JP3312994B2 - Adhesive surface peeling jig for light wave interference measurement - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a jig for separating a contact surface between a block gauge and a reference block, which is used after the size of the block gauge is determined by light wave interference measurement.

[0002]

BACKGROUND ART It is stipulated in JISB7506 that the dimension measurement of a block gauge is basically determined by light wave interference measurement. According to this JISB7506, both the measurement surface of the block gauge and a reference block having a reference plane to which the block gauge is closely attached (ringed) are irradiated with light,
The distance between the measurement surface and the reference plane is measured as the block gauge size using the light reflected from the measurement surface and the reference plane of these block gauges. Here, the measurement surface and the reference plane act as interference surfaces during measurement.
After the dimension measurement of the block gauge is completed, the block gauge is peeled off from the reference plane. Conventionally, both are separated by forcibly pulling a block gauge held by a vice away from a reference plane.

[0003]

Since the flatness between the block gauge and the reference plane is high, the adhesion between the block gauge and the reference plane is large, and the separation between the block gauge and the reference block is a difficult operation. In particular, for short block gauges with dimensions of 5 mm or less,
The peeling operation is extremely difficult. Conventionally, a vise or the like is used to perform such a difficult peeling operation, so that there is a problem that the block gauge is damaged.

[0004] The present invention has been made in view of such circumstances, and an object thereof is to provide a light wave capable of easily separating a block gauge and a reference plane without damaging both the block gauge and the reference block. An object of the present invention is to provide a jig for peeling off a contact surface for interference measurement.

[0005]

SUMMARY OF THE INVENTION The present invention provides a relative temperature difference between a reference block and a block gauge to distort a reference plane, and furthermore, makes the reference block and the block gauge relatively movable. It is intended to achieve the above object. Specifically, the contact surface peeling jig for light wave interference measurement of the present invention is a contact surface peeling jig for peeling a block gauge used for light wave interference measurement and a reference block in which the block gauge is closely adhered to a reference plane. And a reference block holding unit that holds the reference block, a block gauge holding unit that holds the block gauge, and a temperature difference providing unit that provides a relative temperature difference between the reference block and the block gauge. A moving mechanism provided on at least one of the block gauge holding means and the reference block holding means for relatively moving the block gauge and the reference block.

Here, the temperature difference providing means may be a heater arranged inside the reference block holding means for heating the reference block. Further, the moving mechanism may have a structure including a micrometer head or a piezoelectric element. Further, the micrometer head is provided on the reference block holding unit, and the reference block holding unit includes a stopper mechanism for restricting movement of the reference block in the block gauge pressing direction, and the stopper mechanism includes a stopper block, A reference block holding member disposed between the stopper block and the reference block and orthogonal to the axial direction of the micrometer head spindle and movable in the same plane as the reference plane; The reference block holding member may be formed with a guide that matches the side surface of the reference block. The block gauge holding means may have a structure having a tapered portion with a taper and an operating plate whose tip end presses the block gauge in the vicinity of the reference plane.

[0007]

[Function] After the worker manually brings the block gauge into close contact with the reference plane of the reference block, light wave interference measurement of the block gauge dimensions is performed in accordance with JISB7506. After the light wave interference measurement is completed, the block gauge is peeled off from the reference plane by using a contact surface peeling jig. Therefore, first, a relative temperature difference is provided between the reference block and the block gauge by a temperature difference providing unit. For example, only the reference block is heated by a heater arranged inside the reference block holding means. This causes distortion in the reference plane of the reference block. The moving mechanism is operated in this state. Since the reference plane is distorted by the temperature difference providing means, the relative displacement between the block gauge and the reference block is easily performed in the reference plane, and the block gauge is easily separated from the reference plane. .

