JP3314673B2 - Positioning device for work carrier - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work carrier positioning device used in an electronic component mounting process.

[0002]

2. Description of the Related Art For example, when a chip cut out of a wafer is mounted on a work such as a small substrate, it is difficult to transport the small work by itself on a mounting line.
A plurality of small works are mounted on a large carrier, and the carrier is transported on a mounting line.

FIGS. 6A and 6B are cross-sectional views of a conventional work transporting carrier positioning device, wherein FIG. 6A shows a state before backup and FIG. 6B shows a state after backup. A large number of works 2 are mounted on the carrier 1,
The carrier 1 is transported on left and right guide rails 3 and 4. One of the guide rails 4 is provided with a clamp member 6 repelled by a spring member 7, and the other guide rail 3 is provided with a clamp member 6.
The carrier 1 is elastically clamped between the and the clamp member 6. A mask member 10 is provided above the guide rails 3 and 4.
Are arranged. The mask member 10 has an opening 11 for exposing the work 2, and a spring member 12 for elastically pressing the work 2 from above is attached to an edge of the opening 11. Below the carrier 1, a block-shaped backup member 20 'is provided. The rod 24 of the cylinder 23 is connected to the backup member 20 ', and when the cylinder 23 operates, the backup member 20' moves up and down.

[0006] Now, as shown in FIG.
Is transported between the guide rails 3 and 4, the rod 24 of the cylinder 23 projects and the backup member 20 '
Rises. Then, as shown in FIG.
Is pushed up by the backup member 20 ′, and the work 2 is pressed against the spring member 12. Work 2 in this way
A chip (not shown) is mounted on the work 2 in a state where is pressed and fixed by the spring material 12.

[0005]

Carrier 1 [SUMMARY OF THE INVENTION] is formed in a plate shape by such as stainless steel, prone to warpage as illustrated in Figure 6. Therefore, the posture of the work 2 on the carrier 1 is inclined, and as a result, all the spring members 12
Has a problem that a situation in which the work 2 cannot be fixed by firmly contacting the upper surface of the work 2 easily occurs. If such a situation occurs, the position and posture of the work 2 are not stable, and thus chip mounting failure is likely to occur.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a work transporting carrier positioning apparatus capable of correcting a warp of a carrier, positioning a work on the carrier in a horizontal posture, and mounting a chip.

[0007]

According to the present invention, there is provided a workpiece transfer carrier positioning apparatus, comprising: a guide rail for transferring a carrier on which a plurality of works are mounted; and a carrier disposed below the carrier on the guide rail. A backing member for supporting the work, and an opening for exposing the work on the carrier, which is disposed above the carrier, is opened, and a spring material for elastically pressing the work from above is mounted on an edge of the opening. A mask member and up-and-down movement means for moving the mask member up and down relatively to the carrier are provided, and a plurality of projections are provided on the mask member to press the carrier from above.

[0008] Preferably, a suction pad made of an elastic material is provided with an upper surface protruding above an upper surface of the backup member, and the backup member is attached to the carrier by the vertical movement means. converting mechanism for vacuum suction underside of the carrier by the suction pad by Noboru Ue, pressed against the upper surface of the workpiece the spring member by pushing up is brought into contact with the lower surface of the carrier the upper surface of the backup member, said plurality of The projection was pressed against the upper surface of the carrier. Also preferably, the up-down moving means moves the mask member up and down with respect to the fixed backup member.

[0009]

In the present invention having the above structure, when the mask member is lowered relative to the carrier, the projection of the mask member contacts the upper surface of the carrier to correct the warpage of the carrier. Therefore, the work on the carrier is in a horizontal posture, and the chip can be mounted correctly.

Embodiment 1 Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of a work transport carrier positioning device according to Embodiment 1 of the present invention, FIG. 2 is a cross-sectional view of the backup means, and FIG. 3 is a partial cross-sectional view of the backup means at the time of a backup operation.

First, the overall structure of the positioning device will be described with reference to FIG. In FIG. 1, 1 is a carrier,
A large number of works 2 are mounted. The carrier 1 is formed in a plate shape from a stainless steel plate or the like.

The carrier 1 is transported on a pair of left and right guide rails 3 and 4 having an L-shaped cross section. The inner side surface 5 of one guide rail 3 serves as a position reference plane for positioning the carrier 1 in the lateral direction by abutting one side end surface of the carrier 1. A clamp member 6 is mounted on the other guide rail 4. The clamp members 6 are in the form of small pieces, are arranged in parallel along the guide rails 4, and are provided with spring members 7 (see FIG. 3A) interposed on the inner surface of the guide rails 4. It is bounced inward (carrier 1 side). In FIG. 1, the carrier 1 is transported in the direction of arrow A and carried between the guide rails 3 and 4, and when the mounting of the chip is completed, it is carried out in the direction of arrow B.

