JP3350899B2 - Probe block support frame - Google Patents
Probe block support frameInfo
- Publication number
- JP3350899B2 JP3350899B2 JP24510499A JP24510499A JP3350899B2 JP 3350899 B2 JP3350899 B2 JP 3350899B2 JP 24510499 A JP24510499 A JP 24510499A JP 24510499 A JP24510499 A JP 24510499A JP 3350899 B2 JP3350899 B2 JP 3350899B2
- Authority
- JP
- Japan
- Prior art keywords
- frame plate
- horizontal frame
- vertical frame
- lower horizontal
- right vertical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 title claims description 67
- 238000007689 inspection Methods 0.000 claims description 30
- 239000004973 liquid crystal related substance Substances 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000010485 coping Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 244000144992 flock Species 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/88—Mounting, supporting, spacing, or insulating of electrodes or of electrode assemblies
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06705—Apparatus for holding or moving single probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Automatic Cycles, And Cycles In General (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は検査対象であるフラ
ットパネルディプレイの電極パッドに加圧接触する液晶
パネルに代表されるフラットパネルディスプレイの辺縁
部に配置された電極パッドに加圧接触する検査用プロー
ブブロックの支持枠に関する。The present invention relates to is inspected Hula
The present invention relates to a support frame of a probe block for inspection which comes into pressure contact with an electrode pad arranged on an edge portion of a flat panel display typified by a liquid crystal panel which comes into pressure contact with an electrode pad of a flat panel display.
【０００２】[0002]
【従来の技術】上記フラットパネルディスプレイの支持
枠及び検査用プローブブロックの支持枠は、何れも方形
枠体によって構成されており、図６Ａ，Ｂに示すよう
に、液晶パネルに代表されるフラットパネルディスプレ
イ７を支持した後方方形枠体１の前面側に検査用プロー
ブブロック８を支持した前方方形枠体１を配置し、後方
方形枠体１を前方方形枠体１に進退可に設け、同前進に
よってフラットパネルディスプレイ７の辺縁部に配置さ
れた電極パッド１０に検査用プローブブロック８の検査
プローブ９を加圧接触せしめ、又後方方形枠体１の後退
時にフラットパネルディスプレイ７の交換を行うように
している。2. Description of the Related Art Both the support frame of the flat panel display and the support frame of the inspection probe block are formed by rectangular frames. As shown in FIGS. 6A and 6B, a flat panel represented by a liquid crystal panel is used. The front rectangular frame 1 supporting the probe block 8 for inspection is arranged on the front side of the rear rectangular frame 1 supporting the display 7, and the rear rectangular frame 1 is provided on the front rectangular frame 1 so as to be able to advance and retreat. As a result, the inspection probe 9 of the inspection probe block 8 is brought into pressure contact with the electrode pad 10 arranged on the edge of the flat panel display 7, and the flat panel display 7 is replaced when the rear rectangular frame 1 is retracted. I have to.
【０００３】[0003]
【発明が解決しようとする課題】然るに従来はフラット
パネルディスプレイの大きさに応じた専用の前方枠体を
用意して検査用のプローブブロックを支持せしめるよう
にしている。Conventionally, however, a dedicated front frame corresponding to the size of a flat panel display is prepared to support a probe block for inspection.
【０００４】従って従来は大きさの異なるフラットパネ
ルディスプレイ毎にこれに適合する前方枠体を持った検
査装置を設備せねばならないか、又は前方枠体をフラッ
トパネルディスプレイの大きさに応じ交換できるように
互換性を持たせた構造にせねばならず、多大な設備負担
と高重量の枠体を交換する作業負担と検査作業の効率悪
化を招来していた。[0004] Thus conventionally exchanged depending either must be equipment inspection apparatus having a front side frame body conforming to the flat panel each display having different sizes, or a pre-side frame to the size of the flat panel display The structure must be compatible so as to be able to do so, resulting in a large facility burden, a heavy workload for replacing a heavy frame, and a decrease in the efficiency of inspection work.
【０００５】[0005]
【課題を解決するための手段】本発明は上記問題を適切
に解決し、１台の検査装置において大きさの異なるフラ
ットパネルディスプレイに適切に対応し得るプローブフ
ロックの支持枠体を提供するものである。SUMMARY OF THE INVENTION The present invention is to provide a probe flock support frame capable of appropriately solving the above-mentioned problems and appropriately coping with flat panel displays having different sizes in one inspection apparatus. is there.
【０００６】本発明はプローブブロックの支持枠体を形
成する上下横枠板と左右縦枠板とが各枠板一端の枠板に
対して単独で夫々縦移動又は横移動でき、且つ一緒に横
移動又は縦移動できるように組み立てて、各枠板で形成
する窓の拡大又は縮小を図る構成にすると共に、該拡大
又は縮小された窓に面する上下横枠板部と左右縦枠板部
とに上記フラットパネルディスプレイの辺縁部に配され
た電極パッドに加圧接触するプローブブロックを支持す
る構成とする。According to the present invention, the upper and lower horizontal frame plates and the left and right vertical frame plates forming the support frame of the probe block can be individually moved vertically or horizontally with respect to the frame plate at one end of each frame plate, and can be horizontally moved together. Assemble so that it can be moved or moved vertically, and the structure formed to enlarge or reduce the window formed by each frame plate, and the upper and lower horizontal frame plate portions and the left and right vertical frame plate portions facing the enlarged or reduced window. And a probe block that presses and contacts the electrode pads arranged on the periphery of the flat panel display.
【０００７】更に上記上下横枠板と左右縦枠板の両端に
位置決めピン又は位置決め孔を互いに等間隔に設け、該
位置決めピン又は位置決め孔にプローブブロックのホル
ダーたるベースの両端に設けた位置決め孔又は位置決め
ピンを挿入して上記上下横枠板と左右縦枠板とに一体に
且つ着脱可に取り付け、各ベースには上記拡大又は縮小
された窓の辺と対応する位置に複数のプローブブロック
を着脱可に取り付ける構成とした。Further, positioning pins or positioning holes are provided at equal intervals on both ends of the upper and lower horizontal frame plates and the left and right vertical frame plates , and the positioning pins or positioning holes are used to hold the probe block.
Positioning holes or positioning provided Zehnder serving base ends
Insert a pin to integrate the upper and lower horizontal frame and the left and right vertical frame
In addition, a plurality of probe blocks are detachably attached to each base at positions corresponding to the sides of the enlarged or reduced window.
【０００８】上記上下横枠板と左右縦枠板の縦移動と横
移動とによって、フラットパネルディスプレイの大きさ
に対応した検査用プローブ支持枠体を容易に形成でき、
これにより１台の検査装置を大きさの異なる各種フラッ
トパネルディスプレイに適合させることができ、極めて
経済的であって、検査作業の効率を向上する検査装置を
提供できる。By the vertical and horizontal movement of the upper and lower horizontal frame plates and the left and right vertical frame plates, an inspection probe support frame corresponding to the size of the flat panel display can be easily formed.
As a result, one inspection apparatus can be adapted to various flat panel displays having different sizes, so that an inspection apparatus which is extremely economical and improves the efficiency of inspection work can be provided.
【０００９】[0009]
【発明の実施の形態】以下本発明の各実施形態例を図１
乃至図７に基づいて説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG.
7 will be described with reference to FIG.
【００１０】＜後方方形支持枠体の構造例＞（ 図１Ａ，Ｂ及び図６，
図７参照） <Structural Example of Rear Rectangular Supporting Frame> ( FIGS. 1A and 1B and FIG. 6)
(See Fig. 7)
【００１１】１は検査対象である液晶パネルに代表され
るフラットパネルディスプレイ７を支持する方形支持枠
体である。Reference numeral 1 denotes a rectangular support frame for supporting a flat panel display 7 typified by a liquid crystal panel to be inspected.