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a jig for peeling an adhesive surface for measuring a light wave interference having a block gauge size according to the present invention will be described below.
This will be described in detail with reference to the accompanying drawings. Here, in each embodiment, the same or similar components are denoted by the same reference numerals and description thereof will be omitted. FIG. 1 is a front view showing a contact surface peeling jig according to the first embodiment, FIG. 2 is a plan view thereof, and FIG. 3 is a sectional view taken along line III-III in FIG. In FIGS. 1 and 2, a jig for separating a contact surface includes a reference block holding means 2 for holding a cylindrical reference block 1 and a block gauge holding means for holding a block gauge 3 disposed on the reference block 1. 4, a micrometer head 5 as a moving mechanism provided in the reference block holding means 2, and a heater 41 as a temperature difference providing means provided inside the reference block holding means 2. Of these, the reference block holding means 2, the block gauge holding means 4, and the micrometer head 5 also have the function of an interference surface correction jig. The micrometer head 5 includes a main body 5A on which graduations are formed and a spindle 5B.
It is a structure to press to the left. The reference block 1 is made of a substantially transparent material such as synthetic quartz, and its upper end surface is a reference plane 1A having a high flatness. The block gauge 3 closely adheres to this reference plane 1A (ringing).
Have been. The block gauge 3 is formed in a rectangular parallelepiped from a material different from the reference block 1, such as steel or ceramic. The surface of the block gauge 3 facing the reference plane 1A and the surface opposite to this surface are defined as measurement surfaces 3A, and the distance between the measurement surfaces 3A is defined as the block gauge size. Further, when measuring the light wave interference of the block gauge size specified in JISB7506, the reference plane 1A and the measurement surface 3A act as interference surfaces.

The reference block holding means 2 includes a flat base block 6, a base plate substrate 7 provided on the base block 6 and supporting a lower end surface of the reference block 1, and a block of the reference block 1. A stopper mechanism 8 for regulating movement in the gauge pressing direction,
A holding block 9 fixed to one end of the base block 6 and having the moving mechanism 5 attached thereto. The base plate substrate 7 has a hole 7A formed in the center thereof, and the inner diameter of the hole 7A is smaller than the outer diameter of the reference block 1 (see FIG. 3). The stopper mechanism 8 includes a stopper block 10 fixed to the other end of the base block 6, and a reference block holding member 11 disposed between the stopper block 10 and the reference block 1. The block holding member 11 is movable in a direction perpendicular to the axial direction of the spindle 5B of the moving mechanism 5 in the same plane as the reference plane 1A. An arcuate guide 11A is formed on the upper part of the reference block holding member 11 so as to coincide with the circumferential side surface of the reference block 1.

The block gauge holding means 4 includes a substantially plate-shaped operating plate 12 for pressing the block gauge 3, an operating plate guide 14 attached to lower surfaces on both sides of the operating plate 12 by bolts 13, and an operating plate guide. A handle 16 attached by bolts 15 to the upper surface of the central part of the
And an anvil 18 with which the tip of the spindle 5B of the moving mechanism 5 abuts, via an anvil fixing plate 17, so that it can advance and retreat along the axis of the spindle 5B. I have. As shown in FIG. 3, a gate-shaped shape that straddles the reference block 1 is formed from the two operation plate guides 14 and the operation plate 12, and the lower end surface of the operation plate guide 14 contacts the upper surface of the base block 6. The lower surface of the operation plate 12 is in contact with the reference plane 1A of the reference block 1. The handle 16
Is formed in a ladder shape from a heat-insulating material, for example, Duracon (trade name), and has a structure that does not easily transmit the body temperature of the worker to the reference block 1 and the block gauge 3.
The handle 16 also functions as a weight for urging the operation plate 12 toward the reference block. Here, a reference block movement restricting member 19 for restricting the movement of the reference block 1 on the block gauge side from the operation plate 12, the operation plate guide 14 and the handle 16, in other words, preventing the reference block 1 from floating is provided. It is configured.