Reference numeral 10 denotes a mask member, which is formed in a plate shape from a stainless steel plate. Mask member 10
A number of openings 11 for exposing the work 2 are opened at a location corresponding to the work 2. Opening 1
A spring member 12 made of a tongue-shaped leaf spring for elastically pressing the upper surface of the work 2 from above is mounted on one edge portion. Although the spring members 12 are mounted on the edges of all the openings 11, in FIG. 1, the spring members 12 are shown only in the two openings 11, and the other members are omitted. The mask member 10 is mounted on flanges 14 and 15 projecting from the guide rails 3 and 4 by screws 13. A plurality of projections 16 for pressing the carrier 1 from above are provided on the lower surface of the mask member 10 (see also FIG. 3A). The protrusion 16 of the present embodiment is formed of a pin, and protrudes from a position that does not contact the work 2.

Below the carrier 1 on the guide rails 3, 4, a backup member 20 for supporting the carrier 1 is provided. In FIG. 2, a plurality of recesses 21 are formed in the backup member 20, and each of the recesses 21 accommodates a suction pad 22. The suction pad 22 is formed in an upward trumpet shape by an elastic material such as a soft resin or rubber. The upper surface of the suction pad 22 protrudes slightly (projection length D) above the upper surface of the backup member 20.

The backup member 20 is connected to the rod of the cylinder 23 so as to be able to move up and down. When the rod 24 of the cylinder 23 projects and retracts, the backup member 20 moves up and down. That is, the cylinder 23 serves as a means for vertically moving the backup member 20. Each suction pad 22 is connected to a vacuum suction means 26 such as a vacuum pump through a tube 25.
It is connected to the. Backup member 20, cylinder 2
3 and the like are backup means for the carrier 1.

This work transport carrier positioning device has the above-described configuration, and the operation will be described next with reference to FIG. FIG. 3A shows a state in which the carrier 1 on which the work 2 is mounted has been conveyed between the guide rails 3 and 4. In this state, the upper surface of the carrier 1 is at the lowered position (conveying surface) L1, presses the clamp member 6 against one side end surface by the spring force of the spring material 7, and connects the other side end surface to the inner surface of the guide rail 3 (reference surface). The carrier 1 is elastically clamped from the left and right by being pressed against the surface 5 so that the carrier 1 is positioned in the lateral direction. As shown, the carrier 1 has a sled.

Next, as shown in FIG.
When the rod 24 protrudes, the backup member 20 rises, and the upper surface of the suction pad 22 is in close contact with the lower surface of the carrier 1 to vacuum-suction the carrier 1. In this state, the suction pad 22 is elastically deformed flat and its upper surface is flush or substantially flush with the upper surface of the backup member 20, and the upper surface of the backup member 20 contacts the lower surface of the carrier 1 to further mount the carrier 1. The workpiece 2 on the carrier 1 is pressed against the spring material 12 by pushing up to the surface L2. Mask member 1
The zero protrusion 16 is pressed against the upper surface of the carrier 1. Therefore, the warp of the carrier 1 is corrected, the carrier 1 becomes flat, and the work 2 is placed in a horizontal posture and firmly fixed. Therefore, the chip 32 vacuum-adsorbed to the nozzle 31 of the transfer head 30 of the mounting machine is mounted on the work 2. Note that a bond for bonding the chip 32 is applied on the work 2 in the previous step.

When the chips 32 are mounted on all the works 2, the rod 24 of the cylinder 23 is retracted, and the backup member 20 is lowered. Then, the suction pad 2
Since the carrier 2 is vacuum-sucked, the carrier 1 is forcibly lowered to the transport surface L1 against the clamping force of the clamp member 6 as the backup member 20 is lowered (FIG. 3C). Then, the vacuum suction state of the carrier 1 by the suction pad 22 is released, and the backup member 20 is further lowered to the position shown in FIG. 3A (FIG. 3C).
The carrier 1 is conveyed along the guide rails 3 and 4 to the next step. The carrier 1 released from the state of being pressed by the projections 16 is again warped.

(Embodiment 2) FIG. 4 is a partial cross-sectional view of a backup device of a work transport carrier positioning device according to Embodiment 2 of the present invention during a backup operation.
Both sides of the mask member 10 are provided with U-shaped brackets 40.
Are mounted with screws 13. The bracket 40 is connected to a rod 42 of a cylinder 41 as a vertical movement means.