【００１２】上記方形支持枠体１は右縦枠板５に対して
単独で縦移動し且つ左縦枠板４の縦移動と一緒に縦移動
する上横枠板２と、左縦枠板４に対し単独で縦移動し且
つ右縦枠板５の縦移動と一緒に縦移動する下横枠板３
と、上横枠板２に対して単独で横移動し且つ下横枠板３
の横移動と一緒に横移動する左縦枠板４と、下横枠板３
に対して単独で横移動し且つ上横枠板２の横移動と一緒
に横移動する右縦枠板５とから組み立てられている。The rectangular support frame 1 vertically moves independently of the right vertical frame plate 5 and vertically moves together with the vertical movement of the left vertical frame plate 4; , The lower horizontal frame plate 3 which moves vertically independently and vertically moves together with the vertical movement of the right vertical frame plate 5.
And the lower horizontal frame plate 3 is moved laterally alone with respect to the upper horizontal frame plate 2 and
Left vertical frame plate 4 that moves horizontally with the horizontal movement of
And the right vertical frame plate 5 which moves laterally alone and together with the lateral movement of the upper horizontal frame plate 2.
【００１３】上記上下横枠板２，３と左右縦枠板４，５
の上記縦移動と横移動とにより上記上下横枠板２，３と
左右縦枠板４，５で画成される窓６を拡大又は縮小し、
該拡大又は縮小された窓６に面する上下横枠板２，３部
と左右縦枠板４，５部とに上記フラットパネルディスプ
レイ７を支持する。The upper and lower horizontal frame plates 2 and 3 and the left and right vertical frame plates 4 and 5
The window 6 defined by the upper and lower horizontal frame plates 2 and 3 and the left and right vertical frame plates 4 and 5 is enlarged or reduced by the vertical and horizontal movements of
The flat panel display 7 is supported by upper and lower horizontal frame plates 2 and 3 facing the enlarged or reduced window 6 and left and right vertical frame plates 4 and 5.
【００１４】上記上横枠板２と右縦枠板５間は上横枠板
２の単独縦移動を案内し且つ上横枠板２と右縦枠板５と
を追随して横移動せしめるように連結する。Between the upper horizontal frame plate 2 and the right vertical frame plate 5, the vertical movement of the upper horizontal frame plate 2 is guided independently, and the upper horizontal frame plate 2 and the right vertical frame plate 5 are horizontally moved following the same. Connect to
【００１５】以下同様に、上記左縦枠板４と上横枠板２
間は左縦枠板４の単独横移動を案内し且つ左縦枠板４と
上横枠板２とを追随して縦移動せしめるように連結し、
上記下横枠板３と左縦枠板４間は下横枠板３の単独縦移
動を案内し且つ下横枠板３と左縦枠板４とを追随して横
移動せしめるように連結し、上記右縦枠板５と下横枠板
３間は右縦枠板５の単独横移動を案内し且つ右縦枠板５
と下横枠板３とを追随して縦移動せしめるように連結す
る。Similarly, the left vertical frame plate 4 and the upper horizontal frame plate 2
During the interval, the left vertical frame plate 4 is guided so as to be independently moved horizontally, and the left vertical frame plate 4 and the upper horizontal frame plate 2 are connected so as to follow and vertically move,
The lower horizontal frame plate 3 and the left vertical frame plate 4 are connected so as to guide the vertical movement of the lower horizontal frame plate 3 independently and to move the lower horizontal frame plate 3 and the left vertical frame plate 4 to follow and move horizontally. Between the right vertical frame plate 5 and the lower horizontal frame plate 3 to guide the horizontal movement of the right vertical frame plate 5 independently,
And the lower horizontal frame plate 3 are connected so as to follow and move vertically.
【００１６】上記連結機構は例えば図７に示される。図
示のように、上横枠板２の一端を右縦枠板５の内面に当
接し、以下同様に左縦枠板４の一端を上横枠板２の内面
に当接し、下横枠板３の一端を左縦枠板４の内面に当接
し、右縦枠板５の一端を下横枠板３の内面に当接する。
そして各当接部において上記連結機構を形成する。The connecting mechanism is shown in FIG. 7, for example. As shown in the drawing, one end of the upper horizontal frame plate 2 abuts on the inner surface of the right vertical frame plate 5, and similarly, one end of the left vertical frame plate 4 abuts on the inner surface of the upper horizontal frame plate 2. 3 is in contact with the inner surface of the left vertical frame plate 4, and one end of the right vertical frame plate 5 is in contact with the inner surface of the lower horizontal frame plate 3.
Then, the connecting mechanism is formed at each contact portion.
【００１７】上記連結機構の具体例として、上下横枠板
２，３と左右縦枠板４，５の夫々の内面に沿い該内面で
開口するガイド溝１１を形成し、他方この内面に当接す
る上記各枠板２，３，４，５の端部に上記各ガイド溝１
１にキー結合する突起１２を形成し、該各突起１２を各
ガイド溝１１に滑合する（キー結合する）。As a specific example of the connection mechanism, a guide groove 11 is formed along the inner surface of each of the upper and lower horizontal frame plates 2 and 3 and the left and right vertical frame plates 4 and 5 and is opened at the inner surface. Each of the guide grooves 1 is provided at an end of each of the frame plates 2, 3, 4, and 5.
A projection 12 for key connection is formed on each of the guide grooves 1 and each projection 12 is slid into each guide groove 11 (key connection).
【００１８】これによって上横枠板２は右縦枠板５に対
し単独で縦移動し、且つ右縦枠板５と一緒に横移動可能
である。As a result, the upper horizontal frame plate 2 can vertically move independently of the right vertical frame plate 5 and can move horizontally together with the right vertical frame plate 5.
【００１９】同様に左縦枠板４は上横枠板２に対し単独
で横移動し、且つ上横枠板２と一緒に縦移動可能であ
り、下横枠板３は左縦枠板４に対し単独で縦移動し、且
つ左縦枠板４と一緒に横移動可能であり、右縦枠板５は
下横枠板３に対し単独で横移動し、且つ下横枠板３と一
緒に縦移動可能である。よって上記窓６を拡大又は縮小
する。Similarly, the left vertical frame plate 4 can move horizontally independently of the upper horizontal frame plate 2 and can move vertically together with the upper horizontal frame plate 2. And the right vertical frame plate 5 can move independently with respect to the lower horizontal frame plate 3 and can move horizontally with the left horizontal frame plate 3 independently. Can be moved vertically. Therefore, the window 6 is enlarged or reduced.
【００２０】上記各枠板２，３，４，５の表面にはその
略全長に亘りサクション装置に接続される多数の吸引孔
１３を設け、上記拡大又は縮小された窓６に面する上下
横枠板２，３部表面と左右縦枠板４，５部表面に上記吸
引孔１３によりフラットパネルディスプレイ７の周縁部
を吸着支持する。A large number of suction holes 13 connected to the suction device are provided on the surface of each of the frame plates 2, 3, 4, and 5 over substantially the entire length thereof, and the upper and lower sides facing the enlarged or reduced window 6 are provided. The peripheral portions of the flat panel display 7 are sucked and supported by the suction holes 13 on the surfaces of the frame plates 2 and 3 and the left and right vertical frame plates 4 and 5.
【００２１】図６Ａ，Ｂに示すように、各プローブブロ
ック８は多数のプローブ９を有し、各プローブ９の先端
を各電極パッド１０の表面に加圧接触する。As shown in FIGS. 6A and 6B, each probe block 8 has a large number of probes 9, and the tip of each probe 9 is brought into pressure contact with the surface of each electrode pad 10.