As shown in FIG. 2, a window 12A is formed at the center of the operating plate 12 to avoid interference with the block gauge 3 on the reference block 1. Is formed with a tapered portion 12B having substantially the same width as the short side direction of the block gauge 3.
The width direction of the tapered portion 12B is orthogonal to the axis direction of the spindle 5B of the micrometer head 5, and the center in the width direction coincides with the axis line of the spindle 5B.
FIG. 4 shows a sectional structure of the operation plate 12. FIG.
In the above, the tapered portion 12B has a tapered shape, and the tip thereof is configured to press the short side surface of the block gauge 3 near the reference plane 1A. The height of the micrometer head 5 is adjusted so that the axial direction of the spindle 5B is located above the reference plane 1A.

The heater 41 is disposed in the hole 7A of the base plate substrate 7 (see FIG. 3), and has a structure for heating the reference block 1 from the lower end of the reference block 1. Further, the heater 41 is provided with a heater power supply 42 disposed outside the base plate substrate 7.
It is connected to the.

Next, a method for performing light wave interference measurement of a block gauge size will be described. First, an operator manually brings one measurement surface 3A of the block gauge 3 into close contact with the reference plane 1A of the reference block 1. The state of adhesion between the measurement surface 3A of the block gauge 3 and the reference plane 1A is confirmed by visual observation from the back surface of the reference block 1. These measurement surfaces 3
Block gauge 3 due to the close contact work between A and reference plane 1A
Since the body temperature of the worker is transmitted to the reference block 1, the temperature is brought close to room temperature (around 20 ° C.) for a certain period of time. After a lapse of a predetermined time after the temperature break-in, the block size is measured. Before the measurement, the measurement surface 3A and the reference plane 1A, which are interference surfaces, are corrected.

A temperature change occurs due to temperature break-in or the like, and thermal stress distortion occurs in the block gauge 3 and the reference block 1. Although the flatness of the measurement surface 3A and the reference plane 1A deteriorates due to the thermal stress distortion, an interference surface correction jig is used to recover the deterioration. First, by operating the micrometer head 5 as a moving mechanism, the spindle 5B is sufficiently retracted, and the reference block 1 in a state where the block gauge 3 is in close contact with the reference plane 1A is placed on the base plate substrate 7 of the reference block holding means 2. Place on top. Thereafter, the reference block 1 is covered with the block gauge holding means 4, and the block gauge 3 is positioned in the window 12 A of the operation plate 12 of the holding means 4. At this time, the block gauge 3 is arranged such that the tip of the tapered portion 12B of the operation plate 12 abuts on the short side surface thereof.

In this state, the micrometer head 5 is operated to move the spindle 5B forward. Then, after the spindle 5B contacts the anvil 18, the operating plate 12 is advanced. By the advance of the operation plate 12, the tapered portion 1
The tip of 2 </ b> B presses the short side surface of the block gauge 3.
When the block gauge 3 is pressed, the reference block 1 also attempts to move in the same direction. However, since the side surface of the reference block 1 is held by the stopper mechanism 8 of the reference block holding means 2, The movement of the reference block 1 in the block gauge pressing direction is restricted. here,
As shown in FIG. 5, when the center P of the reference block 1 is displaced from the axis L of the spindle 5B, the reference block holding member 11 of the stopper mechanism 8 is moved in a direction perpendicular to the axis of the spindle 5B. Guide 11A
To the reference block 1.

As the spindle 5B advances, the block gauge 3 and the reference block 1 are relatively displaced from each other while maintaining the close contact state in the reference plane 1A. The distortion is released, and the reference plane 1A and the measurement plane 3A which are the interference planes
Is corrected. Here, the distance by which the block gauge 3 and the reference block 1 are relatively moved by the micrometer head 5 is 0.05 to 0.1 mm. If it exceeds 0.1 mm, the close contact between the two may be released and proper measurement of the block gauge dimensions may not be performed. The advance of the spindle 5B of the micrometer head 5 is performed while reading the scale of the main body 5A.