The both sides of the carrier 1 have guide rails 43,
44. On the back of the guide rails 43 and 44, a vertical guide rail 4 on the front of the bracket 40 is provided.
5 is provided with a slider 46 which is slidably fitted. Therefore, when the rod 42 of the cylinder 41 projects and retracts, the mask member 10 moves up and down.

A backup member 4 is provided below the carrier 1.
7 are provided. The backup member 47 is connected to a rod 49 of a cylinder 48 as a vertical movement means. Therefore, when the rod 49 protrudes and retracts, the backup member 47 moves up and down.

Next, the operation will be described. As shown in FIG. 4A, when the carrier 1 is conveyed below the mask member 10, the backup member 47 rises and supports the carrier 1 from below. Further, the mask member 10 descends and the projection 1
6 is pressed against the upper surface of the carrier 1, and the warpage of the carrier 1 is corrected. The spring member 12 is pressed against the upper surface of the work 2 (FIG. 3B). Therefore, a chip is mounted on the work 2. When the chip is mounted, the mask member 10 goes up, and the backup member 47 goes down,
The carrier 1 is transported to the next step.

(Embodiment 3) FIG. 5 is a partial cross-sectional view of a work transporting carrier positioning apparatus according to Embodiment 3 of the present invention during a backup operation of a backup means.
In the present embodiment, the backup member 50 is fixed and supports the carrier 1 from below. Backup member 5
The right end of 0 is a guide rail 50a. Other configurations are the same as those of the second embodiment.

Next, the operation will be described. When the carrier 1 is transported between the guide rails 43 and 50a, the mask member 10 descends, the projection 16 is pressed against the upper surface of the carrier 1, and the warpage of the carrier 1 is corrected. Spring material 1
2 is pressed against the upper surface of the work 2. So work 2
The chip is mounted on top. Once the chip is mounted,
The mask member 10 is raised, and the carrier 1 is transported to the next step. As is clear from the above embodiments, the mask member 10 moves up and down relatively to the carrier 1 and presses the projection 16 against the upper surface of the carrier 1 to correct the warp of the carrier 1. Various operations such as mounting may be performed.

[0025]

According to the present invention, it is possible to correct the warpage of the carrier and to mount the chip on the carrier horizontally to correctly mount the chip. Further, the spring material of the mask member is pressed against the work mounted on the carrier, and the work can be firmly fixed, and then the chip can be mounted on the work. When the mounting of the chip on the work is completed, the carrier is vacuum-sucked by the suction pad to forcibly lower the carrier and can be conveyed to the next step.

[Brief description of the drawings]

FIG. 1 is a perspective view of a work transfer carrier positioning device according to a first embodiment of the present invention;

FIG. 2 is a cross-sectional view of a backup unit of the work transport carrier positioning device according to the first embodiment of the present invention;

FIG. 3 is a partial cross-sectional view of the work transporting carrier positioning device according to the first embodiment of the present invention during a backup operation of a backup unit.

FIG. 4 is a partial cross-sectional view of a backup device of a positioning device for a work transport carrier according to a second embodiment of the present invention during a backup operation;

FIG. 5 is a partial cross-sectional view of a backup device of a positioning device for a work carrier according to a third embodiment of the present invention during a backup operation;

FIG. 6 is a cross-sectional view of a conventional work transporting carrier positioning device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Carrier 2 Work 3, 4 Guide rail 6 Clamp member 7 Spring material 10 Mask member 11 Opening 12 Spring material 16 Pin 20 Backup member 22 Suction pad 23 Cylinder 26 Vacuum suction means

Continuation of the front page (58) Field surveyed (Int. Cl. ⁷ , DB name) H01L 21/52 H01L 21/58 B65G 43/00 H05K 13/04

Claims (3)

(57) [Claims] A guide rail for transporting a carrier on which a plurality of workpieces are mounted; a backup member disposed below the carrier on the guide rail to support the carrier; and a carrier disposed above the carrier. An opening for exposing the upper work is opened, and a mask member provided with a spring material for elastically pressing the work from above at an edge of the opening, and the mask member is vertically moved relative to the carrier. A work transport carrier positioning device, comprising: a vertical movement means for causing the carrier to protrude from a mask member; Wherein the upper surface is protruded upward from the upper surface of the backup member includes a suction pad made of elastic material mounted on the backup member, the upper the backup member relative to said carrier by said vertical movement means The spring pad is pressed against the upper surface of the workpiece by raising the suction pad to vacuum-suck the lower surface of the carrier, and pressing the upper surface of the backup member against the lower surface of the carrier to push up the spring member. 2. The apparatus according to claim 1, wherein the carrier is pressed against an upper surface of the carrier. 3. The apparatus according to claim 1, wherein said vertical movement means vertically moves said mask member with respect to said fixed backup member.