【００２２】 ＜前方方形支持枠体の構造例＞（図２Ａ，Ｂ及び図５乃
至図７参照）< Example of Structure of Front Rectangular Supporting Frame > (See FIGS. 2A and 2B and FIGS. 5 to 7)
【００２３】１は検査用プローブブロック８を支持する
方形支持枠体である。Reference numeral 1 denotes a rectangular support frame for supporting the inspection probe block 8.
【００２４】上記方形支持枠体１は右縦枠板５に対して
単独で縦移動し且つ左縦枠板４の縦移動と一緒に縦移動
する上横枠板２と、左縦枠板４に対し単独で縦移動し且
つ右縦枠板５の縦移動と一緒に縦移動する下横枠板３
と、上横枠板２に対して単独で横移動し且つ下横枠板３
の横移動と一緒に横移動する左縦枠板４と、下横枠板３
に対して単独で横移動し且つ上横枠板２の横移動と一緒
に横移動する右縦枠板５とから組み立てられている。The rectangular support frame 1 vertically moves independently of the right vertical frame plate 5 and moves vertically together with the vertical movement of the left vertical frame plate 4; , The lower horizontal frame plate 3 which moves vertically independently and vertically moves together with the vertical movement of the right vertical frame plate 5.
And the lower horizontal frame plate 3 is moved laterally alone with respect to the upper horizontal frame plate 2 and
Left vertical frame plate 4 that moves horizontally with the horizontal movement of
And the right vertical frame plate 5 which moves laterally alone and moves together with the lateral movement of the upper horizontal frame plate 2.
【００２５】上記上下横枠板２，３と左右縦枠板４，５
の上記縦移動と横移動とにより上記上下横枠板２，３と
左右縦枠板４，５で画成される窓６を拡大又は縮小し、
該拡大又は縮小された窓６に面する上下横枠板２，３部
と左右縦枠板４，５部とにフラットパネルディスプレイ
７の周縁部に配された多数の電極パッド１０に加圧接触
するプローブブロック８を支持する。The upper and lower horizontal frame plates 2 and 3 and the left and right vertical frame plates 4 and 5
The window 6 defined by the upper and lower horizontal frame plates 2 and 3 and the left and right vertical frame plates 4 and 5 is enlarged or reduced by the vertical and horizontal movements of
The upper and lower horizontal frame plates 2 and 3 facing the enlarged or reduced window 6 and the left and right vertical frame plates 4 and 5 are in pressure contact with a large number of electrode pads 10 arranged on the periphery of the flat panel display 7. The probe block 8 is supported.
【００２６】図６に示すように、各プローブブロック８
は多数のプローブ９を有し、各プローブ９の先端を各電
極パッド１０の表面に加圧接触する。As shown in FIG. 6, each probe block 8
Has many probes 9, and the tip of each probe 9 is brought into pressure contact with the surface of each electrode pad 10.
【００２７】上記上横枠板２と右縦枠板５間は上横枠板
２の単独縦移動を案内し且つ上横枠板２と右縦枠板５と
を追随して横移動せしめるように連結する。Between the upper horizontal frame plate 2 and the right vertical frame plate 5, the vertical movement of the upper horizontal frame plate 2 is guided independently, and the upper horizontal frame plate 2 and the right vertical frame plate 5 are horizontally moved following the upper horizontal frame plate 2. Connect to
【００２８】以下同様に、上記左縦枠板４と上横枠板２
間は左縦枠板４の単独横移動を案内し且つ左縦枠板４と
上横枠板２とを追随して縦移動せしめるように連結し、
上記下横枠板３と左縦枠板４間は下横枠板３の単独縦移
動を案内し且つ下横枠板３と左縦枠板４とを追随して横
移動せしめるように連結し、上記右縦枠板５と下横枠板
３間は右縦枠板５の単独横移動を案内し且つ右縦枠板５
と下横枠板３とを追随して縦移動せしめるように連結す
る。Similarly, the left vertical frame plate 4 and the upper horizontal frame plate 2
During the interval, the left vertical frame plate 4 is guided so as to be independently moved horizontally, and the left vertical frame plate 4 and the upper horizontal frame plate 2 are connected so as to follow and vertically move,
The lower horizontal frame plate 3 and the left vertical frame plate 4 are connected so as to guide the vertical movement of the lower horizontal frame plate 3 independently and to move the lower horizontal frame plate 3 and the left vertical frame plate 4 to follow and move horizontally. Between the right vertical frame plate 5 and the lower horizontal frame plate 3 to guide the horizontal movement of the right vertical frame plate 5 independently,
And the lower horizontal frame plate 3 are connected so as to follow and move vertically.
【００２９】上記連結機構は例えば図７に示される。図
示のように、上横枠板２の一端を右縦枠板５の内面に当
接し、以下同様に左縦枠板４の一端を上横枠板２の内面
に当接し、下横枠板３の一端を左縦枠板４の内面に当接
し、右縦枠板５の一端を下横枠板３の内面に当接する。
そして各当接部において上記連結機構を形成する。The connection mechanism is shown in FIG. 7, for example. As shown in the drawing, one end of the upper horizontal frame plate 2 abuts on the inner surface of the right vertical frame plate 5, and similarly, one end of the left vertical frame plate 4 abuts on the inner surface of the upper horizontal frame plate 2. 3 is in contact with the inner surface of the left vertical frame plate 4, and one end of the right vertical frame plate 5 is in contact with the inner surface of the lower horizontal frame plate 3.
Then, the connecting mechanism is formed at each contact portion.
【００３０】上記連結機構の具体例として、上下横枠板
２，３と左右縦枠板４，５の夫々の内面に沿い該内面で
開口するガイド溝１１を形成し、他方この内面に当接す
る上記各枠板２，３，４，５の端部に上記各ガイド溝１
１にキー結合する突起１２を形成し、該各突起１２を各
ガイド溝１１に滑合する（キー結合する）。As a specific example of the connecting mechanism, guide grooves 11 are formed along the inner surfaces of the upper and lower horizontal frame plates 2 and 3 and the left and right vertical frame plates 4 and 5 and open at the inner surfaces, and contact the other inner surfaces. Each of the guide grooves 1 is provided at an end of each of the frame plates 2, 3, 4, and 5.
A projection 12 for key connection is formed on each of the guide grooves 1 and each projection 12 is slid into each guide groove 11 (key connection).
【００３１】これによって上横枠板２は右縦枠板５に対
し単独で縦移動し、且つ右縦枠板５と一緒に横移動可能
である。Thus, the upper horizontal frame plate 2 can vertically move independently of the right vertical frame plate 5 and can move horizontally together with the right vertical frame plate 5.
【００３２】同様に左縦枠板４は上横枠板２に対し単独
で横移動し、且つ上横枠板２と一緒に縦移動可能であ
り、下横枠板３は左縦枠板４に対し単独で縦移動し、且
つ左縦枠板４と一緒に横移動可能であり、右縦枠板５は
下横枠板３に対し単独で横移動し、且つ下横枠板３と一
緒に縦移動可能である。よって上記窓６を拡大又は縮小
する。Similarly, the left vertical frame plate 4 can move independently and horizontally with respect to the upper horizontal frame plate 2 and can move vertically together with the upper horizontal frame plate 2. And the right vertical frame plate 5 can move independently with respect to the lower horizontal frame plate 3 and can move horizontally with the left horizontal frame plate 3 independently. Can be moved vertically. Therefore, the window 6 is enlarged or reduced.