When the flatness between the reference plane 1A and the measurement surface 3A of the block gauge 3 is corrected, the micrometer head 5 is operated to move the spindle 5B backward. Further, the block gauge holding means 4 is removed, and the reference block 1 on which the block gauge 3 is in close contact is taken out from the reference block holding means 2. The close contact state between the block gauge 3 taken out from the reference block holding means 2 and the reference plane 1A of the reference block 1 is confirmed. Thereafter, in accordance with JISB7506, both the measurement surface 3A of the block gauge 3 and the reference plane 1A to which the block gauge 3 is adhered are irradiated with light, and the light reflected from the measurement surface 3A and the reference plane 1A is used. The distance between the measurement surface 3A and the reference plane 1A is measured as a block gauge dimension.

After the light wave interference measurement according to JISB7506 is completed, the block gauge is peeled off from the reference plane. Therefore, the micrometer head 5 is operated, the spindle 5B is sufficiently retracted, and the reference block 1 in a state where the block gauge 3 is in close contact with the reference plane 1A is placed on the base plate substrate 7 of the reference block holding means 2. I do.
Thereafter, the reference block 1 is again covered with the block gauge holding means 4, and the window 1 of the operation plate 12 of the holding means 4 is provided.
Position the block gauge 3 in 2A.

The reference block 1 is disposed on the heater 41, and switches on the heater power supply 42 to supply a current to the heater 41 for a certain period of time. Then, the reference block 1 is heated from its lower end with respect to the block gauge 3 at room temperature, and becomes higher than the temperature of the block gauge 3. Therefore, a relative temperature difference occurs between the block gauge 3 and the reference block 1, and
The reference plane 1A will be distorted. In this state, the micrometer head 5 is operated to advance the spindle 5B. Then, the spindle 5B advances the operating plate 12, and by the advance of the operating plate 12, the tip of the tapered portion 12B presses the side surface of the block gauge 3. This allows
The block gauge 3 and the reference block 1 are the reference plane 1
A is relatively displaced in A, and the block gauge 3 is peeled off from the reference plane 1A.

Therefore, according to this embodiment, the reference block holding means 2 for holding the reference block 1, the block gauge holding means 4 for holding the block gauge 3, and the block gauge provided in the reference block holding means 2. A moving mechanism 5 for relatively moving the reference block 1 and the reference block 1;
Since a temperature difference providing means 41 for providing a relative temperature difference between the reference block 1 and the block gauge 3 is provided to constitute a jig for peeling off a contact surface for light wave interference measurement, the jig is held by a vice or the like. There is no need to forcibly separate the block gauge from the reference plane, so that the block gauge 3 and the reference plane 1A can be easily separated without damaging the block gauge 3. In addition, since the reference block 1 itself is not pressurized when applying distortion to the reference plane 1A, it is possible to prevent the reference block 1 from being damaged. Further, in the present embodiment, the temperature difference providing means is a heater 41 disposed inside the reference block holding means 2 and heating the reference block 3, so that the reference block 1 and the block gauge 3 are provided with a simple structure. Temperature difference can be given between the two. In addition, the heater 41 is connected to the block gauge 3
Is disposed below the reference block 1 farthest from the position where the contact is made, the temperature difference between the block gauge 3 and the reference block 1 can be further increased.

Further, since the moving mechanism is the micrometer head 5, the block gauge 3 can be reliably separated from the reference plane 1A by moving the spindle 5B forward while reading the scale of the micrometer head 5. The reference block holding means 2 includes a stopper mechanism 8 for restricting the movement of the reference block 1 in the block gauge pressing direction.
A stopper block 10, a reference disposed between the stopper block 10 and the reference block 1 and perpendicular to the spindle axis direction of the micrometer head 22 and movable in the same plane as the reference plane 1 </ b> A. Since the guide 11A is formed on the reference block holding member 11 so as to coincide with the side surface of the reference block 1, the center P of the reference block 1 is positioned above the axis L of the spindle 5B. Even if the reference block holding member 1 of the stopper mechanism 8 is displaced,
By moving the guide 1 in the direction orthogonal to the axis of the spindle 5B and aligning the guide 11A with the reference block 1, the block gauge 3 and the reference plane 1A can be reliably separated.

