of the micrometer head 5.

[0025]

As described above, according to the present invention,
A reference block holding unit for holding a reference block, a block gauge holding unit for holding a block gauge, and a block gauge provided on at least one of the block gauge holding unit and the reference block holding unit, wherein the block gauge and the reference block are brought into close contact with each other. Since the interference surface correction jig is configured with the piezoelectric element that relatively moves in the reference plane while maintaining the above, even if thermal stress distortion occurs in the block gauge and the reference block, the block gauge and the reference block are Relative movement releases thermal stress strain, recovers these deteriorations in flatness, enables precise measurement of block gauge dimensions, and reduces the relative movement distance between these block gauges and the reference block. Damage to the contact surface between the reference plane and the block gauge during surface correction can be reduced. In addition, if it is configured to include a control unit that sends one or a plurality of rectangular wave applied voltage signals to the piezoelectric element,
By rapidly moving the block gauge and the reference block relatively, thermal stress distortion can be reliably released. Furthermore, if it comprises a control means for sending an applied voltage signal that increases in a stepwise manner to the piezoelectric element with the passage of time, a minute vibration of the piezoelectric element is repeated a plurality of times, so that a difference between the reference plane and the block gauge is generated. Damage to the contact surface can be reduced. Further, if the short side surface of the block gauge is pressed by the piezoelectric element via the block gauge holding means, the close contact between the block gauge and the reference plane does not come off when the thermal strain is released. Further, if the block gauge holding means has a tapered tapered portion and a structure in which the tip of the tapered portion is provided with an operating plate that presses the vicinity of the reference plane of the block gauge, the block gauge and the reference block are formed. The force for the relative movement can be applied to the vicinity of the reference plane, and from this point, the close contact between the block gauge and the reference plane can be prevented. Further, if the piezoelectric element is provided in the block gauge holding means, and the stopper mechanism of the reference block holding means restricts the movement of the reference block larger than the block gauge in the block gauge pressing direction,
Also from this point, it is possible to prevent the block gauge from coming into close contact with the reference plane by setting the force for relatively moving the block gauge and the reference block near the reference plane. Also, the stopper mechanism is provided between the stopper block and the stopper block and the reference block, and a reference block holding member which is orthogonal to a reciprocating vibration direction of the piezoelectric element and is movable in the same plane as the reference plane. If a guide is formed on the reference block holding member so as to coincide with the side surface of the reference block, even if the center of the reference block is displaced from above the reciprocating vibration direction of the piezoelectric element, By moving the reference block holding member in a direction perpendicular to the reciprocating vibration direction and aligning the guide with the reference block, the longitudinal center line of the block gauge is aligned with the reciprocating vibration direction of the piezoelectric element, and the block gauge and the reference plane are aligned. Can be prevented from coming off. Furthermore, if the block gauge holding means is configured to include a reference block movement restricting member that restricts the movement of the reference block on the block gauge side, the pressing direction of the block gauge does not change. The contact between the block gauge and the reference plane can be prevented from coming off.

[Brief description of the drawings]

FIG. 1 is a front view showing an interference surface correction jig according to an embodiment of the present invention.

FIG. 2 is a plan view of FIG. 1;

FIG. 3 is a sectional view taken along the line III-III in FIG. 1;

FIG. 4 is a longitudinal sectional view of an operation plate.

FIGS. 5A to 5C are graphs showing waveforms of an applied voltage signal sent to a piezoelectric element by a control unit.

FIG. 6 is a view similar to FIG. 2, showing the operation of the block mechanism.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Reference block 1A Reference plane 2 Reference block holding means 3 Block gauge 3A Measurement surface 4 Block gauge holding means 8 Stopper mechanism 10 Stopper block 11 Reference block holding member 11A Guide 12 Operating plate 12B Taper portion 18 Piezoelectric element 19 Reference block movement restricting member 20 control means

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Hu Naoya 1-2-1-1, Sakado, Takatsu-ku, Kawasaki, Kanagawa Prefecture Mitutoyo Co., Ltd. (72) Akira Inagaki 1-2-1-1, Sakado, Takatsu-ku, Kawasaki, Kanagawa Shares (56) References JP-A-5-93611 (JP, A) JP-A-6-341809 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G01B 9/00 -11/30 102 G01B 3/00-5/30 G01B 21/00-21/32

Claims (8)

(57) [Claims] An interference surface correction jig used for light wave interference measurement for determining the dimensions of a block gauge which is in close contact with a reference plane of the reference block, using a block gauge and a reference block formed of different materials. A reference block holding means for holding the reference block, a block gauge holding means for holding the block gauge, and the block gauge provided on at least one of the block gauge holding means and the reference block holding means. A piezoelectric element for relatively moving the reference block in the reference plane while maintaining a close contact state with the reference block. 2. The jig according to claim 1, further comprising control means for sending a rectangular wave applied voltage signal to said piezoelectric element. Interference surface correction jig for light wave interference measurement. 3. The interference surface correcting jig for measuring light wave interference having a block gauge size according to claim 1, further comprising control means for sending to the piezoelectric element an applied voltage signal that increases stepwise as time elapses. An interference surface correction jig for light wave interference measurement having a block gauge size. 4. The jig according to claim 1, wherein the piezoelectric element is provided on the block gauge holding means, and wherein the reference block holding means comprises: An interference surface correcting jig for measuring a light wave interference having a block gauge size, comprising a stopper mechanism for restricting movement of the reference block in a block gauge pressing direction. 5. The interference surface correcting jig for measuring light wave interference having a block gauge size according to claim 4, wherein the stopper mechanism is disposed between a stopper block and the stopper block and the reference block. A reference block holding member orthogonal to the reciprocating vibration direction of the piezoelectric element and movable in the same plane as the reference plane,
An interference surface correction jig for measuring light wave interference having a block gauge size, wherein a guide is formed on the reference block holding member so as to coincide with a side surface of the reference block. 6. The jig according to claim 1, wherein the block gauge is formed in a rectangular parallelepiped, and the piezoelectric element is provided via the block gauge holding means. An interference surface correcting jig for light wave interference measurement of a block gauge dimension, wherein a short side surface of the block gauge can be pressed. 7. An interference surface correcting jig for measuring light wave interference having a block gauge dimension according to claim 4, wherein said block gauge holding means has a tapered portion and a tip of said tapered portion. An interference surface correction jig for measuring light wave interference having a block gauge size, comprising an operation plate for pressing the block gauge in the vicinity of the reference plane. 8. The jig for correcting an interference surface for light wave interference measurement having a block gauge size according to claim 1, wherein at least one of the reference block holding means and the block gauge holding means is provided on the reference block. An interference surface correction jig for light wave interference measurement having a block gauge dimension, comprising a reference block movement restricting member for restricting movement on the block gauge side.