【００３３】上記各枠板２，３，４，５は互いに等長に
し、該等長の各枠板２，３，４，５の表面にはその両端
に位置決めピン又は位置決め孔１４を夫々各枠板毎に互
いに等間隔で立設する。Each of the frame plates 2, 3, 4, and 5 is made equal in length, and positioning pins or positioning holes 14 are provided at both ends of the surface of each of the frame plates 2, 3, 4, and 5 having the same length. The frames are erected at regular intervals.
【００３４】他方図５に示すように、プローブブロック
８のホルダーとして、等長の長さを有する複数のベース
１５を形成し、各ベース１５に上記拡大窓６の辺又は縮
小窓６の辺と対応する位置に複数のプローブブロック８
を着脱可に取り付けたプローブユニット１６Ａ，Ｂ，Ｃ
を準備する。On the other hand, as shown in FIG. 5, a plurality of bases 15 having the same length are formed as holders for the probe block 8, and each base 15 is provided with a side of the enlarged window 6 or a side of the reduced window 6. Multiple probe blocks 8 at corresponding positions
Units 16A, B, and C with detachably attached probe units
Prepare
【００３５】これらのプローブユニット１６Ａ，Ｂ，Ｃ
を上記拡大窓６又は縮小窓６に応じて選択し、上記各枠
板２，３，４，５の位置決めピン又は位置決め孔１４に
プローブブロック８のホルダーたるベース１５の両端に
設けた位置決めピン又は位置 決め孔１４を挿入し、上記
上下横枠板２，３と左右縦枠板４，５とに一体に且つ着
脱可に取り付ける。よってプローブブロック８はホルダ
ーたるベース１５を介して各枠板２，３，４，５に取り
付け支持される。These probe units 16A, B, C
Is selected according to the enlargement window 6 or the reduction window 6, and the positioning pins or the positioning holes 14 of the frame plates 2, 3, 4, 5 are selected.
At both ends of the base 15 which is the holder of the probe block 8
Insert the positioning pins or positioning holes 14 provided, the
The upper and lower horizontal frame plates 2 and 3 and the left and right vertical frame plates 4 and 5 are integrally and detachably attached. Therefore, the probe block 8 is mounted and supported on each of the frame plates 2, 3, 4, and 5 via the base 15 serving as a holder.
【００３６】図６Ａ，Ｂに示すように、上記フラットパ
ネルディスプレイ７の支持枠体１及び検査用プローブブ
ロックの支持枠体１は、何れも方形枠体によって構成さ
れており、液晶パネルに代表されるフラットパネルディ
スプレイ７を支持した後方方形枠体１の前面側に検査用
プローブブロック８を支持した前方方形枠体１を配置
し、後方方形枠体１を前方方形枠体１に進退可に設け、
同前進によってフラットパネルディスプレイ７の辺縁部
に配置された電極パッド１０に検査用プローブブロック
８の検査プローブ９を加圧接触せしめ、又後方方形枠体
１の後退時にフラットパネルディスプレイ７の交換を行
うようにしている。As shown in FIGS. 6A and 6B, the support frame 1 of the flat panel display 7 and the support frame 1 of the inspection probe block are both formed by rectangular frames, and are represented by liquid crystal panels. A front rectangular frame 1 supporting an inspection probe block 8 is disposed on the front side of a rear rectangular frame 1 supporting a flat panel display 7, and the rear rectangular frame 1 is provided on the front rectangular frame 1 so as to be able to advance and retreat. ,
By the forward movement, the inspection probe 9 of the inspection probe block 8 is brought into pressure contact with the electrode pad 10 arranged on the edge of the flat panel display 7, and the flat panel display 7 is replaced when the rear rectangular frame 1 is retracted. I'm trying to do it.
【００３７】又は前方方形枠体１の窓６を拡大して、前
方方形枠体１の前方から該拡大窓６を通して後方方形枠
体１上へのフラットパネルディスプレイ７の交換を行
う。この場合は後方方形枠体１を進退可に設けなくても
良い。Alternatively, the window 6 of the front rectangular frame 1 is enlarged, and the flat panel display 7 is exchanged from the front of the front rectangular frame 1 to the rear rectangular frame 1 through the enlarged window 6. In this case, the rear rectangular frame 1 does not have to be provided so as to be able to advance and retreat.
【００３８】 ＜後方方形支持枠体の他の構造例＞（図３Ａ，Ｂ及び図
６，図７参照）< Another Example of Structure of Rear Rectangular Supporting Frame > (See FIGS. 3A and 3B and FIGS. 6 and 7)
【００３９】１は検査対象である液晶パネルに代表され
るフラットパネルディスプレイ７を支持する方形支持枠
体である。Reference numeral 1 denotes a rectangular support frame for supporting a flat panel display 7 typified by a liquid crystal panel to be inspected.
【００４０】上記方形支持枠体１が左縦枠板４に対して
単独で縦移動し且つ右縦枠板５の縦移動と一緒に縦移動
する上横枠板２と、右縦枠板５に対し単独で縦移動し且
つ左縦枠板４の縦移動と一緒に縦移動する下横枠板３
と、下横枠板３に対して単独で横移動し且つ上横枠板２
の横移動と一緒に横移動する左縦枠板４と、上横枠板２
に対して単独で横移動し且つ下横枠板３の横移動と一緒
に横移動する右縦枠板５とから組み立てられている。The upper horizontal frame plate 2 and the right vertical frame plate 5 in which the rectangular support frame 1 moves vertically independently of the left vertical frame plate 4 and moves vertically together with the vertical movement of the right vertical frame plate 5. The lower horizontal frame plate 3 which vertically moves alone and vertically moves together with the vertical movement of the left vertical frame plate 4
And the upper horizontal frame plate 2 is moved independently of the lower horizontal frame plate 3
Left vertical frame plate 4 that moves horizontally with the horizontal movement of
And the right vertical frame plate 5 which moves laterally alone and moves together with the lateral movement of the lower horizontal frame plate 3.
【００４１】上記上下横枠板２，３と左右縦枠板４，５
の上記縦移動と横移動とにより上記上下横枠板２，３と
左右縦枠板４，５で画成される窓６を拡大又は縮小し、
該拡大又は縮小された窓６に面する上下横枠板２，３部
と左右縦枠板４，５部とに上記フラットパネルディスプ
レイ７を支持する。The upper and lower horizontal frame plates 2 and 3 and the left and right vertical frame plates 4 and 5
The window 6 defined by the upper and lower horizontal frame plates 2 and 3 and the left and right vertical frame plates 4 and 5 is enlarged or reduced by the vertical and horizontal movements of
The flat panel display 7 is supported by upper and lower horizontal frame plates 2 and 3 facing the enlarged or reduced window 6 and left and right vertical frame plates 4 and 5.
【００４２】上記上横枠板２と左縦枠板４間は上横枠板
２の単独縦移動を案内し且つ上横枠板２と左縦枠板４と
を追随して横移動せしめるように連結する。Between the upper horizontal frame plate 2 and the left vertical frame plate 4, the vertical movement of the upper horizontal frame plate 2 is guided independently, and the upper horizontal frame plate 2 and the left vertical frame plate 4 are horizontally moved following the vertical horizontal frame plate 2. Connect to
【００４３】以下同様に、上記右縦枠板５と上横枠板２
間は右縦枠板５の単独横移動を案内し且つ右縦枠板５と
上横枠板２とを追随して縦移動せしめるように連結し、
上記下横枠板３と右縦枠板５間は下横枠板３の単独縦移
動を案内し且つ下横枠板３と右縦枠板５とを追随して横
移動せしめるように連結し、上記左縦枠板４と下横枠板
３間は左縦枠板４の単独横移動を案内し且つ左縦枠板４
と下横枠板３とを追随して縦移動せしめるように連結す
る。Similarly, the right vertical frame plate 5 and the upper horizontal frame plate 2
The space between the right vertical frame plate 5 and the upper horizontal frame plate 2 is guided so as to guide the horizontal movement of the right vertical frame plate 5 independently, and the right vertical frame plate 5 and the upper horizontal frame plate 2 are connected so as to move vertically.