Further, the block gauge holding means 4 has a tapered portion 12B which is tapered, and the tip of the tapered portion 12B is formed on the reference plane 1 of the block gauge 3.
Since the structure provided with the operating plate 12 that presses the vicinity of A, a force for relatively moving the block gauge 3 and the reference block 1 is applied to the vicinity of the reference plane 1A to separate the block gauge 3 and the reference plane 1A. In this case, the reference plane 1A is not damaged. That is, assuming that the pressing position of the block gauge 3 is a position away from the reference plane 1A, for example, the upper portion of the block gauge 3, pressing the block gauge 3 causes the lower side of the block gauge 3 opposite to the pressing position. A downward (reference plane side) force acts on the edge of the portion, and there is a possibility that the reference plane 1A may be damaged. However, in this embodiment, a force pressing the block gauge 3 is applied to the vicinity of the reference plane 1A. Block gauge 3
The downward force does not act on the lower edge of the.

In this embodiment, since the interference surface correction jig is constituted by the reference block holding means 2, the block gauge holding means 4 and the micrometer head 5, the block gauge is provided before the light wave interference measurement. Even when thermal stress distortion occurs in the reference block 3 and the reference block 1, the thermal stress distortion is released by relatively moving the block gauge 3 and the reference block 1 while maintaining the close contact state, thereby reducing the deterioration of the flatness. It recovers and the precision measurement of the block gauge size can be performed. Further, since the handle 16 of the block gauge holding means 4 is formed of a heat insulating member, the body temperature of the worker is hardly transmitted to the block gauge 3 and the reference block 1 via the handle 16.

Next, a second embodiment of the present invention will be described with reference to FIGS.
It will be described based on. In the second embodiment, the configuration of the moving mechanism is different from that of the first embodiment, but other configurations are substantially the same as those of the first embodiment. FIG. 6 shows the whole second embodiment. In FIG. 6, the block gauge holding means 30
Is composed of the operating plate 12, the operating plate guide 14, and the handle 16. A piezoelectric element 31 as a moving mechanism is mounted on the operation plate 12 via a piezoelectric element mounting plate 32. The reference block holding means 33 includes the base block 6, the base plate substrate 7, the stopper mechanism 8, the holding block 9, and a micrometer head 36 attached to the holding block 9. The micrometer head 36 has a structure including a main body 36A and a spindle 36B, and the spindle 36B can contact the piezoelectric element 31.

The piezoelectric element 31 has a general structure, and is mounted on the piezoelectric element mounting plate 32 such that its vibration direction coincides with the axial direction of the spindle 36B. The applied voltage signal is sent from the control means 38 to the piezoelectric element 31. The waveform of the applied voltage signal sent from the control means 38 to the piezoelectric element 31 is shown in FIG. The control means 38, as shown in FIG.
As shown in FIG. 7B, one rectangular wave applied voltage signal, a plurality of rectangular wave applied voltage signals,
As shown in (C), an applied voltage signal that increases in a stepwise manner with the passage of time is sent to the piezoelectric element 31.

According to the second embodiment having such a configuration, the following effects can be obtained in addition to the effects of the first embodiment. That is, since the moving mechanism is the piezoelectric element 31, the relative movement distance between the block gauge 3 and the reference block 1 can be reduced during the work of separating the reference plane 1A and the block gauge 3, so that the reference plane 1A and the block gauge 3 are separated. Damage to the surface in close contact with 3 can be reduced.