The lower horizontal frame plate 3 and the right vertical frame plate 5 are connected so as to guide the vertical movement of the lower horizontal frame plate 3 independently and to move the lower horizontal frame plate 3 and the right vertical frame plate 5 to follow the horizontal movement. Between the left vertical frame plate 4 and the lower horizontal frame plate 3 to guide the horizontal movement of the left vertical frame plate 4 independently, and
And the lower horizontal frame plate 3 are connected so as to follow and move vertically.
【００４４】上記連結機構は例えば図７に示される。図
示のように、上横枠板２の一端を右縦枠板５の内面に当
接し、以下同様に左縦枠板４の一端を上横枠板２の内面
に当接し、下横枠板３の一端を左縦枠板４の内面に当接
し、右縦枠板５の一端を下横枠板３の内面に当接する。
そして各当接部において上記連結機構を形成する。The connecting mechanism is shown, for example, in FIG. As shown in the drawing, one end of the upper horizontal frame plate 2 abuts on the inner surface of the right vertical frame plate 5, and similarly, one end of the left vertical frame plate 4 abuts on the inner surface of the upper horizontal frame plate 2. 3 is in contact with the inner surface of the left vertical frame plate 4, and one end of the right vertical frame plate 5 is in contact with the inner surface of the lower horizontal frame plate 3.
Then, the connecting mechanism is formed at each contact portion.
【００４５】上記連結機構の具体例として、上下横枠板
２，３と左右縦枠板４，５の夫々の内面に沿い該内面で
開口するガイド溝１１を形成し、他方この内面に当接す
る上記各枠板２，３，４，５の端部に上記各ガイド溝１
１にキー結合する突起１２を形成し、該各突起１２を各
ガイド溝１１に滑合する（キー結合する）。As a specific example of the connecting mechanism, a guide groove 11 is formed along the inner surface of each of the upper and lower horizontal frame plates 2 and 3 and the left and right vertical frame plates 4 and 5 and opened at the inner surface. Each of the guide grooves 1 is provided at an end of each of the frame plates 2, 3, 4, and 5.
A projection 12 for key connection is formed on each of the guide grooves 1 and each projection 12 is slid into each guide groove 11 (key connection).
【００４６】これによって上横枠板２は右縦枠板５に対
し単独で縦移動し、且つ右縦枠板５と一緒に横移動可能
である。Thus, the upper horizontal frame plate 2 can vertically move independently of the right vertical frame plate 5 and can move horizontally together with the right vertical frame plate 5.
【００４７】同様に左縦枠板４は上横枠板２に対し単独
で横移動し、且つ上横枠板２と一緒に縦移動可能であ
り、下横枠板３は左縦枠板４に対し単独で縦移動し、且
つ左縦枠板４と一緒に横移動可能であり、右縦枠板５は
下横枠板３に対し単独で横移動し、且つ下横枠板３と一
緒に縦移動可能である。よって上記窓６を拡大又は縮小
する。Similarly, the left vertical frame plate 4 can move independently of the upper horizontal frame plate 2 and can move vertically together with the upper horizontal frame plate 2. And the right vertical frame plate 5 can move independently with respect to the lower horizontal frame plate 3 and can move horizontally with the left horizontal frame plate 3 independently. Can be moved vertically. Therefore, the window 6 is enlarged or reduced.
【００４８】上記各枠板２，３，４，５の表面にはその
略全長に亘りサクション装置に接続される多数の吸引孔
１３を設け、上記拡大又は縮小された窓６に面する上下
横枠板２，３部表面と左右縦枠板４，５部表面に上記吸
引孔１３によりフラットパネルディスプレイ７の周縁部
を吸着支持する。A large number of suction holes 13 connected to the suction device are provided on the surface of each of the frame plates 2, 3, 4, and 5 over substantially the entire length thereof. The peripheral portions of the flat panel display 7 are sucked and supported by the suction holes 13 on the surfaces of the frame plates 2 and 3 and the left and right vertical frame plates 4 and 5.
【００４９】図６Ａ，Ｂに示すように、各プローブブロ
ック８は多数のプローブ９を有し、各プローブ９の先端
を各電極パッド１０の表面に加圧接触する。As shown in FIGS. 6A and 6B, each probe block 8 has a large number of probes 9, and the tip of each probe 9 comes into pressure contact with the surface of each electrode pad 10.
【００５０】 ＜前方方形支持枠体の他の構造例＞（図４Ａ，Ｂ及び図
５乃至図７参照）< Other Examples of Structure of Front Rectangular Supporting Frame > (See FIGS. 4A and 4B and FIGS. 5 to 7)
【００５１】１は検査用プローブブロック８を支持する
方形支持枠体である。Reference numeral 1 denotes a rectangular support frame for supporting the inspection probe block 8.
【００５２】上記方形支持枠体１が左縦枠板４に対して
単独で縦移動し且つ右縦枠板５の縦移動と一緒に縦移動
する上横枠板２と、右縦枠板５に対し単独で縦移動し且
つ左縦枠板４の縦移動と一緒に縦移動する下横枠板３
と、下横枠板３に対して単独で横移動し且つ上横枠板２
の横移動と一緒に横移動する左縦枠板４と、上横枠板２
に対して単独で横移動し且つ下横枠板３の横移動と一緒
に横移動する右縦枠板５とから組み立てられている。The upper horizontal frame plate 2 and the right vertical frame plate 5 in which the rectangular support frame 1 vertically moves independently with respect to the left vertical frame plate 4 and moves vertically together with the vertical movement of the right vertical frame plate 5. The lower horizontal frame plate 3 which vertically moves alone and vertically moves together with the vertical movement of the left vertical frame plate 4
And the upper horizontal frame plate 2 is moved independently of the lower horizontal frame plate 3
Left vertical frame plate 4 that moves horizontally with the horizontal movement of
And the right vertical frame plate 5 which moves laterally alone and moves together with the lateral movement of the lower horizontal frame plate 3.
【００５３】上記上下横枠板２，３と左右縦枠板４，５
の上記縦移動と横移動とにより上記上下横枠板２，３と
左右縦枠板４，５で画成される窓６を拡大又は縮小し、
該拡大又は縮小された窓６に面する上下横枠板２，３部
と左右縦枠板４，５部とにフラットパネルディスプレイ
７の周縁部に配された多数の電極パッド１０に加圧接触
するプローブブロック８を支持する。The upper and lower horizontal frame plates 2 and 3 and the left and right vertical frame plates 4 and 5
The window 6 defined by the upper and lower horizontal frame plates 2 and 3 and the left and right vertical frame plates 4 and 5 is enlarged or reduced by the vertical and horizontal movements of
The upper and lower horizontal frame plates 2 and 3 facing the enlarged or reduced window 6 and the left and right vertical frame plates 4 and 5 are in pressure contact with a large number of electrode pads 10 arranged on the periphery of the flat panel display 7. The probe block 8 is supported.
【００５４】図６に示すように、各プローブブロック８
は多数のプローブ９を有し、各プローブ９の先端を各電
極パッド１０の表面に加圧接触する。As shown in FIG. 6, each probe block 8
Has many probes 9, and the tip of each probe 9 is brought into pressure contact with the surface of each electrode pad 10.
【００５５】上記上横枠板２と左縦枠板４間は上横枠板
２の単独縦移動を案内し且つ上横枠板２と左縦枠板４と
を追随して横移動せしめるように連結する。Between the upper horizontal frame plate 2 and the left vertical frame plate 4, the vertical movement of the upper horizontal frame plate 2 is guided independently, and the upper horizontal frame plate 2 and the left vertical frame plate 4 are horizontally moved following. Connect to
【００５６】以下同様に、上記右縦枠板５と上横枠板２
間は右縦枠板５の単独横移動を案内し且つ右縦枠板５と
上横枠板２とを追随して縦移動せしめるように連結し、
上記下横枠板３と右縦枠板５間は下横枠板３の単独縦移
動を案内し且つ下横枠板３と右縦枠板５とを追随して横
移動せしめるように連結し、上記左縦枠板４と下横枠板
３間は左縦枠板４の単独横移動を案内し且つ左縦枠板４
と下横枠板３とを追随して縦移動せしめるように連結す
る。Similarly, the right vertical frame plate 5 and the upper horizontal frame plate 2
The space between the right vertical frame plate 5 and the upper horizontal frame plate 2 is guided so as to guide the horizontal movement of the right vertical frame plate 5 independently, and the right vertical frame plate 5 and the upper horizontal frame plate 2 are connected so as to move vertically.
The lower horizontal frame plate 3 and the right vertical frame plate 5 are connected so as to guide the vertical movement of the lower horizontal frame plate 3 independently and to move the lower horizontal frame plate 3 and the right vertical frame plate 5 to follow the horizontal movement. Between the left vertical frame plate 4 and the lower horizontal frame plate 3 to guide the horizontal movement of the left vertical frame plate 4 independently, and
And the lower horizontal frame plate 3 are connected so as to follow and move vertically.
【００５７】上記連結機構は例えば図７に示される。図
示のように、上横枠板２の一端を右縦枠板５の内面に当
接し、以下同様に左縦枠板４の一端を上横枠板２の内面
に当接し、下横枠板３の一端を左縦枠板４の内面に当接
し、右縦枠板５の一端を下横枠板３の内面に当接する。
そして各当接部において上記連結機構を形成する。The connecting mechanism is shown in FIG. 7, for example. As shown in the drawing, one end of the upper horizontal frame plate 2 abuts on the inner surface of the right vertical frame plate 5, and similarly, one end of the left vertical frame plate 4 abuts on the inner surface of the upper horizontal frame plate 2. 3 is in contact with the inner surface of the left vertical frame plate 4, and one end of the right vertical frame plate 5 is in contact with the inner surface of the lower horizontal frame plate 3.
Then, the connecting mechanism is formed at each contact portion.
【００５８】上記連結機構の具体例として、上下横枠板
２，３と左右縦枠板４，５の夫々の内面に沿い該内面で
開口するガイド溝１１を形成し、他方この内面に当接す
る上記各枠板２，３，４，５の端部に上記各ガイド溝１
１にキー結合する突起１２を形成し、該各突起１２を各
ガイド溝１１に滑合する（キー結合する）。As a specific example of the connecting mechanism, a guide groove 11 is formed along the inner surface of each of the upper and lower horizontal frame plates 2 and 3 and the left and right vertical frame plates 4 and 5 and opened at the inner surface, and the other is in contact with the inner surface. Each of the guide grooves 1 is provided at an end of each of the frame plates 2, 3, 4, and 5.
A projection 12 for key connection is formed on each of the guide grooves 1 and each projection 12 is slid into each guide groove 11 (key connection).
【００５９】これによって上横枠板２は右縦枠板５に対
し単独で縦移動し、且つ右縦枠板５と一緒に横移動可能
である。As a result, the upper horizontal frame plate 2 can vertically move independently of the right vertical frame plate 5 and can move horizontally together with the right vertical frame plate 5.
【００６０】同様に左縦枠板４は上横枠板２に対し単独
で横移動し、且つ上横枠板２と一緒に縦移動可能であ
り、下横枠板３は左縦枠板４に対し単独で縦移動し、且
つ左縦枠板４と一緒に横移動可能であり、右縦枠板５は
下横枠板３に対し単独で横移動し、且つ下横枠板３と一
緒に縦移動可能である。よって上記窓６を拡大又は縮小
する。Similarly, the left vertical frame plate 4 can move independently of the upper horizontal frame plate 2 and can move vertically together with the upper horizontal frame plate 2. And the right vertical frame plate 5 can move independently with respect to the lower horizontal frame plate 3 and can move horizontally with the left horizontal frame plate 3 independently. Can be moved vertically. Therefore, the window 6 is enlarged or reduced.
【００６１】上記各枠板２，３，４，５は互いに等長に
し、該等長の各枠板２，３，４，５の表面にはその両端
に位置決めピン又は位置決め孔１４を夫々各枠板毎に互
いに等間隔で立設する。Each of the frame plates 2, 3, 4, 5 is made equal in length, and positioning pins or positioning holes 14 are provided at both ends of the surface of each of the frame plates 2, 3, 4, 5 having the same length. The frames are erected at regular intervals.
【００６２】他方図５に示すように、プローブブロック
８のホルダーとして、等長の長さを有する複数のベース
１５を形成し、各ベース１５に上記拡大窓６の辺又は縮
小窓６の辺と対応する位置に複数のプローブブロック８
を着脱可に取り付けたプローブユニット１６Ａ，Ｂ，Ｃ
を準備する。On the other hand, as shown in FIG. 5, a plurality of bases 15 having the same length are formed as holders for the probe block 8, and each base 15 is provided with a side of the enlarged window 6 or a side of the reduced window 6. Multiple probe blocks 8 at corresponding positions
Units 16A, B, and C with detachably attached probe units
Prepare
【００６３】これらのプローブユニット１６Ａ，Ｂ，Ｃ
を上記拡大窓６又は縮小窓６に応じて選択し、上記各枠
板２，３，４，５の位置決めピン又は位置決め孔１４に
挿入し、一体に且つ着脱可に取り付ける。よってプロー
ブブロック８はホルダーたるベース１５を介して各枠板
２，３，４，５に取り付け支持される。The probe units 16A, B, C
Is selected according to the enlargement window 6 or the reduction window 6, and inserted into the positioning pins or the positioning holes 14 of the frame plates 2, 3, 4, 5 to be integrally and detachably attached. Therefore, the probe block 8 is mounted and supported on each of the frame plates 2, 3, 4, and 5 via the base 15 serving as a holder.
【００６４】図６Ａ，Ｂに示すように、上記フラットパ
ネルディスプレイ７の支持枠体１及び検査用プローブブ
ロックの支持枠体１は、何れも方形枠体によって構成さ
れており、液晶パネルに代表されるフラットパネルディ
スプレイ７を支持した後方方形枠体１の前面側に検査用
プローブブロック８を支持した前方方形枠体１を配置
し、後方方形枠体１を前方方形枠体１に進退可に設け、
同前進によってフラットパネルディスプレイ７の辺縁部
に配置された電極パッド１０に検査用プローブブロック
８の検査プローブ９を加圧接触せしめ、又後方方形枠体
１の後退時にフラットパネルディスプレイ７の交換を行
うようにしている。As shown in FIGS. 6A and 6B, the support frame 1 of the flat panel display 7 and the support frame 1 of the inspection probe block are both formed by rectangular frames, and are represented by liquid crystal panels. A front rectangular frame 1 supporting an inspection probe block 8 is disposed on the front side of a rear rectangular frame 1 supporting a flat panel display 7, and the rear rectangular frame 1 is provided on the front rectangular frame 1 so as to be able to advance and retreat. ,
By the forward movement, the inspection probe 9 of the inspection probe block 8 is brought into pressure contact with the electrode pad 10 arranged on the edge of the flat panel display 7, and the flat panel display 7 is replaced when the rear rectangular frame 1 is retracted. I'm trying to do it.