Although the present invention has been described with reference to preferred embodiments, the present invention is not limited to these embodiments, and various improvements and design changes may be made without departing from the spirit of the present invention. Of course, it is possible. For example, in the first embodiment, the moving mechanism 5 is a micrometer head. However, in the present invention, a screw or a ball screw may be used instead of the micrometer head if the reference plane 1A and the block gauge 3 can be relatively moved. For example, the block gauge 3 may be pulled with respect to the reference plane 1A, or the block gauge 3 may be separated from the reference plane 1A. Further, the temperature difference providing means is a heater 41 disposed inside the reference block holding means 2 and the heater 41 heats the reference block 3 from the lower end. Is not limited to this. For example, block gauge 3
A cooling device configured to inject cold air only to the block gauge 3, a heater configured to heat only the block gauge 3 may be used, or a cooling device configured to inject cool air only to the reference block 1 may be used. A structure for heating the reference block 1, or conversely, a structure for heating the block gauge 3 and cooling the reference block 1 may be used. In short, the specific structure of the temperature difference providing means of the present invention is not limited as long as it is configured to provide a relative temperature difference between the reference block 1 and the block gauge 3.

Also, the micrometer head 5 as a moving mechanism is provided on the reference block holding means 2 and the stopper mechanism 8 of the reference block holding means 2 regulates the movement of the reference block 1 in the block gauge pressing direction. According to the present invention, the block gauge 3 is fixed, and a moving mechanism is provided in the reference block holding means 2 to move the reference block 1, or a moving mechanism is provided in both the reference block holding means 2 and the block gauge holding means 4. A configuration may be provided in which the block gauge 3 and the reference block 1 are moved in directions facing each other. Further, the stopper block 10
And from the reference block holding member 11 to the stopper mechanism 8
However, in the present invention, the stopper mechanism 8 may be constituted by only the stopper block 10. The operation plate 12 has a tapered portion 12B that is tapered, and the tip of the tapered portion 12B presses the vicinity of the reference plane 1A of the block gauge 3, but the portion that presses the block gauge 3 is It does not necessarily need to be the tip of the tapered portion 12B. For example, the operating plate 12 may be formed from a flat plate, and the block gauge 3 may be pressed by the vertical end face of the flat plate.

Further, in the embodiment, the reference block movement restricting member 19 includes the operating plate 12, the operating plate guide 14 and the handle 1, which are constituent members of the block gauge holding means 4.
6, the reference block movement restricting member is not limited to this configuration. For example, the reference block movement restricting member is configured to include a hook that locks the reference plane 1A of the reference block 1, and the hook is a reference block holding unit 2.
May be fixed to the base block 6. Further, the handle 16 of the block gauge holding means 4 does not necessarily need to be formed from a heat insulating material. Further, the reference block 1 may have a shape other than a cylinder such as a prism. Also, reference block 1 and block gauge 3
May be the same material.

[0030]

As described above, according to the present invention,
Reference block holding means for holding a reference block, block gauge holding means for holding a block gauge, temperature difference providing means for giving a relative temperature difference between the reference block and the block gauge, and block gauge holding means And a moving mechanism provided on at least one of the reference block holding means and configured to relatively move the block gauge and the reference block, so that the jig for peeling off the contact surface for light wave interference measurement is constituted. There is no need to force the block gauge away from the reference plane,
The block gauge and the reference plane can be easily peeled off without damaging both the block gauge and the reference block. Further, in the present invention, if the temperature difference providing means is a heater arranged inside the reference block holding means and heating the reference block, the temperature difference between the reference block and the block gauge is provided with a simple structure. it can.

Further, if the moving mechanism is a micrometer head, the block gauge can be reliably peeled off from the reference plane by moving the spindle forward while reading the scale of the micrometer head. Further, if the moving mechanism is a piezoelectric element, the relative movement distance between the block gauge and the reference block can be reduced, so that damage to the contact surface between the reference plane and the block gauge can be reduced. Further, the micrometer head is provided on the reference block holding means, and the reference block holding means includes a stopper mechanism for restricting movement of the reference block in the block gauge pressing direction.
A stopper block, a reference block holding member disposed between the stopper block and the reference block, and perpendicular to the axial direction of the micrometer head spindle and movable in the same plane as the reference plane. If a guide that coincides with the side surface of the reference block is formed on the reference block holding member, the reference block holding member of the stopper mechanism is moved even when the center of the reference block is displaced from above the axis of the spindle. By moving the guide to the reference block by moving in the direction perpendicular to the axial direction of the spindle, the block gauge and the reference plane can be reliably separated.