【００６５】又は前方方形枠体１の窓６を拡大して、前
方方形枠体１の前方から該拡大窓６を通して後方方形枠
体１上へのフラットパネルディスプレイ７の交換を行
う。この場合は後方方形枠体１を進退可に設けなくても
良い。Alternatively, the window 6 of the front rectangular frame 1 is enlarged, and the flat panel display 7 is exchanged from the front of the front rectangular frame 1 to the rear rectangular frame 1 through the enlarged window 6. In this case, the rear rectangular frame 1 does not have to be provided so as to be able to advance and retreat.
【００６６】即ち上記第１乃至第４実施形態例において
は、検査用プローブブロック８を支持する枠板２，３，
４，５から成る方形支持枠体１の背面側に、フラットパ
ネルディスプレイ７を支持する枠板２，３，４，５から
成る方形支持枠体１を配し、フラットパネルディスプレ
イ７を支持する背面側の方形支持枠体１の窓６の背後に
照光手段を設け、該照光手段により窓６を通してフラッ
トパネルディスプレイ７を照光し、これにより前面の方
形支持枠体１の窓６を通して電極パッド１０とプローブ
９の接触状態を照光観察しつつ検査を実行する。That is, in the first to fourth embodiments, the frame plates 2, 3, 3
On the back side of the rectangular supporting frame 1 made of 4, 5, the rectangular supporting frame 1 made of frame plates 2, 3, 4, 5 supporting the flat panel display 7 is arranged, and the back surface supporting the flat panel display 7 is arranged. An illuminating means is provided behind the window 6 of the rectangular support frame 1 on the side, and the flat panel display 7 is illuminated through the window 6 by the illuminating means. The inspection is performed while illuminating and observing the contact state of the probe 9.
【００６７】[0067]
【発明の効果】本発明によれば、上記上下横枠板と左右
縦枠板の縦移動と横移動とによって、フラットパネルデ
ィスプレイの大きさに対応した検査用プローブ支持枠体
を容易に形成でき、これにより１台の検査装置を大きさ
の異なる各種フラットパネルディスプレイに適合させる
ことができ、極めて経済的であって、検査作業の効率を
向上することができる。According to the present invention, an inspection probe support frame corresponding to the size of a flat panel display can be easily formed by vertical and horizontal movement of the upper and lower horizontal frame plates and the left and right vertical frame plates. Thereby, one inspection apparatus can be adapted to various flat panel displays having different sizes, which is extremely economical and can improve the efficiency of the inspection work.
【図１】Ａ，Ｂはフラットパネルディスプレイの支持枠
体の拡大と縮小状態を示す正面図。FIGS. 1A and 1B are front views showing an enlarged and reduced state of a support frame of a flat panel display. FIGS.
【図２】Ａ，Ｂはプローブブロックの支持枠体の拡大と
縮小状態を示す正面図。FIGS. 2A and 2B are front views showing an enlarged and reduced state of a support frame of a probe block.
【図３】Ａ，Ｂはフラットパネルディスプレイの支持枠
体の他例を拡大と縮小状態を以って示す正面図。FIGS. 3A and 3B are front views showing another example of a support frame of a flat panel display in an enlarged and reduced state.
【図４】Ａ，Ｂはプローブブロックの支持枠体の他例を
拡大と縮小状態を以って示す正面図。FIGS. 4A and 4B are front views showing another example of a support frame of a probe block in an enlarged and reduced state.
【図５】プローブユニットの各例を示す平面図。FIG. 5 is a plan view showing each example of a probe unit.
【図６】プローブブロックを支持する方形枠体とフラッ
トパネルディスプレイを支持する方形枠体とによって形
成される検査装置を接触前（Ａ図）と接触後（Ｂ図）を
以って示す断面図。FIG. 6 is a sectional view showing an inspection device formed by a rectangular frame supporting a probe block and a rectangular frame supporting a flat panel display, before (FIG. A) and after (FIG. B) contact; .
【図７】各枠板相互の連結機構を示す拡大断面図。FIG. 7 is an enlarged cross-sectional view showing a coupling mechanism of the respective frame plates.
１ 支持枠体 ２ 上横枠板 ３ 下横枠板 ４ 左縦枠板 ５ 右縦枠板 ６ 窓 ７ フラットパネルディスプレイ ８ プローブブロック ９ プローブ １０ 電極パッド １１ ガイド溝 １２ 突起 １３ 吸引孔 １４ 位置決めピン又は位置決め孔 １５ ベース １６Ａ プローブユニット １６Ｂ プローブユニット １６Ｃ プローブユニット DESCRIPTION OF SYMBOLS 1 Support frame 2 Upper horizontal frame plate 3 Lower horizontal frame plate 4 Left vertical frame plate 5 Right vertical frame plate 6 Window 7 Flat panel display 8 Probe block 9 Probe 10 Electrode pad 11 Guide groove 12 Projection 13 Suction hole 14 Positioning pin or Positioning hole 15 Base 16A Probe unit 16B Probe unit 16C Probe unit
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平９−229965（ＪＰ，Ａ) 特開 平11−40302（ＪＰ，Ａ) 特開 平８−78122（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) G01M 11/00 G01R 1/06 G01R 31/00 G01R 31/28 G02F 1/13 101 G09F 9/00 352 G09G 3/20 670 H01J 9/42 ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-9-229965 (JP, A) JP-A-11-40302 (JP, A) JP-A 8-78122 (JP, A) (58) Field (Int.Cl. 7 , DB name) G01M 11/00 G01R 1/06 G01R 31/00 G01R 31/28 G02F 1/13 101 G09F 9/00 352 G09G 3/20 670 H01J 9/42
Claims (2)
の電極パッドに加圧接触する検査用のプローブロックを
支持する方形支持枠体であって、該方形支持枠体が右縦
枠板に対して単独で縦移動し且つ左縦枠板の縦移動と一
緒に縦移動する上横枠板と、左縦枠板に対し単独で縦移
動し且つ右縦枠板の縦移動と一緒に縦移動する下横枠板
と、上横枠板に対して単独で横移動し且つ下横枠板の横
移動と一緒に横移動する左縦枠板と、下横枠板に対して
単独で横移動し且つ上横枠板の横移動と一緒に横移動す
る右縦枠板とから組み立てられ、上記上下横枠板と左右
縦枠板の上記縦移動と横移動とにより上記上下横枠板と
左右縦枠板で画成される窓を拡大又は縮小する構成と
し、更に上記上下横枠板と左右縦枠板の両端に位置決め
ピン又は位置決め孔を互いに等間隔に設け、該位置決め
ピン又は位置決め孔にプローブブロックのホルダーたる
ベースの両端に設けた位置決め孔又は位置決めピンを挿
入して上記上下横枠板と左右縦枠板とに一体に且つ着脱
可に取り付け、各ベースには上記拡大又は縮小された窓
の辺と対応する位置に複数のプローブブロックを着脱可
に取り付ける構成としたことを特徴とするプローブブロ
ックの支持枠体。1. A flat panel display to be inspected
A rectangular support frame for supporting a probe lock for inspection that comes into pressure contact with the electrode pad of claim 1, wherein the rectangular support frame vertically moves independently with respect to the right vertical frame plate and the vertical movement of the left vertical frame plate. The upper horizontal frame plate that moves vertically together with the lower horizontal frame plate, the lower horizontal frame plate that vertically moves alone with respect to the left vertical frame plate, and moves vertically with the vertical movement of the right vertical frame plate, and the upper horizontal frame plate A left vertical frame plate that moves alone and moves along with the horizontal shift of the lower horizontal frame plate, and a left mover that moves independently of the lower horizontal frame plate and moves together with the horizontal move of the upper horizontal frame plate The vertical and horizontal frame plates are assembled from the right and left vertical frame plates, and the vertical and horizontal movements of the upper and lower horizontal frame plates are used to enlarge or reduce a window defined by the upper and lower horizontal frame plates and the left and right vertical frame plates. configuration and then, further equally spaced from each other a positioning pin or positioning holes on both ends of the left and right vertical frame plate and said upper and lower transverse frame plate, the positioning pins or positioning holes Interpolation positioning holes or positioning pins provided on the holder serving <br/> based both ends of the probe block
Into the upper and lower horizontal frame plate and the left and right vertical frame plate, and detachably attached to each base. A plurality of probe blocks are detachably attached to each base at positions corresponding to the sides of the enlarged or reduced window. A support frame for a probe block, wherein the support frame has a configuration.