If the block gauge holding means has a tapered tapered portion and an operation plate for pressing the tip of the tapered portion near the reference plane of the block gauge, the block gauge and the reference plane are provided. No damage occurs on the reference plane when exfoliating.

[Brief description of the drawings]

FIG. 1 is a front view showing a contact surface peeling jig according to a first embodiment of the present invention.

FIG. 2 is a plan view of FIG. 1;

FIG. 3 is a sectional view taken along the line III-III in FIG. 1;

FIG. 4 is a longitudinal sectional view showing a main part of the first embodiment.

FIG. 5 is a view similar to FIG. 2, showing the operation of the block mechanism.

FIG. 6 is a view similar to FIG. 2 showing a contact surface peeling jig according to a second embodiment of the present invention.

FIG. 7 is a graph showing a waveform of an applied voltage signal sent to a piezoelectric element.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Reference block 1A Reference plane 2, 33 Reference block holding means 3 Block gauge 3A Measurement surface 4, 30 Block gauge holding means 5 Micrometer head as a moving mechanism 5B Spindle 8 Stopper mechanism 10 Stopper block 11 Reference block holding member 11A Guide 12 Operating plate 12B Tapered portion 31 Piezoelectric element 41 as moving mechanism 41 Heater as temperature difference providing means

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Hu Naoya 1-2-1-1, Sakado, Takatsu-ku, Kawasaki, Kanagawa Prefecture Mitutoyo Co., Ltd. (72) Akira Inagaki 1-2-1-1, Sakado, Takatsu-ku, Kawasaki, Kanagawa Stock (56) References JP-A-5-126972 (JP, A) JP-A-5-226214 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G01B 9/00 -11/30 102 G01B 3/00-5/30 G01B 21/00-21/32

Claims (6)

(57) [Claims] 1. A jig for separating a block gauge used for light wave interference measurement and a reference block in which the block gauge is in close contact with a reference plane, the reference block holding means holding the reference block. A block gauge holding unit for holding the block gauge, a temperature difference providing unit for giving a relative temperature difference between the reference block and the block gauge, and at least one of the block gauge holding unit and the reference block holding unit. And a moving mechanism for relatively moving the block gauge and the reference block. 2. The jig according to claim 1, wherein the temperature difference providing means is a heater arranged inside the reference block holding means for heating the reference block. Characteristic adhesive surface peeling jig for light wave interference measurement. 3. A jig for peeling a contact surface for light wave interference measurement according to claim 1 or 2, wherein said moving mechanism comprises a micrometer head. . 4. The jig for peeling a contact surface for light wave interference measurement according to claim 1, wherein the moving mechanism is provided with a piezoelectric element. 5. The jig according to claim 3, wherein the micrometer head is provided on the reference block holding unit, and the reference block holding unit is configured to press the reference block with a block gauge. A stopper mechanism for restricting the movement of the micrometer head. The stopper mechanism is disposed between the stopper block and the reference block, and is orthogonal to the axial direction of the spindle of the micrometer head and the reference plane. A reference block holding member movable in the same plane as the reference block holding member, and a guide coinciding with a side surface of the reference block is formed on the reference block holding member. Peeling jig. 6. A jig for separating an adhesive surface for light wave interference measurement according to claim 1, wherein said block gauge holding means has a tapered tapered portion, and a tip of said tapered portion is formed of said block gauge. A contact surface peeling jig for light wave interference measurement, comprising an operating plate for pressing the vicinity of the reference plane.