の電極パッドに加圧接触する検査用のプローブロックを
支持する方形支持枠体であって、該方形支持枠体が左縦
枠板に対して単独で縦移動し且つ右縦枠板の縦移動と一
緒に縦移動する上横枠板と、右縦枠板に対し単独で縦移
動し且つ左縦枠板の縦移動と一緒に縦移動する下横枠板
と、下横枠板に対して単独で横移動し且つ上横枠板の横
移動と一緒に横移動する左縦枠板と、上横枠板に対して
単独で横移動し且つ下横枠板の横移動と一緒に横移動す
る右縦枠板とから組み立てられ、上記上下横枠板と左右
縦枠板の上記縦移動と横移動とにより上記上下横枠板と
左右縦枠板で画成される窓を拡大又は縮小する構成と
し、更に上記上下横枠板と左右縦枠板の両端に位置決め
ピン又は位置決め孔を互いに等間隔に設け、該位置決め
ピン又は位置決め孔にプローブブロックのホルダーたる
ベースの両端に設けた位置決め孔又は位置決 めピンを挿
入して上記上下横枠板と左右縦枠板とに一体に且つ着脱
可に取り付け、各ベースには上記拡大又は縮小された窓
の辺と対応する位置に複数のプローブブロックを着脱可
に取り付ける構成としたことを特徴とするプローブブロ
ックの支持枠体。2. A flat panel display to be inspected.
A rectangular support frame that supports a probe lock for inspection that comes into pressure contact with the electrode pad of the above, wherein the rectangular support frame vertically moves independently with respect to the left vertical frame plate and the vertical movement of the right vertical frame plate. With respect to the upper horizontal frame plate that moves vertically together with the lower horizontal frame plate that vertically moves independently of the right vertical frame plate and moves vertically with the vertical movement of the left vertical frame plate, A left vertical frame plate that moves alone and moves along with the upper horizontal frame plate, and a left mover that moves independently with respect to the upper horizontal frame plate and moves together with the lower horizontal frame plate The vertical and horizontal frame plates are assembled from the right and left vertical frame plates, and the vertical and horizontal movements of the upper and lower horizontal frame plates are used to enlarge or reduce a window defined by the upper and lower horizontal frame plates and the left and right vertical frame plates. configuration and then, further equally spaced from each other a positioning pin or positioning holes on both ends of the left and right vertical frame plate and said upper and lower transverse frame plate, the positioning pins or positioning holes Interpolation positioning holes or Positioning pins provided on the holder serving <br/> based both ends of the probe block
Into the upper and lower horizontal frame plate and the left and right vertical frame plate, and detachably attached to each base. A plurality of probe blocks are detachably attached to each base at positions corresponding to the sides of the enlarged or reduced window. A support frame for a probe block, wherein the support frame has a configuration.
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24510499A JP3350899B2 (en) | 1999-08-31 | 1999-08-31 | Probe block support frame |
| TW089107918A TW459140B (en) | 1999-08-31 | 2000-04-26 | Flat panel display or probe block support framework |
| EP00303804A EP1081497A3 (en) | 1999-08-31 | 2000-05-05 | Flat panel display support framework |
| US09/566,010 US6450469B1 (en) | 1999-08-31 | 2000-05-05 | Flat panel display or probe block support framework |
| KR1020000024824A KR20010020825A (en) | 1999-08-31 | 2000-05-10 | Flat panel display or probe block support framework |
| CNB001179705A CN1145066C (en) | 1999-08-31 | 2000-06-06 | Support frame for flat panel displays or probe blocks |
| IT2000TO000817A IT1320603B1 (en) | 1999-08-31 | 2000-08-25 | MOTORCYCLE. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24510499A JP3350899B2 (en) | 1999-08-31 | 1999-08-31 | Probe block support frame |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002196452A Division JP3816031B2 (en) | 2002-07-04 | 2002-07-04 | Inspection device for flat panel display |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001074599A JP2001074599A (en) | 2001-03-23 |
| JP3350899B2 true JP3350899B2 (en) | 2002-11-25 |
Family
ID=17128684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24510499A Expired - Lifetime JP3350899B2 (en) | 1999-08-31 | 1999-08-31 | Probe block support frame |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6450469B1 (en) |
| EP (1) | EP1081497A3 (en) |
| JP (1) | JP3350899B2 (en) |
| KR (1) | KR20010020825A (en) |
| CN (1) | CN1145066C (en) |
| IT (1) | IT1320603B1 (en) |
| TW (1) | TW459140B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102486904A (en) * | 2010-12-03 | 2012-06-06 | 纬创资通股份有限公司 | Flat panel display without plastic frame structure |
Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7073768B2 (en) * | 2002-07-12 | 2006-07-11 | John Piscovich | Device and method for setting a frame |
| JP3457938B2 (en) * | 2000-10-16 | 2003-10-20 | 株式会社双晶テック | Method of replacing display board or circuit board in display board or circuit board inspection apparatus |
| TW509329U (en) * | 2001-04-19 | 2002-11-01 | Hannstar Display Corp | Electrified rack |
| KR20020091691A (en) * | 2001-05-31 | 2002-12-06 | 주식회사 현대 디스플레이 테크놀로지 | Liquid crystal display test frame |
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- 1999-08-31 JP JP24510499A patent/JP3350899B2/en not_active Expired - Lifetime
-
2000
- 2000-04-26 TW TW089107918A patent/TW459140B/en not_active IP Right Cessation
- 2000-05-05 EP EP00303804A patent/EP1081497A3/en not_active Withdrawn
- 2000-05-05 US US09/566,010 patent/US6450469B1/en not_active Expired - Fee Related
- 2000-05-10 KR KR1020000024824A patent/KR20010020825A/en not_active Withdrawn
- 2000-06-06 CN CNB001179705A patent/CN1145066C/en not_active Expired - Lifetime
- 2000-08-25 IT IT2000TO000817A patent/IT1320603B1/en active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102486904A (en) * | 2010-12-03 | 2012-06-06 | 纬创资通股份有限公司 | Flat panel display without plastic frame structure |
| CN102486904B (en) * | 2010-12-03 | 2013-07-03 | 纬创资通股份有限公司 | Flat panel display without rubber frame structure |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001074599A (en) | 2001-03-23 |
| US6450469B1 (en) | 2002-09-17 |
| CN1145066C (en) | 2004-04-07 |
| CN1291728A (en) | 2001-04-18 |
| ITTO20000817A0 (en) | 2000-08-25 |
| KR20010020825A (en) | 2001-03-15 |
| ITTO20000817A1 (en) | 2002-02-25 |
| EP1081497A3 (en) | 2004-05-12 |
| EP1081497A2 (en) | 2001-03-07 |
| TW459140B (en) | 2001-10-11 |
| IT1320603B1 (en) | 2003-12-10 |
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